CN113808986A - Transfer alignment system and transfer alignment method - Google Patents

Transfer alignment system and transfer alignment method Download PDF

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Publication number
CN113808986A
CN113808986A CN202111063168.3A CN202111063168A CN113808986A CN 113808986 A CN113808986 A CN 113808986A CN 202111063168 A CN202111063168 A CN 202111063168A CN 113808986 A CN113808986 A CN 113808986A
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alignment
light
emitting unit
carrying platform
coordinate data
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王正根
孟祥宽
张延凯
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Maiwei Technology Zhuhai Co ltd
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Suzhou Maxwell Technologies Co Ltd
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Priority to CN202111063168.3A priority Critical patent/CN113808986A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0093Wafer bonding; Removal of the growth substrate

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The embodiment of the application provides a transfer alignment system and a transfer alignment method, which are used for transferring and aligning a first light-emitting unit and a second light-emitting unit. The transfer alignment system comprises: the first carrying platform and the second carrying platform are respectively used for carrying the first light-emitting unit and the second light-emitting unit which are conveyed by the feeding mechanism; the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane; the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area; the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit; and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state. Therefore, the huge transfer of the light-emitting units in the production process of the MicroLED is realized fully automatically and with high precision.

Description

Transfer alignment system and transfer alignment method
Technical Field
The present application relates to the field of automatic control technologies, and in particular, to a transfer alignment system and a transfer alignment method.
Background
Since the first television in the world was born in 1925, the first color television in the world was applied in 1929, and the display industry developed in nearly a century, from the initial electronic picture tube to the Liquid Crystal Display (LCD) screen, the television was driven to develop from a large block to a flat panel television with a smaller volume. With the continuous progress of science and production technology, OLED screens that are more energy efficient and can be bent have been introduced in the past years. Compared with an OLED screen, the LCD has the advantages of thick screen body, low contrast and low reaction speed; although OLED screens have many advantages, they do not have a long enough lifetime and low resolution. The advantages and the disadvantages of the two are comprehensively considered, and concepts of a MicroLED and a MiniLED are proposed in recent years, wherein the MiniLED is used for reducing the size of a direct type LED backlight module, and the panel color plate is very good and the contrast is very high; however, the method increases the usage amount of the LED, has high cost and is not easy to be popularized and used in a large area.
The difference between the micro led and the OLED is that it is not made of organic materials, but is made of gallium nitride, which is a new material, so that it will not have image burn-in (commonly called burn-in) like the OLED even after long-term use. A micro led display, like an OLED, has perfect black, excellent color and near perfect tilt angle, and it will be brighter, less prone to aging, and cheaper than an OLED in the long run. The micro led television is also based on a modular system, allowing the user to customize the screen size. Currently, the production cost of micro leds is still too high compared to OLEDs, and the existing bulk transfer schemes result in too high production costs.
Disclosure of Invention
In order to solve the foregoing technical problems, an embodiment of the present application provides a transfer alignment system and a transfer alignment method.
In a first aspect, an embodiment of the present application provides a transfer alignment system, configured to transfer and align a first light emitting unit and a second light emitting unit; the transfer alignment system comprises:
the first carrying platform and the second carrying platform are respectively used for carrying the first light-emitting unit and the second light-emitting unit which are conveyed by the feeding mechanism;
the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane;
the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area;
the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit;
and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
According to a specific embodiment of the present disclosure, the plane moving mechanism includes a horizontal axis driving component and a vertical axis driving component, and control ends of the horizontal axis driving component and the vertical axis driving component are both connected to the processor in communication;
the driving direction of the transverse shaft driving component is perpendicular to the driving direction of the longitudinal shaft driving component.
According to a specific embodiment of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjusting mechanism, wherein control ends of the lifting mechanism and the adjusting mechanism are both in communication connection with the processor;
the lifting mechanism is used for driving the first carrying platform to be close to or far away from the adsorption platform in the alignment area;
the adjusting mechanism is used for adjusting the movement of the second carrying platform.
According to a specific embodiment of the present disclosure, the adjustment mechanism includes a six degree of freedom drive mechanism.
According to a specific embodiment of the present disclosure, the alignment cameras include a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both in communication connection with the processor;
the image acquisition area of the first alignment camera faces the adsorption platform and is used for acquiring first coordinate data of a first light-emitting unit on the adsorption platform;
the image acquisition area of the second alignment camera faces the second stage and is used for acquiring second coordinate data of a second light-emitting unit on the second stage.
According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three discrete alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second stage;
the alignment detection sensor is used for detecting the parallelism of the second carrying platform relative to the adsorption platform.
In a second aspect, an embodiment of the present application provides a transfer alignment method, which is applied to the transfer alignment system of any one of the first aspects; the method comprises the following steps:
the feeding mechanism feeds the first light-emitting unit to the first carrying platform and feeds the second light-emitting unit to the second carrying platform;
the plane moving mechanism moves the first carrying platform to an alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrying platform;
the plane moving mechanism moves the second carrying platform to the alignment area;
the alignment camera respectively collects first coordinate data of a first light-emitting unit and second coordinate data of a second light-emitting unit on the second carrying platform;
and the processor controls the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
According to a specific embodiment of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjusting mechanism, wherein control ends of the lifting mechanism and the adjusting mechanism are both in communication connection with the processor;
after the step of moving the first stage to the alignment area by the plane moving mechanism, the method further includes:
the lifting mechanism drives the first carrying platform to be close to the adsorption platform in the alignment area;
the step of controlling the second stage to move by the processor according to the first coordinate data and the second coordinate data includes:
the processor determines adjustment data according to the first coordinate data and the second coordinate data;
the adjusting mechanism adjusts the movement of the second stage according to the adjustment data.
According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three discrete alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second stage;
after the step of moving the second stage to the alignment area by the plane moving mechanism, the method further includes:
the alignment detection sensor detects the parallelism of the second carrying platform relative to the adsorption platform;
the adjusting mechanism adjusts the movement of the second carrying platform according to the parallelism.
According to a specific embodiment of the present disclosure, the alignment cameras include a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both in communication connection with the processor;
the step of the alignment camera respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second carrying platform comprises the following steps:
the image acquisition area of the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first mark point of a first light-emitting unit on the adsorption platform;
the image acquisition area of the second alignment camera faces the second carrying platform, and second coordinate data of a second mark point of a second light-emitting unit on the second carrying platform are acquired.
The transfer alignment system and the transfer alignment method provided by the application are used for transferring and aligning the first light emitting unit and the second light emitting unit. Wherein the transfer alignment system comprises: the first carrying platform and the second carrying platform are respectively used for carrying the first light-emitting unit and the second light-emitting unit which are conveyed by the feeding mechanism; the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane; the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area; the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit; and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state. Therefore, the huge transfer of the light-emitting units in the production process of the MicroLED is realized fully automatically and with high precision.
Drawings
In order to more clearly explain the technical solutions of the present application, the drawings needed to be used in the embodiments are briefly introduced below, and it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope of protection of the present application. Like components are numbered similarly in the various figures.
Fig. 1 is a schematic structural diagram illustrating a transfer alignment system according to an embodiment of the present disclosure;
fig. 2 to fig. 7 are schematic structural diagrams illustrating a part of a transfer alignment system according to an embodiment of the present application.
Summary of reference numerals:
the device comprises a transverse shaft driving assembly 1, a gantry 2, a laser working unit 3 and an upper alignment device 4;
the device comprises a lifting mechanism 5, a first carrying platform 6, a second carrying platform 7, an upper alignment mounting plate 8, an upper alignment Y axis 9, an upper alignment XZ axis 10, an upper alignment camera 11, an alignment detection sensor 12 and an adsorption platform 13;
an adjusting mechanism 15, a lower alignment camera 16, a lower alignment driving shaft 17 and a lifting mechanism 18.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments.
The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
Hereinafter, the terms "including", "having", and their derivatives, which may be used in various embodiments of the present application, are intended to indicate only specific features, numbers, steps, operations, elements, components, or combinations of the foregoing, and should not be construed as first excluding the existence of, or adding to, one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing.
Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of the present application belong. The terms (such as those defined in commonly used dictionaries) should be interpreted as having a meaning that is consistent with their contextual meaning in the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein in various embodiments.
Example 1
Referring to fig. 1, a schematic structural diagram of a transfer alignment system according to an embodiment of the present disclosure is shown, where the transfer alignment system is used for transferring and aligning a first light emitting unit and a second light emitting unit. As shown in fig. 1, the transfer alignment system mainly includes:
the first carrying platform 6 and the second carrying platform 7 are respectively used for carrying a first light-emitting unit and a second light-emitting unit which are conveyed by the feeding mechanism;
a plane moving mechanism for driving the first stage 6 and the second stage 7 to move on a horizontal plane;
an adsorption platform 13, disposed in the alignment area, for adsorbing the first light emitting unit on the first stage 6 after the first stage 6 moves to the alignment area;
the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit;
and the processor is used for controlling the second carrying platform 7 to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
The transfer alignment system provided by the embodiment is applied to a transfer alignment process of a light emitting unit in a micro led processing technology. As shown in fig. 2, the upper part is a schematic diagram of the first light emitting unit Carrier1 and the second light emitting unit Carrier2 which require the transfer of the alignment, and the lower part is a schematic diagram of the light emitting unit after the transfer of the alignment. The processor is a main control device for transferring the alignment process and controls the work of the carrier, the moving mechanism, the adsorption platform 13 and the like.
In the provided transfer alignment system, as shown in fig. 3, it is a schematic structural diagram of the first stage 6, and fig. 4 is a schematic structural diagram of the second stage 7. The first carrier 6 and the second carrier 7 are respectively used for carrying the first light-emitting unit and the second light-emitting unit conveyed by the feeding mechanism. The plane movement mechanism is configured to drive the first stage 6 and the second stage 7 to move on a horizontal plane.
According to a specific embodiment of the present disclosure, the plane moving mechanism includes a horizontal axis driving assembly 1 and a vertical axis driving assembly 5, and control ends of the horizontal axis driving assembly 1 and the vertical axis driving assembly 5 are both connected to the processor in communication;
the driving direction of the transverse shaft driving component 1 is perpendicular to the driving direction of the longitudinal shaft driving component 5.
The plane movement mechanism includes a horizontal axis drive unit 1 and a vertical axis drive unit 5, the horizontal axis drive unit 1 can drive the first stage 6 or the second stage 7 to move along the horizontal axis on the horizontal plane, and the vertical axis drive unit 5 can drive the first stage 6 or the second stage 7 to move along the vertical axis on the horizontal plane. Generally, a reference coordinate system is established, the driving direction of the horizontal axis driving assembly 1 is parallel to the x axis, and the driving direction of the vertical axis driving assembly 5 is parallel to the y axis, as shown in fig. 5, which is a schematic structural diagram of the vertical axis driving assembly 5 driven along the y axis.
An alignment area is provided, the transfer alignment is completed in the alignment area, and the adsorption platform 13 and the alignment camera are both disposed in the alignment area. After the plane driving mechanism moves the first stage 6 to the alignment area, the adsorption platform 13 adsorbs the first light emitting unit on the first stage 6. Thereafter, the first stage 6 is removed, and the second stage 7 is moved to below the suction table 13.
In the alignment process, after the second stage 7 moves to a position below the suction platform 13, the second light emitting unit on the second stage 7 and the first light emitting unit under the suction platform 13 are located in the alignment area, but are not completely aligned.
The alignment camera is used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit and sending the first coordinate data and the second coordinate data to the processor. The processor controls the second stage 7 to move according to the first coordinate data and the second coordinate data, so that the second light-emitting unit and the first light-emitting unit are in an aligned state.
According to a specific embodiment of the present disclosure, the transfer alignment system further includes a lifting mechanism 18 and an adjusting mechanism 15, and control ends of the lifting mechanism 18 and the adjusting mechanism 15 are both in communication connection with the processor;
the lifting mechanism 18 is configured to drive the first stage 6 to approach or depart from the adsorption platform 13 in the alignment area;
the adjustment mechanism 15 is used to adjust the movement of the second stage 7.
In the present embodiment, in consideration of the fact that the adsorption platform 13 has a certain height, a driving mechanism in the vertical direction is added, and the driving mechanism includes a lifting mechanism 18 for driving the first stage 6 and an adjusting mechanism 15 for driving the second stage 7, where the vertical direction may be a z-axis in a reference coordinate system. Specifically, the adjusting mechanism 15 may include a six-degree-of-freedom driving mechanism, and the state of the six-axis motion platform 15 is adjusted by controlling the amount of motion of the six axes. The adjusting mechanism 15 is further connected with a lower alignment camera 16 and a lower alignment driving shaft 17, the lower alignment driving shaft 17 comprises a motor lead screw module, and the motor lead screw module drives a lead screw to drive the lower alignment camera 16 to lift and focus.
The driving mechanism in the vertical direction perpendicular to the horizontal plane is additionally arranged, so that the device can be suitable for light-emitting units, adsorption platforms 13 or operation platforms with different heights and thicknesses.
According to another specific embodiment of the present disclosure, the alignment cameras include a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both in communication connection with the processor;
the image acquisition area of the first alignment camera faces the adsorption platform 13 and is used for acquiring first coordinate data of a first light-emitting unit on the adsorption platform 13;
the image acquisition area of the second alignment camera faces the second stage 7, and is configured to acquire second coordinate data of a second light-emitting unit on the second stage 7.
In this embodiment, two alignment cameras are provided to collect coordinate data of the light emitting units in two different orientations, respectively. The first alignment camera is aligned upward, that is, collects the first light emitting unit adsorbed under the adsorption platform 13 upward. The second alignment camera is aligned downwards, that is, the second light-emitting unit on the second carrying platform 7 is collected downwards. Fig. 6 is a schematic structural view of an upper alignment mechanism facing the adsorption stage 13, and fig. 7 is a schematic structural view of a lower alignment mechanism facing the second stage 7. Therefore, the light emitting units in different directions can be synchronously collected, and synchronous positioning is realized.
According to a specific embodiment of the present disclosure, the adsorption platform 13 is further provided with three discrete alignment detection sensors 12, and the alignment detection sensors 12 are located between the adsorption platform 13 and the second stage 7;
the alignment detection sensor 12 is configured to detect the parallelism of the second stage 7 with respect to the adsorption platform 13.
Of course, the transfer alignment system may include other secondary functions in addition to the primary functions described above. As shown in fig. 1, the whole system is disposed on a base, which may be a marble base, to provide a stable supporting function for the whole system. Holes are formed in non-operation or non-support areas on two sides of the gantry, so that the purpose of reducing weight is achieved. In addition, tow chains are arranged on two sides of the system and used as a conveying mechanism to realize the light-emitting units on the transfer alignment stations. In addition, there are some conventional fixing screws, buckles, sealing elements, etc., which are not described in detail.
Referring to fig. 1 to 7, an implementation of the provided transfer alignment system will be explained with reference to a specific example.
The feeding mechanism correspondingly feeds the first light-emitting unit Carrier1 and the second light-emitting unit Carrier2 of the first light-emitting unit to the first carrying platform 6 and the second carrying platform 7 respectively. Under the first microscope Carrier 6 of cross axle drive assembly 1 and the drive of axis of ordinates drive assembly 5 moved aligning device 4, 18 with first luminescence unit Carrier1 lift and paste closely adsorption platform 13 of elevating system, adsorption platform 13 adsorbs first luminescence unit Carrier1, and elevating system 18 drops, accomplishes first luminescence unit Carrier1 material loading.
Thereafter, the second stage 7 is moved to below the suction table 13 of the upper positioning device 4 by the horizontal axis drive unit 1 and the vertical axis drive unit 5. At this time, the six-degree-of-freedom adjustment mechanism 15 is raised, and the second stage 7 is brought close to the suction table 13.
The alignment detection sensor 12 is in contact with the second stage 7, the parallelism of the second stage 7 with respect to the adsorption platform 13 is detected by the three alignment detection sensors 12, and then the parallelism of the second stage 7 is adjusted by the six-degree-of-freedom adjustment mechanism 15. The second stage 7 moves under the upper alignment camera 11 of the upper alignment device 4 by the horizontal axis drive unit 1 and the vertical axis drive unit 5.
The lower alignment camera 16 captures Mark points 1 of the first light emitting unit Carrier1, which has been adsorbed on the adsorption platform 13, and uploads the data to the processor, driven by the horizontal axis driving assembly 1 and the vertical axis driving assembly 5 and the lower alignment Z-axis. The upper alignment camera 11 is driven by the upper alignment XZ axis 10 and the upper alignment Y axis 9 to align Mark points 2 of the second light emitting unit Carrier2 on the second light emitting unit Carrier2 Carrier 7, position the Mark points 2 of the second light emitting unit Carrier2, and upload the position data to the system. The system transmits a motion instruction to the horizontal plane position of the transverse axis driving component 1 and the longitudinal axis driving component 5 to adjust the second carrying platform 7 by comparing the positions of the Mark point 1 and the Mark point 2 of the first light emitting unit Carrier1 and the second light emitting unit Carrier2, the two are accurately aligned, and then the adjusting mechanism 15 with six degrees of freedom adjusts the second carrying platform 7 to an alignment state.
As shown in fig. 7, the upper alignment mounting plate 8 serves as a mounting bracket for the upper alignment camera 11, the alignment detection sensor 12 and the adsorption platform 13, and the adsorption platform 13 is a ceramic plate and can adsorb products after ventilation; the alignment detection sensor 12 can detect the parallelism of the bottom stage and the adsorption platform 13 when the bottom stage is close to the adsorption platform, if a deviation is found, data are fed back to the system, and the parallelism of the bottom stage and the adsorption platform is adjusted by adjusting the six-axis motion platform.
The embodiment adopts upper and lower two groups of contraposition to respectively capture the Mark points of the first light-emitting unit Carrier1 and the second light-emitting unit Carrier2, and then through comparison of a software system, each axis is driven to move to align the Mark points.
The transfer alignment system and the transfer alignment method provided by the application are used for transferring and aligning the first light emitting unit and the second light emitting unit. Wherein the transfer alignment system comprises: the first carrying platform and the second carrying platform are respectively used for carrying the first light-emitting unit and the second light-emitting unit which are conveyed by the feeding mechanism; the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane; the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area; the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit; and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state. Therefore, the huge transfer of the light-emitting units in the production process of the MicroLED is realized fully automatically and with high precision.
Example 2
In addition, the embodiment of the present application further provides a transfer alignment method, which is applied to the transfer alignment system described in the above embodiment. The transfer contraposition method mainly comprises the following steps:
the feeding mechanism feeds the first light-emitting unit to the first carrying platform and feeds the second light-emitting unit to the second carrying platform;
the plane moving mechanism moves the first carrying platform to an alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrying platform;
the plane moving mechanism moves the second carrying platform to the alignment area;
the alignment camera respectively collects first coordinate data of a first light-emitting unit and second coordinate data of a second light-emitting unit on the second carrying platform;
and the processor controls the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
The transfer alignment system provided by the embodiment is applied to a transfer alignment process of a light emitting unit in a micro led processing technology. Schematic diagrams of the first light emitting unit Carrier1 and the second light emitting unit Carrier2 requiring transfer of alignment. The processor is a main control device for transferring the alignment process and controls the work of the carrying platform, the moving mechanism, the adsorption platform and the like.
And arranging an alignment area, finishing transfer alignment in the alignment area, and arranging the adsorption platform and the alignment camera in the alignment area. And after the plane driving mechanism moves the first carrying platform to the alignment area, the adsorption platform adsorbs the first light-emitting unit on the first carrying platform. After that, the first carrying platform is moved away, and the second carrying platform is moved to the lower part of the adsorption platform.
During alignment, after the second stage moves to a position below the adsorption platform, the second light-emitting unit on the second stage and the first light-emitting unit under the adsorption platform are located in the alignment area, but are not completely aligned.
The alignment camera is used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit and sending the first coordinate data and the second coordinate data to the processor. The processor controls the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
According to a specific embodiment of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjusting mechanism, wherein control ends of the lifting mechanism and the adjusting mechanism are both in communication connection with the processor;
after the step of moving the first stage to the alignment area by the plane moving mechanism, the method further includes:
the lifting mechanism drives the first carrying platform to be close to the adsorption platform in the alignment area;
the step of controlling the second stage to move by the processor according to the first coordinate data and the second coordinate data includes:
the processor determines adjustment data according to the first coordinate data and the second coordinate data;
the adjusting mechanism adjusts the movement of the second stage according to the adjustment data.
In this embodiment, in consideration of the fact that the adsorption platform has a certain height, a driving mechanism in the vertical direction is added, and the driving mechanism includes a lifting mechanism for driving the first stage and an adjusting mechanism for driving the second stage, where the vertical direction may be a z-axis in a reference coordinate system. In particular, the adjustment mechanism may comprise a six degree of freedom drive mechanism.
The driving mechanism in the vertical direction perpendicular to the horizontal plane is additionally arranged, so that the device can be suitable for light-emitting units, adsorption platforms or operation platforms with different heights and thicknesses.
According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three discrete alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second stage;
after the step of moving the second stage to the alignment area by the plane moving mechanism, the method further includes:
the alignment detection sensor detects the parallelism of the second carrying platform relative to the adsorption platform;
the adjusting mechanism adjusts the movement of the second carrying platform according to the parallelism.
And an alignment detection sensor is additionally arranged to detect the parallelism of the second carrying platform relative to the adsorption platform, and the movement of the second carrying platform is adjusted, so that the second carrying platform and the adsorption platform keep higher parallelism, and the parallel alignment of the second light-emitting unit and the first light-emitting unit is further ensured.
According to a specific embodiment of the present disclosure, the alignment cameras include a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both in communication connection with the processor;
the step of the alignment camera respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second carrying platform comprises the following steps:
the image acquisition area of the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first mark point of a first light-emitting unit on the adsorption platform;
the image acquisition area of the second alignment camera faces the second carrying platform, and second coordinate data of a second mark point of a second light-emitting unit on the second carrying platform are acquired.
In this embodiment, two alignment cameras are provided to collect coordinate data of the light emitting units in two different orientations, respectively. The first alignment camera is aligned upwards, namely, upwards collects the first light-emitting unit adsorbed under the adsorption platform. The second alignment camera is aligned downwards, namely a second light-emitting unit on the second carrying platform is collected downwards. Therefore, the light emitting units in different directions can be synchronously collected, and synchronous positioning is realized.
In the transfer alignment method provided by the application, the first light-emitting unit and the second light-emitting unit conveyed by the feeding mechanism are carried by the first carrying platform and the second carrying platform; the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane; the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area; the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit; and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state. Therefore, the huge transfer of the light-emitting units in the production process of the MicroLED is realized fully automatically and with high precision.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method can be implemented in other ways. The apparatus embodiments described above are merely illustrative and, for example, the flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of apparatus, methods and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
In addition, each functional module or unit in each embodiment of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application.

Claims (10)

1. The transfer alignment system is used for transferring and aligning a first light-emitting unit and a second light-emitting unit; the transfer alignment system comprises:
the first carrying platform and the second carrying platform are respectively used for carrying the first light-emitting unit and the second light-emitting unit which are conveyed by the feeding mechanism;
the plane moving mechanism is used for driving the first carrying platform and the second carrying platform to move on a horizontal plane;
the adsorption platform is arranged in the alignment area and used for adsorbing the first light-emitting unit on the first carrying platform after the first carrying platform moves to the alignment area;
the alignment camera is arranged in the alignment area and used for respectively acquiring first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit;
and the processor is used for controlling the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
2. The system of claim 1, wherein the planar motion mechanism comprises a transverse axis drive assembly and a longitudinal axis drive assembly, control ends of the transverse axis drive assembly and the longitudinal axis drive assembly each communicatively connected to the processor;
the driving direction of the transverse shaft driving component is perpendicular to the driving direction of the longitudinal shaft driving component.
3. The system of claim 1, wherein the transfer alignment system further comprises a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both in communication connection with the processor;
the lifting mechanism is used for driving the first carrying platform to be close to or far away from the adsorption platform in the alignment area;
the adjusting mechanism is used for adjusting the movement of the second carrying platform.
4. The system of claim 3, wherein the adjustment mechanism comprises a six degree of freedom drive mechanism.
5. The system of any one of claims 1 to 4, wherein the alignment cameras comprise a first alignment camera and a second alignment camera, data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;
the image acquisition area of the first alignment camera faces the adsorption platform and is used for acquiring first coordinate data of a first light-emitting unit on the adsorption platform;
the image acquisition area of the second alignment camera faces the second stage and is used for acquiring second coordinate data of a second light-emitting unit on the second stage.
6. The system of claim 5, wherein the suction platform is further provided with three separate alignment detection sensors, the alignment detection sensors being located between the suction platform and the second stage;
the alignment detection sensor is used for detecting the parallelism of the second carrying platform relative to the adsorption platform.
7. A transfer alignment method is applied to the transfer alignment system of any one of claims 1 to 6; the method comprises the following steps:
the feeding mechanism feeds the first light-emitting unit to the first carrying platform and feeds the second light-emitting unit to the second carrying platform;
the plane moving mechanism moves the first carrying platform to an alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrying platform;
the plane moving mechanism moves the second carrying platform to the alignment area;
the alignment camera respectively collects first coordinate data of a first light-emitting unit and second coordinate data of a second light-emitting unit on the second carrying platform;
and the processor controls the second carrying platform to move according to the first coordinate data and the second coordinate data so as to enable the second light-emitting unit and the first light-emitting unit to be in an aligned state.
8. The method of claim 7, wherein the transfer alignment system further comprises a lift mechanism and an adjustment mechanism, wherein control ends of the lift mechanism and the adjustment mechanism are both in communication with the processor;
after the step of moving the first stage to the alignment area by the plane moving mechanism, the method further includes:
the lifting mechanism drives the first carrying platform to be close to the adsorption platform in the alignment area;
the step of controlling the second stage to move by the processor according to the first coordinate data and the second coordinate data includes:
the processor determines adjustment data according to the first coordinate data and the second coordinate data;
the adjusting mechanism adjusts the movement of the second stage according to the adjustment data.
9. The method of claim 8, wherein the suction platform is further provided with three separate alignment detection sensors, the alignment detection sensors being located between the suction platform and the second stage;
after the step of moving the second stage to the alignment area by the plane moving mechanism, the method further includes:
the alignment detection sensor detects the parallelism of the second carrying platform relative to the adsorption platform;
the adjusting mechanism adjusts the movement of the second carrying platform according to the parallelism.
10. The system of claim 7, wherein the alignment cameras comprise a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;
the step of the alignment camera respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second carrying platform comprises the following steps:
the image acquisition area of the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first mark point of a first light-emitting unit on the adsorption platform;
the image acquisition area of the second alignment camera faces the second carrying platform, and second coordinate data of a second mark point of a second light-emitting unit on the second carrying platform are acquired.
CN202111063168.3A 2021-09-10 2021-09-10 Transfer alignment system and transfer alignment method Pending CN113808986A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114522905A (en) * 2022-02-14 2022-05-24 苏州市中辰昊科技有限公司 Double-piece solar cell sorting machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114522905A (en) * 2022-02-14 2022-05-24 苏州市中辰昊科技有限公司 Double-piece solar cell sorting machine

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