CN115015578B - Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure - Google Patents

Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure Download PDF

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CN115015578B
CN115015578B CN202210674473.4A CN202210674473A CN115015578B CN 115015578 B CN115015578 B CN 115015578B CN 202210674473 A CN202210674473 A CN 202210674473A CN 115015578 B CN115015578 B CN 115015578B
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optical fiber
reed
mass block
accelerometer
accelerometer probe
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CN115015578A (en
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徐志林
王晓云
严世涛
梁浴榕
周泽兵
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means

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Abstract

The invention discloses an optical fiber accelerometer probe and a system of a symmetrical double-reed supporting structure, wherein the optical fiber accelerometer probe comprises an optical fiber head, an optical fiber clamp, a reflecting mirror, an integrated shell, a first elastic reed, a second elastic reed, a first mass block, a central mass block, a second mass block and a base ring; the optical fiber head is fixed on the optical fiber clamp, and the optical fiber end face of the optical fiber head and the reflecting mirror form a Fabry-Perot cavity interference cavity; the initial cavity length of the Fabry-Perot cavity interference cavity is adjustable. In the invention, the two elastic reeds symmetrically support the mass block, so that the transverse crosstalk perpendicular to the direction of the input shaft can be reduced. Meanwhile, compared with a single reed, the double reed can support a larger mass block, so that mechanical thermal noise of the accelerometer spring vibrator structure is reduced. In addition, as the optical fiber clamp and the integrated shell are both provided with threads, the initial cavity length of the Fabry-Perot cavity can be flexibly controlled by screwing the optical fiber clamp into the integrated shell in a spiral mode.

Description

Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure
Technical Field
The invention belongs to the field of optical fiber interferometry, and particularly relates to an optical fiber accelerometer probe and system of a symmetrical double-reed support structure.
Background
The accelerometer is an inertial instrument for measuring the acceleration of an object, plays an important role in an acceleration measurement system, and is widely applied to the fields of biomedicine, traffic application, geological disaster prediction, aerospace and the like. According to different detection modes, the accelerometer can be divided into a capacitive type accelerometer, a piezoresistive type accelerometer, a resonant type accelerometer and an optical type accelerometer, wherein the optical type accelerometer has the advantages of high precision, high sensitivity, strong electromagnetic interference resistance and the like. Meanwhile, the signal processing unit of the optical fiber interference type accelerometer is completely separated from the passive sensing probe, so that the maintenance cost caused by instrument faults can be effectively reduced, and the optical fiber interference type accelerometer is very suitable for complex and severe environments.
The extrinsic optical fiber Fabry-Perot (F-P) interferometer composed of the end face of the optical fiber and an external reflector has the advantages of strong common mode noise suppression capability, no contact, simple structure and the like, is widely applied to acceleration measurement, and has the working principle that: the displacement change of the external reflecting mirror caused by external acceleration causes the change of the cavity length of the Fabry-Perot cavity, thus causing the change of interference phase, and the acceleration information can be obtained through the modes of phase demodulation, light intensity demodulation and the like.
At present, an accelerometer based on a metal flexible spring oscillator system has been reported, and patent literature (201510519101.4) discloses an interference type optical fiber accelerometer probe and an optical fiber accelerometer system, which propose an elastic diaphragm with two circles of petal-shaped distributed arc arrays, which has good plane symmetry and can improve the measurement accuracy of an acceleration value, however, the spring oscillator system of the interference type optical fiber accelerometer probe adopts a single reed supporting structure, so that transverse crosstalk is easily introduced, and the measurement of the acceleration value is influenced. In addition, in the design and processing of the spring oscillator system, the initial cavity length of the Fabry-Perot cavity formed after the optical fiber head and the spring oscillator system are integrated is a fixed value, and the initial cavity length of the Fabry-Perot cavity cannot be flexibly controlled.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides an optical fiber accelerometer probe with a symmetrical double-reed supporting structure and a system thereof, and aims to solve the technical problems that the single-reed supporting structure in the prior art is easy to introduce transverse crosstalk and the initial cavity length of a preparation method Fabry-Perot cavity cannot be flexibly controlled.
To achieve the above object, according to one aspect of the present invention, there is provided a fiber optic accelerometer probe of a symmetrical double-reed support structure, comprising: the optical fiber clamp comprises an optical fiber head, an optical fiber clamp, a reflecting mirror, an integrated shell, a first elastic reed, a second elastic reed, a first mass block, a central mass block, a second mass block and a base ring; the optical fiber head is fixed on the optical fiber clamp, and the optical fiber end face of the optical fiber head and the reflecting mirror form a Fabry-Perot cavity interference cavity; the initial cavity length of the Fabry-Perot cavity interference cavity is adjustable; the first mass block and the second mass block are symmetrically fixed on two sides of the central mass block; the center of the first elastic reed is fixed on the first mass block, and the center of the second elastic reed is fixed on the second mass block; the edge of the first elastic reed is connected with the base ring, and the edge of the second elastic reed is connected with the base ring; the integrated shell is connected with the base ring and is used for sealing a spring oscillator structure formed by the first elastic reed, the second elastic reed, the first mass block, the central mass block and the second mass block. During operation, the optical fiber accelerometer probe can be fixed on an object to be measured by adopting the fixing bracket.
Still further, the fiber optic accelerometer probe further comprises: the first reed inner clamping plate, the second reed inner clamping plate, the first reed outer clamping plate and the second reed outer clamping plate; the center of the first elastic reed is fixed on the first mass block through a first reed inner clamping plate, and the center of the second elastic reed is fixed on the second mass block through a second reed inner clamping plate; the edge of the first elastic reed is connected with the base ring through a first reed outer clamping plate, and the edge of the second elastic reed is connected with the base ring through a second reed outer clamping plate.
Still further, the fiber optic accelerometer probe further comprises: the first boss is fixed on the first mass block, and the second boss is fixed on the first boss; the reflector is fixed on the plane of the first boss and the second boss.
Furthermore, the optical fiber clamp is provided with external threads, the integrated shell is provided with internal threads, and the optical fiber clamp is screwed into the integrated shell to enable the distance between the optical fiber head and the reflecting mirror to be adjustable, so that the initial cavity length of the Fabry-Perot cavity interference cavity is adjustable.
Furthermore, the optical fiber head is an optical fiber jumper plug, the optical fiber end face of the optical fiber head is grinded and polished by a micro-sphere, and the cavity length of the Fabry-Perot cavity interference cavity is 900-2000 mu m.
Further, the first elastic reed and the second elastic reed are in a round structure with two circles of six annular notches, and the thickness of the first elastic reed and the second elastic reed is 80-120 mu m.
Further, the reflecting mirror is coated with a thin film material, and the reflectivity of the thin film material is 0.04-1.
Still further, the fiber optic accelerometer probe further comprises: the first balancing weight and the second balancing weight, first balancing weight is fixed on the second quality piece, and the second balancing weight is fixed on the first balancing weight.
The invention also provides an optical fiber accelerometer system with the double-reed symmetrical supporting structure, which comprises an optical fiber accelerometer probe, a detection light source, an optical module, a photoelectric detection module and a signal acquisition system; the optical fiber accelerometer probe is the optical fiber accelerometer probe; the optical module comprises a first port, a second port and a third port, wherein the first port is connected with a detection light source, the second port is connected with an optical fiber accelerometer probe, the third port is connected with a photoelectric detection module, input light of the first port is output through the second port, and input light of the second port is output through the third port; the optical fiber accelerometer probe is used for converting an acceleration signal into an optical signal; the detection light source is used for providing laser required by the system; the optical module is used for inputting laser to the optical fiber accelerometer probe and guiding an optical signal of the optical fiber accelerometer probe into the photoelectric detection module; the photoelectric detection module is used for converting an optical signal of the optical fiber accelerometer probe into an electrical signal; the signal acquisition system is used for acquiring and processing the electrical signals to obtain acceleration signals.
The detection light source can be a narrow linewidth optical fiber laser, and the optical module can be an optical fiber circulator.
In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:
(1) In the invention, the two elastic reeds symmetrically support the mass block, so that the transverse crosstalk perpendicular to the direction of the input shaft can be reduced. Meanwhile, compared with a single reed, the double reed can support a larger mass block, so that mechanical thermal noise of the accelerometer spring vibrator structure is reduced.
(2) In the invention, the optical fiber clamp and the integrated shell are both provided with threads, and the initial cavity length of the Fabry-Perot cavity can be flexibly controlled by screwing the optical fiber clamp into the integrated shell in a spiral manner.
(3) The optical fiber accelerometer probe with the double-reed symmetrical supporting structure adopts the optical fiber Fabry-Perot interference cavity as a sensitive structure, and the optical fiber end face of the optical fiber head and the reflecting mirror form the Fabry-Perot cavity interference cavity, so that the optical fiber accelerometer probe has good common mode noise suppression characteristic and can carry out high-precision measurement to be measured; and the transverse crosstalk of the accelerometer probe is low, so that the acceleration measurement noise is lower, and the acceleration measurement precision is high. Therefore, the invention has the advantages of simple structure, small volume and easy processing, and can be integrated on various devices and equipment to realize high-precision acceleration detection.
Drawings
FIG. 1 is a schematic cross-sectional view of the inside of a fiber optic accelerometer probe with a symmetrical dual-reed support structure according to an embodiment of the invention;
FIG. 2 (a) is one of the inner views of a fiber optic accelerometer probe with a symmetrical dual reed support structure according to an embodiment of the invention;
FIG. 2 (b) is a second view of the inside of a fiber optic accelerometer probe with a symmetrical dual reed support structure according to an embodiment of the invention;
FIG. 3 is an oblique view of a fiber optic accelerometer probe with a symmetrical dual-reed support structure according to an embodiment of the invention;
FIG. 4 is a schematic diagram of an extrinsic fiber Fabry-Perot cavity of a fiber optic accelerometer probe with a symmetrical dual-reed support structure according to an embodiment of the present invention;
fig. 5 is a block diagram of a symmetrical dual-reed support structure fiber optic accelerometer system according to an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other. The present invention will be described in further detail with reference to the following embodiments.
Fig. 1 is a schematic cross-sectional view of the inside of a structure of an optical fiber accelerometer probe with a symmetrical double-reed support structure, as shown in fig. 1, the accelerometer probe comprises an optical fiber head 1, an optical fiber clamp 2, a reflecting mirror 3, a first boss 4a, a second boss 4b, an integrated housing 5, a first reed inner clamping plate 6a, a second reed inner clamping plate 6b, a first reed outer clamping plate 7a, a second reed outer clamping plate 7b, a first elastic reed 8a, a second elastic reed 8b, a first mass block 9a, a central mass block 10, a second mass block 9b, a first balancing weight 11a, a second balancing weight 11b, a packaging housing 12, a base ring 13 and a fixed bracket 14, and an extrinsic optical fiber fabry-perot interferometer is adopted as a sensing element;
the first mass block 9a, the second mass block 9b and the central mass block 10 are provided with through holes, and the first mass block 9a and the second mass block 9b are symmetrically fixed on two sides of the central mass block 10 by using screws; the first mass block 9a and the second mass block 9b are provided with two layers of step bulges, each layer of step bulge is provided with a threaded hole, the first reed inner clamping plate 6a and the second reed inner clamping plate 6b are provided with through holes, the positions of the through holes correspond to the positions of the threaded holes on the middle step bulges of the first mass block 9a and the second mass block 9b, the central through hole of the first elastic reed 8a penetrates through the outermost layer step bulge of the first mass block 9a to be placed on the middle step bulge of the first mass block 9a, a screw penetrates through the first reed inner clamping plate 6a and the first elastic reed 8a in sequence to be fixed on the first mass block 9a, the central through hole of the second elastic reed 8b penetrates through the outermost layer step bulge of the second mass block 9b to be placed on the middle step bulge of the second mass block 9b, and the screw penetrates through the second reed inner clamping plate 6b and the first elastic reed 8b in sequence to be fixed on the second mass block 9 b; grooves are formed in the two bottom surfaces of the base ring 13, threaded holes are formed in the grooves, the outer edge of the first elastic reed 8a is placed on the groove in the bottom surface of one side of the base ring 18, the first reed outer clamping plate 7a and the first elastic reed 8a are sequentially penetrated by screws to be connected with the base ring 18, the outer edge of the second elastic reed 8b is placed on the groove in the bottom surface of the other side of the base ring 18, and the second reed outer clamping plate 7b and the second elastic reed 8b are sequentially penetrated by screws to be connected with the base ring 18; the first boss 4a is fixed on the step boss of the outermost layer of the first mass block 9a by using a screw, and the second boss 4b is fixed on the first boss 4a by using a screw; fixing the reflector 3 on the planes of the first boss 4a and the second boss 4b by using 502 glue; the integrated housing 5 is connected with the base ring 18; the optical fiber head 1 is fixed in the optical fiber clamp 2 and is fixed on the integrated shell 5 through the optical fiber clamp 2; the first balancing weight 11a is fixed on the second balancing weight 9b, the second balancing weight 11b is fixed on the first balancing weight 11a, and the packaging shell 12 is connected with the base ring 13; the integrated housing 5, the base ring 13 and the encapsulation housing 12 enclose the monolithic spring vibrator system therein.
In the embodiment of the invention, since the middle of the first boss 4a needs to be perforated and fixed to the first mass block 9a, the second boss 4b is fixed to the first boss 4a, and the reflecting mirror is attached to a plane formed by the first boss 4a and the second boss 4b together. If the first boss 4a and the second boss 4b are replaced by one boss, the boss is fixed to the first mass 9a with a hole, so that the boss is uneven, thereby causing the mirror to be non-perpendicular and not parallel to the optical fiber head 1, thereby introducing an acceleration measurement error. Therefore, in the embodiment of the present invention, a structure provided with two bosses is required.
Fig. 2 (a) and (b) are respectively an inner view of a fiber optic accelerometer probe with a symmetrical dual-reed support structure according to the invention, and fig. 3 is an oblique view of a fiber optic accelerometer probe with a symmetrical dual-reed support structure according to the invention, as shown in fig. 2 (a), (b) and fig. 3, the reflector 3, the first boss 4a, the second boss 4b, the first reed inner clamping plate 6a, the second reed inner clamping plate 6b, the first elastic reed 8a, the second elastic reed 8b, the first mass block 9a, the central mass block 10, the second mass block 9b, the first balancing weight 11a and the second balancing weight 11b together form an integral mass; the edge part of the first elastic reed 8a is connected with the base ring 18 by the first reed outer adapter plate 7a, and similarly, the edge part of the second elastic reed 8b is connected with the base ring 18 by the second reed outer adapter plate 7 b; the central part of the first elastic reed 8a is connected with the whole mass block through a first reed inner rotating plate 6a, and similarly, the central part of the second elastic reed 8b is connected with the whole mass block through a second reed inner rotating plate 6 b; the whole mass block is symmetrically supported by the first elastic membrane 8a and the second elastic membrane 8b and is suspended in the center of the base ring 13; the optical fiber accelerometer probe is fixed on an object to be measured through the fixed support 14, and when external acceleration is input, the mass block is driven to move left and right through the elastic force of the elastic reed, so that the cavity length of the Fabry-Perot cavity is changed, and the acceleration can be measured by measuring the cavity length change.
In the embodiment of the invention, as the two reeds are symmetrically supported, the movement directivity of the mass block can be improved, namely the mass block can better move along the vibration direction of the first-order mode of the reeds, so that the transverse crosstalk is reduced.
Fig. 4 is a schematic diagram of an extrinsic optical fiber fabry-perot cavity of an optical fiber accelerometer probe with a symmetrical double-reed support structure, as shown in fig. 4, an optical fiber head 1 is a jumper plug, an optical fiber end face of the optical fiber head 1 and a reflecting mirror 3 form an interference cavity, and the cavity length d is 900-2000 μm.
According to the novel integrated mode of the optical fiber head and the spring oscillator system, the optical fiber head 1 is fixed on the optical fiber clamp 2, the optical fiber clamp 2 is an optical fiber adapter, the optical fiber adapter is provided with external threads, the inner side of the integrated shell 5 is provided with internal threads, the optical fiber clamp 2 is screwed into the integrated shell 5, the cavity length of the Fabry-Perot cavity can be flexibly controlled by screwing the optical fiber clamp 2 into the integrated shell 5, 502 glue is dripped into the optical fiber clamp to fix after the initial cavity length is determined, and the initial cavity length is not adjustable after the initial cavity length is fixed.
In the embodiment of the invention, as the external thread is designed on the optical fiber clamp 2, the internal thread is designed on the integrated shell 5, and the distance between the optical fiber head 1 and the reflecting mirror 3 can be adjusted by screwing the optical fiber clamp 2 into the integrated shell 5, thereby realizing the adjustable initial cavity length of the Fabry-Perot cavity interference cavity; when the optical fiber clamp 2 is screwed deeper, the cavity length of the Fabry-Perot cavity interference cavity is smaller; the longer the fiber clamp 2 is screwed into the cavity, the larger the cavity length of the fabry-perot cavity interference cavity.
FIG. 5 is a block diagram of a symmetrical dual-reed support structure fiber optic accelerometer system of the present invention, comprising a detection light source 16, an optical module 17, a fiber optic accelerometer probe 15, a photo-detection module 18, and a signal acquisition system 19; the light emitted by the detection light source 16 is input into a first port of the optical module 17, the input light of the first port is output through a second port, the output light of the second port is transmitted to the optical fiber accelerometer probe 15, the optical fiber end face of the optical fiber head 1 and the reflecting mirror 3 are positioned in the optical fiber accelerometer probe 15 in parallel, a part of the light signal transmitted to the optical fiber accelerometer probe 15 is reflected by the optical fiber end face of the optical fiber head 1, a part of the light signal is transmitted to the reflecting mirror 3 and reflected by the reflecting mirror 3, the light signal reflected by the reflecting mirror 3 interferes with the light signal reflected by the optical fiber head 1, the interference light signal is transmitted to a second port of the optical module 17, the input light of the second port is output through a third port, and the output light of the third port is transmitted to the photoelectric detection module 18, the light signal is converted into an electric signal, and finally the signal acquisition system 19 performs data acquisition.
In the optical fiber accelerometer probe, the optical fiber head 1 and the reflecting mirror 3 form an extrinsic optical fiber Fabry-Perot interference structure for reading acceleration signals, and the extrinsic optical fiber Fabry-Perot interference structure has strong common mode noise suppression capability and simple structure, so that the acceleration system has the advantages of high precision and low cost.
The optical field reflected by the fiber end face of the fiber head 1 can be expressed as:
Figure BDA0003695863770000091
the light field reflected by the mirror 3 can be expressed as:
Figure BDA0003695863770000092
the optical electric field output from the third port of the optical module 17 is:
E=E 1 +E 2
wherein R is 1 、R 2 The reflectivity A of the optical fiber end face of the optical fiber head 1 and the reflectivity A of the reflecting mirror 3 0 For the amplitude of the incident light,
Figure BDA0003695863770000093
d is the perpendicular distance between the fiber end face of the fiber head 1 and the mirror 3, which is the initial phase of the incident light.
And then the output light intensity of the photoelectric detection module is obtained as follows:
Figure BDA0003695863770000101
the input of external acceleration causes the cavity length change of the Fabry-Perot cavity, and the cavity length change can be obtained through the modes of phase demodulation, light intensity demodulation and the like, so that the acceleration information is obtained.
As a preferred embodiment, the reflector is a silicon wafer coated with an aluminum film, which has the advantages of thin thickness, easy plating of a high-reflectivity metal film and low cost, and can be replaced by other plating materials or reflector materials as required. The silicon chip is thinner, the thickness is only about 50 mu m, and the metal film is easy to be plated so as to increase the reflectivity, and the cost is low, so that compared with a glass reflector plated with a dielectric film, the accelerometer probe can be smaller in size.
As a preferred embodiment, the elastic reed is in a round structure with two circles of six annular notches, the thickness of the elastic reed is 80-120 mu m, and the elastic reed material is beryllium copper. The elastic reed has the advantages of low eigenfrequency, high cross suppression ratio and long service life, and is beneficial to reducing acceleration measurement noise and prolonging the service life of the accelerometer.
According to the embodiment of the invention, the elastic reed adopts the shape, so that the eigenfrequency of the spring oscillator structure can be reduced, the cross axis rejection ratio is improved, namely, the high-order mode of the vibration of the elastic reed is not easy to interfere with the first-order mode, and the measurement noise of acceleration is reduced.
In addition, the thicker the reed is, the larger the rigidity is, the lower the cross axis rejection ratio is, and thus the acceleration measurement noise is large; the thinner the reed, the less stiff, the higher the cross-axis rejection ratio, and the less noisy the acceleration measurement, but a too thin reed is difficult to machine and is more prone to deformation.
The elastic element is made of beryllium copper, and the beryllium copper has the advantages of high hardness, elastic limit, fatigue limit, wear resistance and the like, so that the service life of the accelerometer can be prolonged.
Of course, the material, size and shape of the spring leaf can be changed according to the requirements for replacement.
As a preferred embodiment, the detection light source is a narrow linewidth fiber laser, which has lower optical frequency noise and relative intensity noise, and is beneficial to reducing the measurement noise of the fiber optic accelerometer system; the narrow linewidth fiber laser has low optical frequency noise and relative intensity noise, and can reduce measurement noise when applied to a measurement system. In addition, other detection light sources can be selected according to the requirements.
As a preferred embodiment, the optical module is a fiber circulator, which has the advantages of high return loss and low transmission loss, and is beneficial to reducing the measurement noise of the fiber accelerometer system; the optical module has the following functions: the laser emitted by the laser is input into the optical fiber accelerometer, and then the optical signal reflected by the optical fiber accelerometer is input into the photoelectric detector, so that the functions can be realized by the optical fiber circulator and the optical fiber coupler in common optical fiber devices, but the return loss of the optical fiber circulator is large, the transmission loss is low, and the measurement noise of the optical fiber accelerometer system can be reduced. In addition, other waveguide structures having fiber optic circulator functions or other optical structures may be substituted as desired.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (8)

1. A fiber optic accelerometer probe of a symmetrical double-reed support structure, comprising: the optical fiber clamp comprises an optical fiber head (1), an optical fiber clamp (2), a reflecting mirror (3), an integrated shell (5), a first elastic reed (8 a), a second elastic reed (8 b), a first mass block (9 a), a central mass block (10), a second mass block (9 b) and a base ring (13);
the optical fiber head (1) is fixed on the optical fiber clamp (2), and an optical fiber end face of the optical fiber head (1) and the reflecting mirror (3) form a Fabry-Perot cavity interference cavity; the initial cavity length of the Fabry-Perot cavity interference cavity is adjustable;
the first mass block (9 a) and the second mass block (9 b) are symmetrically fixed at two sides of the central mass block (10); the center of the first elastic reed (8 a) is fixed on the first mass block (9 a), and the center of the second elastic reed (8 b) is fixed on the second mass block (9 b); the edge of the first elastic reed (8 a) is connected with the base ring (13), and the edge of the second elastic reed (8 b) is connected with the base ring (13);
the integrated shell (5) is connected with the base ring (13) and is used for sealing a spring oscillator structure formed by a first elastic reed (8 a), a second elastic reed (8 b), a first mass block (9 a), a central mass block (10) and a second mass block (9 b);
the optical fiber clamp (2) is provided with external threads, the integrated shell (5) is provided with internal threads, and the optical fiber clamp (2) is screwed into the integrated shell (5) to enable the distance between the optical fiber head (1) and the reflecting mirror (3) to be adjustable, so that the initial cavity length of the Fabry-Perot cavity interference cavity is adjustable;
the fiber optic accelerometer probe further comprises: a first reed inner clamping plate (6 a), a second reed inner clamping plate (6 b), a first reed outer clamping plate (7 a) and a second reed outer clamping plate (7 b);
the center of the first elastic reed (8 a) is fixed on the first mass block (9 a) through the first reed inner clamping plate (6 a), and the center of the second elastic reed (8 b) is fixed on the second mass block (9 b) through the second reed inner clamping plate (6 b);
the edge of the first elastic reed (8 a) is connected with the base ring (13) through the first reed outer clamping plate (7 a), and the edge of the second elastic reed (8 b) is connected with the base ring (13) through the second reed outer clamping plate (7 b).
2. The fiber optic accelerometer probe of claim 1, wherein the fiber optic accelerometer probe further comprises: a first boss (4 a) and a second boss (4 b),
the first boss (4 a) is fixed on the first mass block (9 a), and the second boss (4 b) is fixed on the first boss (4 a); the reflecting mirror (3) is fixed on the plane of the first boss (4 a) and the second boss (4 b).
3. The optical fiber accelerometer probe according to claim 1 or 2, wherein the optical fiber head (1) is an optical fiber jumper plug, the optical fiber end face of the optical fiber head (1) is subjected to micro-sphere grinding and polishing, and the cavity length of the Fabry-Perot cavity interference cavity is 900-2000 μm.
4. The fibre optic accelerometer probe according to claim 1 or 2, wherein the first spring reed (8 a) and the second spring reed (8 b) have a circular structure with two circles of six annular notches and a thickness of 80-120 μm.
5. The fiber optic accelerometer probe according to claim 1 or 2, wherein the mirror (3) is coated with a thin film material, and the reflectivity of the thin film material is 0.04-1.
6. The fiber optic accelerometer probe of claim 2, wherein the fiber optic accelerometer probe further comprises: the optical fiber accelerometer probe comprises a first balancing weight (11 a) and a second balancing weight (11 b), wherein the first balancing weight (11 a) is fixed on the second balancing weight (9 b), the second balancing weight (11 b) is fixed on the first balancing weight (11 a), and the first balancing weight (11 a) and the second balancing weight (11 b) are used for matching the weights of a first boss (4 a), a second boss (4 b) and a reflecting mirror (3), so that the sagging amounts of two sides of the optical fiber accelerometer probe are consistent.
7. The optical fiber accelerometer system with the double-reed symmetrical supporting structure is characterized by comprising an optical fiber accelerometer probe (15), a detection light source (16), an optical module (17), a photoelectric detection module (18) and a signal acquisition system (19);
the fibre-optic accelerometer probe (15) being a fibre-optic accelerometer probe according to any one of claims 1 to 6;
the optical module (17) comprises a first port, a second port and a third port, wherein the first port is connected with a detection light source (16), the second port is connected with the optical fiber accelerometer probe (15), the third port is connected with the photoelectric detection module (18), the input light of the first port is output through the second port, and the input light of the second port is output through the third port;
the optical fiber accelerometer probe (15) is used for converting an acceleration signal into an optical signal;
the detection light source (16) is used for providing laser required by the system;
the optical module (17) is used for inputting laser to the optical fiber accelerometer probe (15) and guiding an optical signal of the optical fiber accelerometer probe (15) into the photoelectric detection module (18);
the photoelectric detection module (18) is used for converting an optical signal of the optical fiber accelerometer probe (15) into an electrical signal;
the signal acquisition system (19) is used for acquiring and processing the electrical signals to obtain acceleration signals.
8. The fibre-optic accelerometer system according to claim 7, wherein the detection light source (16) is a narrow linewidth fibre-optic laser and the optical module (17) is a fibre-optic circulator.
CN202210674473.4A 2022-06-15 2022-06-15 Optical fiber accelerometer probe and system of symmetrical double-reed supporting structure Active CN115015578B (en)

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