CN209239279U - A kind of beam shaping system - Google Patents
A kind of beam shaping system Download PDFInfo
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- CN209239279U CN209239279U CN201821848280.1U CN201821848280U CN209239279U CN 209239279 U CN209239279 U CN 209239279U CN 201821848280 U CN201821848280 U CN 201821848280U CN 209239279 U CN209239279 U CN 209239279U
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Abstract
The utility model discloses a kind of beam shaping systems, there are the first wedge-shaped lens and the second wedge-shaped lens in side including laser and laser, there are third wedge-shaped lens and the 4th wedge-shaped lens in the side of first wedge-shaped lens and the second wedge-shaped lens, and third wedge-shaped lens and the 4th wedge-shaped lens are installed on the first mounting device and the second mounting device;The side of second mounting device is provided with CCD camera, and transparency mirror piece is provided in installation bin, wherein isolation eyeglass is provided with above transparency mirror piece.The utility model solves the unmanageable material of conventional laser, such as transparent material, materials with high melting point, thermal decomposer and heat deformable material;It solves the problems, such as that thin walled metallic materials processing fuel factor is big, solves cutting gold and silver chip edge burr phenomena;It can use the inside processing that focus on light beam carries out controlling depth direction;It solves the retrofit that conventional laser is difficult to realize microscale workpieces, the especially few microscale workpieces of type multi-quantity, is not necessarily to frock clamp.
Description
Technical field
The utility model relates to a kind of light beam process equipment, in particular to a kind of beam shaping system.
Background technique
Rapid laser carving is the most common application of laser system.According to the mechanism of laser beam and material interaction, greatly
Laser processing can be divided into laser heat processing by body and photochemical reaction processes two classes.Laser heat processing, which refers to, utilizes laser beam projects
Process, including the cutting of laser welding, laser engraving, surface modification, laser are completed to the fuel factor of material surface generation
Radium-shine mark, laser drill and micro Process etc.;Photochemical reaction processing refers to that laser beam is irradiated to object, by high-density laser
High-energy photon causes or controls photochemically reactive process.Including photochemical precipitation, stereolithography, laser engraving etching
Deng.
Transparent material (glass, quartz), materials with high melting point (rough diamond, PCD, sapphire) are heated easily on the market at present
It after deformable material (PET, PVC) is using conventional nanosecond laser processing, is difficult to if laser power is too small, what is used on the contrary swashs
Optical power is excessive, and the material after processing is easy to appear crackle and burn score.Encountering microscale workpieces laser processing can not accurately determine
Position, it usually needs use frock clamp, encounter the workpiece conventional laser equipment that type is more but quantity is few then need to prepare type it is numerous
More frock clamps, this mode significantly improve production cost.On the market when conventional nanosecond laser equipment rapidoprint, by
It is nanosecond order in laser pulsewidth, is difficult the peak power of improving laser device, laser residence is led in workpiece surface overlong time
Material fuel factor is big in cause process, is easy to generate burr in thin-walled material cutting process, edge is rough, processing precise
Element precision not can guarantee, at this time with regard to needing to seek new processing technology and equipment and processing method to meet the processing of new product
It is required that.Conventional laser equipment is encountered on a large scale then using field lens is focused only for small range marking (400mm or less) on the market
It cannot achieve, and be limited only to two-dimensional surface processing, encountering three-dimensional stereo effect then cannot achieve.Exactly because on the market often
It advises the positioning of twin shaft mirror-vibrating laser and focuses most carries the galvanometer scan galvanometer of eyeglass using twin shaft band, it means that is right
In the position far from laser center focus, the distance that laser reaches the position is remoter, and laser can be presented unevenly, so that together
On the laser power output action to workpiece of sample, workpiece surface after laser processing is presented apparent color difference, and this color difference is from vibration
Mirror center is dissipated toward surrounding, and often presentation is intermediate strong after processing, and surrounding is weak, and it is aobvious to be more cured utility model toward this phenomenon in edge.
Utility model content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and provides a kind of beam shaping system.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of beam shaping system of the utility model, there are the first wedge-shaped lens in the side including laser and the laser
With the second wedge-shaped lens, there are third wedge-shaped lens and the 4th wedge in the side of first wedge-shaped lens and second wedge-shaped lens
Shape eyeglass, wherein the third wedge-shaped lens and the 4th wedge-shaped lens are installed on the first mounting device and the second installation dress
It sets;The side of second mounting device is provided with CCD camera, and the bottom end of the CCD camera is connected with installation bin, the peace
Transparency mirror piece is provided in binning, wherein be provided with isolation eyeglass above the transparency mirror piece;The installation bin
Side be energy back device;The third wedge-shaped lens are installed on first mounting device and described by Mobile Slide
Second mounting device, wherein the spacing of the third wedge-shaped lens and the 4th wedge-shaped lens passes through the Mobile Slide tune
It is whole.
As a kind of optimal technical scheme of the utility model, the third wedge-shaped lens and the 4th wedge-shaped lens it
Between have virtual focus point;The side of the installation bin is provided with energy back device, wherein the side of the energy back device is set
It is equipped with the first reflecting optics and the second reflecting optics.
As a kind of optimal technical scheme of the utility model, the one end of the CCD camera is connected with camera adjustments mirror
Head, wherein the isolation eyeglass is set in the camera adjustments camera lens;The both ends of the installation bin are separately installed with the first method
Blue and second flange.
As a kind of optimal technical scheme of the utility model, the Mobile Slide is for adjusting the third wedge-shaped lens
Position;Electric-control system is provided at the top of first mounting device and second mounting device;The bottom of the installation bin
Portion is equipped with the first adjusting knob, the second adjusting knob and third adjusting knob.
The utility model beneficial effect achieved is: the utility model solves the unmanageable material of conventional laser,
Such as transparent material, materials with high melting point, thermal decomposer and heat deformable material;It solves thin walled metallic materials processing fuel factor to ask greatly
Topic solves cutting gold and silver chip edge burr phenomena;It can use the inside processing that focus on light beam carries out controlling depth direction;
It solves the retrofit that conventional laser is difficult to realize microscale workpieces, the especially few microscale workpieces of type multi-quantity, is not necessarily to work
Clamps;The femto-second laser of use can export extremely short pulsewidth and provide high peak power, can provide and swash conventional nanosecond
106 times of peak powers of light, great peak power can guarantee the minimum fuel factor of processing, and conventional nanosecond laser processing is so that work
Part generates electronic vibration first, then becomes lattice vibration because of its acoustical coupling, and to Heat Transfer Around, heat ambient substance,
Fusing, evaporation can carry out drilling and cutting processing using nanosecond laser, but encounter bright material, materials with high melting point, thermal decomposition
Device and heat deformable material are exactly that it processes bottleneck, are technically difficult to break through at present.Duration of the femto-second laser because of light pulse
For femtosecond, therefore just terminate energy supply before acoustic vibration is converted to lattice vibration, when pulse energy is lower than processing threshold value
When, electronic vibration stops.If being higher than certain threshold value or more, powerful vibration causes to ionize, and removes couple electronic, causes substance
Ablation.That is, femto-second laser can realize the processing without superheating process, controlling depth only is carried out with lens focus light beam
The Three-dimension process in direction, can be processed the unmanageable transparent material of conventional laser nanometer laser, materials with high melting point, thermal decomposer and
Heat deformable material etc..The utility model uses coaxial CCD camera processing method can be with synchronization catch microscale workpieces, without designing
More frock clamps can greatly guarantee machining accuracy and provide production efficiency, reduce production cost.Machine is adjusted using dynamic group
Structure realizes laser prefocusing mode, adjusts the variation of optical system focal length and mating three-dimensional software in real time to realize real-time change
The problem of laser spot can disposably process maximum height difference 60mm workpiece.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is one of structural schematic diagram of CCD camera of the utility model;
Fig. 3 is the second structural representation of the CCD camera of the utility model;
Fig. 4 is the structural schematic diagram of first mounting device of the utility model;
Fig. 5 is the structural schematic diagram of the electric-control system of the utility model;
Fig. 6 is the schematic diagram of the vision light source type of the utility model;
In figure: 1, laser;2, the first wedge-shaped lens;3, the second wedge-shaped lens;4, third wedge-shaped lens;5, the 4th wedge shape
Eyeglass;6, transparency mirror piece;7, eyeglass is isolated;8, CCD camera;801, camera adjustments camera lens;802, installation bin;80201,
One adjusting knob;80202, the second adjusting knob;80203, third adjusting knob;9, energy back device;10, the first reflecting mirror
Piece;11, the second reflecting optics;12, laser is exported;13, first flange;14, second flange;15, laser irradiation direction;16,
One mounting device;17, the second mounting device;18, Mobile Slide;19, virtual focus point;20, electric-control system.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment
As shown in figures 1 to 6, the utility model provides a kind of beam shaping system, the side including laser 1 and laser 1
There are the first wedge-shaped lens 2 and the second wedge-shaped lens 3, the side of the first wedge-shaped lens 2 and the second wedge-shaped lens 3 there are third wedge-shaped mirrors
Piece 4 and the 4th wedge-shaped lens 5, wherein third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 are installed on the first mounting device 16 and
On two mounting devices 17;The side of second mounting device 17 is provided with CCD camera 8, and the bottom end of CCD camera 8 is connected with installation bin
802, transparency mirror piece 6 is provided in installation bin 802, wherein the top of transparency mirror piece 6 is provided with isolation eyeglass 7;Peace
The side of binning 802 is energy back device;Third wedge-shaped lens 4 are installed on 16 He of the first mounting device by Mobile Slide 18
Second mounting device 17, wherein third wedge-shaped lens 4 and the spacing of the 4th wedge-shaped lens 5 are adjusted by Mobile Slide 18.
There is virtual focus point 19 between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5;The side of installation bin 802 is provided with energy
Measure feedback device 9, wherein the side of energy back device 9 is provided with the first reflecting optics 10 and the second reflecting optics 11.CCD
The one end of camera 8 is connected with camera adjustments camera lens 801, wherein isolation eyeglass 7 is set in camera adjustments camera lens 801;Installation
The both ends in storehouse 802 are separately installed with first flange 13 and second flange 14, and laser irradiation direction is 15.
Mobile Slide 18 is used to adjust the position of third wedge-shaped lens 4;First mounting device 16 and the second mounting device 17
Top be provided with electric-control system 20;The bottom of installation bin 802 is equipped with the first adjusting knob 80201, the second adjusting knob
80202 and third adjusting knob 80203.Application method and steps are as follows, 3 structure of the S1: the first wedge-shaped lens 2 and the second wedge-shaped lens
At adjustable beam expanding lens, third wedge-shaped mirrors 4 and the 4th wedge-shaped mirrors 5 form dynamic focusing lens set, and laser passes through dynamic focusing eyeglass
Transparency mirror piece 6 is output to after group;S2:45 ° of transparency mirror piece 6 guarantees that CCD camera 8 needs while laser passes through
The vision light source wanted;S3: laser reaches energy back device 9 after transparency mirror piece 6;S4: energy back device 9 is real-time
Monitoring laser output power simultaneously feeds back to control software, and software synchronization processing guarantees laser output stability;S5: laser reaches again
First reflecting optics 10 and the second reflecting optics 11 simultaneously act on workpiece surface.
In general, the better laser of beam quality, the angle of divergence is smaller, laser when theoretically the M2 factor is 1
The angle of divergence is just 0, but it is this belong to perfect condition, be not present, thus the laser of laser output be all have it is certain
The angle of divergence, the laser with the angle of divergence influence laser process characteristics after long-distance exports.The utility model uses femtosecond light
Beam orthopedic systems are that the laser beam with the angle of divergence can be become parallel after the beam expanding lens of the adjustable angle of divergence first
Light, specific method is that the laser beam with certain angle of divergence arrives first at the first wedge-shaped lens 2, after the first wedge-shaped lens 2
It reaches on the second wedge-shaped lens 3, the second wedge-shaped lens 3 position relative device (i.e. the first mounting device 16 and the second mounting device
17) be in itself it is fixed, opposite second wedge-shaped lens, 3 position of the first wedge-shaped lens 2 is adjustable, adjusts between the two opposite
Distance can change laser-beam divergence angle to realize parallel light output, this group of eyeglass (opposite second wedge-shaped mirrors of the first wedge-shaped lens 2
Piece 3) there are one important function can exactly change laser output facula size, and laser spot diameter exports speed=Δ Y0/ Δ
X0 influences the variation of laser output facula diameter multiplying power by changing the relative position of wherein one group of eyeglass.Same diameter
For laser facula after the expanding of different multiplying, usually biggish laser facula has smaller focusing after focusing by galvanometer
Hot spot, smaller focal beam spot can improve laser unit energy density, so that laser focal beam spot is smaller, in laser cutting more
Add and penetrate readily through metal material, processing fuel factor is small, and cutting gap is small.It is easier melted material in welding process, can process
Thickness is thicker, and the higher material of fusing point improves the welding quality of different materials.And some laser processings then need finally to focus greatly
Some laser faculas, such as laser melting coating, so needing to adjust adjustable beam expanding lens multiplying power group finally to determine according to actual production
Act on the focal beam spot on workpiece.
Third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 can be reached by the laser beam of adjustable beam expanding lens output directional light
On the dynamic group eyeglass of composition, third wedge-shaped lens 4 are installed in and can move and on highly accurate linear motor, the part
It is Full-closed servo kinetic control system, to reach high-precision and high speed consistency, 0.002mm import is reached using high resolution
RENISHAW linearity of raster scale, while using high resolution up to 0.2 μm, consistency increment reaches ± 1 μm of dynamic linear driver,
It the advantages that guarantee kinematic accuracy, the dynamic linear driving implement used is for external disturbance and insensitive system parameter variations, should
Mobile unit has automatic deviation correction ability.Third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 pass through the first mounting device 16 and second
Mounting device 17 is fixed in equipment, and third wedge-shaped lens 4 are mounted on Mobile Slide 18, and Mobile Slide 18 drives third
Wedge-shaped lens 4 dynamically changed in real time according to converted products pattern between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5 it is opposite away from
From laser beam can be focused on first after third wedge-shaped lens 4 and be expanded, between third wedge-shaped lens 4 and the 4th wedge-shaped lens 5
There is a virtual optics focus 19, the distance of the position (virtual optics focus 19) to third wedge-shaped lens 4 is Δ X, arrives wedge-shaped mirrors
The distance of piece 4 is Δ Y.It is cooperated by electric-control system 20 and software and controls Full-closed servo system change dynamic group third wedge
Relative distance between shape eyeglass 4 and the 4th wedge-shaped lens 5, and then change laser output facula and eventually affect focal beam spot
And focal height, laser facula change multiplying power=Δ Y/ Δ X, software imports the threedimensional model of processing object in advance, passes through software
It is cooperated with dynamic group eyeglass, 3 D stereo workpiece can be processed, following functions: 1. laser are realized by electrical control system
Focal length variations be servo-controlled;2. can focus laser in three-dimensional object surface generates three-dimensional mark effect;3. less
Optical element and anti-reflection coating, dynamic focusing system ratio F-theta camera lens generate less unnecessary heat, itself is included
There is temperature drift calibration function;4. obtaining the trackability of process from focus servo feedback;5. Three-Dimensional Dynamic scanning system can
To pass through the non-uniform problem of laser behind graphics-optimized compensation two-dimensional scanning mirrors laser offset galvanometer center.
Directional light after output reaches CCD camera 8, and 45 ° of transparency mirror piece 6, the mirror are mounted at the attachment device
Piece uses quartz material, and quartz material has more advantages with respect to glass material: there is extremely low thermal expansion coefficient, it is very high resistance to
Warm nature, can be subjected to violent temperature difference cataclysm, fabulous chemical stability, excellent optical characteristics, and low and stable ultrasound is prolonged
Slow performance, optimal ultraviolet spectra performance and saturating visible light and near infrared spectrum performance, there is the machine higher than simple glass
Tool performance.Even work long hours or laser high temperature irradiation after produce thermal expansion, can then generate office if it is glass material
Portion's deformation, and then cause laser to be applied to workpiece surface focus after the eyeglass and change, influence laser process characteristics.And
Quartz material, even if it is also overall deformation that thermal deformation, which occurs, will not generate glass material eyeglass because thermal expansion coefficient is minimum
Local deformation and then caused laser spot change situation.
It can guarantee the focus and camera of laser processing by adjusting the position (CCD camera 8 and camera adjustments camera lens 801)
Camera plane is in clearest position;Transparency mirror piece 6 be filter laser processing procedure in reflection, refraction light, 45 degree
6 plated with double-layer film layer of transparency mirror piece, being coated with anti-reflection film is to guarantee laser maximum ratio transmitance, and another film layer guarantees laser
Light source needed for camera shooting workpiece in process guarantees that CCD camera 8 can capture workpiece spy very well in laser processing procedure
Property, it is that can greatly guarantee machining accuracy using the great advantage that CCD camera 8 captures.Not for rapidoprint, surface and size
Together, visual identity effect can all be influenced using the external light source of visual identity and camera mounting means and light-illuminating mode, selected
Select light source Lighting Design appropriate, make the target information of image and background information obtain it is optimal separate, figure can be substantially reduced
As the difficulty of Processing Algorithm segmentation, identification, while the positioning of system, measurement accuracy are improved, so that the reliability and synthesis of system
Performance is improved., whereas if light source design is improper, the thing in image processing algorithm design and imaging system design will lead to
Times function half.Therefore, the success or failure of the design of light source and optical system are the primary factors of decision systems success or failure.Specifically, the reality
Three classes (such as Fig. 6) can be segmented with novel vision light source: 1. annular lamp source has title " front light-source ", is that lamp source is placed in measured object
Before camera, this is most-often used lighting method, and advantage is can to identify work piece surface characteristic very well, by changing
The light-source brightness (light source is bright dark) of change prospect light, color (white, red, Lan Dengse), lighting method (ring illumination, Strip lighting, side
Square polishing, positive polishing etc.), the disadvantage is that being difficult to position high anti-material;2. backlight and " front light-source " mounting means are exactly the opposite,
It is that workpieces processing is placed between camera and light source, mainly for the anti-material such as gold, silver of height etc. common in laser processing, master
Wanting feature is that back lighting makes workpiece to be machined produce very strong contrast, is identified convenient for camera, the disadvantage is that object cannot be identified
Body surface region feature;3. axis light method: lamp source is placed between object to be processed and camera.Coaxial-illuminating uses special half of one kind
To the lens axis direction of camera, half reflection mirror surface only allows to be reflected from body surface perpendicular to lens mirror surface reflection source
Light source passes through, and coaxial-illuminating advantage is to be easily achieved flat articles and have the Uniform Illumination on the surface of mirror features very useful.This
This outer technology, which can also be realized, keeps surface angle changing unit highlighted, because being not orthogonal to the light of the surface reflection of cam lens
Camera lens will not be entered, to cause surface darker, this lighting method can achieve the Uniform Illumination of 170 spatial angle ranges, right
It is highly useful in strip object.Three of the above light source approach fully considers numerous product cameras such as workpiece size, surface characteristic
Capture scheme.Laser beam after CCD camera 8, which is output to, is equipped with laser energy real-time monitoring device, in actual production
Encounter that laser output power is unstable to cause workpieces processing consistency variant in journey.Consider to increase energy back in galvanometer leading portion
Unit, principle is output end one energy testing apparatus of increase in laser, for detecting the size of laser energy, and will
The signal Real-time Feedback is compared to control terminal with the energy of setting, forms a closed-loop control system, guarantees that laser is adding
Power stability during work.In other words, there is the energy of energy back more stable, there is good repeatability, laser output is steady
It is qualitative higher, guarantee processing consistency.What the laser beam for the femtosecond beam shaping system that the utility model uses finally exported arrives
Become output laser 12 after up to the first reflecting optics 10 and the second reflecting optics 11 of galvanometer, this is not using common poly- on the market
Burnt field lens, using dynamic group prefocusing form, the laser beam way of output is already sent to change after dynamic group output, this to set
Meter mode can evade the limitation for focusing the field lens range of work, and 3 D stereo may be implemented and laser machine on a large scale.
Specifically, the utility model solves the unmanageable material of conventional laser, as transparent material, materials with high melting point,
Thermal decomposer and heat deformable material etc.;It solves the problems, such as that thin walled metallic materials processing fuel factor is big, solves cutting gold and silver thin slice
Burrs on edges phenomenon;It can use the inside processing that focus on light beam carries out controlling depth direction;It solves conventional laser and is difficult to reality
The retrofit of existing microscale workpieces, the especially few microscale workpieces of type multi-quantity, are not necessarily to frock clamp;The femtosecond laser of use
Device can export extremely short pulsewidth and provide high peak power, can provide conventional nanosecond laser 106 times of peak powers, greatly
Peak power can guarantee the minimum fuel factor of processing, and conventional nanosecond laser processing is so that workpiece generates electronic vibration first, so
Become lattice vibration because of its acoustical coupling afterwards, and to Heat Transfer Around, makes ambient substance heating, fusing, evaporation, using nanosecond laser
Device can carry out drilling and cutting processing, but encountering bright material, materials with high melting point, thermal decomposer and heat deformable material is exactly that it adds
Work bottleneck is technically difficult to break through at present.Femto-second laser is because the duration of light pulse is femtosecond, therefore in sound and vibration turn
Just terminate energy supply before being changed to lattice vibration, when pulse energy is lower than processing threshold value, electronic vibration stops.If being higher than certain
More than threshold value, powerful vibration causes to ionize, and removes couple electronic, causes the ablation of substance.That is, femto-second laser
The processing without superheating process can be achieved, the Three-dimension process in controlling depth direction is only carried out with lens focus light beam, can be processed normal
Advise the unmanageable transparent material of laser nano laser, materials with high melting point, thermal decomposer and heat deformable material etc..The utility model
Coaxial CCD camera processing method is used, without designing excessive frock clamp, can greatly to guarantee with synchronization catch microscale workpieces
Machining accuracy simultaneously provides production efficiency, reduces production cost.Using dynamic group regulating mechanism, laser prefocusing mode is realized, it is real
When adjustment optical system focal length variation and mating three-dimensional software come realize in real time change laser spot problem, can disposably add
Work maximum height difference 60mm workpiece.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (4)
1. a kind of beam shaping system, which is characterized in that there is first wedge in the side including laser (1) and the laser (1)
The side of shape eyeglass (2) and the second wedge-shaped lens (3), first wedge-shaped lens (2) and second wedge-shaped lens (3) has
Three wedge-shaped lens (4) and the 4th wedge-shaped lens (5), wherein the third wedge-shaped lens (4) and the 4th wedge-shaped lens (5)
It is installed on the first mounting device (16) and the second mounting device (17);The side of second mounting device (17) is provided with
The bottom end of CCD camera (8), the CCD camera (8) is connected with installation bin (802), is provided with light transmission in the installation bin (802)
Reflecting optics (6), wherein isolation eyeglass (7) is provided with above the transparency mirror piece (6);The installation bin (802)
Side is energy back device;The third wedge-shaped lens (4) are installed on first mounting device by Mobile Slide (18)
(16) and second mounting device (17), wherein between the third wedge-shaped lens (4) and the 4th wedge-shaped lens (5)
It is adjusted away from the Mobile Slide (18) are passed through.
2. a kind of beam shaping system according to claim 1, which is characterized in that the third wedge-shaped lens (4) and institute
Stating between the 4th wedge-shaped lens (5) has virtual focus point (19);The side of the installation bin (802) is provided with energy back device
(9), wherein the side of the energy back device (9) is provided with the first reflecting optics (10) and the second reflecting optics (11).
3. a kind of beam shaping system according to claim 2, which is characterized in that the one end of the CCD camera (8) connects
It is connected to camera adjustments camera lens (801), wherein the isolation eyeglass (7) is set in the camera adjustments camera lens (801);It is described
The both ends of installation bin (802) are separately installed with first flange (13) and second flange (14).
4. a kind of beam shaping system according to claim 2 or 3, which is characterized in that the Mobile Slide (18) is used for
Adjust the position of the third wedge-shaped lens (4);The top of first mounting device (16) and second mounting device (17)
Portion is provided with electric-control system (20);The bottom of the installation bin (802) is equipped with the first adjusting knob (80201), the second adjusting
Knob (80202) and third adjusting knob (80203).
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110482877A (en) * | 2019-08-29 | 2019-11-22 | 南京理工大学 | A kind of Quartz glass surfaces micro-crack femtosecond laser makes method up |
CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
-
2018
- 2018-11-11 CN CN201821848280.1U patent/CN209239279U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
CN110482877A (en) * | 2019-08-29 | 2019-11-22 | 南京理工大学 | A kind of Quartz glass surfaces micro-crack femtosecond laser makes method up |
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