CN113707533A - Short arc type discharge lamp - Google Patents
Short arc type discharge lamp Download PDFInfo
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- CN113707533A CN113707533A CN202110429216.XA CN202110429216A CN113707533A CN 113707533 A CN113707533 A CN 113707533A CN 202110429216 A CN202110429216 A CN 202110429216A CN 113707533 A CN113707533 A CN 113707533A
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- Prior art keywords
- lead bar
- peripheral surface
- discharge lamp
- cylindrical body
- short arc
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- Discharge Lamp (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The invention provides a short arc type discharge lamp which can quickly evaporate mercury during lighting and can quickly and stably light. The short arc type discharge lamp includes: a discharge vessel having a light emitting tube part and a pair of sealing tube parts continuously extending in opposite directions from the upper and lower ends of the light emitting tube part; a pair of electrodes disposed in the light emitting tube portion so as to face each other in the vertical direction; a pair of lead bars connected to the pair of electrodes, respectively, and extending in the sealing tube portion; and a glass-made cylindrical support body disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the sealing tube portion to support the lead bar, wherein the short arc discharge lamp is lit vertically with mercury sealed in a light emitting space of the discharge vessel, and a storage portion for storing mercury when the discharge lamp is in an extinguished state is provided between the lead bar connected to the electrode located below and the cylindrical support body supporting the lead bar, the storage portion being a void communicating with the light emitting space and provided along an axial direction of the lead bar.
Description
Technical Field
The present invention relates to a short arc type discharge lamp.
Background
For example, short arc discharge lamps (hereinafter also simply referred to as "lamps") are used as light sources in exposure apparatuses and various projectors used in manufacturing processes of semiconductor devices, liquid crystal display devices, and the like. The short arc discharge lamp is configured such that an anode and a cathode are disposed in a discharge vessel so as to face each other in the vertical direction, and a lead rod having the anode or the cathode at a tip thereof is supported by a support cylindrical body made of glass. Mercury is sealed in the discharge vessel as a light-emitting substance.
In such a lamp, mercury evaporated during lighting is condensed in an extinguished state and accumulated at the root of the lower electrode. Here, in the case of vertical lighting, mercury is accumulated on the electrode side located below, that is, on the supporting cylinder located below.
When the lamp starts to be lit, the lead bar is heated by heat conduction from the electrode that is electrically heated by arc discharge between the electrodes, and the support cylindrical body is heated by heat conduction from the lead bar. The mercury is heated and evaporated by heat conduction from the lead bar or the supporting cylinder.
In recent years, a lamp having a high emission intensity of emitted light has been required, and since the amount of mercury enclosed increases, it is not possible to evaporate the mercury accumulated on the surface of the supporting cylinder rapidly, and it is difficult to stably light up as soon as possible.
In order to solve such a problem, the following attempts have been made: a heat transfer plate in contact with the lead rod is disposed at the end of the cathode side in the light emitting space of the discharge vessel, and mercury is rapidly evaporated at the time of lighting (patent document 1).
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent application No. 2001-15070
Disclosure of Invention
Problems to be solved by the invention
However, in the technique of patent document 1, since the lead bar is passed through the heat transfer plate having the hole, the inner diameter of the hole of the heat transfer plate needs to be slightly larger than the outer diameter of the lead bar, and since a gap exists between the lead bar and the heat transfer plate, there is a problem that the heat of the lead bar is not transferred to the heat transfer plate well.
Further, for example, when it is intended to weld the lead bar and the heat conductive plate to solve this problem, there is a problem that the glass support cylinder is broken by heat at the time of welding.
Further, as the size of the cathode increases with an increase in the size and the life of the lamp, the heat transfer plate (the shadow of the cathode) is not reached by the light emitted from the arc, and thus the heating effect by the emission of the arc cannot be obtained, and the evaporation acceleration effect of mercury is small.
In view of the above problems, an object of the present invention is to provide a short arc discharge lamp capable of quickly evaporating mercury at the time of lighting and stably lighting at an early stage.
Means for solving the problems
The short arc type discharge lamp according to the present invention includes: a discharge vessel having a light emitting tube part and a pair of sealing tube parts continuously extending in opposite directions from upper and lower ends of the light emitting tube part;
a pair of electrodes disposed in the light-emitting tube portion so as to face each other in the vertical direction;
a pair of lead bars connected to the pair of electrodes, respectively, and extending in the sealed tube portion; and
a glass support cylinder disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the seal pipe portion to support the lead bar,
the short arc type discharge lamp is enclosed with mercury in a light emitting space of the discharge vessel and is lighted vertically, wherein,
a storage section for storing mercury when the discharge lamp is in an extinguished state is provided between the lead bar connected to the lower one of the electrodes and the support cylindrical body for supporting the lead bar,
the reservoir is a gap communicating with the light emitting space and provided along an axial direction of the lead bar.
According to this configuration, since the reservoir portion that stores mercury is provided adjacent to the lead bar when the discharge lamp is in an off state, mercury is directly heated by heat conduction from the lead bar. As a result, the short arc discharge lamp according to the present invention can quickly evaporate mercury at the time of lighting, and can stably light as soon as possible.
In the short arc type discharge lamp according to the present invention, the gap may be formed by a D-cut surface in which a part of an outer peripheral surface of the lead bar in a circumferential direction is cut into a flat shape and an inner peripheral surface of the support cylindrical body.
In the short arc type discharge lamp according to the present invention, the gap may be formed by a reduced diameter portion in which a part of an outer peripheral surface of the lead bar in an axial direction is reduced in diameter, and an inner peripheral surface of the support cylindrical body.
In the short arc type discharge lamp according to the present invention, the gap may be formed by a first groove extending in the axial direction provided on the outer peripheral surface of the lead bar and an inner peripheral surface of the support cylindrical body.
In the short arc type discharge lamp according to the present invention, the gap may be formed by a second groove extending in the axial direction of the lead bar provided in the inner peripheral surface of the support cylindrical body and an outer peripheral surface of the lead bar.
In the short arc type discharge lamp according to the present invention, the outer peripheral surface of the lead bar may be separated from the inner peripheral surface of the supporting cylindrical body over the entire circumference,
a gap forming member is disposed in a part of a circumferential direction between an outer circumferential surface of the lead bar and an inner circumferential surface of the support cylindrical body,
the gap is formed by a circumferential side surface of the gap-forming member, an outer circumferential surface of the lead bar, and an inner circumferential surface of the support cylindrical body.
Further, the short arc type discharge lamp of the present invention includes: a discharge vessel having a light emitting tube part and a pair of sealing tube parts continuously extending in opposite directions from upper and lower ends of the light emitting tube part;
a pair of electrodes disposed in the light-emitting tube portion so as to face each other in the vertical direction;
a pair of lead bars connected to the pair of electrodes, respectively, and extending in the sealed tube portion; and
a glass support cylinder disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the seal pipe portion to support the lead bar,
the short arc type discharge lamp is enclosed with mercury in a light emitting space of the discharge vessel and is lighted vertically, wherein,
a storage section for storing mercury when the discharge lamp is in an extinguished state is provided between the lead bar connected to the lower one of the electrodes and the support cylindrical body for supporting the lead bar,
the reservoir is a helical void communicating with the light emitting space.
According to this configuration, since the reservoir portion that stores mercury is provided adjacent to the lead bar when the discharge lamp is in an off state, mercury is directly heated by heat conduction from the lead bar. As a result, the short arc discharge lamp according to the present invention can quickly evaporate mercury at the time of lighting, and can stably light as soon as possible.
In the short arc type discharge lamp according to the present invention, the spiral gap may be formed by a spiral third groove formed in an outer peripheral surface of the lead bar and an inner peripheral surface of the supporting cylindrical body, or may be formed by a spiral fourth groove formed in an inner peripheral surface of the supporting cylindrical body and an outer peripheral surface of the lead bar.
In the short arc type discharge lamp according to the present invention, the outer peripheral surface of the lead bar may be separated from the inner peripheral surface of the supporting cylindrical body over the entire circumference,
a coil in which a linear member is wound in a spiral shape with a gap provided therebetween is disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the support cylindrical body,
the spiral gap is formed by a gap of the coil, an outer peripheral surface of the lead bar, and an inner peripheral surface of the support cylindrical body.
In the short arc type discharge lamp according to the present invention, a lower end portion of the storage portion may be located above a lower end surface of the lead bar.
Drawings
Fig. 1 is an explanatory diagram showing a structure of a short arc type discharge lamp according to a first embodiment.
Fig. 2 is an enlarged view of a region a of the short arc type discharge lamp shown in fig. 1.
Fig. 3 is a B-B sectional view of the short arc type discharge lamp shown in fig. 2.
Fig. 4 is a diagram showing a state of mercury storage in an extinguished state of the short arc discharge lamp.
Fig. 5 is a graph showing changes in lamp voltage from the start of lighting in example and the like.
Fig. 6 is a sectional view of a short arc type discharge lamp according to a second embodiment.
Fig. 7 is a sectional view of a short arc type discharge lamp according to a third embodiment.
Fig. 8 is a sectional view of a short arc type discharge lamp according to a fourth embodiment.
Fig. 9 is a sectional view of a short arc type discharge lamp according to a fifth embodiment.
Fig. 10 is a sectional view of a short arc type discharge lamp according to a sixth embodiment.
Fig. 11 is a sectional view of a short arc type discharge lamp according to a seventh embodiment.
Fig. 12 is a sectional view of a short arc type discharge lamp according to another embodiment.
Detailed Description
An embodiment of a short arc type discharge lamp according to the present invention will be described with reference to the drawings. The drawings described below are schematic drawings, and the dimensional ratio in the drawings does not necessarily coincide with the actual dimensional ratio, and the dimensional ratio does not necessarily coincide between the drawings.
Hereinafter, description will be given with reference to XYZ coordinate system as appropriate. In the present specification, when directions are indicated, positive and negative signs are given as "+ X direction" and "— X direction" when directions are distinguished. In addition, when directions are indicated without distinguishing between positive and negative directions, only the directions are described as "X directions". That is, in the present specification, when only "X direction" is described, both "+ X direction" and "— X direction" are included. The same applies to the Y direction and the Z direction. In the present embodiment, the horizontal plane is parallel to the XY plane, and the vertical direction is the-Z direction.
[ first embodiment ]
Fig. 1 is an explanatory diagram showing a structure of a short arc type discharge lamp according to a first embodiment. A short arc type discharge lamp 100 (hereinafter referred to as "lamp 100") includes a discharge vessel 1, an anode 2 and a cathode 3 which are arranged to face each other in the vertical direction, a first lead bar 4, a second lead bar 5, a first supporting cylindrical body 6, and a second supporting cylindrical body 7.
The lamp 100 is lighted vertically. The "vertical lighting" of the present invention includes lighting in a state where a pair of electrodes (the anode 2 and the cathode 3) are arranged to face each other in the vertical direction, and lighting in a state where a pair of electrodes are arranged to face each other in a direction inclined at an angle other than 90 ° with respect to the vertical direction. That is, the "vertical lighting" of the present invention is a concept other than lighting (horizontal lighting) in a state where the pair of electrodes are arranged completely opposite to each other in the horizontal direction, and includes lighting in a state where the pair of electrodes are arranged at different heights. The lamp 100 of the present embodiment is a large lamp used in an exposure apparatus or the like used in a manufacturing process of a semiconductor device, a liquid crystal display device, or the like, and has a rated power of, for example, 2kW to 35 kW.
The discharge vessel 1 includes a bulb 10, and a first sealing tube 11 and a second sealing tube 12 continuously extending in opposite directions from upper and lower ends of the bulb 10. The discharge vessel 1 is formed integrally from quartz glass, for example.
The light emitting tube portion 10 is formed by bulging the center of a glass tube. The luminous tube portion 10 is a region of the glass tube whose inner diameter increases toward the center from the lower end located in the-Z direction and the upper end located in the + Z direction, respectively. The general shape of the luminous tube portion 10 is a sphere or an ellipsoid.
The first sealing tube portion 11 is connected to the upper end of the light emitting tube portion 10 and extends upward (+ Z direction). The second sealing tube portion 12 is continuous with the lower end of the light emitting tube portion 10 and extends downward (-Z direction). That is, the discharge vessel 1 is configured such that the bulb part 10 is sandwiched between the first sealing tube part 11 and the second sealing tube part 12. The central axes of the first sealed tube portion 11 and the second sealed tube portion 12 overlap each other, and are indicated by an axis Z1 in fig. 1. The axis Z1 preferably passes through the center point of the light emitting tube portion 10.
The first sealed tube portion 11 has a narrowed portion 11a in which a portion in the Z direction is reduced in diameter. The inner diameter of the narrowed portion 11a is smaller than the inner diameter of the periphery thereof in the Z direction. The second sealing tube portion 12 has a narrowed portion 12a in which a portion in the Z direction is reduced in diameter. In the Z direction, the inner diameter of the narrowed portion 12a is smaller than the inner diameter of its surroundings.
A light emitting space S1 is formed inside the light emitting tube portion 10, the first sealing tube portion 11, and the second sealing tube portion 12. In addition to the light-emitting substance such as mercury, a start assist buffer gas such as argon or xenon is sealed in the light-emitting space S1.
Inside the light emitting tube portion 10, the anode 2 and the cathode 3 are disposed to face each other. The anode 2 is disposed on the upper side, and the cathode 3 is disposed on the lower side. In the present embodiment, the short arc type discharge lamp is a discharge lamp in which the anode 2 and the cathode 3 are arranged to face each other with an interval (a value at room temperature at which thermal expansion is not performed) of 40mm or less.
The first lead bar 4 is connected to the anode 2 and extends in the Z direction inside the first sealed tube portion 11. The anode 2 is fixed to a front end 4a of the first lead bar 4. In addition, the second lead bar 5 is connected to the cathode 3 and extends in the Z direction inside the second sealed tube portion 12. The cathode 3 is fixed to a front end 5a of the second lead bar 5. It is preferable that the center axes of the first and second lead bars 4 and 5 overlap the axis Z1. The first lead bar 4 and the second lead bar 5 are made of a material containing a high melting point metal such as tungsten.
The base 91 covers the side of the first sealed vessel portion 11 distant from the anode 2 (+ Z direction side), and the base 92 covers the side of the second sealed vessel portion 12 distant from the cathode 3 (-Z direction side). In fig. 1, the base 92 is shown in a sectional view, and the base 91 is shown in a side view, but the base 91 and the first sealing tube portion 11 have the same structure as the base 92 and the second sealing tube portion 12. Therefore, the structure of the base 92 and the second sealing tube portion 12 will be mainly described below.
A second support cylindrical body 7 made of glass (for example, made of quartz glass) is disposed in the second sealing tube portion 12 at a position close to the light emitting tube portion 10. The second support cylinder 7 has a cylindrical hole whose inner diameter is slightly larger than the outer diameter of the second guide rod 5, and through which the second guide rod 5 is inserted. Further, a metal foil, for example, a molybdenum foil (not shown) for preventing rattling and welding is disposed between the second lead bar 5 and the second supporting cylindrical body 7. When the second lead bar 5 and the second supporting cylindrical body 7 are welded to each other, there is a possibility that the second supporting cylindrical body 7 is cracked and damaged due to a difference in thermal expansion coefficient between glass and tungsten, and therefore, a metal foil is provided to prevent this. The outer peripheral surface of the second support cylindrical body 7 is hermetically welded to the inner peripheral surface of the narrowed portion 12a of the second seal tube portion 12.
A sealing glass member 81 is disposed below the second support cylindrical body 7 in the second sealed tube portion 12. The sealing glass member 81 has a tapered portion 81a tapered toward the second supporting cylinder 7 and a body portion 81b connected to the tapered portion 81 a. The outer diameter of the cylindrical body portion 81b is slightly smaller than the inner diameter of the second seal tube portion 12. The sealing glass member 81 has a hole 81c extending in the + Z direction from the lower end of the body portion 81b, and an external lead bar 82 is inserted into the hole 81 c. The base 92 is electrically connected to the outer lead bar 82.
On the outer peripheral surface of the sealing glass member 81, a plurality of band-shaped metal foils 83 made of molybdenum are arranged so as to be separated from each other in the circumferential direction of the sealing glass member 81 and extend from the upper end to the lower end of the sealing glass member 81, the upper end portions of the metal foils 83 extend along the upper end surface of the sealing glass member 81 and are connected to the second lead bar 5, and the lower end portions of the metal foils 83 extend along the lower end surface of the sealing glass member 81 and are connected to the external lead bar 82. The outer peripheral surface of the sealing glass member 81 is hermetically welded to the inner peripheral surface of the second sealing tube portion 12 via a metal foil 83.
A glass outer lead bar cylindrical body 84 having a cylindrical hole corresponding to the outer diameter of the outer lead bar 82 is disposed on the lower end side of the sealing glass member 81 in a state where the outer lead bar 82 is inserted, and the outer peripheral surface of the outer lead bar cylindrical body 84 is hermetically welded to the inner peripheral surface of the second sealing tube portion 12.
A reservoir S2 for storing mercury when the lamp 100 is in an off state is provided between the second lead bar 5 and the second support cylindrical body 7 for supporting the second lead bar 5. The storage portion S2 is a gap that communicates with the light emitting space S1 and is provided along the axial direction of the second lead bar 5. The volume of the storage section S2 is determined by the amount of mercury sealed in the light emitting space S1.
Fig. 2 is an enlarged view of a region a of the lamp 100 shown in fig. 1. Fig. 3 is a B-B cross-sectional view of the lamp 100 shown in fig. 2. The bank S2 of the present embodiment is a gap formed by the D-cut surface 51 in which a part of the outer peripheral surface 5b of the second guide rod 5 in the circumferential direction is cut into a flat shape, and the inner peripheral surface 7a of the second supporting cylindrical body 7. The D-cut surface 51 is formed in two, and the two D-cut surfaces 51 are arranged so as to face each other across the center axis of the second lead bar 5. However, the number and arrangement of the D-cut surfaces 51 are not particularly limited, and for example, only one D-cut surface 51 may be provided, or three D-cut surfaces 51 may be arranged at equal intervals in the circumferential direction of the second lead bar 5.
The distance 5r from the outer peripheral surface 5b of the second lead bar 5 to the D-cut surface 51 is, for example, 0.5 to 2 mm. The distance 5R is 4-40% of the radius 5R of the second lead bar 5.
The D-cut surface 51 is provided at an axial center portion of the second lead bar 5. The D-cut surface 51 is provided so as to straddle the upper end surface 7b of the second supporting cylindrical body 7. The distance 5z from the upper end surface 7b to the lower end portion of the D-cut surface 51 is set as appropriate in accordance with the amount of mercury sealed in the light emitting space S1. The distance 5z is, for example, 5 to 20 mm.
The D-cut surface 51 is provided at the axial center portion of the second lead bar 5 and does not reach the lower end surface 5c of the second lead bar 5. That is, the lower end of the storage portion S2 is located above the lower end surface 5c of the second guide bar 5. This prevents the mercury from contacting the lower end surface 5c of the second lead bar 5.
Next, the operation of the lamp 100 will be described based on the drawings.
Fig. 4 is a diagram showing a state of mercury storage in an extinguished state of the lamp 100. In the off state of the lamp 100, as shown in fig. 4, mercury H is condensed and stored below the lower electrode (cathode 3 in the present embodiment) of the pair of electrodes (anode 2 and cathode 3) and above the upper end surface 7b of the second cylindrical support body 7. In the lamp 100 of the present embodiment, mercury H is also stored in the storage portion S2.
When the lighting of the lamp 100 starts, the cathode 3 is heated by the arc discharge between the electrodes. The second lead bar 5 is heated by heat conduction from the heated cathode 3. At this time, in the lamp 100 of the present embodiment, the reservoir portion S2 is provided, and in the reservoir portion S2, the second lead bar 5 is in contact with the mercury H, so the contact area between the second lead bar 5 and the mercury becomes larger than that of a lamp in which the reservoir portion S2 is not provided.
The lamp 100 is stably lighted by the lamp voltage rising sharply with the evaporation of the mercury H and finally reaching the rated voltage. According to the lamp 100 of the present embodiment, since the mercury H is directly heated by heat conduction from the second lead bar 5, the mercury H accumulated on the upper end surface 7b of the second cylindrical support body 7 rapidly evaporates, thereby reaching the rated voltage as soon as possible. As a result, the lamp 100 can be stably lit at an early stage.
[ examples ] A method for producing a compound
Hereinafter, examples and the like which specifically show the configuration and effects of the present invention will be described. The following specification of a short arc type discharge lamp was produced as an example.
[ discharge vessel ]
Quartz glass with total length of 175mm
Luminous tube portion: the maximum outer diameter is 140mm, and the maximum inner diameter is 127mm
Sealing the tube part: outer diameter of 35mm
[ Anode ]
The material is tungsten, the outer diameter is 35mm, and the total length is 65mm
[ cathode ]
Material (thoriated tungsten), outer diameter (25 mm), and total length (40 mm)
[ Anode side lead bar ]
The material is tungsten, and the outer diameter is 8mm
[ cathode side lead bar ]
The material is tungsten, and the outer diameter is 10mm
[ Cylinder for anode side support ]
Quartz glass, 29mm overall length and 27mm outer diameter
[ barrel for cathode side support ]
Quartz glass, 26mm overall length and 25mm external diameter
[ storage section ]
A part of the cathode side lead bar having an outer diameter of 10mm was subjected to double-sided D-cut processing (such planar processing that the formed planes were opposed to each other). The distance from the outer peripheral surface of the cathode lead bar to the D-cut surface was 2mm, and the capacity of the reservoir was 425mm3。
[ luminescent Material ]
The mercury content is 32g
[ buffer gas ]
Xenon: the sealing pressure is one atmosphere
[ between electrodes ]
The spacing distance between the anode front end and the cathode front end is 17mm
[ Electrical characteristics ]
Rated power 16kW, rated voltage 134V and rated current 119A
A lamp without a storage portion in the short arc discharge lamp was used as a comparative example. For example, the change in lamp voltage from the start of lighting was measured. The measurement results are shown in fig. 5. The voltage is represented by 100% as a voltage at the time of steady lighting. The voltage rises as the vapor pressure of mercury in the light-emitting space rises. That is, the voltage has a correlation with the vapor pressure of mercury in the light emitting space.
As shown in fig. 5, the voltage reached 100% in the comparative example for about 14 minutes, and 100% in the example for about 12 minutes. As a result, the lamp of the present invention has a faster voltage rise and a faster transition to stable operation than the conventional lamp. That is, the lamp of the present invention has a shorter time until the lamp shifts to a stable operation and can emit light than the conventional lamp.
[ second embodiment ]
In the lamp 100 of the second embodiment shown in fig. 6, the bank portion S2 is a gap formed by the reduced diameter portion 52 in which a part of the outer peripheral surface 5b of the second lead bar 5 in the axial direction is reduced in diameter and the inner peripheral surface 7a of the second supporting cylindrical body 7. The reduced diameter portion 52 is provided at an axial center portion of the second lead bar 5. The sectional view shown in fig. 6 corresponds to the sectional view B-B of the lamp 100 shown in fig. 2, similarly to fig. 3. The same applies to fig. 7 to 9 described later.
[ third embodiment ]
In the lamp 100 of the third embodiment shown in fig. 7, the storage portion S2 is a gap formed by the first groove 53 extending in the axial direction provided on the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7. In this example, six first grooves 53 are formed at equal intervals in the circumferential direction on the outer peripheral surface 5b of the second lead bar 5. The first groove 53 is provided in the axial center portion of the second lead bar 5.
[ fourth embodiment ]
In the lamp 100 of the fourth embodiment shown in fig. 8, the storage portion S2 is a gap formed by the second groove 71 provided in the inner peripheral surface 7a of the second supporting cylindrical body 7 and extending in the axial direction of the second lead bar 5, and the outer peripheral surface 5b of the second lead bar 5. In this example, two second grooves 71 are formed at equal intervals in the circumferential direction on the inner circumferential surface 7a of the second supporting cylindrical body 7. The second groove 71 may be provided so as to reach the lower end surface of the second supporting cylindrical member 7. The second groove 71 may be a groove continuously formed in the circumferential direction on the inner circumferential surface 7a of the second supporting cylindrical body 7.
[ fifth embodiment ]
In a lamp 100 of a fifth embodiment shown in fig. 9, an outer peripheral surface 5b of the second lead bar 5 is separated from an inner peripheral surface 7a of the second supporting cylindrical body 7 over the entire circumference, and a gap-forming member 57 is disposed in a part in the circumferential direction between the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7. The gap forming member 57 is a member having an arc-shaped cross section, and abuts against a part of the outer peripheral surface 5b of the second guide rod 5 in the circumferential direction and a part of the inner peripheral surface 7a of the second supporting cylindrical body 7 in the circumferential direction. The thickness of the gap-forming member 57 is, for example, 0.2mm to 2 mm. Thus, the storage portion S2 is a gap formed by the circumferential side surface 57a of the gap-forming member 57, the outer circumferential surface 5b of the second lead bar 5 that is not in contact with the gap-forming member 57, and the inner circumferential surface 7a of the second supporting cylindrical body 7 that is not in contact with the gap-forming member 57.
[ sixth embodiment ]
The storage portion S2 may be a spiral gap provided between the second lead bar 5 and the second supporting cylindrical body 7 and communicating with the light emitting space S1. In the lamp 100 of the sixth embodiment shown in fig. 10, the reservoir S2 is a spiral gap formed by the spiral third groove 54 formed in the outer peripheral surface 5b of the second guide rod 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7. By forming the reservoir portion S2 with a spiral gap, the function of supporting the second lead bar 5 by the second supporting cylindrical body 7 can be ensured, and the contact area between the second lead bar 5 and mercury can be increased.
The storage portion S2 may be a spiral space formed by a spiral fourth groove (not shown) formed in the inner circumferential surface 7a of the second supporting cylindrical body 7 and the outer circumferential surface 5b of the second lead bar 5.
[ seventh embodiment ]
In a lamp 100 according to a seventh embodiment shown in fig. 11, an outer peripheral surface 5b of the second lead bar 5 is separated from an inner peripheral surface 7a of the second supporting cylindrical body 7 over the entire circumference, and a coil 58 is arranged between the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7. The coil 58 is formed by winding a linear member in a spiral shape with a gap therebetween, and is in contact with the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7. Thus, the reservoir portion S2 is a gap formed by the gap of the coil 58, the outer peripheral surface 5b of the second lead bar 5, and the inner peripheral surface 7a of the second supporting cylindrical body 7.
While the embodiments of the present invention have been described above with reference to the drawings, the specific configurations should not be construed as being limited to the embodiments. The scope of the present invention is defined not only by the description of the above embodiments but also by the scope of the claims, and includes all modifications within the meaning and scope equivalent to the scope of the claims.
The structure employed in each of the above embodiments can be applied to any other embodiment. The specific configuration of each part is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. Further, one or more of the structures, methods, and the like according to various modifications described below may be arbitrarily selected and applied to the structures, methods, and the like according to the above-described embodiments.
(1) In the lamp 100 shown in fig. 2, 10, and the like, the lower end portion of the storage portion S2 is located above the lower end surface 5c of the second lead bar 5, but the invention is not limited thereto. As in the lamp 100 shown in fig. 11, the lower end portion of the storage portion S2 may be located at the same height as the lower end surface 5c of the second lead bar 5. However, when the D-cut surface 51 or the first groove 53 is provided in the second lead bar 5, the D-cut surface 51 or the first groove 53 preferably does not reach the lower end surface 5c of the second lead bar 5, and the lower end portion of the storage portion S2 is preferably located above the lower end surface 5c of the second lead bar 5.
(2) In the lamp 100 according to the above embodiment, the anode 2 is disposed on the upper side and the cathode 3 is disposed on the lower side, but the present invention is not limited thereto. As shown in fig. 12, the cathode 3 may be disposed on the upper side and the anode 2 may be disposed on the lower side. In this case, the reservoir portion S2 is provided between the first lead bar 4 and the first supporting cylindrical body 6.
Description of the reference symbols
1: discharge vessel
2: anode
3: cathode electrode
4: first lead bar
5: second lead bar
5 b: outer peripheral surface of the second lead bar
5 c: lower end surface of the second lead bar
6: first supporting cylinder
7: second supporting cylinder
7 a: inner peripheral surface of the second supporting cylinder
7 b: upper end surface of the second supporting cylinder
10: luminous tube part
11: first sealed pipe part
12: second sealing pipe part
51: d cut surface
52: diameter reducing part
53: first groove
54: third groove
57: void-forming member
57 a: circumferential side surface of gap-forming member
58: coil
71: second groove
100: short arc type discharge lamp (lamp)
H: mercury
S1: luminous space
S2: storage section
Z1: a shaft.
Claims (10)
1. A short arc type discharge lamp is provided with:
a discharge vessel having a light emitting tube part and a pair of sealing tube parts continuously extending in opposite directions from upper and lower ends of the light emitting tube part;
a pair of electrodes disposed in the light-emitting tube portion so as to face each other in the vertical direction;
a pair of lead bars connected to the pair of electrodes, respectively, and extending in the sealed tube portion; and
a glass support cylinder disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the seal pipe portion to support the lead bar,
the short arc type discharge lamp is characterized in that mercury is sealed in a light emitting space of the discharge vessel and is vertically lighted,
a storage section for storing mercury when the discharge lamp is in an extinguished state is provided between the lead bar connected to the lower one of the electrodes and the support cylindrical body for supporting the lead bar,
the reservoir is a gap communicating with the light emitting space and provided along an axial direction of the lead bar.
2. The short arc type discharge lamp according to claim 1,
the gap is formed by a D-cut surface in which a part of the outer peripheral surface of the lead bar in the circumferential direction is cut into a flat shape, and an inner peripheral surface of the support cylindrical body.
3. The short arc type discharge lamp according to claim 1,
the gap is formed by a reduced diameter portion in which a part of the outer peripheral surface of the lead bar in the axial direction is reduced in diameter, and an inner peripheral surface of the support cylindrical body.
4. The short arc type discharge lamp according to claim 1,
the gap is formed by a first groove extending in the axial direction provided on the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylindrical body.
5. The short arc type discharge lamp according to claim 1,
the gap is formed by a second groove provided in an inner peripheral surface of the support cylindrical body and extending in an axial direction of the lead bar, and an outer peripheral surface of the lead bar.
6. The short arc type discharge lamp according to claim 1,
the outer peripheral surface of the lead bar is separated from the inner peripheral surface of the supporting cylindrical body over the entire circumference,
a gap forming member is disposed in a part of a circumferential direction between an outer circumferential surface of the lead bar and an inner circumferential surface of the support cylindrical body,
the gap is formed by a circumferential side surface of the gap-forming member, an outer circumferential surface of the lead bar, and an inner circumferential surface of the support cylindrical body.
7. A short arc type discharge lamp is provided with:
a discharge vessel having a light emitting tube part and a pair of sealing tube parts continuously extending in opposite directions from upper and lower ends of the light emitting tube part;
a pair of electrodes disposed in the light-emitting tube portion so as to face each other in the vertical direction;
a pair of lead bars connected to the pair of electrodes, respectively, and extending in the sealed tube portion; and
a glass support cylinder disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the seal pipe portion to support the lead bar,
the short arc type discharge lamp is characterized in that mercury is sealed in a light emitting space of the discharge vessel and is vertically lighted,
a storage section for storing mercury when the discharge lamp is in an extinguished state is provided between the lead bar connected to the lower one of the electrodes and the support cylindrical body for supporting the lead bar,
the reservoir is a helical void communicating with the light emitting space.
8. The short arc type discharge lamp according to claim 7,
the spiral gap is formed by a spiral third groove formed in an outer peripheral surface of the lead bar and an inner peripheral surface of the support cylindrical body, or formed by a spiral fourth groove formed in an inner peripheral surface of the support cylindrical body and an outer peripheral surface of the lead bar.
9. The short arc type discharge lamp according to claim 7,
the outer peripheral surface of the lead bar is separated from the inner peripheral surface of the supporting cylindrical body over the entire circumference,
a coil in which a linear member is wound in a spiral shape with a gap provided therebetween is disposed between an outer peripheral surface of the lead bar and an inner peripheral surface of the support cylindrical body,
the spiral gap is formed by a gap of the coil, an outer peripheral surface of the lead bar, and an inner peripheral surface of the support cylindrical body.
10. The short arc type discharge lamp according to any one of claims 1 to 9,
the lower end portion of the storage portion is located above the lower end surface of the lead bar.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020089545A JP7505263B2 (en) | 2020-05-22 | 2020-05-22 | Short arc discharge lamp |
| JP2020-089545 | 2020-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113707533A true CN113707533A (en) | 2021-11-26 |
Family
ID=78647996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110429216.XA Pending CN113707533A (en) | 2020-05-22 | 2021-04-21 | Short arc type discharge lamp |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7505263B2 (en) |
| KR (1) | KR20210144571A (en) |
| CN (1) | CN113707533A (en) |
| TW (1) | TW202213437A (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3039626B2 (en) * | 1997-03-21 | 2000-05-08 | スタンレー電気株式会社 | Metal halide lamp and method of manufacturing the same |
| JP2001015070A (en) * | 1999-06-29 | 2001-01-19 | Ushio Inc | Discharge lamp |
| JP4670597B2 (en) * | 2005-11-04 | 2011-04-13 | ウシオ電機株式会社 | Short arc type mercury lamp |
| JP4929961B2 (en) * | 2006-10-06 | 2012-05-09 | ウシオ電機株式会社 | High pressure mercury lamp |
| JP5315951B2 (en) * | 2008-11-25 | 2013-10-16 | ウシオ電機株式会社 | Super high pressure discharge lamp |
-
2020
- 2020-05-22 JP JP2020089545A patent/JP7505263B2/en active Active
-
2021
- 2021-02-24 TW TW110106416A patent/TW202213437A/en unknown
- 2021-04-16 KR KR1020210049790A patent/KR20210144571A/en unknown
- 2021-04-21 CN CN202110429216.XA patent/CN113707533A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP7505263B2 (en) | 2024-06-25 |
| JP2021184351A (en) | 2021-12-02 |
| KR20210144571A (en) | 2021-11-30 |
| TW202213437A (en) | 2022-04-01 |
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