TW202213437A - Short arc type discharge lamp - Google Patents

Abstract

The invention provides a short arc type discharge lamp, which enables mercury to evaporate rapidly when the lamp is turned on and can be turned on stably as soon as possible. The short arc type discharge lamp comprises a discharge container which is provided with a light-emitting tube part and a pair of sealing tube parts which continuously extend in opposite directions from the upper end and the lower end of the light-emitting tube part; a pair of electrodes arranged opposite to each other up and down inside the light-emitting tube part; a pair of lead bars connected to the pair of electrodes, respectively, and extending inside the sealed tube portion; and a glass support cylinder disposed between the outer peripheral surface of the lead bar and the inner peripheral surface of the sealed tube portion so as to support the lead bar. The short arc type discharge lamp is sealed with mercury in a light-emitting space of a discharge container and is vertically lightened, and a storage part for storing mercury when the discharge lamp is in an off state is arranged between a lead rod connected with an electrode positioned below and a supporting cylinder for supporting the lead rod. The storage part is a gap which is communicated with the light-emitting space and is arranged along the axial direction of the lead rod.

Description

Short arc discharge lamp

The present invention relates to short arc discharge lamps.

For example, in exposure apparatuses and various projectors used in manufacturing processes of semiconductor elements, liquid crystal display elements, and the like, short-arc discharge lamps (hereinafter also simply referred to as "lamp tubes") are used as light sources. In this short arc discharge lamp, the anode and the cathode are arranged to face each other up and down in the discharge vessel, and the lead rod having the anode or the cathode at the front end is supported by a glass supporting cylinder. Moreover, in this discharge vessel, mercury was enclosed as a light-emitting substance.

In such a lamp system, the mercury evaporated when the lamp is turned on is aggregated in the light-off state and remains at the root of the electrode below. Here, at the time of vertical lighting, mercury accumulates on the electrode side located below, that is, on the supporting cylinder below.

Then, when the lighting of the lamp tube is started, the lead rod is heated by the heat conduction from the electrodes heated by the arc discharge between the electrodes, and the support cylinder is heated by the heat conduction from the lead rod. Mercury is heated and evaporated by heat conduction from the wire rod and the support cylinder.

In recent years, lamps with high luminous intensity of radiated light are required, and the amount of enclosed mercury increases with this situation. Therefore, the mercury accumulated on the surface of the supporting cylinder cannot be evaporated quickly, and it is gradually difficult to stabilize the point at an early stage. light.

In order to solve such a problem, an attempt has been made to rapidly evaporate mercury during lighting by arranging a thermally conductive plate in contact with a lead bar at the cathode side end of the light emitting space of the discharge vessel (Patent Document 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-15070

[The problem to be solved by the invention]

However, in the technique of Patent Document 1, since the wire rod is passed through a heat conduction plate having holes, the inner diameter of the hole in the heat conduction plate needs to be slightly larger than the outer diameter of the wire rod. If there is a gap, there is a problem that the heat of the wire rod cannot be successfully conducted to the heat transfer plate.

In addition, in order to solve this problem, for example, when the wire rod and the thermally conductive plate are to be welded, problems such as cracking of the support cylinder made of glass occur due to the heat at the time of welding.

In addition, with the increase in size and life of the lamp, the size of the cathode also increases, and the radiation from the arc cannot reach the heat conduction plate (the cathode of the cathode), and the heating effect caused by the radiation of the arc cannot be obtained. There is a problem that the effect of promoting the evaporation of mercury is small.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a short-arc discharge lamp which can be ignited stably at an early stage by evaporating mercury rapidly at the time of lighting. [means to solve the problem]

The short arc discharge lamp of the present invention is provided with: The discharge vessel is provided with a light-emitting tube portion and a pair of sealed tube portions extending continuously from the upper and lower ends of the light-emitting tube portion in opposite directions respectively; A pair of electrodes are arranged in the interior of the light-emitting tube part facing up and down; a pair of wire rods, respectively connected to the pair of electrodes, extending inside the sealed tube portion; and A supporting cylinder made of glass is arranged so as to support the wire rod between the outer peripheral surface of the wire rod and the inner peripheral surface of the sealed tube portion; In addition, mercury is enclosed in the light-emitting space of the discharge vessel, and the short-arc discharge lamp is vertically lit, wherein, Between the lead rod connected to the lower electrode among the electrodes, and the support cylinder for supporting the lead rod, a storage part for storing mercury when the discharge lamp is turned off is provided; the storage part is connected to the The light-emitting space communicates with a gap provided along the axial direction of the wire rod.

According to this structure, when the discharge lamp is in the light-off state, the storage portion for storing the mercury is provided so as to be adjacent to the wire rod, so that the mercury is directly heated by heat conduction from the wire rod. As a result, the short-arc discharge lamp system of the present invention can rapidly evaporate mercury at the time of lighting, thereby enabling stable lighting at an early stage.

In the short-arc discharge lamp of the present invention, the gap is a structure formed by a D-cut surface that is notched planarly in a part of the circumferential direction of the outer circumferential surface of the wire rod, and the inner circumferential surface of the supporting cylindrical body. You can also.

In the short-arc discharge lamp of the present invention, as the gap, a diameter-reduced portion in which a portion of the outer peripheral surface of the wire rod is reduced in diameter in the central axis direction may be configured with the inner peripheral surface of the support cylinder.

In the short-arc discharge lamp of the present invention, as the gap, the first groove extending in the axial direction provided on the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder are also structured. Can.

In the short-arc discharge lamp of the present invention, as the gap, a second groove extending in the axial direction of the wire rod provided on the inner peripheral surface of the support cylinder and the outer peripheral surface of the wire rod. The structure of composition is also possible.

In the short-arc discharge lamp of the present invention, the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder are separated over the entire circumference; A space forming member is arranged in a part of the circumferential direction between the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder; The void may be a structure constituted by the circumferential side surface of the void forming member, the outer peripheral surface of the wire rod, and the inner peripheral surface of the supporting cylinder.

Furthermore, the short arc discharge lamp of the present invention is provided with: The discharge vessel is provided with a light-emitting tube portion and a pair of sealed tube portions extending continuously from the upper and lower ends of the light-emitting tube portion in opposite directions respectively; A pair of electrodes are arranged in the interior of the light-emitting tube part facing up and down; a pair of wire rods, respectively connected to the pair of electrodes, extending inside the sealed tube portion; and A supporting cylinder made of glass is arranged so as to support the wire rod between the outer peripheral surface of the wire rod and the inner peripheral surface of the sealed tube portion; In addition, mercury is enclosed in the light-emitting space of the discharge vessel, and the short-arc discharge lamp is vertically lit, wherein, A storage portion for storing mercury when the discharge lamp is turned off is provided between the lead rod connected to the lower electrode among the electrodes and the support cylinder that supports the lead rod; The said storage part is a helical void which communicates with the said light-emitting space.

According to this structure, when the discharge lamp is in the light-off state, the storage portion for storing the mercury is provided so as to be adjacent to the wire rod, so that the mercury is directly heated by heat conduction from the wire rod. As a result, the short-arc discharge lamp system of the present invention can rapidly evaporate mercury at the time of lighting, thereby enabling stable lighting at an early stage.

In the short arc discharge lamp of the present invention, as the helical space, a helical third groove formed on the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder, or The helical fourth groove formed on the inner peripheral surface of the support cylinder may have a structure formed with the outer peripheral surface of the wire rod.

In the short-arc discharge lamp of the present invention, the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder are separated over the entire circumference; Between the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder, a coil that is wound in a spiral shape with a gap between the linear members is arranged; The helical gap may have a structure constituted by the gap between the coils, the outer peripheral surface of the wire rod, and the inner peripheral surface of the supporting cylinder.

In the short-arc discharge lamp of the present invention, the lower end portion of the storage portion may have a structure positioned above the lower end surface of the wire rod.

Embodiments of the short arc discharge lamp of the present invention will be described with reference to the drawings. In addition, each of the following drawings is a schematic illustration, and the size ratio on the drawing does not necessarily match the actual size ratio, and the size ratio between the drawings does not necessarily match.

Hereinafter, description will be made with reference to the XYZ coordinate system as appropriate. In addition, in this specification, when a positive and negative direction is distinguished when expressing a direction, it is described with a positive and negative sign, such as "+X direction" and "-X direction". In addition, when the direction is expressed without distinguishing between positive and negative directions, it is only described as "X direction". That is, in this specification, when describing only the "X direction", both "+X direction" and "-X direction" are included. The same applies to the Y direction and the Z direction. In this embodiment, the horizontal plane is parallel to the XY plane, and the vertical direction is the -Z direction.

[1st Embodiment] FIG. 1 is an explanatory view showing the structure of the short arc discharge lamp of the first embodiment. A short-arc discharge lamp 100 (hereinafter referred to as "lamp 100") includes a discharge vessel 1, an anode 2 and a cathode 3 arranged to face up and down, a first lead bar 4, a second lead bar 5, and a first support tube Body 6, second supporting cylinder 7.

The lamp tube 100 is vertically lit. The "vertical lighting" of the present invention includes, in addition to the lighting in a state in which a pair of electrodes (anode 2 and cathode 3) are opposed to the vertical direction, and also includes a pair of electrodes opposed to the vertical direction by 90° Lighting in the direction of tilt at an angle other than °. That is, the "vertical lighting" of the present invention removes the concept of lighting (horizontal lighting) in a state where a pair of electrodes are arranged to face each other in the horizontal direction, and includes a pair of electrodes arranged at different heights. Status lighting. Lamp 100 of the present embodiment is a large lamp used in exposure apparatuses and the like used in manufacturing processes of semiconductor elements, liquid crystal display elements, and the like, and has a rated power of, for example, 2kW to 35kW.

The discharge vessel 1 is composed of an arc tube portion 10 and a first sealed tube portion 11 and a second sealed tube portion 12 that extend continuously from the upper and lower ends of the arc tube portion 10 in opposite directions, respectively. The discharge vessel 1 is integrally formed of, for example, quartz glass.

The arc tube portion 10 is formed by expanding the center of the glass tube. The arc tube portion 10 is a region of a glass tube whose inner diameter increases from the lower end in the −Z direction and the upper end in the +Z direction toward the center, respectively. The general shape of the arc tube portion 10 is a sphere or an ellipsoid.

The first sealed tube portion 11 is connected to the upper end of the arc tube portion 10 and extends upward (+Z direction). In addition, the second sealed tube portion 12 is connected to the lower end of the arc tube portion 10 and extends downward (-Z direction). That is, the discharge vessel 1 is configured such that the arc tube portion 10 is sandwiched between the first sealed tube portion 11 and the second sealed tube portion 12 . The central axis systems each of the first sealed pipe portion 11 and the second sealed pipe portion 12 have overlapped with each other, and are indicated by the axis Z1 in FIG. 1 . In addition, it is preferable that the axis Z1 passes through the center point of the arc tube portion 10 .

The 1st sealing pipe part 11 has the constriction part 11a which reduces a part of diameter in the Z direction. The narrowed portion 11a is in the Z direction, and its inner diameter is smaller than its surroundings. Moreover, the 2nd sealing pipe part 12 has the constriction part 12a which reduces a part of diameter in the Z direction. The narrowed portion 12a is in the Z direction, and its inner diameter is smaller than that of its surroundings.

A light-emitting space S1 is formed inside the light-emitting tube portion 10 , the first sealed tube portion 11 , and the second sealed tube portion 12 . In the light-emitting space S1 , in addition to a light-emitting substance such as mercury, a buffer gas for assisting activation such as argon or xenon is enclosed.

Inside the arc tube portion 10 , the anode 2 and the cathode 3 are arranged to face each other. The anode 2 is arranged on the upper side, and the cathode 3 is arranged on the lower side. In the present embodiment, the short-arc discharge lamp is a discharge lamp in which the anode 2 and the cathode 3 are arranged to face each other with a distance of 40 mm or less (value at room temperature without thermal expansion).

The first lead bar 4 is connected to the anode 2 and extends in the Z direction inside the first sealed tube portion 11 . The anode 2 is fixed to the front end 4 a of the first lead bar 4 . In addition, the second lead bar 5 is connected to the cathode 3 and extends in the Z direction in the second sealed tube portion 12 . The cathode 3 is fixed to the front end 5 a of the second lead bar 5 . Preferably, the central axes of the first wire rod 4 and the second wire rod 5 overlap the axis Z1. For the first wire rod 4 and the second wire rod 5, a high melting point metal, for example, a material containing tungsten is used.

The cover 91 covers the side (the +Z direction side) away from the anode 2 of the first sealed tube portion 11 , and the cover 92 covers the side (−Z direction side) away from the cathode 3 of the second sealed tube portion 12 . Furthermore, in FIG. 1 , the cover 92 is shown in a cross-sectional view, and the cover 91 is shown in a side view. However, the structure of the cover 91 and the first sealing tube portion 11 has the structure of the cover 92 and the second seal. The tube portion 12 has the same construction. Therefore, below, the structure of the shroud 92 and the 2nd sealing pipe part 12 is mainly demonstrated.

In the second sealed tube portion 12 , the second supporting cylinder 7 made of glass (for example, made of quartz glass) is arranged at a position close to the arc tube portion 10 . The second supporting cylindrical body 7 has a cylindrical hole with an inner diameter slightly larger than the outer diameter of the second wire rod 5 , and the second wire rod 5 is inserted therethrough. Furthermore, between the second wire rod 5 and the second supporting cylindrical body 7, a metal foil such as molybdenum foil (not shown) for preventing falling off and preventing welding is arranged. If the second wire rod 5 and the second supporting cylinder 7 are welded, the second supporting cylinder 7 may be cracked and damaged depending on the difference in thermal expansion coefficient between glass and tungsten. Set metal foil. In addition, the outer peripheral surface of the second supporting cylindrical body 7 is airtightly welded to the inner peripheral surface of the constricted portion 12 a of the second sealing pipe portion 12 .

A sealing glass member 81 is arranged below the second supporting cylindrical body 7 in the second sealing tube portion 12 . The sealing glass member 81 has a tapered portion 81a tapered toward the front end of the second supporting cylindrical body 7, and a body portion 81b connected to the tapered portion 81a. The outer diameter of the cylindrical body portion 81 b is slightly smaller than the inner diameter of the second sealing tube portion 12 . Moreover, the glass member 81 for sealing has the hole 81c extended in the +Z direction from the lower end of the body part 81b, and the external lead rod 82 is inserted in the hole 81c. The cover 92 is electrically connected to the outer wire rod 82 .

On the outer peripheral surface of the sealing glass member 81, a plurality of strip-shaped metal foils 83 made of molybdenum are arranged so as to be spaced apart from each other in the circumferential direction of the sealing glass member 81 and extending from the upper end toward the lower end of the sealing glass member 81. Each upper end portion of the metal foil 83 extends along the upper end surface of the sealing glass member 81 and is connected to the second wire rod 5, and each lower end portion of the metal foil 83 extends along the lower end surface of the sealing glass member 81 and is connected to on the outer wire rod 82. In addition, the outer peripheral surface of the glass member 81 for sealing is airtightly welded to the inner peripheral surface of the second sealing tube portion 12 via the metal foil 83 .

On the lower end side of the sealing glass member 81, a glass-made external lead rod cylinder 84 having a cylindrical hole corresponding to the outer diameter of the external lead rod 82 is disposed in a state in which the external lead rod 82 is inserted. The outer peripheral surface of the cylindrical body 84 is airtightly welded to the inner peripheral surface of the second sealed pipe portion 12 .

Between the second wire rod 5 and the second supporting cylinder 7 that supports the second wire rod 5, a storage portion S2 that stores mercury when the lamp tube 100 is turned off is provided. The storage portion S2 communicates with the light-emitting space S1 and is a void provided along the axial direction of the second wire rod 5 . The volume of the storage part S2 is determined according to the amount of mercury enclosed in the light-emitting space S1.

FIG. 2 is an enlarged view of the area A of the lamp tube 100 shown in FIG. 1 . FIG. 3 is a B-B cross-sectional view of the lamp tube 100 shown in FIG. 2 . The storage portion S2 of the present embodiment is a space formed by a D-cut surface 51 notched planarly in a part of the circumferential direction of the outer peripheral surface 5b of the second wire rod 5 and the inner peripheral surface 7a of the second supporting cylinder 7 . Two D-cut surfaces 51 are formed, and the two D-cut surfaces 51 are arranged so that the central axes of the second wire rods 5 are opposed to each other. However, the number and arrangement of the D-cut surfaces 51 are not particularly limited. For example, only one D-cut surface 51 may be provided, or three D-cut surfaces 51 may be arranged at equal intervals in the circumferential direction of the second wire rod 5 . .

A distance 5r from the outer peripheral surface 5b of the second wire rod 5 to the D-cut surface 51 is, for example, 0.5 to 2 mm. In addition, the distance 5r is 4 to 40% of the radius 5R of the second wire rod 5 .

The D-cut surface 51 is provided at the center portion in the axial direction of the second wire rod 5 . Moreover, the D-cut surface 51 is provided so that it may straddle the upper end surface 7b of the cylindrical body 7 for 2nd support. The distance 5z from the upper end surface 7b to the lower end of the D-cut surface 51 is appropriately set according to the amount of mercury enclosed in the light-emitting space S1. The distance 5z is 5~20mm, for example.

The D-cut surface 51 is provided at the center portion in the axial direction of the second wire rod 5 , and does not reach the lower end face 5 c of the second wire rod 5 . That is, the lower end portion of the storage portion S2 is positioned above the lower end surface 5c of the second wire rod 5 . Thereby, the mercury does not come into contact with the lower end surface 5c of the second wire rod 5 .

Next, the operation of the bulb 100 will be described with reference to the drawings.

FIG. 4 is a view showing the state of mercury accumulation in the light-off state of the lamp tube 100 . In the light-off state of the lamp tube 100, as shown in FIG. 4, mercury H is aggregated and stored under the electrode (cathode 3 in this embodiment) located below the pair of electrodes (anode 2 and cathode 3), and the first 2 on the upper end surface 7b of the cylindrical body 7 for support. Furthermore, in the lamp tube 100 of the present embodiment, the mercury H is also stored in the storage part S2.

When the lighting of the lamp tube 100 is started, the cathode 3 is heated by arc discharge between the electrodes. Then, the second wire rod 5 is heated by heat conduction from the heated cathode 3 . At this time, in the lamp tube 100 of the present embodiment, the storage part S2 is provided, and in the storage part S2, the second lead rod 5 is in contact with the mercury H, so compared with the lamp tube without the storage part S2, the second lead wire The contact area of the rod 5 and the mercury becomes larger.

In the lamp 100, the lamp voltage rises abruptly due to the evaporation of mercury H, and the lamp is stably lit by finally reaching the rated voltage. According to the lamp tube 100 of the present embodiment, the mercury H is directly heated by the heat conduction from the second lead rod 5, so the mercury H accumulated on the upper end surface 7b of the second supporting cylinder 7 evaporates quickly and reaches the rated voltage at an early stage. As a result, the lamp tube 100 can be stably lit at an early stage. [Example]

Hereinafter, the Example etc. which show the structure and effect of this invention concretely are demonstrated. Short arc discharge lamps of the following specifications were produced as examples.

[Discharge vessel] Material = Quartz glass, Overall length = 175mm Emitting tube: Maximum outer diameter = 140mm, Maximum inner diameter = 127mm Sealing tube: Outer diameter = 35mm [Anode] Material = Tungsten, outer diameter = 35mm, Overall length 65mm [ Cathode] Material = tungsten thorium oxide, outer diameter = 25mm, overall length 40mm [Anode side lead rod] Material = tungsten, outer diameter = 8mm [Cathode side lead rod] Material = tungsten, outer diameter = 10mm [Anode side support cylinder ] Material = Quartz glass, Overall length = 29mm, Outer diameter = 27mm [Cathode side support cylinder] Material = Quartz glass, Overall length = 26mm, Outer diameter = 25mm Double-sided D-cut processing (plane processing in which the formed planes face each other). The distance from the outer peripheral surface of the cathode-side lead bar to the D-cut surface was set to 2 mm, and the capacity of the storage portion was set to 425 mm ³ . [Luminescent substance] Mercury content = 32g [Buffer gas] Xenon gas: sealing pressure = 1 air pressure [Between electrodes] The distance between the front end of the anode and the front end of the cathode = 17mm [Electrical characteristics] Rated power = 16kW, rated voltage = 134V, rated current =119A

In the short-arc discharge lamp described above, a lamp tube without a storage portion was used as a comparative example. For the examples and the like, the change in the lamp voltage from the start of lighting was measured. And the measurement results are disclosed in FIG. 5 . The voltage system expresses the voltage at the time of stable lighting as 100%. The voltage rises with the rise of the vapor pressure of the mercury in the light-emitting space. That is, the voltage is related to the vapor pressure of mercury in the light-emitting space.

As shown in FIG. 5 , the voltage reached 100% in about 14 minutes in the comparative example, and the voltage reached 100% in about 12 minutes in the example. Thereby, it can be seen that the lamp system of the present invention has a faster voltage rise and a faster transition to a stable operation than the conventional lamp. That is, in the lamp tube of the present invention, compared with the conventional lamp tube, the time until the stable operation becomes possible and irradiation becomes possible is relatively short.

[Second Embodiment] In the lamp tube 100 of the second embodiment shown in FIG. 6 , the storage portion S2 is a diameter-reduced portion 52 reduced in diameter by a portion of the outer peripheral surface 5b of the second wire rod 5 in the central axis direction, and the second supporting cylinder 7 is formed. The gap formed by the inner peripheral surface 7a. The diameter-reduced part 52 is provided in the axial direction center part of the 2nd wire rod 5. As shown in FIG. Furthermore, the sectional view shown in FIG. 6 is the same as that shown in FIG. 3 , and corresponds to the B-B sectional view of the lamp tube 100 shown in FIG. 2 . The same applies to FIGS. 7 to 9 to be described later.

[third embodiment] In the lamp tube 100 of the third embodiment shown in FIG. 7 , the storage portion S2 is provided with a first groove 53 extending in the axial direction provided on the outer peripheral surface 5b of the second wire rod 5, and a second supporting cylinder. The space formed by the inner peripheral surface 7a of the body 7. In this example, six first grooves 53 are formed on the outer peripheral surface 5b of the second wire rod 5 at equal intervals in the circumferential direction. The first groove 53 is provided in the axial center portion of the second wire rod 5 .

[4th Embodiment] In the lamp tube 100 of the fourth embodiment shown in FIG. 8 , the storage portion S2 is a second portion extending in the axial direction of the second wire rod 5 provided on the inner peripheral surface 7 a of the second supporting cylindrical body 7 . The groove 71 is a gap formed with the outer peripheral surface 5b of the second wire rod 5 . In this example, two second grooves 71 are formed on the inner peripheral surface 7a of the second supporting cylinder 7 at equal intervals in the circumferential direction. The second groove 71 may be provided so as to reach the lower end surface of the second supporting cylindrical body 7 . In addition, the second groove 71 may be a groove formed continuously in the circumferential direction on the inner peripheral surface 7a of the second supporting cylindrical body 7 .

[Fifth Embodiment] In the lamp tube 100 of the fifth embodiment shown in FIG. 9, the outer peripheral surface 5b of the second wire rod 5 and the inner peripheral surface 7a of the second supporting cylinder 7 are spaced over the entire circumference, and the second wire rod In a part of the circumferential direction between the outer peripheral surface 5b of the 5 and the inner peripheral surface 7a of the second supporting cylindrical body 7, a space forming member 57 is arranged. The gap forming member 57 is a member having an arc-shaped cross section, and is in contact with a part of the outer peripheral surface 5b of the second wire rod 5 in the circumferential direction and a part of the inner peripheral surface 7a of the second supporting cylinder 7 in the circumferential direction. The thickness of the void-forming member 57 is, for example, 0.2 mm to 2 mm. Thereby, the storage portion S2 is composed of the circumferential side surface 57a of the gap-forming member 57, the outer peripheral surface 5b of the second wire rod 5 not in contact with the gap-forming member 57, and the second supporting cylinder 7 not in contact with the gap-forming member 57. A void formed by the inner peripheral surface 7a.

[Sixth Embodiment] The storage portion S2 may be provided as a helical gap that is provided between the second wire rod 5 and the second supporting cylindrical body 7 and communicates with the light-emitting space S1. In the lamp tube 100 of the sixth embodiment shown in FIG. 10 , the storage portion S2 is formed by the helical third groove 54 formed on the outer peripheral surface 5b of the second wire rod 5 and the second supporting cylinder 7 . The inner peripheral surface 7a constitutes a helical void. By forming the storage portion S2 with a helical gap, the contact area between the second lead bar 5 and the mercury can be increased while securing the support function of the second lead bar 5 by the second support cylinder 7 .

In addition, the storage portion S2 is a spiral-shaped fourth groove (not shown) formed on the inner peripheral surface 7a of the second supporting cylindrical body 7 and the outer peripheral surface 5b of the second wire rod 5 in a spiral shape. Gap is also available.

[Seventh Embodiment] In the lamp tube 100 of the seventh embodiment shown in FIG. 11, the outer peripheral surface 5b of the second wire rod 5 and the inner peripheral surface 7a of the second supporting cylinder 7 are spaced over the entire circumference, and the second wire rod Between the outer peripheral surface 5b of 5 and the inner peripheral surface 7a of the cylindrical body 7 for 2nd supports, the coil 58 is arrange|positioned. The coil 58 is formed by winding the linear member helically with a gap therebetween, and is in contact with the outer peripheral surface 5b of the second wire rod 5 and the inner peripheral surface 7a of the second supporting cylinder 7 . Thereby, the storage part S2 is a space|gap comprised by the clearance gap of the coil 58, the outer peripheral surface 5b of the 2nd wire rod 5, and the inner peripheral surface 7a of the cylindrical body 7 for 2nd supports.

As mentioned above, although embodiment of this invention was demonstrated based on drawing, a specific structure is not limited to those of these embodiment. The scope of the present invention is not only disclosed in the description of the above-mentioned embodiments but also disclosed by the scope of the patent application, and also includes all modifications within the meaning and scope equivalent to the scope of the patent application.

The structure adopted in each of the above-described embodiments can be adopted in other arbitrary embodiments. The specific structure of each part is not limited only to the above-mentioned embodiment, and various deformation|transformation are possible in the range which does not deviate from the summary of this invention. Furthermore, one or a plurality of structures, methods, and the like of various modified examples to be described later may be arbitrarily selected, and may be employed in the structures, methods, and the like of the aforementioned embodiments.

(1) In the bulb 100 shown in FIG. 2 and FIG. 10 etc., the lower end part of the storage part S2 is located higher than the lower end surface 5c of the 2nd wire rod 5, but it is not limited to this. In the lamp tube 100 shown in FIG. 11 , the lower end portion of the storage portion S2 may be positioned at the same height as the lower end surface 5 c of the second wire rod 5 . However, when the D-cut surface 51 and the first groove 53 are provided in the second wire rod 5, the D-cut face 51 and the first groove 53 do not reach the lower end face 5c of the second wire rod 5, and the lower end of the storage portion S2 is located at It is preferable that the lower end surface 5c of the second wire rod 5 is further upward.

(2) In the lamp tube 100 of the aforementioned embodiment, the anode 2 is arranged on the upper side and the cathode 3 is arranged on the lower side, but it is not limited to this. As shown in FIG. 12, the cathode 3 may be arranged on the upper side, and the anode 2 may be arranged on the lower side. At this time, the storage part S2 is provided between the 1st wire rod 4 and the cylindrical body 6 for 1st support.

1: Discharge capacitor 2: Anode 3: Cathode 4: 1st wire rod 4a: Front end of the first wire rod 5: 2nd wire rod 5a: The tip of the second wire rod 5b: Outer peripheral surface of the second wire rod 5c: Lower end face of the second wire rod 6: 1st support cylinder 7: 2nd support cylinder 7a: Inner peripheral surface of the second supporting cylinder 7b: Upper end surface of the second supporting cylinder 10: Light Emitting Tube Department 11: 1st sealing tube part 11a: Contraction part 12: The second sealing tube part 12a: Contraction part 51:D cutting surface 52: Reduced diameter part 53: The first groove 54: The third groove 57: Void forming member 57a: Circumferential side surface of void-forming member 58: Coil 71: The second groove 81: Glass components for sealing 81a: Cone 81b: Body 81c: Hole 82: External wire rod 83: Metal Foil 84: Cylinder for external wire rod 91: Cover 92: Cover 100: Short arc discharge lamp (tube) H: mercury S1: Luminous space S2: Reservoir Z1: axis

[ Fig. 1] Fig. 1 is an explanatory view showing the structure of the short arc discharge lamp according to the first embodiment. [ Fig. 2 ] An enlarged view showing the area A of the short arc discharge lamp shown in Fig. 1 . [Fig. 3] A B-B sectional view of the short arc discharge lamp shown in Fig. 2. [Fig. [ Fig. 4] Fig. 4 is a view showing a state of mercury accumulation in a light-off state of a short-arc discharge lamp. [ Fig. 5] Fig. 5 is a graph showing changes in lamp voltage from the start of lighting in Examples and the like. [ Fig. 6] Fig. 6 is a cross-sectional view showing a short arc discharge lamp according to a second embodiment. [ Fig. 7] Fig. 7 is a cross-sectional view showing a short arc discharge lamp according to a third embodiment. [ Fig. 8] Fig. 8 is a cross-sectional view showing a short arc discharge lamp according to a fourth embodiment. [ Fig. 9] Fig. 9 is a cross-sectional view showing a short arc discharge lamp according to a fifth embodiment. [ Fig. 10] Fig. 10 is a cross-sectional view showing a short arc discharge lamp according to a sixth embodiment. [ Fig. 11] Fig. 11 is a cross-sectional view showing a short arc discharge lamp according to a seventh embodiment. [ Fig. 12] Fig. 12 is a cross-sectional view showing a short arc discharge lamp of another embodiment.

1: Discharge capacitor

2: Anode

3: Cathode

4: 1st wire rod

4a: Front end of the first wire rod

5: 2nd wire rod

5a: The tip of the second wire rod

6: 1st support cylinder

7: 2nd support cylinder

10: Light Emitting Tube Department

11: 1st sealing tube part

11a: Contraction part

12: The second sealing tube part

12a: Contraction part

81: Glass components for sealing

81a: Cone

81b: Body

81c: Hole

82: External wire rod

83: Metal Foil

84: Cylinder for external wire rod

91: Cover

92: Cover

100: Short arc discharge lamp

S1: Luminous space

S2: Reservoir

Z1: axis

Claims (10)

A short arc discharge lamp is provided with: The discharge vessel is provided with a light-emitting tube portion and a pair of sealed tube portions extending continuously from the upper and lower ends of the light-emitting tube portion in opposite directions respectively; A pair of electrodes are arranged in the interior of the light-emitting tube part facing up and down; a pair of wire rods, respectively connected to the pair of electrodes, extending inside the sealed tube portion; and A supporting cylinder made of glass is arranged so as to support the wire rod between the outer peripheral surface of the wire rod and the inner peripheral surface of the sealed tube portion; And the short-arc discharge lamp which is sealed with mercury in the light-emitting space of the discharge vessel and is lit vertically, is characterized by: A storage portion for storing mercury when the discharge lamp is turned off is provided between the lead rod connected to the electrode located below among the electrodes, and the support cylinder that supports the lead rod; The said storage part is a space|gap provided along the axial direction of the said wire rod which communicates with the said light-emitting space. The short arc discharge lamp as described in claim 1, wherein, The gap is formed by a D-cut surface that is notched in a plane in a part of the outer peripheral surface of the wire rod in the circumferential direction, and the inner peripheral surface of the supporting cylinder. The short arc discharge lamp as described in claim 1, wherein, The gap is formed by a diameter-reduced portion of the outer peripheral surface of the wire rod, which is partially reduced in diameter in the central axis direction, and the inner peripheral surface of the support cylinder. The short arc discharge lamp as described in claim 1, wherein, The gap is formed by a first groove extending in the axial direction provided on the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder. The short arc discharge lamp as described in claim 1, wherein, The gap is formed by a second groove extending along the axial direction of the wire rod provided on the inner peripheral surface of the supporting cylinder and the outer peripheral surface of the wire rod. The short arc discharge lamp as described in claim 1, wherein, The outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder are separated from the entire circumference; A space forming member is arranged in a part of the circumferential direction between the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder; The gap is formed by the circumferential side surface of the gap forming member, the outer circumferential surface of the wire rod, and the inner circumferential surface of the support cylinder. A short arc discharge lamp is provided with: The discharge vessel is provided with a light-emitting tube portion and a pair of sealed tube portions extending continuously from the upper and lower ends of the light-emitting tube portion in opposite directions respectively; a pair of electrodes, which are arranged in the interior of the above-mentioned luminous tube part facing up and down; a pair of wire rods, respectively connected to the pair of electrodes, extending inside the sealed tube; and A glass supporting cylinder is arranged between the outer peripheral surface of the wire rod and the inner peripheral surface of the sealed tube portion to support the wire rod; And the short-arc discharge lamp which is sealed with mercury in the light-emitting space of the discharge vessel and is lit vertically, is characterized by: A storage portion for storing mercury when the discharge lamp is turned off is provided between the lead rod connected to the electrode located below among the electrodes, and the support cylinder that supports the lead rod; The said storage part is a helical void communicated with the said light-emitting space. The short arc discharge lamp as described in claim 7, wherein, The helical gap is formed by a third helical groove formed on the outer peripheral surface of the wire rod, and the inner peripheral surface of the supporting cylinder, or formed between the inner peripheral surface of the supporting cylinder. The helical fourth groove is formed with the outer peripheral surface of the wire rod. The short arc discharge lamp as described in claim 7, wherein, The outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder are separated from the entire circumference; Between the outer peripheral surface of the wire rod and the inner peripheral surface of the supporting cylinder, a coil that is wound in a spiral shape with a gap between the linear members is arranged; The helical gap is formed by the gap between the coils, the outer peripheral surface of the wire rod, and the inner peripheral surface of the supporting cylinder. The short arc discharge lamp as described in any one of claims 1 to 9, wherein, The lower end part of the said storage part is located above the lower end surface of the said wire rod.

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