CN113666112A - Automatic change two-dimensional material transfer device - Google Patents
Automatic change two-dimensional material transfer device Download PDFInfo
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- CN113666112A CN113666112A CN202110954685.3A CN202110954685A CN113666112A CN 113666112 A CN113666112 A CN 113666112A CN 202110954685 A CN202110954685 A CN 202110954685A CN 113666112 A CN113666112 A CN 113666112A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/914—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems incorporating rotary and rectilinear movements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/44—Sample treatment involving radiation, e.g. heat
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Abstract
The invention is suitable for the field of automation, and provides an automatic two-dimensional material transfer device, which comprises a transfer table and a sample table, wherein the transfer table is arranged on the sample table; the sample stage comprises a sample seat, a heat insulation stage, a vacuum component, a rotary displacement stage, a first XY axis displacement stage and a sample stage base; the transfer table comprises a transfer arm, a coarse Z-axis displacement table, a fine Z-axis displacement table, a pitching deflection displacement table, a second XY-axis displacement table and a transfer table base. The invention fixes the sample and the glass slide for transfer through automatic operation and freely controls the position of the sample and the glass slide for transfer, thereby realizing the transfer in the vacuum ultra-clean glove box, namely realizing the electric control full-automatic operation with repeatability and accurate positioning, and being worth popularizing.
Description
Technical Field
The invention belongs to the field of automation, and particularly relates to an automatic two-dimensional material transfer device.
Background
The two-dimensional material provides possibility for exceeding the physical limit of the traditional material in the nanometer scale by the thickness of the two-dimensional material in the atomic scale, and provides opportunity for device development based on a novel principle.
A plurality of two-dimensional materials are stacked into a Van der Waals heterojunction through an artificial controllable method, and the method is an effective way for exploring a novel object state of the two-dimensional materials and developing a two-dimensional material-based functionalized device. In the process of constructing van der waals heterojunctions, precise control over the transfer and stacking of two-dimensional materials is required, and a clean two-dimensional interface is realized.
In assembling van der waals heterojunctions, it is currently common practice to achieve stacking of different two-dimensional materials by polymer-assisted methods using dry or wet methods. In the transferring process, the transferring device is required to support the movement, rotation and deflection of the transfer glass slide adhered with the polymer, control the temperature of the sample, realize the fixation of the transfer object sample and the like, and further realize the transferring and stacking process with accurate position.
The existing transfer device also has the following defects:
1) the number of shafts is small, the degree of freedom of adjustment is limited, and meanwhile, the control precision is low;
2) most realize the sample and transfer the fixed with slide glass through magnetism, sticky or mechanical fastening's mode, too much manual operation has introduced more restraint conditions for two-dimensional material transfer process, has restricted the control of transfer in-process heating temperature, has hindered transfer device's further automation, has restricted the possibility that transfer process was accomplished in ultra-clean glove box simultaneously.
Therefore, in view of the above situation, there is a need to develop an automatic two-dimensional material transfer device to overcome the shortcomings of the current practical application.
Disclosure of Invention
An object of an embodiment of the present invention is to provide an automatic two-dimensional material transfer device, which is to solve the above-mentioned problems in the background art.
The embodiment of the invention is realized in such a way that the automatic two-dimensional material transfer device comprises a transfer table and a sample table; the sample stage comprises a sample seat, a heat insulation stage, a vacuum component, a rotary displacement stage, a first XY axis displacement stage and a sample stage base, wherein the first XY axis displacement stage, the rotary displacement stage and the vacuum component are sequentially arranged on the sample stage base from bottom to top; the first XY axis displacement table is used for driving the rotary displacement table, the sample seat, the heat insulation table and the vacuum component to move in a horizontal plane; the rotary displacement table is used for driving the vacuum component, the sample seat and the heat insulation table to rotate; the sample seat is used for being matched with a first vacuum pump to adsorb and fix a sample, so that the sample moves along with the sample seat; the transfer table comprises a transfer arm, a coarse-adjustment Z-axis displacement table, a fine-adjustment Z-axis displacement table, a pitching deflection displacement table, a second XY-axis displacement table and a transfer table base, wherein the second XY-axis displacement table, the pitching deflection displacement table, the fine-adjustment Z-axis displacement table, the coarse-adjustment Z-axis displacement table and the transfer arm are sequentially arranged on the transfer table base from bottom to top; the second XY axis displacement table is used for driving the transfer arm, the coarse adjustment Z axis displacement table, the fine adjustment Z axis displacement table and the pitching deflection displacement table to move in a horizontal plane; the pitching deflection displacement table is used for driving the transfer arm, the coarse Z-axis displacement table and the fine Z-axis displacement table to perform pitching adjustment in two directions; the coarse adjustment Z-axis displacement table and the fine adjustment Z-axis displacement table are used for driving the transfer arm to move longitudinally; the transfer arm is used for being matched with a second vacuum pump to adsorb and fix the glass slide for transfer, so that the glass slide for transfer moves along with the transfer arm.
According to the further technical scheme, the sample stage base and the transfer stage base are fixed on the porous fixing plate or the optical flat plate at a certain distance.
According to a further technical scheme, the heat insulation table is made of heat insulation materials and used for isolating heat transfer between the sample seat and the vacuum component.
According to a further technical scheme, the vacuum component is connected with the rotary displacement table through a first adapter piece; the rotary displacement table is connected with the first XY axis displacement table through a second adaptor.
According to a further technical scheme, a sample adsorption hole is formed in the sample seat, and a first vacuum pump interface is formed in the vacuum component; the sample adsorption hole longitudinally penetrates through the sample seat, the sample adsorption hole is also communicated with a hole longitudinally penetrating through the center of the heat insulation table, the hole in the center of the heat insulation table is also communicated with a semi-through longitudinal hole in the center of the vacuum component, and the semi-through longitudinal hole in the center of the vacuum component is also communicated with a first vacuum pump interface; the air inlet of the first vacuum pump is connected to an interface of the first vacuum pump, air is exhausted through the vacuum part and the hole connected with the sample seat, namely negative pressure is created in the sample adsorption hole, and the sample is adsorbed and fixed on the sample seat under the action of pressure difference between atmospheric pressure and the negative pressure, so that the sample moves along with the sample seat.
According to the further technical scheme, a water inlet interface, a water outlet interface and a heating rod placing position are arranged on the heat insulation platform, a water cooling system is respectively connected with the water inlet interface and the water outlet interface, and the water cooling system is used for pumping away water heated in the sample seat and inputting cold water at a lower temperature, so that the sample seat is rapidly cooled; the heating rod is arranged in the heating rod placing position and used for rapidly heating the sample on the sample seat.
According to the technical scheme, a temperature detector interface is further arranged on the sample seat, the temperature detector is fixed at the temperature detector interface through heat-conducting glue, a probe of the temperature detector is completely embedded into the sample seat, and the temperature detector is used for measuring the temperature of a sample on the sample seat in real time.
According to the technical scheme, a second vacuum pump interface is arranged on the transfer arm, two longitudinal glass slide adsorption holes extend from the end of the second vacuum pump interface, an air inlet of a second vacuum pump is connected to the second vacuum pump interface for air exhaust, negative pressure is created in the glass slide adsorption holes of the transfer arm, and the glass slide for transfer, which is adhered with the polymer, is fixed under the transfer arm and moves along with the transfer arm under the pressure difference between atmospheric pressure and the negative pressure.
According to the automatic two-dimensional material transfer device provided by the embodiment of the invention, a vacuum adsorption fixing mode and a combination of a multi-shaft full-electric displacement table are mainly adopted, so that a sample and a transfer glass slide can be fixed through automatic operation and the position of the sample and the transfer glass slide can be freely controlled, and the transfer in a vacuum ultra-clean glove box is realized. Through operating a rocker or computer software outside the glove box, the vertical movement, the horizontal movement, the rotation, the deflection of the transfer arm, the adsorption and fixation of a sample and the like can be controllably and easily realized, the instability of manual operation and the possibility of introducing impurities are greatly avoided, the high-quality, repeatable and automatic transfer supporting the operation in the glove box is realized, and the electric control full-automatic operation with repeatability and accurate positioning is realized.
Drawings
Fig. 1 is a schematic perspective view of an automated two-dimensional material transfer apparatus according to an embodiment of the present invention;
fig. 2 is a schematic front view of an automated two-dimensional material transfer apparatus according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a right-view structure of an automated two-dimensional material transfer device according to an embodiment of the present invention;
fig. 4 is a schematic top view of an automated two-dimensional material transfer apparatus according to an embodiment of the present invention.
In the figure: 1-a temperature detector interface, 2-a sample seat, 3-a water inlet interface, 4-a water outlet interface, 5-a heat insulation platform, 6-a vacuum component, 7-a heating rod placing position, 8-a sample adsorption hole, 9-a heating rod fixing hole, 10-a heat insulation platform fixing hole, 11-a first vacuum pump interface, 12-a first adapter, 13-a rotary displacement platform, 14-a second adapter, 15-a first XY axis displacement platform, 16-a sample platform base, 17-a transfer arm, 18-a glass slide adsorption hole, 19-a coarse adjustment Z axis displacement platform, 20-a fine adjustment Z axis displacement platform, 21-a pitching deflection displacement platform, 22-a second XY axis displacement platform, 23-a transfer platform base, 24-a second vacuum pump interface and 100-a transfer platform, 200-sample stage.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Specific implementations of the present invention are described in detail below with reference to specific embodiments.
As shown in fig. 1 to 4, an automated two-dimensional material transfer apparatus provided for one embodiment of the present invention includes a transfer stage 100 and a sample stage 200;
the sample stage 200 comprises a sample base 2, a heat insulation stage 5, a vacuum part 6, a rotary displacement stage 13, a first XY axis displacement stage 15 and a sample stage base 16, wherein the first XY axis displacement stage 15, the rotary displacement stage 13 and the vacuum part 6 are sequentially arranged on the sample stage base 16 from bottom to top, the heat insulation stage 5 is arranged on the vacuum part 6, and the sample base 2 is arranged on the heat insulation stage 5.
The first XY axis displacement table 15 is used for driving the rotary displacement table 13, the sample seat 2, the heat insulation table 5 and the vacuum component 6 to move in a horizontal plane; the rotary displacement table 13 is used for driving the vacuum component 6, the sample holder 2 and the heat insulation table 5 to rotate; the sample holder 2 is used for matching with a first vacuum pump to adsorb and fix a sample, so that the sample moves along with the sample holder 2.
The transfer table 100 comprises a transfer arm 17, a coarse Z-axis displacement table 19, a fine Z-axis displacement table 20, a pitching deflection displacement table 21, a second XY-axis displacement table 22 and a transfer table base 23, wherein the second XY-axis displacement table 22, the pitching deflection displacement table 21, the fine Z-axis displacement table 20, the coarse Z-axis displacement table 19 and the transfer arm 17 are sequentially arranged on the transfer table base 23 from bottom to top.
The second XY axis displacement table 22 is used for driving the transfer arm 17, the coarse adjustment Z axis displacement table 19, the fine adjustment Z axis displacement table 20 and the pitching deflection displacement table 21 to move in a horizontal plane; the pitch deflection displacement table 21 is used for driving the transfer arm 17, the coarse Z-axis displacement table 19 and the fine Z-axis displacement table 20 to perform pitch adjustment in two directions; the coarse Z-axis displacement table 19 and the fine Z-axis displacement table 20 are used for driving the transfer arm 17 to move longitudinally; the transfer arm 17 is used for being matched with a second vacuum pump to adsorb and fix the transfer glass slide, so that the transfer glass slide moves along with the transfer arm 17.
Further, the stage base 16 and the transfer stage base 23 are fixed to a multi-well fixing plate or an optical flat plate at the same time at a suitable distance.
Further, the sample holder 2 is coaxially fixed on the thermal insulation table 5 by screws at four corners, and the screws on the sample holder 2 pass through thermal insulation table fixing holes 10 in the vacuum part 6 to fix the thermal insulation table 5 and the sample holder 2.
Further, the thermal insulation table 5 is made of thermal insulation material (such as mica, glass fiber, ceramic, etc.), and can be fixed by screws penetrating through the thermal insulation table fixing holes 10 in the vacuum component 6, so as to separate the sample holder 2 from the vacuum component 6, and the lower rotary displacement table 13 from the first XY-axis displacement table 15, thereby avoiding the high temperature of the sample holder from being conducted to the electric displacement table to cause serious damage to the motor, the welding interface, etc.
Further, the vacuum component 6 is connected with a rotary displacement table 13 through a first transfer member 12; the rotary displacement table 13 is connected to a first XY-axis displacement table 15 via a second adaptor 14.
Furthermore, a temperature detector interface 1 and a sample adsorption hole 8 are arranged on the sample seat 2, a water inlet interface 3, a water outlet interface 4, a heating rod placing position 7 and a heating rod fixing hole 9 are arranged on the heat insulation platform 5, a heat insulation platform fixing hole 10 and a first vacuum pump interface 11 are arranged on the vacuum component 6, the sample adsorption hole 8 longitudinally penetrates through the sample seat 2, the sample adsorption hole 8 is also communicated with a hole longitudinally penetrating through the center of the heat insulation platform 5, the hole at the center of the heat insulation platform 5 is also communicated with a semi-through longitudinal hole at the center of the vacuum component 6, and the semi-through longitudinal hole at the center of the vacuum component 6 is also communicated with the first vacuum pump interface 11.
The air inlet of the first vacuum pump is connected to the first vacuum pump interface 11, the air is exhausted through the holes connected with the vacuum part 6 and the heat insulation table 5 in the sample holder 2, negative pressure is created in the sample adsorption hole 8 below the sample holder 2, and the sample is firmly fixed on the sample holder 2 under the action of the pressure difference between atmospheric pressure and the negative pressure, so that the sample moves along with the sample holder 2.
The water cooling system is respectively connected with the water inlet interface 3 and the water outlet interface 4, water heated and heated in the sample holder 2 is pumped out, and then cold water with lower temperature is input, so that the sample holder 2 is rapidly cooled.
The heating rod is placed in the heating rod placing position 7, and the high-power heating rod fixed in the sample holder 2 through the heating rod fixing holes 9 (preferably, two heating rod fixing holes 9 are provided on the sample holder 2) can realize rapid heating of the sample.
The temperature detector is fixed at the interface 1 of the temperature detector by heat-conducting glue, the probe of the temperature detector is completely embedded into the sample seat 2, and the fixed position is very close to the surface of the sample seat 2, so that the real-time temperature of the sample can be accurately measured.
The power through adjusting the heating rod can realize rapid heating up, can realize rapid cooling through the water flow rate who adjusts the water-cooling system to the temperature that the thermoscope measured is as the feedback, carries out closed loop's accuse temperature to sample holder 2, thereby realizes accurate measurement and quick regulation and control to the sample temperature, supplementary transfer process goes on smoothly.
Furthermore, a second vacuum pump interface 24 which is transverse and does not completely penetrate through is arranged on the transfer arm 17, two longitudinal holes extending from the end of the second vacuum pump interface 24 are glass slide adsorption holes 18, and the glass slide adsorption holes 18 are used for adsorbing glass slides to be transferred. An air inlet of the second vacuum pump is connected to a second vacuum pump interface 24 for air suction, negative pressure is created in the glass slide adsorption hole 18 of the transfer arm 17, and the transfer glass slide adhered with the polymer is fixed below the transfer arm 17 and moves along with the transfer arm 17 under the pressure difference between atmospheric pressure and the negative pressure.
In addition, the vacuum pumps (i.e. the first and second vacuum pumps) can be separated from the transfer table 100 and the sample table 200 by gaskets, sandbags and the like, so that vibration isolation is realized, and the influence of vibration noise generated in the air extraction process of the mechanical vacuum pump on the transfer process is reduced.
When the sample platform 200 is applied, the rotary displacement platform 13 is fixed on the first XY axis displacement platform 15 by screws for cooperation, so that the free translation and rotation of the sample in the horizontal plane can be realized (within the range allowed by the first XY axis displacement platform 15); the coarse-adjustment Z-axis displacement table 19, the fine-adjustment Z-axis displacement table 20, the pitching deflection displacement table 21 and the second XY-axis displacement table 22 in the transfer table 100 cooperate (all the two stages are fixed by screws), so that the longitudinal movement of a transfer glass slide, the horizontal plane translation and the two-direction pitching can be realized, the sample and the transfer glass slide can freely move repeatedly, precisely positioned and automatically through full-automatic operation, and thus, the process that a polymer (generally a thick-layer PDMS (polydimethylsiloxane) is overlaid with a PC (polycarbonate) film) on the transfer glass slide automatically pick-up and drop-down a two-dimensional material on a sample substrate is realized, and the transfer success rate and quality are ensured, and the complicated steps of the transfer process are greatly simplified.
The automatic two-dimensional material transfer device mainly adopts a vacuum adsorption fixing mode (with rapid temperature control) and a combination of a multi-shaft full-electric displacement table, so that a sample and a glass slide for transfer can be fixed through automatic operation and the position of the glass slide can be freely controlled, and the transfer in a vacuum ultra-clean glove box is realized.
Through operating a rocker or computer software outside the glove box, the vertical movement, the horizontal movement, the rotation, the deflection of the transfer arm 17, the adsorption and fixation of a sample and the like can be controllably and easily realized, the instability of manual operation and the possibility of introducing impurities are greatly avoided, the high-quality, repeatable and automatic transfer supporting the operation in the glove box is realized, and the electric control full-automatic operation with repeatability and accurate positioning is realized.
Meanwhile, the high-power heating rod (namely, the heating system) and the water cooling system have the synergistic effect, so that the temperature of the sample can be quickly adjusted, the temperature can be quickly and accurately controlled, and the success rate and the quality of transfer are further improved.
In addition, the specific type and circuit connection of each electrical component are not particularly limited, and can be flexibly set in actual application. The circuits, electronic components and modules referred to are well within the art of prior art and, needless to say, the present invention is not directed to software or process improvements.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. The utility model provides an automatic change two-dimensional material transfer device, includes transfer platform and sample platform, its characterized in that:
the sample stage comprises a sample seat, a heat insulation stage, a vacuum component, a rotary displacement stage, a first XY axis displacement stage and a sample stage base, wherein the first XY axis displacement stage, the rotary displacement stage and the vacuum component are sequentially arranged on the sample stage base from bottom to top; the first XY axis displacement table is used for driving the rotary displacement table, the sample seat, the heat insulation table and the vacuum component to move in a horizontal plane; the rotary displacement table is used for driving the vacuum component, the sample seat and the heat insulation table to rotate; the sample seat is used for being matched with a first vacuum pump to adsorb and fix a sample, so that the sample moves along with the sample seat;
the transfer table comprises a transfer arm, a coarse-adjustment Z-axis displacement table, a fine-adjustment Z-axis displacement table, a pitching deflection displacement table, a second XY-axis displacement table and a transfer table base, wherein the second XY-axis displacement table, the pitching deflection displacement table, the fine-adjustment Z-axis displacement table, the coarse-adjustment Z-axis displacement table and the transfer arm are sequentially arranged on the transfer table base from bottom to top; the second XY axis displacement table is used for driving the transfer arm, the coarse adjustment Z axis displacement table, the fine adjustment Z axis displacement table and the pitching deflection displacement table to move in a horizontal plane; the pitching deflection displacement table is used for driving the transfer arm, the coarse Z-axis displacement table and the fine Z-axis displacement table to perform pitching adjustment in two directions; the coarse adjustment Z-axis displacement table and the fine adjustment Z-axis displacement table are used for driving the transfer arm to move longitudinally; the transfer arm is used for being matched with a second vacuum pump to adsorb and fix the glass slide for transfer, so that the glass slide for transfer moves along with the transfer arm.
2. The automated two-dimensional material transfer apparatus of claim 1, wherein the stage mount and the transfer stage mount are fixed on a multi-well fixing plate or an optical flat plate at a distance.
3. The automated two-dimensional material transfer apparatus of claim 1, wherein the thermal isolation station is made of a thermal insulating material for isolating heat transfer between the sample holder and the vacuum component.
4. The automated two-dimensional material transfer apparatus of claim 3, wherein the vacuum component is coupled to the rotary displacement stage via a first adapter;
the rotary displacement table is connected with the first XY axis displacement table through a second adaptor.
5. The automated two-dimensional material transfer device of claim 3, wherein the sample holder is provided with a sample adsorption hole, and the vacuum component is provided with a first vacuum pump interface;
the sample adsorption hole longitudinally penetrates through the sample seat, the sample adsorption hole is also communicated with a hole longitudinally penetrating through the center of the heat insulation table, the hole in the center of the heat insulation table is also communicated with a semi-through longitudinal hole in the center of the vacuum component, and the semi-through longitudinal hole in the center of the vacuum component is also communicated with a first vacuum pump interface;
the air inlet of the first vacuum pump is connected to an interface of the first vacuum pump, air is exhausted through the vacuum part and the hole connected with the sample seat, namely negative pressure is created in the sample adsorption hole, and the sample is adsorbed and fixed on the sample seat under the action of pressure difference between atmospheric pressure and the negative pressure, so that the sample moves along with the sample seat.
6. The automated two-dimensional material transfer device of claim 5, wherein the heat-insulating table is provided with a water inlet interface, a water outlet interface and a heating rod placement position;
the water cooling system is respectively connected with the water inlet interface and the water outlet interface and is used for pumping water heated in the sample seat and inputting cold water with lower temperature, so that the sample seat is quickly cooled;
the heating rod is arranged in the heating rod placing position and used for rapidly heating the sample on the sample seat.
7. The automated two-dimensional material transfer apparatus of claim 6, wherein the sample holder further comprises a temperature probe interface;
the temperature detector is fixed at the interface of the temperature detector by heat-conducting glue, a probe of the temperature detector is completely embedded into the sample seat, and the temperature detector is used for measuring the temperature of a sample on the sample seat in real time.
8. The automated two-dimensional material transfer device according to any one of claims 1-7, wherein a second vacuum pump port is provided on the transfer arm, and two longitudinal slide suction holes extend from the end of the second vacuum pump port;
and an air inlet of the second vacuum pump is connected to an interface of the second vacuum pump for air suction, negative pressure is created in a glass slide adsorption hole of the transfer arm, and the glass slide for transfer, which is adhered with the polymer, is fixed below the transfer arm and moves along with the transfer arm under the pressure difference between atmospheric pressure and the negative pressure.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110954685.3A CN113666112A (en) | 2021-08-19 | 2021-08-19 | Automatic change two-dimensional material transfer device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110954685.3A CN113666112A (en) | 2021-08-19 | 2021-08-19 | Automatic change two-dimensional material transfer device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
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| US20180248019A1 (en) * | 2015-08-25 | 2018-08-30 | Emberion Oy | A method for forming apparatus comprising two dimensional material |
| CN108983558A (en) * | 2018-08-03 | 2018-12-11 | 西安工业大学 | A kind of interference exposure Simple Vertical chip bench |
| CN211905851U (en) * | 2020-04-21 | 2020-11-10 | 中山大学 | Temperature-controllable two-dimensional material transfer platform |
| CN212889340U (en) * | 2020-09-10 | 2021-04-06 | 深圳市合尔为科技有限公司 | Laminating equipment |
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2021
- 2021-08-19 CN CN202110954685.3A patent/CN113666112A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180248019A1 (en) * | 2015-08-25 | 2018-08-30 | Emberion Oy | A method for forming apparatus comprising two dimensional material |
| CN108983558A (en) * | 2018-08-03 | 2018-12-11 | 西安工业大学 | A kind of interference exposure Simple Vertical chip bench |
| CN211905851U (en) * | 2020-04-21 | 2020-11-10 | 中山大学 | Temperature-controllable two-dimensional material transfer platform |
| CN212889340U (en) * | 2020-09-10 | 2021-04-06 | 深圳市合尔为科技有限公司 | Laminating equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
| CN114171362B (en) * | 2022-02-09 | 2022-05-24 | 之江实验室 | Particle transfer device and application |
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Inventor after: Yan Jingjie Inventor after: Xu Shuigang Inventor before: Yan Jingjie Inventor before: Fang Xinjie Inventor before: Xu Shuigang |