CN107247243A - The micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect - Google Patents
The micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect Download PDFInfo
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- CN107247243A CN107247243A CN201710331805.8A CN201710331805A CN107247243A CN 107247243 A CN107247243 A CN 107247243A CN 201710331805 A CN201710331805 A CN 201710331805A CN 107247243 A CN107247243 A CN 107247243A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
- G01R33/0327—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect with application of magnetostriction
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
The present invention is a kind of micro- outstanding optical fiber bridge magnetic field sensing probe of cross based on ultra-magnetic telescopic effect, belongs to fiber optic sensor technology field.Structure includes：Optical fiber, clamped end, the micro- hanging bridge of cross, middle reflector, fabry perot cavity, chromium metal film and giant magnetostrictive thin film.The micro- hanging bridge of cross is located at fiber end face, be connected by clamped end with optical fiber, the micro- hanging bridge of cross and fiber end face composition fabry perot cavity, the micro- hanging bridge outer surface of cross chrome-plated metal film and ultra-magnetic telescopic film successively.The need for the present invention can reach high precision test magnetic field using fabry perot cavity structure, the micro- hanging bridge of cross can effectively keep two pole plates of fabry perot cavity parallel, increase range.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, it is related to a kind of micro- hanging bridge optical fiber of cross based on ultra-magnetic telescopic effect
Magnetic field sensing is popped one's head in.
Background technology
Current magnetic field sensor is based primarily upon the mechanism such as Hall effect, magnetoresistance, fluxgate effect.Hall effect is
It can be assembled using free electron under external magnetic field to both sides, and form the electrical potential difference being directly proportional to magnetic induction intensity；Magnetic resistance
Sensor is that the semi-conducting material and Hall sensor of use are substantially after another magneto-dependent sensor derived from after Hall sensor
It is identical, but both mechanisms of action to magnetic field are different；Fluxgate detecting instrument is that occur using magnetic core under alternating magnetic field excitation
Permeance change is so as to modulate tested magnetic field, by detecting that modulated signal realizes the measurement of external magnetic field.
These traditional magnetic field sensors are required to electric signal excitation, and the magnetic field that electric signal excitation is produced would generally be to tested
Magnetic field produces additional interference, so as to limit the further raising of such sensor accuracy of detection.
The content of the invention
In view of the shortcomings of the prior art, the present invention is micro- outstanding in cross of the fiber end face processing based on ultra-magnetic telescopic effect
Bridge, realizes optical fiber integration structure, and middle reflector increases the area of Fabry-Perot cavity pole plate, effectively keeps the two poles of the earth
Plate is parallel, and giant magnetostrictive thin film (GMF is coated with the micro- hanging bridge outer surface of optical fiber：Giant Magnetostrictive Thin
Film), a kind of micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect is constituted, the magnetic field sensing is popped one's head in not
Need electric signal to encourage, thus do not encourage the problem of electric signal is to the interference of electromagnetic field to be measured, it is possible to achieve miniaturization, and
It is effectively improved accuracy of detection and range.
The technical scheme used for：The present invention includes LASER Light Source, detector, optical fiber directional coupler, matching fluid and biography
Sense probe.LASER Light Source and a fiber port light connects of optical fiber directional coupler side, detector are coupled with fiber orientation
Another fiber port light connects of device side, a fiber port of optical fiber directional coupler opposite side and the micro- overarm of optical fiber are humorous
Matching fluid is immersed in oscillator light connects, another port of optical fiber directional coupler opposite side by optical fiber.
The micro- hanging bridge fibre optic magnetic field sensing probe of the described cross based on ultra-magnetic telescopic effect, including four symmetrical solid
Zhi Duan and the micro- hanging bridge of cross.Form optical fiber integration structure.
The micro- hanging bridge lateral surface buffer film material selection chromium metal of described cross, thickness is 30nm-50nm, and magnetostriction is thin
Film is plated in chromium outer metallic surface, is TbDyFe materials, and thickness is 1 μm -1.5 μm.
The micro- hanging bridge length of the described optical fiber based on middle reflector is 95 μm -105 μm, wherein middle reflector a length of 30
μm -40 μm, a width of 30 μm -40 μm, micro- hanging bridge thickness is 3 μm -5 μm.
Described clamped end length is 10-15 μm, and clamped end width is 15 μm -25 μm, the micro- hanging bridge of cross and fiber end face
Connected by clamped end, the micro- hanging bridge of cross constitutes F-P cavity with fiber end face.
The present invention detects that the general principle in magnetic field is：In magnetic field, giant magnetostrictive thin film occurs to stretch, and makes to be based on super magnetic
The micro- hanging bridge of cross of flex effect is caused to bend, corresponding change, middle reflector portion occur for the chamber length of Fabry-Perot-type cavity
The area of F-P cavity is added, four symmetrical clamped ends make F-P cavity still largely keep end face parallel in change of cavity length, from
And add the measurement range to magnetic field to be measured.The modulation light sent by LASER Light Source incides method by being coupled into optical fiber
In Fabry-Perot-type cavity, after being reflected in Fabry-Perot-type cavity along backtracking, meet and produce interference, finally by photodetection
Device is received, as shown in Figure 3.Magnetic field intensity is bigger, and the shrinkage degree of giant magnetostrictive material is bigger, the flexure journey of the micro- hanging bridge of optical fiber
Degree is bigger, and the change of cavity length of Fabry-Perot-type cavity is bigger, therefore phase also occurs for the interference output signal that photodetector is received
It should change.The size of external magnetic field can be obtained by carrying out signal conciliation by the interference output signal received to photodetector.
The beneficial effects of the invention are as follows：
1st, device architecture is simple, without applied electronic signal excitation, will not produce interference to magnetic field to be measured.Optical fiber sensing probe
Small volume, meets sensor miniaturization requirement, it is adaptable to which small space is detected.
2nd, the micro- hanging bridge of cross and fiber end face formation Fabry-Perot cavity based on ultra-magnetic telescopic effect, intracavitary
Air refraction is about 1, and its accuracy of detection can effectively improve the accuracy of detection of sensing probe up to sub- nano-precision.
3rd, four symmetrical clamped ends make F-P cavity still keep both ends of the surface parallel in change of cavity length, are treated so as to add measurement
Survey the range in magnetic field.
4th, be coated with chromium metal film in optical fiber cantilever bridge outer surface, as cushion, on chromium metal film plate one layer have compared with
The giant magnetostrictive thin film of big magnetostriction coefficient, can produce larger magnetostriction, improve the accuracy of detection to magnetic field.
Brief description of the drawings
Below in conjunction with the accompanying drawings and embodiment the invention will be further described.
Fig. 1 is the front view of cross micro- hanging bridge fibre optic magnetic field sensing probe of the invention based on ultra-magnetic telescopic effect.Fig. 2
For the top view of the micro- hanging bridge fibre optic magnetic field sensing probe of cross of the present invention based on ultra-magnetic telescopic effect.
In Fig. 2：1 is optical fiber, and 2 be four symmetrical clamped ends, and 5 be giant magnetostrictive thin film；
Fig. 3 is the detection principle diagram of the micro- hanging bridge fibre optic magnetic field sensing probe of fiber end face cross based on ultra-magnetic telescopic.
Embodiment
With reference to shown in Fig. 1,2, the technical solution adopted in the present invention：The micro- hanging bridge light of cross based on ultra-magnetic telescopic effect
Fine magnetic field sensing probe, including：Optical fiber 1, symmetrical clamped end 2, the micro- hanging bridge 3 of cross based on ultra-magnetic telescopic effect, chromium metal
Film 4, giant magnetostrictive thin film 5.
The described micro- hanging bridge 3 of fiber end face cross with middle reflector is located at the end face of optical fiber 1, and length is 95 μm-
105 μm, wherein middle a length of 30 μm -40 μm of reflector, a width of 30 μm -40 μm, micro- hanging bridge thickness is 3 μm -5 μm, forms optical fiber
Integral structure.
The described length of clamped end 2 is 10 μm -15 μm, the width of clamped end width and the micro- hanging bridge of optical fiber 3 is all mutually 15 μm -
25 μm, a height of 5 μm -10 μm.Optical fiber hangs microbridge and is connected with fiber end face by clamped end, and the optical fiber based on middle reflector is micro- outstanding
Bridge constitutes Fabry-Perot cavity with fiber end face.
Described chromium metal film 4 is plated in the outer surface of the micro- hanging bridge 3 of optical fiber, and its thickness is 30nm-50nm, is stretched as super mangneto
The cushion of contracting film, can improve the reflectivity of light.
Described Giant magnetostrictive thin film is TbDyFe materials, and thickness is 1 μm -1.5 μm.Under the influence of a magnetic field can
Produce it is flexible, its at normal temperatures anisotropy constant it is almost nil, show huge magnetostrictive effect, magnetostriction coefficient
Up to 1500-2000ppm, can realize sensitive detection in magnetic field.
The micro- hanging bridge manufacture craft of optical fiber is using beam-plasma processing method (FIB) is focused in the present invention, and technological process is as follows：
(a) fiber end face is polished and cleaned, and using magnetron sputtering method, chrome-plated metal film and ultra-magnetic telescopic are thin on fiber end face
Film；(b) beam-plasma milling processing is focused parallel to fiber end face direction in fiber end face side, until reaching that optical fiber is micro-
Diametrically opposite width and height needed for hanging bridge and middle reflector；(c) optical fiber is turned over to 90 ° of angles vertically, then carries out edge
The focused ion beam sapping processing of fiber end face parallel direction, and retain the symmetrical clamped end part in the micro- hanging bridge two ends of optical fiber,
The micro- hanging bridge of optical fiber and fiber end face formation Fabry-Perot cavity then based on middle reflector；(d) it is parallel along fiber end face
Direction processes clamped end and the coupling part of middle lump with femtosecond laser；(e) plasma is focused to the micro- hanging bridge of optical fiber
Beam milling is thinned to required thickness.
Shown in Fig. 3, LASER Light Source is connected with a fiber port of fiber coupler side, photodetector and optical fiber coupling
Another fiber port connection of clutch side, a fiber port and the optical fiber sensing probe of fiber coupler opposite side connect
Connect, matching fluid is immersed in another port by optical fiber.
The present invention detects that the general principle in magnetic field is：In magnetic field, giant magnetostrictive thin film occurs to stretch, and makes to be based on super magnetic
The micro- hanging bridge of cross of flex effect is caused to bend, corresponding change, middle reflector portion occur for the chamber length of Fabry-Perot-type cavity
The area of F-P cavity is added, the micro- hanging bridge of cross makes F-P cavity still largely keep both ends of the surface parallel in change of cavity length, so that
Add the measurement range to magnetic field to be measured.The modulation light sent by LASER Light Source incides method cloth by being coupled into optical fiber
In-Perot cavity in, after being reflected in Fabry-Perot-type cavity along backtracking, meet and produce interference, finally by photodetector
Receive, as shown in Figure 3.Magnetic field intensity is bigger, and the shrinkage degree of giant magnetostrictive material is bigger, the degree of flexibility of the micro- hanging bridge of cross
Bigger, the change of cavity length of Fabry-Perot-type cavity is bigger, therefore the interference output signal that photodetector is received also occurs accordingly
Change.The size of external magnetic field can be obtained by carrying out signal conciliation by the interference output signal received to photodetector.
Claims (3)
1. a kind of micro- hanging bridge fibre optic magnetic field sensing probe of cross based on ultra-magnetic telescopic effect, including：Optical fiber 1, it is symmetrical clamped
End 2, the micro- hanging bridge 3 of cross with middle reflector, chromium metal film 4, giant magnetostrictive thin film 5, the micro- hanging bridge of cross is located at optical fiber
End face, forms optical fiber integration structure, the micro- hanging bridge of cross is connected with fiber end face by clamped end, and constitutes Fabry-Perot
Sieve resonator, the micro- hanging bridge outer surface of cross chrome-plated metal film and giant magnetostrictive thin film successively.
2. the micro- hanging bridge fibre optic magnetic field sensing probe of a kind of cross based on ultra-magnetic telescopic effect according to claim 1,
It is characterized in that：The micro- hanging bridge length of optical fiber is 95 μm -105 μm, wherein middle a length of 30 μm -40 μm of reflector, a width of 30 μm of -40 μ
M, micro- hanging bridge thickness is 3 μm -5 μm, and Fabry-Perot cavity is constituted with fiber end face, forms optical fiber integration structure.It is clamped
It is 10 μm -15 μm to hold length, and width is identical with the width of the micro- hanging bridge of optical fiber, is 15 μm -25 μm.
3. a kind of micro- hanging bridge magnetic field of the optical fiber of ultra-magnetic telescopic plated film based on middle reflector according to claim 1 is passed
Sense probe, it is characterized in that chromium metal film and giant magnetostrictive thin film are plated in the outer surface of the micro- hanging bridge of optical fiber, chromium metal film thickness successively
Spend for 30nm-50nm, Giant magnetostrictive thin film is TbDyFe materials, thickness is 1 μm -1.5 μm.
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| CN201710331805.8A CN107247243B (en) | 2017-05-05 | 2017-05-05 | Cross micro suspension bridge optical fiber magnetic field sensing probe based on giant magnetostriction effect |
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| CN201710331805.8A CN107247243B (en) | 2017-05-05 | 2017-05-05 | Cross micro suspension bridge optical fiber magnetic field sensing probe based on giant magnetostriction effect |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414104A (en) * | 2018-03-30 | 2018-08-17 | 中国计量大学 | A kind of micro- hanging bridge temperature detection device of H-type with bimetallic plated film |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN114216958A (en) * | 2021-12-22 | 2022-03-22 | 中国科学技术大学 | Micro-cantilever sensor and method for detecting exosome based on magnetic enhancement |
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| US20020085810A1 (en) * | 2000-12-30 | 2002-07-04 | Myung-Hyun Lee | Tunable fabry-perot filter and method for fabricating the same |
| CN102080972A (en) * | 2009-11-30 | 2011-06-01 | 西门子公司 | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring |
| WO2015055438A1 (en) * | 2013-10-14 | 2015-04-23 | Siemens Aktiengesellschaft | Magnetic sensor arrangement |
| CN204832475U (en) * | 2015-06-30 | 2015-12-02 | 中国计量学院 | Fibre optic magnetic field sensor based on burden giant magnetostrictive film |
| CN106569155A (en) * | 2016-05-20 | 2017-04-19 | 中国计量大学 | Cantilever beam interdigital capacitance magnetic field sensing probe based on super magnetic induced shrinkage or elongation film |
| CN106569152A (en) * | 2016-03-25 | 2017-04-19 | 中国计量学院 | Optical fiber cantilever beam magnetic field sensing probe based on giant magnetostrictive film |
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2017
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Patent Citations (6)
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|---|---|---|---|---|
| US20020085810A1 (en) * | 2000-12-30 | 2002-07-04 | Myung-Hyun Lee | Tunable fabry-perot filter and method for fabricating the same |
| CN102080972A (en) * | 2009-11-30 | 2011-06-01 | 西门子公司 | External cavity-type optical fiber Fabry-Perot sensor and system and method for vibration monitoring |
| WO2015055438A1 (en) * | 2013-10-14 | 2015-04-23 | Siemens Aktiengesellschaft | Magnetic sensor arrangement |
| CN204832475U (en) * | 2015-06-30 | 2015-12-02 | 中国计量学院 | Fibre optic magnetic field sensor based on burden giant magnetostrictive film |
| CN106569152A (en) * | 2016-03-25 | 2017-04-19 | 中国计量学院 | Optical fiber cantilever beam magnetic field sensing probe based on giant magnetostrictive film |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414104A (en) * | 2018-03-30 | 2018-08-17 | 中国计量大学 | A kind of micro- hanging bridge temperature detection device of H-type with bimetallic plated film |
| CN108414104B (en) * | 2018-03-30 | 2024-01-23 | 中国计量大学 | H-shaped micro-suspension bridge temperature detection device with bimetal coating |
| CN112433182A (en) * | 2020-10-15 | 2021-03-02 | 西安理工大学 | Device and method for accurately measuring magnetostriction micro deformation |
| CN114216958A (en) * | 2021-12-22 | 2022-03-22 | 中国科学技术大学 | Micro-cantilever sensor and method for detecting exosome based on magnetic enhancement |
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| CN107247243B (en) | 2023-08-15 |
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