CN209239279U - A kind of beam shaping system - Google Patents

A kind of beam shaping system Download PDF

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Publication number
CN209239279U
CN209239279U CN201821848280.1U CN201821848280U CN209239279U CN 209239279 U CN209239279 U CN 209239279U CN 201821848280 U CN201821848280 U CN 201821848280U CN 209239279 U CN209239279 U CN 209239279U
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China
Prior art keywords
wedge
shaped lens
laser
mounting device
lens
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CN201821848280.1U
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吴冬兵
王文秀
付大明
马志成
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Three Grams Shanghai Laser Science And Technology Ltd
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Three Grams Shanghai Laser Science And Technology Ltd
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Abstract

The utility model discloses a kind of beam shaping systems, there are the first wedge-shaped lens and the second wedge-shaped lens in side including laser and laser, there are third wedge-shaped lens and the 4th wedge-shaped lens in the side of first wedge-shaped lens and the second wedge-shaped lens, and third wedge-shaped lens and the 4th wedge-shaped lens are installed on the first mounting device and the second mounting device;The side of second mounting device is provided with CCD camera, and transparency mirror piece is provided in installation bin, wherein isolation eyeglass is provided with above transparency mirror piece.The utility model solves the unmanageable material of conventional laser, such as transparent material, materials with high melting point, thermal decomposer and heat deformable material;It solves the problems, such as that thin walled metallic materials processing fuel factor is big, solves cutting gold and silver chip edge burr phenomena;It can use the inside processing that focus on light beam carries out controlling depth direction;It solves the retrofit that conventional laser is difficult to realize microscale workpieces, the especially few microscale workpieces of type multi-quantity, is not necessarily to frock clamp.

Description

A kind of beam shaping system
Technical field
The utility model relates to a kind of light beam process equipment, in particular to a kind of beam shaping system.
Background technique
Rapid laser carving is the most common application of laser system.According to the mechanism of laser beam and material interaction, greatly Laser processing can be divided into laser heat processing by body and photochemical reaction processes two classes.Laser heat processing, which refers to, utilizes laser beam projects Process, including the cutting of laser welding, laser engraving, surface modification, laser are completed to the fuel factor of material surface generation Radium-shine mark, laser drill and micro Process etc.;Photochemical reaction processing refers to that laser beam is irradiated to object, by high-density laser High-energy photon causes or controls photochemically reactive process.Including photochemical precipitation, stereolithography, laser engraving etching Deng.
Transparent material (glass, quartz), materials with high melting point (rough diamond, PCD, sapphire) are heated easily on the market at present It after deformable material (PET, PVC) is using conventional nanosecond laser processing, is difficult to if laser power is too small, what is used on the contrary swashs Optical power is excessive, and the material after processing is easy to appear crackle and burn score.Encountering microscale workpieces laser processing can not accurately determine Position, it usually needs use frock clamp, encounter the workpiece conventional laser equipment that type is more but quantity is few then need to prepare type it is numerous More frock clamps, this mode significantly improve production cost.On the market when conventional nanosecond laser equipment rapidoprint, by It is nanosecond order in laser pulsewidth, is difficult the peak power of improving laser device, laser residence is led in workpiece surface overlong time Material fuel factor is big in cause process, is easy to generate burr in thin-walled material cutting process, edge is rough, processing precise Element precision not can guarantee, at this time with regard to needing to seek new processing technology and equipment and processing method to meet the processing of new product It is required that.Conventional laser equipment is encountered on a large scale then using field lens is focused only for small range marking (400mm or less) on the market It cannot achieve, and be limited only to two-dimensional surface processing, encountering three-dimensional stereo effect then cannot achieve.Exactly because on the market often It advises the positioning of twin shaft mirror-vibrating laser and focuses most carries the galvanometer scan galvanometer of eyeglass using twin shaft band, it means that is right In the position far from laser center focus, the distance that laser reaches the position is remoter, and laser can be presented unevenly, so that together On the laser power output action to workpiece of sample, workpiece surface after laser processing is presented apparent color difference, and this color difference is from vibration Mirror center is dissipated toward surrounding, and often presentation is intermediate strong after processing, and surrounding is weak, and it is aobvious to be more cured utility model toward this phenomenon in edge.
Utility model content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of beam shaping system.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of beam shaping system of the utility model, there are the first wedge-shaped lens in the side including laser and the laser With the second wedge-shaped lens, there are third wedge-shaped lens and the 4th wedge in the side of first wedge-shaped lens and second wedge-shaped lens Shape eyeglass, wherein the third wedge-shaped lens and the 4th wedge-shaped lens are installed on the first mounting device and the second installation dress It sets;The side of second mounting device is provided with CCD camera, and the bottom end of the CCD camera is connected with installation bin, the peace Transparency mirror piece is provided in binning, wherein be provided with isolation eyeglass above the transparency mirror piece;The installation bin Side be energy back device;The third wedge-shaped lens are installed on first mounting device and described by Mobile Slide Second mounting device, wherein the spacing of the third wedge-shaped lens and the 4th wedge-shaped lens passes through the Mobile Slide tune It is whole.
As a kind of optimal technical scheme of the utility model, the third wedge-shaped lens and the 4th wedge-shaped lens it Between have virtual focus point;The side of the installation bin is provided with energy back device, wherein the side of the energy back device is set It is equipped with the first reflecting optics and the second reflecting optics.
As a kind of optimal technical scheme of the utility model, the one end of the CCD camera is connected with camera adjustments mirror Head, wherein the isolation eyeglass is set in the camera adjustments camera lens;The both ends of the installation bin are separately installed with the first method Blue and second flange.
As a kind of optimal technical scheme of the utility model, the Mobile Slide is for adjusting the third wedge-shaped lens Position;Electric-control system is provided at the top of first mounting device and second mounting device;The bottom of the installation bin Portion is equipped with the first adjusting knob, the second adjusting knob and third adjusting knob.
The utility model beneficial effect achieved is: the utility model solves the unmanageable material of conventional laser, Such as transparent material, materials with high melting point, thermal decomposer and heat deformable material;It solves thin walled metallic materials processing fuel factor to ask greatly Topic solves cutting gold and silver chip edge burr phenomena;It can use the inside processing that focus on light beam carries out controlling depth direction; It solves the retrofit that conventional laser is difficult to realize microscale workpieces, the especially few microscale workpieces of type multi-quantity, is not necessarily to work Clamps;The femto-second laser of use can export extremely short pulsewidth and provide high peak power, can provide and swash conventional nanosecond 106 times of peak powers of light, great peak power can guarantee the minimum fuel factor of processing, and conventional nanosecond laser processing is so that work Part generates electronic vibration first, then becomes lattice vibration because of its acoustical coupling, and to Heat Transfer Around, heat ambient substance, Fusing, evaporation can carry out drilling and cutting processing using nanosecond laser, but encounter bright material, materials with high melting point, thermal decomposition Device and heat deformable material are exactly that it processes bottleneck, are technically difficult to break through at present.Duration of the femto-second laser because of light pulse For femtosecond, therefore just terminate energy supply before acoustic vibration is converted to lattice vibration, when pulse energy is lower than processing threshold value When, electronic vibration stops.If being higher than certain threshold value or more, powerful vibration causes to ionize, and removes couple electronic, causes substance Ablation.That is, femto-second laser can realize the processing without superheating process, controlling depth only is carried out with lens focus light beam The Three-dimension process in direction, can be processed the unmanageable transparent material of conventional laser nanometer laser, materials with high melting point, thermal decomposer and Heat deformable material etc..The utility model uses coaxial CCD camera processing method can be with synchronization catch microscale workpieces, without designing More frock clamps can greatly guarantee machining accuracy and provide production efficiency, reduce production cost.Machine is adjusted using dynamic group Structure realizes laser prefocusing mode, adjusts the variation of optical system focal length and mating three-dimensional software in real time to realize real-time change The problem of laser spot can disposably process maximum height difference 60mm workpiece.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is one of structural schematic diagram of CCD camera of the utility model;
Fig. 3 is the second structural representation of the CCD camera of the utility model;
Fig. 4 is the structural schematic diagram of first mounting device of the utility model;
Fig. 5 is the structural schematic diagram of the electric-control system of the utility model;
Fig. 6 is the schematic diagram of the vision light source type of the utility model;
In figure: 1, laser;2, the first wedge-shaped lens;3, the second wedge-shaped lens;4, third wedge-shaped lens;5, the 4th wedge shape Eyeglass;6, transparency mirror piece;7, eyeglass is isolated;8, CCD camera;801, camera adjustments camera lens;802, installation bin;80201, One adjusting knob;80202, the second adjusting knob;80203, third adjusting knob;9, energy back device;10, the first reflecting mirror Piece;11, the second reflecting optics;12, laser is exported;13, first flange;14, second flange;15, laser irradiation direction;16, One mounting device;17, the second mounting device;18, Mobile Slide;19, virtual focus point;20, electric-control system.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment
As shown in figures 1 to 6, the utility model provides a kind of beam shaping system, the side including laser 1 and laser 1 There are the first wedge-shaped lens 2 and the second wedge-shaped lens 3, the side of the first wedge-shaped lens 2 and the second wedge-shaped lens 3 there are third wedge-shaped mirrors Piece 4 and the 4th wedge-shaped lens 5, wherein third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 are installed on the first mounting device 16 and On two mounting devices 17;The side of second mounting device 17 is provided with CCD camera 8, and the bottom end of CCD camera 8 is connected with installation bin 802, transparency mirror piece 6 is provided in installation bin 802, wherein the top of transparency mirror piece 6 is provided with isolation eyeglass 7;Peace The side of binning 802 is energy back device;Third wedge-shaped lens 4 are installed on 16 He of the first mounting device by Mobile Slide 18 Second mounting device 17, wherein third wedge-shaped lens 4 and the spacing of the 4th wedge-shaped lens 5 are adjusted by Mobile Slide 18.
There is virtual focus point 19 between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5;The side of installation bin 802 is provided with energy Measure feedback device 9, wherein the side of energy back device 9 is provided with the first reflecting optics 10 and the second reflecting optics 11.CCD The one end of camera 8 is connected with camera adjustments camera lens 801, wherein isolation eyeglass 7 is set in camera adjustments camera lens 801;Installation The both ends in storehouse 802 are separately installed with first flange 13 and second flange 14, and laser irradiation direction is 15.
Mobile Slide 18 is used to adjust the position of third wedge-shaped lens 4;First mounting device 16 and the second mounting device 17 Top be provided with electric-control system 20;The bottom of installation bin 802 is equipped with the first adjusting knob 80201, the second adjusting knob 80202 and third adjusting knob 80203.Application method and steps are as follows, 3 structure of the S1: the first wedge-shaped lens 2 and the second wedge-shaped lens At adjustable beam expanding lens, third wedge-shaped mirrors 4 and the 4th wedge-shaped mirrors 5 form dynamic focusing lens set, and laser passes through dynamic focusing eyeglass Transparency mirror piece 6 is output to after group;S2:45 ° of transparency mirror piece 6 guarantees that CCD camera 8 needs while laser passes through The vision light source wanted;S3: laser reaches energy back device 9 after transparency mirror piece 6;S4: energy back device 9 is real-time Monitoring laser output power simultaneously feeds back to control software, and software synchronization processing guarantees laser output stability;S5: laser reaches again First reflecting optics 10 and the second reflecting optics 11 simultaneously act on workpiece surface.
In general, the better laser of beam quality, the angle of divergence is smaller, laser when theoretically the M2 factor is 1 The angle of divergence is just 0, but it is this belong to perfect condition, be not present, thus the laser of laser output be all have it is certain The angle of divergence, the laser with the angle of divergence influence laser process characteristics after long-distance exports.The utility model uses femtosecond light Beam orthopedic systems are that the laser beam with the angle of divergence can be become parallel after the beam expanding lens of the adjustable angle of divergence first Light, specific method is that the laser beam with certain angle of divergence arrives first at the first wedge-shaped lens 2, after the first wedge-shaped lens 2 It reaches on the second wedge-shaped lens 3, the second wedge-shaped lens 3 position relative device (i.e. the first mounting device 16 and the second mounting device 17) be in itself it is fixed, opposite second wedge-shaped lens, 3 position of the first wedge-shaped lens 2 is adjustable, adjusts between the two opposite Distance can change laser-beam divergence angle to realize parallel light output, this group of eyeglass (opposite second wedge-shaped mirrors of the first wedge-shaped lens 2 Piece 3) there are one important function can exactly change laser output facula size, and laser spot diameter exports speed=Δ Y0/ Δ X0 influences the variation of laser output facula diameter multiplying power by changing the relative position of wherein one group of eyeglass.Same diameter For laser facula after the expanding of different multiplying, usually biggish laser facula has smaller focusing after focusing by galvanometer Hot spot, smaller focal beam spot can improve laser unit energy density, so that laser focal beam spot is smaller, in laser cutting more Add and penetrate readily through metal material, processing fuel factor is small, and cutting gap is small.It is easier melted material in welding process, can process Thickness is thicker, and the higher material of fusing point improves the welding quality of different materials.And some laser processings then need finally to focus greatly Some laser faculas, such as laser melting coating, so needing to adjust adjustable beam expanding lens multiplying power group finally to determine according to actual production Act on the focal beam spot on workpiece.
Third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 can be reached by the laser beam of adjustable beam expanding lens output directional light On the dynamic group eyeglass of composition, third wedge-shaped lens 4 are installed in and can move and on highly accurate linear motor, the part It is Full-closed servo kinetic control system, to reach high-precision and high speed consistency, 0.002mm import is reached using high resolution RENISHAW linearity of raster scale, while using high resolution up to 0.2 μm, consistency increment reaches ± 1 μm of dynamic linear driver, It the advantages that guarantee kinematic accuracy, the dynamic linear driving implement used is for external disturbance and insensitive system parameter variations, should Mobile unit has automatic deviation correction ability.Third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 pass through the first mounting device 16 and second Mounting device 17 is fixed in equipment, and third wedge-shaped lens 4 are mounted on Mobile Slide 18, and Mobile Slide 18 drives third Wedge-shaped lens 4 dynamically changed in real time according to converted products pattern between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 it is opposite away from From laser beam can be focused on first after third wedge-shaped lens 4 and be expanded, between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 There is a virtual optics focus 19, the distance of the position (virtual optics focus 19) to third wedge-shaped lens 4 is Δ X, arrives wedge-shaped mirrors The distance of piece 4 is Δ Y.It is cooperated by electric-control system 20 and software and controls Full-closed servo system change dynamic group third wedge Relative distance between shape eyeglass 4 and the 4th wedge-shaped lens 5, and then change laser output facula and eventually affect focal beam spot And focal height, laser facula change multiplying power=Δ Y/ Δ X, software imports the threedimensional model of processing object in advance, passes through software It is cooperated with dynamic group eyeglass, 3 D stereo workpiece can be processed, following functions: 1. laser are realized by electrical control system Focal length variations be servo-controlled;2. can focus laser in three-dimensional object surface generates three-dimensional mark effect;3. less Optical element and anti-reflection coating, dynamic focusing system ratio F-theta camera lens generate less unnecessary heat, itself is included There is temperature drift calibration function;4. obtaining the trackability of process from focus servo feedback;5. Three-Dimensional Dynamic scanning system can To pass through the non-uniform problem of laser behind graphics-optimized compensation two-dimensional scanning mirrors laser offset galvanometer center.
Directional light after output reaches CCD camera 8, and 45 ° of transparency mirror piece 6, the mirror are mounted at the attachment device Piece uses quartz material, and quartz material has more advantages with respect to glass material: there is extremely low thermal expansion coefficient, it is very high resistance to Warm nature, can be subjected to violent temperature difference cataclysm, fabulous chemical stability, excellent optical characteristics, and low and stable ultrasound is prolonged Slow performance, optimal ultraviolet spectra performance and saturating visible light and near infrared spectrum performance, there is the machine higher than simple glass Tool performance.Even work long hours or laser high temperature irradiation after produce thermal expansion, can then generate office if it is glass material Portion's deformation, and then cause laser to be applied to workpiece surface focus after the eyeglass and change, influence laser process characteristics.And Quartz material, even if it is also overall deformation that thermal deformation, which occurs, will not generate glass material eyeglass because thermal expansion coefficient is minimum Local deformation and then caused laser spot change situation.
It can guarantee the focus and camera of laser processing by adjusting the position (CCD camera 8 and camera adjustments camera lens 801) Camera plane is in clearest position;Transparency mirror piece 6 be filter laser processing procedure in reflection, refraction light, 45 degree 6 plated with double-layer film layer of transparency mirror piece, being coated with anti-reflection film is to guarantee laser maximum ratio transmitance, and another film layer guarantees laser Light source needed for camera shooting workpiece in process guarantees that CCD camera 8 can capture workpiece spy very well in laser processing procedure Property, it is that can greatly guarantee machining accuracy using the great advantage that CCD camera 8 captures.Not for rapidoprint, surface and size Together, visual identity effect can all be influenced using the external light source of visual identity and camera mounting means and light-illuminating mode, selected Select light source Lighting Design appropriate, make the target information of image and background information obtain it is optimal separate, figure can be substantially reduced As the difficulty of Processing Algorithm segmentation, identification, while the positioning of system, measurement accuracy are improved, so that the reliability and synthesis of system Performance is improved., whereas if light source design is improper, the thing in image processing algorithm design and imaging system design will lead to Times function half.Therefore, the success or failure of the design of light source and optical system are the primary factors of decision systems success or failure.Specifically, the reality Three classes (such as Fig. 6) can be segmented with novel vision light source: 1. annular lamp source has title " front light-source ", is that lamp source is placed in measured object Before camera, this is most-often used lighting method, and advantage is can to identify work piece surface characteristic very well, by changing The light-source brightness (light source is bright dark) of change prospect light, color (white, red, Lan Dengse), lighting method (ring illumination, Strip lighting, side Square polishing, positive polishing etc.), the disadvantage is that being difficult to position high anti-material;2. backlight and " front light-source " mounting means are exactly the opposite, It is that workpieces processing is placed between camera and light source, mainly for the anti-material such as gold, silver of height etc. common in laser processing, master Wanting feature is that back lighting makes workpiece to be machined produce very strong contrast, is identified convenient for camera, the disadvantage is that object cannot be identified Body surface region feature;3. axis light method: lamp source is placed between object to be processed and camera.Coaxial-illuminating uses special half of one kind To the lens axis direction of camera, half reflection mirror surface only allows to be reflected from body surface perpendicular to lens mirror surface reflection source Light source passes through, and coaxial-illuminating advantage is to be easily achieved flat articles and have the Uniform Illumination on the surface of mirror features very useful.This This outer technology, which can also be realized, keeps surface angle changing unit highlighted, because being not orthogonal to the light of the surface reflection of cam lens Camera lens will not be entered, to cause surface darker, this lighting method can achieve the Uniform Illumination of 170 spatial angle ranges, right It is highly useful in strip object.Three of the above light source approach fully considers numerous product cameras such as workpiece size, surface characteristic Capture scheme.Laser beam after CCD camera 8, which is output to, is equipped with laser energy real-time monitoring device, in actual production Encounter that laser output power is unstable to cause workpieces processing consistency variant in journey.Consider to increase energy back in galvanometer leading portion Unit, principle is output end one energy testing apparatus of increase in laser, for detecting the size of laser energy, and will The signal Real-time Feedback is compared to control terminal with the energy of setting, forms a closed-loop control system, guarantees that laser is adding Power stability during work.In other words, there is the energy of energy back more stable, there is good repeatability, laser output is steady It is qualitative higher, guarantee processing consistency.What the laser beam for the femtosecond beam shaping system that the utility model uses finally exported arrives Become output laser 12 after up to the first reflecting optics 10 and the second reflecting optics 11 of galvanometer, this is not using common poly- on the market Burnt field lens, using dynamic group prefocusing form, the laser beam way of output is already sent to change after dynamic group output, this to set Meter mode can evade the limitation for focusing the field lens range of work, and 3 D stereo may be implemented and laser machine on a large scale.
Specifically, the utility model solves the unmanageable material of conventional laser, as transparent material, materials with high melting point, Thermal decomposer and heat deformable material etc.;It solves the problems, such as that thin walled metallic materials processing fuel factor is big, solves cutting gold and silver thin slice Burrs on edges phenomenon;It can use the inside processing that focus on light beam carries out controlling depth direction;It solves conventional laser and is difficult to reality The retrofit of existing microscale workpieces, the especially few microscale workpieces of type multi-quantity, are not necessarily to frock clamp;The femtosecond laser of use Device can export extremely short pulsewidth and provide high peak power, can provide conventional nanosecond laser 106 times of peak powers, greatly Peak power can guarantee the minimum fuel factor of processing, and conventional nanosecond laser processing is so that workpiece generates electronic vibration first, so Become lattice vibration because of its acoustical coupling afterwards, and to Heat Transfer Around, makes ambient substance heating, fusing, evaporation, using nanosecond laser Device can carry out drilling and cutting processing, but encountering bright material, materials with high melting point, thermal decomposer and heat deformable material is exactly that it adds Work bottleneck is technically difficult to break through at present.Femto-second laser is because the duration of light pulse is femtosecond, therefore in sound and vibration turn Just terminate energy supply before being changed to lattice vibration, when pulse energy is lower than processing threshold value, electronic vibration stops.If being higher than certain More than threshold value, powerful vibration causes to ionize, and removes couple electronic, causes the ablation of substance.That is, femto-second laser The processing without superheating process can be achieved, the Three-dimension process in controlling depth direction is only carried out with lens focus light beam, can be processed normal Advise the unmanageable transparent material of laser nano laser, materials with high melting point, thermal decomposer and heat deformable material etc..The utility model Coaxial CCD camera processing method is used, without designing excessive frock clamp, can greatly to guarantee with synchronization catch microscale workpieces Machining accuracy simultaneously provides production efficiency, reduces production cost.Using dynamic group regulating mechanism, laser prefocusing mode is realized, it is real When adjustment optical system focal length variation and mating three-dimensional software come realize in real time change laser spot problem, can disposably add Work maximum height difference 60mm workpiece.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, It should be included within the scope of protection of this utility model.

Claims (4)

1. a kind of beam shaping system, which is characterized in that there is first wedge in the side including laser (1) and the laser (1) The side of shape eyeglass (2) and the second wedge-shaped lens (3), first wedge-shaped lens (2) and second wedge-shaped lens (3) has Three wedge-shaped lens (4) and the 4th wedge-shaped lens (5), wherein the third wedge-shaped lens (4) and the 4th wedge-shaped lens (5) It is installed on the first mounting device (16) and the second mounting device (17);The side of second mounting device (17) is provided with The bottom end of CCD camera (8), the CCD camera (8) is connected with installation bin (802), is provided with light transmission in the installation bin (802) Reflecting optics (6), wherein isolation eyeglass (7) is provided with above the transparency mirror piece (6);The installation bin (802) Side is energy back device;The third wedge-shaped lens (4) are installed on first mounting device by Mobile Slide (18) (16) and second mounting device (17), wherein between the third wedge-shaped lens (4) and the 4th wedge-shaped lens (5) It is adjusted away from the Mobile Slide (18) are passed through.
2. a kind of beam shaping system according to claim 1, which is characterized in that the third wedge-shaped lens (4) and institute Stating between the 4th wedge-shaped lens (5) has virtual focus point (19);The side of the installation bin (802) is provided with energy back device (9), wherein the side of the energy back device (9) is provided with the first reflecting optics (10) and the second reflecting optics (11).
3. a kind of beam shaping system according to claim 2, which is characterized in that the one end of the CCD camera (8) connects It is connected to camera adjustments camera lens (801), wherein the isolation eyeglass (7) is set in the camera adjustments camera lens (801);It is described The both ends of installation bin (802) are separately installed with first flange (13) and second flange (14).
4. a kind of beam shaping system according to claim 2 or 3, which is characterized in that the Mobile Slide (18) is used for Adjust the position of the third wedge-shaped lens (4);The top of first mounting device (16) and second mounting device (17) Portion is provided with electric-control system (20);The bottom of the installation bin (802) is equipped with the first adjusting knob (80201), the second adjusting Knob (80202) and third adjusting knob (80203).
CN201821848280.1U 2018-11-11 2018-11-11 A kind of beam shaping system Active CN209239279U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110482877A (en) * 2019-08-29 2019-11-22 南京理工大学 A kind of Quartz glass surfaces micro-crack femtosecond laser makes method up
CN111168234A (en) * 2018-11-11 2020-05-19 上海三克激光科技有限公司 Light beam shaping system and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111168234A (en) * 2018-11-11 2020-05-19 上海三克激光科技有限公司 Light beam shaping system and method
CN110482877A (en) * 2019-08-29 2019-11-22 南京理工大学 A kind of Quartz glass surfaces micro-crack femtosecond laser makes method up

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