CN113687454B - Micro-lens array processing method - Google Patents
Micro-lens array processing method Download PDFInfo
- Publication number
- CN113687454B CN113687454B CN202111001139.4A CN202111001139A CN113687454B CN 113687454 B CN113687454 B CN 113687454B CN 202111001139 A CN202111001139 A CN 202111001139A CN 113687454 B CN113687454 B CN 113687454B
- Authority
- CN
- China
- Prior art keywords
- microspheres
- array
- micro
- mould
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
Abstract
The invention discloses a method for processing a micro-lens array, which comprises the following steps: step one, processing a template mould, wherein the template mould is provided with a pit capable of fixing microspheres; step two, self-assembling an array formed by microspheres on a template mould; thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern; transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching; and step five, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold. The invention utilizes the pits as the self-assembly guide of the microspheres, and achieves the mode of finally regulating and controlling the micro-lens array by adjusting the aperture of the pits, the space and the position among the pits and the size of the microspheres, thereby realizing the manufacture of a micro-lens array mould with controllable position and further realizing the controllability of the manufacture of the micro-lens array.
Description
Technical Field
The invention relates to the technical field of micro-lens arrays, in particular to a micro-lens array processing method.
Background
The micro lens array is an array formed by lenses with micron-sized clear aperture and relief depth, not only has the basic functions of focusing, imaging and the like of the traditional lens, but also has the characteristics of small unit size and high integration level, so that the micro lens array can complete the functions which cannot be completed by the traditional optical element and can form a plurality of novel optical systems.
Microlens arrays have unique and excellent properties in terms of light uniformization, diffusion, and the like, and thus there is a great demand for the manufacture of microlens arrays. At present, the method for processing the micro-lens array by utilizing the microsphere self-assembly-etching composite method has certain limitations.
The existing microsphere self-assembly and etching composite processing method is that microspheres are arranged and assembled into a close hexagonal array structure on a gas-liquid interface under the action of capillary force, van der waals force and the like, then, a self-assembled microsphere single-layer film is used as a template, photoresist is directly coated in a spinning mode, and after the photoresist is cured, the microspheres are stripped, so that a concave hemispherical array of the photoresist is obtained (or, the self-assembled microsphere single-layer film is used as the template, a concave hemispherical array is copied by PDMS, then the PDMS is used as the template, and a corresponding array is copied by the photoresist); finally, the array pattern on the photoresist is transferred to the base material using an etching process. The regular arrays formed by capillary force, van der waals force and the like are driven to form close hexagonal arrays, and the square adjoining microsphere arrays or the adjoining microsphere arrays with controllable spacing are difficult to obtain.
Therefore, how to change the current situation that the microsphere arrangement mode is single and the arrangement pitch is uncontrollable when the self-assembly and etching composite processing method of the microspheres is adopted to manufacture the microlens array in the prior art becomes a problem to be solved by the technical personnel in the field.
Disclosure of Invention
The invention aims to provide a method for processing a micro lens array, which aims to solve the problems in the prior art, realize the processing of the micro lens array with controllable position and improve the applicability of the micro lens array.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a micro-lens array processing method, which comprises the following steps:
the method comprises the following steps of firstly, processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, and a plurality of pits are arranged in an array shape;
step two, self-assembling an array formed by the microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits;
thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern;
step four, the micro-lens array pattern on the photoresist obtained in the step three is transferred to a substrate mould by utilizing plasma etching;
and fifthly, removing the residual photoresist on the substrate mold to obtain the micro-lens array mold.
Preferably, in the first step, the pit is cylindrical.
Preferably, in the first step, the pits are in the shape of inverted pyramid columns.
Preferably, in the first step, the template mold is processed by laser processing or mechanical processing.
Preferably, the size of the pits matches the size of the microspheres, and the centers of the microspheres are located at the top of the template mold.
Preferably, in the second step, the microspheres are made of a silica material.
Preferably, the template mold is of a split structure.
Preferably, in step five, the residual photoresist on the substrate mold is removed by cleaning.
Compared with the prior art, the invention has the following technical effects: the microlens array processing method of the invention comprises the following steps: step one, processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, and a plurality of pits are arranged in an array shape; step two, self-assembling an array formed by microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits; thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern; transferring the microlens array pattern on the photoresist obtained in the third step to a substrate mould by using plasma etching; and step five, removing the residual photoresist on the substrate mould to obtain the micro-lens array mould.
According to the method for processing the micro-lens array, the pits capable of fixing the microspheres are processed on the template mould, the pits are used for self-assembly guiding of the microspheres, and the mode of finally regulating and controlling the micro-lens array is achieved by adjusting the aperture of the pits, the distance between the pits, the position and the size of the microspheres, so that the manufacturing of the micro-lens array mould with the controllable position is realized, the controllability of manufacturing the micro-lens array is further realized, and the applicability of the micro-lens array is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic diagram of a method for processing a microlens array according to the present invention;
FIG. 2 is a schematic diagram of an embodiment of a method for processing a microlens array according to the present invention;
FIG. 3 is a schematic view of a template mold in an embodiment of a microlens array processing method of the present invention;
FIG. 4 is a schematic view of a template mold capable of forming a contiguous square array in an embodiment of a microlens array processing method of the present invention;
FIG. 5 is a schematic diagram of a method of forming a contiguous square array according to an embodiment of the present invention;
FIG. 6 is a schematic view of a template mold capable of forming a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention;
FIG. 7 is a schematic diagram of the formation of a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention;
wherein, 1 is a template mold, 2 is a pit, 3 is a microsphere, 4 is photoresist, 5 is a substrate mold, and 6 is a microlens array mold.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention aims to provide a method for processing a micro lens array, which aims to solve the problems in the prior art, realize the processing of the micro lens array with controllable position and improve the applicability of the micro lens array.
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description thereof.
Referring to fig. 1-7, fig. 1 is a schematic diagram illustrating a method for processing a microlens array according to the present invention, and fig. 2 is a schematic diagram illustrating an embodiment of the method for processing a microlens array according to the present invention; fig. 3 is a schematic view of a template mold in an embodiment of a microlens array processing method of the present invention, fig. 4 is a schematic view of a template mold capable of forming a contiguous square array in an embodiment of a microlens array processing method of the present invention, fig. 5 is a schematic view of a contiguous square array in an embodiment of a microlens array processing method of the present invention, fig. 6 is a schematic view of a template mold capable of forming a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention, and fig. 7 is a schematic view of a contiguous hexagonal array in an embodiment of a microlens array processing method of the present invention.
The invention provides a micro-lens array processing method, which comprises the following steps:
firstly, processing a template mould 1, wherein the template mould 1 is provided with pits 2 capable of fixing microspheres 3, and a plurality of pits 2 are arranged in an array;
step two, self-assembling an array formed by microspheres 3 on the template mould 1, wherein the arrangement mode of the array formed by the microspheres 3 is the same as that of the array formed by the pits 2;
thirdly, imprinting the photoresist 4 at a certain temperature by using the array formed by the microspheres 3 obtained in the second step to obtain a microlens array pattern on the surface of the photoresist 4;
step four, the micro-lens array pattern on the photoresist 4 obtained in the step three is transferred to a substrate mould 5 by utilizing plasma etching;
and step five, removing the residual photoresist 4 on the substrate mould 5 to obtain the micro-lens array mould 6.
According to the method for processing the micro-lens array, the pits 2 capable of fixing the microspheres 3 are processed on the template mould 1, the pits 2 are used for self-assembly guiding of the microspheres 3, and the mode of finally regulating and controlling the micro-lens array is achieved by adjusting the aperture of the pits 2, the distance between the pits 2, the position and the size of the microspheres 3, so that the manufacturing of the micro-lens array mould 6 with the controllable position is realized, the manufacturing controllability of the micro-lens array is further realized, and the applicability of the micro-lens array is improved.
In this embodiment, the pits 2 are cylindrical, and the diameter of the pits 2 is smaller than that of the microspheres 3, so that the microspheres 3 are prevented from falling into the pits 2, and the subsequent manufacturing of the microlens array mold 6 is ensured to be smoothly performed.
In other specific embodiments of the present invention, the recesses 2 are inverted pyramid-shaped, that is, the template mold 1 has pyramid-shaped protrusions, the protrusions are similar to pyramid shapes, and inverted pyramid-shaped recesses 2 are formed between adjacent protrusions, so as to provide stable support for the microspheres 3, improve stress uniformity of the microspheres 3, reduce processing difficulty of the template mold 1, and facilitate subsequent microlens array production. It should be noted here that, in actual production, other shapes of the pits 2, such as hemispherical pits 2 and inverted truncated cone-shaped pits 2, may also be selected according to the target microlens array, so as to improve the flexibility of microlens array production.
Specifically, the template mold 1 may be machined using a laser, and the laser machined pits 2 provide guidance for the microspheres 3. In practice, it is also possible to manufacture the protruded prism structures by cutting, and transfer the corresponding template mold 1 with the pits 2 by using PDMS (polydimethylsiloxane).
It is emphasized that the dimensions of the pits 2 are matched with the dimensions of the microspheres 3, so that the pits 2 can provide guidance for the microspheres 3 and fix the microspheres 3 in the production process, and the stability of the microspheres 3 in the production process is improved, and the centers of the microspheres 3 are positioned at the top of the template mold 1.
More specifically, the microspheres 3 are made of a silica material, and the microspheres 3 made of the silica material have stable chemical properties, so that the processing precision of the microlens array can be improved. The mechanism of the template-oriented ordered self-assembled monolayer film is that the microspheres 3 form a two-dimensional ordered monolayer film which is tightly arranged on the template mold 1 by utilizing the difference of the driving force of the bottom-layer microspheres 3 and the upper multi-layer microspheres 3 under the combined action of the acting forces such as adhesion, rolling friction, gravity and the like. The relative humidity of the air in the self-assembled environment is therefore as low as possible, reducing the adhesion of the ball/ball contact pair, thereby increasing the difference in the driving force of the upper and lower microspheres 3.
Further, template mould 1 is split type structure, assembles according to the demand split, can be according to actual production demand, adjusts template mould 1's processing parameter to realize the controllable manufacturing of microlens array interval, angle. In other embodiments of the present invention, the template mold 1 is assembled from adjacent quadrangles, adjacent height-varying quadrangles (with varying aperture sizes and constant self-assembled bead diameters), adjacent hexagons, and spacing-varying adjacent tetrahedrons to complete the image of the regional self-assembly and improve the production flexibility of the microlens array. As shown in fig. 5 to 7 of the accompanying drawings, two forms of the microspheres 3 which are self-assembled and then form an adjacent square array and an adjacent hexagonal array are respectively listed, and two different states of the template mold 1 are also listed, the template mold 1 is manufactured by adopting a cutting processing mode, taking the microspheres 3 which are self-assembled and then form an adjacent hexagonal array as an example, the microlens array is a close-packed hexagon, the template mold 1 is processed by adopting a single-point diamond fly-cutting mode, and the effective regulation and control of the microlens array are finally realized by adjusting the fly-cutting depth, the cutter angle, the cutting staggered angle and the cutting period.
It should be noted that the residual photoresist 4 on the substrate mold 5 can be removed by cleaning to obtain the microlens array mold 6, which is convenient for subsequent production.
According to the method for processing the micro-lens array, the micro-lens array is prepared by self-assembling the guide microspheres 3 through the pits 2 and combining an etching method, the micro-lens array is regulated and controlled by utilizing the aperture spacing, the position and the size of the microspheres 3, the preparation process is simple, the arrangement mode of the micro-lens array is controllable, the obtained micro-lens array mold 6 can be repeatedly used, the mass production is convenient, and the processing of the micro-lens array made of various optical materials (glass, resin and the like) can be realized. Meanwhile, by adopting the method for processing the micro lens array, flexible regional self-assembly can be realized, the application scene of the micro lens array is greatly widened, and a new method is provided for improving the flexibility and efficiency of a lens array mould.
Interpretation of terms:
controllable self-assembly technology: self-assembly is a broad concept, a process that spontaneously forms order from disorder, extending from microscopic to macroscopic scales. The self-assembly process refers to the simultaneous and spontaneous association and aggregation of a large number of tiny particles to form a compact and ordered whole, and the self-assembly is a complex synergistic effect of the whole. Such global complications include the type of force action between particles, the physical morphology of the template, hydrophobicity between the template material and the particles, electrostatic forces. Functional fabrication requires that the self-assembly process be controllable, and the self-assembly steering be controlled by controlling physical conditions.
Etching processing: etching is the process of selectively removing unwanted material from a target surface by chemical or physical means, with the primary objective being to correctly replicate the mask pattern by removing unprotected portions of the workpiece to be processed. With the development of micro-fabrication technology, etching is a general term for stripping and removing materials by solution, reactive ion or other mechanical means, which is a common name for micro-fabrication.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (5)
1. A method for processing a micro lens array is characterized by comprising the following steps:
the method comprises the following steps of firstly, processing a template mould, wherein the template mould is provided with pits capable of fixing microspheres, a plurality of pits are arranged in an array shape, and the template mould is of a split structure;
step two, self-assembling an array formed by the microspheres on the template mould, wherein the arrangement mode of the array formed by the microspheres is the same as that of the array formed by the pits, and the microspheres can form a two-dimensional ordered single-layer film which is arranged tightly on the template mould;
thirdly, imprinting photoresist at a certain temperature by using the array formed by the microspheres obtained in the second step to obtain a photoresist surface microlens array pattern;
step four, the micro-lens array pattern on the photoresist obtained in the step three is transferred to a substrate mould by utilizing plasma etching;
removing the residual photoresist on the substrate mold to obtain a micro-lens array mold;
in the first step, the pits are in inverted pyramid columns.
2. The method of claim 1, wherein: in the first step, the template mould is processed by utilizing a laser processing or mechanical processing mode.
3. The method of processing a microlens array as set forth in claim 1, wherein: the specification of the concave pit is matched with that of the microsphere, and the center of the microsphere is positioned at the top of the template mold.
4. The method of processing a microlens array as set forth in claim 1, wherein: in the second step, the microspheres are made of silicon dioxide.
5. The method of processing a microlens array as set forth in claim 1, wherein: and fifthly, removing the residual photoresist on the substrate mould in a cleaning mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111001139.4A CN113687454B (en) | 2021-08-30 | 2021-08-30 | Micro-lens array processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111001139.4A CN113687454B (en) | 2021-08-30 | 2021-08-30 | Micro-lens array processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113687454A CN113687454A (en) | 2021-11-23 |
| CN113687454B true CN113687454B (en) | 2023-02-28 |
Family
ID=78583833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111001139.4A Active CN113687454B (en) | 2021-08-30 | 2021-08-30 | Micro-lens array processing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113687454B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115185022A (en) * | 2022-06-22 | 2022-10-14 | 北京理工大学 | Micro-lens array mold manufacturing method based on microsphere self-assembly |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6436265B1 (en) * | 1999-03-29 | 2002-08-20 | Canon Kabushiki Kaisha | Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array |
| CN101382734A (en) * | 2008-10-23 | 2009-03-11 | 中国科学院光电技术研究所 | Method for making nano lens array |
| CN102259832A (en) * | 2010-05-27 | 2011-11-30 | 清华大学 | Preparation method of three-dimensional nano structure array |
| CN103885102A (en) * | 2012-12-21 | 2014-06-25 | 李诚浩 | Micro-lens array device, manufacturing method thereof and solar battery module comprising the same |
| CN103915533A (en) * | 2014-04-10 | 2014-07-09 | 杭州士兰明芯科技有限公司 | Graphical substrate and inverted LED chip and manufacturing method thereof |
| CN110568530A (en) * | 2019-09-11 | 2019-12-13 | 北京理工大学 | Curved surface bionic compound eye processing method based on die forming |
-
2021
- 2021-08-30 CN CN202111001139.4A patent/CN113687454B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6436265B1 (en) * | 1999-03-29 | 2002-08-20 | Canon Kabushiki Kaisha | Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array |
| CN101382734A (en) * | 2008-10-23 | 2009-03-11 | 中国科学院光电技术研究所 | Method for making nano lens array |
| CN102259832A (en) * | 2010-05-27 | 2011-11-30 | 清华大学 | Preparation method of three-dimensional nano structure array |
| CN103885102A (en) * | 2012-12-21 | 2014-06-25 | 李诚浩 | Micro-lens array device, manufacturing method thereof and solar battery module comprising the same |
| CN103915533A (en) * | 2014-04-10 | 2014-07-09 | 杭州士兰明芯科技有限公司 | Graphical substrate and inverted LED chip and manufacturing method thereof |
| CN110568530A (en) * | 2019-09-11 | 2019-12-13 | 北京理工大学 | Curved surface bionic compound eye processing method based on die forming |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113687454A (en) | 2021-11-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8643953B2 (en) | Manufacturing optical elements | |
| TWI446020B (en) | Manufacturing miniature structured elements with tool incorporating spacer elements | |
| US9011742B2 (en) | Manufacturing micro-structured elements | |
| US6671095B2 (en) | Micro relief element and preparation thereof | |
| US8278028B2 (en) | Material pattern, and mold, metal thin-film pattern, metal pattern using thereof, and methods of forming the same | |
| KR20100091215A (en) | Articles and methods of making articles having a concavity or convexity | |
| CN113687454B (en) | Micro-lens array processing method | |
| US20060126185A1 (en) | Microlens array sheet and method for manufacturing the same | |
| CN110632828B (en) | Method for manufacturing hydrophilic and hydrophobic patterned surface on substrate and application thereof | |
| CN113703081A (en) | Method for manufacturing micro-lens array structure | |
| US8007695B2 (en) | Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects | |
| KR20190060288A (en) | Method for manufacturing micro lens array mold | |
| KR20080062154A (en) | Fabrication method of micro-lens and fabrication method of master for micro-lens | |
| JP5470934B2 (en) | Manufacturing method of fine structure | |
| JPS62161532A (en) | Manufacture of plastic lens and so on | |
| CN218728122U (en) | Preparation device of polymer micro-lens array | |
| JP2021532407A (en) | A method for manufacturing a structure having at least one curved pattern | |
| CN217181265U (en) | Light uniformizing sheet and optical device | |
| CN100368829C (en) | Optical element | |
| CN218956931U (en) | Micro-optical imaging system | |
| KR101250384B1 (en) | Mold transform and manufacturing method of mold transform, and optical sheet usinf the same | |
| JP2006035394A (en) | Manufacturing method for die for forming micro lens | |
| CN115356793A (en) | Polymer micro-lens array and preparation method thereof | |
| KR101479010B1 (en) | Mircolens Array Apparatus and Method of Manufacturing the Same and Solar Cell Module Provided Therewith | |
| Hung et al. | Facile and reliable method for fabricating tilted microlens array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |