CN115356793A - Polymer micro-lens array and preparation method thereof - Google Patents
Polymer micro-lens array and preparation method thereof Download PDFInfo
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- CN115356793A CN115356793A CN202211018704.2A CN202211018704A CN115356793A CN 115356793 A CN115356793 A CN 115356793A CN 202211018704 A CN202211018704 A CN 202211018704A CN 115356793 A CN115356793 A CN 115356793A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
Abstract
The invention provides a polymer microlens array and a preparation method thereof, wherein the preparation method of the polymer microlens array can realize rapid manufacture of a defect-free polymer microlens array at room temperature through copying the microscopic morphology of a mold and ultraviolet curing without applying external pressure, a monomer solution organizes and forms a pattern under the action of capillary force, and the monomer solution is filled into a mold cavity and is subjected to Ultraviolet (UV) curing. The invention has simple structure and operation, easy preparation of the micro-lens array and higher surface of the prepared micro-lens array.
Description
Technical Field
The invention relates to the field of optical elements, in particular to a polymer micro-lens array and a preparation method thereof.
Background
With the rapid development of optics, micro-optics and optoelectronics, microlens arrays have become one of the most common micro-optical elements. It is widely used in solar cells and Organic Light Emitting Displays (OLEDs) to improve brightness and luminous efficiency, in optical communication systems to improve coupling efficiency, and in Hartmann-Shack (H-S) wavefront sensors and CMOS imaging sensors to improve image output and sensitivity. Furthermore, it can be extended to the biomedical field, such as the use of endoscopes in cell imaging and tissue engineering. To meet the requirements of optical systems or to improve their efficiency and performance, microlens arrays with a variety of geometries (e.g., spherical, cylindrical, curved, and hexagonal) are critical to breaking the challenges of next generation micro-optics.
In response to the ever-increasing application demand of microlens arrays, various manufacturing techniques have been introduced, including ultra-precision machining, photolithography, femtosecond laser assisted wet etching, machining, inkjet printing, precision thermoforming, thermal reflow, and the like. However, most of the above microlens array manufacturing techniques are complicated and expensive, which is not suitable for mass production. In addition, the microlens surfaces produced by the above processes tend to have unexpected defects that can significantly reduce the performance of the microlenses in modulating the phase of the incident wavefront and reconstructing the holographic image. The following are examples of defects and problems in microlens arrays fabricated using prior art techniques: the micro-lens array generated by adopting the technologies such as electron beam, focused ion beam, laser direct writing and the like has high cost, time-consuming mass production and poor surface quality; the micro-lens array processed by the ultra-precision machine tool and other technologies (including single-point diamond turning) has the precision depending on the geometrical shape and the resolution of the tip of the cutter in a nanometer range, low production efficiency and high equipment cost; the precision thermoforming technique must be performed in a region above the glass transition temperature of the optical material, which results in adhesion between the optical material and the mold, making the surface quality of the microlens array poor, and easily damaging the mold surface.
In the existing design scheme, the preparation of the micro-lens array is complex, and the prepared micro-lens array has low precision.
Accordingly, there is a need for improvements and developments in the art.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a polymer microlens array and a method for manufacturing the same, which is intended to solve the problems of the prior microlens array that the manufacturing is complicated and the surface quality is low.
The technical scheme of the invention is as follows:
a method for preparing a polymer microlens array, comprising the steps of:
preparing a mould; wherein the mould is provided with a cavity;
filling a monomer solution into a cavity of the mold at room temperature;
carrying out ultraviolet curing on the monomer solution to obtain a cured layer with a convex structure;
and removing the cured layer from the mold to obtain the microlens array.
The preparation method of the polymer micro-lens array comprises the following steps that the cavity comprises a plurality of grooves distributed in an array mode and a connecting groove for connecting the grooves; the material of the mould is polymer resin or metal;
the preparation mould comprises:
providing a substrate, and etching the groove on the substrate by adopting laser;
and etching a plurality of connecting grooves on the bottom side of the groove by adopting laser to obtain the template.
The preparation method of the polymer micro-lens array is characterized in that the monomer solution is a photosensitive monomer solution; the filling of the cavity of the mold with a monomer solution at room temperature comprises:
pouring the photosensitive monomer solution onto the mold so that the photosensitive monomer solution fills the cavity by capillary action.
The preparation method of the polymer micro-lens array comprises the following steps that the curing layer comprises a connecting structure and a protruding structure, an ultraviolet curing system is arranged on one side of the mold and is opposite to the cavity, and the connecting structure is connected with the protruding structure;
the ultraviolet curing of the monomer solution to obtain a cured layer with a raised structure includes:
determining a position of the ultraviolet curing system;
and controlling the ultraviolet curing system to cure the monomer solution within a preset time according to the position of the ultraviolet curing system to obtain a connection structure and a convex structure connected with the connection structure.
The preparation method of the polymer micro-lens array comprises the following steps of (1) enabling the micro-lens array to comprise a substrate layer and a plurality of lens elements connected with the substrate layer, wherein the lens elements are arranged in an array;
said removing said cured layer from said mold, resulting in said microlens array comprising:
removing the engagement structures and the raised structures from the mold structure to obtain the base layer and the lens elements.
The preparation method of the polymer micro-lens array comprises the following steps of providing a substrate, and before etching the groove on the substrate by adopting laser, further comprising the following steps:
determining a shape size and number of the lens elements;
the size of the groove and the size and number of the connecting grooves are determined according to the size and number of the lens elements.
The preparation method of the polymer micro-lens array is characterized in that the viscosity of the monomer solution is more than 1000 cPas second.
The method for preparing the polymer micro-lens array is characterized in that the lens elements are in a convex shape or a concave shape, and the cross section of the lens elements is circular or hexagonal.
The preparation method of the polymer micro-lens array is characterized in that the cross section of the lens element is circular, and the size of the lens element ranges from 20 micrometers to 600 micrometers.
A polymer microlens array, wherein the polymer microlens array is prepared by the preparation method of any one of the polymer microlens arrays.
Has the advantages that: the preparation method of the polymer micro lens array can realize the rapid manufacture of the defect-free polymer micro lens array under the condition of not applying external pressure by copying the micro morphology of the mold and ultraviolet curing at room temperature, the monomer solution organizes and forms patterns under the action of capillary force, and the monomer solution is filled into a mold cavity and is cured by Ultraviolet (UV). The invention has simple structure and operation, easy preparation of the micro-lens array and higher surface quality of the prepared micro-lens array.
Drawings
FIG. 1 is a flow chart of a method for fabricating a polymer microlens array according to the present invention.
Fig. 2 is a top view of a polymer microlens array of the present invention as circular positive lens elements.
Fig. 3 is a cross-sectional view of the circular positive lens element of fig. 2 of the present invention.
Fig. 4 is a top view of a polymer microlens array of the present invention as hexagonal positive lens elements.
Fig. 5 is a cross-sectional view of the hexagonal positive lens element of fig. 4 in accordance with the present invention.
FIG. 6 is a curved surface plot of the surface quality of the microlens array of the present invention as a function of the monomer solution viscosity.
Description of the reference numerals:
1. a mold; 2. a monomer solution; 3. an ultraviolet curing system; 4. a microlens array; 5. a lens element; 6a, incident light; 6b, emitting light.
Detailed Description
The present invention provides a polymer microlens array and a method for manufacturing the same, and the present invention will be described in further detail below in order to make the objects, technical solutions, and effects of the present invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly connected to the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It should be further noted that the same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms may be understood by those skilled in the art according to specific circumstances.
In response to the ever-increasing application requirements of microlens arrays, various manufacturing techniques have been introduced, including ultra-precision machining, photolithography, femtosecond laser assisted wet etching, machining, inkjet printing, precision thermoforming, thermal reflow, and the like. However, most of the above microlens array manufacturing techniques are complicated and expensive, which is not suitable for mass production. In addition, the microlens surfaces produced by the above processes tend to have unexpected defects that can significantly reduce the performance of the microlenses in modulating the phase of the incident wavefront and reconstructing the holographic image. The following are examples of defects and problems in microlens arrays fabricated using prior art techniques: the micro-lens array generated by adopting the technologies of electron beams, focused ion beams, laser direct writing and the like has high cost, time-consuming mass production and poor surface quality; the micro lens array processed by ultra-precision machine tool and other technologies (including single-point diamond turning) has the precision depending on the geometric shape and the resolution of the tip of the cutter in a nanometer range, low production efficiency and high equipment cost; the precision thermoforming technique must be performed in a region above the glass transition temperature of the optical material, which results in adhesion between the optical material and the mold, making the surface quality of the microlens array poor, and easily damaging the mold surface.
In the existing design scheme, the preparation of the micro-lens array is complex, so that the production efficiency is low, the production cost is high, and the prepared micro-lens array has low precision.
As used herein, the term "microlens" refers to a lens having a size (e.g., diameter) in the range of about 0.1 micron to about 1000 microns. The term "diameter" corresponds to the largest cross-sectional dimension.
In order to solve the above problems, the present invention provides a method for manufacturing a polymer microlens array, which can rapidly manufacture a defect-free polymer microlens array without applying external pressure by reproducing a micro-topography of a mold and Ultraviolet (UV) curing at room temperature.
As shown in fig. 1 to 4, the microlens array 4 includes a substrate layer and a plurality of lens elements 5 connected to the substrate layer, and the plurality of lens elements 5 are arranged in an array.
As shown in fig. 1, the apparatus for manufacturing a polymer microlens array includes:
the mould comprises a mould 1, wherein a cavity is formed in the mould 1;
and the ultraviolet curing system 3 is positioned on one side of the mould 1, and the ultraviolet curing system 3 is arranged opposite to the cavity.
Specifically, the cavity of the mold 1 includes a plurality of grooves distributed in an array and a plurality of connecting grooves connecting the grooves, the connecting grooves are located at one side close to the ultraviolet curing system 3, and the grooves are located at one side away from the ultraviolet curing system 3.
Furthermore, the number of the connecting grooves is one, the number of the grooves is 25, and the 25 grooves are arranged in a rectangular array with 5 rows and 5 columns; the spread groove is the rectangle form, and every recess groove is the same circular of size.
The material of the mould is polymer resin or metal. Further, the material can be two-component RTV silicon rubber, polypropylene, polystyrene, polyethylene, polycarbonate and polymethyl methacrylate.
In some implementations, the microlens array 4 is an N × M array, N and M being the number of rows and columns, respectively, of the microlens array 4, each lens element 5 having a diameter W1 and a thickness d1. The increase or decrease in the size of each lens, as well as the number of arrays, can be customized by changing the micro-cavities of the mold. The individual lenses shown in fig. 1 or fig. 2 are circular, but it is possible to customize microlens arrays of various geometries and sizes by modifying the characteristics of the mold cavities.
Specifically, the lens elements 5 are circular in cross section and arranged in a rectangular array with 5 rows and columns, the base layer is rectangular, the base layer connects the plurality of lens elements 5 together, and the size of the base layer is that the diameter of each lens element is W1 and the thickness of each lens element is d1.
In some implementations, the lens element 5 is convex or concave, as shown in fig. 3 or 5. The lens elements 5 prepared in this embodiment are convex (i.e., circular positive lens elements 5), the lens elements 5 can be shaped according to the requirements of the microlens array 4, each convex lens element 5 can be used to direct an incident light ray 6a to a focal point, and an emergent light ray is shown as 6 b. Thus, the microlens array 4 can project the N × M different light rays to different focal points individually.
In some implementations, the lens elements 5 are circular or hexagonal in cross-section, as shown in fig. 2 or 5. Specifically, the microlens array 4 has one of a spherical shape, a cylindrical shape, a curved surface, or a hexagonal shape.
The lens elements are convex or concave, the cross section of the lens elements is circular, the size of the lens elements ranges from 20 micrometers to 600 micrometers, and the specific diameter of the lens elements can be 26 micrometers, 46 micrometers, 100 micrometers, 150 micrometers and 300 micrometers.
As shown in fig. 1, a method for manufacturing a polymer microlens array is based on the above microlens array (not a method common to other products), and the method includes the steps of:
s100, preparing a mold; wherein the mold is provided with a cavity.
The step S100 specifically includes:
step S110, determining the shape size and the number of the lens elements;
step S120, determining the shape and size of the groove and the shape and size and number of the connecting groove according to the shape and size and number of the lens elements;
step S130, providing a substrate (silicon substrate), and etching the groove on the substrate by adopting laser;
and S140, etching a plurality of connecting grooves on the bottom sides of the grooves by adopting laser to obtain the template.
Specifically, the shape of the lens element 5 includes a circle or a hexagon, and the dimensions include the lens element diameter and thickness, and the side length and thickness of the base layer, so that the shape dimension and the number of cavities (including a groove and a plurality of connecting grooves) on the mold are designed within an error range, and then the groove and the connecting groove are etched on the substrate by laser, and the mold having the target geometry is generated.
The step S100 further includes:
the size and number of the lens elements are determined according to the desired optical characteristics of the microlens array. Specifically, the control of the geometry and dimensions of the individual lenses is achieved by pre-designing the appropriate mold cavities and geometries according to the optical characteristics required for a particular application.
It should be noted that the key to the simulated manufacture of microlens arrays 4 of different sizes and shapes is that the monomer solution is organized and patterned under the action of capillary force, and the photosensitive monomer solution is filled into the cavity of the mold 1 and cured by Ultraviolet (UV) light through the capillary action. The method for preparing the micro-lens array can improve the production efficiency, and is simple and does not need expensive equipment.
The mold of the present invention with the microfeatures that serve as a negative lens array can meet the optical characteristics of the microlens array, and the microlens array can be customized to have a variety of geometries and sizes by using various sizes and shapes of micro-cavities in the mold. Meanwhile, the die cannot be damaged in the machining process and can be repeatedly used for batch production.
And S200, filling the monomer solution into a cavity of the mold at room temperature.
The monomer solution is a photosensitive monomer solution.
As used herein, the term "capillary action" refers to: the capillary tube can be used for naturally raising or lowering liquid which is wetted or non-wetted with the tube wall. This force is directed in the direction in which the concave surface of the liquid is facing, and its magnitude is directly proportional to the surface tension of the liquid and inversely proportional to the capillary radius. Often present in the formation capillary pores as a pressure differential across a tortuous interface of two immiscible liquids (e.g., oil and water).
Since the undried water-based pigment filter cake has a complex microstructure, when pigment particles are surrounded by an oil phase, a contact angle is less than 90 degrees, and infiltration can occur, the capillary aperture inside the particles is related to the capillary pressure difference, the thinner the capillary is, the higher the infiltration force of the solvent is, but due to the uneven capillary and poor regularity, the infiltration rates of the particles in different areas of the oil phase are different, so that water is surrounded by oil before being completely replaced by the oil, and a small amount of water cannot be completely replaced and remains inside the particles; however, the general tendency of capillary action is to facilitate the transfer of the pigment molecules to the oil phase, which spontaneously wets the aggregated particle surface under agitation and gradually disintegrates in the oil phase, eventually allowing the oil to enter the interior of the pigment particles and the water to drain away, provided that the pigment particles are somewhat oleophilic.
The step S200 specifically includes:
step S210, pouring the monomer solution onto the mold so that the cavity is filled with the monomer solution through capillary action.
The photosensitive monomer solution pouring device is characterized in that a capillary structure is arranged on the bottom wall (inner wall) of the cavity, the capillary structure is in contact with the monomer solution and has a capillary action, the photosensitive monomer solution poured into the cavity can naturally descend through the capillary structure, so that the photosensitive monomer solution infiltrates the whole cavity, and the lower surface and the upper surface of the monomer solution are round cambered surfaces.
As used herein, the term "monomer solution" (photosensitive monomer solution) refers to a solution of small molecules that can be covalently linked to the same species or other molecules to form a polymer. Compared with other prior art, the reason for the good surface quality of the microlens array is mainly that the microlens array with the surface quality (such as roughness) higher than that of the mold can be obtained by regulating and controlling the performance of the monomer solution.
As shown in FIG. 1, a monomer solution 2 is filled into a mold cavity by capillary action to produce an array of concave or convex lenses of different sizes and geometries as desired.
The step S210 includes:
and step S211, determining the viscosity of the monomer solution.
The different viscosity monomer solutions fill the mold cavities by capillary action, thereby creating mold cavities with different geometries. This simple technique is suitable for designing and manufacturing different types of microlens arrays for specific applications, such as spheres, hexagons, cylinders, etc.
It is to be noted that the monomer solution is poured into the mould 1, this process being carried out at room temperature and without the application of pressure; the physical properties of the monomer solution, such as viscosity and the effect of capillary action on the surface quality of the microlens array, can be used as a universal monomer solution in a single manufacturing process, not limited to a particular replication mold, but can be applied to mold cavities of a variety of geometries and sizes.
And step S300, carrying out ultraviolet curing on the monomer solution to obtain a cured layer with a convex structure.
In some implementations, the cured layer includes a connection structure and a protrusion structure, an ultraviolet curing system is disposed on one side of the mold, the ultraviolet curing system is disposed opposite to the cavity, and the connection structure is connected to the protrusion structure.
The invention does not need expensive processing technology and special skill and labor. A versatile microlens array having a relief geometry and size is produced in combination with microreplication and Ultraviolet (UV) coupling processes, thereby reducing the complexity of microlens array fabrication.
The step S300 specifically includes:
step S310, determining the position of the ultraviolet curing system;
and S320, controlling the ultraviolet curing system to cure the monomer solution within a preset time according to the position of the ultraviolet curing system to obtain a connection structure and a convex structure connected with the connection structure.
Specifically, the step S310 further includes:
and step S311, determining the wavelength of the ultraviolet curing system.
Specifically, the monomer solution 2 completely fills the cavity by capillary action and is cured by an ultraviolet curing system 3 of an appropriate wavelength to finally obtain a cured layer similar to a polymer microlens array.
It is to be noted that a specific Ultraviolet (UV) curing system, which is set at a proper distance to cure the monomer solution 2 with a proper intensity in a short time; the surface quality of the replica mold determines the surface quality of the microlens array, and therefore, ultraviolet (UV) polymerization manufacturing techniques are used; ultraviolet (UV) polymerization techniques control the geometry and dimensions of microlens arrays by filling the mold cavities via capillary action, using a specific Ultraviolet (UV) curing system for the monomer solution.
Step S400, removing the cured layer from the mold, and obtaining the microlens array.
The step S400 specifically includes:
step S410, removing the engaging structure and the protruding structure from the mold structure to obtain a substrate layer and the lens element.
The microlens array 4 prepared by the preparation method of the present invention is produced by a simple, direct and cost-effective manufacturing technique, and compared with the microlens array manufactured by the conventional technique, the microlens array 4 has high preparation efficiency and simple preparation, and can produce better surface quality without defects.
In some implementations, the viscosity of the monomer solution is above 1000 cp.
Specifically, the viscosity of the monomer solution is 1500 cP sec (cps) or more and 3000 cP sec or less. Preferably, the viscosity of the monomer solution is 1700 cps.
Note that the surface quality of the polymer lens is affected by the viscosity of the monomer solution, as shown in fig. 6; the geometry and dimensions of the lens array can be adjusted to any desired change by adjusting the mold cavity, taking monomer solutions with different viscosities as an example, and fig. 6 is a functional relationship between the surface quality of the resulting microlens array and the viscosity of the monomer solution.
The preparation method is simple, direct, high in precision and high in productivity, can effectively simplify the manufacturing process of the defect-free polymer micro-lens array, and reduces the manufacturing cost; by combining mold replication and Ultraviolet (UV) polymerization techniques, microlens arrays with concave-convex geometries that are easy to customize are rapidly fabricated, mass production of defect-free microlens arrays is achieved, production efficiency of defect-free structures and multiple sizes is improved, and the application requirements of increasingly miniaturized optoelectronic devices are met, thereby playing an important role in the fabrication of microlens arrays for a polymer microreplication process with high cost effectiveness. More specifically, the present technique is carried out at room temperature and without the application of pressure. In addition, the invention is suitable for most polymers with low viscosity, and the master model can be used for many times without further processing.
In summary, the present invention provides a polymer microlens array and a method for manufacturing the same, in which the method for manufacturing the polymer microlens array of the present invention can rapidly manufacture a defect-free polymer microlens array without applying external pressure by replicating the micro-topography of a mold at room temperature and ultraviolet curing, a monomer solution organizes and forms a pattern by capillary force, and the monomer solution is filled into a cavity of the mold and Ultraviolet (UV) cured. The invention has simple structure and operation, the preparation of the micro-lens array is easy, and the prepared micro-lens array has higher surface.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A method of making a polymer microlens array, comprising the steps of:
preparing a mould; wherein the mould is provided with a cavity;
filling a monomer solution into a cavity of the mold at room temperature; wherein the monomer solution has a capillary action on the inner wall of the cavity;
carrying out ultraviolet curing on the monomer solution to obtain a cured layer with a convex structure;
and removing the cured layer from the mold to obtain the microlens array.
2. The method for manufacturing a polymer microlens array as claimed in claim 1, wherein the cavity comprises a plurality of grooves distributed in an array and a connecting groove connecting the plurality of grooves; the material of the mould is polymer resin or metal;
the preparation mould comprises:
providing a substrate, and etching the groove on the substrate by adopting laser;
and etching a plurality of connecting grooves on the bottom side of the groove by adopting laser to obtain the template.
3. The method of manufacturing a polymer microlens array as claimed in claim 1, wherein the monomer solution is a photosensitive monomer solution;
at room temperature, filling the cavity of the mold with a monomer solution, including:
pouring the photosensitive monomer solution onto the mold so that the photosensitive monomer solution fills the cavity by capillary action.
4. The method of claim 3, wherein the cured layer comprises an engaging structure and a protruding structure, the mold has a UV curing system on one side, the UV curing system is opposite to the cavity, and the engaging structure is connected to the protruding structure;
the ultraviolet curing of the monomer solution to obtain a cured layer with a raised structure includes:
determining a position of the ultraviolet curing system;
and controlling the ultraviolet curing system to cure the monomer solution within a preset time according to the position of the ultraviolet curing system to obtain a connection structure and a convex structure connected with the connection structure.
5. The method of claim 4, wherein the microlens array comprises a substrate layer and a plurality of lens elements connected to the substrate layer, the plurality of lens elements being arranged in an array;
said removing said cured layer from said mold, resulting in said microlens array comprising:
removing the engagement structures and the raised structures from the mold structure to obtain the base layer and the lens elements.
6. The method of claim 5, wherein before the step of etching the groove on the substrate by the laser, the step of providing a substrate further comprises:
determining a shape size and number of the lens elements;
the size of the shape of the groove and the size and number of the connection grooves are determined according to the size and number of the lens elements.
7. The method of claim 3, wherein the viscosity of the monomer solution is 1000 cP-sec or more.
8. The method of claim 5, wherein the lens elements have a convex or concave shape, and the cross-section of the lens elements has a circular or hexagonal shape.
9. The method of claim 8, wherein the lens elements are circular in cross-section and have a size in the range of 20 to 600 microns.
10. A polymer microlens array produced by the method for producing a polymer microlens array according to any one of claims 1 to 9.
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