CN113885296A - Nano-imprinting equipment capable of realizing double-sided imprinting - Google Patents
Nano-imprinting equipment capable of realizing double-sided imprinting Download PDFInfo
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- CN113885296A CN113885296A CN202111315560.2A CN202111315560A CN113885296A CN 113885296 A CN113885296 A CN 113885296A CN 202111315560 A CN202111315560 A CN 202111315560A CN 113885296 A CN113885296 A CN 113885296A
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- imprinting
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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Abstract
The invention provides a nano-imprinting device capable of imprinting on two sides, which comprises: the conveying device is connected with an adsorption fixing device, the adsorption fixing device is used for adsorbing and fixing a first template, a first glue dripping device, a second imprinting device and an ultraviolet curing device are sequentially arranged above the conveying device from the left side of the conveying device to the right side of the conveying device, the first imprinting device is used for fixing a substrate, and the second imprinting device is used for fixing a second template. The invention can realize single-sided imprinting and double-sided imprinting, can also realize soft-pressing hard, soft-pressing soft and other imprinting modes, has full automation of the imprinting process and improves the imprinting efficiency.
Description
Technical Field
The invention belongs to the technical field of nanoimprint lithography, and particularly relates to nanoimprint lithography equipment capable of realizing double-sided imprinting.
Background
The nano-imprinting technology is a technology for transferring a micro-nano structure on a template to a material to be processed by assistance of photoresist. The technology achieves ultrahigh resolution by means of mechanical transfer, is expected to replace the traditional photoetching technology in the future, and becomes an important processing means in the fields of microelectronics and materials. The existing nano-imprinting equipment can only realize single-sided imprinting, and if double-sided imprinting is needed, a substrate needs to be continuously converted, so that the time and labor are wasted, the production cost is increased, and the development of the imprinting industry is not facilitated.
Disclosure of Invention
Aiming at the technical problems, the invention provides the nano-imprinting equipment capable of realizing double-sided imprinting, which can realize single-sided imprinting and double-sided imprinting, can also realize soft-pressing hard, soft-pressing soft and other imprinting modes, has a full-automatic imprinting process and improves the imprinting efficiency.
In order to achieve the purpose, the invention adopts the technical scheme that: a double-sided imprintable nanoimprinting apparatus comprising: the conveying device is set to be in a conveying direction from the left side of the conveying device to the right side of the conveying device, an adsorption fixing device is connected onto the conveying device and used for adsorbing and fixing a first template, a first glue dripping device, a first imprinting device, a second glue dripping device, a second imprinting device and an ultraviolet curing device are sequentially arranged above the conveying device from the left side of the conveying device to the right side of the conveying device, the first imprinting device is used for fixing a substrate, the second imprinting device is used for fixing a second template, when the conveying device conveys the adsorption fixing device along the conveying direction, imprinting glue is dripped onto the first template through the first glue dripping device, the first imprinting device drives the substrate to be in contact with the second template of the glue dripping device to complete one-time imprinting, the first imprinting device releases the substrate, and the second glue dripping device drips the imprinting glue above the substrate, and the second template is driven to be in contact with the imprinting glue on the substrate through the second imprinting device to complete secondary imprinting, the second imprinting device releases the second template, and the ultraviolet curing device cures the imprinting glue.
In some embodiments of the invention, the apparatus further comprises a controller, a first sensing unit disposed on the adsorption fixing device, a second sensing unit disposed on the first imprinting device, and a third sensing unit disposed on the second imprinting unit, wherein the controller is electrically connected to the first sensing unit, the second sensing unit, the third sensing unit, the conveying device, the adsorption fixing device, the first glue dripping device, the first imprinting device, the second glue dripping device, the second imprinting device, and the ultraviolet curing device, and adjusts a corresponding relationship between a first template on the adsorption fixing device and a substrate on the first imprinting device by sensing between the first sensing unit and the second sensing unit, so as to ensure a yield of one imprinting, and adjusts a corresponding relationship between a substrate on the adsorption fixing device and a second template on the second imprinting device by sensing between the first sensing unit and the third sensing unit, the yield of the secondary embossing is ensured, and the qualification rate of the product is further ensured.
In some embodiments of the invention, the conveyor comprises a conveyor belt and a motor for driving the conveyor belt to rotate.
In some embodiments of the present invention, the adsorption fixing device includes an adsorption plate, a support pillar disposed on the adsorption plate, and a moving block connected to the support pillar, the adsorption plate is provided with a light transmission region, a vacuum groove is disposed on the adsorption plate outside the light transmission region, a vacuum hole is disposed in the vacuum groove, the vacuum hole is connected to a vacuum pump through a vacuum tube, and a positioning groove is disposed outside the vacuum groove.
In some embodiments of the present invention, each of the first glue dripping device and the second glue dripping device includes a supporting frame, a glue barrel connected to the supporting frame and used for containing glue solution, a telescopic rod disposed in the glue barrel, and a glue plug connected to the telescopic rod, and the glue barrel has a glue nozzle, so that when the telescopic rod pushes the glue plug to move toward the glue nozzle, the glue is discharged from the glue nozzle.
In some embodiments of the present invention, the glue barrel is made of opaque material.
In some embodiments of the present invention, the first imprinting device includes a first rotating motor, a first rotating block connected to the first rotating motor, two first motors connected to the first rotating block, first telescopic rods connected to the two first motors, a first connecting block connected to the first telescopic rods, a first sliding block connected to the first connecting block, a first sliding guide block connected to the first sliding guide block, and a first vacuum suction plate connected between the two first sliding guide blocks, wherein a vacuum groove is formed in a lower surface of the first vacuum suction plate, and a vacuum hole is formed in the vacuum groove and connected to a vacuum pump through a vacuum tube.
In some embodiments of the present invention, the second imprinting device includes a second rotating motor, a second rotating block connected to the second rotating motor, two second motors connected to the second rotating block, second telescopic rods connected to the two second motors, a second connecting block connected to the second telescopic rods, a second sliding block connected to the second connecting block, a second sliding guide block connected to the second sliding block, and a second vacuum suction plate connected between the two second sliding guide blocks, a vacuum groove is formed in a lower surface of the second vacuum suction plate, and a vacuum hole is formed in the vacuum groove and connected to a vacuum pump through a vacuum tube.
In some embodiments of the present invention, the uv curing apparatus includes a support rod, a connection part connected to the support rod, and a uv lamp connected to the connection part.
In some embodiments of the present invention, the apparatus further includes a housing, the first glue dripping device, the first imprinting device, the second glue dripping device, the second imprinting device, and the ultraviolet curing device are located at a top end inside the housing, the conveying device is located at a bottom end inside the housing, and openings are provided at left and right ends of the housing.
Compared with the prior art, the invention has the advantages and positive effects that:
1. when the conveying device conveys the adsorption fixing device along the conveying direction, stamping glue is dripped onto the first template through the first glue dripping device, the first stamping device drives the substrate to be in contact with the second template dripped with the glue, primary stamping is completed, the first stamping device releases the substrate, the stamping glue is dripped onto the substrate through the second glue dripping device, the second template is driven to be in contact with the stamping glue on the substrate through the second stamping device, secondary stamping is completed, the second stamping device releases the second template, the ultraviolet curing device cures the stamping glue, single-side stamping can be realized, double-side stamping can also be realized, soft-pressing and hard can be realized, stamping modes such as soft-pressing and soft-pressing are realized, the stamping process is full-automatic, the stamping efficiency is improved, and the production cost is saved.
2. The corresponding relation between the first template on the adsorption fixing device and the substrate on the first imprinting device is adjusted through the induction between the first induction unit and the second induction unit, and then the yield of primary imprinting is guaranteed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the internal structure of the present invention;
FIG. 2 is a schematic top view of the adsorption plate according to the present invention;
FIG. 3 is an enlarged view of a portion C of FIG. 1;
FIG. 4 is a schematic structural diagram of a first imprinting apparatus according to the present invention;
FIG. 5 is a schematic top view of the first imprint apparatus of the present invention;
FIG. 6 is a schematic structural view of a second imprint apparatus according to the present invention;
FIG. 7 is a schematic top view of a second imprint apparatus according to the present invention;
FIG. 8 is a diagram of an imprinting process of the present invention;
fig. 9 is a diagram of an imprinting process for nanoimprinting structures.
In the above figures: 1. a conveying device; 101. left side; 102. the right side; 11. a conveyor belt; 12. a motor; 2. an adsorption fixing device; 21. an adsorption plate; 211. a light-transmitting region; 212. a vacuum tank; 213. a vacuum hole; 214. a vacuum tube; 215. positioning a groove; 22. a support pillar; 23. a moving block; 3. a first template; 4. a first glue dripping device; 41. a support frame; 42. a glue barrel; 421. a glue nozzle; 43. a telescopic rod; 44. a rubber plug; 5. a first imprint device; 51. a first rotating electrical machine; 52. a first rotating block; 53. a first motor; 54. a first telescopic rod; 55. a first connection block; 56. a first sliding block; 57. a first sliding guide rail block; 58. a first vacuum suction plate; 581. a vacuum tank; 582. a vacuum hole; 583. a vacuum tube; 6. a substrate; 7. a second glue dripping device; 8. a second imprint device; 81. a first rotating electrical machine; 82. a first rotating block; 83. a first motor; 84. a first telescopic rod; 85. a first connection block; 86. a first sliding block; 87. a first sliding guide rail block; 88. a first vacuum suction plate; 881. a vacuum tank; 882. a vacuum hole; 883. a vacuum tube; 884. positioning a groove; 9. a second template; 10. an ultraviolet curing device; 111. a support bar; 112. a connecting portion; 113. an ultraviolet lamp; 0. a housing.
Detailed Description
The invention is described in detail below by way of exemplary embodiments. It should be understood, however, that elements, structures and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A double-sided imprintable nanoimprinting apparatus, referring to fig. 1 through 9, comprising: the conveying device 1 is set to be a conveying direction from the left side 101 of the conveying device 1 to the right side 102 of the conveying device 1, the conveying device 1 is connected with an adsorption fixing device 2, the adsorption fixing device 2 is used for adsorbing and fixing a first template 3, a first glue dripping device 4, a first imprinting device 5, a second glue dripping device 7, a second imprinting device 8 and an ultraviolet curing device 10 are sequentially arranged above the conveying device 1 from the left side 101 of the conveying device 1 to the right side 102 of the conveying device 1, the first imprinting device 5 is used for fixing a substrate 6, the second imprinting device 8 is used for fixing a second template 9, when the conveying device 1 conveys the adsorption fixing device 2 along the conveying direction, imprinting glue is dripped onto the first template 3 through the first glue dripping device 4, the first imprinting device 5 drives the substrate 6 to be in contact with the second template 9 dripped with the glue, one-time imprinting is completed, the first imprinting device 5 releases the substrate 6, and dripping imprint glue above the substrate 6 through a second glue dripping device 7, driving a second template 9 to be in contact with the imprint glue on the substrate 6 through a second imprint device 8, completing secondary imprint, releasing the second template 9 by the second imprint device 8, and curing the imprint glue by an ultraviolet curing device 10.
In order to realize the automation degree in the imprinting process and further improve the efficiency, the imprinting device further comprises a controller, a first sensing unit arranged on the adsorption fixing device 2, a second sensing unit arranged on the first imprinting device 5 and a third sensing unit arranged on the second imprinting unit, wherein the controller, the first sensing unit, the second sensing unit and the third sensing unit are not shown in the figure, the controller can adopt a PLC (programmable logic controller), the controller is electrically connected with the first sensing unit, the second sensing unit, the third sensing unit, the conveying device 1, the adsorption fixing device 2, the first glue dripping device 4, the first imprinting device 5, the second glue dripping device 7, the second imprinting device 8 and the ultraviolet curing device 10, and the corresponding relation between the first template 3 on the adsorption fixing device 2 and the substrate 6 on the first imprinting device 5 is adjusted through the induction between the first sensing unit and the second sensing unit, and then guarantee the yield of the primary impression, through the response between third induction element and the first induction element, adjust and adsorb the corresponding relation between the substrate 6 on the fixing device 2 and the second template 9 on the second impression device 8, guaranteed the yield of the secondary impression, and then guaranteed the qualification rate of product.
In the present embodiment, the conveying device 1 includes a conveying belt 11 and a motor 12 for driving the conveying belt 11 to rotate.
In this embodiment, the adsorption fixing device 2 includes an adsorption plate 21, a support column 22 disposed on the adsorption plate 21, and a moving block 23 connected to the support column 22, a light transmission region 211 is disposed on the adsorption plate 21, a vacuum groove 212 is disposed on the adsorption plate 21 and located outside the light transmission region 211, a vacuum hole 213 is disposed in the vacuum groove 212, the vacuum hole 213 is connected to a vacuum pump through a vacuum tube 214, and a positioning groove 215 is disposed outside the vacuum groove 212.
In this embodiment, the first glue dripping device 4 and the second glue dripping device 7 have the same structure, and the first glue dripping device 4 is taken as an example and includes a supporting frame 41, a glue barrel 42 connected to the supporting frame 41 and used for containing glue, an expansion link 43 disposed in the glue barrel 42 and a glue plug 44 connected to the expansion link 43, wherein the glue barrel 42 has a glue nozzle 421, so that when the expansion link 43 pushes the glue plug 44 to move towards the glue nozzle 421, glue is discharged from the glue nozzle 421.
Further, in order to prevent the glue solution in the glue barrel 42 from being cured by the ultraviolet curing device 10, the glue barrel 42 is made of an opaque material.
In this embodiment, the first imprinting device 5 includes a first rotating motor 51, a first rotating block 52 connected to the first rotating motor 51, two first motors 53 connected to the first rotating block 52, first telescopic rods 54 respectively connected to the two first motors 53, a first connecting block 55 connected to the first telescopic rods 54, a first sliding block 56 connected to the first connecting block 55, a first sliding guide block 57 connected to the first sliding block 56, and a first vacuum suction plate 58 connected between the two first sliding guide blocks 57, wherein the lower surface of the first vacuum suction plate 58 is provided with vacuum grooves 581, the vacuum grooves 581 are a plurality of concentrically arranged annular vacuum grooves, holes 582 are provided in the vacuum grooves 581, and the vacuum holes 582 are connected to a vacuum pump through vacuum tubes 583.
In this embodiment, the second imprinting apparatus 8 includes a second rotating motor 81, a second rotating block 82 connected to the second rotating motor 81, two second motors 83 connected to the second rotating block 82, second telescopic rods 84 connected to the two second motors 83, a second connecting block 85 connected to the second telescopic rods 84, a second sliding block 86 connected to the second connecting block 85, a second sliding rail block 87 connected to the second sliding block 86, and a second vacuum suction plate 88 connected between the two second sliding rail blocks 87, wherein a vacuum groove 881 is formed on a lower surface of the second vacuum suction plate 88, the vacuum groove 881 is square in shape, a vacuum hole 882 is formed in the vacuum groove 881, the vacuum hole 882 is connected to a vacuum pump through a vacuum tube 883, and a positioning groove 884 is formed outside the vacuum groove 881.
In the present embodiment, the ultraviolet curing apparatus 10 includes a support rod 111, a connection portion 112 connected to the support rod 111, and an ultraviolet lamp 113 connected to the connection portion 112.
In this embodiment, the device further includes a housing 0, the first dispensing device 4, the first imprinting device 5, the second dispensing device 7, the second imprinting device 8, and the ultraviolet curing device 10 are located at the top end of the housing 0, the conveying device 1 is located at the bottom end of the housing 0, and the left and right ends of the housing 0 are provided with openings A, B corresponding to the positions of the adsorption fixing devices 2.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (10)
1. A nanoimprint apparatus that can perform double-sided imprinting, comprising: the conveying device is connected with an adsorption fixing device, the adsorption fixing device is used for adsorbing and fixing a first template, a first glue dripping device, a second imprinting device and an ultraviolet curing device are sequentially arranged above the conveying device from the left side of the conveying device to the right side of the conveying device, the first imprinting device is used for fixing a substrate, and the second imprinting device is used for fixing a second template.
2. The apparatus of claim 1, wherein: still include the controller, set up in adsorb first response unit on the fixing device, set up in second response unit on the first impression device and set up in third response unit on the second impression unit, the controller with first response unit the second response unit the third response unit conveyor, adsorb fixing device, first adhesive deposite device, first impression device, second glue dripping device, second impression device and ultraviolet curing device electric connection.
3. The apparatus of claim 1, wherein: the conveying device comprises a conveying belt and a motor for driving the conveying belt to rotate.
4. The apparatus of claim 1, wherein: the adsorption fixing device comprises an adsorption plate, a support column and a moving block, wherein the support column is arranged on the adsorption plate, the moving block is connected to the support column, a light transmission area is arranged on the adsorption plate, a vacuum groove is formed in the adsorption plate and located on the outer side of the light transmission area, a vacuum hole is formed in the vacuum groove, the vacuum hole is connected with a vacuum pump through a vacuum tube, and a positioning groove is formed in the outer side of the vacuum groove.
5. The apparatus of claim 1, wherein: the first glue dripping device and the second glue dripping device respectively comprise a support frame, a glue barrel connected with the support frame and used for containing glue liquid, a telescopic rod arranged in the glue barrel and a glue plug connected with the telescopic rod, wherein the glue barrel is provided with a glue nozzle, so that when the telescopic rod pushes the glue plug to move towards the glue nozzle, glue is discharged from the glue nozzle.
6. The apparatus of claim 5, wherein: the glue barrel is made of opaque materials.
7. The apparatus of claim 1, wherein: the first imprinting device comprises a first rotating motor, a first rotating block connected with the first rotating motor, two first motors respectively connected with the first rotating block, first telescopic rods respectively connected with the two first motors, a first connecting block connected with the first telescopic rods, a first sliding block connected with the first connecting block, a first sliding guide rail block connected with the first sliding block, and a first vacuum suction plate connected between the two first sliding guide rail blocks, wherein a vacuum groove is formed in the lower surface of the first vacuum suction plate, and a vacuum hole is formed in the vacuum groove and connected with a vacuum pump through a vacuum tube.
8. The apparatus of claim 1, wherein: the second imprinting device comprises a second rotating motor, a second rotating block connected with the second rotating motor, two second motors respectively connected with the second rotating block, second telescopic rods respectively connected with the two second motors, a second connecting block connected with the second telescopic rods, a second sliding block connected with the second connecting block, a second sliding guide rail block connected with the second sliding block, and a second vacuum suction plate connected between the two second sliding guide rail blocks, wherein a vacuum groove is formed in the lower surface of the second vacuum suction plate, and a vacuum hole is formed in the vacuum groove and connected with a vacuum pump through a vacuum tube.
9. The apparatus of claim 1, wherein: the ultraviolet curing device comprises a supporting rod, a connecting part connected with the supporting rod and an ultraviolet lamp connected with the connecting part.
10. The apparatus of claim 1, wherein: the ultraviolet curing device comprises a shell, a first glue dripping device, a first stamping device, a second glue dripping device, a second stamping device and an ultraviolet curing device are arranged at the top end in the shell, a conveying device is arranged at the bottom end in the shell, and openings are formed in the left end and the right end of the shell.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111315560.2A CN113885296A (en) | 2021-11-09 | 2021-11-09 | Nano-imprinting equipment capable of realizing double-sided imprinting |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111315560.2A CN113885296A (en) | 2021-11-09 | 2021-11-09 | Nano-imprinting equipment capable of realizing double-sided imprinting |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101377618A (en) * | 2007-08-29 | 2009-03-04 | 三星电子株式会社 | Dual-side imprinting lithography system |
| CN208469422U (en) * | 2018-06-26 | 2019-02-05 | 合肥越之澜机电设备有限公司 | A kind of metal product processing dual-side imprinting device |
| US20210170668A1 (en) * | 2017-05-25 | 2021-06-10 | Magic Leap, Inc. | Double-sided imprinting |
| CN214151370U (en) * | 2021-02-18 | 2021-09-07 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment capable of automatically carrying out double-sided imprinting |
-
2021
- 2021-11-09 CN CN202111315560.2A patent/CN113885296A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101377618A (en) * | 2007-08-29 | 2009-03-04 | 三星电子株式会社 | Dual-side imprinting lithography system |
| US20210170668A1 (en) * | 2017-05-25 | 2021-06-10 | Magic Leap, Inc. | Double-sided imprinting |
| CN208469422U (en) * | 2018-06-26 | 2019-02-05 | 合肥越之澜机电设备有限公司 | A kind of metal product processing dual-side imprinting device |
| CN214151370U (en) * | 2021-02-18 | 2021-09-07 | 青岛天仁微纳科技有限责任公司 | Nano-imprinting equipment capable of automatically carrying out double-sided imprinting |
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