CN113644008A - A LED wafer substrate paster post-processing equipment for wisdom community - Google Patents

A LED wafer substrate paster post-processing equipment for wisdom community Download PDF

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Publication number
CN113644008A
CN113644008A CN202110787809.3A CN202110787809A CN113644008A CN 113644008 A CN113644008 A CN 113644008A CN 202110787809 A CN202110787809 A CN 202110787809A CN 113644008 A CN113644008 A CN 113644008A
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fixedly connected
plate
bevel gear
fixing
rod
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邓名楚
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

The invention relates to the technical field of electronics, in particular to an LED wafer substrate post-bonding processing device for a smart community. The technical problems of the invention are as follows: provided is an LED wafer substrate post-bonding processing device for a smart community. The technical implementation scheme of the invention is as follows: an LED wafer substrate post-chip processing device for an intelligent community comprises a bottom plate, a supporting column, a base plate, a supporting frame, a first support, a second support, a controller, a supporting plate, a transmission assembly and a wax scraping assembly; the supporting plate is fixedly connected with the bottom plate; when the invention is used, the wax layers around a plurality of wafers on a workpiece are simultaneously scraped so as to ensure the scrubbing effect, the materials used for scrubbing are saved, the scraped broken wax is collected so as to be reused, and the production cost and the treatment difficulty of the product are reduced.

Description

A LED wafer substrate paster post-processing equipment for wisdom community
Technical Field
The invention relates to the technical field of electronics, in particular to an LED wafer substrate post-bonding processing device for a smart community.
Background
The LED is called as a fourth generation illumination light source or a green light source, has the characteristics of energy saving, environmental protection, long service life, small volume and the like, is widely applied to the fields of various indications, display, decoration, backlight sources, general illumination, urban night scenes and the like, and can be divided into five categories of information display, signal lamps, vehicle lamps, liquid crystal screen backlight sources and general illumination according to different use functions.
In the prior art, a workpiece is placed on a heating table for heating during chip substrate pasting, then a layer of wax is coated on the position, corresponding to the position where an LED product chip is attached, of the workpiece, the front sides of a plurality of LED chips are attached to the wax-coated position on the workpiece, then subsequent processing is carried out, and after the subsequent processing is finished, the residual wax on the edge of the back side of the LED chip needs to be erased by using dust-free paper and absolute ethyl alcohol; the wafer pastes on the wax layer because the extrusion makes can spill over some wax layers around the wafer, directly cleans the effect not good, makes the wax layer on the surface of work piece on the contrary and spreads on a large scale, increases the processing degree of difficulty to need consume a large amount of dustless paper and absolute ethyl alcohol, extravagant material makes product manufacturing cost increase.
In summary, we propose an LED chip substrate post-processing apparatus for smart community to solve the above problems.
Disclosure of Invention
In order to overcome the defects that when wafer substrate pasting is carried out, a workpiece is firstly placed on a heating table to be heated, then a layer of wax is smeared on the position, corresponding to an LED product piece, of the workpiece, the front sides of a plurality of LED wafers are attached to the wax smearing position on the workpiece, then subsequent processing treatment is carried out, and after the subsequent processing is finished, the residual wax on the edge of the back side of each LED wafer needs to be erased by using dust-free paper and absolute ethyl alcohol; the wafer is stuck on the wax layer, and the periphery of the wafer can overflow some wax layers due to extrusion, so that the scrubbing effect is not good directly, but the wax layers are diffused on the surface of a workpiece in a large range, the processing difficulty is increased, a large amount of dust-free paper and absolute ethyl alcohol are consumed, the material is wasted, and the production cost of the product is increased, and the technical problem of the invention is that: provided is an LED wafer substrate post-bonding processing device for a smart community.
The technical implementation scheme of the invention is as follows: an LED wafer substrate post-chip processing device for an intelligent community comprises a bottom plate, a supporting column, a base plate, a supporting frame, a first support, a second support, a controller, a supporting plate, a transmission assembly and a wax scraping assembly; the bottom surface of the bottom plate is fixedly connected with the three groups of supporting columns; the three groups of support columns are fixedly connected with the group of base plates respectively; a transmission assembly is arranged on the left side above the bottom plate; the transmission component is fixedly connected with the supporting plate; the transmission assembly is rotatably connected with the support frame; the conveying assembly conveys the workpiece; the left side above the bottom plate is provided with a wax scraping component; the wax scraping component is fixedly connected with the support frame; the wax scraping component scrapes off a wax layer on the surface of the workpiece; the first bracket, the second bracket and the controller are fixedly connected with the bottom plate; the supporting plate is fixedly connected with the bottom plate.
Further, the transmission assembly comprises a main motor, a first transmission rod, a first shaft sleeve, a first bevel gear, a second bevel gear, a first electric push rod, a third bevel gear, a second transmission rod, a material loading disc, a first connecting plate, a fourth bevel gear and a first wedge-shaped block; the main motor is fixedly connected with the support plate; the output shaft of the main motor is fixedly connected with the first transmission rod; the first transmission rod is rotatably connected with the bottom plate through a connecting frame; the first transmission rod is in transmission connection with the first shaft sleeve; the first transmission rod is connected with the first shaft sleeve in a sliding manner; the first shaft sleeve is fixedly connected with the first bevel gear; the second bevel gear is rotationally connected with the first shaft sleeve; the second bevel gear is fixedly connected with the first electric push rod; the first electric push rod is fixedly connected with the bottom plate through a connecting block; a third bevel gear is arranged on the side surface of the first bevel gear; when the third bevel gear is meshed with the first bevel gear, the third bevel gear rotates; when the third bevel gear is not meshed with the first bevel gear, the third bevel gear does not rotate; the third bevel gear is fixedly connected with the second transmission rod; the second transmission rod is fixedly connected with the material loading disc; the second transmission rod is rotatably connected with the support frame; six groups of first connecting plates are fixedly connected to the outer ring surface of the material loading disc at equal intervals in a ring shape; the six groups of first connecting plates are fixedly connected with the group of first wedge-shaped blocks respectively; the fourth bevel gear is fixedly connected with the first transmission rod; the fourth bevel gear is in transmission connection with the material taking assembly.
Further, the wax scraping assembly comprises a first fixing plate, a sliding rod, a second wedge-shaped block, an arch frame, a first elastic piece, a fixing plate, a first wax scraping unit, a second wax scraping unit, a third wax scraping unit, a fourth wax scraping unit and a dust collector; the first fixing plate is fixedly connected with the support frame; the first fixing plate is connected with the sliding rod in a sliding manner; the sliding rod is fixedly connected with the second wedge-shaped block; the slide bar is fixedly connected with the bow-shaped frame; the bow-shaped frame is fixedly connected with one side of the two groups of first elastic pieces; the other sides of the two groups of first elastic parts are fixedly connected with the first fixing plate; the fixed disc is fixedly connected with the arched frame; the fixed disc is provided with a first wax scraping unit, a second wax scraping unit, a third wax scraping unit and a fourth wax scraping unit at equal intervals in a ring shape; the first wax scraping unit, the second wax scraping unit, the third wax scraping unit and the fourth wax scraping unit are fixedly connected with the dust collector; the dust collector is fixedly connected with the fixed disc.
Further, the first wax scraping unit comprises a micro motor, a second fixing frame, a fourth transmission rod, a column gear, a third fixing frame, a gear ring, a sliding sleeve, a fixed rod, a third shaft sleeve, a universal ball, a second elastic part, a third fixed plate, a fourth fixing frame, a fixed cylinder, a lifting slide block, a spring, an arc-shaped plate, a third elastic part, a first flat gear, an arc-shaped scraping plate, a fourth elastic part, a pressing plate, a second flat gear, a fixed shaft, an electric slide block, a first guide pipe, a first material suction nozzle, a second material suction nozzle and a second guide pipe; the micro motor is fixedly connected with the second fixing frame; the second fixing frame is fixedly connected with the fixed disc; the fourth transmission rod is rotatably connected with the fixed disc; the fourth transmission rod is rotationally connected with the third fixed frame; the fourth transmission rod is fixedly connected with the output shaft of the micro motor; the fourth transmission rod is fixedly connected with the column gear; the column gear is in transmission connection with the gear ring; the third fixing frame is fixedly connected with the fixed disc; the gear ring is fixedly connected with the sliding sleeve; the sliding sleeve is in sliding connection with the fixed rod; the sliding sleeve is rotationally connected with the fixed rod; the fixed rod is fixedly connected with the fixed disc; the third shaft sleeve is rotatably connected with the sliding sleeve; the third shaft sleeve is rotatably connected with the universal ball; the universal ball is fixedly connected with the second elastic piece; the second elastic piece is fixedly connected with the third fixing plate; the third fixing plate is rotationally connected with the fourth fixing frame through a rotating shaft; the fourth fixing frame is fixedly connected with the fixing cylinder; the two sides of the third fixing plate are symmetrically provided with a combination of a universal ball and a second elastic part; the other group of universal balls is rotationally connected with the lifting slide block; the lifting slide block is in sliding connection with the fixed cylinder; the lifting slide block is fixedly connected with the spring; the spring is fixedly connected with the fixed cylinder; the two sides of the third shaft sleeve are symmetrically provided with a combination of a universal ball, a second elastic piece, a third fixing plate, a fourth fixing frame, a lifting slide block and a spring; the arc-shaped plate is fixedly connected with the sliding sleeve; the arc-shaped plate is rotationally connected with the third elastic piece; the third elastic part is fixedly connected with the first flat gear; two sides of the arc-shaped scraper are fixedly connected with the third elastic piece and the fourth elastic piece respectively; the fourth elastic part is in sliding connection with the arc-shaped plate; three groups of combined rings of the arc-shaped plate, the third elastic part, the first flat gear, the arc-shaped scraper and the fourth elastic part are arranged at equal intervals; the pressure plate is fixedly connected with the fixed rod; a second flat gear is arranged on the side surface of the spring; the second flat gear is fixedly connected with the fixed shaft; the fixed shaft is fixedly connected with the electric sliding block; the electric sliding block is connected with the fixed cylinder in a sliding manner; three groups of combined rings of the second flat gear, the fixed shaft and the electric sliding block are arranged at equal intervals; the first conduit is fixedly connected with the fixed cylinder; the first guide pipe is fixedly connected with the first material suction nozzle; the first guide pipe is fixedly connected with the dust collector; the first material suction nozzle is fixedly connected with the fixed cylinder; the second material suction nozzle is fixedly connected with the fixed cylinder; the second material suction nozzle is fixedly connected with the second guide pipe; the second conduit is fixedly connected with the dust collector.
Furthermore, six circular grooves matched with the workpiece are formed in the material carrying disc in an annular and equidistant mode.
Further, the inner wall of the fixed cylinder is provided with two grooves matched with the first material suction nozzle and the second material suction nozzle.
Further, an electric slide rail matched with the electric slide block is arranged on the fixed cylinder.
Further, the bottom surface of the arc-shaped plate is provided with an arc-shaped sliding groove.
The invention has the following advantages:
1. in order to solve the problems in the prior art, a workpiece is placed on a heating table for heating when wafer substrate pasting is carried out, then a layer of wax is smeared on the position, corresponding to an LED product piece, of the workpiece, the front sides of a plurality of LED wafers are pasted on the wax smearing position on the workpiece, then subsequent processing is carried out, and after the subsequent processing is finished, the residual wax on the back side edge of the LED wafer needs to be erased by using dust-free paper and absolute ethyl alcohol; the wafer pastes on the wax layer because the extrusion makes can spill over some wax layers around the wafer, directly cleans the effect not good, makes the wax layer on the contrary and spreads on a large scale at the workpiece surface, increases the processing degree of difficulty to need to consume a large amount of dustless paper and absolute ethyl alcohol, extravagant material makes the problem that product manufacturing cost increases.
2. The conveying assembly is designed, the wax scraping assembly and the material taking assembly are arranged, when the device is ready for work, the power is switched on, after the device is checked to have no fault, workpieces to be processed are sequentially placed into the conveying assembly on the bottom plate supported by the first supporting column and the base plate, the conveying assembly fixedly connected with the supporting plate sequentially conveys the workpieces to the lower side of the wax scraping assembly to be subjected to wax scraping through control of the controller on the supporting frame, the workpieces are conveyed to the corresponding positions of the material taking assembly fixedly connected with the first support and the second support after wax scraping is completed, and the workpieces subjected to wax scraping are taken out of the conveying assembly through the conveying assembly, so that subsequent processing is performed.
3. When the invention is used, the wax layers around a plurality of wafers on a workpiece are simultaneously scraped so as to ensure the scrubbing effect, the materials used for scrubbing are saved, the scraped broken wax is collected so as to be reused, and the production cost and the treatment difficulty of the product are reduced.
Drawings
FIG. 1 is a schematic perspective view of a first embodiment of the present invention;
FIG. 2 is a schematic perspective view of a second embodiment of the present invention;
FIG. 3 is a schematic view of a first perspective structure of the transmission assembly of the present invention;
FIG. 4 is a schematic diagram of a second perspective structure of the transmission assembly of the present invention;
FIG. 5 is a side view of the transfer assembly of the present invention;
FIG. 6 is a schematic view of a first perspective structure of the wax scraping assembly of the present invention;
FIG. 7 is a second perspective view of the wax scraping assembly of the present invention;
FIG. 8 is a schematic view of a first perspective view of a take-off assembly of the present invention;
FIG. 9 is a second perspective view of a take-out assembly of the present invention;
fig. 10 is a side view of a take-off assembly of the present invention;
FIG. 11 is a schematic perspective view of a first wax scraping unit according to the present invention;
FIG. 12 is a schematic view of a first partial perspective view of a first wax scraping unit of the present invention;
FIG. 13 is a schematic diagram of a second partial perspective view of the first wax scraping unit of the present invention;
FIG. 14 is a third partial perspective view of the first wax scraping unit of the present invention;
fig. 15 is a schematic perspective view of a fourth partial structure of the first wax scraping unit according to the present invention.
The meaning of the reference symbols in the figures: 1: bottom plate, 2: support column, 3: backing plate, 4: support frame, 5: first support, 6: second bracket, 7: controller, 8: support plate, 401: main motor, 402: first drive lever, 403: first bushing, 404: first bevel gear, 405: second bevel gear, 406: first electric putter, 407: third bevel gear, 408: second transmission lever, 409: tray, 410: first connection plate, 411: fourth bevel gear, 412: first wedge block, 501: first fixing plate, 502: slide bar, 503: second wedge block, 504: bow, 505: first elastic member, 506: fixed disk, 507: first wax scraping unit, 508: second wax scraping unit, 509: third wax scraping unit, 510: fourth wax scraping unit, 511: dust collector, 601: screw rod, 602: second shaft sleeve, 603: fifth bevel gear, 604: sixth bevel gear, 605: first mount, 606: second electric push rod, 607: seventh bevel gear, 608: third transfer lever, 609: eighth bevel gear, 610: conveyor belt, 611: disc, 612: electric suction cup, 613: third electric putter, 614: second connecting plate, 615: pan slide, 616: second fixing plate, 617: translation slide, 50701: micro-motor, 50702: second mount, 50703: fourth transmission rod, 50704: column gear, 50705: third mount, 50706: ring gear, 50707: sliding sleeve, 50708: dead lever, 50709: third bushing, 50710: universal ball, 50711: second elastic member, 50712: third fixing plate, 50713: fourth mount, 50714: fixed cylinder, 50715: lifting slider, 50716: spring, 50717: arcuate plate, 50718: third elastic member, 50719: first spur gear, 50720: arc squeegee, 50721: fourth elastic member, 50722: platen, 50723: second spur gear, 50724: fixed shaft, 50725: electric slider, 50726: first conduit, 50727: first suction nozzle, 50728: second suction nozzle, 50729: a second conduit.
Detailed Description
Reference herein to an embodiment means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the invention. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
Examples
An LED wafer substrate post-chip processing device for smart communities is shown in FIGS. 1-2 and comprises a base plate 1, a support column 2, a backing plate 3, a support frame 4, a first support 5, a second support 6, a controller 7, a support plate 8, a transmission assembly and a wax scraping assembly; the bottom surface of the bottom plate 1 is fixedly connected with the three groups of supporting columns 2; the three groups of supporting columns 2 are fixedly connected with the group of base plates 3 respectively; a transmission assembly is arranged on the left side above the bottom plate 1; the transmission component is fixedly connected with the support plate 8; the transmission component is rotationally connected with the support frame 4; the conveying assembly conveys the workpiece; a wax scraping component is arranged on the left side above the bottom plate 1; the wax scraping component is fixedly connected with the support frame 4; the wax scraping component scrapes off a wax layer on the surface of the workpiece; the first bracket 5, the second bracket 6 and the controller 7 are fixedly connected with the bottom plate 1; the supporting plate 8 is fixedly connected with the bottom plate 1.
The working principle is as follows: when the device is ready for work, a power supply is switched on, after the device is checked to have no fault, workpieces to be processed are sequentially placed into a transmission assembly on a bottom plate 1 supported by a first support column 2 and a base plate 3, the transmission assembly fixedly connected with a support plate 8 sequentially conveys the workpieces to the lower part of a wax scraping assembly for wax scraping under the control of a controller 7 on a support frame 4, the workpieces are conveyed to the positions corresponding to material taking assemblies fixedly connected with a first support 5 and a second support 6 after wax scraping is finished, and the material taking assemblies are driven by the transmission assemblies to take the workpieces subjected to wax scraping out of the transmission assembly so as to be processed subsequently; when the invention is used, the wax layers around a plurality of wafers on a workpiece are simultaneously scraped so as to ensure the scrubbing effect, the materials used for scrubbing are saved, and the scraped broken wax is collected for reuse, thereby reducing the production cost and the treatment difficulty of the product.
Referring to fig. 3-5, the transmission assembly comprises a main motor 401, a first transmission rod 402, a first bushing 403, a first bevel gear 404, a second bevel gear 405, a first electric push rod 406, a third bevel gear 407, a second transmission rod 408, a material loading tray 409, a first connecting plate 410, a fourth bevel gear 411 and a first wedge block 412; the main motor 401 is fixedly connected with the support plate 8; an output shaft of the main motor 401 is fixedly connected with a first transmission rod 402; the first transmission rod 402 is rotatably connected with the bottom plate 1 through a connecting frame; the first transmission rod 402 is in transmission connection with the first shaft sleeve 403; the first transmission rod 402 is connected with the first shaft sleeve 403 in a sliding manner; the first shaft sleeve 403 is fixedly connected with a first bevel gear 404; the second bevel gear 405 is in rotational connection with the first shaft sleeve 403; the second bevel gear 405 is fixedly connected with the first electric push rod 406; the first electric push rod 406 is fixedly connected with the bottom plate 1 through a connecting block; a third bevel gear 407 is arranged on the side surface of the first bevel gear 404; when the third bevel gear 407 is engaged with the first bevel gear 404, the third bevel gear 407 rotates; when the third bevel gear 407 is not engaged with the first bevel gear 404, the third bevel gear 407 does not rotate; the third bevel gear 407 is fixedly connected with the second transmission rod 408; the second transmission rod 408 is fixedly connected with the material loading tray 409; the second transmission rod 408 is rotatably connected with the support frame 4; six groups of first connecting plates 410 are fixedly connected to the outer ring surface of the material carrying disc 409 in an annular and equidistant manner; the six groups of first connecting plates 410 are fixedly connected with the group of first wedge-shaped blocks 412 respectively; the fourth bevel gear 411 is fixedly connected with the first transmission rod 402; the fourth bevel gear 411 is in driving connection with the material taking assembly.
A workpiece to be processed is placed into a circular groove on a material carrying disc 409 close to a first connecting plate 410, then a main motor 401 is started, an output shaft of the main motor 401 drives a first transmission rod 402 to rotate, the first transmission rod 402 simultaneously drives a first shaft sleeve 403 and a fourth bevel gear 411 to rotate, the fourth bevel gear 411 rotates to convey power to a material taking assembly, the first shaft sleeve 403 drives a first bevel gear 404 to rotate, then a first electric push rod 406 extends to push a second bevel gear 405, the first shaft sleeve 403 slides on the first transmission rod 402, the first bevel gear 404 is meshed with the third bevel gear 407, the third bevel gear 407 rotates to drive a second transmission rod 408 to drive the material carrying disc 409 to rotate by a preset angle, then the power of the first bevel gear 404 is interrupted, the material carrying disc 409 rotates to drive the workpiece to rotate below a wax scraping assembly, the material carrying disc rotates to simultaneously drive the first connecting plate 410 to rotate, and further drive a first wedge block 412 to extrude a second wedge block 503, so that the wax scraping component can be used for processing; this subassembly carries the transportation cooperation to the work piece and scrapes the wax subassembly and handle.
Referring to fig. 6-7, the wax scraping assembly includes a first fixing plate 501, a sliding rod 502, a second wedge-shaped block 503, a bow-shaped frame 504, a first elastic member 505, a fixing plate 506, a first wax scraping unit 507, a second wax scraping unit 508, a third wax scraping unit 509, a fourth wax scraping unit 510, and a dust collector 511; the first fixing plate 501 is fixedly connected with the support frame 4; the first fixing plate 501 is connected with the sliding rod 502 in a sliding manner; the sliding rod 502 is fixedly connected with a second wedge-shaped block 503; the sliding rod 502 is fixedly connected with the bow-shaped frame 504; the bow-shaped frame 504 is fixedly connected with one side of the two groups of first elastic pieces 505; the other sides of the two sets of first elastic members 505 are fixedly connected with the first fixing plate 501; the fixed plate 506 is fixedly connected with the bow-shaped frame 504; a first wax scraping unit 507, a second wax scraping unit 508, a third wax scraping unit 509 and a fourth wax scraping unit 510 are annularly and equidistantly arranged on the fixed disc 506; the first wax scraping unit 507, the second wax scraping unit 508, the third wax scraping unit 509 and the fourth wax scraping unit 510 are all fixedly connected with the dust collector 511; the dust collector 511 is fixedly connected with the fixed disk 506.
When the first wedge-shaped block 412 presses the second wedge-shaped block 503, the second wedge-shaped block 503 drives the sliding rod 502 to slide downwards in the first fixing plate 501, and then the two groups of first elastic members 505 are stretched, so that the arched frame 504 drives the fixing plate 506, the first wax scraping unit 507, the second wax scraping unit 508, the third wax scraping unit 509 and the fourth wax scraping unit 510 to move downwards, so that the four groups of wax scraping units correspond to the wafer on the workpiece, then the four groups of wax scraping units operate simultaneously to scrape off the wax layer on the workpiece, and simultaneously the dust collector 511 starts to suck the scraped broken wax away for collection and reuse; this subassembly strikes off the wax layer on the work piece and collects the broken wax of scraping down simultaneously.
Referring to fig. 8-10, the material taking device further comprises a material taking assembly, the material taking assembly comprises a screw 601, a second shaft sleeve 602, a fifth bevel gear 603, a sixth bevel gear 604, a first fixing frame 605, a second electric push rod 606, a seventh bevel gear 607, a third transmission rod 608, an eighth bevel gear 609, a conveyor belt 610, a circular disc 611, an electric suction cup 612, a third electric push rod 613, a second connecting plate 614, a translational sliding plate 615, a second fixing plate 616 and a translational sliding rail 617; the screw rod 601 is rotatably connected with the support frame 4 through a connecting frame; the screw rod 601 is connected with the second shaft sleeve 602 in a sliding manner; the screw rod 601 is in transmission connection with the second shaft sleeve 602; two sides of the second shaft sleeve 602 are fixedly connected with a fifth bevel gear 603 and a sixth bevel gear 604 respectively; the first fixing frame 605 is rotatably connected with the second shaft sleeve 602; the first fixing frame 605 is fixedly connected with the second electric push rod 606; the second electric push rod 606 is fixedly connected with the support frame 4 through a connecting block; a seventh bevel gear 607 is arranged below the middle parts of the fifth bevel gear 603 and the sixth bevel gear 604; when the fifth bevel gear 603 or the sixth bevel gear 604 is engaged with the seventh bevel gear 607, the seventh bevel gear 607 rotates; when the fifth bevel gear 603 and the sixth bevel gear 604 are not engaged with the seventh bevel gear 607, the seventh bevel gear 607 does not rotate; a seventh bevel gear 607 is fixedly connected with a third transmission rod 608; the third transmission rod 608 is fixedly connected with an eighth bevel gear 609; the third transmission rod 608 is rotatably connected with the bottom plate 1 through a connecting frame; the eighth bevel gear 609 is in transmission connection with the fourth bevel gear 411; a conveying belt 610 is arranged above the screw rod 601; two sides of the conveyor belt 610 are fixedly connected with the first bracket 5 and the second bracket 6 respectively; both sides of the conveyor belt 610 are fixedly connected with the bottom plate 1 through connecting blocks; a disc 611 is arranged above the conveyor belt 610; four groups of electric suction cups 612 are fixedly connected to the bottom surface of the disc 611 in an annular and equidistant manner; the disc 611 is fixedly connected with the third electric push rod 613; the third electric push rod 613 is fixedly connected with the second connecting plate 614; two sides of the second connecting plate 614 are fixedly connected with the translational sliding plate 615 and the second fixing plate 616 respectively; the translation sliding plate 615 is in sliding connection with a translation sliding rail 617; the second fixing plate 616 is screwed with the screw rod 601; the translational slide rail 617 is fixedly connected with the support frame 4 through a connecting block.
After the wax scraping component scrapes wax on the workpiece, the workpiece is conveyed to a position corresponding to the disc 611 by the material loading disc 409, then the transmission component conveys power to drive the eighth bevel gear 609 to drive the third transmission rod 608 to rotate, the third transmission rod 608 drives the seventh bevel gear 607 to rotate, then the second electric push rod 606 extends to push the first fixed frame 605, so that the second sleeve 602 slides on the screw rod 601, so that the sixth bevel gear 604 is meshed with the seventh bevel gear 607, the sixth bevel gear 604 rotates to drive the second sleeve 602 to drive the screw rod 601 to rotate, the screw rod 601 drives the second fixed plate 616 screwed with the screw rod 601 to move, the second fixed plate 616 drives the second connecting plate 614 to drive the translation sliding plate 615 to slide in the translation sliding rail 617, so that the disc 611 moves to be right above the workpiece, then the third electric push rod 613 extends to push the disc 611 downwards to enable the four groups of electric suction cups 612 on the bottom surface of the workpiece to suck the surface of the workpiece, then the third electric push rod 613 retracts, the second electric push rod 606 contracts to enable the fifth bevel gear 603 and the seventh bevel gear 607 to be meshed, so that the screw rod 601 reversely rotates, the translation sliding plate 615 reversely slides and resets, so that the disc 611 reversely moves and resets, and then the four groups of electric suction cups 612 release the workpiece and place the workpiece on the conveyor belt 610 so as to convey the workpiece to a subsequent processing position; the assembly removes the wax-scraped workpiece from the transfer assembly.
Referring to fig. 11 to 15, the first wax scraping unit 507 includes a micro motor 50701, a second fixing frame 50702, a fourth driving rod 50703, a column gear 50704, a third fixing frame 50705, a toothed ring 50706, a sliding sleeve 50707, a fixing rod 50708, a third shaft sleeve 50709, a universal ball 50710, a second elastic member 50711, a third fixing plate 50712, a fourth fixing frame 50713, a fixing barrel 50714, a lifting slider 50715, a spring 50716, an arc plate 50717, a third elastic member 50718, a first flat gear 50719, an arc scraper 50720, a fourth elastic member 50721, a pressure plate 50722, a second flat gear 50723, a fixing shaft 50724, an electric slider 50725, a first conduit 505050725, a first suction nozzle 50727, a second suction nozzle 50728, and a second conduit 72509; the micro motor 50701 is fixedly connected with a second fixing frame 50702; the second fixing frame 50702 is fixedly connected with the fixed disc 506; the fourth transmission rod 50703 is rotatably connected with the fixed disc 506; the fourth transmission rod 50703 is rotatably connected to the third fixing frame 50705; a fourth transmission rod 50703 is fixedly connected with an output shaft of the micro motor 50701; a fourth transmission rod 50703 is fixedly connected with a column gear 50704; the column gear 50704 is in driving connection with a toothed ring 50706; the third fixing frame 50705 is fixedly connected with the fixed disc 506; the toothed ring 50706 is fixedly connected with the sliding sleeve 50707; the sliding sleeve 50707 is slidably connected with the fixing rod 50708; the sliding sleeve 50707 is rotatably connected with the fixing rod 50708; the fixing rod 50708 is fixedly connected with the fixing disc 506; the third shaft sleeve 50709 is rotatably connected with the sliding sleeve 50707; the third shaft sleeve 50709 is rotatably connected with a universal ball 50710; the universal ball 50710 is fixedly connected with the second elastic piece 50711; the second elastic member 50711 is fixedly connected to the third fixing plate 50712; the third fixing plate 50712 is rotatably connected to the fourth fixing frame 50713 via a rotating shaft; the fourth fixing frame 50713 is fixedly connected with the fixing cylinder 50714; a combination of a universal ball 50710 and a second elastic member 50711 are symmetrically arranged on both sides of the third fixing plate 50712; the other group of universal balls 50710 is rotatably connected with the lifting slide block 50715; the lifting slide block 50715 is in sliding connection with the fixed barrel 50714; the lifting slide block 50715 is fixedly connected with a spring 50716; the spring 50716 is fixedly connected with the fixed barrel 50714; the third shaft sleeve 50709 is symmetrically provided with a combination of a universal ball 50710, a second elastic member 50711, a third fixing plate 50712, a fourth fixing frame 50713, a lifting slider 50715 and a spring 50716 at two sides; the arc-shaped plate 50717 is fixedly connected with the sliding sleeve 50707; the arc-shaped plate 50717 is rotatably connected with the third elastic member 50718; the third elastic piece 50718 is fixedly connected with the first flat gear 50719; the two sides of the arc-shaped scraper 50720 are fixedly connected with the third elastic piece 50718 and the fourth elastic piece 50721 respectively; the fourth elastic member 50721 is slidably coupled to the curved plate 50717; three groups of combined rings of the arc-shaped plate 50717, the third elastic part 50718, the first flat gear 50719, the arc-shaped scraper 50720 and the fourth elastic part 50721 are arranged at equal intervals; the pressure plate 50722 is fixedly connected with the fixing rod 50708; a second flat gear 50723 is arranged on the side of the spring 50716; the second flat gear 50723 is fixedly connected with the fixed shaft 50724; the fixed shaft 50724 is fixedly connected with the electric sliding block 50725; the electric slider 50725 is slidably connected with the fixed barrel 50714; three groups of combined rings of the second flat gear 50723, the fixed shaft 50724 and the electric slider 50725 are arranged at equal intervals; the first conduit 50726 is fixedly connected with the fixed cylinder 50714; the first conduit 50726 is fixedly connected with the first material suction nozzle 50727; the first conduit 50726 is fixedly connected with the dust collector 511; the first material suction nozzle 50727 is fixedly connected with the fixed barrel 50714; the second material suction nozzle 50728 is fixedly connected with the fixed barrel 50714; the second material suction nozzle 50728 is fixedly connected with the second conduit 50729; the second conduit 50729 is fixedly attached to the vacuum cleaner 511.
When the fixed tray 506 drives the first wax scraping unit 507 to move downwards, the fixed rod 50708 drives the pressure plate 50722 to move downwards to press the wafer, so as to prevent the wafer from loosening caused by wax scraping, and at the same time, two sets of lifting sliders 50715 are in contact with the surface of the workpiece and are pressed to slide upwards in the fixed cylinder 50714, so that the spring 50716 is stretched, the lifting sliders 50715 drives the universal balls 50710 therein to move upwards and rotate simultaneously, the second elastic member 50711 is stretched, the third fixed plate 50712 rotates around the connection with the fourth fixed frame 50713, so that the other set of second elastic member 50711 drives the universal balls 50710 in the third shaft sleeve 50709 to move downwards and rotate in the third shaft sleeve 50709, so that the third shaft sleeve 50709 drives the sliding sleeve 50707 to slide downwards on the fixed rod 50708, so that the arc-shaped scraper 50720 is inserted into the wax layer around the wafer, and the third elastic member 50718 and the fourth elastic member 50721 are compressed, then the micro motor 50701 in the second fixing rack 50702 is started, the output shaft of the micro motor 50701 drives the fourth driving rod 50703 in the third fixing rack 50705 to drive the column gear 50704 to rotate, the column gear 50704 drives the toothed ring 50706 to drive the sliding sleeve 50707 to rotate, the sliding sleeve 50707 drives the arc plate 50717 to do circular motion, the arc plate 50717 drives the third elastic member 50718 and the fourth elastic member 50721 to do circular motion, and further drives the arc scraper 50720 to do circular motion, so that the wax layer around the wafer is scraped off, at the same time, the dust collector 511 is started, the crushed wax is sucked into the first conduit 50726 and the second conduit 509 through the first suction nozzle 50727 and the second suction nozzle 50728, and is collected in the dust collector 511, after the wax layer around the wafer is scraped off, the micro motor 50701 is closed, the main layer may remain on the outer ring surface, then the carrier plate 409 is reversely rotated by the reverse rotation of the motor 401, and the second wedge block 503 is not pressed, so that the first wax scraping unit 507 is reset, then the electric sliding block 50725 slides in the fixed cylinder 50714, and further the fixed shaft 50724 drives the second flat gear 50723 to move to a preset position, then the micro motor 50701 is started, when the arc-shaped plate 50717 makes a circular motion, the third elastic member 50718 drives the first flat gear 50719 to make a circular motion, and further the first flat gear 50719 and the second flat gear 50723 are meshed, because the second flat gear 50723 is fixed, and further the first flat gear 50717 makes the third elastic member 50718 rotate, so that the arc-shaped scraper 50720 drives the fourth elastic member 50721 to slide in the arc-shaped plate 50717, so that the arc-shaped scraper 50720 corresponds to the outer ring of the wafer, then the main motor 401 rotates forward, so that the second wedge-shaped block 503 is compressed, so that the sliding sleeve 50707 slides downwards on the fixed rod 50708, so that the arc-shaped scraper 50720 fits the outer ring of the wafer, the side surface of the arc-shaped scraper 50720 is provided with felt cloth, so as to avoid scratching the wafer, and so that the arc-shaped scraper 50720 fits the outer ring of the wafer to make a circular motion to scrape the wax layer, the second wax scraping unit 508, the third wax scraping unit 509 and the fourth wax scraping unit 510 work on the same principle as the first wax scraping unit 507; the unit scrapes off the wax layer around the wafer and its outer ring surface.
Six circular grooves matched with the workpieces are annularly and equidistantly arranged on the material loading disc 409.
So as to put the work piece in for transport.
The inner wall of the fixed barrel 50714 is provided with two grooves matched with the first material suction nozzle 50727 and the second material suction nozzle 50728.
So that the first suction nozzle 50727 and the second suction nozzle 50728 are put in and suck the scraped broken wax away.
An electric slide rail matched with the electric slide block 50725 is arranged on the fixed barrel 50714.
So that the electric slider 50725 slides on the fixed barrel 50714.
The bottom surface of the arc-shaped plate 50717 is provided with an arc-shaped sliding groove.
So that the fourth elastic member 50721 slides on the bottom surface of the arc plate 50717.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (8)

1. An LED wafer substrate post-chip processing device for an intelligent community comprises a bottom plate (1), a support column (2), a base plate (3), a support frame (4), a first support (5), a second support (6) and a support plate (8); the bottom surface of the bottom plate (1) is fixedly connected with the three groups of supporting columns (2); the three groups of supporting columns (2) are fixedly connected with the group of base plates (3) respectively; the first bracket (5) and the second bracket (6) are fixedly connected with the bottom plate (1); the supporting plate (8) is fixedly connected with the bottom plate (1); the wax scraper is characterized by also comprising a transmission assembly and a wax scraping assembly; a transmission component is arranged on the left side above the bottom plate (1); the transmission component is fixedly connected with the supporting plate (8); the transmission component is rotationally connected with the support frame (4); the conveying assembly conveys the workpiece; a wax scraping component is arranged on the left side above the bottom plate (1); the wax scraping component is fixedly connected with the support frame (4); the wax scraping component scrapes off a wax layer on the surface of the workpiece.
2. The LED chip substrate post-processing device for smart communities according to claim 1, wherein the transmission assembly comprises a main motor (401), a first transmission rod (402), a first bushing (403), a first bevel gear (404), a second bevel gear (405), a first electric push rod (406), a third bevel gear (407), a second transmission rod (408), a material loading tray (409), a first connecting plate (410), a fourth bevel gear (411) and a first wedge block (412); the main motor (401) is fixedly connected with the support plate (8); an output shaft of the main motor (401) is fixedly connected with the first transmission rod (402); the first transmission rod (402) is rotatably connected with the bottom plate (1) through a connecting frame; the first transmission rod (402) is in transmission connection with the first shaft sleeve (403); the first transmission rod (402) is connected with the first shaft sleeve (403) in a sliding way; the first shaft sleeve (403) is fixedly connected with the first bevel gear (404); the second bevel gear (405) is in rotary connection with the first shaft sleeve (403); the second bevel gear (405) is fixedly connected with the first electric push rod (406); the first electric push rod (406) is fixedly connected with the bottom plate (1) through a connecting block; a third bevel gear (407) is arranged on the side surface of the first bevel gear (404); when the third bevel gear (407) is engaged with the first bevel gear (404), the third bevel gear (407) rotates; when the third bevel gear (407) is not meshed with the first bevel gear (404), the third bevel gear (407) does not rotate; the third bevel gear (407) is fixedly connected with the second transmission rod (408); the second transmission rod (408) is fixedly connected with the material carrying disc (409); the second transmission rod (408) is rotatably connected with the support frame (4); six groups of first connecting plates (410) are fixedly connected to the outer ring surface of the material carrying disc (409) in an annular and equidistant manner; the six groups of first connecting plates (410) are fixedly connected with the group of first wedge-shaped blocks (412) respectively; the fourth bevel gear (411) is fixedly connected with the first transmission rod (402); and the fourth bevel gear (411) is in transmission connection with the material taking assembly.
3. The LED chip substrate post-processing device for smart communities as claimed in claim 2, wherein the wax scraping assembly comprises a first fixing plate (501), a sliding rod (502), a second wedge-shaped block (503), a bow-shaped frame (504), a first elastic member (505), a fixing plate (506), a first wax scraping unit (507), a second wax scraping unit (508), a third wax scraping unit (509), a fourth wax scraping unit (510) and a dust collector (511); the first fixing plate (501) is fixedly connected with the support frame (4); the first fixing plate (501) is connected with the sliding rod (502) in a sliding manner; the sliding rod (502) is fixedly connected with the second wedge-shaped block (503); the sliding rod (502) is fixedly connected with the bow-shaped frame (504); the bow-shaped frame (504) is fixedly connected with one side of the two groups of first elastic pieces (505); the other sides of the two groups of first elastic pieces (505) are fixedly connected with the first fixing plate (501); the fixed disc (506) is fixedly connected with the arched frame (504); a first wax scraping unit (507), a second wax scraping unit (508), a third wax scraping unit (509) and a fourth wax scraping unit (510) are annularly and equidistantly arranged on the fixed disc (506); the first wax scraping unit (507), the second wax scraping unit (508), the third wax scraping unit (509) and the fourth wax scraping unit (510) are fixedly connected with a dust collector (511); the dust collector (511) is fixedly connected with the fixed disc (506).
4. The LED chip substrate post-processing apparatus for smart communities as claimed in claim 3, wherein the first wax scraping unit (507) comprises a micro motor (50701), a second fixing frame (50702), a fourth transmission rod (50703), a cylindrical gear (50704), a third fixing frame (50705), a toothed ring (50706), a sliding sleeve (50707), a fixing rod (50708), a third shaft sleeve (50709), a universal ball (50710), a second elastic member (50711), a third fixing plate (50712), a fourth fixing frame (50713), a fixing cylinder (50714), a lifting slider (50715), a spring (50716), an arc plate (50717), a third elastic member (50718), a first flat gear (50719), an arc scraper (50720), a fourth elastic member (50721), a pressure plate (50722), a second flat gear (50723), a fixing shaft (50724), an electric slider (50726), a first conduit (50726), a first suction nozzle (50727), a fourth suction nozzle (50727), a third elastic member (50727), a second elastic member (50713), a third elastic member (50713), a fourth fixing frame (50713), a fixing frame (50713), a fixing frame (a fixing frame) and a fixing frame (a fixing frame) and a fixing frame (a fixing frame) and a fixing frame (, A second suction nozzle (50728) and a second conduit (50729); the micro motor (50701) is fixedly connected with the second fixing frame (50702); the second fixing frame (50702) is fixedly connected with the fixed disc (506); the fourth transmission rod (50703) is rotatably connected with the fixed disc (506); the fourth transmission rod (50703) is rotatably connected with the third fixed frame (50705); the fourth transmission rod (50703) is fixedly connected with an output shaft of the micro motor (50701); the fourth transmission rod (50703) is fixedly connected with the column gear (50704); the column gear (50704) is in transmission connection with the toothed ring (50706); the third fixing frame (50705) is fixedly connected with the fixed disc (506); the gear ring (50706) is fixedly connected with the sliding sleeve (50707); the sliding sleeve (50707) is in sliding connection with the fixing rod (50708); the sliding sleeve (50707) is rotatably connected with the fixed rod (50708); the fixing rod (50708) is fixedly connected with the fixed disc (506); the third shaft sleeve (50709) is rotatably connected with the sliding sleeve (50707); the third shaft sleeve (50709) is rotatably connected with the universal ball (50710); the universal ball (50710) is fixedly connected with the second elastic piece (50711); the second elastic piece (50711) is fixedly connected with the third fixing plate (50712); the third fixing plate (50712) is rotatably connected with the fourth fixing frame (50713) through a rotating shaft; the fourth fixing frame (50713) is fixedly connected with the fixing cylinder (50714); the combination of a universal ball (50710) and a second elastic piece (50711) is symmetrically arranged on two sides of the third fixing plate (50712); the other group of universal balls (50710) is rotationally connected with the lifting slide block (50715); the lifting slide block (50715) is in sliding connection with the fixed barrel (50714); the lifting slide block (50715) is fixedly connected with the spring (50716); the spring (50716) is fixedly connected with the fixed cylinder (50714); the two sides of the third shaft sleeve (50709) are symmetrically provided with a combination of a universal ball (50710), a second elastic piece (50711), a third fixing plate (50712), a fourth fixing frame (50713), a lifting slide block (50715) and a spring (50716); the arc-shaped plate (50717) is fixedly connected with the sliding sleeve (50707); the arc-shaped plate (50717) is rotatably connected with the third elastic piece (50718); the third elastic piece (50718) is fixedly connected with the first flat gear (50719); two sides of the arc-shaped scraper (50720) are fixedly connected with a third elastic piece (50718) and a fourth elastic piece (50721) respectively; the fourth elastic part (50721) is in sliding connection with the arc-shaped plate (50717); three groups of combined rings of the arc-shaped plate (50717), the third elastic part (50718), the first flat gear (50719), the arc-shaped scraper (50720) and the fourth elastic part (50721) are arranged at equal intervals; the pressure plate (50722) is fixedly connected with the fixing rod (50708); a second flat gear (50723) is arranged on the side surface of the spring (50716); the second flat gear (50723) is fixedly connected with the fixed shaft (50724); the fixed shaft (50724) is fixedly connected with the electric sliding block (50725); the electric slider (50725) is in sliding connection with the fixed barrel (50714); three groups of combined rings of the second flat gear (50723), the fixed shaft (50724) and the electric slider (50725) are arranged at equal intervals; the first conduit (50726) is fixedly connected with the fixed cylinder (50714); the first conduit (50726) is fixedly connected with the first material suction nozzle (50727); the first conduit (50726) is fixedly connected with the dust collector (511); the first material suction nozzle (50727) is fixedly connected with the fixed cylinder (50714); the second material suction nozzle (50728) is fixedly connected with the fixed cylinder (50714); the second material suction nozzle (50728) is fixedly connected with the second conduit (50729); the second conduit (50729) is fixedly connected with the dust collector (511).
5. The LED chip substrate post-processing device for intelligent community as recited in claim 3, wherein six circular grooves matched with the workpiece are annularly and equidistantly arranged on the carrying disc (409).
6. An LED chip substrate post-processing apparatus for smart community as claimed in claim 4, wherein the inner wall of the fixed cylinder (50714) is provided with two grooves matching with the first suction nozzle (50727) and the second suction nozzle (50728).
7. The LED chip substrate post-processing device for smart community as claimed in claim 4, wherein the fixed barrel (50714) is provided with a power slide rail matched with the power slide block (50725).
8. An LED chip substrate post-processing apparatus for smart community as claimed in claim 4, wherein the arc-shaped plate (50717) is provided with an arc-shaped chute on the bottom surface.
CN202110787809.3A 2021-07-13 2021-07-13 A LED wafer substrate paster post-processing equipment for wisdom community Pending CN113644008A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110787809.3A CN113644008A (en) 2021-07-13 2021-07-13 A LED wafer substrate paster post-processing equipment for wisdom community

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110787809.3A CN113644008A (en) 2021-07-13 2021-07-13 A LED wafer substrate paster post-processing equipment for wisdom community

Publications (1)

Publication Number Publication Date
CN113644008A true CN113644008A (en) 2021-11-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110787809.3A Pending CN113644008A (en) 2021-07-13 2021-07-13 A LED wafer substrate paster post-processing equipment for wisdom community

Country Status (1)

Country Link
CN (1) CN113644008A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116351644A (en) * 2023-03-17 2023-06-30 江苏晶工半导体设备有限公司 Semiconductor wafer waxing machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116351644A (en) * 2023-03-17 2023-06-30 江苏晶工半导体设备有限公司 Semiconductor wafer waxing machine
CN116351644B (en) * 2023-03-17 2023-10-20 江苏晶工半导体设备有限公司 Semiconductor wafer waxing machine

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