CN113759544A

CN113759544A - Scattered point scanning galvanometer

Info

Publication number: CN113759544A
Application number: CN202111180848.3A
Authority: CN
Inventors: 邓登碧; 师娅奇
Original assignee: Star Control Technology Guangzhou Co ltd
Current assignee: Star Control Technology Guangzhou Co ltd
Priority date: 2021-10-11
Filing date: 2021-10-11
Publication date: 2021-12-07

Abstract

The invention discloses a scattered point scanning galvanometer, which comprises a galvanometer body and an output port, wherein the left side of the bottom surface of the galvanometer body is fixedly connected with the output port, and the output port comprises a differential pulse output and communication TRIG + contact, a single-point pulse output NPN open-drain contact, a first V-contact, a first GND contact, a first V + contact, a differential pulse output and communication TRIG-contact, a second V-contact, a second GND contact and a second V + contact. The digital scattering point scanning galvanometer (scattering point scanning galvanometer for short) belongs to one kind of digital scanning galvanometers, and a programmable high-speed logic device is arranged in the digital scanning galvanometer. The scanning galvanometer can support various digital communication protocols such as network, RS485 and the like, and has the function of being compatible with the traditional scanning galvanometer. For users, the biggest characteristic is that no less than one hardware pulse signal output function is added on the basis of the traditional digital scanning galvanometer.

Description

Scattered point scanning galvanometer

Technical Field

The invention relates to the technical field of galvanometers, in particular to a scattered point scanning galvanometer.

Background

The scanning galvanometer (including digital and analog scanning galvanometers) controls the optical path by controlling the rotation angles of a galvanometer motor and a lens assembled on the galvanometer motor, thereby realizing the scanning of various angles of the optical path, and usually, the motion of the galvanometer motor deflects within a reciprocating range, such as a mechanical angle of +/-22 degrees.

The digital scanning galvanometer means that closed-loop control operation and an instruction interface of a galvanometer motor are digital signals, and is typically characterized by comprising programmable logic devices such as an FPGA (field programmable gate array), an ARM (advanced RISC machine) or a DSP (digital signal processor), and the control parameters are digital adjustable quantities; the analog scanning galvanometer generally refers to a control link of a galvanometer motor and an instruction interface which are analog signals, at present, an analog scanning galvanometer of an upgraded version is also provided, part of the instruction interface is upgraded into digital signals, but the inside of the analog scanning galvanometer is subjected to DAC (digital-to-analog conversion), the control link of the galvanometer motor is still analog signals, and the analog scanning galvanometer is typically characterized by not comprising programmable logic devices such as an FPGA (field programmable gate array), an ARM (advanced RISC machine) or a DSP (digital signal processor).

The traditional scanning galvanometer (including digital and analog scanning galvanometers) does not support synchronous matching of the real-time position of a galvanometer motor and the light output of a light emitter, and only after a positioning instruction of the scanning galvanometer is issued in advance, the light output is waited for in a delayed manner, namely the light output of the light emitter, and the position of the galvanometer motor of the scanning galvanometer is not matched in a closed loop manner, so that the light output time sequence cannot be strictly synchronous with a position signal, the light output of the light emitter is inaccurate, and the pattern is blurred or deformed to a certain extent in the field of laser marking; in the application fields of OCT (optical coherence tomography) and confocal microscopy, the optical positioning is inaccurate, the reconstructed image is fuzzy or misplaced, and the like, so that more accurate optical detection information cannot be provided for a user; in the field of laser welding and cutting, the welding precision is not high or the welding process is not uniform, and the laser welding quality and the yield of products are seriously influenced.

The traditional scanning galvanometer has no special hardware pulse signal port for optical synchronization, the output is limited by the system delay parameters of the uncontrollable scanning galvanometer, actually, the delay is closely related to the physical parameters of a motor, a lens and the like, the individual difference of the light-emitting time sequence can also occur after the scanning galvanometer is replaced or reinstalled, the difference of the light-emitting time sequence and the light-emitting time sequence synchronism are not high, the precision and the speed performance which seriously restrict the laser marking are improved, the performance which seriously restrict the optical precision positioning is improved, and under the background of the high-quality development requirement of the basic industry, the problem is more prominent and urgently needed to be solved.

Disclosure of Invention

Technical problem to be solved

In view of the deficiencies of the prior art, the present invention provides a scattered point scanning galvanometer, which solves the problems set forth in the background art.

(II) technical scheme

In order to achieve the purpose, the invention is realized by the following technical scheme: a scattered point scanning galvanometer comprises a galvanometer body and an output port, wherein the left side of the bottom surface of the galvanometer body is fixedly connected with the output port, the output port comprises a differential pulse output and communication TRIG + contact, a single-point pulse output NPN open-drain contact, a first V-contact, a first GND contact, a first V + contact, a differential pulse output and communication TRIG-contact, a second V-contact, a second GND contact and a second V + contact, and the TRIG + contact, the single-point pulse output NPN open-drain contact, the first V-contact, the first GND contact, the first V + contact, the differential pulse output and communication TRIG-contact, the second V-contact, the second GND contact and the second V + contact are all fixed inside the output port.

Preferably, the optical fiber scanning mirror further comprises a current feedback protection resistor, and the current feedback protection resistor is located at an emitter of the scattered point scanning mirror.

Preferably, the NPN open-drain outputs a pulse signal contact, the current is injected to be less than 50mA, and the voltage is 0V-24V.

Preferably, the NPN open-drain output pulse signal contact has a current feedback protection resistance 20 Ω.

Preferably, the TRIG-/TRIG + is used for data communication or hardware differential pulse signal contact of a scatter-scan galvanometer.

(III) advantageous effects

The invention provides a scattered point scanning galvanometer which has the following beneficial effects:

(1) the method has the advantages that the actual position of the galvanometer motor of the scanning galvanometer is used as a feedback signal for generating a hardware pulse signal, and compared with the traditional light-emitting time sequence or delay positioning mode of the scanning galvanometer, the method can provide very accurate position feedback. The scanning speed and the real-time positioning precision can be greatly improved.

(2) In the field of laser marking, the scheme can enable the pattern to be more precise and avoid blurring or deformation; in the application fields of OCT (optical coherence tomography) and confocal microscope, the optical positioning precision can be improved, the reconstructed image is clearer, the possibility of dislocation of the reconstructed image is avoided, and more accurate optical detection information is provided for a user; in the fields of laser welding and cutting, the scheme can improve the welding precision, ensure the consistency of the welding process and improve the laser welding quality and the yield of products.

Drawings

FIG. 1 is a front view of the structure of the present invention;

FIG. 2 is a bottom view of the structure of the present invention;

FIG. 3 is a schematic diagram of the structure of the output port of the present invention;

FIG. 4 is a schematic flow chart of the working state of the present invention;

FIG. 5 is a timing diagram of the circuit principle of the present invention;

FIG. 6 is a schematic diagram of the internal electrical flow of the present invention.

In the figure, a 1-galvanometer body, a 2-output port, a 3-differential pulse output and communication TRIG + contact, a 4-single-point pulse output NPN open-drain contact, a 5-first V-contact, a 6-first GND contact, a 7-first V + contact, an 8-differential pulse output and communication TRIG-contact, a 9-second V-contact, a 10-second GND contact and an 11-second V + contact.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example one

Referring to fig. 3 and 6, the contact points of the present invention are implemented according to the following principles: the hardware pulse signal output device is used for outputting hardware pulse signals of a scattered point scanning galvanometer, the signal characteristics (information such as pulse width, number, whether a closed loop exists and the like) of the hardware pulse signal output device can be configured and preset through communication, positioning closed loop automatic pulse output can be realized according to configuration and is used for reference signals needing precise positioning light signals or measuring time sequences, when the hardware pulse signal output device is used outside a scattered point mode, the functions are switched to an indication state of positioning arrival, the hardware pulse signal output device is opened when positioning control is completed, NPN leakage current feedback protection resistance is 20 omega, current is filled in the NPN leakage current feedback protection resistance to be less than 50mA, the voltage is 0V-24V, and TRIG-/TRIG + is used for data communication or the hardware pulse signals of the scattered point scanning galvanometer.

Referring to fig. 4 and 5, the application principle of the present invention is as follows; after the scanning galvanometer receives a positioning instruction, the galvanometer motor is controlled to run to a target value (the target value in a timing chart), due to different lenses or motors and the like, the running time usually needs dozens or hundreds of microseconds, even a plurality of milliseconds, even if the scanning galvanometers in the same series have different physical characteristics, and the positioning time still has certain uncertainty.

When the scatterpoint scanning galvanometer runs, the actual position of a galvanometer motor (a component 12 and a component 13 in a schematic diagram) is compared with a target value, if the actual position reaches the target value, namely after an optical path signal (sent by a component 14) in the diagram reaches a specified target position on a workpiece (a component 16), a pulse or a pulse sequence is output according to preset information, wherein the preset information comprises the width and the number of the pulse, the pulse signal can be used for synchronous light emission of a light emitter, of course, the pulse signal can also be used in other places needing to be synchronous with the position, such as optical measurement, a confocal microscope, OCT and the like, wherein t in FIG. 5 refers to the width of a hardware pulse signal, and N represents the number of the pulse signal.

Example two

The hardware pulse signal related to the position of the galvanometer motor is the maximum characteristic of the scattered point scanning galvanometer, and the positioning precision and the scanning precision capability of the scanning galvanometer can be greatly improved. If the same performance is to be achieved, it is still essential to get a real-time hardware feedback signal.

The hardware pulse signal is not the only feedback path, for example, the real-time performance of time can be considered, the position of the indicating light is detected by an external camera or a sensor with identification capability, and then whether the actual target value is in place or not is judged.

The two embodiments are derived according to the contents in the two embodiments; the invention is characterized in that on the basis of the traditional digital scanning galvanometer, the output function of not less than one hardware pulse signal is added:

the output time sequence of the hardware pulse signal is related to the position of the galvanometer motor; the hardware pulse signal is used for matching the light outlet time sequence of a galvanometer motor and a light outlet device of the scanning galvanometer; the characteristics of the hardware pulse signal such as signal width, quantity and the like can be modified through a software protocol; and the electrical characteristics of the hardware pulse signal include single ended and differential outputs.

The output of the hardware pulse signal is related to whether the galvanometer motor is in place or not, and the signal is output outwards through a panel plug of the scanning galvanometer. The hardware pulse signal associated with the galvanometer motor position is the largest feature of the astigmatic scanning galvanometer.

Claims

1. The utility model provides a scattered point scanning galvanometer, includes galvanometer body (1) and output port (2), the left side and output port (2) fixed connection, its characterized in that of galvanometer body (1) bottom surface: the output port (2) comprises a differential pulse output and communication TRIG + contact (3), a single-point pulse output NPN open leakage contact (4), a first V-contact (5), a first GND contact (6), a first V + contact (7), a differential pulse output and communication TRIG-contact (8), a second V-contact (9), a second GND contact (10) and a second V + contact (11), wherein the TRIG + contact (3), the single-point pulse output NPN open leakage contact (4), the first V-contact (5), the first GND contact (6), the first V + contact (7), the differential pulse output and communication TRIG-contact (8), the second V-contact (9), the second GND contact (10) and the second V + contact (11) are fixed inside the output port (2).

2. A kind of scattered point scans the galvanometer, characterized by: the current feedback protection resistor is positioned at an emitter of the scattered point scanning galvanometer.

3. A speckle scanning mirror as claimed in claim 2, wherein: the NPN opens and leaks the output pulse signal contact, the current is poured into and is less than 50mA, and the voltage is 0V-24V.

4. A speckle scanning mirror as claimed in claim 2, wherein: the NPN open-drain output pulse signal contact is provided with a current feedback protection resistor 20 omega.

5. A speckle scanning mirror as claimed in claim 1, wherein: and the TRIG-/TRIG + is used for data communication or a hardware differential pulse signal contact of the scatter scanning galvanometer.