CN113739062B - Vacuum coating air source quick-change device - Google Patents
Vacuum coating air source quick-change device Download PDFInfo
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- CN113739062B CN113739062B CN202111042750.1A CN202111042750A CN113739062B CN 113739062 B CN113739062 B CN 113739062B CN 202111042750 A CN202111042750 A CN 202111042750A CN 113739062 B CN113739062 B CN 113739062B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/06—Closures, e.g. cap, breakable member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0104—Shape cylindrical
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/03—Orientation
- F17C2201/032—Orientation with substantially vertical main axis
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
- F17C2203/0634—Materials for walls or layers thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0311—Closure means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention discloses a quick change device for a vacuum coating air source, belongs to the field of vacuum coating, and solves the problems of high cost, high difficulty and inconvenience in air source replacement of the existing air source device manufactured by a Kovar sealing technology. The technical scheme of the invention is as follows: the vacuum coating air source quick-change device comprises a support, an air storage bottle, an air inlet pipe and an air outlet pipe, wherein the support is provided with a round counter bore, and the side surface of the counter bore is in threaded connection with a compression nut; the gas storage bottle penetrates through the compression nut, the bottle mouth is positioned in the circular counter bore and is fastened through the compression nut, and a sealing ring is arranged among the gas storage bottle, the support and the compression nut; the bottom of the circular counter bore is provided with two through holes, an air inlet pipe and an air outlet pipe are arranged in the through holes, the air inlet pipe, the air outlet pipe and the support are hermetically welded, and the air inlet pipe and the air outlet pipe are respectively hermetically connected with a carrier gas connector. The invention adopts metal seal welding and detachable threaded connection, and the sealing ring seals the gas source, thereby avoiding kovar sealing and being capable of quickly and safely replacing the volatile solid-liquid gas source.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a quick change device for a vacuum coating air source.
Background
In modern scientific research and production, the multifunctional low-dimensional film material has wide application prospect in various fields such as electronics, biology, energy, chemical engineering and the like. Physical vapor deposition and chemical vapor deposition techniques are common means for preparing multifunctional, low-dimensional thin film materials. The special gas source stored in the gas source storage device is loaded into the deposition chamber through the carrier gas by a bubbling method, and the growth of films with different characteristics can be realized in the vapor deposition process. In order to adapt to the characteristics of high strength, large pressure difference and high sealing property of vacuum coating, at present, the Kovar sealing technology between glass and metal is mostly adopted to manufacture an air source device, and the manufacturing cost is higher.
The prior air source device has the following two defects. On one hand, in the aspect of processing and manufacturing, in order to ensure air tightness, an extremely high welding process is needed to be used as technical support, and the manufacturing cost is high and the difficulty is high. On the other hand, in the use, the operation is very inconvenient when the air source needs to be replaced, the Kovar sealing-in is easy to damage, the air source device is scrapped, the leakage of a dangerous air source is easy to cause, and the potential safety hazard exists.
Disclosure of Invention
The invention provides a quick change device for a vacuum coating air source, which solves the problems of high cost, high difficulty and inconvenience in air source replacement of the existing air source device manufactured by a Kovar sealing technology.
The technical scheme adopted by the invention is as follows: the vacuum coating air source quick-change device comprises a support, a gland nut, an air storage bottle, an air inlet pipe and an air outlet pipe, wherein the support is cylindrical or comprises a cylindrical part, a circular counter bore is arranged at the center of one bottom surface of the cylinder, an external thread is arranged on the side surface of the cylinder close to the circular counter bore, and the gland nut is provided with a perforation which is consistent with the aperture of the circular counter bore and is in threaded connection with the external thread of the support;
the gas cylinder is characterized in that the opening of the gas cylinder is open and annular, the outer diameter of the opening is matched with the diameter of the circular counter bore, the gas cylinder penetrates through the through hole of the compression nut, the opening is located in the circular counter bore of the support and is fastened through the compression nut, and sealing rings are further arranged among the outer wall of the gas cylinder, the bottom surface of the support and the compression nut;
the bottom of the circular counter bore of support sets up two through-holes, sets up intake pipe and outlet duct in two through-holes respectively, and the exit end of intake pipe and the entry end of outlet duct all are located the gas bomb, and the entry end of intake pipe and the exit end of outlet duct sealing connection carrier gas respectively connect, and intake pipe, outlet duct and support are metal material and material the same, sealing weld between the outer wall of intake pipe and the support, sealing weld between the outer wall of outlet duct and the support.
Further, the method comprises the following steps: the inlet pipe, the outlet pipe and the carrier gas joint are made of the same material, the inlet end of the inlet pipe and the outlet end of the outlet pipe are respectively welded with the carrier gas joint, and the leakage rate is not higher than 10 -10 Pa.L/s; the leakage rate between the air inlet pipe and the support and between the air outlet pipe and the support are not highAt 10 -10 Pa·L/s。
Further, the method comprises the following steps: the outlet end of the air inlet pipe is positioned at the bottom of the gas storage bottle, and the inlet end of the air outlet pipe is positioned at the mouth of the gas storage bottle.
Further, the method comprises the following steps: the support is in a pi or pi shape on the section passing through the center line of the cylinder, and the lower openings of the pi and pi are circular counter bores of the support.
Further, the method comprises the following steps: set up the packing ring of stereoplasm between sealing washer and the gland nut, the internal diameter of packing ring and the external diameter adaptation of gas bomb. For example, the material of the gasket is copper.
Further, the method comprises the following steps: the outer side of the support is fixedly provided with an outer cover, and the gas storage bottle and the compression nut are both positioned in the outer cover.
Specifically, the method comprises the following steps: the outer cover is an open cylinder, an observation port is arranged around the cylinder, and the cylinder opening of the cylinder is sleeved on the cylindrical outer side of the support and fixed on the support through screws.
More specifically: the gas storage bottle is made of quartz and is transparent.
Specifically, the method comprises the following steps: the carrier gas joint is a VCR joint, and the air inlet pipe, the air outlet pipe, the support and the carrier gas joint are all made of stainless steel.
The invention has the beneficial effects that: the vacuum coating air source quick-change device is connected by adopting a mode of combining metal seal welding with detachable threaded connection, and a sealing ring is utilized to seal an air source, so that a Kovar sealing mode which is difficult and expensive between metal and glass is avoided. Meanwhile, the volatile solid and liquid air source can be replaced quickly and safely.
The outlet end of the air inlet pipe is positioned at the bottom of the gas storage bottle, and the inlet end of the air outlet pipe is positioned at the mouth of the gas storage bottle, so that smooth air outlet is facilitated. A hard gasket is arranged between the sealing ring and the compression nut, pressure is uniformly applied to the sealing ring through the gasket in the process of screwing the compression nut, the deformation of the sealing ring is more uniform, and the sealing effect is favorably improved. The outer side of the support is fixedly provided with an outer cover which plays a role in protecting the gas storage cylinder. The outer cover is provided with an observation port, so that the gas source loss condition of the gas storage bottle can be observed conveniently through the observation port.
Drawings
Fig. 1 is a schematic structural diagram of a vacuum coating air source quick-change device of the invention.
Reference numerals are as follows: the gas storage device comprises a support 1, a compression nut 2, a gas storage bottle 3, a gas inlet pipe 4, a gas outlet pipe 5, a sealing ring 6, a carrier gas joint 7, a gasket 8 and an outer cover 9.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
As shown in figure 1, the vacuum coating air source quick-change device comprises a support 1, a compression nut 2, a gas storage bottle 3, an air inlet pipe 4 and an air outlet pipe 5. The support 1 is made of metal materials, so that the support is favorable for being welded with the air inlet pipe 4 and the air outlet pipe 5 in a sealing mode, for example, the support 1 is made of stainless steel materials. The support 1 is cylindrical or comprises a cylindrical part, a circular counter bore is arranged in the center of one bottom surface of the cylinder, in the figure 1, the surface directly contacting with the sealing ring 6 is the bottom surface of the support 1, and the center line of the cylinder is superposed with the center line of the circular counter bore. For example, the support 1 is pi-shaped or pi-shaped on the section passing through the center line of the cylinder, and the lower openings of the pi-shaped and pi-shaped are circular counter bores of the support 1. The side of the cylinder of the support 1 close to the circular counter bore is provided with an external thread, and the external thread can cover the whole side of the cylinder and also can only cover one section of the cylinder. Gland nut 2 sets up the internal thread with the external screw thread adaptation of support 1, and gland nut 2 sets up the perforation unanimous with the aperture of circular counter bore, and the perforation is used for supplying gas bomb 3 to pass, 2 threaded connection of gland nut in support 1's external screw thread to in convenient to detach.
The mouth of the gas storage bottle 3 is open, and the bottle body and the bottle bottom are both closed. The gas cylinder 3 is preferably made of a transparent material that is not easily reactive with a gas source, such as quartz, for direct observation. The gas cylinder 3 is also preferably provided with volume scales. The bottleneck of gas bomb 3 is ring shape, the external diameter of bottleneck and the diameter adaptation of circular counter bore, and gas bomb 3 runs through gland nut 2's perforation, and the bottleneck is located the circular counter bore of support 1 and fastens through gland nut 2, and the clearance between the outer wall of bottleneck and the circular counter bore should be as little as possible under the condition that can satisfy the installation. A sealing ring 6 is arranged between the outer wall of the gas storage bottle 3, the bottom surface of the support 1 and the gland nut 2, and the sealing ring 6 supports the gas storage bottle under the extrusion action of the gland nut 2The seat 1 and the gas storage bottle 3 are sealed, and the leakage rate is not higher than 10 -10 Pa.L/s. The inner diameter of the sealing ring 6 in a natural state should be equal to or less than the outer diameter of the mouth of the gas cylinder 3. The sealing ring 6 can be directly extruded by the compression nut 2; or a hard gasket 8 is arranged between the sealing ring 6 and the compression nut 2, the inner diameter of the gasket 8 is matched with the outer diameter of the gas storage bottle 3, the compression nut 2 directly applies pressure to the gasket 8 in the screwing process, and the gasket 8 extrudes the sealing ring 6 to realize uniform deformation. The material of the gasket 8 is, for example, copper or stainless steel. The mouth and the body of the gas cylinder 3 are in a cylinder shape with equal size, and the compression nut 2, the sealing ring 6 and the gasket 8 can be sleeved outside the gas cylinder 3 from the direction of the mouth or the bottom of the cylinder; or the mouth of the gas cylinder 3 is cylindrical, the body of the gas cylinder is in other shapes, and the compression nut 2, the sealing ring 6 and the gasket 8 are sleeved outside the gas cylinder 3 from the direction of the mouth.
The bottom of the circular counter bore of support 1 sets up two through-holes, and the diameter of two through-holes is unanimous with the external diameter of intake pipe 4 and outlet duct 5 respectively, sets up intake pipe 4 and outlet duct 5 in two through-holes respectively, seal welding between the outer wall of intake pipe 4 and the support 1, seal welding between the outer wall of outlet duct 5 and the support 1. Intake pipe 4, outlet duct 5 and support 1 are metal material and the material is the same to reduce the welding degree of difficulty and guarantee the leakproofness, for example, support 1, intake pipe 4 and outlet duct 5 are the stainless steel, and the leak rate between intake pipe 4 and support 1, between outlet duct 5 and the support 1 is all not higher than 10 -10 Pa.L/s. The outlet end of the air inlet pipe 4 and the inlet end of the air outlet pipe 5 are both positioned in the air storage bottle 3. In order to improve the stability of the air flow of the air outlet pipe 5, the outlet end of the air inlet pipe 4 is positioned at the bottom of the gas cylinder 3, and the inlet end of the air outlet pipe 5 is positioned at the mouth of the gas cylinder 3, as shown in fig. 1.
The inlet end of the air inlet pipe 4 and the outlet end of the air outlet pipe 5 are respectively connected with a carrier gas joint 7 in a sealing way. In order to ensure the tightness between the gas inlet pipe 4, the gas outlet pipe 5 and the carrier gas joint 7, the gas inlet pipe 4, the gas outlet pipe 5 and the carrier gas joint 7 are made of the same material, for example, stainless steel, the inlet end of the gas inlet pipe 4 and the outlet end of the gas outlet pipe 5 are respectively welded with the carrier gas joint 7, and the leakage rate is not higher than 10 -10 Pa.L/s. The carrier gas connector 7 may be selected from existing connectors, for example, the carrier gas connector 7 may be a VCR connector.
In order to protect the gas storage bottle 3, the outer side of the support 1 is also fixedly provided with an outer cover 9, and the gas storage bottle 3 and the compression nut 2 are both positioned in the outer cover 9. The housing 9 is preferably made of a metal material, such as stainless steel. The outer cover 9 can be provided with holes which can be used as windows for observing the gas storage cylinder 3 and can also be used as windows for assembling and disassembling the compression nut 2. Alternatively, the compression nut 2 can be removed by detaching the cover 9. For example, the outer cover 9 is an open cylinder, and strip-shaped observation ports are arranged around the cylinder, so that the content of the gas source in the gas storage cylinder 3 can be observed directly through the observation ports; the cylinder mouth of the cylinder is sleeved on the cylindrical outer side of the support 1 and is fixed on the support 1 through a plurality of screws.
In the embodiment shown in fig. 1, the support 1 has a pi-shaped cross section, one transverse side and two vertical sides of the pi are both straight, the two vertical sides are symmetrically arranged, two ends of the transverse side are respectively used for connecting the outer cover 9, a circular counter bore is arranged between the two vertical sides, the outer sides of the two vertical sides are provided with external threads, and the lower ends of the two vertical sides are the bottom surface of the support 1. In addition, the section of the support 1 can be n-shaped, the support 1 is cylindrical at the moment, the horizontal side and the two vertical sides of the n-shaped are flat and straight, the two vertical sides are arranged in axial symmetry, a round counter bore is formed between the two vertical sides, external threads are arranged on the outer sides of the two vertical sides, the lower ends of the two vertical sides are the bottom surfaces of the support 1, the outer cover 9 is directly installed on the outer sides of the two vertical sides, and the installation position of the outer cover 9 only needs to be beyond the stroke of the screw cap 2.
When the air source is replaced, firstly, the air pressure in the air storage bottle 3 is increased to the atmospheric pressure state, the outer cover 9 is detached, then the compression nut 2 is detached, and the air storage bottle 3, the sealing ring 6 and the gasket 8 are taken down from the support 1 together; then, injecting a solid or liquid gas source with required dosage into the gas storage bottle 3, sleeving the sealing ring 6, the gasket 8 and the compression nut 2 outside the gas storage bottle 3, placing the bottle mouth of the gas storage bottle 3 into the circular counter bore of the support 1, and screwing the compression nut 2; finally, the cover 9 is mounted outside the cradle 1.
Claims (5)
1. Vacuum coating air supply quick change device, its characterized in that: the gas storage cylinder comprises a support (1), a gland nut (2), a gas storage cylinder (3), a gas inlet pipe (4) and a gas outlet pipe (5), wherein the support (1) is cylindrical or comprises a cylindrical part, a circular counter bore is formed in the center of one bottom surface of the cylinder, the support (1) is pi-shaped or pi-shaped on a section passing through the center line of the cylinder, the lower openings of the pi-shaped and pi-shaped are the circular counter bores of the support (1), external threads are formed in the side surface, close to the circular counter bores, of the cylinder, and the gland nut (2) is provided with through holes consistent with the apertures of the circular counter bores and is in threaded connection with the external threads of the support (1);
the bottleneck of gas bomb (3) is uncovered form and is the ring shape, the external diameter of bottleneck and the diameter adaptation of circular counter bore, the perforation of gland nut (2) is run through in gas bomb (3), the bottleneck is located the circular counter bore of support (1) and fastens through gland nut (2), gas bomb (3) outer wall, still set up sealing washer (6) between the bottom surface of support (1) and gland nut (2), set up stereoplasm packing ring (8) between sealing washer (6) and gland nut (2), the internal diameter of packing ring (8) and the external diameter adaptation of gas bomb (3); an outer cover (9) is fixedly arranged on the outer side of the support (1), and the gas storage bottle (3) and the compression nut (2) are both positioned in the outer cover (9);
the bottom of the circular counter bore of the support (1) is provided with two through holes, an air inlet pipe (4) and an air outlet pipe (5) are respectively arranged in the two through holes, the outlet end of the air inlet pipe (4) is positioned at the bottom of the air storage bottle (3), the inlet end of the air outlet pipe (5) is positioned at the bottle mouth of the air storage bottle (3), the inlet end of the air inlet pipe (4) and the outlet end of the air outlet pipe (5) are respectively welded with a carrier gas connector (7), and the leakage rate is not higher than 10 - 10 Pa.L/s, the gas inlet pipe (4), the gas outlet pipe (5), the support (1) and the carrier gas joint (7) are made of metal materials and are made of the same material, the outer wall of the gas inlet pipe (4) is hermetically welded with the support (1), the outer wall of the gas outlet pipe (5) is hermetically welded with the support (1), and the leakage rates between the gas inlet pipe (4) and the support (1) and between the gas outlet pipe (5) and the support (1) are not higher than 10 -10 Pa·L/s。
2. The vacuum coating air source quick-change device as claimed in claim 1, characterized in that: the gasket (8) is made of copper.
3. The vacuum coating air source quick-change device as claimed in claim 1 or 2, characterized in that: the outer cover (9) is an open cylinder, an observation port is arranged around the cylinder, and the cylinder port of the cylinder is sleeved on the cylindrical outer side of the support (1) and is fixed on the support (1) through screws.
4. The vacuum coating air supply quick-change device of claim 3, characterized in that: the gas storage bottle (3) is made of quartz and is transparent.
5. The vacuum coating air source quick-change device as claimed in claim 1 or 2, characterized in that: the carrier gas joint (7) is a VCR joint, and the air inlet pipe (4), the air outlet pipe (5), the support (1) and the carrier gas joint (7) are all made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111042750.1A CN113739062B (en) | 2021-09-07 | 2021-09-07 | Vacuum coating air source quick-change device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111042750.1A CN113739062B (en) | 2021-09-07 | 2021-09-07 | Vacuum coating air source quick-change device |
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| Publication Number | Publication Date |
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| CN113739062A CN113739062A (en) | 2021-12-03 |
| CN113739062B true CN113739062B (en) | 2023-03-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111042750.1A Active CN113739062B (en) | 2021-09-07 | 2021-09-07 | Vacuum coating air source quick-change device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU6364080A (en) * | 1979-10-26 | 1981-04-30 | Ritter. R.A. | Gas enrichment system |
| CN206553515U (en) * | 2017-02-28 | 2017-10-13 | 信达生物制药(苏州)有限公司 | Integral type threeway lid for feed supplement bottle |
| CN211118747U (en) * | 2019-12-24 | 2020-07-28 | 常熟制药机械厂有限公司 | Connector of MO source steel cylinder side leakage device |
| CN111649223A (en) * | 2020-07-22 | 2020-09-11 | 嵊州市浙江工业大学创新研究院 | Composite hydrogen storage cylinder with plastic inner container |
| CN212298516U (en) * | 2020-04-01 | 2021-01-05 | 江苏国富氢能技术装备股份有限公司 | Full-composite fiber winding gas cylinder opening structure |
| CN214037817U (en) * | 2020-12-25 | 2021-08-24 | 北京科泰克科技有限责任公司 | Gas cylinder and sealing structure thereof |
-
2021
- 2021-09-07 CN CN202111042750.1A patent/CN113739062B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU6364080A (en) * | 1979-10-26 | 1981-04-30 | Ritter. R.A. | Gas enrichment system |
| CN206553515U (en) * | 2017-02-28 | 2017-10-13 | 信达生物制药(苏州)有限公司 | Integral type threeway lid for feed supplement bottle |
| CN211118747U (en) * | 2019-12-24 | 2020-07-28 | 常熟制药机械厂有限公司 | Connector of MO source steel cylinder side leakage device |
| CN212298516U (en) * | 2020-04-01 | 2021-01-05 | 江苏国富氢能技术装备股份有限公司 | Full-composite fiber winding gas cylinder opening structure |
| CN111649223A (en) * | 2020-07-22 | 2020-09-11 | 嵊州市浙江工业大学创新研究院 | Composite hydrogen storage cylinder with plastic inner container |
| CN214037817U (en) * | 2020-12-25 | 2021-08-24 | 北京科泰克科技有限责任公司 | Gas cylinder and sealing structure thereof |
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| CN113739062A (en) | 2021-12-03 |
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