CN1137571A - Ion bombarding furnace - Google Patents
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- CN1137571A CN1137571A CN 95110290 CN95110290A CN1137571A CN 1137571 A CN1137571 A CN 1137571A CN 95110290 CN95110290 CN 95110290 CN 95110290 A CN95110290 A CN 95110290A CN 1137571 A CN1137571 A CN 1137571A
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Abstract
The present invention relates to a new type ion bombarding furnace for strengthening surface in the field of metal heat treatment. Said furnace is composed of furnace body formed from furnace cover, furnace cylinder and furnace bottom, and vacuum, air-feeding, power-supply and cooling system. It is characterized by that several hanging cathode power-transmitting devices are placed on the furnace cover, and the heat insulation of the furnace cylinder is implemented by means of vacuum layer, air layer and filler layer, and its furnace bottom is made up in the form of arc, and all pipe conenctions are placed on its side surface, and the cathode power-transmitting device is an "air-gap protection" gap formed from metal component and metal component, and its outer side is equipped with splashproof cover.
Description
The present invention relates to the workpiece surface reinforcement and use equipment, belong to the thermal treatment field.
Ionitriding and ion multi element copermeation, be that a kind of steel-iron components surface abrasion resistance that can significantly improve decreases, antifatigue, corrosion-resistant, an emerging metal surface enhanced technology in resistance to high temperature oxidation and raising workpiece life-span, it is that processed workpiece is placed in the vacuum vessel, be evacuated to 6.7Pa, then, fill with thin nitrogenous gas and other common permeation bodies, as ammonia or nitrogen hydrogen mixeding gas to 133～1333Pa, after adding high voltage direct current between negative electrode and the anode, gas is ionized to and is the positive ion of nitrogen and hydrogen and electronics, workpiece this moment (negative electrode) is owing to return the nitrogen of ground state and optical radiation that hydrogen atom produces after being excited, thereby covered by the aura of this purple of generation on its surface.The positive ion of nitrogen and hydrogen is under the high-voltage electric field effect, surface with very big energy bombarding cathode (workpiece), produce a large amount of heats workpiece is heated to needed temperature, simultaneously, the positive ion of nitrogen produces compound at workpiece surface, chemical reaction and absorption, the physics of diffusion, chemical process have formed the nitride layer of high rigidity and the chemical combination layer of multielement quickly.
It is fast that ionitriding has infiltration rate, and infiltration layer is little close, the thermo-efficiency height, and save energy, workpiece deformation is little, nuisanceless pollution, labor condition is good, and antiseepage is easy, handles not oxidation of workpiece in a vacuum, not decarburization, therefore advantage such as the workpiece surface quality after the processing is good, is extensively paid attention to by people in recent years.Be used to finish the specific equipment of this workpiece surface reinforcing process, be referred to as ion nitriding furnace.The present invention is referred to as to call ion bombarding furnace, it can be used for to carbon steel, steel alloy, stainless steel, Refractory Steel, cast iron, spheroidal graphite cast iron, titanium or titanium alloy etc. carry out ionitriding, ionitrocarburizing (ion soft-nitriding), art breading such as the ion nitrogen carbon titanium is ternary co-osmosized, nitrogen carbon titanium sulphur oozes altogether.
Existing ion nitriding furnace from its type of furnace, can have bell furnace, pit furnace and general form stove.According to the requirement of ion nitriding technology, its whole plant comprises vacuum furnace body [4], vacuum acquiring system [62], airing system [63], power supply system [64] and cooling system [65].
In order to guarantee the quality of ion nitriding, to ion bombarding furnace following requirement should be arranged, concerning body of heater, 1. good air-tightness to be arranged, the ion bombardment workpiece process that ionization of gas produces when adapting to ion nitriding, to reach 133～1333Pa vacuum requirements in the stove, 2. good insulation performance to be arranged, during ion nitriding, workpiece connects negative electrode, and body of heater is anode (or adding anode in addition), and 500～1000 volts volts DS is arranged between the two poles of the earth, cathode leg passes body of heater, require and the body of heater insulation, this high-voltage could be introduced in the vacuum chamber, 3. thermal insulation is good, because the sealed insulating material heat resisting temperature of body of heater is lower, generally have only 60～70 ℃, and furnace temperature is 500～650 ℃ during nitrogenize, therefore, require body of heater that good thermal insulation is arranged, employing water flowing in the middle of furnace body inside adds the stove housing that radiation heat insulation shields and make of double-layer plate is cooled off and is realized usually.
What answer lay special stress on explanation is, is installed on the bell or is installed in cathode electricity transmission device on the furnace bottom, be i.e. conducting rod.When ion nitriding furnace is transmitted electricity as strong current, on the interface between insulating material and the conducting rod, arc discharge takes place easily.Though adopt gap protection (or to claim the air gap protection; be called for short " protecting the crack "); because of vacuum tightness variation in temperature variation and the stove or because factors such as sputters; make " protecting the crack " ineffective and arc takes place to beat; therefore; whether the structure of cathode electricity transmission device is reasonable, just becomes the key that this equipment whether can works better.Requiring in design has " the protecting the crack " that prevents arc discharge reliably, and enough insulating property prevent high electrical breakdown.Vacuum leakproofness to be arranged in the use preferably and be not subjected to temperatures involved.Be generally and make sealing and insulation well, except that furnace bottom or bell water-cooled, cathode terminal is also taked water-cooling structure.Make cathode connection produce aura with the porcelain tube cover and partly isolate at the bottom of the anode furnace or bell, in case cathode sputtering and cause short circuit, and porcelain tube, air gap guard ring can form laterally and vertically air gap protection, beats the arc phenomenon in case produce the aura part with the porcelain tube contact position.Want evenly in the gap of air gap protective layer, and gap thickness is less than 1mm, and gap depth should be greater than 10mm.
Vacuum system is to be used for obtaining vacuum and the assurance of keeping vacuum in the stove in the stove, is made up of institutes such as oil-sealed rotary pump, electromagnetism band venting vacuum valve, vacuum butterfly valve, vaccum stop valve, resistance vacuum gauge and YEs.
The source of the gas of ion nitriding mainly is that ammonia, decomposed ammonia and nitrogen and hydrogen mixture or other branches are vented one's spleen.Airing system comprises gas cylinder, under meter, drying chamber, mixing tank, reducing valve, buffer tank, tensimeter, variable valve etc.
Power supply system must satisfy: 1. continuously adjustable direct current or pulse direct current, 2. Adjustable Output Voltage to 1000 volt suppresses glow discharge as far as possible to the arc discharge cataclysm, in case occur arc discharge can be immediately arc extinguishing automatically, automatically build-up of luminance again subsequently, accurately control nitriding temperature automatically.
In the prior art, most typical is exactly the general form ion nitriding furnace, and this stove is mainly by at the bottom of arc bell, round kiln tube, the flattening oven and be located at hanging cathode electricity transmission device, be located at the bottom of the flattening oven and stack body of heater [4] and vacuum system [62], airing system [63], power supply system [64] and the cooling system [65] that the stacking cathode electricity transmission device between the cathode disc that workpiece uses forms on the bell and constituted.This versatible furnace is suitable for handling elongated and short and thick workpiece, highly versatile, but also exist the some shortcomings part: 1. have only a cathode electricity transmission device, thereby can not in a stove, finish the workpiece that requires multiple different alloying layer thicknesses simultaneously, 2. vacuum system, airing system, power supply system and water-cooling system all are installed in the space between furnace bottom and the base, maintenance is inconvenient, 3. body of heater all adopts water-cooled, energy consumption is bigger, 4. the cathode electricity transmission device structure is reasonable inadequately, and it is not enough and can not work or occur to beat the arc phenomenon rigidity often to occur, and 5. furnace bottom is a plate armature, therefore, bearing capacity is low, waste material, and the settling of furnace bottom easily is drawn in the pump, and be unfavorable for the circulation of gas, the side with the dead angle is arranged near the bottom surface contacts.
In order to solve the above-mentioned deficiency of prior art, and provide a kind of being convenient to keep in repair, voltage endurance capability is strong, the burner hearth gas circulation does not have the dead angle, energy-conservation, the cathode electricity transmission device rigidity is strong, do not produce and beat arc, can in same stove, handle the ion bombarding furnace of different alloying layer thickness requirement workpiece simultaneously, ad hoc meter technical solution of the present invention.
The present invention conceives substantially; furnace bottom is designed to arc; with the joining various pipe fittings of vacuum furnace body; design is in the side of arc furnace bottom; the round kiln tube of forming body of heater is designed to multistage; the inboard still keeps thermoscreen; sidewall adopts water-cooled layer and vacuum layer; or and gas cloud; or and packing layer; and water-cooled layer and vacuum layer; gas cloud; or and vacuum layer; packing layer; or and gas cloud; the heat insulation method that packing layer constituted; adopt a plurality of cathode electricity transmission devices; the design Antisplash machanism; " air gap protection " structure is shifted to cold zone; do not adopt laterally " air gap protection " structure, the member that constitutes " air gap protection " layer both sides all changes hardware into, increases the rigidity of hanging cathode electricity transmission device and adopts the Rational structure of stacking not load-bearing of cathode electricity transmission device.
A kind of ion bombarding furnace that the present invention is designed, mainly be by with arc bell [3], round kiln tube [5], furnace bottom [6], hang cathode electricity transmission device [1], stack body of heater [4] and vacuum system [62], airing system [63], power supply system [64] and the cooling system [65] that cathode electricity transmission device [11] and base [12] constituted and constituted, it is characterized in that, on arc bell [3], design have a plurality of can independent operation, hang cathode electricity transmission device [1]; Round kiln tube [5] by the double-layer plate making, in the middle of its two-layered steel plates, accompany water-cooled layer [21] and vacuum layer [19] or with gas cloud [20] or with packing layer [25], and water-cooled layer and vacuum layer, gas cloud or with vacuum layer, packing layer or the thermofin that constituted with gas cloud, packing layer; Furnace bottom [6] is designed to the arcuate structure that the inboard has a plurality of cathode blocks [14]; By the side of arc furnace bottom [6], horizontal have stacking cathode electricity transmission device [11], vacuum system joint [8], heating pipe joint [10], cooling tube joint [7] and a thermopair [9]; Cathode disc [16] is placed on the cathode block [14] by the supporting of cathode carrier [15]; Hanging cathode electricity transmission device [1] and stacking cathode electricity transmission device [11], conduction rack [47] has all been designed in its end that puts in stove the inner; Constituting the member of cathode electricity transmission device air gap protective layer [46] both sides, all is hardwares.
It is further characterized in that, on arc bell [6], is equiped with one along its axis and hangs cathode electricity transmission device [1], also is equiped with a plurality of cathode electricity transmission devices [1] of hanging symmetrically around this axis around it, and they generally are and equidistantly distribute; Every joint stove tube [5] of forming body of heater [4], end face also designs the dovetail-indent [23] that " O " RunddichtringO [26] can be installed and the anode posts eyelet [24] that supports anode joint pin [30] with pressure spring [29] can be installed thereon; In the inboard bottom of arc furnace bottom [6], design has three to be mutually cathode block [14] hexagonal angle and support cathode disc [16] usefulness by cathode carrier [15]; Be horizontally placed on the stacking cathode electricity transmission device [11] of cathode disc [16] below certain distance by arc furnace bottom [6] side, the outside of formed between its metal inner shield cover [51] and metallic shield cover [44] " air gap protection " layer [46] structure is added with splash-proof casing [50]; Hang cathode electricity transmission device [1], be one with the screw thread of metal coupling nut [45] by cross cathode rod [40] end, with negative electrode guide pin bushing [32], cross cathode rod [40], surround cross cathode rod [40] insulation layer (comprise external insulation pad [35], go up pressure pad [37], go up insulating mat [39], bench insulator [41], down bench insulator [42] and locate bench insulator [43]), splash-proof casing [50], gasket [38] and air gap protective layer [46] tighten together and form an integral rigidity structure; Hang " air gap protection " layer [46] structure of cathode electricity transmission device [1], constituted, be added with splash-proof casing [50] in its outside by metal coupling nut [45] that increases the rigidity effect and metallic shield cover [44]; Stack cathode electricity transmission device [11], be horizontally placed on the below certain distance of cathode disc [16] by the side of furnace bottom [6], it does not bear the weight of workpiece [17] and cathode disc [16]; Be placed on the top cathode carrier [15] of cathode block [14], design has bolt [58], and in order to regulating the levelness of cathode disc [16], this cathode carrier [15] is with supporting base [60] and as anodic arc furnace bottom [6] insulating splashproof member.
The technology of the present invention compared with the prior art, its technical feature difference is listed table 1 in.
Main advantage is: 1. since the required circuit design of body of heater in the side of arc furnace bottom outside; therefore; easy to maintenance, 2. because furnace bottom is designed to arc, so the voltage endurance capability height; under similarity condition; can save material 50%, 3. because foul is deposited on the bottommost of arc furnace bottom, so; can not enter in the off-gas pump; 4. bell and furnace bottom all are designed to arc, and like this, gas does not have the dead angle at the stove internal recycle; 5. the good heat insulating of body of heater; can save the energy 15%, 6. owing to cathode electricity transmission device, the member that has adopted formation " air gap protection " both sides, gap is hardware and is provided with the splash-proof casing structure; therefore, do not produce " beating arc " phenomenon.7. owing to design on bell has a plurality of cathode electricity transmission devices of hanging, so can in same stove, once finish the workpiece of multiple alloying layer thickness requirement.
Be the description of the drawings below:
Fig. 1 is that designed its vacuum furnace body of a kind of ion bombarding furnace of the present invention [4] is faced the semi-section structure iron.It is by arc bell [3], round kiln tube [5], arc furnace bottom [6], base [12] and is installed in a plurality of on the bell [3] and hangs cathode electricity transmission device [1] and be horizontally placed on the lateral stacking cathode electricity transmission device of arc furnace bottom [6] [11] and constituted.Stove tube [5] is the multi-segment structure form that can fit together according to the requirement of workpiece size.The side that finish vacuum (system) joint [8], air feed (system) joint [10] that the ion bombardment workpiece uses, stack cathode electricity transmission device [11], cooling (system) joint [7], thermoelectric corner [9] all is located at arc furnace bottom [6], be equipped with viewing window [2] in the top of bell [3] and the side of every joint stove tube [5], the stove tube [5] of vacuum furnace body [4] adopts by water-cooled layer [21], gas cloud [20] and vacuum layer [19] structure, still be provided with thermoscreen [22] in burner hearth, workpiece [17] is hung on the hook of hanging cathode electricity transmission device [1].
Be lifted on together by flange [18] between bell [3], stove tube [5], furnace bottom [6], cathode disc [16] is supported by the cathode carrier [15] that is placed on the cathode block [14].Vapor pipe [13] is located at the bottom of furnace bottom [6].
Fig. 2 is a kind of ion bombarding furnace whole plant of the present invention synoptic diagram.This ion bombarding furnace whole plant is made of vacuum furnace body [4], vacuum acquiring system [62], airing system [63], power supply system [64], cooling system [65].
Fig. 3 is the cross-sectional view of facing of bell [3].In the technical solution of the present invention, still keep water-cooled layer [21] structure and inboard thermoscreen [22] structure of bell [3], but upward be provided with a plurality of cathode electricity transmission devices [1] of hanging by water-cooled layer [21] at bell [3].Flange [18] will be used for linking by bolt with stove tube [5].
Fig. 4 is the schematic top plan view of bell [3].Be provided with a plurality of above it and the symmetric cathode electricity transmission device [1] of hanging of body of heater axis, medial axis is provided with 1, and being in around it on equidistant symmetry position has 6.Also design on the bell viewing window [2] and warter connection [7] and heating pipe joint [10] are arranged.
Fig. 5 is the cross-sectional view that the present invention designs the another kind of form of stove tube [5] side structure.Its outside is water-cooled layer [21], is gas cloud [20], vacuum layer [19] in it, and the inside still keeps thermoscreen [22].On the flange [18] of the upper surface of stove tube [5], be provided with dovetail-indent [23] in order to installing " O " RunddichtringO, and be provided with and lay the anode posts eyelet [24] that spring and anode joint pin are used.Can UNICOM and become the anode of ion bombarding furnace body of heater so that respectively save stove tube [5], also be provided with and bell and furnace bottom or the flange [18] that connects with the stove tube at stove tube [5] end face.
Fig. 6 is the cross-sectional view of designed stove tube [5] another form of sidewall of the present invention.Outermost layer is packing layer [25], is provided with water-cooled layer [21] in two end, inwardly is vacuum layer [19], and inwardly be the thermofin [22] of prior art again, the same Fig. 5 of other symbols.
Fig. 7 is that a kind of ion bombarding furnace arc furnace bottom of the present invention [6] structure is faced diagrammatic cross-section.Furnace bottom [6] the inside is provided with a plurality of cathode blocks [14] (being generally 3), is placed with the cathode carrier [15] of supporting cathode disc [16] usefulness above it.On flange [18], be provided with annular dovetail slot [23], lay " O " sealing-ring [26] in it.Stack cathode electricity transmission device [11], put in from the side of arc furnace bottom in the burner hearth and be in the below certain distance of cathode disc [16], the conduction rack of its end [47] is connected on the cathode disc [16].Can put on request above the cathode disc [16] and establish workpiece.Bottommost design at furnace bottom [6] has vapor pipe [13], and it stretches to the elsewhere by base [12].
Fig. 8 is arc furnace bottom [a 6] schematic top plan view.In annular dovetail slot [23], be mounted with " O " RunddichtringO [26], each is provided with three cathode blocks [14] at a distance of hexagonal angle at furnace bottom [6], there is vapor pipe [13] center at the bottommost of furnace bottom, in furnace bottom [6] side, by the about distance of sidewall at a distance of 15 ° of angles, design positive contact [27] respectively, stack cathode electricity transmission device [11], thermoelectric corner [9], vacuum (system) joint [8], air connector [10], cooling tube joint [7] and the anode joint pin [30] that designs in the upper surface of furnace bottom, cathode disc [16] just on cathode block [14], is being supported by cathode carrier.
Fig. 9 is that the A-A section of Fig. 8 is to view.On the flange [18] of furnace bottom [6] upper surface, be provided with annular dovetail slot [23] and anode posts eyelet [24], " O " RunddichtringO [26] is housed in annular dovetail slot [23], pressure spring [29] is housed in anode posts eyelet [24], its anode joint pin [30] be contained in pressure spring [29] above, can not go out by the effect of steady brace [31].
Figure 10 is that the designed a kind of ion bombarding furnace of the present invention is with hanging the cathode electricity transmission device cross-sectional view.On with water-cooled layer [21] refrigerative bell [3], be welded with negative electrode guide pin bushing [32]; bench insulator [41] just is placed in its inside; then; by the center of bench insulator [41] cross negative electrode conducting rod [40] is installed again; last insulating mat [39]; gasket [38]; afterwards; install pressure pad [37]; power-line plug [33] is installed at cross negative electrode conducting rod [40] top; supply lead [34] inserts wherein; external insulation pad [35] is installed again; at last; tighten together with hold-down nut [36] and negative electrode guide pin bushing [32]; its end of negative electrode guide pin bushing [32] that is in the inboard end of bell [3] is equipped with splash-proof casing [50]; following insulating mat [42]; location insulating mat [43]; bell housing [44]; use metal coupling nut [45] at last; by the screw threads for fastening on the cross negative electrode conducting rod [40] together; form an integral rigidity structure; between metal coupling nut [45] and bell housing [44], form " air gap protection " layer [46] of a regulation; in cross negative electrode conducting rod [40] lower end; with connect screw thread on suspension rod [48] and the metal coupling nut [45] conduction rack [47] with metal coupling nut [45] with connect suspension rod [48] and tighten together, be added with suspender on the connection suspension rod [48] and just can have lifted workpiece.Cathodic current is by supply lead [34], power-line plug [33], cross negative electrode conducting rod [40], metal coupling nut [45] and connect suspension rod [48], just can lead to workpiece by conduction rack [47] at last and get on.
Figure 11 is that the designed a kind of ion bombarding furnace of the present invention is with stacking cathode electricity transmission device [11] cross-sectional view.In the side of passing through with water-cooled layer [21] refrigerative arc furnace bottom [6]; be connected with negative electrode guide pin bushing [32]; along its axis bench insulator [41] is installed in negative electrode guide pin bushing [32] lining; cross negative electrode conducting rod [40]; splash-proof casing [50]; shielding pad [49]; metal inner shield cover [51]; location insulating mat [43] and metallic shield cover [44]; then; compress with nut [52]; between metal inner shield cover [51] and metallic shield cover [44]; just form " air gap protection " layer [46] of a regulation; afterwards; use nut [52] that conduction rack [47] is fastened on the cross negative electrode conducting rod [40] again, conduction rack [47] will be connected with workpiece or cathode disc.Stretch out an end in furnace bottom [6] outside again by negative electrode guide pin bushing [32], gasket [53], interior insulation covering [54], packing ring [55], nut [56], insulcrete [57] are installed in it, then attaching plug [33], external insulation pad [35] are installed in the termination of cross negative electrode conducting rod [40], insert supply lead [34], at last, fastening with clamping nut [36], like this, electric current just arrives workpiece through supply lead [34], power-line plug [33], cathode rod [40], conduction rack [47] and has got on.
Figure 12 is that the designed a kind of ion bombarding furnace of the present invention is faced structural representation with cathode carrier [15].It places cathode disc [16] and is fixed between the cathode block [14] on the arc furnace bottom [6]; cathode carrier [15] is made of the bolt [58] of adjustable cathode dish height, external shroud [59], location insulating mat [43], inner shield cover [51], supporting base [60], splashproof supporting base [61]; between external shroud [59] and inner shield cover [51], form the air gap protective layer [46] of specified dimension.
The present invention further specifies as follows in conjunction with the embodiments: embodiment 1
The die surface made from the 38CrMoAl material requires to have the thick nitride layer of 0.2mm, uses present device to handle, and follows these steps to carry out:
1. equipment inspection
Check that with 1000 volts of megohmmeters the cathode and anode insulativity is not less than 10 megaohms and just can adorns workpiece.Before the external power source that closes, each switch should be in the position of " breaking " on electrical control cubicles and the control enclosure panel.
2. workpiece is prepared
Workpiece wants strict burr removal, rusty stain lacquer trace, greasy dirt etc. to beat the arc root, washes down, dries with clean-out system cleaning, clear water, positions such as the hole of obstruction antiseepage, eye, groove.
3. shove charge nitrogenize
Mould is deposited on the cathode disc, at a distance of 20mm, then, stove tube [5] is hung on the furnace bottom [6] between workpiece, adorn 2 joint stove tubes altogether, by bolted together with flange [18].The stove tube is as anode, and workpiece keeps the distance about 50mm as negative electrode between the cathode and anode.Stack the conduction rack [47] on the cathode electricity transmission device [11], be connected on the cathode disc [16].The bell [3] that closes connects water-cooled tube, closes purging valve.External power switch, all signal lamp bright (being that red light is bright) in the stop button close.Starting resistance vacuumometer power switch is checked airing system the zero point of adjusting resistance vacuum gauge again at preheating half an hour, send water cooling to body of heater, the pump housing.Restart vacuum pump, vacuumize, measurement of vacuum greater than 6.7Pa after, connect direct supply, adjust the high direct voltage build-up of luminance and beat arc, treat that aura is stable gradually after, regulate steam supply valve, control air pressure is 1090Pa, voltage is 800V, current density is 2.0mA/cm
2, then, progressively be warming up to 620 ℃, after temperature, be incubated 120 minutes.
4. cooling is come out of the stove
Close the airing system valve, stop direct supply, each switch returns to zero-bit, after the workpiece furnace cooling to 150 ℃, bleeds off the gas in the stove, and the bell of slinging, stove tube take out Work inspection device.
5. quality inspection
Its alloying layer thickness of metallographicinspection is 0.22mm, infiltration layer by the surface entad the metallographic structure of portion be ε → ε+γ ' → γ '+α → α, its average hardness is Hv1050, all reaches requirement.Embodiment 2
The lathe leading screw that 45 steels are done, φ 50mm, long 4000mm requires total infiltration layer 0.1mm, Hv450～500.The tippler leading screw φ 150mm that the 35CrMo steel is done, long 2500mm requires total infiltration layer 0.3 ± 0.1mm, Hv＞500.The plastics extruder screw that the 38CrMoAl steel is done, φ 85mm, long 950mm requires total infiltration layer 〉=0.6mm, Hv 〉=900.Adopting present device to carry out the C-N confusion technology handles.
The part of above-mentioned three kinds of materials, the different alloying layer thicknesses and the requirement of hardness are arranged, though adopt the C-N confusion technology all can reach requirement, but because the soaking time difference that requires (because alloying layer thickness difference), can only divide three stoves to handle with prior art, now adopt present device, the part that can once three kinds of different infiltration layers be required is by processing requirement, pack into to handle once in the same stove and finish, step is as follows:
1. preparation work
With embodiment 1.
2. shove charge.
Requirement according to three kinds of different alloying layer thicknesses of workpiece divides three groups, hangs respectively on the hook of hanging cathode electricity transmission device [1], and every group of cathode wire all communicates with the power supply contactor.On request, three kinds of material hot treatment temperature identical (630 ℃), according to the requirement of alloying layer thickness, it is 1 hour that their soaking time is respectively 45 steel parts, and 35CrMo steel part is 10 hours, and 38CrMoAl then is 20 hours.
3. the control of different alloying layer thicknesses.
When furnace temperature reaches 580 ℃, in stove, feed ammonia and acetone mixed gas, its ratio is 8: 2, and furnace pressure maintains 1090Pa, and voltage maintains 850V, and current density maintains 2.0mA/cm
2, when furnace temperature reaches 630 ℃, begin insulation.
When insulation 1 hour the time, be hung with the alternating current contactor outage of hanging cathode electricity transmission device [1] of 45 steel wire thick sticks, hang that in the above leading screw stops the ion cementation process, workpiece is treated furnace cooling.At this moment, all the other two kinds of workpiece still ooze carrying out ion in the stove, when soaking time reaches 10 hours, be connected in the contact appliance cut-off of hanging cathode electricity transmission device that is hung with the 35CrMo leading screw, and 38CrMoAl plastics extruder screw is still carried out ion and is oozed continuing insulation, after soaking time reaches 20 hours, also the power supply failed to the cathode electricity transmission device that is hung with the 38CrMoAl screw rod, arrive this, three kinds of parts all dispose, and prepare to come out of the stove by the order of embodiment 1.
4. check
45 steel wire thick sticks: total infiltration layer 0.12mm, Hv480, metallographic structure is qualified.
The 35CrMo leading screw: total infiltration layer 0.32mm, Hv580, metallographic structure is qualified.
The 38CrMoAl screw rod: total infiltration layer 0.65mm, Hv1000, metallographic structure is qualified.
The fragility of three kinds of parts is 1 grade.
The technology of the present invention and prior art performance are relatively
Table 1.
| Furnace binding | The furnace wall go into water temp (℃) | The furnace wall leaving water temperature(LWT) (℃) | Heating-up time (H) | Temperature uniformity |
| No | 17 | 53 | 7 | Bad |
| Vacuum layer+ | 17 | 38 | 4.5 | Better |
| Vacuum layer+ | 17 | 21 | 3.2 | Best |
| Remarks | Long-pending identical when handling workpiece surface, under processing condition the same terms, when adopting thermofin, thermo-efficiency can improve 1/3. | |||
Claims (9)
1. ion bombarding furnace, mainly be by with arc bell [3], round kiln tube [5], furnace bottom [6], hang cathode electricity transmission device [1], stack cathode electricity transmission device [11], base [12] and the body of heater [4] and vacuum system [62], airing system [63], power supply system [64] and the cooling system [65] that constitute are constituted, it is characterized in that:
A) on arc bell [3], design have a plurality of can independent operation hang cathode transmission
Device [1].
B) the round kiln tube of being made by double-layer plate [5] accompanies water-cooled in the middle of its two-layered steel plates
Layer [21] and vacuum layer [19] or with gas cloud [20] or with packing layer [25], with
And water-cooled layer [21] and vacuum layer, gas cloud or with gas cloud, packing layer or
The thermofin of forming with vacuum layer, packing layer.
C) furnace bottom [6] is designed to the arcuate structure that the inboard has a plurality of cathode blocks [14].
D) stack cathode electricity transmission device [11], the sidewall by furnace bottom is horizontally placed on cathode disc [16]
The below certain distance, do not bear weight,
E) cathode disc [16] is placed on the cathode block [14] by the supporting of cathode carrier [15].
F) vacuum adapter [8], heating pipe joint [10], cooling tube joint [7] and thermopair [9],
All design side in arc furnace bottom [6].
G) member of formation cathode electricity transmission device air gap protective layer [46] both sides all is metal structures
Part.
2. a kind of ion bombarding furnace according to claim 1, it is characterized in that, on arc bell [3], be equipped with one along its axis and hang cathode electricity transmission device [1], around it around axis symmetrically also design a plurality of cathode electricity transmission devices [1] of hanging are arranged, they generally are and equidistantly distribute.
3. a kind of ion bombarding furnace according to claim 1, it is characterized in that, every joint stove tube [5] of forming body of heater [4], its upper surface, on the flange [18] also design have and can adorn " O " RunddichtringO [26], dovetail-indent [23] and the anode posts eyelet [24] that supports anode joint pin [30] with pressure spring [29] can be housed.
4. a kind of ion bombarding furnace according to claim 1 is characterized in that, in the inboard bottom of arc furnace bottom [6], design has three cathode blocks [14] that are mutually hexagonal angle and support cathode disc [16] usefulness by cathode carrier [15].
5. a kind of ion bombarding furnace according to claim 1; it is characterized in that; stack the outside of cathode electricity transmission device [11] formed between its metal inner shield cover [51] and metallic shield cover [44] " air gap protection " layer [46] structure, be added with splash-proof casing [50].
6. a kind of ion bombarding furnace according to claim 1 and 2 is characterized in that, hangs cathode electricity transmission device [1], be one with the screw thread of metal coupling nut [45] by cross cathode rod [40] end, with negative electrode guide pin bushing [32].Insulation layer, splash-proof casing [50], gasket [38] and the air gap protective layer [46] of cross cathode rod [40], encirclement cross cathode rod [40] tightens together and forms an integral rigidity structure.
7. according to claim 1 or 2 or 5 described a kind of ion bombarding furnaces, it is characterized in that hanging cathode electricity transmission device [1] and stacking cathode electricity transmission device [11], conduction rack [47] has all been designed in its end that puts in stove the inner.
8. a kind of ion bombarding furnace according to claim 1 and 2; it is characterized in that; hang " air gap protection " structure of cathode electricity transmission device [1], constituted, be added with splash-proof casing [50] in its outside by metal coupling nut [45] that increases the rigidity effect and metallic shield cover [44].
9. according to claim 1 or 4 described a kind of ion bombarding furnaces, it is characterized in that, be placed on the cathode carrier [15] above the cathode block [14], design has bolt [58], in order to regulating the levelness of cathode disc [16], this cathode carrier [15] is with supporting base [60] and as anodic arc furnace bottom [6] insulating splashproof member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95110290A CN1043159C (en) | 1995-06-07 | 1995-06-07 | Ion bombarding furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95110290A CN1043159C (en) | 1995-06-07 | 1995-06-07 | Ion bombarding furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1137571A true CN1137571A (en) | 1996-12-11 |
| CN1043159C CN1043159C (en) | 1999-04-28 |
Family
ID=5077690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95110290A Expired - Fee Related CN1043159C (en) | 1995-06-07 | 1995-06-07 | Ion bombarding furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1043159C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102278877A (en) * | 2011-08-31 | 2011-12-14 | 太仓市华瑞真空炉业有限公司 | Vertical vacuum sintering furnace |
| CN102312069A (en) * | 2010-06-29 | 2012-01-11 | 中国国际海运集装箱(集团)股份有限公司 | Thermal treatment furnace |
| CN103014600A (en) * | 2012-11-27 | 2013-04-03 | 大连经济技术开发区圣洁真空技术开发有限公司 | Nitriding furnace retort |
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| CN103459651A (en) * | 2011-02-02 | 2013-12-18 | 株式会社Ihi | Plasma processing device |
| CN103834905A (en) * | 2012-11-27 | 2014-06-04 | 大连经济技术开发区圣洁真空技术开发有限公司 | New method for gas nitriding of tiny workpiece in rotary furnace |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2556072B2 (en) * | 1987-12-15 | 1996-11-20 | 大同特殊鋼株式会社 | Ion carbonitriding furnace |
| CN1054274A (en) * | 1990-09-26 | 1991-09-04 | 自贡市低压电器厂 | Glow discharge nitriding, intensive treatment equipment |
| JPH04168261A (en) * | 1990-10-31 | 1992-06-16 | Toshiba Corp | Ionicnitriding device |
| CN1095427A (en) * | 1993-05-20 | 1994-11-23 | 浙江大学 | Multifunction ion bombarding furnace with double-deck glow |
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- 1995-06-07 CN CN95110290A patent/CN1043159C/en not_active Expired - Fee Related
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| CN102312069A (en) * | 2010-06-29 | 2012-01-11 | 中国国际海运集装箱(集团)股份有限公司 | Thermal treatment furnace |
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| CN103459651A (en) * | 2011-02-02 | 2013-12-18 | 株式会社Ihi | Plasma processing device |
| CN103459651B (en) * | 2011-02-02 | 2015-09-16 | 株式会社Ihi | Plasma treatment appts |
| CN102278877A (en) * | 2011-08-31 | 2011-12-14 | 太仓市华瑞真空炉业有限公司 | Vertical vacuum sintering furnace |
| CN103014600A (en) * | 2012-11-27 | 2013-04-03 | 大连经济技术开发区圣洁真空技术开发有限公司 | Nitriding furnace retort |
| CN103834905A (en) * | 2012-11-27 | 2014-06-04 | 大连经济技术开发区圣洁真空技术开发有限公司 | New method for gas nitriding of tiny workpiece in rotary furnace |
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| CN106929796A (en) * | 2017-05-05 | 2017-07-07 | 郑州大学 | Discrete multianode bell-jar ion nitriding furnace |
| CN106929796B (en) * | 2017-05-05 | 2023-12-05 | 郑州大学 | Discrete multi-anode bell-type ion nitriding furnace |
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| CN1043159C (en) | 1999-04-28 |
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