CN216624202U - Quick start short arc mercury lamp - Google Patents
Quick start short arc mercury lamp Download PDFInfo
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- CN216624202U CN216624202U CN202220022467.6U CN202220022467U CN216624202U CN 216624202 U CN216624202 U CN 216624202U CN 202220022467 U CN202220022467 U CN 202220022467U CN 216624202 U CN216624202 U CN 216624202U
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- short arc
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Abstract
The utility model relates to the technical field of mercury lamps, and provides a quick-start short-arc mercury lamp which comprises a lamp body and electrodes arranged in the lamp body; the electrodes comprise an anode and a cathode which are oppositely arranged, and mercury and xenon are sealed in the lamp body; the two ends of the lamp body are respectively provided with a sealing part; the anode and the cathode are respectively connected with an electrode support rod; the electrode supporting rod is sleeved with the middle supporting part; the bottom end of the electrode supporting rod is provided with an electrode supporting rod holding part; a front metal plate is connected between the intermediate supporting part and the electrode supporting rod holding part; a rear metal plate is arranged at the rear end of the electrode supporting rod holding part, and a plurality of metal foils are arranged on the periphery of the electrode supporting rod holding part; the metal foil is electrically connected with the rear metal plate; the rear metal plate is provided with a rear external rod for connecting external power; the electrode supporting rod of the cathode is sleeved with an evaporation promoting part. The quick-starting short-arc mercury lamp has good starting characteristics, and the starting time of the mercury lamp is shortened.
Description
Technical Field
The utility model relates to the technical field of mercury lamps, in particular to a quick-start short-arc mercury lamp.
Background
As a manufacturing process of semiconductors and liquid crystals, there is an exposure process using an exposure technique. Mercury, which is a light-emitting substance, is enclosed in a short arc mercury lamp for use as a main light source mounted on an exposure apparatus.
Various measures have been taken to shorten the time from the start of lighting to the time until mercury evaporation reaches a steady state, that is, to shorten the so-called startup time. It is generally used by extending as much as possible the sum of the distance from the anode front end to the metal plate fixed to the anode support rod and the distance from the cathode front end to the metal plate fixed to the cathode support rod.
However, in the short arc mercury lamp that lights up in the vertical direction, when the distance from the tip of the lower electrode to the metal plate fixed to the electrode support rod is set long, the starting becomes slow, and the lamp becomes large, which is more obvious. This is considered to be because the temperature of the support rod in the vicinity of the root space in the lower lamp is too low, and therefore, the temperature of the mercury stored in this space cannot be effectively raised at the start of lighting.
SUMMERY OF THE UTILITY MODEL
The utility model mainly solves the technical problem that the starting of a short-arc mercury lamp in the prior art is slow, and provides a quick-starting short-arc mercury lamp, so that the mercury short-arc lamp has good starting characteristics, and the starting time of the mercury short-arc lamp is shortened.
The utility model provides a quick-start short-arc mercury lamp, which comprises a lamp body and an electrode arranged in the lamp body, wherein the electrode is arranged on the lamp body; the electrodes comprise an anode and a cathode which are oppositely arranged, and mercury and xenon are sealed in the lamp body;
the two ends of the lamp body are respectively provided with a sealing part;
the anode and the cathode are respectively connected with an electrode support rod;
the electrode supporting rod is sleeved with the middle supporting part; the bottom end of the electrode supporting rod is provided with an electrode supporting rod holding part; a front metal plate is connected between the intermediate supporting part and the electrode supporting rod holding part;
a rear metal plate is arranged at the rear end of the electrode supporting rod holding part, and a plurality of metal foils are arranged on the periphery of the electrode supporting rod holding part; the metal foil is electrically connected with the rear metal plate; the rear metal plate is provided with a rear external rod for connecting external power;
the electrode supporting rod of the cathode is sleeved with an evaporation promoting part; the evaporation enhancing region is located between the cathode and the intermediate support of the cathode and is proximate to the cathode root.
Preferably, the evaporation accelerating portion is formed of a plurality of disk members arranged in series at intervals.
Preferably, the disk part is made of molybdenum foil; the number of the disc parts is 10, and the space between the disc parts is 1 mm;
the disc member has an outer diameter of 20mm, an inner diameter of 8mm, and a thickness of 1 mm.
Preferably, the evaporation accelerating section employs a coil member.
Preferably, the coil component has a length of 20mm, an outer diameter of 11.2mm and an inner diameter of 8 mm.
Preferably, the diameter of the electrode support rod is 8 mm.
Preferably, the distance between the anode and the cathode is 10 mm.
Preferably, the amount of mercury in the lamp body is 50mg/cc, and the gas pressure is 700 Torr.
Preferably, the intermediate support portion is a bead.
Preferably, a metal cap is arranged at the outer end of the sealing part;
the rear outer bar is connected to the metal cap.
The utility model provides a rapid starting short arc mercury lamp, which is provided with an evaporation promoting part, wherein the evaporation promoting part can adopt a coil component or a plurality of disk components arranged at intervals in sequence, the evaporation promoting part is arranged near a root gap part below a cathode, and the contact surface between mercury retained near the gap part and an evaporation promoting component heated by current is increased when the lamp starts to be lighted, so that the heat conduction of an electrode support rod enables the mercury to be rapidly evaporated, the effect of shortening the time of a lamp tube reaching a stable state is achieved, and the starting time is improved.
Drawings
FIG. 1 is a schematic diagram of a rapid start short arc mercury lamp according to the present invention;
FIG. 2 is a schematic structural diagram of a cathode portion according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a cathode portion provided in a second embodiment of the present invention.
Reference numerals: 1. a short arc mercury lamp is started quickly; 2. a lamp body; 3. an anode; 4. a cathode; 5. an intermediate support portion; 6. an electrode support rod; 7. an electrode support rod holding section; 8. a metal foil; 9. a front metal plate; 10. a rear metal plate; 11. a rear outer bar; 12. an evaporation promotion section; 18. a metal cap; 2a, a sealing part.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be further noted that, for the convenience of description, only some but not all of the relevant aspects of the present invention are shown in the drawings.
Example one
As shown in fig. 1, a rapid start short arc mercury lamp 1 according to an embodiment of the present invention includes a lamp body 2 and electrodes disposed in the lamp body 2; the electrodes include an anode 3 and a cathode 4 which are oppositely arranged, and mercury and xenon are sealed in the lamp body 2.
The lamp body 2 has sealing portions 2a at both ends thereof, respectively.
The anode 3 and the cathode 4 are respectively connected with an electrode supporting rod 6.
The electrode supporting rod 6 is sleeved with the middle supporting part 5; specifically, the intermediate support portion 5 is a bead. The bottom end of the electrode supporting rod 6 is provided with an electrode supporting rod holding part 7, and the electrode supporting rod holding part 7 can be made of glass; a front metal plate 9 is connected between the intermediate support part 5 and the electrode support rod holding part 7; the front metal plate 9 is provided with a through hole into which the electrode support rod 6 can be inserted.
A rear metal plate 10 is provided at the rear end of the electrode support rod holding portion 7, and a plurality of metal foils 8 are provided on the outer periphery of the electrode support rod holding portion 7; the metal foil 8 is electrically connected with the rear metal plate 10; the rear metal plate 10 is provided with a rear external rod 11 for connecting external power. The metal foil 8 is a conductive member for supplying electricity to the cathode 4, and specifically, 5 pieces may be provided. Further, the outer end of the sealing part 2a is provided with a metal cap 18; the rear outer bar 11 is attached to a metal cap 18.
The evaporation promoting part 12 is sleeved on the electrode supporting rod 6 of the cathode 4; the evaporation promoter 12 is located between the cathode 4 and the intermediate support 5 of the cathode 4, close to the root of the cathode 4. The evaporation accelerating part 12 has a through hole in the center thereof into which the electrode support rod 6 can be inserted. The evaporation accelerating portion 12 is welded to the electrode support rod 6, or attached to the electrode support rod 6 by press fitting or the like.
As shown in fig. 2, in the present embodiment, the evaporation accelerating section 12 is formed of a plurality of disk members arranged in series at intervals. The disc part is made of molybdenum foil; the number of the disc parts is 10, and the space between the disc parts is 1 mm; the disc member has an outer diameter of 20mm, an inner diameter of 8mm, and a thickness of 1 mm. In the present embodiment, the disk member is disposed on the outer periphery of the electrode support rod 6, and mercury can be rapidly evaporated, thereby realizing a short arc mercury lamp with a shortened start time. However, the evaporation accelerating section 12 is not limited to a disk member, and may be formed in a disk shape and connected to the electrode support rod 6.
The rapid start short arc mercury lamp 1 of the present embodiment is a molybdenum foil thin path type arc lamp having a rated power of 13.5 kW. The diameter of the electrode support rod 6 is 8 mm. The distance between the anode 3 and the cathode 4 is 10 mm. The amount of mercury in the lamp body 2 was 50mg/cc, and the gas pressure was 700 Torr.
In the quick-start short-arc mercury lamp of the present embodiment, the electrode support rod 6, the front metal plate 9, the metal foil 8, the rear metal plate 10, the rear outer rod 11, and the metal cap 18 are connected in this order, and the rear outer rod 11 and the metal cap 18 are connected to electric power, so that the cathode 4 provided at the front end of the electrode support rod 6 can be energized.
In the rapid start short arc mercury lamp of the present embodiment, the evaporation accelerating portion 12 is provided, and the evaporation of mercury accumulated below the cathode 4 is accelerated by the evaporation accelerating portion 12 by the heat conduction means of the electrode support rod 6 and the evaporation accelerating portion 12, so that the time until the lamp becomes stable is shortened, and the start time is improved. Compared with the prior art, the starting time (the starting time is defined as the time from the starting point to the rated voltage reaching 80%) is obviously shortened when the lamp is lighted under the same condition.
Example two
The difference between this embodiment and the first embodiment is: the evaporation accelerating portion 12 is different in form. As shown in fig. 3, in the present embodiment, a coil member is used as the evaporation accelerating portion 12.
The coil component is made of tungsten material; the coil component has a length of 20mm, an outer diameter of 11.2mm and an inner diameter of 8 mm. The coil member has an inner diameter corresponding to the inner diameter of the electrode support rod 6, and the electrode support rod 6 can be inserted thereinto.
The evaporation accelerating section 12 is formed as a coil component, and the wire rod is formed into a coil shape while being heated so as not to cause cracking. The evaporation accelerating unit 12 is not limited to the coil member, and may be a plurality of wires bundled together. The material of the evaporation accelerator 12 is not limited to metal, and may be a conductor or ceramic.
In the rapid start short arc mercury lamp of the present embodiment, the coil member is heated by joule heat, and when the lamp starts to be lit, the mercury stored in the vicinity of the root gap of the cathode is rapidly evaporated by the electrode support rod 6 and the heat conduction means of the coil member, thereby shortening the time required for the lamp to stabilize. The coil member of this embodiment enables rapid evaporation of mercury, thereby achieving a faster start-up time of the short arc mercury lamp.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: modifications of the technical solutions described in the embodiments or equivalent replacements of some or all technical features may be made without departing from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A quick start short arc mercury lamp comprises a lamp body (2) and electrodes arranged in the lamp body (2); the electrode comprises an anode (3) and a cathode (4) which are oppositely arranged, and mercury and xenon are sealed in the lamp body (2);
the method is characterized in that:
the two ends of the lamp body (2) are respectively provided with a sealing part (2 a);
the anode (3) and the cathode (4) are respectively connected with an electrode supporting rod (6);
the electrode supporting rod (6) is sleeved with the middle supporting part (5); the bottom end of the electrode supporting rod (6) is provided with an electrode supporting rod holding part (7); a front metal plate (9) is connected between the intermediate support part (5) and the electrode support rod holding part (7);
a rear metal plate (10) is arranged at the rear end of the electrode supporting rod holding part (7), and a plurality of metal foils (8) are arranged on the periphery of the electrode supporting rod holding part (7); the metal foil (8) is electrically connected with the rear metal plate (10); a rear external rod (11) for connecting external power is arranged on the rear metal plate (10);
an evaporation promoting part (12) is sleeved on the electrode supporting rod (6) of the cathode (4); the evaporation accelerating part (12) is located between the cathode (4) and the intermediate support part (5) of the cathode (4) and is close to the root of the cathode (4).
2. A rapid start short arc mercury lamp as claimed in claim 1, wherein the evaporation-promoting portion (12) is provided by a plurality of disc members arranged in sequence at intervals.
3. The rapid start short arc mercury lamp as in claim 2, wherein the disc member is made of molybdenum foil; the number of the disc parts is 10, and the space between the disc parts is 1 mm;
the disc member has an outer diameter of 20mm, an inner diameter of 8mm, and a thickness of 1 mm.
4. The rapid start short arc mercury lamp as claimed in claim 1, wherein the evaporation-promoting portion (12) employs a coil member.
5. The rapid start short arc mercury lamp of claim 4, wherein the coil member has a length of 20mm, an outer diameter of 11.2mm and an inner diameter of 8 mm.
6. A rapid start short arc mercury lamp as claimed in claim 3 or 5, characterized in that the electrode support rod (6) has a diameter of 8 mm.
7. A rapid start short arc mercury lamp as claimed in claim 2 or 4, characterized in that the distance between the anode (3) and the cathode (4) is 10 mm.
8. A rapid start short arc mercury lamp as claimed in claim 2 or 4, characterized in that the amount of mercury in the lamp body (2) is 50mg/cc and the gas pressure is 700 Torr.
9. A rapid start short arc mercury lamp as claimed in claim 2 or 4, characterized in that the intermediate support (5) is beaded.
10. A rapid start short arc mercury lamp as claimed in claim 2 or 4, characterized in that the outer end of the seal (2a) is provided with a metal cap (18);
the rear outer bar (11) is connected to a metal cap (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220022467.6U CN216624202U (en) | 2022-01-06 | 2022-01-06 | Quick start short arc mercury lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220022467.6U CN216624202U (en) | 2022-01-06 | 2022-01-06 | Quick start short arc mercury lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216624202U true CN216624202U (en) | 2022-05-27 |
Family
ID=81687064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220022467.6U Active CN216624202U (en) | 2022-01-06 | 2022-01-06 | Quick start short arc mercury lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216624202U (en) |
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2022
- 2022-01-06 CN CN202220022467.6U patent/CN216624202U/en active Active
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