CN102080972A - External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring - Google Patents
External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring Download PDFInfo
- Publication number
- CN102080972A CN102080972A CN2009102462324A CN200910246232A CN102080972A CN 102080972 A CN102080972 A CN 102080972A CN 2009102462324 A CN2009102462324 A CN 2009102462324A CN 200910246232 A CN200910246232 A CN 200910246232A CN 102080972 A CN102080972 A CN 102080972A
- Authority
- CN
- China
- Prior art keywords
- fabry
- perot
- optical fiber
- type
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses an external cavity-type optical fiber Fabry-Perot sensor and a system and method for vibration monitoring. The external cavity-type optical fiber Fabry-Perot sensor comprises an optical fiber with a fixed end part and an end face, a reflecting element with a reflecting plane, and a suspending arm part with one end connected to the reflecting element and the other end connected to a second supporting part, wherein Fabry-Perot cavities are formed between the reflecting plane and the end face of the optical fiber;, and the suspending arm part is used for conducting an externally-applied vibrating force to the reflecting element to change the length of the Fabry-Perot cavities. The sensor has wide dynamic monitoring range. The external cavity-type optical fiber Fabry-Perot sensor with a difference structure can be formed by integrating two identical Fabry-Perot cavities together, thus the high monitoring sensitivity can be enhanced and the influence of temperature change on the monitoring result can be eliminated.
Description
Technical field
The present invention relates in general to the fiber optics sensor, the vibration monitor system and the method that are specifically related to a kind of external cavity type optical fibre Fabry-perot sensor and use this external cavity type optical fibre Fabry-perot sensor.
Background technology
Engine or generator take place to shut down by force or cause faults usually is that problem has appearred in the end winding.The end winding goes wrong usually owing to vibration causes.Voltage stress, mechanical stress and thermal effect are destroyed the integrality of insulating material, the steadiness of end winding and the elasticity of stator continuously.Along with wearing and tearing and loosening aggravation gradually, the end basket vibration can be more and more fierce, thereby cause wearing and tearing to be quickened, even destructive influences may take place.
If survey and monitor the end basket vibration, can prevent to take place above-mentioned destructive influences at the very start.Whether within the acceptable range the on-line monitoring of end basket vibration can clearly illustrate level of vibration.Can also predict the trend of ageing process by simple data analysis, thereby take place just can to make turnaround plan before severe impairment and the fault, thereby can optimize plant produced.
The system that the vibration of end winding is carried out on-line monitoring generally includes the sensing system and the information handling system that is used for the information of monitoring is handled that is used to monitor the end basket vibration.Information handling system can comprise the microprocessor that is used to carry out signal Processing and be used to write down the database of the feature of end basket vibration.Sensing system can adopt semiconductor transducer, metal film sensors and piezoelectric sensor.Yet, when the sensor that these is had conductive characteristic and structure is installed to the high-voltage region of machine intimate, can bring threat to staff and machine safety, directly be installed on the winding of end this electric installation all the more so.Therefore, the sensor that can conduct electricity is monitored the vibration of end winding indirectly only for the motion that is used for support by monitoring end winding and supporting structure.Therefore, this method can not be measured the actual vibration of end winding effectively.
Optical sensor is different with conductivity sensor, and it can be arranged in the forceful electric power magnetic environment and not influence its monitoring performance, also can not cause danger to the staff who is in the measured zone.Therefore, optical sensor can closely be installed on the winding of end, thereby direct vibration information is provided.And, can therefore can also the vibration information that optical sensor monitors not outputed to teleprocessing unit analysis when in optical fiber, transmitting owing to distortion takes place electromagnetic interference (EMI) by optical fiber owing to information.In addition, optical sensor also have operating temperature range wide, have advantages such as multiplexing capacity and low cost of manufacture.These advantages make the research and development fast development of optical sensor.
The optical fibre Fabry-perot sensor is an important branch of optical sensor research field, and it is particularly suitable for using under rugged surroundings.Fabry-Perot-type cavity forms by form air chamber between two blocks of transparent medium plates parallel to each other usually.A branch of incident light experiences back and forth repeatedly reflection in air chamber, thereby forms multi beam transmitted light beam parallel to each other.The propagation path of light difference that these transmitted light beams experienced, thus optical path difference had, and correspondingly have phase differential.The optical fibre Fabry-perot sensor can be divided into intracavity Fabry-Perot interference (IFPI) sensor and external cavity type Fabry-Perot interference sensor (EFPI) according to the structure in chamber.The Fabry-Perot-type cavity of intracavity Fabry-Perot interference sensor is made of one section optical fiber, and two end faces of this section optical fiber are cut and are coated with reflectance coating.But this intracavity Fabry-Perot interference sensor may cause taking place polarization effect owing to the big or little bending of optical fiber, and signal is departed from.The Fabry-Perot-type cavity of external cavity type Fabry-Perot interference sensor is formed on outer fiber, optical fiber mainly is used as the I/O medium of Fabry-Perot-type cavity, because the Fabry-Perot-type cavity design is in outer fiber, therefore the degree of freedom of design is bigger, and polarization can not take place.
U.S. Pat 6,581,465 proposed a kind of based on exocoel Fabry-Perot interferometer and p
+The vibration gauge of n silicon optical sensor.Transmitted light by Fabry-Perot etalon has index sensitivity to eyeglass movably by the little displacement that the vibration force that is applied causes.This optical sensor with this displacement conversion for electric signal and additional amplification is provided.The user is by providing electrostatic potential to control the sensitivity of vibration gauge between the Fabry-Perot etalon of the air-gap that select to need and minute surface.A significant disadvantages of this vibration gauge is that it has current-carrying part (silicon), and its sensitivity regulates by electricity, these drawbacks limit its application in strong electromagnetic interference environment.
U.S. Pat 6,008,898 have proposed a kind of external cavity type optical fibre Fabry-perot interference sensor that is used for measuring vibrations.This Fibre Optical Sensor comprise freely the single-mode fiber that hangs (suspended) and with the tight close catoptron of the end face of this optical fiber.The end face of this optical fiber is vertical substantially with the optical axis of optical fiber.The end face of optical fiber is arranged to parallel with the minute surface of catoptron, thus between forming method Fabry-Perot-type air-gap.Incident beam passes through to take place repeatedly reflection back quilt reflected back optical fiber formation interference signal once more in air-gap.Freely-suspended optical fiber form can induction vibration sensing element.Vibration force is subjected to displacement optical fiber, thereby changes the length of air-gap.
The inventor finds in research and experiment, when the vibration force that is applied is very big, freely-suspended optical fiber can fiercely vibrate, this can make the scope of output signal move to the nonlinear area of Fabry-Perot interference, this greatly limited this vibration transducer the dynamic range of the vibration force that can monitor.
Summary of the invention
The embodiment of the invention provides a kind of external cavity type optical fibre Fabry-perot sensor, and the dynamic range of the vibration force that it can be measured is big.
The embodiment of the invention provides a kind of vibration monitor system, and it comprises above-mentioned external cavity type optical fiber Fabry one Perot sensor.
The embodiment of the invention provides another kind of external cavity type optical fibre Fabry-perot sensor, and it is highly sensitive, and monitoring result is not subjected to influence of temperature change.
The embodiment of the invention provides another kind of vibration monitor system, and it comprises above-mentioned another kind of external cavity type optical fibre Fabry-perot sensor.
The embodiment of the invention also provides a kind of method that vibration is monitored, its monitoring sensitivity height, and can eliminate the influence of temperature variation to monitoring result.
The external cavity type Fabry-Perot sensor that is used for vibration is monitored according to one embodiment of the invention comprises: optical fiber, and partial fixing is supported by first in the end of this optical fiber, this optical fiber has an end face in its end; Reflecting element, this reflecting element has reflecting surface, forming method Fabry-Perot-type cavity between the end face of this reflecting surface and optical fiber; Bracketed part, the one end is connected to described reflecting element, and the other end is connected to second and supports part, and described bracketed part is used for the vibration force that the external world applies is conducted to described reflecting element, thus the chamber that changes described Fabry-Perot-type cavity is long.The conduction vibration power because the use cantilever portion is assigned to, therefore that extraneous very significantly vibration force can be converted into is very little, make the vibration force of this external cavity type optical fibre Fabry-perot working sensor in the range of linearity, thereby this external cavity type Fabry-Perot sensor has very big monitoring dynamic range.
Preferably, bracketed part comprises the bracketed part of a plurality of even layouts.Can transmit vibration force equably to reflecting element like this, thereby reflecting element is deflected.
Bracketed part preferably forms by micro-processing method.Reflecting element, first supports part, second to support part also can form by micro-processing method.Micro-processing method can be guaranteed this external cavity type Fabry-Perot working sensor in the range of linearity, and is positioned at the working point of monitoring peak response.
Vibration monitor system comprises: LASER Light Source according to an embodiment of the invention; Aforesaid external cavity type optical fibre Fabry-perot sensor is used for receiving the light that described LASER Light Source is sent by described optical fiber, produces interference light by described Fabry-Perot-type cavity, and described interference light is transmitted back described optical fiber; Optical circulator, the light that is used for described LASER Light Source is sent separates with described interference light; Photo-detector is used for surveying from the isolated described interference light intensity of described optical circulator, and is converted into electric signal; Data analysis set-up is used for receiving described electric signal from described photo-detector, therefrom analyzes vibration information.
The external cavity type optical fibre Fabry-perot sensor that is used for according to another embodiment of the present invention vibration is monitored comprises: the-optical fiber, and its end is fixed in first supporter, and this optical fiber has first end face in its end; Second optical fiber, its end is fixed in second supporter, and this optical fiber has second end face in its end; Reflecting element, between described first optical fiber and described second optical fiber, this reflecting element has first reflecting surface and second reflecting surface, form first Fabry-Perot-type cavity between first reflecting surface of this reflecting element and first end face of first optical fiber, form second Fabry-Perot-type cavity between second reflecting surface of this reflecting element and second end face of second optical fiber; Bracketed part, the one end is connected to described reflecting element, the other end is connected to the 3rd supporter, and described bracketed part is used for the vibration force that the external world applies is conducted to described reflecting element, thereby the chamber that changes first Fabry-Perot-type cavity and second Fabry-Perot-type cavity is long.Owing to adopted two Fabry-Perot-type cavities to form differential configurations, therefore can be so that monitoring sensitivity double, and can eliminate or alleviate the influence of temperature variation to monitoring result.
Preferably, first Fabry-Perot-type cavity has identical optical characteristics with second Fabry-Perot-type cavity.Can guarantee that like this temperature variation is identical to the long influence in the chamber of two Fabry-Perot-type cavities, thereby can eliminate the influence of temperature variation fully monitoring result.
Bracketed part is preferably the bracketed part of a plurality of even layouts.Can transmit vibration force equably to reflecting element like this, thereby reflecting element is deflected.
Bracketed part preferably forms by micro-processing method.Reflecting element, first supporter, second supporter and the 3rd supporter also can form by micro-processing method, thereby are forming precision-matched each other, guarantee that two Fabry-Perot-type cavities have identical optical characteristics.
Vibration monitor system comprises according to another embodiment of the present invention: LASER Light Source is used to produce first light beam and second light beam; The external cavity type optical fibre Fabry-perot sensor of aforesaid formation differential configuration, be used for receiving first light beam by first optical fiber, and first interference light transmitted back first optical fiber, and receive second light beam by second optical fiber, and second interference light is transmitted back second optical fiber; Wherein first interference light obtains by first Fabry-Perot-type cavity, and second interference light obtains by second Fabry-Perot-type cavity; First optical circulator is used for first interference light and first beam separation; Second optical circulator is used for second interference light and second beam separation; First photo-detector is used for surveying from first optical circulator isolated first and interferes light intensity, and is converted into first electric signal; Second photo-detector is used for surveying from second optical circulator isolated second and interferes light intensity, and is converted into second electric signal; Data analysis set-up is used for receiving first electric signal from first photo-detector, and receives second electric signal from second photo-detector, first electric signal and second electric signal is subtracted each other obtain differential electric signal, and analyze vibration information from the differential electric signal that obtains.
The vibration monitoring method comprises according to an embodiment of the invention: the light that same light source is sent is divided into first light beam and second light beam; With first beam Propagation to aforesaid first Fabry-Perot-type cavity with external cavity type optical fibre Fabry-perot sensor of differential configuration, with second beam Propagation to second Fabry-Perot-type cavity; Detection is surveyed from the intensity signal of second interference light of second Fabry-Perot-type cavity generation from the intensity signal of first interference light of first Fabry-Perot-type cavity generation; The intensity signal of the intensity signal of first interference light and second interference light subtracted each other obtain difference information.From described difference information, parse vibration information.This vibration monitoring method has high monitoring sensitivity and its monitoring result is not acted upon by temperature changes.
Description of drawings
Describe the preferred embodiments of the present invention below with reference to accompanying drawings in detail, so that clearer above-mentioned and other feature and advantage of the present invention of those of ordinary skill in the art.In the accompanying drawing, identical label is represented identical parts.
Fig. 1 be the optic response of Fabry-Perot-type cavity and chamber long concern synoptic diagram.
Fig. 2 is the structure schematic cross-section of external cavity type optical fibre Fabry-perot sensor according to an embodiment of the invention.
Fig. 3 adopts the synoptic diagram of the vibration monitor system of external cavity type optical fibre Fabry-perot sensor as shown in Figure 2.
Fig. 4 is the structure sectional view of external cavity type optical fibre Fabry-perot sensor according to another embodiment of the present invention.
Fig. 5 adopts the composition synoptic diagram of the vibration monitor system of external cavity type optical fibre Fabry-perot sensor as shown in Figure 4.
Fig. 6 is the process flow diagram of vibration monitoring method according to an embodiment of the invention.
Embodiment
In order to make technical scheme of the present invention and advantage clearer, below in conjunction with drawings and Examples, the present invention is described in detail.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
Fig. 1 be the optic response of Fabry-Perot-type cavity and chamber long concern synoptic diagram.Show the synoptic diagram of parallel flat multiple-beam interference on Fig. 1 right side.Parallel flat mechanics Fabry-Perot-type cavity.Repeatedly reflection takes place in a branch of incident light in Fabry-Perot-type cavity, produce the light beam that multi beam has certain phase differential each other, whole transmitted light homophase addition with same phase (being that phase differential is the integral multiple of 2 π), resonance takes place in the chamber, thereby produce the transmission maximal value, accordingly, can produce the reflection minimum value.Reflected light or transmission light intensity be with reflected light or transmitted light comprise total complex amplitude absolute value after the complex amplitude addition of amplitude and phase place square.The light intensity reflectivity represents with R, and the light intensity transmissivity represents with T, supposes that plate material can ignore to the absorption of light, then according to principle of conservation of energy, and R+T=1.The incident light intensity is E in addition
0, wavelength is λ, and the thickness of parallel flat is d, and refractive index is n, I
tExpression transmission light intensity, I
rRepresent catoptrical intensity, then I
tAnd I
rCan calculate by following formula.
Wherein, Δ φ is that the light wave of wavelength X is to propagate a phase delay that is produced back and forth in the chamber of d in length, is 0 ° in incident angle, and during n=1, Δ φ can be expressed from the next:
Δφ＝4πd/λ (2)
F is the fineness coefficient, and it is used to characterize the peak value half-breadth, and promptly light intensity equals corresponding distance on the half curve of intensity maxima at 2, and it is relevant with dull and stereotyped reflectivity.F can be expressed from the next:
Therefore, has peak response S
MaxWorking point P be positioned at reflective light intensity and change maximum part with the chamber is long.Peak response draws by following formula:
S
max＝MAX(d(I
r/E
0)/d(Δφ)) (4)
In conjunction with Fig. 1 and formula (1) and (2) as can be seen, long d changes in the chamber, when for example vibration force causes the long d in chamber to change, from the multi-beam that the incident boundary reflection goes out, corresponding the changing of optical path difference meeting between the adjacent two-beam, therefore the index change can take place in catoptrical intensity, and may produce maximum of intensity and minimum of intensity.The variation of catoptrical intensity can detect by photo-detector, so vibration information can be obtained by analyzing catoptrical Strength Changes.
According to the feature of incident light, for example incident light wavelength, and the feature of Fabry-Perot-type cavity, for example the refractive index in chamber and chamber are long, and when applying external vibration power, maximal value or minimum value can appear in catoptrical light intensity.Because the variation of valid round force constant (effective spring constant), each point of reflectance curve is corresponding to different sensitivity and linear degree.Therefore, can be by changing material and physical dimension in manufacture process, for example the initial cavity of the reflectivity of reflecting surface, Fabry-Perot-type cavity is long, adjusts the sensitivity and the linearity.Fig. 1 also illustrates the typical response that the interface has the chamber of middle isoreflectance.As can be seen from the figure, the working point P that is arranged in range of linearity LZ has maximum slope, i.e. Zui Da sensitivity.
External cavity type optical fibre Fabry-perot sensor comprises according to an embodiment of the invention: optical fiber, reflecting element and bracketed part.Partial fixing is supported by first in the end of optical fiber, and it has an end face.Reflecting element has reflecting surface, forming method Fabry-Perot-type cavity between the end face of itself and optical fiber.Bracketed part one end is connected to reflecting element, and the other end is connected to second and supports part.Bracketed part is used for the vibration force that the external world applies is conducted to reflecting element, thereby the chamber that changes Fabry-Perot-type cavity is long.
The following preferred embodiment of describing above-mentioned external cavity type optical fibre Fabry-perot sensor with reference to Fig. 2 in detail.Fig. 2 is the structure schematic cross-section of external cavity type optical fibre Fabry-perot sensor.As shown in Figure 2, comprise two substrates 112 and 114 according to the external cavity type optical fibre Fabry-perot sensor 12 of present embodiment, it is separated to form little slit by two separators 122.In this case, substrate 112 is called the mass reflection substrate, and it comprises mass 120 and the cantilever 118 with reflecting surface 124.Different with mass reflection substrate 112, substrate 114 does not comprise cantilever, and only comprises fixing supporter.Substrate 114 comprises groove 128, and it is as the tubular stinger that is used for receiving optical fiber 116.Substrate 114 can be called the benchmark reflection substrate.Optical fiber 116 has partial reflection end face 126, thus between the reflecting surface 124 of the end face 126 of optical fiber 116 and mass forming method Fabry-Perot-type cavity 130.
Though Fig. 2 illustrates substrate 112 and substrate 114 is separated by separator 112, the present invention is not limited to this.Substrate 112 and substrate 114 also can form as one, because the chamber length of Fabry-Perot-type cavity depends on the distance between the reflecting surface of the end face of optical fiber and mass rather than the distance of substrate 112 and substrate 114.
The end face of optical fiber 116 is by edge and the vertical substantially direction cutting of the optical axis of optical fiber.According to the distance that the light needs are propagated in optical fiber, can select multimode optical fiber or single-mode fiber as optical fiber 116.If do not need light to propagate very long distance, then can adopt multimode optical fiber.Light is propagated long distance if desired, then can select single-mode fiber.When the external cavity type optical fibre Fabry-perot sensor of the embodiment of the invention is arranged in the comparison rugged environment, need with the light transmission larger distance when realizing remote monitoring, preferably adopt single-mode fiber.
The cantilever 118 1 ends mass 120 of ining succession, the other end fixedly supporter of ining succession.Cantilever can conduct the vibration force of outside to reflecting element, and reflecting element is moved, and then makes the chamber personal attendant of Fabry-Perot-type cavity the vibration force that is applied and change.
Preferably include a plurality of cantilevers of even layout in the substrate 112, but the present invention is not limited to this, substrate 112 can comprise the cantilever of the arbitrary number of any layout.Substrate 112 can form column type or have other cross section cylindricality.
In an example, can use micro-processing method to form cantilever.Micro-processing method is known for those of ordinary skills, does not do detailed description at this.Use micro-processing method can guarantee that the Fabry-Perot sensor has high sensitivity and wide dynamic range.
In the present embodiment, can change the sensitivity and the dynamic range of Fabry-Perot sensor by the characteristic that changes cantilever and mass.In-example, can change the quality of mass 120 or sensitivity and the dynamic range that weight changes the Fabry-Perot sensor.The quality of mass 120 is big more, and the sensitivity of Fabry-Perot sensor is high more, and dynamic range is more little.In another example, can change the thickness, dynamics, number of cantilever and distribute and change the sensitivity and the dynamic range of Fabry-Perot sensor.For example, the thickness of cantilever 118 and hardness are big more, and the amplitude of the vibration that it can be measured is just big more.
In the structure as shown in Figure 2, the chamber of Fabry-Perot-type cavity is long very short, and it is in micron dimension.This structures shape the overall dimensions of this external cavity type optical fibre Fabry-perot sensor can be very little, therefore can be by the micro-processing method manufacturing, thus can be very compact.This undersized sensor is particularly useful for such as in the limited environment in this space of end winding of engine or generator.
The process of the measuring vibrations that uses external cavity type optical fibre Fabry-perot sensor shown in Figure 2 is below described.Light by optical fiber 116 transmission incides in the Fabry-Perot-type cavity.In this process, a part of light reflects at the end face 126 of optical fiber 116, and its reflectivity represents that with R1 a part of light is transmitted to the Fabry-Perot-type cavity from the end face of optical fiber, and reflects at the reflecting surface 124 of mass 120, and its reflectivity is represented with R2.Repeatedly reflection can take place in light in Fabry-Perot-type cavity 130, and transmits the end face 126 of optical fiber 116.The multi-beam that transmits from the end face of optical fiber 116 interferes, and interference light is propagated along the direction opposite with the incident light direction of propagation in optical fiber.The light intensity of interference light is relevant with the phase differential between each light beam.And according to formula (1) and (2), the phase differential between each light beam depends on that the chamber of optical wavelength and Fabry-Perot-type cavity is long.Under the situation that wavelength is fixed, the phase differential between each light beam changes with the chamber of Fabry-Perot-type cavity is long.When vibration force is applied to this external cavity type optical fibre Fabry-perot sensor, cantilever 118 can conduct vibration force to mass 120, mass 120 is moved with vibration force, and then make the chamber personal attendant of Fabry-Perot-type cavity 130 moving of mass 120 and change.The long variation in the chamber of Fabry-Perot-type cavity 130 changed the light phase differential that round trip produces in the chamber again, thereby changed the interference light intensity that is propagated back to optical fiber.Interference light is finally detected by photo-detector along spread fiber.Interfere light intensity can therefrom obtain the long information that changes in chamber by analyzing, and then obtain the information of vibration force.
Fig. 3 shows and uses the synoptic diagram of the vibration monitor system of external cavity type optical fibre Fabry-perot sensor as shown in Figure 2 according to an embodiment of the invention.In the present embodiment, vibration monitor system 10 comprises as shown in Figure 2 external cavity type optical fibre Fabry-perot sensor 12, optical fiber 14, LASER Light Source 16, optical circulator 18, photo-detector 20 and data analysis set-up 22.
LASER Light Source 16 is for can produce monochromatic laser instrument, and the monochromatic light here can have certain wavelength coverage, as long as can produce coherent light in suitable narrow spectrum line.For example, LASER Light Source 16 can be semiconductor laser diode, vertical cavity surface emitting laser (VCSEL), the solid state laser such as ND:YAG or any other suitable light source.In one embodiment, the frequency of semiconductor laser diode is controlled by the thermoelectric refrigerating unit (not shown).And can come the influence of environment temperature is compensated by the drive current of adjusting laser diode.
The effect of optical circulator 18 is that the light component of propagating in the opposite direction in an optical fiber is separated.In the present embodiment, first light component is the light component that is passed to external cavity type optical fibre Fabry-perot sensor 12 by LASER Light Source 16.Second light component is and the opposite light component in the first light component direction of propagation.Second light component is the interference light that the part of first light component is reflected by Fabry-Perot-type cavity.Second light component is transferred to photo-detector 20 by optical circulator 18.
Photo-detector 20 is converted to the electric signal corresponding with interfering light intensity with the interference light that detects, and the electric signal that is converted to is input to data analysis set-up 22.In one embodiment, LASER Light Source 16 can be a semiconductor laser diode.Photo-detector 20 can be indium gallium arsenic (InGaAs) photodiode.Yet, should be appreciated that photo-detector 20 also can comprise any other suitable sensitive to light detector with similar functions.
Data analysis set-up 22 is used for the electric signal that receives from photo-detector 20 is analyzed, thus the vibration information that acquisition is obtained by external cavity type optical fibre Fabry-perot sensor 12.In one embodiment, data analysis set-up 22 is to use the personal computer of electric signal as the electric signal of the part of the feedback control loop of power generator.
The process of vibration monitoring is described according to the flow direction of light signal or electric signal now.Light from LASER Light Source 16 is sent is called incident light here, is transferred to optical circulator 18.Optical circulator 18 imports optical fiber 14 with incident light.Incident light incides exocoel Fabry-Perot interference type sensor 12 by optical fiber 14.The back light that transmits at the end face of optical fiber of repeatedly reflection takes place in Fabry-Perot interference type sensor 12 form interference light.Interference light is transferred to optical circulator 18 by optical fiber 14.Optical circulator 18 is with interference light lead-in light detector 20.Photo-detector 20 is converted to electric signal output with the intensity signal that is detected, and the light intensity that receives of photo-detector 20 changes with the chamber of Fabry-Perot-type cavity is long here, i.e. comprised vibration information in the light intensity of photo-detector 20 receptions.The electric signal of output is received and analyzes by data analysis set-up 22.Data analysis set-up 22 can be used to follow the trail of vibration trend and provide the frequency of the vibration of sensing and the amplitude of vibration by realizing through the personal computer of programming.
External cavity type optical fibre Fabry-perot sensor according to the foregoing description, owing to adopted cantilever to come induction vibration, therefore can the vibration that the external world is bigger be converted to less vibration, thereby can guarantee that this external cavity type optical fibre Fabry-perot working sensor is in the range of linearity and have a high monitoring sensitivity.For example, cantilever can arrive mass with the conduct vibrations of sensing, and makes mass produce very little displacement (for example 0.1 micron), makes Fabry-Perot-type cavity be positioned at the higher range of linearity of its sensitivity.And, this external cavity type optical fibre Fabry-perot sensor does not need to have conductive material, thereby can be operated in the forceful electric power magnetic environments such as end winding such as generator or engine, do not bring influence and can not monitor performance to it, can staff's safety not threatened yet.Certainly, this external cavity type optical fibre Fabry-perot sensor also can be used for the vibration survey under other environment or the device.
The embodiment of the invention has also proposed a kind of external cavity type optical fibre Fabry-perot sensor to the foregoing description and has carried out improved plan.In short, be exactly that external cavity type Fabry-Perot sensor is integrated to together as shown in Figure 2 with two, form differential configuration.This can improve monitoring sensitivity, simultaneously the formation temperature compensation mechanism.
According to one embodiment of present invention, the external cavity type optical fibre Fabry-perot sensor of this differential configuration comprises: first optical fiber of first supporter is fixed in the end, has first end face in its end; Second optical fiber of second supporter is fixed in the end, has second end face in its end; Reflecting element between first optical fiber and second optical fiber, it has first reflecting surface and second reflecting surface; Form first Fabry-Perot-type cavity between first reflecting surface of this reflecting element and first end face of first optical fiber, form second Fabry-Perot-type cavity between second reflecting surface of this reflecting element and second end face of second optical fiber; Bracketed part, an end is connected to this reflecting element, and an end is connected to the 3rd supporter; This bracketed part is used for the vibration force that the external world applies is conducted to reflecting element, thereby the chamber that changes first Fabry-Perot-type cavity and second Fabry-Perot-type cavity is long.
In one example, first Fabry-Perot-type cavity has identical optical characteristics with second Fabry-Perot-type cavity.
Followingly this external cavity type optical fibre Fabry-perot sensor with differential configuration of highly sensitive and temperature compensation function is described in detail with reference to Fig. 4.
Different with the structure shown in Fig. 2 is that exocoel Fabry-Perot sensor shown in Figure 4 forms sandwich construction.Skin is two substrates: the first benchmark reflection substrate 310 and the second benchmark reflection substrate 314, internal layer is a mass reflection substrate 312.Separate by four separators 316 between these substrates, to form little slit.Mass 322 is connected to fixing framework by two cantilevers 324.Mass 322 has two reflectings surface 328 and 330.Have the single-mode fiber 318 of reflection end face 332 and have the single-mode fiber 320 that reflects end face 326 and insert and be tied to two benchmark reflection substrates 310 and 314 respectively.Like this, between the reflecting surface 330 of the end face 332 of single-mode fiber 318 and mass 322, form first Fabry-Perot-type cavity 334, between the reflecting surface 328 of the end face 326 of single-mode fiber 320 and mass 322, formed second Fabry-Perot-type cavity 336.Various piece shown in Figure 4 is similar to each appropriate section shown in Figure 2, no longer each part is described in detail at this.
According to this structure as shown in Figure 4, can improve the sensitivity of monitoring vibration greatly.At first, grow the working point P that in the range of linearity, accurately selects two Fabry-Perot-type cavities 334 and 336 all are in maximum sensitivity with the strength relationship curve according to the chamber, as shown in Figure 1.When vibration force was applied to exocoel Fabry-Perot interference type sensor, mass 322 can be moved, and the distance between itself and two benchmark reflection substrates 310 and 314 can change.For example, if mass 322 moves down, then can make long the increasing in chamber of the Fabry-Perot-type cavity 334 of winning, and the chamber appearance of second Fabry-Perot-type cavity 336 should reduce.Similarly, if mass 322 moves up, the chamber length in the Fabry Perot chamber 334 of winning is reduced, and the chamber appearance of second Fabry-Perot-type cavity 336 should increase.When first Fabry-Perot-type cavity had identical optical characteristics with second Fabry-Perot-type cavity, vibration force was given birth to the influence of opposite sign but equal magnitude to the chamber long hair of two Fabry-Perot-type cavities.The variation of the interference light intensity after the light that identical light source sends reflects by two identical Fabry-Perot-type cavities 334 and 336 also is that equal and opposite in direction, direction are opposite.For example, if increase Δ I (being that light intensity is changed to+Δ I) from the interference light intensity of first Fabry-Perot-type cavity, 334 reflections, then the interference light intensity from 336 reflections of second Fabry-Perot-type cavity reduces Δ I (being that light intensity is changed to-Δ I).After the two is subtracted each other, obtain difference value 2 Δ I.Therefore, the sensitivity of this exocoel optical fibre Fabry-perot sensor with differential configuration is doubled than as shown in Figure 2 external cavity type optical fibre Fabry-perot sensor.
The chamber length of Fabry-Perot-type cavity can be subjected to the influence of surrounding environment.Particularly especially true when the end winding such as generator or engine compares in the rugged environment like this.Temperature variation can cause material production thermal expansion and thermal shrinkage, thereby causes chamber the changing of long hair of Fabry-Perot-type cavity, and then changes the light intensity of interference light.This may introduce error message in monitoring result.
And can alleviate or eliminate the monitoring error that temperature variation is introduced in the rugged surroundings according to the external cavity type optical fibre Fabry-perot sensor of this differential configuration of present embodiment.When thermal expansion that causes in temperature variation or thermal shrinkage made chamber the changing of long hair of Fabry-Perot-type cavity, long chamber with second Fabry-Perot-type cavity, the chamber in the first Fabry Perot chamber is long can the identical variation of occurrence tendency, for example shorten simultaneously or the while elongated.When two Fabry-Perot-type cavities are identical, temperature variation to two chambeies long to influence meeting identical, interfere light intensity that the identical variation of equal and opposite in direction direction also can take place.Through after the difference, the variation of the interference light intensity that temperature variation causes is reduced or eliminate, thereby only comprises vibration information and can not comprise the information of the mistake that temperature variation is introduced in monitoring result.Therefore, this external cavity type optical fibre Fabry-perot sensor with differential configuration is compared with the sensor of prior art or sensor as shown in Figure 2, is more suitable for using in this rugged environment of end winding such as generator or engine.
Fig. 5 illustrates the synoptic diagram of the vibration monitor system that adopts difference external cavity type optical fibre Fabry-perot sensor shown in Figure 4 according to an embodiment of the invention.In the present embodiment, vibration monitor system 40 comprises difference exocoel Fabry-Perot vibration of optical sensor 418 as shown in Figure 4, the LASER Light Source 410 and 412 of duplicating, photo-detector 420 and 422, optical circulator 414 and 416 and as first single-mode fiber 426 and second single-mode fiber 428 of I/O optical fiber.The light transmission that optical fiber 426 will send from LASER Light Source 410 is to first Fabry-Perot-type cavity 334 of exocoel Fabry-Perot interference type sensor 418, and with the interference light transmission light echo gyro 414 of reflected back.Similarly, the light transmission that optical fiber 428 will send from LASER Light Source 412 is to second Fabry-Perot-type cavity of method of difference Fabry-Perot-type vibration of optical sensor 418, and with the interference light transmission light echo gyro 416 of reflected back.The interference light of reflection is transferred to photo-detector 420 and 422 respectively by behind the optical circulator 414 and 416.Photo-detector 420 and 422 is converted to electric signal with the intensity signal that detects and provides it to data analysis set-up 424, and data analysis set-up 424 record and analysis package vibration informations with which are to be used for further FEEDBACK CONTROL.The data analysis set-up 424 here can be realized by personal computer or digital signal processing module.According to Fig. 5, the transmission path of the transmission path of the light that is sent by LASER Light Source 410 and the light that sent by LASER Light Source 412 is identical with transmission path according to the light of Fig. 3 respectively, therefore, no longer is described in greater detail here.
Employing has the vibration monitoring device of method of difference Fabry-Perot-type interfere type as shown in Figure 4, put on cantilever in vibration force, cause the chamber long hair of first Fabry-Perot-type cavity and second Fabry-Perot-type cavity to give birth to equal and opposite in direction, during the opposite variation of direction, the amplitude of variation of the interference light intensity that photo-detector 420 and 422 detects also is an equal and opposite in direction, direction is opposite, in other words, the chamber of the Fabry-Perot-type cavity of winning is long to become big if vibration force makes, the chamber length of second Fabry-Perot-type cavity diminishes, then the light intensity that detects of photo-detector 420 increases, and the light intensity that photo-detector 422 detects reduces, but the amplitude that light intensity increases is identical with the amplitude that light intensity reduces.Photo-detector 420 and 422 is an electric signal with intensity-conversion respectively, output to data analysis set-up, to subtract each other by the electric signal (being to have symbol) of two detector inputs by data analysis set-up, just can obtain the difference strength information by analyzing, and then the long change information in the chamber that obtains Fabry-Perot-type cavity 334 and 336, therefrom also just can obtain vibration information.Compare with structure shown in Figure 2, for long variation the in chamber that identical vibration force causes, the variation of the difference intensity of acquisition doubles, and this makes the sensitivity of sensor double.
Another embodiment of the present invention also provides a kind of vibration monitoring method, and this method uses the external cavity type optical fibre Fabry-perot sensor with differential configuration as shown in Figure 4 to realize.As shown in Figure 6, this method may further comprise the steps:
Step 600: the light that same light source is sent is divided into first light beam and second light beam;
Step 602: first beam Propagation is arrived first Fabry-Perot-type cavity of external cavity type optical fibre Fabry-perot sensor as shown in Figure 4, second beam Propagation is arrived second Fabry-Perot-type cavity of external cavity type optical fibre Fabry-perot sensor as shown in Figure 4;
Step 604: survey from the intensity signal of first interference light of first Fabry-Perot-type cavity generation, survey from the intensity signal of second interference light of second Fabry-Perot-type cavity generation;
Step 606: the intensity signal of the intensity signal of first interference light and second interference light subtracted each other obtain difference information;
Step 608: from described difference information, parse vibration information.
This vibration monitoring method has the advantage that highly sensitive and monitoring result is not subjected to the influence of variation of ambient temperature.
Basket vibration monitoring in end is a kind of challenging and have a method of fine prospect for the safe operation that guarantees some engine or generator.Yet working environment harsh around the winding of end has proposed very strict requirement to vibration transducer, to guarantee reliable operation and high-performance.For this reason, different embodiments of the invention provide creationary external cavity type optical fibre Fabry-perot sensor, and it can satisfy the strict demand of end basket vibration monitoring.The external cavity type optical fibre Fabry-perot sensor that the embodiment of the invention provides has following characteristics and advantage.
Sensor of the present invention adopts the Fabry-Perot multiple-beam interference as its element task principle.This sensor comprises non-conductive polymeric material and optical fiber, thereby can not produce electric signal.Such light signal is not subjected to the influence of electromagnetic radiation EMI, thereby can signal be read into the remote data analytical equipment without distortion from sensing point.And what the present invention adopted is the external cavity type structure, compares with intracavity optical fiber Fabry Perot sensor, and external cavity type structure of the present invention can not make signal generation polarization effect, promptly can not make distorted signals.
Sensor of the present invention adopts cantilever design that the vibration force in the external world is conducted to reflecting element, it can be converted to very big vibration force very little vibration force, thereby can guarantee working sensor in the highly sensitive range of linearity, and the dynamic range of its vibration force that can measure is also very big.
The present invention proposes temperature compensation mechanism, designed the three-decker that comprises two identical Fabry-Perot-type cavities.Can when sensitivity is provided, eliminates temperature and float by calculating from the difference strength signal of two beam interferometer light of these two Fabry-Perot cavity reflections to the influence of sensor.
External cavity type optical fibre Fabry-perot sensor of the present invention can adopt the manufacturing of little processing and manufacturing technology.Fabry-Perot-type cavity can be operated in the working point with maximum sensitivity in the range of linearity to guarantee it by high-precision micro-processing method manufacturing.When adopting two identical Fabry-Perot-type cavities to set up difference temperature compensation mechanism, little processing and manufacturing technique guarantee the unitarity of these two Fabry-Perot-type cavities.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (12)
1. external cavity type Fabry one a Perot sensor is used for vibration is monitored, and it is characterized in that, comprising:
Optical fiber, partial fixing is supported by first in the end of this optical fiber, this optical fiber has an end face in its end;
Reflecting element, this reflecting element has reflecting surface, forming method Fabry-Perot-type cavity between the end face of this reflecting surface and optical fiber;
Bracketed part, the one end is connected to described reflecting element, and the other end is connected to second and supports part, and described bracketed part is used for the vibration force that the external world applies is conducted to described reflecting element, thus the chamber that changes described Fabry-Perot-type cavity is long.
2. external cavity type Fabry-Perot sensor according to claim 1, wherein, described bracketed part comprises the bracketed part of a plurality of even layouts.
3. external cavity type Fabry-Perot sensor according to claim 1 and 2, wherein, described bracketed part forms by micro-processing method.
4. external cavity type Fabry-Perot sensor according to claim 1 and 2, wherein, described reflecting element, first supports part, second to support part and described bracketed part to form by micro-processing method.
5. a vibration monitor system is characterized in that, comprising:
LASER Light Source;
As each described external cavity type optical fibre Fabry-perot sensor in the claim 1 to 4, be used for receiving the light that described LASER Light Source is sent by described optical fiber, produce interference light by described Fabry-Perot-type cavity, and described interference light is transmitted back described optical fiber;
Optical circulator, the light that is used for described LASER Light Source is sent separates with described interference light;
Photo-detector is used for surveying from the isolated described interference light intensity of described optical circulator, and is converted into electric signal;
Data analysis set-up is used for receiving described electric signal from described photo-detector, therefrom analyzes vibration information.
6. an external cavity type optical fibre Fabry-perot sensor is used for vibration is monitored, and it is characterized in that, comprising:
First optical fiber, its end is fixed in first supporter, and this optical fiber has first end face in its end;
Second optical fiber, its end is fixed in second supporter, and this optical fiber has second end face in its end;
Reflecting element, between described first optical fiber and described second optical fiber, this reflecting element has first reflecting surface and second reflecting surface, form first Fabry-Perot-type cavity between first reflecting surface of this reflecting element and first end face of first optical fiber, form second Fabry-Perot-type cavity between second reflecting surface of this reflecting element and second end face of second optical fiber;
Bracketed part, the one end is connected to described reflecting element, the other end is connected to the 3rd supporter, and described bracketed part is used for the vibration force that the external world applies is conducted to described reflecting element, thereby the chamber that changes first Fabry-Perot-type cavity and second Fabry-Perot-type cavity is long.
7. external cavity type optical fibre Fabry-perot sensor according to claim 6, wherein, first Fabry-Perot-type cavity has identical optical characteristics with second Fabry-Perot-type cavity.
8. according to claim 6 or 7 described external cavity type optical fibre Fabry-perot sensors, wherein, described bracketed part is the bracketed part of a plurality of even layouts.
9. according to claim 6 or 7 described external cavity type optical fibre Fabry-perot sensors, wherein, described bracketed part forms by micro-processing method.
10. according to claim 6 or 7 described external cavity type optical fibre Fabry-perot sensors, wherein, described reflecting element, bracketed part, first supporter, second supporter and the 3rd supporter form by micro-processing method.
11. a vibration monitor system is characterized in that, comprising:
LASER Light Source is used to produce first light beam and second light beam;
As each described external cavity type optical fibre Fabry-perot sensor in the claim 6 to 10, be used for receiving first light beam by first optical fiber, and first interference light transmitted back first optical fiber, and receive second light beam by second optical fiber, and second interference light is transmitted back second optical fiber; Wherein first interference light obtains by first Fabry-Perot-type cavity, and second interference light obtains by second Fabry-Perot-type cavity;
First optical circulator is used for first interference light and first beam separation;
Second optical circulator is used for second interference light and second beam separation;
First photo-detector is used for surveying from first optical circulator isolated first and interferes light intensity, and is converted into first electric signal;
Second photo-detector is used for surveying from second optical circulator isolated second and interferes light intensity, and is converted into second electric signal;
Data analysis set-up is used for receiving first electric signal from first photo-detector, and receives second electric signal from second photo-detector, first electric signal and second electric signal is subtracted each other obtain differential electric signal, and analyze vibration information from the differential electric signal that obtains.
12. a vibration monitoring method is characterized in that, comprising:
The light that same light source is sent is divided into first light beam and second light beam;
With first beam Propagation each described first Fabry-Perot-type cavity in the claim 6-10, with second beam Propagation each described second Fabry-Perot-type cavity in the claim 6-10;
Detection is surveyed from the intensity signal of second interference light of second Fabry-Perot-type cavity generation from the intensity signal of first interference light of first Fabry-Perot-type cavity generation;
The intensity signal of the intensity signal of first interference light and second interference light subtracted each other obtain difference information.
From described difference information, parse vibration information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102462324A CN102080972A (en) | 2009-11-30 | 2009-11-30 | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102462324A CN102080972A (en) | 2009-11-30 | 2009-11-30 | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102080972A true CN102080972A (en) | 2011-06-01 |
Family
ID=44087060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102462324A Pending CN102080972A (en) | 2009-11-30 | 2009-11-30 | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102080972A (en) |
Cited By (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519663A (en) * | 2011-12-08 | 2012-06-27 | 武汉理工大学 | Polymer film optical fiber F-P cavity-based underwater shock pressure sensor and dynamic calibration experiment system thereof |
| CN103152685A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | F-P (Fabry-Perot) interference principle-based optical fiber microphone |
| CN103245408A (en) * | 2013-04-26 | 2013-08-14 | 重庆大学 | Extrinsic optical fiber Fabry-Perot vibration sensor and system |
| CN103308717A (en) * | 2013-05-23 | 2013-09-18 | 南京师范大学 | Optical fiber Fabry-Perot acceleration sensor and manufacturing method thereof |
| CN104568117A (en) * | 2015-01-04 | 2015-04-29 | 武汉理工大学 | Differential type optical fiber F-P vibrating sensor with wide frequency response and high sensitivity |
| CN105004884A (en) * | 2015-07-03 | 2015-10-28 | 北京航空航天大学 | SiC-based micro-optics high-temperature accelerometer and design method |
| CN105241795A (en) * | 2015-09-30 | 2016-01-13 | 江苏苏净集团有限公司 | Atmospheric particle concentration detection device and detection method |
| CN105737966A (en) * | 2016-04-16 | 2016-07-06 | 西北大学 | Fabry-Perot cavity gold foil fiber ultrasonic sensor |
| CN106248123A (en) * | 2016-09-12 | 2016-12-21 | 哈尔滨工程大学 | A kind of differential feedback formula phase carrier Michelson fiber-optic interferometer closed loop demodulation method |
| CN106289053A (en) * | 2016-09-12 | 2017-01-04 | 哈尔滨工程大学 | A kind of phase carrier laser interference signal in orthogonal synthesis type closed loop demodulation method |
| CN106885590A (en) * | 2015-12-15 | 2017-06-23 | 陈艺征 | A kind of sensor of intracavity optical fiber Fabry Perot measurement sliding |
| CN107247243A (en) * | 2017-05-05 | 2017-10-13 | 中国计量大学 | The micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect |
| CN107407549A (en) * | 2014-12-17 | 2017-11-28 | Pgs 地球物理公司 | The insensitive interferometer of pressure |
| CN107490395A (en) * | 2016-12-27 | 2017-12-19 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of chamber grows controllable optical fiber Fabry Perot chamber constructive methods |
| CN107576822A (en) * | 2017-09-30 | 2018-01-12 | 武汉锐科光纤激光技术股份有限公司 | One kind scanning probe detection device |
| CN108375412A (en) * | 2018-01-31 | 2018-08-07 | 西北大学 | High sensitivity optical fiber sonac based on microcantilever beam |
| CN108489475A (en) * | 2018-02-28 | 2018-09-04 | 北京控制工程研究所 | A kind of hemispherical reso nance gyroscope harmonic oscillator vibration signal detection method and device |
| CN106323346B (en) * | 2016-09-12 | 2019-01-29 | 哈尔滨工程大学 | A kind of phase carrier formula laser interference signal dual-frequency point closed loop demodulation method |
| CN109282794A (en) * | 2018-11-05 | 2019-01-29 | 山东省科学院激光研究所 | Device is inclined in optical fiber survey and difference survey is inclined system |
| CN109770854A (en) * | 2019-02-02 | 2019-05-21 | 东北大学秦皇岛分校 | Human body physical sign information monitoring system based on Fibre Optical Sensor |
| CN110332981A (en) * | 2019-07-10 | 2019-10-15 | 西北工业大学 | A kind of MEMS fibre optic hydrophone and preparation method thereof |
| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| CN111256807A (en) * | 2020-02-24 | 2020-06-09 | 中国人民解放军国防科技大学 | Small-size interference type high-frequency optical fiber hydrophone based on folding air cavity |
| CN112212964A (en) * | 2019-07-12 | 2021-01-12 | 清华大学 | Photoacoustic sensor, photoacoustic detection system, method, device, and storage medium |
| CN113587962A (en) * | 2021-07-19 | 2021-11-02 | 武汉理工大学 | Single-fiber multi-dimensional F-P sensing device and measuring method thereof |
| CN113785194A (en) * | 2019-04-23 | 2021-12-10 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring fouling and/or erosion and machine for monitoring fouling and/or erosion |
| CN114487479A (en) * | 2022-01-26 | 2022-05-13 | 西安交通大学 | Fabry-Perot acceleration sensitive chip with adjustable sensitivity and range and processing method |
| CN114485898A (en) * | 2021-12-27 | 2022-05-13 | 西安理工大学 | Optical passive miniature vibration sensor |
| CN114543971A (en) * | 2022-02-23 | 2022-05-27 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
| CN114636505A (en) * | 2022-03-10 | 2022-06-17 | 上海联影医疗科技股份有限公司 | Optical fiber sensor and system |
| CN114814290A (en) * | 2022-05-09 | 2022-07-29 | 西安中科华芯测控有限公司 | Triaxial closed-loop acceleration sensor and monitoring system and method thereof |
| CN115015578A (en) * | 2022-06-15 | 2022-09-06 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
| CN115096263A (en) * | 2022-05-05 | 2022-09-23 | 武汉工程大学 | Optical fiber inclination angle measuring device based on dynamic vernier effect |
| CN115355977A (en) * | 2022-10-11 | 2022-11-18 | 季华实验室 | Vibration detection device, equipment and vibration detection method |
| CN115825519A (en) * | 2023-01-05 | 2023-03-21 | 哈尔滨理工大学 | Measurement system of cantilever beam type extrinsic optical fiber double-Fabry-Perot current transformer |
-
2009
- 2009-11-30 CN CN2009102462324A patent/CN102080972A/en active Pending
Cited By (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519663A (en) * | 2011-12-08 | 2012-06-27 | 武汉理工大学 | Polymer film optical fiber F-P cavity-based underwater shock pressure sensor and dynamic calibration experiment system thereof |
| CN102519663B (en) * | 2011-12-08 | 2013-10-02 | 武汉理工大学 | Polymer film optical fiber F-P cavity-based underwater shock pressure sensor and dynamic calibration experiment system thereof |
| CN103152685B (en) * | 2013-03-12 | 2015-12-02 | 中国电子科技集团公司第三研究所 | Based on the fiber microphone of FP principle of interference |
| CN103152685A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | F-P (Fabry-Perot) interference principle-based optical fiber microphone |
| CN103245408A (en) * | 2013-04-26 | 2013-08-14 | 重庆大学 | Extrinsic optical fiber Fabry-Perot vibration sensor and system |
| CN103245408B (en) * | 2013-04-26 | 2016-01-20 | 重庆大学 | Extrinsic optical fiber Fabry-Perot vibration sensor and system |
| CN103308717A (en) * | 2013-05-23 | 2013-09-18 | 南京师范大学 | Optical fiber Fabry-Perot acceleration sensor and manufacturing method thereof |
| CN107407549A (en) * | 2014-12-17 | 2017-11-28 | Pgs 地球物理公司 | The insensitive interferometer of pressure |
| CN107407549B (en) * | 2014-12-17 | 2020-01-14 | Pgs 地球物理公司 | Pressure insensitive interferometer |
| CN104568117A (en) * | 2015-01-04 | 2015-04-29 | 武汉理工大学 | Differential type optical fiber F-P vibrating sensor with wide frequency response and high sensitivity |
| CN104568117B (en) * | 2015-01-04 | 2017-06-13 | 武汉理工大学 | It is a kind of with wideband ring, highly sensitive differential optical fiber F P vibrating sensors |
| CN105004884A (en) * | 2015-07-03 | 2015-10-28 | 北京航空航天大学 | SiC-based micro-optics high-temperature accelerometer and design method |
| CN105241795A (en) * | 2015-09-30 | 2016-01-13 | 江苏苏净集团有限公司 | Atmospheric particle concentration detection device and detection method |
| CN106885590A (en) * | 2015-12-15 | 2017-06-23 | 陈艺征 | A kind of sensor of intracavity optical fiber Fabry Perot measurement sliding |
| CN105737966A (en) * | 2016-04-16 | 2016-07-06 | 西北大学 | Fabry-Perot cavity gold foil fiber ultrasonic sensor |
| CN106289053A (en) * | 2016-09-12 | 2017-01-04 | 哈尔滨工程大学 | A kind of phase carrier laser interference signal in orthogonal synthesis type closed loop demodulation method |
| CN106323346B (en) * | 2016-09-12 | 2019-01-29 | 哈尔滨工程大学 | A kind of phase carrier formula laser interference signal dual-frequency point closed loop demodulation method |
| CN106248123A (en) * | 2016-09-12 | 2016-12-21 | 哈尔滨工程大学 | A kind of differential feedback formula phase carrier Michelson fiber-optic interferometer closed loop demodulation method |
| CN107490395A (en) * | 2016-12-27 | 2017-12-19 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of chamber grows controllable optical fiber Fabry Perot chamber constructive methods |
| CN107247243A (en) * | 2017-05-05 | 2017-10-13 | 中国计量大学 | The micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect |
| CN107247243B (en) * | 2017-05-05 | 2023-08-15 | 中国计量大学 | Cross micro suspension bridge optical fiber magnetic field sensing probe based on giant magnetostriction effect |
| CN107576822A (en) * | 2017-09-30 | 2018-01-12 | 武汉锐科光纤激光技术股份有限公司 | One kind scanning probe detection device |
| CN107576822B (en) * | 2017-09-30 | 2018-12-14 | 武汉锐科光纤激光技术股份有限公司 | A kind of scanning probe detection device |
| CN108375412A (en) * | 2018-01-31 | 2018-08-07 | 西北大学 | High sensitivity optical fiber sonac based on microcantilever beam |
| CN108489475A (en) * | 2018-02-28 | 2018-09-04 | 北京控制工程研究所 | A kind of hemispherical reso nance gyroscope harmonic oscillator vibration signal detection method and device |
| CN109282794A (en) * | 2018-11-05 | 2019-01-29 | 山东省科学院激光研究所 | Device is inclined in optical fiber survey and difference survey is inclined system |
| CN109770854A (en) * | 2019-02-02 | 2019-05-21 | 东北大学秦皇岛分校 | Human body physical sign information monitoring system based on Fibre Optical Sensor |
| CN109770854B (en) * | 2019-02-02 | 2021-10-01 | 东北大学秦皇岛分校 | Human body sign information monitoring system based on optical fiber sensing |
| CN113785194A (en) * | 2019-04-23 | 2021-12-10 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring fouling and/or erosion and machine for monitoring fouling and/or erosion |
| CN113785194B (en) * | 2019-04-23 | 2023-11-17 | 诺沃皮尼奥内技术股份有限公司 | Sensor arrangement and method for measuring scale and/or corrosion and machine for monitoring scale and/or corrosion |
| CN110332981A (en) * | 2019-07-10 | 2019-10-15 | 西北工业大学 | A kind of MEMS fibre optic hydrophone and preparation method thereof |
| CN112212964A (en) * | 2019-07-12 | 2021-01-12 | 清华大学 | Photoacoustic sensor, photoacoustic detection system, method, device, and storage medium |
| CN112212964B (en) * | 2019-07-12 | 2021-10-01 | 清华大学 | Photoacoustic sensor, photoacoustic detection system, method, device, and storage medium |
| CN111024211A (en) * | 2019-12-30 | 2020-04-17 | 西安石油大学 | High-sensitivity differential optical fiber F-P micro-vibration sensor and demodulation method thereof |
| CN111256807B (en) * | 2020-02-24 | 2020-11-06 | 中国人民解放军国防科技大学 | Small-size interference type high-frequency optical fiber hydrophone based on folding air cavity |
| CN111256807A (en) * | 2020-02-24 | 2020-06-09 | 中国人民解放军国防科技大学 | Small-size interference type high-frequency optical fiber hydrophone based on folding air cavity |
| CN113587962A (en) * | 2021-07-19 | 2021-11-02 | 武汉理工大学 | Single-fiber multi-dimensional F-P sensing device and measuring method thereof |
| CN113587962B (en) * | 2021-07-19 | 2022-04-19 | 武汉理工大学 | Single-fiber multi-dimensional F-P sensing device and measuring method thereof |
| CN114485898A (en) * | 2021-12-27 | 2022-05-13 | 西安理工大学 | Optical passive miniature vibration sensor |
| CN114485898B (en) * | 2021-12-27 | 2024-01-30 | 西安理工大学 | Optical passive miniature vibration sensor |
| CN114487479A (en) * | 2022-01-26 | 2022-05-13 | 西安交通大学 | Fabry-Perot acceleration sensitive chip with adjustable sensitivity and range and processing method |
| CN114543971A (en) * | 2022-02-23 | 2022-05-27 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
| CN114543971B (en) * | 2022-02-23 | 2022-11-11 | 华中科技大学 | FP interference type sound wave detector and sound wave detection method |
| CN114636505A (en) * | 2022-03-10 | 2022-06-17 | 上海联影医疗科技股份有限公司 | Optical fiber sensor and system |
| CN115096263A (en) * | 2022-05-05 | 2022-09-23 | 武汉工程大学 | Optical fiber inclination angle measuring device based on dynamic vernier effect |
| CN114814290A (en) * | 2022-05-09 | 2022-07-29 | 西安中科华芯测控有限公司 | Triaxial closed-loop acceleration sensor and monitoring system and method thereof |
| CN115015578B (en) * | 2022-06-15 | 2023-06-27 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
| CN115015578A (en) * | 2022-06-15 | 2022-09-06 | 华中科技大学 | Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure |
| CN115355977A (en) * | 2022-10-11 | 2022-11-18 | 季华实验室 | Vibration detection device, equipment and vibration detection method |
| CN115825519A (en) * | 2023-01-05 | 2023-03-21 | 哈尔滨理工大学 | Measurement system of cantilever beam type extrinsic optical fiber double-Fabry-Perot current transformer |
| CN115825519B (en) * | 2023-01-05 | 2023-07-25 | 哈尔滨理工大学 | Measuring system of cantilever beam type extrinsic optical fiber double-Fabry-Perot current transformer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102080972A (en) | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring | |
| US8218916B2 (en) | Fiber optic temperature and pressure sensor and system incorporating same | |
| US10234346B2 (en) | Serial weak FBG interrogator using pulses of differing wavelengths | |
| Yu et al. | Fiber Fabry-Perot sensors for detection of partial discharges in power transformers | |
| US5832157A (en) | Fiber optic acoustic emission sensor | |
| CN100526819C (en) | Apparatus for measuring libration by optical fibre and measuring method | |
| US20110122417A1 (en) | Self-Referenced Optical Fiber Sensor with Stimulated Brillouin Scattering | |
| Yang et al. | An optical fiber Bragg grating and piezoelectric ceramic voltage sensor | |
| Azmi et al. | Sensitivity enhancement in composite cavity fiber laser hydrophone | |
| Wang et al. | Underwater blast wave pressure sensor based on polymer film fiber Fabry–Perot cavity | |
| US6097478A (en) | Fiber optic acoustic emission sensor | |
| Robalinho et al. | Colossal enhancement of strain sensitivity using the push-pull deformation method | |
| USH371H (en) | Optical fiber interferometer | |
| CN105806511B (en) | The micro optical fiber microminiature temperature sensor of cascaded structure is bored based on ball | |
| Liang et al. | Novel fiber Bragg grating sensing method based on the sidelobe modulation for ultrasound detection | |
| Suleiman et al. | Interrogation of fiber Bragg grating dynamic strain sensors by self-mixing interferometry | |
| CN108845174A (en) | A kind of differential type all-fiber current transformator | |
| Zhao et al. | Stabilized fiber-optic extrinsic Fabry–Perot sensor system for acoustic emission measurement | |
| Liu et al. | Demodulation of EFPI-FBG hybrid optical microphone based on spectrum analysis | |
| EP3742757B1 (en) | Optical transducer and method for measuring displacement | |
| Donisi et al. | Optical interrogation system based on holographic soft matter filter | |
| Littler et al. | Optical-fiber accelerometer array: Nano-g infrasonic operation in a passive 100 km loop | |
| KR101098666B1 (en) | Optical Electric-Field Sensors | |
| Chen et al. | Highly sensitive twist and vibration sensing based on polarization-sensitive mode selective coupler | |
| Murphy et al. | Miniaturized fiber-optic Michelson-type interferometric sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110601 |