CN113843460A

CN113843460A - Photoelectric liquid coupling conduction tube electrode for laser electrolysis combined machining

Info

Publication number: CN113843460A
Application number: CN202111109215.3A
Authority: CN
Inventors: 李勇; 刘国栋; 佟浩; 闫剑锋; 姚尧
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2021-09-22
Filing date: 2021-09-22
Publication date: 2021-12-28
Anticipated expiration: 2041-09-22
Also published as: CN113843460B

Abstract

The invention discloses a photoelectric-hydraulic coupling conducting tube electrode for laser electrolysis combined machining, which consists of a light-transmitting substrate, an inner side reflecting cladding, an outer side reflecting cladding, an inner wall conducting layer and an end conducting layer, wherein the light-transmitting substrate is of a tubular structure, the inner side reflecting cladding and the outer side reflecting cladding are respectively positioned on the inner wall surface and the outer wall surface of the light-transmitting substrate, the inner wall conducting layer is positioned on the inner wall of the inner side reflecting cladding, and the end conducting layer is positioned at the end part of the light-transmitting substrate, so that a tube electrode structure for combined machining with synchronous functions of light guiding, electric conduction and liquid guiding and side wall insulation is formed. The tube electrode has the composite functions of transparent substrate light guide, hollow structure liquid guide and end metal layer electric conduction, and the insulating substrate can inhibit electrochemical stray corrosion of the side wall of the insulating substrate on the processed surface.

Description

Photoelectric liquid coupling conduction tube electrode for laser electrolysis combined machining

Technical Field

The invention relates to the technical field of special processing, in particular to a photoelectric-hydraulic coupling conducting tube electrode for laser electrolysis composite processing.

Background

The difficult-to-process metal alloy materials such as stainless steel, titanium alloy, nickel-based alloy and the like are widely applied to manufacturing of structural parts in the fields of automobiles, aerospace, medical appliances and the like. The parts need to be processed with structures such as small holes and grooves with high depth-diameter ratio, and simultaneously, the parts need to have higher processing precision, surface smoothness and no surface damage, thereby meeting the special function requirements of design. Therefore, development of a high-precision, high-efficiency, non-destructive machining technique is urgently required.

In general, when a metal alloy material with high hardness and high strength and difficult to machine is machined, problems of serious tool abrasion, surface burrs and the like exist, and machining of parts of the difficult-to-machine material depends on special machining more. The common special machining such as electric spark machining, electrolytic machining, laser machining and the like has respective process characteristics in the aspects of machining precision and machining efficiency. The efficiency of electric spark machining and conventional laser machining is high, but the machined surface has a heat affected zone and a recast layer; the ultrashort pulse laser has high processing precision and no heat influence area, but processing chips are difficult to discharge, and the depth-to-width ratio of a processing structure is limited; the electrolytic machining has the advantage of good integrity of the machined surface, but the dimensional precision and the machining efficiency of the machined shape need to be improved.

In recent years, compared with conventional continuous or long pulse laser processing, water-guided laser processing combining laser and water jet greatly improves the discharge of processing chips and the processing surface quality and processing precision, but is difficult to realize the processing of small holes with high depth-to-diameter ratio and structures with high depth-to-width ratio.

With the aim of processing small holes with high depth-to-diameter ratio and structures with high depth-to-width ratio, research attempts have been made to adopt laser electrolysis composite processing of metal tube electrodes. And conducting electrolyte by using a hollow metal tube electrode, and reflecting laser through the inner wall of the tube electrode and conducting the electrolyte to a processing area to form laser electrolysis composite processing. Theoretically, laser electrolytic combined machining has the advantages of high laser machining efficiency and no damage to electrolytic machining, but the main problems of the laser electrolytic combined machining method are as follows: the electrolyte absorbs the laser intensity, so that the processing of the high depth-to-diameter ratio small hole and the high depth-to-width ratio structure cannot be realized. The laser light is conducted to the machining area through the electrolyte and is inevitably absorbed by the electrolyte, so that the intensity of the light conducted and applied to the surface of the workpiece is reduced. And the bubbles and the vortex generated in the unsteady flow process of the electrolyte can also weaken the energy acting on the surface of the workpiece, reduce the processing efficiency and even cause the failure of processing. The light intensity of the laser transmitted in the electrolyte for a long distance is weakened along with the processing depth, and becomes more serious along with the processing depth, which is not beneficial to the processing of the high aspect ratio structure.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, an object of the present invention is to provide a photoelectric liquid coupling conductive tube electrode, which has the composite functions of guiding light by a transparent substrate, guiding liquid by a hollow structure and conducting electricity by an end metal layer, and at the same time, an insulating substrate can inhibit electrochemical stray corrosion of a side wall of the insulating substrate on a processed surface, and can solve the problems of processing a high aspect ratio structure on a difficult-to-process material and weakening laser light intensity.

In order to achieve the above object, an embodiment of the invention provides an electro-optical-hydraulic coupling conducting tube electrode for laser electrolysis combined machining, which is composed of a light-transmitting substrate, an inner side reflection cladding, an outer side reflection cladding, an inner wall conducting layer and an end conducting layer, wherein the light-transmitting substrate is of a tubular structure, the inner side reflection cladding and the outer side reflection cladding are respectively located on the inner wall surface and the outer wall surface of the light-transmitting substrate, the inner wall conducting layer is located on the inner wall of the inner side reflection cladding, and the end conducting layer is located at the end of the light-transmitting substrate, so as to form a tube electrode structure for combined machining with synchronous functions of light guiding, electric conduction, liquid guiding and side wall insulation.

Furthermore, the material of the light-transmitting substrate has high light transmission, high refractive index, high strength and good insulating property.

Further, the material of the light-transmitting substrate is preferably quartz glass.

Furthermore, one end face of the light-transmitting substrate is a laser leading-in end, the other end face of the light-transmitting substrate is a laser leading-out end, and laser is conducted to a processing area of laser electrolytic composite processing through total reflection of the light-transmitting substrate.

Furthermore, a conductive connecting hole is formed in the side face of the light-transmitting base body, which is close to the laser light input end, and current output by the pulse power supply is connected to the end portion conductive layer and the inner wall conductive layer through the conductive connecting hole.

Furthermore, an electrolyte lead-in hole is formed in the side face of the light-transmitting base body, close to the laser lead-in end, and electrolyte is flushed into a laser electrolysis combined machining area through the electrolyte lead-in hole and an electrode inner hole of the photoelectric liquid coupling conduction tube.

Further, the end part conducting layer is positioned at the laser leading-out end of the light-transmitting substrate;

the end part conducting layer is composed of an inner annular layer, an outer annular layer and connecting wires, the inner annular layer is directly connected with the inner wall conducting layer, and the inner annular layer is connected with the outer annular layer through at least 1 connecting wire.

Further, the laser leading-out end of the light-transmitting base body is set to be of a flat head structure or a focusing light guide structure for guiding light in parallel, so that when the laser leading-out end adopts the flat head structure, laser is directly irradiated into the processing area, and when the laser leading-out end adopts the focusing light guide structure, the laser is focused into a circle or a ring in the processing area.

Further, the structure for focusing and guiding light is arranged to be a conical structure or a curved surface structure.

A laser, electrolyte and current lead-in mechanism comprises an electro-optical-hydraulic coupling conduction tube electrode, a light beam shaping and lead-in light path and an electro-hydraulic lead-in component;

the laser beam shaping and leading-in optical path is connected with the laser leading-in end of the electrode of the photoelectric liquid coupling conduction tube, so that the laser beam shaping and leading-in optical path is utilized to shape the output light beam of the laser into annular light which is led into the laser leading-in end;

the leading-in subassembly of liquid electricity includes liquid electricity go-between, sealing plug and electric connector, liquid electricity go-between cup joints the outside of outside reflection cladding, the lateral wall of liquid electricity go-between open have with the corresponding fluid entry in electrolyte inlet hole, the sealing plug sets up be close to in the light electric liquid coupling conduction pipe electrode hole laser light incoming end, it has pulse power to connect on the electric connector, the electric connector passes liquid electricity go-between is pegged graft in the conductive connection hole, the electric connector with inner wall conducting layer intercommunication.

Further, the light beam shaping and guiding light path comprises a conical lens and a convex lens, the axis of the conical lens coincides with that of the convex lens, and the convex lens is arranged between the conical lens and the light-transmitting base body, so that laser light is shaped into annular light through the conical lens and the convex lens.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic diagram of an electrode structure of a photoelectric liquid coupling conduction tube provided by the present invention;

FIG. 2 is a top plan view of FIG. 1 of the present invention;

FIG. 3 is a schematic view of a laser discharge end of the present invention having a tapered configuration;

FIG. 4 is a schematic diagram of a laser configuration structure formed when the laser light output end provided by the present invention is a flat-head light guide structure;

FIG. 5 is a schematic diagram of a laser configuration structure formed when the laser light output end is a focusing light guide structure according to the present invention;

FIG. 6 is a schematic diagram of a laser configuration structure formed when the laser light output end is a focusing light guide structure according to the present invention;

FIG. 7 is a schematic diagram of a laser configuration structure formed when the laser light output end is a focusing light guide structure according to the present invention;

FIG. 8 is a schematic diagram of the laser, electrolyte and current introduction mechanism provided by the present invention;

FIG. 9 is a schematic view of the structure of FIG. 8 when subjected to direct laser light;

FIG. 10 is a schematic view of the structure of FIG. 8 when a focused laser beam is applied;

fig. 11 is a schematic structural diagram of a beam shaping and guiding optical path and an electro-hydraulic guiding assembly according to the present invention.

Reference numerals: 1. photoelectric liquid coupling conductive tube electrode; 101. a light-transmissive substrate; 102. an inner reflective cladding; 103. an outer reflective cladding; 104. an inner wall conductive layer; 105. an end portion conductive layer; 1051. an inner annular layer; 1052. an outer annular layer; 1053. a connecting wire; 106. a conductive connection hole; 107. an electrolyte introduction hole; 108. a laser light input end; 109. a laser light output end; 110. an electrode inner hole of the photoelectric liquid coupling conduction tube; 2. shaping and guiding light beams into a light path; 201. a conical lens; 202. a convex lens; 3. a hydraulic-electric lead-in component; 301. a liquid-electric connecting ring; 302. a pulse power supply; 303. an electrical connector; 304. a sealing plug; 305. a fluid inlet; 4. and (5) processing the workpiece.

Detailed Description

Embodiments of the present invention will be described in detail below, the embodiments described with reference to the drawings being illustrative, and the embodiments of the present invention will be described in detail below.

An electro-optically-hydraulically coupled conducting tube electrode 1 according to an embodiment of the present invention is described below with reference to fig. 1-11.

In order to realize the processing of the high depth-to-diameter ratio small hole and the high depth-to-width ratio structure, the embodiment of the invention provides a photoelectric liquid coupling conduction tube electrode 1; comprises a light-transmitting substrate 101, an inner reflective cladding 102, an outer reflective cladding 103, an inner wall conductive layer 104 and an end conductive layer 105; the light-transmitting matrix 101 is a tubular structure, the inner reflective cladding 102 and the outer reflective cladding 103 are respectively located on the inner wall surface and the outer wall surface of the light-transmitting matrix 101, the outer reflective cladding 103 completely covers the whole outer wall of the light-transmitting matrix 101, the inner wall conductive layer 104 is located on the inner wall of the inner reflective cladding 102 and covers the inner surface of the whole inner reflective cladding 102, both ends of the inner reflective cladding 102 are flush with both ends of the inner wall of the light-transmitting matrix 101, the basic shape of the inner reflective cladding is a hollow tube structure, the inner wall conductive layer 104 is axially continuous and has uniform radial wall thickness, the main function is to guide an electric field in electrolytic machining, and the end conductive layer 105 is located at the end of the light-transmitting matrix 101, so that a tube electrode structure for composite machining with synchronous functions of light guiding, electric conduction and liquid guiding and side wall insulation is formed.

The material of the light-transmitting substrate 101 is a material having high light transmittance, high refractive index, high strength, and insulation, and is preferably quartz glass.

Meanwhile, one end face of the transparent substrate 101 is a laser leading-in end 108, the other end face is a laser leading-out end 109, and laser is conducted to a processing area of laser electrolytic composite processing through total reflection of the transparent substrate 101.

In one embodiment of the present application, the end conductive layer 105 is located at the laser lead-out end of the light-transmissive substrate 101; end conductive layer 105 is composed of inner annular layer 1051, outer annular layer 1052 and connecting lines 1053, inner annular layer 1052 is directly connected to inner wall conductive layer 104, inner annular layer 1051 and outer annular layer 1052 are connected by at least 1 connecting line 1053, and may be connected by 1-2 connecting lines 1053, that is, inner annular layer 1051 covers the end faces of inner reflective cladding 102 and inner wall conductive layer 104, and outer annular layer 1052 covers the end face of outer reflective cladding 103.

Specifically, the light-transmitting substrate 101, the inner reflective cladding 102 and the outer reflective cladding 103 have the same axial dimension and uniform radial wall thickness; the main function of the inner reflective cladding 102 and the outer reflective cladding 103 is to confine laser light to propagate in the light guide matrix by total reflection, reducing radiation loss.

A light-transmitting quartz glass tube is used as a light-transmitting substrate 101 (electrode substrate), the light-transmitting substrate 101 and reflective coatings arranged on the inner wall surface and the outer wall surface efficiently conduct laser energy, and meanwhile, the electrical insulation property of the quartz glass tube plays a role in inhibiting stray corrosion of electrolytic machining due to side wall insulation; partially preparing conductive layers on the inner wall surface and the end surface of the quartz glass tube to form an electrode for electrolytic machining, and guiding electrolyte into a machining area in the hollow light-transmitting matrix 101; the tube electrode which couples and conducts light, electricity and liquid is beneficial to the combined machining effect of laser and electrolysis.

Further, a conductive connection hole 106 and an electrolyte introduction hole 107 are provided in a side wall of one end of the light-transmitting base 101, and the conductive connection hole 106 and the electrolyte introduction hole 107 are provided at an end opposite to the end conductive layer 105.

Specifically, a conductive connection hole 106 and an electrolyte introduction hole 107 are formed in the side wall of the light-transmitting base 101, and the conductive connection hole 106 and the electrolyte introduction hole 107 are located at a laser introduction end 108; the end face of the laser light input end 108 is uncovered and used for guiding laser light; the conductive connecting hole 106 and the electrolyte lead-in hole 107 are through holes, synchronous lead-in of light, electricity and liquid can be achieved, the internal conductive layer can be connected with a power supply through the conductive connecting hole 106, specifically, current output by a pulse power supply is connected to the end conductive layer 105 and the inner wall conductive layer 104 through the conductive connecting hole 106, and the electrolyte is flushed into a processing area of laser electrolysis combined processing through the electrolyte lead-in hole 107 and the electrode inner hole 110 of the photoelectric liquid coupling conductive tube.

The axis of the conductive connection hole 106 of the present invention coincides with the axis of the electrolyte introduction hole 107, and when there are two connection lines 1053, the axis of the conductive connection hole 106 and the electrolyte introduction hole 107 is coplanar with the two connection lines 1053.

In one embodiment of the present application, the laser leading-out end 109 of the transparent substrate 101 is configured as a flat head structure for guiding light in parallel or a structure for guiding light in a focusing manner, so that when the laser leading-out end 109 adopts the flat head structure, the laser is directly irradiated into the processing area, and when the laser leading-out end 109 adopts the structure for guiding light in a focusing manner, the laser is focused into a circle or a ring in the processing area.

In detail, the end surface of the laser input end 108 is a plane perpendicular to the axis of the transparent substrate 101, and the end surface of the laser output end 109 may be a plane perpendicular to the transparent substrate 101 (as shown in fig. 4), where the laser directly incident on the processing area is annular; the end face of the laser light exit end 109 may also be a special structure capable of focusing light guiding, such as: a tapered configuration (as in fig. 5 and 6) or a curved configuration (as in fig. 7).

In the electrode 1 of the photoelectric liquid coupling conduction tube according to the embodiment of the invention, the light-transmitting substrate 101 is made of a material with high light transmission, high refractive index, high strength and good insulating property, preferably quartz glass, and has the characteristics of high light transmission, low transmission loss, higher refractive index, easiness in processing and the like, so that the absorption loss and the scattering loss in the laser transmission process can be reduced; the transparent matrix 101 adopts a central control tubular structure, so that pressurized electrolyte can be flushed into a processing area to be rapidly updated and processed products can be discharged, and the insulating property of the outer side wall can inhibit stray electrolytic corrosion; the materials of the inner reflection cladding and the outer reflection cladding are preferably high-purity quartz doped with low-refractive-index dopants, and the inner reflection cladding and the outer reflection cladding are characterized by easy adhesion to the light-transmitting substrate 101, low refractive index, controllability in the preparation process and the like; the inner conductive layer 104 can be made of metal materials such as silver and platinum, and has the characteristics of strong adhesion capability, high conductivity and the like.

The photoelectric liquid coupling conduction tube electrode 1 provided by the invention has the following characteristics: 1) the light-transmitting substrate 101 and the inner and outer reflective cladding 103 of the electro-optical liquid coupling conductive tube electrode 1 provide and limit a laser propagation path, and the propagation loss of laser light propagating from a laser outlet to a processing surface can be greatly reduced. 2) The light transmission design and the regional conductive layer design of the end surface of the electrode 1 of the photoelectric liquid coupling conductive tube can realize the controllable and efficient coupling of a laser light field, an electrolytic electric field and a flow field in a processing region; 3) the hollow tube electrode structure can realize continuous processing of a high-depth-to-width ratio structure; 4) the photoelectric liquid coupling conduction tube electrode 1 has the technical feasibility of batch preparation.

The embodiment of the invention provides a preparation method of a photoelectric liquid coupling conduction tube electrode 1, which comprises the following steps:

the method comprises the following steps: providing a graphite target rod, and depositing SiF on the outer surface of the graphite target rod₄Doped quartz as the inner reflective cladding 102;

step two: depositing GeO2 doped quartz as a light transmissive matrix 101 on the outer surface of the inner reflective cladding 102;

step three: deposition of SiF on the outer surface of a light-transmitting substrate 101₄Doped quartz as the outer reflective cladding 103;

step four: drying and purifying and sintering the graphite target rod subjected to the three-time deposition, then taking out the graphite target rod to obtain a combination of the light-transmitting substrate 101 and the inner side reflecting cladding 102 and the outer side reflecting cladding 103, and finishing and grinding the end face of the combination;

step five: completely covering one end face of the combined body with photoresist, only covering the end face of the light-transmitting substrate 101 with photoresist on the other end face, covering the outer surface of the outer side reflection cladding 103 with photoresist, removing the photoresist at the connecting line 1053, performing cleaning, roughening, sensitizing and activating treatment on the inner surface of the inner side reflection cladding 102, then placing the combined body in chemical plating solution for silver plating, and then taking the combined body out of the chemical plating solution to obtain an inner wall conductive layer 104 and an end portion conductive layer 105;

step six: two through holes are formed in the side wall of the end face of the joined body which completely covers the photoresist, and serve as an electrolyte introduction hole 107 and a conductive connection hole 106, respectively.

Specifically, another embodiment of the invention provides a method for preparing a photoelectric liquid coupling conductive tube electrode 1, which comprises depositing SiF with a thickness of 30 μm on the outer surface of a graphite target rod with a diameter of 200 μm₄Doped high purity quartz as the inner reflective cladding 102; depositing 540 μm GeO on the outer surface of the outer reflective cladding₂Doped high-purity quartz is used as a light-transmitting substrate 101, and SiF with the thickness of 30 μm is deposited on the outer surface of the light-transmitting substrate 101₄The doped high-purity quartz is used as an outer reflecting cladding 103, the obtained graphite target rod is subjected to three times of deposition to obtain a combined body of the inner reflecting cladding 102, the light-transmitting substrate 101 and the outer reflecting cladding 103, the combined body is dried, purified and sintered, the graphite target rod is taken out, and then the end face of the combined body is trimmed and ground; in this case, the end of the combined body may be processed into an optical shape necessary for light guiding and focusing, if necessary.

The end face of the laser input end 108 of the combination is completely covered with photoresist, the laser output end 109 only covers the end face of the light-transmitting substrate 101 with photoresist, and removes the photoresist at the connecting line 1053 (in this embodiment, the scheme of two connecting lines 1053 is adopted), the outer surface of the combination is completely covered with photoresist, then the combination is cleaned, roughened, sensitized and activated at the place where the photoresist is not covered, then the combination is placed in a chemical plating solution to plate a silver layer, the thickness of the silver layer is controlled at 5 μm, the photoresist is used as a mask to ensure that the insulation of the electrode 1 of the photoelectric liquid coupling conduction tube is not affected after the silver layer is plated, and the inner wall conducting layer 104 and the end conducting layer 105 are obtained after the photoresist is removed.

Processing two through holes with the diameters of 100 micrometers and 50 micrometers at one end of the combined body passing through the silver coating layer to be respectively used as an electrolyte leading-in hole 107 and a conductive connecting hole 106, wherein the two through holes are positioned at one end of the combined body completely covering the photoresist when the combined body is coated with the silver coating layer, and the axes of the two through holes are coincided with the diameter of the light-transmitting base body 101; and processing the through hole to obtain the final photoelectric liquid coupling conduction tube electrode 1.

The photoelectric liquid coupling conduction tube electrode 1 prepared by the method has the outer diameter of less than 800 microns, the inner diameter of 200 microns, the thicknesses of an inner reflection cladding and an outer reflection cladding of 30 microns, and the thicknesses of an inner wall conductive layer 104, an end conductive layer 105 and a connecting line 1053 of 5 microns, wherein the widths of an inner annular layer 1051 and an outer annular layer 1052 of the end conductive layer 105 are both 30 microns, and the widths of two intermediate connecting lines 1053 are 10 microns; the diameter of the electrolyte introduction hole 107 is 100 μm, and the diameter of the conductive connection hole 106 is 50 μm; two through-holes are micropores, and excessive light intensity loss is avoided.

In another embodiment of the present invention, a laser, electrolyte and current introducing mechanism is provided, as shown in fig. 8, including an electro-optical liquid coupling conductive tube electrode 1, a beam shaping and introducing optical path 2, and a liquid electrical introducing component 3.

The beam shaping and guiding optical path 2 comprises a conical lens 201 and a convex lens 202, the axes of the conical lens 201 and the convex lens 202 are overlapped, the convex lens 202 is arranged between the conical lens 201 and the transparent base body 101, laser passes through the conical lens 201 and then becomes annular light, and then the annular light is adjusted in the incident direction by the convex lens 202 and then enters the transparent base body 101 along the axis of the transparent base body 101.

The liquid-electricity leading-in component 3 comprises a liquid-electricity connecting ring 301, the liquid-electricity connecting ring 301 is sleeved on the outer surface of the outer reflecting cladding 103, and a fluid inlet 305 and a conductive port are arranged on the side wall of the liquid-electricity connecting ring 301 corresponding to the electrolyte leading-in hole 107 and the conductive connecting hole 106; the electrohydraulic leading-in component 3 further comprises a sealing plug 304, wherein the sealing plug 304 is arranged at one end, close to the laser leading-in end 108, in the inner hole 110 of the photoelectric liquid coupling transmission tube electrode 1 and is used for sealing the laser leading-in end 108 of the light-transmitting substrate 101; the liquid electricity leading-in component 3 further comprises an electric connector 303, the electric connector 303 is connected with a pulse power supply 302, and the electric connector 303 penetrates through the liquid electricity connecting ring 301 to be inserted into the conductive connecting hole 106 and is communicated with the inner wall conductive layer 104.

As shown in fig. 9, when the end face of the laser leading-out end 109 of the electro-optical liquid coupling conduction tube electrode 1 is perpendicular to the plane of the light-transmitting substrate 101, annular light is formed inside the processing workpiece 4; as shown in fig. 10, when the end face of the laser leading end 109 has a special structure capable of focusing and guiding light, the laser light is in the middle inside the workpiece 4; the bottom of the workpiece 4 can be processed in all directions by providing different laser light emitting ends 109.

The light beam shaping and leading-in light path 2 and the liquid electricity leading-in component 3 can realize alignment connection through a processing main shaft, so that synchronous leading-in composite processing of light, electricity and liquid of the photoelectric-liquid coupling conducting tube electrode 1 is realized.

In the laser, electrolyte and current introduction mechanism provided by this embodiment, the laser lead-out end 109 of the electrode 1 of the electro-optical liquid coupling conduction tube is inserted into a workpiece, and the electrolyte enters the inner cavity of the electrode 1 of the electro-optical liquid coupling conduction tube through the electrolyte introduction hole 107 and then is flushed into a processing area; the processing workpiece 4 is connected with the pulse power supply 302 connected to the electric connector 303 through a lead, and at the moment, a closed loop is formed among the processing workpiece 4, the pulse power supply 302, the electric connector 303, the inner wall conductive layer 104 and the end conductive layer 105, so that current is led in; the light beam shaping and guiding optical path 2 is arranged above the laser guiding end 108, laser emitted by a laser firstly passes through the conical lens 201, is adjusted into annular light through the conical lens 201, then is adjusted in the incident direction through the convex lens 202, and is emitted into the light-transmitting base body 101 along the axis of the photoelectric liquid coupling conducting tube electrode 1, and then enters a processing area.

In the description of the present application, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims

1. The utility model provides a laser electrolysis combined machining is with photoelectricity liquid coupling conduction pipe electrode, its characterized in that, photoelectricity liquid coupling conduction pipe electrode comprises printing opacity base member, inboard reflection covering, outside reflection covering, inner wall conducting layer and tip conducting layer, the printing opacity base member is the tubular structure, inboard reflection covering with outside reflection covering is located the interior, the outer wall surface of printing opacity base member respectively, the inner wall conducting layer is located on the inboard reflection covering inner wall, the tip conducting layer is located the tip of printing opacity base member to form the pipe electrode structure that leaded light, electrically conductive, drain and the insulating synchronization action of lateral wall combined machining used.

2. The electro-optic liquid coupling conduction tube electrode for the laser electrolysis combined machining according to claim 1, wherein the material of the light-transmitting matrix has high light transmission, high refractive index, high strength and good insulating property.

3. The electro-optical liquid coupling conduction tube electrode for laser electrolysis combined machining according to claim 2, wherein the material of the light-transmitting substrate is quartz glass.

4. The electro-optical liquid coupling conduction tube electrode for laser electrolysis combined machining according to claim 1, wherein one end face of the light-transmitting substrate is a laser introduction end, the other end face is a laser emission end, and laser is transmitted to a machining area of laser electrolysis combined machining through total reflection by the light-transmitting substrate.

5. The electro-optical-hydraulic coupling conduction tube electrode for laser electrolysis combined machining according to claim 4, wherein a conductive connection hole is formed in the side face of the light-transmitting base body close to the laser introduction end, and current output by the pulse power supply is connected to the end portion conductive layer and the inner wall conductive layer through the conductive connection hole.

6. The electro-optical liquid coupling conduction tube electrode for laser electrolysis combined machining according to claim 4, wherein an electrolyte introduction hole is formed in the side surface of the light-transmitting base body at a position close to the laser introduction end, and electrolyte is flushed into a machining area of laser electrolysis combined machining through the electrolyte introduction hole and an inner hole of the electro-optical liquid coupling conduction tube electrode.

7. The electro-optical-hydraulic coupling conducting tube electrode for laser electrolysis combined machining according to claim 4, wherein the end conducting layer is positioned at a laser leading-out end of the light-transmitting substrate;

8. The electro-optical-hydraulic coupling conducting tube electrode for the laser electrolysis combined machining is characterized in that the laser leading-out end of the light-transmitting base body is arranged to be of a flat-head structure or a focusing light-guiding structure for guiding light in parallel, so that when the laser leading-out end is of the flat-head structure, laser is directly irradiated into a machining area, and when the laser leading-out end is of the focusing light-guiding structure, the laser is focused into a circle or a ring in the machining area.

9. The electro-optical-hydraulic coupling conducting tube electrode for the laser electrolysis combined machining according to claim 8, wherein the structure for focusing and guiding light is a conical structure or a curved structure.

10. A laser, electrolyte and current leading-in mechanism, which is characterized by comprising the electro-optical liquid coupling conduction tube electrode, a beam shaping and leading-in optical path and an electro-optical liquid leading-in component as claimed in any one of claims 1 to 9;

the laser beam shaping and guiding light path is connected with the laser guiding end of the electrode of the photoelectric liquid coupling conducting tube, the laser beam shaping and guiding light path comprises a conical lens and a convex lens, the axis of the conical lens is superposed with that of the convex lens, the convex lens is arranged between the conical lens and the light-transmitting base body, so that laser is shaped into annular light through the conical lens and the convex lens, and the annular light is guided into the laser guiding end;

the leading-in subassembly of liquid electricity includes liquid electricity go-between, sealing plug and electric connector, liquid electricity go-between cup joints the outside of outside reflection cladding, the lateral wall of liquid electricity go-between open have with the corresponding fluid entry in electrolyte inlet hole, the sealing plug sets up be close to in the light electric liquid coupling conduction pipe electrode hole the one end of laser light incoming end, it has pulse power to connect on the electric connector, the electric connector passes liquid electricity go-between is pegged graft in the conductive connection hole, the electric connector with the inner wall conducting layer intercommunication.