CN206975198U - The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure - Google Patents
The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure Download PDFInfo
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- CN206975198U CN206975198U CN201720523245.1U CN201720523245U CN206975198U CN 206975198 U CN206975198 U CN 206975198U CN 201720523245 U CN201720523245 U CN 201720523245U CN 206975198 U CN206975198 U CN 206975198U
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Abstract
The utility model is directed to the magnetic-field measurement in narrow space, devises a kind of micro- hanging bridge magnetic field sensing probe of ultra-magnetic telescopic coated optical fibre based on F P-structure.Structure includes：Optical fiber, clamped end, the micro- hanging bridge of optical fiber, middle reflector, fabry perot cavity, chromium metal film and giant magnetostrictive thin film.The micro- hanging bridge of optical fiber is located at fiber end face, is connected by clamped end with optical fiber, and the micro- hanging bridge of optical fiber and fiber end face form fabry perot cavity, the micro- hanging bridge outer surface of optical fiber chrome-plated metal film and ultra-magnetic telescopic film successively.The utility model can reach the needs in high precision test magnetic field using fabry perot cavity structure, and centre reflection physical efficiency effectively keeps two pole plates of fabry perot cavity parallel, increases range.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, is related to a kind of micro- hanging bridge magnetic field sensing of optical fiber based on F-P structures and visits
Head.
Background technology
Current magnetic field sensor is based primarily upon the mechanism such as Hall effect, magnetoresistance, fluxgate effect.Hall effect is
Using the tendency of free electron oriented both sides aggregation under external magnetic field, the electrical potential difference directly proportional to magnetic induction intensity is formed；
Magnetoresistive transducer is another magneto-dependent sensor derived from after Hall sensor, the semi-conducting material and Hall sensor of use
It is substantially the same, but this sensor is different to the mechanism of action in magnetic field, and the sensor carriers direction of motion exists with tested magnetic field
In same plane；Fluxgate detecting instrument is that permeance change occurs under alternating magnetic field excitation so as to modulate quilt using magnetic core
Magnetic field is surveyed, the measurement of external magnetic field is realized by the detection to modulated signal.
These traditional magnetic field sensors are required to electric signal excitation, and magnetic field would generally be to tested caused by electric signal excitation
Magnetic field produces additional interference, so as to have impact on the further raising of such sensor accuracy of detection.
The content of the invention
In view of the shortcomings of the prior art, the present invention processes the micro- hanging bridge of optical fiber based on F-P structures in fiber end face, realizes light
Fine integral structure, the area of middle reflector increase Fabry-Perot cavity pole plate, and effectively keep two-plate parallel,
Giant magnetostrictive thin film (GMF is coated with the micro- hanging bridge outer surface of optical fiber：Giant Magnetostrictive Thin Film), structure
Into a kind of micro- hanging bridge magnetic field sensing probe of ultra-magnetic telescopic coated optical fibre based on middle reflector, magnetic field sensing probe is not required to
Electric signal is wanted to encourage, thus the problem of without excitation interference of the electric signal to electromagnetic field to be measured, it is possible to achieve it is miniaturized, and has
Improve accuracy of detection and measurement range to effect.
The technical scheme used for：The present invention includes LASER Light Source, detector, optical fiber directional coupler, matching fluid and biography
Sense probe.LASER Light Source and a fiber port light connects of optical fiber directional coupler side, detector couple with fiber orientation
Another fiber port light connects of device side, a fiber port of optical fiber directional coupler opposite side and the micro- overarm of optical fiber are humorous
Matching fluid is immersed in oscillator light connects, another port of optical fiber directional coupler opposite side by optical fiber.
The described micro- hanging bridge of the optical fiber based on middle reflector is located at fiber end face, including symmetrical clamped end and micro- outstanding
Bridge.Form optical fiber integration structure.
Described micro- hanging bridge lateral surface buffer film material selection chromium metal, thickness 30nm-50nm, magnetostrictive thin film plating
It is TbDyFe materials in chromium outer metallic surface, thickness is 1 μm -1.5 μm.
The micro- hanging bridge length of the described optical fiber based on middle reflector is 95 μm -105 μm, wherein middle reflector a length of 35
μm -45 μm, a width of 35 μm -45 μm, micro- hanging bridge thickness is 3 μm -5 μm.
Described clamped end length is 10 μm -15 μm, and clamped end width is 20 μm -30 μm, the micro- hanging bridge of optical fiber and optical fiber end
Face is connected by clamped end, and the micro- hanging bridge of optical fiber forms F-P cavity with fiber end face.
The present invention detection magnetic field general principle be：In magnetic field, giant magnetostrictive thin film occurs to stretch, and makes based on centre
Micro- hanging bridge of reflector is bent, and corresponding change occurs for the chamber length of Fabry-Perot-type cavity, and middle reflector portion adds F-
The area of P chambers, two symmetrical clamped ends make F-P cavity still largely keep both ends of the surface parallel in change of cavity length, so as to add
To the measurement range in magnetic field to be measured.The modulation light sent by LASER Light Source incides Fabry-Perot by being coupled into optical fiber
In chamber, after being reflected in Fabry-Perot-type cavity along backtracking, meet and produce interference, finally received by photodetector, such as
Shown in Fig. 3.Magnetic field intensity is bigger, and the shrinkage degree of giant magnetostrictive material is bigger, and the degree of flexibility of the micro- hanging bridge of optical fiber is bigger, method
The change of cavity length of Fabry-Perot-type cavity is bigger, therefore respective change also occurs for the interference output signal that photodetector receives.It is logical
Cross the interference output signal progress signal received to photodetector and reconcile the size that can obtain external magnetic field.
The beneficial effects of the invention are as follows：
1st, device architecture is simple, is encouraged without applied electronic signal, will not produce interference to magnetic field to be measured.Optical fiber sensing probe
Small volume, meet that sensor miniaturization requires, detected suitable for small space.
2nd, micro- hanging bridge and fiber end face based on middle reflector form Fabry-Perot cavity, chamber air refraction
Rate is about 1, and its accuracy of detection can effectively improve the accuracy of detection of sensing probe up to sub- nano-precision.
3rd, two symmetrical clamped ends make F-P cavity still keep both ends of the surface parallel in change of cavity length, so as to add to magnetic to be measured
The measurement range of field.
4th, be coated with chromium metal film in optical fiber cantilever bridge outer surface, as cushion, plated on chromium metal film one layer have compared with
The giant magnetostrictive thin film of big magnetostriction coefficient, larger magnetostriction can be produced, improve the accuracy of detection to magnetic field.
Brief description of the drawings
Fig. 1 is the front view of the micro- hanging bridge magnetic field sensing probe of optical fiber of the present invention based on F-P structures.
Fig. 2 is the top view of the micro- hanging bridge magnetic field sensing probe of optical fiber of the present invention based on F-P structures.In Fig. 2：1 is optical fiber,
2 be both sides symmetrically clamped end, and 5 be giant magnetostrictive thin film；
Fig. 3 is the micro- hanging bridge magnetic field sensing probe detection principle diagram of optical fiber based on F-P structures.
Embodiment
The micro- hanging bridge 3 of the described optical fiber based on middle reflector is located at the end face of optical fiber 1, and length is 95 μm -105 μm, its
Middle a length of 35 μm -45 μm of reflector, a width of 35 μm -45 μm, micro- hanging bridge thickness is 3 μm -5 μm, forms optical fiber integration knot
Structure.
The described length of clamped end 2 is 10 μm -15 μm, the width of clamped end width hanging bridge 3 micro- with optical fiber is all mutually 20 μm -
30 μm, a height of 5 μm -10 μm.Optical fiber hangs microbridge and is connected with fiber end face by clamped end, and the optical fiber based on middle reflector is micro- outstanding
Bridge forms Fabry-Perot cavity with fiber end face.
Described chromium metal film 4 is plated in the outer surface of the micro- hanging bridge 3 of optical fiber, and its thickness is 30nm-50nm, is stretched as super mangneto
The cushion of contracting film, there is larger reflectivity to incident light.
Described Giant magnetostrictive thin film is TbDyFe materials, and thickness is 1 μm -1.5 μm.Under the influence of a magnetic field can
Produce flexible.
For the micro- hanging bridge manufacture craft of optical fiber using beam-plasma processing method (FIB) is focused on, technological process is as follows in the present invention：
(a) fiber end face is polished and cleaned, and using magnetron sputtering method, chrome-plated metal film and ultra-magnetic telescopic are thin on fiber end face
Film；(b) beam-plasma milling processing is focused parallel to fiber end face direction in fiber end face side, it is micro- until reaching optical fiber
Diametrically opposite width and height needed for hanging bridge and middle reflector；(c) optical fiber is turned over to 90 ° of angles vertically, then carries out edge
The focused ion beam sapping processing of fiber end face parallel direction, and retain the micro- hanging bridge both ends of optical fiber symmetrically clamped end part,
The micro- hanging bridge of optical fiber then based on middle reflector forms Fabry-Perot cavity with fiber end face；(d) it is parallel along fiber end face
Direction processes clamped end and the coupling part of middle lump with femtosecond laser；(e) plasma is focused to the micro- hanging bridge of optical fiber
Beam milling is thinned to required thickness.
Shown in Fig. 3, LASER Light Source is connected with a fiber port of fiber coupler side, photodetector and optical fiber coupling
Another fiber port connection of clutch side, a fiber port and the optical fiber sensing probe of fiber coupler opposite side connect
Connect, matching fluid is immersed in another port by optical fiber.
Claims (2)
1. a kind of micro- hanging bridge magnetic field sensing probe of optical fiber based on F-P structures, including：Optical fiber, symmetrical clamped end, based on middle anti-
The micro- hanging bridge of optical fiber of beam, chromium metal film, giant magnetostrictive thin film, it is characterized in that the micro- hanging bridge position of optical fiber with middle reflector
In fiber end face, the micro- hanging bridge length of optical fiber is 95 μm -105 μm, middle a length of 35 μm -45 μm of reflector, a width of 35 μm -45 μm,
Micro- hanging bridge thickness be 3 μm -5 μm, clamped end length be 10 μm -15 μm, width is identical with the width of the micro- hanging bridge of optical fiber, for 20 μm -
30 μm, the micro- hanging bridge of optical fiber is connected with fiber end face by two symmetrical clamped ends, and forms Fabry-Perot cavity, is formed
Optical fiber integration structure.
A kind of 2. micro- hanging bridge magnetic field sensing probe of optical fiber based on F-P structures according to claim 1, it is characterized in that chromium is golden
Category film and giant magnetostrictive thin film are plated in the outer surface of the micro- hanging bridge of optical fiber successively, and chromium thickness of metal film is 30nm-50nm, super mangneto
Self-adhering film material is TbDyFe materials, and thickness is 1 μm -1.5 μm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720523245.1U CN206975198U (en) | 2017-05-05 | 2017-05-05 | The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure |
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| CN201720523245.1U CN206975198U (en) | 2017-05-05 | 2017-05-05 | The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure |
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| CN206975198U true CN206975198U (en) | 2018-02-06 |
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| CN201720523245.1U Expired - Fee Related CN206975198U (en) | 2017-05-05 | 2017-05-05 | The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932739A (en) * | 2017-05-05 | 2017-07-07 | 中国计量大学 | The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure |
| CN108896936A (en) * | 2018-05-03 | 2018-11-27 | 清华大学 | Accurate magnetic field detection method and system based on magnetostriction materials optics cavity |
-
2017
- 2017-05-05 CN CN201720523245.1U patent/CN206975198U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932739A (en) * | 2017-05-05 | 2017-07-07 | 中国计量大学 | The micro- hanging bridge magnetic field sensing probe of optical fiber based on F P-structure |
| CN106932739B (en) * | 2017-05-05 | 2023-08-11 | 中国计量大学 | F-P structure-based optical fiber micro-suspension bridge magnetic field sensing probe |
| CN108896936A (en) * | 2018-05-03 | 2018-11-27 | 清华大学 | Accurate magnetic field detection method and system based on magnetostriction materials optics cavity |
| CN108896936B (en) * | 2018-05-03 | 2020-07-10 | 清华大学 | Precise magnetic field detection method and system based on magnetostrictive material optical cavity |
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Granted publication date: 20180206 Termination date: 20190505 |
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