CN113933989B - 一种二维快速反射镜及其锁止结构 - Google Patents
一种二维快速反射镜及其锁止结构 Download PDFInfo
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- CN113933989B CN113933989B CN202111537086.8A CN202111537086A CN113933989B CN 113933989 B CN113933989 B CN 113933989B CN 202111537086 A CN202111537086 A CN 202111537086A CN 113933989 B CN113933989 B CN 113933989B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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CN202111537086.8A CN113933989B (zh) | 2021-12-16 | 2021-12-16 | 一种二维快速反射镜及其锁止结构 |
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CN202111537086.8A CN113933989B (zh) | 2021-12-16 | 2021-12-16 | 一种二维快速反射镜及其锁止结构 |
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CN113933989A CN113933989A (zh) | 2022-01-14 |
CN113933989B true CN113933989B (zh) | 2022-03-15 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115356824B (zh) * | 2022-10-19 | 2023-01-03 | 北京瑞控信科技股份有限公司 | 一种采用熔断锁止结构的快速反射镜 |
CN116643371B (zh) * | 2023-07-27 | 2023-10-20 | 北京瑞控信科技股份有限公司 | 一种用于快反镜的限位锁止装置及快反镜 |
CN116719144B (zh) * | 2023-08-07 | 2023-10-20 | 北京瑞控信科技股份有限公司 | 用于二维大口径快反镜的锁止装置及二维大口径快反镜 |
CN117784398B (zh) * | 2024-02-28 | 2024-05-03 | 安徽瑞控信光电技术股份有限公司 | 一种二维大角度动磁式快反镜 |
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CN2478132Y (zh) * | 2000-10-23 | 2002-02-20 | 中国科学院南京天文仪器研制中心 | 光学反射镜的固定调整装置 |
CN101114044A (zh) * | 2007-07-25 | 2008-01-30 | 中国科学院上海技术物理研究所 | 在动态环境下限制大口径反射镜位移的限位装置 |
JP5414204B2 (ja) * | 2008-05-29 | 2014-02-12 | キヤノン株式会社 | 光学素子保持装置、露光装置およびデバイス製造方法 |
CN101387731B (zh) * | 2008-10-22 | 2024-03-15 | 中国科学院长春光学精密机械与物理研究所 | 反射镜倾角微调机构 |
CN203287603U (zh) * | 2013-05-22 | 2013-11-13 | 上海微电子装备有限公司 | 一种反射镜球面调整装置 |
RU2670571C2 (ru) * | 2017-03-02 | 2018-10-23 | Валерия Дмитриевна Паненко | Поворотное зеркало |
CN108287400B (zh) * | 2018-01-31 | 2021-04-02 | 北京仿真中心 | 一种反射镜支撑结构 |
CN208953788U (zh) * | 2018-11-20 | 2019-06-07 | 北京瑞控信科技有限公司 | 一种基于片状柔性铰链连接的快速反射镜装置 |
CN112346240B (zh) * | 2021-01-11 | 2021-09-14 | 北京瑞控信科技有限公司 | 一种二维动磁式快速反射镜装置 |
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Address after: 100085 1006, 1st floor, lin831-nei1, Changping Road, Anning North Road, Haidian District, Beijing Patentee after: Beijing ruikongxin Technology Co.,Ltd. Address before: 100096 1001, 1st floor, building 13, 801 Changlin, Xisanqi, Haidian District, Beijing Patentee before: BEIJING RUIKONGXIN TECHNOLOGY Co.,Ltd. |
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Address after: Building 1, 3rd Floor, Hefei Luyang Big Data Industrial Park, No. 868 Qinghe Road, Luyang District, Hefei City, Anhui Province, 230041 Patentee after: Anhui Ruikongxin Optoelectronic Technology Co.,Ltd. Country or region after: China Address before: 100085 1006, 1st floor, lin831-nei1, Changping Road, Anning North Road, Haidian District, Beijing Patentee before: Beijing ruikongxin Technology Co.,Ltd. Country or region before: China |
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