CN103904551A - Free electron laser resonant cavity - Google Patents

Free electron laser resonant cavity Download PDF

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CN103904551A
CN103904551A CN201210575290.3A CN201210575290A CN103904551A CN 103904551 A CN103904551 A CN 103904551A CN 201210575290 A CN201210575290 A CN 201210575290A CN 103904551 A CN103904551 A CN 103904551A
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module
chamber
free electron
optical alignment
mirror
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CN103904551B (en
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杨晶
左军卫
许祖彦
彭钦军
王志敏
李小青
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Technical Institute of Physics and Chemistry of CAS
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Technical Institute of Physics and Chemistry of CAS
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Abstract

The invention relates to the technical field of laser devices and laser equipment, in particular to a free electron laser resonant cavity capable of automatically adjusting the stability of output power. The invention collects the laser information output by the free electron laser in real time through the photoelectric detection module, the control module combines the output laser information and feeds back the control cavity length adjusting module and the optical alignment adjusting module to respectively adjust the cavity length of the resonant cavity and the optical alignment; because the closed-loop control adjustment is respectively carried out on the unstable factors of the cavity length and the optical alignment with different degrees of freedom, the deviation of the cavity length and the imbalance of the optical alignment are stabilized in a certain range, so that the unstable factors can be effectively weakened or eliminated, the stability of the output power of the free electron laser is ensured, and the practicability of the free electron laser is further enhanced.

Description

Free electron laser resonant cavity
Technical field
The present invention relates to Laser Devices and laser equipment technical field, be specifically related to a kind of free electron laser resonant cavity of regulation output power stability automatically.
Background technology
Due to free electron laser (FEL, Free-electron Laser) output wavelength can realize continuous tuning by the energy that regulates free electron bundle group, tuning facility makes it can select different output wavelengths to meet the application demand of different occasions, and the electromagnetic wave that can realize from Terahertz to hard X ray covers.Free electron laser all has great using value at ambits such as physics, chemistry, material, information, life, resource environments, and has promoted the development of multidisciplinary intersection and forward position light source technology.Because the gain media of FEL is the free electron with the running of dipped beam speed in vacuum environment, beam quality is not subject to the impact of the thermal effect of conventional high power laser light gain media, be easy to realize the Laser output of high-average power, high light beam quality, in industrial have irreplaceable effect same with national defence field simultaneously.But because FEL device is huge, system complex, therefore the factor that affects its output power stability is also more, mainly comprises: unstable, the variation of cavity length of unstable, the Electron Beam Quality of electronic beam current intensity and misalignment of resonant cavity mirror etc.These unsteadiness are for the application of free electron laser, especially the impact of the application in the time that average power is higher is very remarkable, for example, FEL device power output of the prior art even can be down to zero energy output from ten kilowatts under the impact of these destabilizing factors; As shown in fig. 1, in the situation that chamber length changes tens of microns, power output is down to zero energy very soon by maximum.
At present, in the above-mentioned various factors that affects stability, free electron beam intensity and quality can be optimized by optimizing electron gun and accelerator; But the unsteadiness factor such as variation and resonant cavity mirror misalignment of eliminating or weaken the cavity length that external environment causes relies on the reliability of Machine Design self to realize substantially, for example, be placed on damped platform or other earthquake isolating equipments or optimal design parameter are installed, making off resonance sensitivity of resonant cavity etc.; But in running, the nearly concentric cavity structure misalignment sensitivity adopting due to FEL resonant cavity is higher, and therefore, the chamber journey by raft down the Yangtze River that the factor such as misalignment and temperature of the chamber mirror that external disturbance causes causes moves the fluctuation that all can cause power; Because ectocine is not single, between the factors such as change of cavity length, chamber mirror misalignment, there is the relation that intercouples, the variation of each factor all can cause the unstable of power stage, cannot judge it is by the caused power fluctuation of which kind of degree of freedom, thereby bring great difficulty for stablizing the closed-loop control of exporting.Therefore,, even if adopt ACTIVE CONTROL, also only limit to utilize stepping translation stage to carry out the adjusting of chamber length and mirror center, chamber, and these are all the preconditioning before Output of laser.
The resonant cavity stability of the active adjustment control free electron laser for how in system running, does not still have good solution at present; Therefore, a kind of can urgently providing by the free electron laser resonant cavity of automatic regulation output power stability in running.
Summary of the invention
(1) technical problem that will solve
The object of the present invention is to provide a kind of can be in running the free electron laser resonant cavity of regulation output power stability automatically, for the destabilizing factor of closed-loop control free electron laser running, ensure the stable output of laser, strengthen the practicality of free electron laser.
(2) technical scheme
Technical solution of the present invention is as follows:
A kind of free electron laser resonant cavity, comprises chamber mirror module and the output coupling mirror module of nearly homocentric setting, from described output coupling mirror module Output of laser light beam; In described laser beam light path, be provided with photodetection module, described photodetection module link control module, described control module is the long adjustment module of connection chamber and optical alignment adjustment module respectively, and the long adjustment module in described chamber and optical alignment adjustment module are connected with described chamber mirror module respectively;
The long adjustment module of laser beam information FEEDBACK CONTROL chamber and optical alignment adjustment module that described control module reception photodetection module detects are carried out respectively the long adjusting of resonator and optical alignment adjusting.
Preferably, described photodetection module is included in the beam splitter and the photodetector that in described laser beam light path, arrange in turn.
Preferably, described photodetector response speed is less than free electron laser repetition rate.
Preferably, described control module comprises the signal source, multiplier, low pass filter, proportion integration differentiation device, signal gain device, adder and the signal driver that connect in turn.
Preferably, described signal source provides three tunnel reference signals and three roads to drive signal; Described three roads drive the frequency of signal to meet the demands: three is less than photodetector bandwidth; Three is relatively prime; Arbitrarily both differences and and value be not equal to the third party, the third party's integral multiple and the third party's divider ratio.
Preferably, described chamber mirror module comprises the chamber mirror being arranged on fixing mirror holder, and the long adjustment module in described chamber comprises the piezoelectric ceramic actuator that is arranged at the mirror back side, described chamber.
Preferably, be provided with the two-dimensional adjustment knob that regulates chamber mirror level and vertical position on described fixing mirror holder, described optical alignment adjustment module comprises the multiple piezoelectric ceramic actuators that are connected with described two-dimensional adjustment knob.
Preferably, the long adjustment module in described chamber also comprises the long coarse adjustment unit, chamber being connected with described control module; Long coarse adjustment unit, described chamber comprises the long stepping translation stage that regulates in the chamber being connected with described chamber mirror module.
Preferably, described optical alignment adjustment module also comprises the optical alignment coarse adjustment unit being connected with described control module; Described optical alignment coarse adjustment unit comprises the Level tune stepping translation stage being connected with described chamber mirror module respectively and vertically regulates stepping translation stage.
Preferably, described chamber mirror module comprises distorting lens, and described distorting lens is by the distorting lens drive unit drives being connected with described control module; Described photodetection module comprises the wave front detector being arranged in described laser beam light path, and the long adjustment module in described chamber and optical alignment adjustment module all comprise described distorting lens driver element; The wavefront information that described control module reception wave front detector detects is also controlled distorting lens driver element auxiliary regulating cavity length and optical alignment.
(3) beneficial effect
The present invention is by photodetection module Real-time Collection free electron laser Output of laser information, and control module is in conjunction with the long adjustment module of Output of laser information FEEDBACK CONTROL chamber and optical alignment adjustment module is carried out respectively the long adjusting of resonator and optical alignment regulates; Owing to carrying out respectively closed-loop control adjusting for the destabilizing factor of chamber length and two different degrees of freedom of optical alignment simultaneously, make chamber long depart from and the imbalance of optical alignment stable within the specific limits, therefore can effectively weaken or eliminate destabilizing factor, ensure the stability of free electron laser power output, and then strengthen the practicality of free electron laser.
Brief description of the drawings
Fig. 1 is free electron laser Output of laser relative intensity and change of cavity length relation curve schematic diagram;
Fig. 2 is a kind of free electron laser resonant cavity module schematic diagram of the present invention;
Fig. 3 is a kind of free electron laser cavity resonator structure schematic diagram of the present invention;
Fig. 4 is control module structured flowchart in Fig. 3;
Fig. 5 is another kind of free electron laser cavity resonator structure schematic diagram of the present invention;
Fig. 6 is control module structured flowchart in Fig. 5.
In figure, 1: photodetection module; 2: control module; 3: the long adjustment module in chamber; 4: optical alignment adjustment module; 5: chamber mirror module; 6: output coupling mirror module; 7: undulator; 8: free electron bundle group; 9: deflecting magnet; 102: photodetector; 103: wave front detector; 200: signal source; 201: phase shifter; 202: multiplier; 203: low pass filter; 204: proportion integration differentiation device; 205: signal gain device; 206: adder; 207: signal driver; 208: wavefront control unit.
Embodiment
Below in conjunction with drawings and Examples, the embodiment of invention is described further.Following examples are only for the present invention is described, but are not used for limiting the scope of the invention.
A kind of free electron laser resonant cavity of the present invention, mainly comprise chamber mirror module and the output coupling mirror module of nearly homocentric setting, in the laser beam light path of output coupling mirror module output, be provided with photodetection module, photodetection module link control module, control module is the long adjustment module of connection chamber and optical alignment adjustment module respectively, and the long adjustment module in chamber and optical alignment adjustment module are connected with chamber mirror module respectively; The long adjustment module of laser beam information FEEDBACK CONTROL chamber that control module reception photodetection module detects and optical alignment adjustment module carry out respectively the long adjusting of resonator and optical alignment regulates.
Embodiment mono-
A kind of free electron laser resonant cavity as shown in Fig. 2, Fig. 3 and Fig. 4, comprises chamber mirror module 5 and the output coupling mirror module 6 of nearly homocentric setting; Chamber mirror module 5 comprises the chamber mirror being arranged on fixing mirror holder, and chamber mirror substrate can adopt single entirety or distorting lens structure; Reflective surface can be speculum (the direct polishing in metal surface) or dielectric film mirror (on the surface of optical glass, plate one deck dielectric film by vacuum coating, make the optical element of incident light reflection) etc., its deielectric-coating high reflection mirror for being coated with in the substrate of monoblock fused quartz in this enforcement; On fixing mirror holder, be provided with the two-dimensional adjustment knob that regulates chamber mirror level and vertical position; Output coupling mirror module 6 comprises output coupling mirror etc., and in this example, output coupling mirror is for adopting HfO 2the part output coupling mirror of plated film, its matrix adopts fused quartz; Free electron bundle group 8 is via injecting the optical resonator being made up of high reflection mirror and output coupling mirror after deflecting magnet 9 deflections; When free electron bundle group 8 passes through undulator 7, produce stimulated radiation, in this example, undulator 7 is plane undulator; Finally, from output coupling mirror Output of laser light beam; In the present embodiment, free electron laser each several part setting parameter is as follows: chamber long (distance between high reflection mirror and output coupling mirror) is 8.000m, chamber curvature radius is 4.250m, the g factor of chamber mirror is-0.88, chamber mirror optical alignment sensitivity is 84 μ rad, free electron bundle group energy is 98MeV, repetition rate is 75MHz, bundle group width is 2ps, the undulator cycle is 5.3cm, number of cycles is 25, and undulator parameter aw is 1.12, and chamber is long, and to control tolerance limit (power while being down to 90% peak strength by peak value corresponding change of cavity length scope) be 7 μ m.
In the Output of laser beam path of above-mentioned output coupling mirror module, be provided with photodetection module 1; In the present embodiment, photodetection module 1 is included in laser beam light path the beam splitter that arranges in turn and the photodetector 102 of high-speed response; Wherein, beam splitter can be the 45 degree high reflection mirrors of 1.6 μ m, and the laser light signal that can separate small part enters photodetector 102, ensures to enter in the dynamic range that the light signal of photodetector 102 surveys at photodetector 102 simultaneously; Photodetector response speed is less than free electron laser repetition rate, and preferred, photodetector response speed is not more than in free electron laser repetition rate 1/10th; Its material can comprise one or more in silicon, germanium, indium GaAs, indium antimonide, aluminum gallium nitride, lithopone, lead telluride, lead tin telluride or mercury cadmium telluride etc., its working temperature can be in room temperature or until within the scope of liquid nitrogen temperature, these are all in order to obtain better noise control; Photodetector material in the present embodiment is indium GaAs, can respond the variation of 1.6 microns of power outputs, and its three dB bandwidth frequency is 7.5MHz, and the output coupling efficiency of output coupling mirror is 10%.
Above-mentioned photodetection module 1 is connected with control module 2, and in the present embodiment, control module 2 comprises signal source 200, multiplier 202, low pass filter 203, proportion integration differentiation device 204, signal gain device 205, adder 206 and the signal driver 207 etc. that connect in turn; Wherein, signal source 200 provides three tunnel different modulating frequency reference signals and three roads to drive signal; Three tunnel reference signals are respectively as axial motion and chamber mirror level, standard signal that vertically degree of freedom regulates; Three roads drive the frequency of signal to meet the demands: three is less than the bandwidth of photodetector; Three is relatively prime; Arbitrarily both differences and and value be not equal to the third party, the third party's integral multiple and the third party's divider ratio; Further, in order to obtain more excellent control effect, three is preferably less than 1/10th of photodetector bandwidth; The present embodiment Zhong tri-road driving signal frequencies are respectively: 10141Hz, 13259Hz, 16871Hz.Or control module 2 comprises signal source 200, phase shifter 201, multiplier 202, low pass filter 203, proportion integration differentiation device 204, signal gain device 205, adder 206 and the signal driver 207 etc. that connect in turn; Wherein, signal source 200 provides the driving signal of three tunnel different modulating frequencies, processes rear section be converted into three tunnel reference signals through phase shifter 201; Photodetector 102 changes the light signal detecting to transfer the signal of telecommunication to and input into multiplier 202, multiplier 202 receives the signal of telecommunication of reference signal and input simultaneously, two paths of signals is multiplied each other, the signal obtaining inputs to low pass filter 203, in the present embodiment, the integration time constant of low pass filter 203 is 1ms, obtain difference frequency signal, then input to successively proportion integration differentiation device (PID, Proportional Integral Derivative) 204 and signal gain device 205 be further processed, obtain error controling signal; Adder 206Jiang tri-roads drive the error controling signal stack after treatment of signal Yu San road, signal after stack obtains three tunnel feedback control signal outputs after signal driver 207 is processed, and is respectively used to the long adjustment module 3 of control chamber and optical alignment adjustment module 4.
Above-mentioned control module 2 is the long adjustment module 3 of connection chamber and optical alignment adjustment module 4 respectively, and the long adjustment module 3 in chamber and optical alignment adjustment module 4 are connected with chamber mirror module 5 respectively; Wherein, the long adjustment module 3 in chamber comprises the piezoelectric ceramic actuator that is arranged at the high reflection mirror back side, and piezoelectric ceramic actuator receives the axial control signal of signal driver 207, realizes the long fine setting in chamber by the deformation of self, its stroke is 60 μ m, and closed-loop control precision is 1.2nm; Optical alignment adjustment module 4 comprises two piezoelectric ceramic actuators that are connected with two-dimensional adjustment knob, two piezoelectric ceramic actuators receive respectively level, the vertical control signal that signal driver 207 is exported, the optical alignment that carries out chamber mirror by the shape control two-dimensional adjustment knob of self regulates, its closed-loop control precision is 2.4 microradians, much smaller than the alignment-tolerance of 85 microradians, meet this system alignment requirement.After adjusting completes, make the state of resonant cavity in resonance, laser pulse comes and goes the time interval or its integral multiple that time of one week equals electron beam group in chamber.
Embodiment bis-
Chamber mirror module and output coupling mirror modular structure in this enforcement are identical with embodiment mono-, wherein, free electron laser each several part setting parameter is as follows: chamber long (distance between high reflection mirror and output coupling mirror) is 32.000m, chamber curvature radius is 16.800m, the g factor of chamber mirror is-0.905, chamber mirror optical alignment sensitivity is 12.5 μ rad, free electron bundle group energy is 183MeV, repetition rate is 37.5MHz, bundle group width is 3ps, the undulator cycle is 2.6cm, number of cycles is 80, undulator parameter aw is 0.95, undulator centre-to-centre spacing output coupling mirror is apart from 16.000m, chamber is long, and to control tolerance limit (power while being down to 90% peak strength by peak value corresponding change of cavity length scope) be 11 μ m, the output coupling efficiency of output coupling mirror is 10%.
Photodetection module is included in laser beam light path the beam splitter that arranges in turn and the photodetector of high-speed response; Wherein, the 45 degree high reflection mirrors that beam splitter is 193nm, photodetector material is indium GaAs, can respond 193 nanometers and change, its three dB bandwidth frequency is 3.75MHz.
Control module is identical with embodiment mono-.The present embodiment Zhong tri-road driving signal frequencies are respectively: 10529Hz, 13523Hz, 16901Hz, the integration time constant of low pass filter 203 is 1ms.Control module is the long adjustment module of connection chamber and optical alignment adjustment module respectively, and the long adjustment module in chamber and optical alignment adjustment module are connected with chamber mirror module respectively; The long adjustment module in chamber comprises long coarse adjustment unit, the chamber being connected with control module respectively and the long fine-adjusting unit in chamber; Long coarse adjustment unit, chamber comprises the long stepping translation stage that regulates in the chamber being connected with chamber mirror module; Stepping translation stage stroke range can reach tens of millimeters to hundreds of millimeters, the long axial control signal that regulates stepping translation stage to receive signal driver output in chamber, and actuator chamber mirror moves vertically, realizes the long coarse adjustment in chamber, and control precision reaches micron order; The long fine-adjusting unit in chamber comprises the piezoelectric ceramic actuator that is arranged at the high reflection mirror back side, piezoelectric ceramic actuator receives the axial control signal of signal driver, realize the long fine setting in chamber by the deformation of self, surge motion control stroke is 60 μ m, and closed-loop control precision is 1.2nm.Optical alignment adjustment module comprises the optical alignment coarse adjustment unit and the optical alignment fine-adjusting unit that are connected with control module respectively; Optical alignment coarse adjustment unit comprises the Level tune stepping translation stage being connected with chamber mirror module respectively and vertically regulates stepping translation stage, Level tune stepping translation stage receives the horizontal control signal of signal driver output, the motion of actuator chamber mirror along continuous straight runs, vertically regulate stepping translation stage to receive the vertical control signal of signal driver output, the motion vertically of actuator chamber mirror, coordinate the coarse adjustment that realizes optical alignment, control precision reaches micron order; Optical alignment fine-adjusting unit comprises two piezoelectric ceramic actuators that are connected with two-dimensional adjustment knob, two piezoelectric ceramic actuators receive respectively the level of signal driver output, vertical control signal, carry out the optical alignment fine setting of chamber mirror by the shape control two-dimensional adjustment knob of self, its control precision is 0.5 microradian, much smaller than the alignment-tolerance of 12.5 microradians, meet this system alignment requirement.
Embodiment tri-
Chamber mirror module 5 in this enforcement, as shown in Fig. 5 and Fig. 6, comprises a pair of chamber mirror, and the chamber mirror in the present embodiment is distorting lens, for improving output stability and the beam quality when the high-average power; Distorting lens adopts metal material, in order to realize larger center wavelength tuning scope and high thermal conductivity simultaneously, thus the stability while ensureing high-average power running; Distorting lens is by the distorting lens drive unit drives being connected with control module 2; Basic identical in output coupling mirror module 6 and embodiment mono-; Free electron bundle group 8 is via injecting the optical resonator being made up of a pair of high reflection mirror after deflecting magnet 9 deflections; When free electron bundle group 8 passes through undulator 7, produce stimulated radiation; Finally, from output coupling mirror Output of laser light beam; Wherein, free electron laser each several part setting parameter is as follows: chamber long (distances between two distorting lens) are 18.000m, chamber curvature radius is 9.500m, the g factor of chamber mirror is-0.895, angle control piezoelectric ceramic closed-loop adjustment precision is 2 μ rad, much smaller than the optical alignment tolerance limit of chamber mirror 90.8 μ rad, meet system optics to alignment request.Free electron bundle group energy is 38MeV, repetition rate is 225MHz, bundle group width is 8ps, the undulator cycle is 2.8cm, number of cycles is 50, and undulator parameter aw is 0.98, and chamber is long controls tolerance limit for (power while being down to 90% peak strength by peak value corresponding change of cavity length scope) 25 μ m, surge motion control piezoelectric ceramic stroke is 180 μ m, and closed-loop control precision is 3.6nm; Output coupling mirror is 8.1m apart from resonant cavity centre distance with a tight waist, and output coupling efficiency is 10%.
The present embodiment Zhong tri-road driving signal frequencies are respectively: 10181Hz, 13633Hz, 16883Hz, and the integration time constant of low pass filter 203 is 1ms; Photodetection module 1 also comprises the wave front detector 103 being arranged in laser beam light path; Remainder is identical with embodiment mono-.Control module 2 also comprises the wavefront control unit 208 being connected with wave front detector 103, and remainder is identical with embodiment mono-.The long adjustment module 3 in chamber and optical alignment adjustment module 4 all also comprise distorting lens driver element, and remainder is identical with embodiment mono-.Wavefront control unit 208 receives the wavefront information that wave front detector 103 detects and controls the long and optical alignment of distorting lens driver element auxiliary regulating cavity.
The present invention is directed to the FEL difficult problem that particularly High-average-power FEL resonant cavity output stability faces, employing is aimed at chamber mirror respectively and is in axial direction the long degree of freedom in chamber and two modes that the aligning degree of freedom is carried out closed-loop control, utilize the difference of its modulation centre frequency, in conjunction with spectrum analysis, pass through control module, feedback control signal can obtain respectively the different degrees of freedom and depart from ideal position time, realize the solution coupling of the different degrees of freedom on output power stability impact, and realize respectively each degree of freedom is carried out to corresponding closed-loop control by chamber mirror surge motion control module and chamber mirror aligning control module, the aligning imbalance of chamber mirror is stabilized within the scope of tolerable with long the departing from chamber, ensure the stability of FEL resonant cavity Laser output, and then make it more practical.
Above execution mode is only for illustrating the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification, therefore all technical schemes that are equal to also belong to protection category of the present invention.

Claims (10)

1. a free electron laser resonant cavity, comprises chamber mirror module and the output coupling mirror module of nearly homocentric setting, from described output coupling mirror module Output of laser light beam; It is characterized in that, in described laser beam light path, be provided with photodetection module, described photodetection module link control module, described control module is the long adjustment module of connection chamber and optical alignment adjustment module respectively, and the long adjustment module in described chamber and optical alignment adjustment module are connected with described chamber mirror module respectively;
The long adjustment module of laser beam information FEEDBACK CONTROL chamber and optical alignment adjustment module that described control module reception photodetection module detects are carried out respectively the long adjusting of resonator and optical alignment adjusting.
2. free electron laser resonant cavity according to claim 1, is characterized in that, described photodetection module is included in the beam splitter and the photodetector that in described laser beam light path, arrange in turn.
3. free electron laser resonant cavity according to claim 2, is characterized in that, described photodetector response speed is less than free electron laser repetition rate.
4. free electron laser resonant cavity according to claim 1, is characterized in that, described control module comprises the signal source, multiplier, low pass filter, proportion integration differentiation device, signal gain device, adder and the signal driver that connect in turn.
5. free electron laser resonant cavity according to claim 4, is characterized in that, described signal source provides three tunnel reference signals and three roads to drive signal; Described three roads drive the frequency of signal to meet the demands: three is less than the bandwidth of photodetector; Three is relatively prime; Arbitrarily both differences and and value be not equal to the third party, the third party's integral multiple and the third party's divider ratio.
6. according to the free electron laser resonant cavity described in claim 1-5 any one, it is characterized in that, described chamber mirror module comprises the chamber mirror being arranged on fixing mirror holder, and the long adjustment module in described chamber comprises the piezoelectric ceramic actuator that is arranged at the mirror back side, described chamber.
7. free electron laser resonant cavity according to claim 6, it is characterized in that, on described fixing mirror holder, be provided with the two-dimensional adjustment knob that regulates chamber mirror level and vertical position, described optical alignment adjustment module comprises the multiple piezoelectric ceramic actuators that are connected with described two-dimensional adjustment knob.
8. free electron laser resonant cavity according to claim 6, is characterized in that, the long adjustment module in described chamber also comprises the long coarse adjustment unit, chamber being connected with described control module; Long coarse adjustment unit, described chamber comprises the long stepping translation stage that regulates in the chamber being connected with described chamber mirror module.
9. free electron laser resonant cavity according to claim 7, is characterized in that, described optical alignment adjustment module also comprises the optical alignment coarse adjustment unit being connected with described control module; Described optical alignment coarse adjustment unit comprises the Level tune stepping translation stage being connected with described chamber mirror module respectively and vertically regulates stepping translation stage.
10. according to the free electron laser resonant cavity described in claim 1-5 any one, it is characterized in that, described chamber mirror module comprises distorting lens, and described distorting lens is by the distorting lens drive unit drives being connected with described control module; Described photodetection module also comprises the wave front detector being arranged in described laser beam light path, and the wavefront information that described control module reception wave front detector detects is also controlled distorting lens driver element auxiliary regulating cavity length and optical alignment.
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CN113295669A (en) * 2021-05-14 2021-08-24 重庆大学 Folded multi-cavity for enhancing gas Raman signal

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CN105742943A (en) * 2016-01-22 2016-07-06 中国科学技术大学 Free electron laser based tunable narrow-band compact terahertz radiation source
CN108023265A (en) * 2016-10-31 2018-05-11 中国科学院理化技术研究所 Long-life electron injector for free electron laser or synchrotron radiation source
CN109244820A (en) * 2018-09-25 2019-01-18 南京先进激光技术研究院 A kind of temperature control optical resonator automatic freqauency stabilization method and device
CN112217086A (en) * 2020-11-10 2021-01-12 中国工程物理研究院应用电子学研究所 High-pulse-energy resonant cavity type free electron laser system
CN113295669A (en) * 2021-05-14 2021-08-24 重庆大学 Folded multi-cavity for enhancing gas Raman signal

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