CN113587962A - Single-fiber multi-dimensional F-P sensing device and measuring method thereof - Google Patents
Single-fiber multi-dimensional F-P sensing device and measuring method thereof Download PDFInfo
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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Abstract
The invention discloses a single-fiber multi-dimensional F-P sensing device and a measuring method thereof, wherein the single-fiber multi-dimensional F-P sensing device comprises a light source, an optical fiber, a beam splitter prism, at least two reflecting pieces and a demodulator; the light source generates a light beam; the optical fiber transmits the light beam to the beam splitter prism, and comprises an optical fiber end face plated with a first antireflection film; the beam splitting prism comprises a beam splitting surface and at least two reflecting surfaces corresponding to the reflecting pieces, the reflecting surfaces are parallel to the reflecting pieces, and the reflecting surfaces and the reflecting pieces form at least two F-P cavities with different cavity lengths; the beam splitting surface is used for splitting the light beam into at least two sub-light beams corresponding to the reflecting surface, the sub-light beams respectively generate sub-reflected light beams and sub-transmitted light beams at the reflecting surface, and the sub-transmitted light beams respectively enter the F-P cavity, are reflected by the reflecting piece and interfere with the sub-reflected light beams to generate at least two sub-interference light beams; the demodulator is used for demodulating at least two sub-interference beams. The invention simplifies the structure of the single-fiber multi-dimensional F-P sensing device and improves the measurement precision of the single-fiber multi-dimensional F-P sensing device.
Description
Technical Field
The invention relates to the technical field of optical fiber sensors, in particular to a single-optical-fiber multi-dimensional F-P sensing device and a measuring method thereof.
Background
With the continuous progress of science and technology, the level of photoelectron technology and optical fiber technology is increasing day by day, and the sensing technology using optical fiber structure as propagation medium or sensing element is developed greatly and is widely applied in various aspects of industrial life. The optical fiber sensor has the characteristics of high sensitivity, corrosion resistance, no electromagnetic interference, easiness in networking and multiplexing and the like, is greatly concerned by governments and scholars in all countries in the world, and is rapidly developed. Compared with other interference sensors, such as Mach-Zehnder, Michelson, Sagnac sensors and the like, the fiber Fabry-Perot (F-P) sensor has the advantages of simple manufacture of an F-P cavity sensing head, good reliability, flexible manufacture, high sensitivity and the like.
However, the F-P sensor still has a larger bottleneck in the field of multi-dimensional measurement, and on the premise of using only one optical fiber for sensing, the number of F-P cavities that can be constructed by the conventional F-P sensor is extremely limited, and most sensors only construct a single F-P cavity based on the end face of the optical fiber and can only complete one-dimensional measurement of a single parameter; a few F-P sensors utilize a multilayer reflection structure to construct a plurality of F-P cavities, and measurement of single or multiple parameters in multiple directions is achieved.
The existing two-dimensional and three-dimensional F-P sensors mainly use one optical fiber to construct an F-P sensing cavity in each direction dimension, a plurality of one-dimensional sensors are installed in a plurality of dimension directions and are compounded into a multi-dimensional sensor, so that the purpose of measuring two dimensions and three dimensions is achieved, but the defects caused by the plurality of optical fibers are obvious, the size of the sensor is large, the number of optical fibers carried by the sensor is large, the dimension is higher, the number of required optical fiber interfaces is more, and the like. Few means for constructing the F-P by using the beam splitter prism are shown in FIG. 1, and the beam splitter prism is arranged in the F-P cavity, so that the cavity length of the F-P cavity is influenced by the size of the beam splitter prism, the cavity length is too large, the too large cavity length greatly influences the interference spectrum quality, and the measurement accuracy of the F-P sensor is not high.
Disclosure of Invention
In view of the above, it is necessary to provide a single-fiber multi-dimensional F-P sensing apparatus and a measuring method thereof, so as to solve the technical problems of the prior art that when an F-P sensor measures multi-dimensional parameters, multiple optical fibers are required and the cavity length is too large, which results in an excessively large sensor volume and low measurement accuracy.
In a first aspect, the invention provides a single-fiber multi-dimensional F-P sensing device, which comprises a light source, an optical fiber, a beam splitter prism, at least two reflecting pieces arranged in different directions and a demodulator, wherein the light source is arranged on the optical fiber;
the light source is used for generating a light beam;
the optical fiber is used for transmitting the light beam to the beam splitter prism, and comprises an optical fiber end face opposite to the beam splitter prism, and the optical fiber end face is plated with a first antireflection film;
the beam splitting prism comprises a beam splitting surface and at least two reflecting surfaces which correspond to the at least two reflecting pieces one by one, the at least two reflecting surfaces are parallel to the at least two reflecting pieces corresponding to the at least two reflecting surfaces, the at least two reflecting surfaces and the at least two reflecting pieces corresponding to the at least two reflecting surfaces form at least two F-P cavities, and the cavity lengths of the at least two F-P cavities are different;
the beam splitting surface is used for splitting the light beam into at least two sub-light beams which correspond to the at least two reflecting surfaces one by one, the at least two sub-light beams respectively generate at least two sub-reflected light beams and at least two sub-transmitted light beams at the at least two reflecting surfaces, and the at least two sub-transmitted light beams respectively enter the at least two F-P cavities corresponding to the at least two sub-transmitted light beams and are interfered with the at least two sub-reflected light beams after being reflected by the at least two reflecting pieces to generate at least two sub-interference light beams; the at least two sub-interference light beams are transmitted to the demodulator through the light splitting surface and the optical fiber in sequence;
the demodulator is used for demodulating the at least two sub-interference beams.
In some possible implementations, the at least two reflectors are movable in a direction toward or away from the at least two emission surfaces corresponding thereto to adjust the original cavity lengths of the at least two F-P cavities.
In some possible implementations, the single fiber multi-dimensional F-P sensing device further includes at least two transflective films corresponding to the at least two reflective surfaces one to one, and the at least two transflective films are respectively plated on the at least two reflective surfaces corresponding to the at least two transflective films.
In some possible implementations, the beam splitter prism further includes an incident surface opposite to the end surface of the optical fiber, and the incident surface is coated with a second antireflection film.
In some possible implementations, the light amount of each of the at least two sub-beams is equal.
In some possible implementation manners, the single-fiber multi-dimensional sensor device further includes an optical fiber circulator, where the optical fiber includes a first sub-optical fiber, a second sub-optical fiber, and a third sub-optical fiber, two ends of the first sub-optical fiber are respectively connected to the light source and the optical fiber circulator, one end of the second sub-optical fiber is connected to the optical fiber circulator, the other end of the second sub-optical fiber is the optical fiber end face, and two ends of the third sub-optical fiber are respectively connected to the optical fiber circulator and the demodulator.
In some possible implementations, the single-fiber multi-dimensional F-P sensing device further includes a collimator disposed between the end face of the optical fiber and the beam splitter prism, and an axis of the collimator is parallel to the second sub-optical fiber.
In some possible implementations, the single fiber multi-dimensional F-P sensing device further includes a computing unit;
the calculation unit is used for receiving the demodulation signal demodulated by the demodulator, determining the cavity lengths of the at least two F-P cavities according to the demodulation signal, and acquiring the parameter to be measured of the piece to be measured according to the cavity lengths of the at least two F-P cavities.
In some possible implementations, the reflectivity of each of the at least two reflectors is greater than 90%.
The invention also provides a measuring method of the single-fiber multi-dimensional F-P sensing device, which is suitable for the single-fiber multi-dimensional F-P sensing device in any one of the above implementation modes, and the measuring method of the single-fiber multi-dimensional F-P sensing device comprises the following steps:
generating a light beam by the light source;
transmitting a light beam to the beam splitting prism through the optical fiber; the optical fiber comprises an optical fiber end face opposite to the beam splitter prism, and the optical fiber end face is plated with a first antireflection film; the beam splitting prism comprises a beam splitting surface and at least two reflecting surfaces which correspond to the at least two reflecting pieces one by one, the at least two reflecting surfaces are parallel to the at least two reflecting pieces corresponding to the at least two reflecting surfaces, the at least two reflecting surfaces and the at least two reflecting pieces corresponding to the at least two reflecting surfaces form at least two F-P cavities, and the cavity lengths of the at least two F-P cavities are different;
the light beam is divided into at least two sub-light beams which correspond to the at least two reflecting surfaces one by one through the light splitting surface, the at least two sub-light beams generate at least two sub-reflected light beams and at least two sub-transmitted light beams at the at least two reflecting surfaces respectively, the at least two sub-transmitted light beams enter the at least two F-P cavities corresponding to the at least two sub-transmitted light beams respectively, and after being reflected by the at least two reflecting pieces, the at least two sub-transmitted light beams interfere with the at least two sub-reflected light beams to generate at least two sub-interference light beams; the at least two sub-interference light beams are transmitted to the demodulator through the light splitting surface and the optical fiber in sequence;
demodulating, by the demodulator, the at least two sub-interference beams.
The beneficial effects of the implementation mode are as follows: the invention provides a single-fiber multi-dimensional F-P sensing device, which forms at least two F-P cavities by at least two reflecting surfaces of a beam splitter prism and at least two reflecting pieces corresponding to the reflecting surfaces, namely: the purpose of measuring at least two direction parameters by a single optical fiber is realized by arranging the beam splitter prism, and the reflecting surface of the beam splitter prism participates in constructing the F-P cavity, so that the volume of the single optical fiber multi-dimensional F-P sensing device is reduced. Further, the cavity length of the F-P cavity in the present invention is independent of the size of the beam splitter prism, i.e.: the cavity length of the F-P cavity can be adjusted by adjusting the distance between the reflecting piece and the reflecting surface, and the cavity length of the F-P cavity can be controlled to be a small value, so that the technical problem that the contrast of an interference spectrum is extremely low when the cavity length of the F-P cavity is too long is solved, and the measurement precision of the single-optical-fiber multi-dimensional F-P sensing device is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a prior art sensing device;
FIG. 2 is a schematic structural diagram of an embodiment of a single fiber multi-dimensional F-P sensing device according to the present invention;
fig. 3 is a schematic structural diagram of an embodiment of a light splitting prism according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another embodiment of a light splitting prism according to an embodiment of the present invention;
fig. 5 is a schematic flow chart of an embodiment of a measuring method of a single fiber multi-dimensional F-P sensing device according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The following description is presented to enable any person skilled in the art to make and use the invention. In the following description, details are set forth for the purpose of explanation. It will be apparent to one of ordinary skill in the art that the present invention may be practiced without these specific details. In other instances, well-known structures and processes are not shown in detail to avoid obscuring the description of the invention with unnecessary detail. Thus, the present invention is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
The embodiment of the invention provides a single-fiber multi-dimensional F-P sensing device and a measuring method thereof, which are explained in detail below.
Before the embodiments are shown, multi-dimensions are described, and the multi-dimensions in the embodiments of the present invention refer to measurement of parameters to be measured in multiple directions, not multi-dimensional space. For example: acceleration in multiple directions can be measured.
Fig. 2 is a schematic diagram of an embodiment of a single-fiber multi-dimensional F-P sensing device according to the present invention, and as shown in fig. 2, the single-fiber multi-dimensional F-P sensing device 10 includes a light source 100, an optical fiber 200, a beam splitter prism 300, at least two reflecting members 400 arranged in different directions, and a demodulator 500;
the light source 100 is used for generating a light beam;
the optical fiber 200 is used for transmitting a light beam to the beam splitter prism 300, the optical fiber 200 comprises an optical fiber end face 201 opposite to the beam splitter prism 300, and the optical fiber end face 201 is plated with a first antireflection film 202;
the beam splitter prism 300 comprises a beam splitting surface 310 and at least two reflecting surfaces 320 corresponding to the at least two reflecting pieces 400 one by one, the at least two reflecting surfaces 320 are parallel to the at least two reflecting pieces 400 corresponding to the at least two reflecting surfaces 320, the at least two reflecting surfaces 320 and the at least two reflecting pieces 400 corresponding to the at least two reflecting pieces form at least two F-P cavities 600, and the cavity lengths of the at least two F-P cavities 600 are different;
the splitting surface 310 is configured to split the light beam into at least two sub-light beams corresponding to the at least two reflection surfaces 320 one to one, where the at least two sub-light beams generate at least two sub-reflection light beams and at least two sub-transmission light beams at the at least two reflection surfaces 320, and the at least two sub-transmission light beams enter the at least two F-P cavities 600 corresponding to the at least two sub-transmission light beams and are reflected by the at least two reflection members 400 to interfere with the at least two sub-reflection light beams, so as to generate at least two sub-interference light beams; at least two sub-interference beams are transmitted to the demodulator 500 through the beam splitting surface 310 and the optical fiber 200 in sequence;
the demodulator 500 is used to demodulate at least two sub-interference beams.
The demodulator 500 demodulates at least two sub-interference beams according to a preset algorithm to obtain a demodulation signal; specifically, the preset algorithm is a fourier algorithm.
Compared with the prior art, the single-fiber multi-dimensional F-P sensing device 10 provided by the embodiment of the invention has the advantages that at least two reflecting surfaces 320 of the beam splitter prism 300 and at least two reflecting pieces 400 corresponding to the reflecting surfaces form at least two F-P cavities 600, and each F-P cavity 600 can realize the measurement of one parameter to be measured. According to the embodiment of the invention, the purpose of measuring at least two direction parameters by a single optical fiber is realized by arranging the light splitting prism 300, and the reflecting surface 320 of the light splitting prism 300 participates in the construction of the F-P cavity 600, so that the volume of the single optical fiber multi-dimensional F-P sensing device 10 is reduced. Further, the cavity length of the F-P cavity 600 in the present invention is independent of the size of the beam splitter prism 300, that is: the cavity length of the F-P cavity 600 can be adjusted by adjusting the distance between the reflector 400 and the reflecting surface 320, and the cavity length of the F-P cavity 600 can be controlled to be a small value, so that the technical problem that the contrast of interference spectrum is extremely low when the cavity length of the F-P cavity 600 is too long is solved, and the measurement accuracy of the single-fiber multi-dimensional F-P sensing device 10 is improved.
In order to avoid errors in manual installation, which may result in a large difference between the original cavity length of the F-P cavity 600 and the theoretical original cavity length, in one embodiment of the present invention, at least two reflectors 400 may be moved in a direction close to or away from at least two emission surfaces 300 corresponding thereto to adjust the original cavity lengths of at least two F-P cavities 600.
By setting the original cavity length of the F-P cavity 600 to be adjustable, the adjustability of the original cavity length of the F-P cavity 600 can be improved, and the measurement accuracy of the single-fiber multi-dimensional F-P sensing device 10 is further improved.
In one embodiment of the present invention, the single fiber multi-dimensional F-P sensor device 10 is a single fiber two-dimensional sensor device, and is configured as shown in fig. 2, the beam splitter prism 300 includes a beam splitting surface 310, a first reflecting surface 321 and a second reflecting surface 322, the first reflecting surface 321 is perpendicular to the second reflecting surface 322, and an included angle between the beam splitting surface 310 and the first reflecting surface 321 is 45 °. And the single fiber multi-dimensional F-P sensing device 10 includes two reflecting members 400, which are a first reflecting member 410 and a second reflecting member 420, respectively, the first reflecting member 410 is parallel to the first reflecting surface 321, the second reflecting member 420 is parallel to the second reflecting surface 322, the first reflecting member 410 and the first reflecting surface 321 form a first F-P cavity 610, the second reflecting member 420 and the second reflecting surface 322 form a second F-P cavity 620, the light beam emitted from the light source 100 is divided into a first sub-light beam perpendicular to the first reflecting surface 321 and a second sub-light beam perpendicular to the second reflecting surface 322 at the splitting surface 310 via the optical fiber 200, the first sub-light beam is reflected and transmitted at the first reflecting surface 321 to generate a first sub-reflected light beam and a first sub-transmitted light beam, the first sub-transmitted light beam is reflected at the first reflecting member 410 via the first F-P cavity 610 to be reflected to the first reflecting surface 321, and interferes with the first sub-reflected beam at the first reflecting surface 321 to generate a first sub-interference beam; the second sub-beam is also reflected and transmitted at the second reflective surface 322 to generate a second sub-reflected beam and a second sub-transmitted beam, which is reflected at the second reflective element 420 through the second F-P cavity 620, reflected to the second reflective surface 322, and interfered with the second sub-reflected beam at the second reflective surface 322 to generate a second sub-interference beam. The first sub-interference light beam and the second sub-interference light beam are transmitted to the demodulator 500 through the splitting surface 310 and the optical fiber 200, and the demodulator 500 demodulates the first sub-interference light beam and the second sub-interference light beam respectively, so as to realize two-dimensional measurement.
In one embodiment of the present invention, the single-fiber multi-dimensional F-P sensor 10 is a single-fiber three-dimensional sensor, and is configured as shown in fig. 3, the beam splitter 300 includes a first sub-splitting surface 311 and a second sub-splitting surface 312, the beam is split into a first sub-beam and a second sub-beam in two directions at the first sub-splitting surface 311, the directions of the first sub-beam and the second sub-beam are the X direction and the Y direction in fig. 3, respectively, the second sub-beam in the Y direction is split into a third sub-beam and a fourth sub-beam in two directions at the second sub-splitting surface 312, the directions of the third sub-beam and the fourth sub-beam are the Y direction in fig. 3 and the Z direction perpendicular to the paper, respectively, and other configurations thereof are adjusted on the basis of the two-dimensional sensor, so as to realize single-fiber three-dimensional measurement.
It should be noted that: in order to further simplify the structure of the beam splitter prism, in some embodiments of the present invention, as shown in fig. 4, the beam splitter prism 300 includes a beam splitting surface 310, and the beam is split into three sub-beams with different directions at the beam splitting surface 310, so as to realize three-dimensional measurement of a single optical fiber. Wherein the three sub-beams in different directions are respectively in the X-direction, the Y-direction and the Z-direction perpendicular to the paper plane shown in fig. 4.
The splitting plane 310 in fig. 4 is only a schematic diagram for easy understanding, and in practical applications, the splitting plane 310 may be implemented to split the light beam into three sub-light beams in different directions.
It should be understood that: the single fiber multi-dimensional F-P sensing device 10 realizes four-dimensional or even higher-dimensional measurement, and by setting the splitting surface 310 or structure of the beam splitter prism 300, the light beam is split into sub-beams in multiple directions by the beam splitter prism 300, and the number and the setting position of the reflecting elements 400 are adjusted adaptively, which is not described herein.
In order to improve the reliability of the measurement of the single fiber multi-dimensional F-P sensing device 10, in some embodiments of the present invention, as shown in fig. 2, the single fiber multi-dimensional F-P sensing device 10 further includes at least two transflective films 700 corresponding to the at least two reflective surfaces 320, and the at least two transflective films 700 are respectively coated on the at least two reflective surfaces 320 corresponding to the at least two transflective films 700.
Taking the single-fiber two-dimensional sensor device as an example, the single-fiber multi-dimensional F-P sensor device 10 includes a first transflective film 710 and a second transflective film 720, wherein the first transflective film 710 is plated on the first reflective surface 321, and the second transflective film 720 is plated on the second reflective surface 322.
By plating the first transflective film 710 on the first reflecting surface 321, the light quantities of the first sub-reflected light beam and the first sub-transmitted light beam can be the same, and the failure of the single-fiber multi-dimensional F-P sensing device 10 in measuring parameters due to the incapability of effectively traveling the first sub-interference light beam when the difference between the light quantities of the first sub-reflected light beam and the first sub-transmitted light beam is large is avoided. Similarly, the reliability of the single fiber multi-dimensional F-P sensing device 10 can be improved by plating the second transflective film 720 on the second reflecting surface 322.
Further, in order to reduce the loss of the light beam, as shown in fig. 2, in some embodiments of the present invention, the beam splitter prism 300 further includes an incident surface 330 opposite to the fiber end surface 201, and the incident surface 330 is coated with a second antireflection film 331.
By plating the second antireflection film 331 on the incident surface 330, the emission of the light beam at the incident surface 330 can be further reduced, the transmission of the light beam at the incident surface 330 can be improved, so that the loss of the light beam can be reduced, the influence of the reflected light at the incident surface 330 on the first sub-interference light beam and the second sub-interference light beam can be avoided, and the measurement reliability of the single-fiber multi-dimensional F-P sensing device 10 can be improved.
To further improve the measurement reliability of the single fiber multi-dimensional F-P sensing device 10, in some embodiments of the present invention, the light quantities of each of the at least two sub-beams are equal. Namely: the splitting plane 310 equally divides the light beam into at least two sub-beams.
By setting the light quantity of each of the at least two sub-beams to be equal, it is avoided that when the light quantity of one of the sub-beams is too small, the one of the sub-beams is submerged by noise, so that the one of the sub-beams cannot be detected, and thus the measurement of the one of the sub-beams by the single-fiber multi-dimensional F-P sensing device 10 is disabled.
In some embodiments of the present invention, as shown in fig. 2, the single fiber multi-fiber sensor device 10 further includes a fiber circulator 800, the optical fiber 200 includes a first sub-fiber 210, a second sub-fiber 220 and a third sub-fiber 230, two ends of the first sub-fiber 210 are respectively connected to the light source 100 and the fiber circulator 800, one end of the second sub-fiber 220 is connected to the fiber circulator 800, the other end of the second sub-fiber 220 is a fiber end face 201, and two ends of the third sub-fiber 230 are respectively connected to the fiber circulator 800 and the demodulator 500.
By providing the fiber optic circulator 800, bidirectional beam transmission over a single fiber 200 can be achieved, further simplifying the structure and volume of the single fiber multi-dimensional F-P sensing device 10.
In order to further reduce the loss of the light beam, in some embodiments of the present invention, as shown in fig. 2, the single-fiber multi-dimensional F-P sensing device 10 further includes a collimator 900, the collimator 900 is disposed between the fiber end surface 201 and the beam splitter prism 300, and the axis of the collimator 900 is parallel to the second sub-fiber 220.
The loss of the beam is reduced by arranging collimator 900 to convert the beam with a larger divergence angle into a beam with a smaller divergence angle.
In some embodiments of the present invention, as shown in FIG. 2, the single fiber multi-dimensional F-P sensing device 10 further comprises a calculation unit 510;
the calculating unit 510 is configured to receive the demodulated signal demodulated by the demodulator 500, determine the cavity lengths of the at least two F-P cavities 600 according to the demodulated signal, and obtain a parameter to be measured of the to-be-measured object according to the cavity lengths of the at least two F-P cavities 600.
Specifically, the calculating unit 520 may distinguish the demodulated at least two sub-interference beams in different directions according to the original cavity lengths of the at least two F-P cavities 600 calibrated in advance, and calculate the distinguished parameters to be measured of the to-be-measured object in different directions.
In some embodiments of the present invention, the reflectivity of each of the at least two reflectors 400 is greater than 90%.
The reflective member 400 may be, but is not limited to, a mirror, a metal sheet, a reflective film, or other elements having optical reflection capability. And the reflector 400 may generate a corresponding displacement parallel to the emitting surface 320 with the change of the parameter to be measured, so that the cavity length of the F-P cavity 600 is changed.
In some embodiments of the present invention, light source 100 is a broadband light source and optical fiber 200 is a single mode optical fiber. Wherein the spectral width of the light source 100 is greater than 20 nm.
The embodiment of the present invention further provides a measurement method for a single fiber multi-dimensional F-P sensing device, which is suitable for the single fiber multi-dimensional F-P sensing device 10 in any of the above embodiments, and as shown in fig. 5, the measurement method for the single fiber multi-dimensional F-P sensing device 10 includes:
s501, generating a light beam through the light source 100;
s502, transmitting the light beam to the beam splitter prism 300 through the optical fiber 200;
the optical fiber 200 comprises an optical fiber end face 201 opposite to the beam splitter prism 300, and the optical fiber end face 201 is plated with a first antireflection film 202; the beam splitter prism 300 comprises a beam splitting surface 310 and at least two reflecting surfaces 320 corresponding to the at least two reflecting pieces 400 one by one, the at least two reflecting surfaces 320 are parallel to the at least two reflecting pieces 400 corresponding to the at least two reflecting surfaces 320, the at least two reflecting surfaces 320 and the at least two reflecting pieces 400 corresponding to the at least two reflecting pieces form at least two F-P cavities 600, and the cavity lengths of the at least two F-P cavities 600 are different;
s503, the light beam is divided into at least two sub-light beams corresponding to the at least two reflection surfaces 320 one to one by the light splitting surface 310, the at least two sub-light beams generate at least two sub-reflection light beams and at least two sub-transmission light beams at the at least two reflection surfaces 320, the at least two sub-transmission light beams enter the at least two F-P cavities 600 corresponding thereto, and interfere with the at least two sub-reflection light beams after being reflected by the at least two reflection members 400, so as to generate at least two sub-interference light beams; at least two sub-interference beams are transmitted to the demodulator 500 through the beam splitting surface 310 and the optical fiber 200 in sequence;
and S504, demodulating the at least two sub interference beams by the demodulator 500.
According to the single-fiber multi-dimensional F-P sensing device 10 and the measuring method thereof provided by the embodiment of the invention, at least two F-P cavities 600 are formed by at least two reflecting surfaces 320 of the beam splitter prism 300 and at least two reflecting pieces 400 corresponding to the reflecting surfaces, and each F-P cavity 600 can realize the measurement of one parameter to be measured. According to the embodiment of the invention, the purpose of measuring at least two direction parameters by a single optical fiber is realized by arranging the beam splitter prism 300, and the volume of the single optical fiber multi-dimensional F-P sensing device 10 is reduced. Further, the cavity length of the F-P cavity 600 in the present invention is independent of the size of the beam splitter prism 300, that is: the cavity length of the F-P cavity 600 can be adjusted by adjusting the distance between the reflector 400 and the reflecting surface 320, and the cavity length of the F-P cavity 600 can be controlled to be a small value, so that the technical problem that the contrast of interference spectrum is extremely low when the cavity length of the F-P cavity 600 is too long is solved, and the measurement accuracy of the single-fiber multi-dimensional F-P sensing device 10 is improved.
Those skilled in the art will appreciate that all or part of the flow of the method implementing the above embodiments may be implemented by a computer program, which is stored in a computer readable storage medium, to instruct related hardware. The computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory.
The single-fiber multi-dimensional F-P sensing device and the measuring method thereof provided by the embodiments of the present invention are described in detail above, and the principle and the implementation of the present invention are explained in the present document by applying specific embodiments, and the description of the above embodiments is only used to help understanding the method and the core idea of the present invention; meanwhile, for those skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (10)
1. A single-fiber multi-dimensional F-P sensing device is characterized by comprising a light source, an optical fiber, a beam splitter prism, at least two reflecting pieces arranged in different directions and a demodulator;
the light source is used for generating a light beam;
the optical fiber is used for transmitting the light beam to the beam splitter prism, and comprises an optical fiber end face opposite to the beam splitter prism, and the optical fiber end face is plated with a first antireflection film;
the beam splitting prism comprises a beam splitting surface and at least two reflecting surfaces which correspond to the at least two reflecting pieces one by one, the at least two reflecting surfaces are parallel to the at least two reflecting pieces corresponding to the at least two reflecting surfaces, the at least two reflecting surfaces and the at least two reflecting pieces corresponding to the at least two reflecting surfaces form at least two F-P cavities, and the cavity lengths of the at least two F-P cavities are different;
the beam splitting surface is used for splitting the light beam into at least two sub-light beams which correspond to the at least two reflecting surfaces one by one, the at least two sub-light beams respectively generate at least two sub-reflected light beams and at least two sub-transmitted light beams at the at least two reflecting surfaces, and the at least two sub-transmitted light beams respectively enter the at least two F-P cavities corresponding to the at least two sub-transmitted light beams and are interfered with the at least two sub-reflected light beams after being reflected by the at least two reflecting pieces to generate at least two sub-interference light beams; the at least two sub-interference light beams are transmitted to the demodulator through the light splitting surface and the optical fiber in sequence;
the demodulator is used for demodulating the at least two sub-interference beams.
2. The single fiber multi-dimensional F-P sensing device according to claim 1, wherein said at least two reflecting members are movable in a direction toward or away from said at least two emitting surfaces corresponding thereto to adjust the original cavity length of said at least two F-P cavities.
3. The single fiber multi-dimensional F-P sensing device as claimed in claim 1, further comprising at least two transflective films in one-to-one correspondence with said at least two reflective surfaces, said at least two transflective films being respectively plated on said at least two reflective surfaces corresponding thereto.
4. The single fiber multi-dimensional F-P sensing device of claim 1, wherein said beam splitter prism further comprises an entrance surface opposite said fiber end surface, said entrance surface being coated with a second antireflection coating.
5. The single fiber multi-dimensional F-P sensing device of claim 1, wherein the amount of light in each of said at least two sub-beams is equal.
6. The single-fiber multi-dimensional F-P sensing device as claimed in claim 1, wherein the single-fiber multi-dimensional sensor device further comprises a fiber circulator, the fiber comprises a first sub-fiber, a second sub-fiber and a third sub-fiber, two ends of the first sub-fiber are respectively connected to the light source and the fiber circulator, one end of the second sub-fiber is connected to the fiber circulator, the other end of the second sub-fiber is the fiber end face, and two ends of the third sub-fiber are respectively connected to the fiber circulator and the demodulator.
7. The single fiber multi-dimensional F-P sensing device as claimed in claim 6, further comprising a collimator disposed between the end face of the optical fiber and the splitting prism, and having an axis parallel to the second sub-fiber.
8. The single fiber multi-dimensional F-P sensing device of claim 1, further comprising a computing unit;
the calculation unit is used for receiving the demodulation signal demodulated by the demodulator, determining the cavity lengths of the at least two F-P cavities according to the demodulation signal, and acquiring the parameter to be measured of the piece to be measured according to the cavity lengths of the at least two F-P cavities.
9. The single fiber multi-dimensional F-P sensing device of claim 1, wherein each of said at least two reflecting members has a reflectivity greater than 90%.
10. A method for measuring a single fiber multi-dimensional F-P sensor device, which is applied to the single fiber multi-dimensional F-P sensor device as claimed in any one of claims 1 to 9, and comprises:
generating a light beam by the light source;
transmitting a light beam to the beam splitting prism through the optical fiber; the optical fiber comprises an optical fiber end face opposite to the beam splitter prism, and the optical fiber end face is plated with a first antireflection film; the beam splitting prism comprises a beam splitting surface and at least two reflecting surfaces which correspond to the at least two reflecting pieces one by one, the at least two reflecting surfaces are parallel to the at least two reflecting pieces corresponding to the at least two reflecting surfaces, the at least two reflecting surfaces and the at least two reflecting pieces corresponding to the at least two reflecting surfaces form at least two F-P cavities, and the cavity lengths of the at least two F-P cavities are different;
the light beam is divided into at least two sub-light beams which correspond to the at least two reflecting surfaces one by one through the light splitting surface, the at least two sub-light beams generate at least two sub-reflected light beams and at least two sub-transmitted light beams at the at least two reflecting surfaces respectively, the at least two sub-transmitted light beams enter the at least two F-P cavities corresponding to the at least two sub-transmitted light beams respectively, and after being reflected by the at least two reflecting pieces, the at least two sub-transmitted light beams interfere with the at least two sub-reflected light beams to generate at least two sub-interference light beams; the at least two sub-interference light beams are transmitted to the demodulator through the light splitting surface and the optical fiber in sequence;
demodulating, by the demodulator, the at least two sub-interference beams.
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