CN113874542A - 施加涂层至莫来石材料表面的方法、具有涂层的莫来石材料和燃气轮机部件 - Google Patents

施加涂层至莫来石材料表面的方法、具有涂层的莫来石材料和燃气轮机部件 Download PDF

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CN113874542A
CN113874542A CN202080037658.3A CN202080037658A CN113874542A CN 113874542 A CN113874542 A CN 113874542A CN 202080037658 A CN202080037658 A CN 202080037658A CN 113874542 A CN113874542 A CN 113874542A
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alumina
mullite material
containing layer
mullite
layer
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维尔纳·施塔姆
西蒙尼·弗里德勒
尤尔根·拉姆
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Oerlikon Surface Solutions AG Pfaeffikon
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Abstract

指出一种施加涂层(1)至莫来石材料(3)的表面(2)的方法，具有：借助等离子体化学工艺预处理(Sl)该莫来石材料(3)的表面(2)，在这里，如此激发分子氢，即，出现等离子体活化氢；并且借助PVD法将含氧化铝层(4)施加(S2)到莫来石材料(3)的经过预处理的表面(2)。还指出一种具有涂层的莫来石材料(3)和一种具有这种莫来石材料(3)的燃气轮机部件。

Description

施加涂层至莫来石材料表面的方法、具有涂层的莫来石材料 和燃气轮机部件
本发明涉及一种施加涂层至莫来石材料表面的方法、一种具有涂层的莫来石材料以及一种燃气轮机部件。
在现代的燃气轮机中，含硅铝材料作为燃烧室砖被用在燃烧室区域中且也被用于其它燃气轮机部件。所述材料大多被统称为莫来石(Mullit)，尽管它们除了由具有化学组成3(Al2O3)x2(SiO2)的真正莫来石构成的相外也可包含其它Al2O3-SiO2化合物的相还有按照刚玉结构(α-Al2O3)的纯Al2O3相。
此外，许多陶瓷纤维复合材料包含含莫来石的纤维。因此以下，术语“莫来石材料”被用于所有包含Al2O3-SiO2的材料乃至几乎只由Al2O3构成的材料。术语“莫来石材料”也包含所谓的Ox-Ox材料，它是基于氧化铝的陶瓷基体复合材料(CMC：陶瓷基体复合材料)。图1示出莫来石材料的切片的光学显微镜照片，在此标示出可能以不同的晶粒尺寸出现的不同的相。
莫来石材料的另一特性是除了不同的材料相外也不同的晶粒尺寸，其在合成制造时可能因原料混合和高温烧结被引入或出现。
莫来石材料在如可能在涡轮机燃烧室区域内出现的很高温度下也有着显著的机械强度和化学稳定性。
但莫来石材料有如下缺点，即，其被灼热水蒸汽侵蚀，因为其可能与莫来石材料所含的硅形成挥发性化合物。这由于从表面例如由莫来石材料构成的燃烧室砖或其它部件失去硅而造成可能从莫来石材料释放出颗粒，因为它们丧失其附着并脱离。脱离颗粒因加剧腐蚀导致涡轮机叶片和其它部件例如在随后的涡轮机区域内的导向环段的磨损。
为了防止在涡轮机部件上的由颗粒引起的腐蚀，可喷涂厚保护层(EP 1 780 294A1)。但是，它们在良好结合至莫来石材料和良好附着于莫来石材料时因高的热机械负荷而脱离并且在相对短暂的工作时间之后失效。这尤其涉及保护层，其不与莫来石材料化学反应或者其热胀系数显著不同于莫来石材料的热胀系数。
本发明的任务是指出一种涂覆方法和一种涂层，借此能至少减少前述的缺点。
该任务通过独立权利要求的主题来完成。从属权利要求包含本发明解决方案的变型实施方式。
较差地附着于莫来石材料或结合至莫来石材料的一个重要原因在于，莫来石材料具有不同的晶粒尺寸和/或纤维以及各种不同的相，其中，相的不同性产生很大影响。利用当前可用的材料和方法，可以分别仅关于一个相如关于α-Al2O3(刚玉结构)或者3(Al2O3)x2(SiO2)(莫来石结构)优化附着，但因为相的不同性能而无法同时关于许多相优化。
另一问题是使层材料适配于莫来石材料以实现化学结合。对此，莫来石材料的各不同相也起到不利作用，因为须分别进行不同的化学反应。
最终，常用于保护层的喷涂施加方法为了获得良好附着具有加热步骤，其应实现元素在莫来石材料和喷涂保护层之间的分界区域内的扩散。但是，莫来石材料的至少一种成分即刚玉众所周知地是良好的扩散阻隔体并因此妨碍通过扩散过程改善附着的常见方式。
本发明的基本构思因此是，在施加涂层之前如此预处理莫来石材料表面，即，基本上在表面上仅还有一种材料相。关于该材料相的性能，待施加涂层可被如此调整，即，得到尽量好的接合或附着。
根据本发明的用于施加涂层至莫来石材料表面的方法具有以下步骤：借助等离子体化学工艺预处理莫来石材料表面，此时如此激发分子氢，即，出现等离子体活化氢例如原子氢和/或电离化的氢分子，并且借助PVD方法将含氧化铝层施加到莫来石材料的经过预处理的表面。
关于术语“莫来石材料”，参照以上引入的定义。莫来石材料是基材，在其表面上在预处理之后施加涂层。在此情况下，莫来石材料本身也可以是在其它材料上的涂层。
涂层除含氧化铝层外还可具有其它层如附着层、覆层、阻热层。含氧化铝层最好直接被施加到经过预处理的莫来石材料表面，即没有中间层。
为了预处理莫来石材料表面，它在真空(在0.001毫巴至1毫巴之间、最好在0.05毫巴至0.1毫巴之间的压力范围)中接受等离子体化学工艺。在等离子体化学工艺中激发分子氢，从而出现原子氢和电离化氢分子。
该等离子体仅在莫来石材料的最上原子层中很可靠地从莫来石材料的含硅相中除去硅，做法是形成挥发性Si-H键。它们随后借助泵系统从真空中被泵出。同时，在纯Al-O相上且在莫来石材料表面的所有其它区域内的杂质例如像碳、碳氢化合物或其它元素被除去和泵出。
预处理的结果是获得莫来石材料的经过预处理的表面，其基本上仅还具有α-Al2O3、即具有刚玉结构的氧化铝。
可选地，可以在借助等离子体化学工艺预处理莫来石材料表面之前执行以含铝材料例如YAG(钇铝石榴石)渗入表面。由此该表面的孔隙度可被有利地减小，因为已有的孔至少部分被填充以该含铝材料。渗入的结果是获得更均匀的表面，因此随后所施加的含氧化铝层不会“侵入”该孔中，并且该表面总体上被更好地覆盖。换言之，本发明方法也适用于施加涂层至事先已被含铝材料渗入的材料的表面。
在另一个方法步骤中，含氧化铝层借助PVD方法(PVD：物理气相沉积)例如气化方法例如像反应阴极电火花气化或溅射被施加到莫来石材料的经过预处理的表面上。
两种PVD方法使用了靶，材料从靶中被去除且被沉积在莫来石材料表面上。该靶具有铝和可选地具有其它元素例如像铬、钛、铪、钇、铒、硅和/或锆，它们应该包含在待施加的层内。因为在反应性含氧环境中执行PVD方法，故出现铝和或许其它元素的氧化，因而含氧化铝层被沉积。或者，该含氧化铝层可以借助高频溅射由含氧化铝的靶来施加。
“将含氧化铝层施加至莫来石材料的经过预处理的表面”优选借助反应阴极电火花气化进行，在此，在电火花气化中作为阴极接入的靶材被气化。气化在真空中在可控氧气分压下进行，氧气分压可通过相应的氧气流来调节。
“将含氧化铝层施加到莫来石材料的经过预处理的表面”最好在550℃至650℃之间的基材温度、尤其最好在600℃的基材温度进行。但是，该温度也可以降低到低于300℃，或者该层的施加也可以在更高的温度进行。
所述的PVD方法有利地允许在仅一个方法步骤中施加一个均匀的含氧化铝层。另外，能以高精度实现在0.5微米至50微米之间的优选层厚。反应阴极电火花气化的特点还是高耐用性。因此通常不需要特殊调整以避免靶毒化。另外，在反应阴极电火花气化中产生的金属蒸气被高度电离化，这有助于附着良好的层。
通过该方法提供的在莫来石材料与含氧化铝层之间的分界区域具有由含氧化铝的材料、最好是氧化铝构成的尖峰状结构，由此，含氧化铝层在莫来石材料上的附着或接合被改善。
优选地，该靶还具有金属铬。例如可以使用具有元素配比70/30(Al/Cr)的靶。靶中的铬含量促成在生成的Al-Cr-O混晶中的刚玉结构的形成，确切说已经在500℃以下的相对低温下形成。通过改变靶中的铬含量，在待施加的含氧化铝层内的Al-Cr-O混晶结构的晶格常数可以在如下范围内被调整，该范围位于刚玉和绿铬矿之间。刚玉结构的特点是高的耐热性。
在此可以采用维伽德定律，据此，晶体的晶格常数与该组分的百分比含量线性相关。
Al-Cr-O混晶结构能以不同的晶粒尺寸存在，所述晶粒尺寸可通过PVD方法的过程条件例如靶中的铬含量、氧气分压、基材温度被影响和相应控制。这造成所施加的含氧化铝层可以依据过程条件而例如是X射线非晶态的，或者在X射线分析中可明显显示出刚玉结构，其中，布拉格峰的位置按照铬含量位于纯刚玉的峰与绿铬矿的峰之间。
优选地，含氧化铝层作为基本上单相的层来施加，例如作为按刚玉结构的混晶。这有以下优点，即，层性能是均匀一致的，因此该层的保护作用可能持续更长时间。尤其是，混晶结构是耐热的。
进一步优选地，含氧化铝的单相层的晶体结构对应于刚玉结构，或者在较高温度下转为刚玉结构。如果含氧化铝层还含有铬，则其最好作为具有刚玉混晶结构的单相层被施加。
此外，该含氧化铝层可以具有金属宏观颗粒、即所谓的滴，其例如可能在反应阴极电火花气化中出现。当使用含铬的靶时，宏观颗粒可能具有比靶更高的铬含量，即，铬富集在宏观颗粒中。滴可以在氧化时直接转移到混晶中。通过该氧化过程，可以有利地封闭可能有的晶界。
根据不同的变型实施方式，含氧化铝层可以具有铬、钛、铪、钇、铒、硅和/或锆。含氧化铝层最好可以具有铬。为此，所述元素可以存在于靶中，该靶被用于施加所述层。也可以包含其它元素以促成某些性能。
关于可选的组成成分铬，参见之前说明。所述元素例如可以用于使层性能适配于待涂覆的莫来石材料或影响其它层性能。
如果基本上单相的层应被施加到莫来石材料表面，则不应该明显超出上述附加元素在该铝中的溶度极限。换言之，元素含量可以高至大致达到其在铝中的溶度极限，但不要超出或至多略微超出。
或者，附加元素的含量也可以更高以使材料性能符合一定要求，例如以使待施加层和基材材料的热胀系数相互适配。
含氧化铝层能以在0.5μm至50μm之间的层厚被施加。厚度例如可依据莫来石材料表面的质量如粗糙度来选择，从而涂覆的莫来石材料的性能可被改善。
根据其它变型实施方式，该方法可以包括：在900℃至1400℃之间范围内的温度将所施加的含氧化铝层热处理在15分钟至60分钟之间的时间，例如在约1200℃热处理约30分钟。
较低温度此时决定了较长的时效硬化时间。热处理可以改善所施加的层与基材的结合。如果所施加的层包含铬，则还可能出现铬扩散到层表面且所形成的铬氧化物气化。
此过程留下细孔，显著提高该层的伸展容差。
代替热处理，可借助氧等离子体进行所施加的含氧化铝层的再处理。换言之，所施加的层的等离子体氧化可以在氧气氛中进行，其中，氧通过等离子体被活化。这种再处理可有利地紧跟在施加含氧化铝层至莫来石材料表面后进行而不必中断真空。因此可快速廉价地执行这种再处理。
本发明的另一个方面涉及一种莫来石材料，其具有布置在莫来石材料表面的含氧化铝层，其中，在莫来石材料和含氧化铝层之间的分界区域内形成具有指向含氧化铝层的尖峰的尖峰状结构。
根据本发明的莫来石材料例如可以借助上述的方法来获得。尖峰状结构在横截面(平行于层厚)中具有基本呈三角形的形状、例如等腰三角形。在三维观看时，尖峰状结构例如可以近似具有锥体几何形状，其底面基本呈圆形。基本呈三角形的形状例如可以在专业常见的样品准备之后依据电子束扫描显微镜照片或透视电子束显微镜照片来证明。
尖峰状结构基本上在莫来石材料和含氧化铝层之间的界面处、即在涂覆之前的莫来石材料表面开始，并且随着含氧化铝层的层厚增大而缩窄，即，它设计成具有指向含氧化铝层的尖峰。尖峰状结构的典型尺寸是在50nm至200nm之间的宽度b(平行于莫来石材料和含氧化铝层之间界面测量)和在100nm至500nm之间的高度h(平行于含铝层的层厚测量)。该尺寸例如可通过评估电子束扫描显微镜照片或者透视电子束显微镜照片来确定。
尖峰状结构造成含氧化铝层很好地接合至莫来石材料。因此，涂覆的莫来石材料的特点是耐热性很高并且使用寿命长。它因此可以有利地被用于高温应用，例如用在燃气轮机领域中。
含氧化铝层起到保护层作用，因此莫来石材料不再受到灼热水蒸汽的侵蚀。由此可以防止从表面释放出颗粒和进而由释放颗粒造成的腐蚀。
优选地，该尖峰状结构具有含铝材料，或者由氧化铝构成。由此将获得在莫来石材料与含氧化铝层之间的很好的附着或接合。
含氧化铝层的层厚可以在0.5μm至50μm之间，优选在5μm至20μm之间。伴随在该范围内的层厚，可获得在高温下对莫来石材料的很好保护。
根据不同的变型实施方式，该含氧化铝层基本上是单相的。此外，该含氧化铝层可以具有金属宏观颗粒。另外，该含氧化铝层可以具有铬、钛、铪、钇、铒、硅和/或锆。关于此变型实施方式，参照以上关于所述方法的描述和提到的优点。
本发明的另一个方面涉及一种燃气轮机部件、例如燃烧室砖，其具有根据本发明的莫来石材料。燃气轮机部件可以是燃气轮机的一部分。在燃气轮机部件领域内，本发明的莫来石材料的使用起到很好效果，因为否则由颗粒决定的腐蚀所造成的损伤可能导致长时间停机和高的维修成本。维修间隔期可以被缩短，因为本发明的燃气轮机部件的使用寿命比没有本发明的莫来石材料的燃气轮机部件长。
以下，结合图和所属说明来详细说明本发明，其中：
图1示出莫来石材料的切片的光学显微镜照片；
图2示出涂覆的莫来石材料的示意图；
图3示出涂覆方法的示例性流程图；
图4示出带有涂层的莫来石材料的切片的电子束扫描显微镜照片(低放大倍数)；
图5示出在莫来石材料和涂层之间分界区的横截面示意图；
图6以横截面示意图示出尖峰状结构的尺寸情况；
图7示出带有涂层的莫来石材料的切片的电子束扫描显微镜照片(高放大倍数)。
图1示出莫来石材料3的切片的光学显微镜照片，其中标示出能以彼此不同的晶粒尺寸出现的各不同相。可以看到具有刚玉结构的相的三角形结构，其在图1中被标示为α-氧化铝，以及长条状的具有莫来石结构的相，其在图1中被称为莫来石(3Al2O3x2SiO2)。如已经说明地，这种材料在这里被统称为莫来石材料3。莫来石材料3例如可被用于制造燃气轮机用燃烧室砖。
图2示意性示出就像能利用本发明方法获得的涂覆的莫来石材料3。在莫来石材料3的借助等离子体化学工艺被预处理的表面2上直接布置含氧化铝层4，其形成涂层1。可选地，涂层1可具有在图2中未被示出的其它层。
含氧化铝层4例如可以由氧化铝构成。但也可含有其它元素如铬。含氧化铝层4借助PVD方法、最好借助反应阴极电火花气化来施加。
以下将参见图3描述用于施加涂层1至莫来石材料3的表面2的方法。
在第一方法步骤S1中预处理莫来石材料3的表面2。为此采用等离子体化学工艺，在此激发分子氢，从而出现作用于表面2的等离子体活化氢。由此，硅从最高原子层、即含硅相脱离，得到如下表面2，其基本上仅还具有按照不同晶粒尺寸的α-Al2O3。
具体说，所述预处理例如可如下所述地进行。首先，基材被置入带有涂覆装置的涂覆室。为了产生等离子体活化氢(反应氢等离子体)，涂覆室除了涂覆装置外还包含能够产生电弧放电且由阴极和阳极构成的其它装置。
视应用场合的不同将阳极与涂覆室隔离开，即也与接地(或地线)隔离，或者处于与涂覆室相同的电位，但或者阳极可通过导电的基材座实现。电弧放电以稀有气体、一般是氩气工作。它最好在阴极附近被加入阴极和阳极之间的空间并且如此选择氩气流，即，出现在1x10-4毫巴至1x10-2毫巴之间的涂覆室内压力。接着通过合适的引燃装置来引燃电弧放电。这种电弧放电以高放电电流(10A-400A)和低放电电压(20V-40V)为特点。
在电弧放电引燃之后，它被供以待活化反应气体、即氢气，在这里，氢气流被选择成在涂覆室内出现在5x10-3毫巴至5x10-2毫巴之间的总压力。在电弧放电中，所加入的氢气被分离、雾化、激发和电离化。由此出现极具反应性的氢，其能与待涂覆的基材表面的元素反应并与这种元素如硅或碳形成可被泵出的挥发性气态化合物。
因此，在氢等离子体中的表面预处理的结果是如下表面，位于莫来石材料表面中的硅还有不希望有的基于碳的杂质都可以脱离该表面。这种方法的清理深度被局限于活化氢的作用深度、即在10nm至100nm之间范围内的典型侵入深度。近基材表面的改性显然不足以例如持续防止硅在水蒸汽中在高温(超过1000℃)下挥发。
需要莫来石材料在水蒸汽等离子体处理之后还通过相对于反应性氢呈惰性的附加层被保护。
因而在随后的方法步骤S2中，对经过预处理的表面2施加含氧化铝层4。涂覆优选在未中断真空下在同一涂覆室内紧接在预处理之后进行。为了涂覆，采用PVD方法例如反应阴极电火花气化或溅射。
在方法步骤S2后，可以进行所涂覆的含氧化铝层4的再处理。为此有两种可能性。含氧化铝层4在方法步骤S3中接受热处理，例如在1200℃进行30分钟，或者含氧化铝层4在方法步骤S4中借助氧等离子体被氧化。
图4示出具有含氧化铝层4的示例性莫来石材料3的切片的电子束扫描显微镜照片，含氧化铝层借助反应阴极电火花气化被施加到莫来石材料3的表面2。层厚5约为2μm。含氧化铝层4上方的白色区域因分界区域过曝(由基材准备决定)而在产生电子束扫描显微镜照片时出现，没有物理意义。
图5以放大示意图示出在莫来石材料3和含氧化铝层4之间分界区域7内的在图4中框以黑边的区域。可以清楚看到尖峰状结构6，其基本由氧化铝构成并且其尖峰8指向含氧化铝层4。尖峰状结构6导致在莫来石材料3与含氧化铝层4之间的明显改善的结合或附着。
图6表明尖峰状结构6的尺寸情况。可以看到在莫来石材料3和含氧化铝层4之间的分界区域7内的尖峰状结构6，其在对应于涂覆之前的表面2的、在莫来石材料3和含氧化铝层4之间的界面处开始，并且其尖峰8指向含氧化铝层4。尖峰状结构6在所示横截面中基本上具有等腰三角形的形状。尖峰状结构6的宽度b在50nm至200nm之间，而高度h在100nm至500nm之间。含氧化铝层4的层厚5例如可以约为1.5μm。
图7示出具有安置在表面2上的含氧化铝层4的莫来石材料3的电子束扫描显微镜照片。含氧化铝层4基本是单相的并且除了铝和氧外还含有铬。
在莫来石材料3和含氧化铝层4之间的分界区域7内可以看到尖峰状结构6，其在莫来石材料3和含氧化铝层4之间界面或者说表面2处开始。尖峰状结构6的尖峰8指向含氧化铝层4。尖峰状结构6的宽度b在50nm至200nm之间，而高度h在100nm至500nm之间。

Claims (19)

1.一种施加涂层(1)至莫来石材料(3)的表面(2)的方法，具有：
-借助等离子体化学工艺预处理(Sl)该莫来石材料(3)的表面(2)，在这里，如此激发分子氢，即，出现等离子体活化氢，并且
-借助PVD法将含氧化铝层(4)施加(S2)到该莫来石材料(3)的经过预处理的表面(2)。
2.根据权利要求1所述的方法，其中，所述预处理借助该等离子体化学工艺如此进行，即，硅从该莫来石材料(3)的表面(2)的含硅相去除。
3.根据前述权利要求之一所述的方法，其中，该预处理借助等离子体如此进行，即，该莫来石材料(3)的经过预处理的表面(2)基本上具有α-Al2O3。
4.根据前述权利要求之一所述的方法，其中，该等离子体化学工艺在5x10-3毫巴至5x10-2毫巴之间的总压力下进行。
5.根据前述权利要求之一所述的方法，其中，该PVD方法是反应阴极电火花气化或溅射。
6.根据前述权利要求之一所述的方法，其中，该含氧化铝层(4)作为基本单相的层被施加。
7.根据前述权利要求之一所述的方法，其中，该含氧化铝层(4)作为具有金属宏观颗粒的层被沉积。
8.根据前述权利要求之一所述的方法，其中，该含氧化铝层(4)具有铬、钛、铪、钇、铒、硅和/或锆。
9.根据前述权利要求之一所述的方法，具有：在900℃至1400℃之间范围内的温度将所施加的含氧化铝层(4)热处理(S3)15分钟到60分钟之间的时间。
10.根据权利要求1至8之一所述的方法，具有：借助氧等离子体氧化(S4)所施加的含氧化铝层(4)。
11.根据前述权利要求之一所述的方法，具有：在借助该等离子体化学工艺预处理该莫来石材料(3)的表面(2)之前使含铝材料渗入该莫来石材料(3)的表面(2)。
12.一种莫来石材料(3)，具有布置在该莫来石材料(3)的表面(2)的含氧化铝层(4)，其中，在该莫来石材料(3)和该含氧化铝层(4)之间的分界区域(7)内形成具有指向该含氧化铝层(4)的尖峰(8)的尖峰状结构(6)。
13.根据权利要求12所述的莫来石材料(3)，其中，该尖峰状结构(6)具有含氧化铝的材料或者由氧化铝构成。
14.根据权利要求12或13所述的莫来石材料(3)，其中，该尖峰状结构(6)的宽度b在50纳米至200纳米之间，高度h在l00纳米至500纳米之间。
15.根据权利要求12至14之一所述的莫来石材料(3)，其中，该含氧化铝层的层厚(5)在0.5微米至50微米之间。
16.根据权利要求12至15之一所述的莫来石材料(3)，其中，该含氧化铝层(4)基本上是单相的。
17.根据权利要求12至16之一所述的莫来石材料(3)，其中，该含氧化铝层(4)具有金属宏观颗粒。
18.根据权利要求12至17之一所述的莫来石材料(3)，其中，该含氧化铝层(4)具有铬、钛、铪、钇、铒、硅和/或锆。
19.一种燃气轮机部件，具有根据权利要求12至18之一所述的莫来石材料(3)。
CN202080037658.3A 2019-05-20 2020-05-19 施加涂层至莫来石材料表面的方法、具有涂层的莫来石材料和燃气轮机部件 Pending CN113874542A (zh)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0993423A1 (en) * 1998-04-27 2000-04-19 General Electric Company Article having a modified mullite coating and method of making the same
US6129954A (en) * 1998-12-22 2000-10-10 General Electric Company Method for thermally spraying crack-free mullite coatings on ceramic-based substrates
US20030003328A1 (en) * 2001-06-27 2003-01-02 Irene Spitsberg Environmental/thermal barrier coating system with silica diffusion barrier layer
US20060166019A1 (en) * 2005-01-21 2006-07-27 Irene Spitsberg Thermal/environmental barrier coating for silicon-comprising materials
WO2006099754A1 (de) * 2005-03-24 2006-09-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht
US20060280955A1 (en) * 2005-06-13 2006-12-14 Irene Spitsberg Corrosion resistant sealant for EBC of silicon-containing substrate and processes for preparing same
DE102008004532A1 (de) * 2008-01-15 2009-07-16 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung von Mullitfasern mit nanoskaliger Korngröße
CN104609892A (zh) * 2015-01-14 2015-05-13 中国人民解放军国防科学技术大学 外表沉积SiBCN涂层的莫来石纤维及其制备方法
CN106966763A (zh) * 2016-06-03 2017-07-21 北京航空航天大学 一种发动机环境下纤维增强的复合材料表面涂层及其制备方法
WO2019053257A1 (en) * 2017-09-15 2019-03-21 Oerlikon Surface Solutions Ag, Pfäffikon AL-CR-O COATINGS HAVING SUPERIOR THERMAL STABILITY AND PROCESS FOR PRODUCING THE SAME

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1780294A1 (de) 2005-10-25 2007-05-02 Siemens Aktiengesellschaft Legierung, Schutzschicht zum Schutz eines Bauteils gegen Korrosion und Oxidation bei hohen Temperaturen und Bauteil
DE102007047590A1 (de) * 2007-10-05 2009-04-09 Robert Bosch Gmbh Keramischer Schichtverbund sowie Verfahren zu seiner Herstellung
US20170121232A1 (en) * 2015-10-30 2017-05-04 Rolls-Royce Corporation Coating interface

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0993423A1 (en) * 1998-04-27 2000-04-19 General Electric Company Article having a modified mullite coating and method of making the same
US6129954A (en) * 1998-12-22 2000-10-10 General Electric Company Method for thermally spraying crack-free mullite coatings on ceramic-based substrates
US20030003328A1 (en) * 2001-06-27 2003-01-02 Irene Spitsberg Environmental/thermal barrier coating system with silica diffusion barrier layer
US20060166019A1 (en) * 2005-01-21 2006-07-27 Irene Spitsberg Thermal/environmental barrier coating for silicon-comprising materials
WO2006099754A1 (de) * 2005-03-24 2006-09-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht
EP1863947A1 (de) * 2005-03-24 2007-12-12 Oerlikon Trading AG, Trübbach Hartstoffschicht
US20060280955A1 (en) * 2005-06-13 2006-12-14 Irene Spitsberg Corrosion resistant sealant for EBC of silicon-containing substrate and processes for preparing same
DE102008004532A1 (de) * 2008-01-15 2009-07-16 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung von Mullitfasern mit nanoskaliger Korngröße
CN104609892A (zh) * 2015-01-14 2015-05-13 中国人民解放军国防科学技术大学 外表沉积SiBCN涂层的莫来石纤维及其制备方法
CN106966763A (zh) * 2016-06-03 2017-07-21 北京航空航天大学 一种发动机环境下纤维增强的复合材料表面涂层及其制备方法
WO2019053257A1 (en) * 2017-09-15 2019-03-21 Oerlikon Surface Solutions Ag, Pfäffikon AL-CR-O COATINGS HAVING SUPERIOR THERMAL STABILITY AND PROCESS FOR PRODUCING THE SAME

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘宗昌等: "《材料组织结构转变原理》", 冶金工业出版社, pages: 270 - 272 *

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