CN213513220U

CN213513220U - Connecting mechanism for leakage detection of MOCVD (metal organic chemical vapor deposition) device conveying pipe

Info

Publication number: CN213513220U
Application number: CN202022199637.1U
Authority: CN
Inventors: 贾昆良
Original assignee: Jingjiang Xianfeng Semiconductor Technology Co ltd
Current assignee: Jiangsu Xianfeng Precision Technology Co ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2021-06-22
Anticipated expiration: 2030-09-30

Abstract

The utility model discloses a connecting mechanism for detecting leakage of a transport pipe of an MOCVD device, which comprises a lower fixed block which is arranged in a convex shape, wherein a boss of the lower fixed block is matched with a step hole of an upper fixed block; the inner surface of the upper fixing block is provided with a conical surface, and a sealing ring is arranged between the conical surface and the upper end surface of the lower fixing block; an annular sealing surface is formed between the upper end surface of the lower fixing block and the sealing ring; the upper fixing block and the lower fixing block are connected and fixed through a locking screw; and a sealing joint is arranged above the upper fixing block, the sealing joint and the upper fixing block are connected through a butt joint pipeline, and a nut is arranged outside the sealing joint. The advantages are simple structure, convenient use, repeated use and greatly reduced use cost; the installation is quick and convenient, the universality degree is high, the sealing effect is good, and the surface of the pipe cannot be damaged; the efficiency of leak source detection such as hole, crackle or clearance that exist to transporting pipe body, welding seam or junction has been improved greatly.

Description

Connecting mechanism for leakage detection of MOCVD (metal organic chemical vapor deposition) device conveying pipe

Technical Field

The utility model relates to a coupling mechanism's field especially relates to a coupling mechanism is used in leak hunting of MOCVD device transport pipe.

Background

The gas conveying pipes of the MOCVD equipment are stainless steel pipes; to prevent the storage effect, the tube was electropolished. The joints of the pipelines are connected in a hydrogen arc welding mode or a VCR (video cassette recorder) and Swagelok mode, positive pressure leak detection and Snaop liquid or He leak detection are carried out, and the condition that the reaction system has no leakage is one of the keys of MOCVD (metal organic chemical vapor deposition) equipment assembly. The flow is realized by mass flowmeters, electromagnetic valves, pneumatic valves and the like with different measuring ranges, quick response time and high precision. A filter is provided between the vacuum system and the reaction chamber to prevent oil or other particles from being sucked back into the reaction chamber. In order to rapidly change the reaction gas in the reaction chamber without causing a change in the pressure in the reaction chamber, "run" and "vent" pipes are provided. Because the source used for MOCVD growth is a flammable, explosive, and toxic substance, and multi-component, large-area, thin-layer, and ultra-thin-layer heterogeneous materials are grown. Therefore, on the design concept of the MOCVD system, the tightness of the system is generally considered, the flow and temperature control needs to be accurate, the composition conversion needs to be rapid, the system needs to be compact and the like. Because the surface of the stainless steel pipeline is smooth and thin-walled, and no fixed sealing device is provided, the detection efficiency of the leakage points such as defects, welding seams, holes, cracks or gaps existing at mechanical connection parts and the like is too low; therefore, a connection mechanism with better sealing performance needs to be designed.

Disclosure of Invention

The utility model aims at providing a connecting mechanism for detecting leakage of a transport pipe of an MOCVD device, which has simple structure, good stability, convenient use and good sealing performance; the technical problem is solved.

In order to realize the technical purpose, reach foretell technical requirement, the utility model discloses the technical scheme who adopts is: one end of the connecting mechanism is connected and fixed with the conveying pipe, and the other end of the connecting mechanism is connected and fixed with a leakage detector; the method is characterized in that: the lower fixing block is arranged in a convex shape, and a boss of the lower fixing block is matched with a step hole of the upper fixing block; the inner surface of the upper fixing block is provided with a conical surface, and a sealing ring is arranged between the conical surface and the upper end surface of the lower fixing block; an annular sealing surface is formed between the upper end surface of the lower fixing block and the sealing ring; the upper fixing block and the lower fixing block are connected and fixed through a locking screw; and a sealing joint is arranged above the upper fixing block, the sealing joint and the upper fixing block are connected through a butt joint pipeline, and a nut is arranged outside the sealing joint.

Preferably: the number of the locking screws is three, and the locking screws are respectively distributed at the arc angle positions of the upper fixing block and the lower fixing block.

Preferably: the inner diameter of the sealing ring is equal to the outer diameter of the conveying pipe.

Preferably: the butt joint pipeline and the upper fixing block are connected in a welding mode.

Preferably: the nut is a VCR surface sealing internal thread nut.

The utility model has the advantages that; the connecting mechanism for detecting the leakage of the transport pipe of the MOCVD device has a simple structure, is convenient to use and can be repeatedly used, so that the use cost is greatly reduced; the installation is quick and convenient, the universality degree is high, the sealing effect is good, and the surface of the pipe cannot be damaged; the efficiency of leak source detection such as hole, crackle or clearance that exist to transporting pipe body, welding seam or junction has been improved greatly.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of embodiment 1 of the present invention;

in the figure: 1. a connecting mechanism; 2. a transport pipe; 3. a leak detector; 11. a lower fixed block; 12. an upper fixed block; 13. a conical surface; 14. a seal ring; 15. locking screws; 16. sealing the joint; 17. butting pipelines; 18. and a nut.

Detailed Description

In order to make the object, technical solution and beneficial technical effects of the present invention clearer, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments;

in the accompanying fig. 1, 2: a connecting mechanism for detecting leakage of a transport pipe of an MOCVD device is characterized in that one end of a connecting mechanism 1 is fixedly connected with a transport pipe 2, and the other end of the connecting mechanism is fixedly connected with a leakage detector 3; the connecting mechanism 1 comprises a lower fixing block 11 which is arranged in a convex shape, and a boss of the lower fixing block 11 is matched with a step hole of the upper fixing block 12; a conical surface 13 is arranged on the inner surface of the upper fixing block 12, a sealing ring 14 is arranged between the conical surface 13 and the upper end surface of the lower fixing block 11, and an annular sealing surface is formed between the upper end surface of the lower fixing block 11 and the sealing ring 14; when the upper fixing block and the lower fixing block are locked, the conical surface obliquely extrudes the O-shaped ring to be in contact with the pipeline for sealing, and the sealing effect is good; the upper fixing block 12 and the lower fixing block 11 are connected and fixed through a locking screw 15; the connection is reliable and can be adjusted; a sealing joint 16 is arranged above the upper fixed block 12, the sealing joint 16 is connected with the upper fixed block 12 through a butt joint pipeline 17, and a nut 18 is arranged outside the sealing joint 16.

Specifically, three locking screws 15 are arranged and respectively distributed at the arc angle positions of the upper fixing block 12 and the lower fixing block 11; the locking force is uniform, the connection is reliable, and the sealing effect is good; the inner diameter of the sealing ring 14 is equal to the outer diameter of the conveying pipe 2; the degree of matching is high, and the sealing ring is matched with the conical surface, so that the sealing effect is greatly improved; the butt joint pipeline 17 and the upper fixing block 12 are connected in a welding mode; the product is firm and stable, and has long service life; the nut 18 is configured as a VCR face seal female threaded nut.

Example 1: when the leakage detection operation of the conveying pipe is carried out, one end of the annular conveying pipe is sealed by a plug, the other end of the annular conveying pipe is provided with a connecting mechanism, and the other end of the connecting mechanism is connected with a leakage detector through a nut; during installation, the conveying pipe penetrates through a through hole of the lower fixing block, a sealing ring is sleeved on the conveying pipe, the upper fixing block is matched with the lower fixing block, locking screws are sequentially installed, and the sealing ring is in contact sealing with the pipeline under the oblique extrusion action of the conical surface; then use stainless steel VCR face seal internal thread nut with coupling mechanism be connected to the leak hunting appearance, utilize evacuating device and vacuum gauge to reach certain atmospheric pressure after, can make lower fixed block and last fixed block laminating inseparabler, further adjust the locking screw again, fix and lock coupling mechanism on the transport pipe through adjusting stainless steel screw to reach the effect of detecting the leak source.

The foregoing examples are given for the purpose of illustrating the present invention in a clear and non-restrictive manner, and it will be apparent to those skilled in the art that variations and modifications of the present invention may be made in other variations and modifications based on the foregoing description, and it is not necessary or necessary to exhaustively enumerate all embodiments, and all such variations and modifications as are obvious and desirable in the art are within the scope of the present invention.

Claims

The connecting mechanism for detecting the leakage of the transport pipe of the MOCVD device is characterized in that one end of the connecting mechanism (1) is connected and fixed with the transport pipe (2), and the other end of the connecting mechanism is connected and fixed with a leakage detector (3); the method is characterized in that: the device comprises a lower fixing block (11) which is arranged in a convex shape, wherein a boss of the lower fixing block (11) is matched with a step hole of an upper fixing block (12); a conical surface (13) is arranged on the inner surface of the upper fixing block (12), a sealing ring (14) is arranged between the conical surface (13) and the upper end surface of the lower fixing block (11), and an annular sealing surface is formed between the upper end surface of the lower fixing block (11) and the sealing ring (14); the upper fixing block (12) and the lower fixing block (11) are connected and fixed through a locking screw (15); a sealing joint (16) is arranged above the upper fixing block (12), the sealing joint (16) is connected with the upper fixing block (12) through a butt joint pipeline (17), and a nut (18) is arranged outside the sealing joint (16).
2. The connecting mechanism for leak detection of the MOCVD equipment transport pipe according to claim 1, wherein: the number of the locking screws (15) is three, and the locking screws are respectively distributed at the arc angle positions of the upper fixing block (12) and the lower fixing block (11).
3. The connecting mechanism for leak detection of the MOCVD equipment transport pipe according to claim 1, wherein: the inner diameter of the sealing ring (14) is equal to the outer diameter of the conveying pipe (2).
4. The connecting mechanism for leak detection of the MOCVD equipment transport pipe according to claim 1, wherein: the butt joint pipeline (17) and the upper fixing block (12) are connected in a welding mode.
5. The connecting mechanism for leak detection of the MOCVD equipment transport pipe according to claim 1, wherein: the nut (18) is a VCR face seal internal thread nut.