CN113703124A - Method for correcting coaxiality of biconcave off-axis system - Google Patents
Method for correcting coaxiality of biconcave off-axis system Download PDFInfo
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- CN113703124A CN113703124A CN202111031820.3A CN202111031820A CN113703124A CN 113703124 A CN113703124 A CN 113703124A CN 202111031820 A CN202111031820 A CN 202111031820A CN 113703124 A CN113703124 A CN 113703124A
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- 238000004364 calculation method Methods 0.000 claims abstract description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
Abstract
The invention relates to a method for correcting the coaxiality of a biconcave off-axis system, which comprises the following steps: simulating and calculating the distance between the principal points of the main concave surface and the secondary concave surface off-axis mirror and the fitting radius in optical design software; correcting the optical axis of the front lens by an auto-collimation method; determining the optical axis of the main concave surface off-axis mirror and the secondary concave surface off-axis mirror; finding out the primary mirror optical axis of the primary and secondary concave off-axis mirrors; and moving the concave surface off-axis mirror to enable the concave surface off-axis mirror to be superposed with the mother mirror optical axis of the main concave surface off-axis mirror, and enabling the distance between the concave surface off-axis mirror and the principal point of the main concave surface off-axis mirror to be consistent with that of the simulation calculation, so that the coaxial correction is completed. The method for correcting the coaxiality of the biconcave off-axis system has the advantages of less uncertain factors, high assembly and adjustment efficiency, high assembly precision and simplicity in operation in the assembly process.
Description
Technical Field
The invention belongs to the technical field of off-axis optical systems, and particularly relates to a method for correcting coaxiality of a biconcave off-axis system.
Background
An off-axis optical system is an optical system in which the optical axis of the aperture does not coincide with the mechanical center of the aperture. The biconcave off-axis system is widely applied to various fields due to the characteristics of simple structure, no blocking and the like. As the main concave surface off-axis mirror and the secondary concave surface off-axis mirror of the double-concave off-axis system are off-axis mirrors, and the optical axis and the mechanical axis are not coaxial, the coaxial adjustment by a centering method cannot be used, and the imaging quality of the system is influenced. At present, the biconcave off-axis system is mainly adjusted through an interference method and manual experience, and has multiple uncertain factors and low adjusting efficiency.
Disclosure of Invention
The invention aims to provide a method for correcting the coaxiality of a biconcave off-axis system, which has high assembly precision and simple operation.
In order to achieve the purpose, the invention provides the following technical scheme:
a method of correcting the on-axis of a biconcave off-axis system, comprising:
s1: in optical design software, setting various optical parameters of a biconcave off-axis system, and simulating and calculating the principal point spacing distance and the fitting radius of the main concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11;
s2: oppositely placing the front mirror 1 and a plane reflector 2 on a stable optical platform, and correcting the optical axis of the front mirror 1 by an auto-collimation method;
s3: a main concave off-axis mirror 10 is placed in front of the front mirror 1, and parallel light emitted by the front mirror 1 is irradiated on the main concave off-axis mirror 10; according to the fitting radius of the main concave mirror, the focal position and the design optical axis of the concave mirror are preliminarily determined, the resolution plate image with the cross in the front mirror 1 is observed on the design optical axis of the main concave off-axis mirror 10 through the reading microscope 4, and the main concave off-axis mirror 10 is adjusted to enable the image to be clear;
s4: the resolution plate with the cross at the focus position of the front mirror 1 is replaced by a laser 3, and laser emitted by the laser 3 is converged at the focus of the main concave off-axis mirror 10 after passing through the front mirror 1 and the main concave off-axis mirror 10;
s5: installing a bus auxiliary cross tool 6 at the theoretical center position of a main concave surface off-axis mirror mother mirror 12, observing the cross point position of the bus auxiliary cross tool 6 and the focus of a main concave surface off-axis mirror 10 by using an internal focusing telescope 7, and adjusting the bus auxiliary cross tool 6 to enable the cross point position of the bus auxiliary cross tool 6 and the focus of the main concave surface off-axis mirror 10 to be connected in series to form a straight line, so as to find out the mother mirror optical axis position of the main concave surface off-axis mirror 10;
s6: finding out the optical axis position of the primary mirror of the secondary concave off-axis mirror 11 according to the method;
s7: and moving the secondary concave surface off-axis mirror 11 until the optical axis positions of the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 are overlapped, and enabling the principal point spacing distance between the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 to be consistent with the simulation calculation, wherein the optical axis of the secondary concave surface off-axis mirror 11 is consistent with that of the primary concave surface off-axis mirror 10 at the moment, and the coaxial correction is completed.
Further, the correcting the optical axis of the front mirror 1 in step S2 includes: the front mirror 1 emits parallel light to irradiate the plane reflector 2, the plane reflector 2 reflects the parallel light back to the front mirror 1, and whether the cross reflected by self-alignment coincides with the cross of the front mirror 1 per se is observed in an ocular lens of the front mirror 1 through human eyes, so that the correction of the optical axis of the front mirror 1 is realized.
Further, the adjustment of the main concave off-axis mirror 10 and the bus auxiliary cross tool 6 all includes: pitch, azimuth and roll adjustments.
Further, the photoelectric autocollimator 5 is placed on the back of the main concave off-axis mirror 10, parallel light emitted by the photoelectric autocollimator 5 irradiates the back of the main concave off-axis mirror 10, the light is reflected back to the photoelectric autocollimator 5 in an autocollimation manner, and the change of the optical axis of the main concave off-axis mirror 10 is monitored.
Further, in the process of moving the secondary concave off-axis mirror 11 and the bus auxiliary cross fixture 6 in the step S7, the photoelectric autocollimator 5 is placed on the back surface of the secondary concave off-axis mirror 11, parallel light emitted by the photoelectric autocollimator 5 irradiates the back surface of the secondary concave off-axis mirror 11, the light is reflected back to the photoelectric autocollimator 5 in an autocollimator manner, and the change of the optical axis of the secondary concave off-axis mirror 11 is monitored.
Further, the step S7 of adjusting the coincidence of the optical axis positions of the primary mirrors of the primary concave off-axis mirror 10 and the secondary concave off-axis mirror 11 includes: the cross point position of the two bus auxiliary cross tools 6 and the focus of the main concave off-axis mirror 10 are observed in real time through the internal focusing telescope 7, so that the three parts form a straight line.
Further, the laser 3 is a 0.02mrad green laser.
Compared with the prior art, the invention has the following beneficial effects: the method for correcting the coaxiality of the biconcave off-axis system has the advantages of less uncertain factors, high assembly and adjustment efficiency, high assembly precision and simplicity in operation in the assembly process.
Drawings
FIG. 1 is a schematic diagram of a biconcave off-axis system.
FIG. 2 is a schematic diagram of the method of the present invention for correcting the on-axis of a biconcave off-axis system.
In the figure: 1. the device comprises a front mirror, a 2 planar reflector, a 3 laser, a 4 reading microscope, a 5 photoelectric autocollimator, a 6 bus auxiliary cross tool, a 7 inner focusing telescope, a 8 measuring microscope, a 10 main concave surface off-axis mirror, a 11 secondary concave surface off-axis mirror, a 12 main concave surface off-axis mirror female mirror, and a 13 secondary concave surface off-axis mirror female mirror.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, a method for correcting the coaxiality of a biconcave off-axis system comprises the following steps:
s1: in zemax software, various optical parameters of the biconcave off-axis system are set, and the principal point spacing distance and the fitting radius of the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 are calculated in a simulation mode.
S2: place leading mirror (1) and a plane mirror (2) in opposite directions on firm optical platform, leading mirror 1 emergent parallel light shines on plane mirror 2, and plane mirror 2 reflects parallel light back to leading mirror 1, observes whether the cross that returns from the accurate reflection coincides with the cross of leading mirror 1 itself in the eyepiece of leading mirror 1 through people's eye, realizes the correction of leading mirror 1 optical axis.
S3: a main concave off-axis mirror 10 is placed in front of the front mirror 1, and parallel light emitted by the front mirror 1 is irradiated on the main concave off-axis mirror 10 and converged on the focus of the main concave off-axis mirror 10; according to the fitting radius of the main concave mirror, the focal position and the design optical axis of the concave mirror are preliminarily determined, the resolution plate image with the cross in the front mirror 1 is observed on the design optical axis of the main concave off-axis mirror 10 through the reading microscope 4, and the main concave off-axis mirror 10 is adjusted to enable the imaging to be clear. The photoelectric autocollimator 5 can also be placed on the back surface of the main concave surface off-axis mirror 10 (according to the processing theoretical requirement of the main concave surface off-axis mirror 10, the back surface is similar to a reference reflector), parallel light emitted by the photoelectric autocollimator 5 irradiates the back surface of the main concave surface off-axis mirror 10, the light is reflected back to the photoelectric autocollimator 5 in an autocollimator manner, and the change of the optical axis of the main concave surface off-axis mirror 10 in the debugging process can be monitored.
S4: the resolution plate with the cross at the focus position of the front lens 1 is replaced by a green laser 3 with a smaller beam divergence angle of 0.02mrad, laser emitted by the green laser is converged at the focus of the main concave off-axis lens 10 after passing through the front lens 1 and the main concave off-axis lens 10, and the green laser is convenient for observation of the inner focusing telescope 7.
S5: the bus auxiliary cross tool 6 is installed at the theoretical center position of the main concave surface off-axis mirror female mirror 12, the cross point position of the bus auxiliary cross tool 6 and the focus of the main concave surface off-axis mirror 10 (namely green laser) are observed at one side of the bus auxiliary cross tool 6 through the internal focusing telescope 7, the bus auxiliary cross tool 6 is adjusted, the cross point position of the bus auxiliary cross tool 6 and the focus of the main concave surface off-axis mirror 10 are connected in series to form a straight line, and the position of the female mirror optical axis of the main concave surface off-axis mirror 10 is found out.
S6: according to the method for finding the optical axis position of the primary mirror of the primary concave off-axis mirror 10, the optical axis position of the primary mirror of the secondary concave off-axis mirror 11 is found.
S7: the secondary concave surface off-axis mirror 11 is moved until the positions of the optical axes of the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 coincide, the principal point spacing distance between the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 is consistent with that of simulation calculation (the actual principal point spacing distance between the primary concave surface off-axis mirror 10 and the secondary concave surface off-axis mirror 11 can be measured through the measuring microscope 8, and the spacing distance precision is adjusted to two decimal points, so that the optical axes of the secondary concave surface off-axis mirror 11 and the primary concave surface off-axis mirror 10 are consistent, and coaxial correction is completed. The photoelectric autocollimator 5 can be placed on the back of the secondary concave off-axis mirror 11, parallel light emitted by the photoelectric autocollimator 5 irradiates the back of the secondary concave off-axis mirror 11, light rays are reflected back to the photoelectric autocollimator 5 in an autocollimator manner, and optical axis change in the moving process of the secondary concave off-axis mirror 11 can be monitored. When the optical axis positions of the primary concave off-axis mirror 10 and the secondary concave off-axis mirror 11 are adjusted to coincide, the cross point position of the two bus auxiliary cross tools 6 and the focus of the primary concave off-axis mirror 10 can be observed in real time through the internal focusing telescope 7, so that the three parts form a straight line, namely the optical axis positions of the primary mirrors coincide.
After the coaxial correction of the primary concave mirror and the secondary concave mirror is completed, the correction result can be verified through the 4D interferometer, and the interference pattern is measured in real time to meet the imaging requirement, so that the correction method is feasible.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. A method of correcting the on-axis of a biconcave off-axis system, comprising:
s1: in optical design software, setting various optical parameters of a biconcave off-axis system, and simulating and calculating the principal point spacing distance and the fitting radius of the main concave surface off-axis mirror (10) and the secondary concave surface off-axis mirror (11);
s2: the method comprises the following steps of oppositely placing a front mirror (1) and a plane reflector (2) on a stable optical platform, and correcting the optical axis of the front mirror (1) by an auto-collimation method;
s3: a main concave surface off-axis mirror (10) is placed in front of the front mirror (1), and parallel light emitted by the front mirror (1) is irradiated on the main concave surface off-axis mirror (10); according to the fitting radius of the main concave mirror, the focal position and the design optical axis of the concave mirror are preliminarily determined, a reading microscope (4) is used for observing a resolution plate image with a cross in the front mirror (1) on the design optical axis of the main concave off-axis mirror (10), and the main concave off-axis mirror (10) is adjusted to enable the image to be clear;
s4: the resolution plate with the cross at the focus position of the front mirror (1) is replaced by a laser (3), and laser emitted by the laser (3) passes through the front mirror (1) and the main concave surface off-axis mirror (10) and then is converged at the focus of the main concave surface off-axis mirror (10);
s5: installing a bus auxiliary cross tool (6) at the theoretical center position of a main concave surface off-axis mirror female mirror (12), observing the cross point position of the bus auxiliary cross tool (6) and the focus of the main concave surface off-axis mirror (10) by using an internal focusing telescope (7), adjusting the bus auxiliary cross tool (6) to enable the cross point position of the bus auxiliary cross tool (6) and the focus of the main concave surface off-axis mirror (10) to be connected in series to form a straight line, and finding out the optical axis position of the main concave surface off-axis mirror female mirror (10);
s6: finding out the optical axis position of the primary mirror of the secondary concave off-axis mirror (11) according to the method;
s7: and (3) moving the secondary concave surface off-axis mirror (11) and the corresponding bus auxiliary cross tool (6) until the positions of the main concave surface off-axis mirror (10) and the secondary concave surface off-axis mirror (11) are superposed, and enabling the principal point spacing distance between the main concave surface off-axis mirror (10) and the secondary concave surface off-axis mirror (11) to be consistent with that of the simulation calculation, wherein the optical axis of the secondary concave surface off-axis mirror (11) is consistent with that of the main concave surface off-axis mirror (10), and the coaxial correction is completed.
2. The method of claim 1, wherein the method comprises: the step S2 of correcting the optical axis of the front mirror (1) includes: parallel light is emitted from the front mirror (1) and irradiates the plane reflector (2), the plane reflector (2) reflects the parallel light back to the front mirror (1), and whether the cross reflected by self-alignment coincides with the cross of the front mirror (1) per se is observed in an eyepiece of the front mirror (1) through human eyes, so that the correction of the optical axis of the front mirror (1) is realized.
3. The method of claim 1, wherein the method comprises: the adjustment of main concave off-axis mirror (10) and the bus auxiliary cross tool (6) all include: pitch, azimuth and roll adjustments.
4. The method of claim 1, wherein the method comprises: the photoelectric autocollimator (5) is placed on the back face of the main concave off-axis mirror (10), parallel light emitted by the photoelectric autocollimator (5) irradiates the back face of the main concave off-axis mirror (10), light rays are reflected back to the photoelectric autocollimator (5) in an autocollimation mode, and the change of the optical axis of the main concave off-axis mirror (10) is monitored.
5. The method of claim 1, wherein the method comprises: in the step S7, in the process of moving the secondary concave surface off-axis mirror (11) and the bus auxiliary cross tool (6), the photoelectric autocollimator (5) is placed on the back surface of the secondary concave surface off-axis mirror (11), parallel light emitted by the photoelectric autocollimator (5) irradiates the back surface of the secondary concave surface off-axis mirror (11), the light is reflected back to the photoelectric autocollimator (5) in an autocollimation mode, and the change of the optical axis of the secondary concave surface off-axis mirror (11) is monitored.
6. The method for correcting the on-axis of a biconcave off-axis system according to claim 1, wherein the step S7 of adjusting the coincidence of the positions of the optical axes of the mother mirrors of the primary concave off-axis mirror (10) and the secondary concave off-axis mirror (11) comprises: the cross point position of the two bus auxiliary cross tools (6) and the focus of the main concave off-axis mirror (10) are observed in real time through the internal focusing telescope (7), so that the three parts form a straight line.
7. The method of claim 1, wherein the method comprises: the laser (3) is a 0.02mrad green laser.
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