CN103512588B - Long Magnetic Sensor and manufacture method - Google Patents
Long Magnetic Sensor and manufacture method Download PDFInfo
- Publication number
- CN103512588B CN103512588B CN201210219386.6A CN201210219386A CN103512588B CN 103512588 B CN103512588 B CN 103512588B CN 201210219386 A CN201210219386 A CN 201210219386A CN 103512588 B CN103512588 B CN 103512588B
- Authority
- CN
- China
- Prior art keywords
- gmr
- magnetic
- magnetic sensor
- long
- short
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Abstract
The invention discloses a kind of long Magnetic Sensor with power of test on a large scale, including: shell; Long magnetic sensing chip, long magnetic sensing chip is positioned at shell, and wherein, long magnetic sensor chip is GMR effect magnet-sensitive element, and GMR effect magnet-sensitive element includes matrix; GMR magnetic sensitive film at least two sections parallel to each other and separated from each other, GMR magnetic sensitive film is deposited on matrix; First group of electrode pair, the outside of at least two sections of GMR magnetic sensitive films described in being laid in; Second group of electrode two ends to the GMR magnetic sensitive film that is laid in. Electrical connection component, electrical connection component is positioned at enclosure, and is connected with magnetic sensing chip; Line support body, is positioned at enclosure and sheathed with electrical connection component is connected, being used for supporting long magnetic sensing chip and electrical connection component. The long Magnetic Sensor of the present invention has simple in construction, and production cost is low, and volume is little, and thickness is thin, sensitivity high. The invention also discloses the manufacture method of a kind of long Magnetic Sensor.
Description
Technical field
The invention belongs to magnetic sensor technologies field, particularly to a kind of long Magnetic Sensor and manufacture method.
Background technology
Magnetic Sensor is that the magnetic variation changes such as magnetic field, electric current, ess-strain, temperature, light caused by its sensing unit is played sensitization and causes the change of its magnetic property, by converting the change of this magnetic property to the signal of telecommunication, by the device measuring physical quantity to measure related physical quantity, particularly small-signal to the signal of telecommunication. Magnetic Sensor is widely used in Aeronautics and Astronautics, microelectronics, geological exploration, medical imaging, information gathering and the field such as financial and military.
In traditional industrial circle, most widely used Magnetic Sensor is coil-type magnetic sensor, owing to its volume is big, sensitivity is low and complex manufacturing technology and be difficult to integrated, and, its low-response, resolution are low, stability and reliability poor, therefore more and more do not adapt to the needs of modern social development
Fig. 1 illustrates the structure chart of traditional Magnetic Sensor most widely used in financial field. There is an opening 103 on shell 101 top, magnetic core 105a and 105b forms a convex seat, its top projection is stretched out from housing top end opening 103, bottom is wound with multiturn coil, having a narrow and small magnetic gap 107 at its top raised centre, magnetic core 105a and 105b forms a convex seat and is fixed in shell 101 by a support 111, and coil is connected with printed circuit board (PCB) 113, printed circuit board (PCB) passes through capillary 114a, 114b and system connectivity. When carrying out currency examination detection, the convex seat top projection that magnetic core 105a and 105b is formed is streaked from banknote magnetic oil ink-stick or magnetic metal bar surface, owing to convex seat top raised centre has a narrow and small magnetic gap 107, thus, the multiturn coil that its bottom is wound around produces the magnetic field of change and forms induced electromotive force, the size of this induced electromotive force is proportional to the magnetic field intensity of banknote magnetic oil ink-stick or magnetic metal bar, accordingly, can distinguish the true and false of banknote. Along with financial circles counting, the widespread development of currency examination technology and improving constantly of counterfeit money fidelity, traditional coil-type magnetic sensor does not more and more adapt to the requirement of financial circles development, particularly for improving sensitivity and capacity of resisting disturbance, implement multiple spot detection, seamless detection and expansion by inspection scope, it has to by increasing coil turn and extending the mode of its magnetic gap length, but, this will cause the increase of its volume, thus, it is impossible to meet the small form factor requirements of Magnetic Sensor.
Summary of the invention
It is contemplated that solve one of above-mentioned technical problem at least to a certain extent or provide at a kind of useful business selection. For this, first purpose of the present invention is in that the long Magnetic Sensor proposing a kind of simple in construction, highly sensitive and cost is low. Second purpose of the present invention is in that to propose the manufacture method of a kind of long Magnetic Sensor.
For achieving the above object, the embodiment of first aspect present invention provides a kind of long Magnetic Sensor, including: shell; Long magnetic sensing chip, described long magnetic sensing chip is positioned at described shell, and wherein, described long magnetic sensor chip is GMR effect magnet-sensitive element, and described GMR effect magnet-sensitive element includes: matrix; GMR magnetic sensitive film at least two sections parallel to each other and separated from each other, described GMR magnetic sensitive film deposits on the matrix; First group of electrode pair, described first electrode outside at least two sections of described GMR magnetic sensitive films entirety that are laid in; Second group of electrode pair, the described second group of electrode two ends to the described GMR magnetic sensitive film that is laid in, wherein said first group of electrode to and described second group of electrode to independently with described GMR magnetic sensitive film be electrically connected; Electrical connection component, described electrical connection component is positioned at described enclosure, and is connected with described long magnetic sensing chip; Line support body, described line support body is positioned at described enclosure and sheathed with described electrical connection component is connected, and is used for supporting described long magnetic sensing chip and described electrical connection component.
Long Magnetic Sensor according to embodiments of the present invention, by adopting some electrodes pair at GMR magnetic sensitive film and be laid in GMR magnetic sensitive film both sides and two ends, by selectivity electrically connect by some electrodes of GMR magnetic sensitive film both sides and two ends and doing separate unit segmentation use. Thus simplifying the structure of long Magnetic Sensor, reducing production cost, having volume little, thickness is thin, sensitivity high, meets modern society's microminiaturization to Magnetic Sensor, integrated, many demands for development such as low-power consumption and high-performance.
In one embodiment of the invention, described long magnetic sensor chip includes anisotropic magneto-resistive effect AMR magnet-sensitive element, tunnel magneto effect TMR magnet-sensitive element, Hall effect HALL magnet-sensitive element, giant magnetoresistance effect GMI magnet-sensitive element and giant Hall effect GHE magnet-sensitive element.
In one embodiment of the invention, described GMR magnetic sensitive film include at least two have the long magnetic susceptibility unit of GMR in contrary pinning direction, described GMR long magnetic susceptibility unit and described first group of electrode to or second group of electrode to forming Wheatstone bridge.
In one embodiment of the invention, described GMR magnetic sensitive film is long magnetic sensitive film or multistage is seamless or the short magnetic sensitive film of seamed connection.
In one embodiment of the invention, the length of every segment length's magnetic sensitive film at least respectively 3mm, or short magnetic sensitive film described in multistage is seamless or the total length of seamed connection is at least 3mm.
In one embodiment of the invention, described long magnetic sensor chip includes multistage magnetic sensor unit serial or parallel connection and forms, every section of magnetic sensor unit includes: at least two sections of GMR magnetic sensitive films, and wherein said GMR magnetic sensitive film is parallel to each other and independence separated from each other; First electrode pair, described first electrode is to inside the every section of independent GMR magnetic sensitive film that is laid in or outside and is connected with every section of GMR magnetic sensitive film; Second electrode pair, described second electrode pair and each independent GMR magnetic sensitive film join end to end and described first electrode be pointed to described second electrode between.
In one embodiment of the invention, described GMR magnetic sensitive film is continuously continuous magnetic sensitive film or discontinuous discontinuity magnetic sensitive film, wherein, described continuous continuous magnetic sensitive film or discontinuous discontinuity magnetic sensitive film are electrically connected by the conductive layer that deposition, plated film, sputtering mode are formed and are formed.
In one embodiment of the invention, long Magnetic Sensor also includes noise shielding device, described noise shielding device includes at least one can form the depression in magnetic vacuum region that integrated magnetic field is zero or weak integrated magnetic field, and wherein said long magnetic sensor chip is assembled in the depression in described magnetic vacuum region.
In one embodiment of the invention, described electrical connection component includes: printed circuit board (PCB), is used for supporting described noise shielding device and described long magnetic sensor chip, and is electrically connected with described long magnetic sensor chip by jumper; Many root beads pin, for being electrically connected described long magnetic sensor chip by described printed circuit board (PCB).
In one embodiment of the invention, described many root beads pin includes four root bead pins, described four root bead pins are connected with described printed circuit board (PCB) and described shell, wherein, three root bead pins are by printed circuit board (PCB) and described long magnetic sensor chip electric connection, and a root bead pin is by printed circuit board (PCB) and described shell electric connection.
In one embodiment of the invention, the top of described shell include at least one introducing face, at least one contact induction face and at least one trail face, wherein, described contact induction face includes at least one sensing window, and the length direction of described sensing window is consistent with the length direction of described long magnetic sensor chip.
In one embodiment of the invention, the introducing face length degree on the top of described shell at least above or trail the length in face described in being equal to.
In one embodiment of the invention, described shell is the coating of the coating of the additional ferronickel of permalloy material, Ferrite Material, silicon steel sheet material or metal material or permalloy or the additional ferronickel of nonmetallic materials or permalloy.
In one embodiment of the invention, described introducing face, trail face and contact induction face is planar structure or arcuate structure.
In one embodiment of the invention, described line support body has a bar shape structure, it is engaged and is arranged in described shell, described line support body includes top and tail end, wherein, the centre position on described top is provided with depression to hold described printed circuit board (PCB), and outside includes the side introducing the identical shape in face with described shell, and the side including trailing with shell the identical shape in face outside another side coordinates with the top with shell.
In one embodiment of the invention, described line support body has a bar shape in structure and also includes four through holes, described through hole and described printed circuit board (PCB) and capillary Matching installation between vertical direction top and tail end.
The embodiment of second aspect present invention provides the manufacture method of a kind of long Magnetic Sensor, comprises the steps:
The short GMR magnetic sensitive film that at least two sections parallel to each other and separated from each other is deposited on matrix;
Lay electrode pair at the two ends of described short GMR magnetic sensitive film, and described electrode pair is electrically connected to form multiple short GMR magnetic susceptibility unit with described short GMR magnetic sensitive film;
End to end form is adopted to carry out seamless link and/or seamed connection to form long Magnetic Sensor multiple described short GMR magnetic susceptibility unit, wherein, the plurality of short GMR magnetic susceptibility unit arranged parallel, and in the seamless link of adjacent described short GMR magnetic susceptibility unit or seamed junction, the tail end of magnetic susceptibility film at front short GMR magnetic susceptibility unit is located along the same line with the head end in the vertical direction of the magnetic susceptibility film at rear short 2nd GMR magnetic susceptibility unit or keeps certain interval, wherein, described formerly short GMR magnetic susceptibility unit and described adjacent at rear short GMR magnetic susceptibility unit.
The manufacture method of long Magnetic Sensor according to embodiments of the present invention, by adopting some electrodes pair of GMR magnetic sensitive film and be laid in GMR magnetic sensitive film both sides and two ends, use by selectivity being electrically connected by some electrodes of GMR magnetic sensitive film both sides and two ends and doing separate unit segmentation, manufacture long Magnetic Sensor, manufacture method is simple and meets modern society's microminiaturization to Magnetic Sensor, integrated, many demands for development such as low-power consumption and high-performance.
In one embodiment of the invention, the plurality of short GMR magnetic susceptibility unit one of in the following ways carries out seamless or seamed connection:
First kind of way: the second side of the tail end of short GMR magnetic susceptibility unit described in the first side of the head end of presently described short GMR magnetic susceptibility unit and front, and the first side of the head end of the second side GMR short in described in rear magnetic susceptibility unit of the tail end of described current short GMR magnetic susceptibility unit carries out seamless link or seamed is connected;
The second way: the plurality of short GMR magnetic susceptibility unit is divided into multiple short GMR magnetic susceptibility unit group, wherein, each described short GMR magnetic susceptibility unit group includes: the first short GMR magnetic susceptibility unit and the second short GMR magnetic susceptibility unit, wherein, the first side of the head end of described first short GMR magnetic susceptibility unit and the second side seamless link of the tail end of the described short GMR magnetic susceptibility unit of previous group or seamed be connected; Second side seamless link of the first side of the tail end of described first short GMR magnetic susceptibility unit and the head end of the described second short GMR magnetic susceptibility unit with group or seamed be connected.
In one embodiment of the invention, the plurality of short GMR magnetic susceptibility unit can also adopt the mode that described first kind of way and the described second way combine to carry out seamless link or seamed connection to form described long Magnetic Sensor, wherein, described long Magnetic Sensor includes many group leaders magnetic sensor unit, often organizing described long magnetic sensor unit and include multiple short GMR magnetic susceptibility unit, the plurality of short GMR magnetic susceptibility unit adopts described first kind of way to carry out seamless link or seamed connection; The described second way is adopted to carry out seamless link or seamed connection between described many group leaders magnetic sensor unit.
The additional aspect of the present invention and advantage will part provide in the following description, and part will become apparent from the description below, or is recognized by the practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage are from conjunction with will be apparent from easy to understand the accompanying drawings below description to embodiment, wherein:
Fig. 1 is the structure chart of traditional coil-type magnetic sensor;
Fig. 2 is the structure chart of long Magnetic Sensor according to embodiments of the present invention;
Fig. 3 is the concrete structure exploded view of the long Magnetic Sensor shown in Fig. 2;
Fig. 4 is the structure chart of the long magnetic sensor chip of GMR one of according to embodiments of the present invention;
Fig. 5 is the schematic diagram of the favour stone half-bridge of long Magnetic Sensor according to embodiments of the present invention;
Fig. 6 is the schematic diagram of the favour stone full-bridge of long Magnetic Sensor according to embodiments of the present invention;
Fig. 7 is the structure chart of the long magnetic sensor chip of GMR of two according to embodiments of the present invention;
Fig. 8 is the structure chart of the long magnetic sensor chip of GMR of three according to embodiments of the present invention;
Fig. 9 is the flow chart of the manufacture method of long Magnetic Sensor according to embodiments of the present invention;
Figure 10 is the structure chart of the long magnetic sensor chip of GMR in accordance with another embodiment of the present invention;
Figure 11 is the structure chart of the long magnetic sensor chip of GMR in accordance with another embodiment of the present invention; And
Figure 12 is the structure chart of the long magnetic sensor chip of the GMR according to another embodiment of the present invention.
Detailed description of the invention
Being described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of same or like function from start to finish. The embodiment described below with reference to accompanying drawing is illustrative of, it is intended to is used for explaining the present invention, and is not considered as limiting the invention.
Additionally, term " first ", " second " are only for descriptive purposes, and it is not intended that indicate or imply relative importance or the implicit quantity indicating indicated technical characteristic. Thus, define " first ", the feature of " second " can express or implicitly include one or more these features. In describing the invention, " multiple " are meant that two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, for instance, it is possible to it is fixing connection, it is also possible to be removably connect, or connect integratedly; Can be mechanically connected, it is also possible to be electrical connection; Can be joined directly together, it is also possible to be indirectly connected to by intermediary, it is possible to be the connection of two element internals. For the ordinary skill in the art, it is possible to understand above-mentioned term concrete meaning in the present invention as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score can include the first and second features and directly contact, it is also possible to include the first and second features and be not directly contact but by the other characterisation contact between them. And, fisrt feature second feature " on ", " top " and " above " include fisrt feature directly over second feature and oblique upper, or be merely representative of fisrt feature level height higher than second feature. Fisrt feature second feature " under ", " lower section " and " below " include fisrt feature directly over second feature and oblique upper, or be merely representative of fisrt feature level height less than second feature.
Below with reference to Fig. 2 to Figure 11, long Magnetic Sensor according to embodiments of the present invention is described.
As shown in Figures 2 and 3, the long Magnetic Sensor 1000 that the embodiment of the present invention provides includes: shell 100, long magnetic sensing chip 400, electrical connection component 200 and line support body 300. Wherein, the top of shell 100 include at least one introduce face A, at least one contact induction face B and at least one trail face C. Contact induction face B includes at least one sensing window W. The length direction of sensing window W is consistent with the length direction of long magnetic sensor chip 400.
In an embodiment of the present invention, electrical connection component 200 includes printed substrate 201 and 4 root bead pin 205, and wherein, printed substrate 201 is square structure, and its profile is similar to the internal via shape of shell 100, in order to can be positioned in shell 100. Possibly together with multiple contact pads and wiring on printed substrate 201. 4 root bead pins 205 are electrically communicated with wiring by the contact pad on printed substrate 201. The present invention also provides for a noise shielding device 500, basis at noise shielding device 500 is internal to be comprised at least one and can form the depression 502 in magnetic vacuum region that integrated magnetic field is zero or weak integrated magnetic field, long magnetic sensing chip 400 is positioned in the depression 502 in magnetic vacuum region, after the noise shielding device 500 comprising long magnetic sensing chip 400 is welded on the printed circuit board (PCB) 201 in electrical connection component 200, long magnetic sensing chip 400 is electrically connected by the pad of jumper with the printed circuit board (PCB) 201 in electrical connection component 200. So, in four root bead pins 205 of electrical connection component 200 three are electrically conducted by pad on printed circuit board (PCB) 201 and long magnetic sensing chip 400, meanwhile, other one in four root bead pins 205 is connected with shell 100 electrical ground by pad on printed circuit board (PCB) 201.
In an embodiment of the present invention, line support body 300 has a bar shape structure, and it includes a top and a tail end. wherein, the centre position on top is provided with a depression B0 that can hold printed circuit board (PCB) 201, the side A0 introducing shape identical for face A with shell 100 it is provided with outside the one side at its top, the side C0 of the shape identical with face of the trailing C of shell 100 it is provided with outside another side, four through holes 301 it are additionally provided with between vertical direction top and tail end in its strip structure body, when the electrical connection component 200 being equipped with noise shielding device 500 and long magnetic sensing chip 400 coordinates, the printed substrate 201 of electrical connection component 200 is set in the depression B0 of line support body 300, four root bead pins 205 of electrical connection component 200 pass from four through holes 301 of line support body 300, so, after whole assembly is sheathed on shell 100, the side A0 and side C0 of line support body 300 respectively with shell 100 introduce face A and trail face C medial surface coincide, the length direction of this magnetic susceptibility film allowing for long magnetic sensing chip 400 is consistent with the length direction of the magnetic induction window W of shell 100, so that the magnetic susceptibility film of long magnetic sensing chip 400 can pass through magnetic induction window W senses external magnetic signal.
In actual application, when being used as currency examination detection, banknote enters from the introducing face A of long Magnetic Sensor 1000, by contact induction face B, draw from trailing face C, magnetic ink or magnetic metal line on banknote streak from the contact induction face B of Magnetic Sensor, its magnetic field is entered by the sensing window W of contact induction face B, form a variation magnetic field, the long magnetic sensing chip of the Magnetic Sensor being in shell 100 senses this variation magnetic field, thus exporting a differential signal, show as multi-form impulse wave, this pulse wave signal size and variation magnetic field power are ratio, size and frequency according to this pulse signal, just can determine whether the true and false of banknote. ,
In the example of the present invention, the length introducing face of long Magnetic Sensor at least above or equal to trailing the length in face.
In the example of the present invention, introducing face, trail face and contact induction face is planar structure or arcuate structure.
In one embodiment of the invention, shell 100 is permalloy material, Ferrite Material, the coating of silicon steel sheet material or metal material addn of nickel ferroalloy or permalloy, or the coating of the additional ferronickel of nonmetallic materials or permalloy.
In yet another embodiment of the present invention, long magnetic sensor chip includes anisotropic magneto-resistive effect AMR magnet-sensitive element, tunnel magneto effect TMR magnet-sensitive element, Hall effect HALL magnet-sensitive element, giant magnetoresistance effect GMI magnet-sensitive element and giant Hall effect GHE magnet-sensitive element.
Fig. 4 show the structure chart of the long magnetic sensor chip of GMR of the present invention, and it includes: matrix GMR magnetic sensitive film 402a, 402b 401, two sections parallel to each other and separated from each other, first group of electrode to 403 and second group of electrode to 404. First group of electrode includes electrode 403a, 403b, 403c, 403d, 403e, 403f, 403g and 403h to 403. Second group of electrode includes electrode 404a, 404b, 404c, 404d to 404. GMR magnetic sensitive film 402a, 402b are deposited on matrix 401. Electrode 403a in 403,403b, 403c, 403d, 403e, 403f, 403g and 403h are laid in GMR magnetic sensitive film 402a by first group of electrode respectively, the both sides of 402b, 404a, 404b, 404c, 404d in 404 is laid in the two ends of GMR magnetic sensitive film 402a, 402b by second group of electrode respectively. 403 and second group of electrode are independently electrically connected with GMR magnetic sensitive film 402a/402b by first group of electrode to 404. When the long magnetic sensor chip 400 of GMR is assembled on the printed substrate 201 of electrical connection component 200, by to GMR magnetic sensitive film 402a/402b and first group of electrode to 403 with second group of electrode to 404 selectivity be connected, form Wheatstone bridge, the differential signal of Wheatstone bridge, is exported by the capillary of electrical connection component 200.
As one embodiment of the present of invention, electrode 403a in 403,403b, 403c, 403d, 403e, 403f, 403g and 403h are likely to all and/or the both sides of the part lays both sides at GMR magnetic sensitive film 402a and/or 402b by first group of electrode, 404a, 404b, 404c, 404d in 404 is laid in GMR magnetic sensitive film 402a by second group of electrode respectively, the two ends of 402b, by selectivity is connected by first group of electrode to second group of electrode, constitute the Wheatstone bridge of the long magnetic sensor chip of the present invention.
Fig. 5 and Fig. 6 respectively illustrates the favour stone half-bridge of the composition of the long Magnetic Sensor of GMR in embodiments of the invention and the schematic diagram of favour stone full-bridge.
As shown in Figure 5, the long magnetic sensor chip of GMR includes two sections and parallel to each other has contrary pinning layer direction and GMR magnetic sensitive film 402a separately each other, 402b forms, 404a, 404b and 404c, 404d are connected by its two ends respectively with the second electrode, wherein electrode 404a and electrode 4404b is laid in one end of two GMR magnetic sensitive film 402a and 402b respectively, electrode 404c and 404d is laid in the other end of two GMR magnetic sensitive film 402a and 402b respectively, electrode 404c and 404d connects formation and jointly holds C, is consequently formed Wheatstone bridge half-bridge circuit. Arrow M illustrates the pinning layer direction of GMR magnetic sensitive film 402a, and N illustrates the pinning layer direction of GMR magnetic sensitive film 402b. As one embodiment of the present of invention, electrode is to 404a, 404b and 404c, 404d is also likely to be and is positioned at magnetic sensitive film 402a, first electrode pair of the long magnetic sensor chip of GMR in inside 402b and/or outside, is connected by selectivity, constitutes Wheatstone bridge half-bridge circuit as shown. When being applied to magnetic signal detection, from output differential signal between electrode 404a and common end C or 404b and common end C.
Fig. 6 illustrates the favour stone full-bridge circuit that in embodiments of the invention, the long Magnetic Sensor of GMR is constituted, wherein, electrode 404a, 404b and 404c, 404d by the second group of electrode laying respectively at GMR magnetic sensitive film 402a and 402b two ends to constituting, electrode 404a and 404b composition is jointly held D, electrode 404c and 404d to constitute and is jointly held E. Electrode 403a and 403b, by being positioned at inside GMR magnetic sensitive film 402a and 402b and/or first electrode of the long magnetic sensor chip of GMR in outside is to constituting, connects and composes favour stone full-bridge circuit as shown by selectivity. Wherein, arrow H, J, I, K respectively illustrates four sections of GMR magnetic sensitive film 402a, 402a ', the pinning layer direction of 402b and 402b '. When being applied to magnetic signal detection, from output differential signal between common end D and common end C or 403a and 403b.
In one embodiment of the invention, long magnetic sensor chip 400 can be integrated type structure (as shown in Figure 7), namely by two mutual independences and there is long magnetic susceptibility unit 402a and the 402b of GMR in contrary pinning direction and be made up of three electrodes 404, it is connected with an electrode respectively in one end of the long magnetic susceptibility unit of each GMR, its other end and a common electrode are connected, so constitute a favour stone half-bridge circuit, when being made up of long Magnetic Sensor as shown in Figure 2 the long magnetic sensor chip of this structure, its three electrodes are connected with three root bead pins of long Magnetic Sensor respectively, when detecting for currency examination, printing magnetic code on banknote or the low-intensity magnetic field on the metal wire magnetic induction window W by long Magnetic Sensor, the favour stone half-bridge circuit in the long magnetic susceptibility unit of GMR is made to produce difference output, this difference output is proportional to the printing magnetic code on banknote or the low field strength on metal wire, owing to banknote quickly streaks from the magnetic induction window of long Magnetic Sensor, the difference output that favour stone half-bridge circuit in GMR long magnetic susceptibility unit produces will appear from multi-form impulse wave, according to this impulse wave, may determine that the true and false of banknote.
In one embodiment of the invention, as shown in Figure 8, long magnetic sensor chip 400 can also be by least two independence mutually and have GMR long magnetic susceptibility unit 402a and the 402b in contrary pinning direction and with end to end second electrode of each independent magnetic sensitive film to 404a, 404b, 404c, 404d and described second electrode between and the described every section of independent magnetic sensitive film that is laid in outside and/or inner side the first electrode of being connected with described every section of magnetic sensitive film to 403a, 403b, 403c, 403d, 403e, 403f, 403g, 403h is constituted, owing to the second electrode is to 404a, 404b, 404c, 404d and the first electrode 403a, 403b, 403c, 403d, 403e, 403f, 403g, 403h respectively with two mutual independences and there is long magnetic susceptibility unit 402a and 402b of the GMR in contrary pinning direction connect, in actual application, engineering staff is easy to as required, unrestricted choice combination connect and compose favour stone half-bridge and/or favour stone full-bridge circuit, currency examination detection is carried out with the long Magnetic Sensor that this is constituted as shown in Figure 2. on the other hand, as required, engineering staff is also easy to unrestricted choice combination and connects wherein partial electrode and constitute favour stone half-bridge and/or favour stone full-bridge circuit and do true and false detection as one section of output a part of feature to banknote, and another part does true and false detection as another section of output another part feature to banknote.
In one embodiment of the invention, GMR magnetic sensitive film is long magnetic sensitive film or multistage is seamless and/or the short magnetic sensitive film of seamed connection. Wherein, the length of every segment length's magnetic sensitive film at least respectively 3mm. It is understood that it can also be other numerical value that length 3mm is only in the length of the short magnetic sensitive film of the purpose of example, long magnetic sensitive film or multistage seamless link and/or seamed connection.
In yet another embodiment of the present invention, long magnetic sensor chip 400 includes the series connection of multistage magnetic sensor unit and/or is formed in parallel. Wherein, every section of magnetic sensor unit includes: at least two sections of GMR magnetic sensitive films, the first electrode to the second electrode pair. Wherein, GMR magnetic sensitive film is parallel to each other and independence separated from each other, second electrode pair joins end to end with each independent magnetic sensitive film, the first electrode be pointed to the second electrode between and the every section of independent magnetic sensitive film that is laid in inside and/or outside being connected with every section of magnetic sensitive film.
In an example of the present invention, magnetic sensitive film is continuously continuous magnetic sensitive film or discontinuous discontinuity magnetic sensitive film. Wherein, magnetic sensitive film is electrically connected by the conductive layer that the different modes such as deposition, plated film, sputtering are formed and is formed.
The long Magnetic Sensor of the embodiment of the present invention is by adopting some electrodes pair at GMR magnetic sensitive film and be laid in GMR magnetic sensitive film both sides and two ends, by selectivity electrically connect by some electrodes of GMR magnetic sensitive film both sides and two ends and doing separate unit segmentation use. Thus simplifying the long magnetic structure from formula Magnetic Sensor, reducing production cost, having volume little, thickness is thin, sensitivity high, meets modern society's microminiaturization to Magnetic Sensor, integrated, many demands for development such as low-power consumption and high-performance.
The manufacture method of long Magnetic Sensor according to embodiments of the present invention is described below with reference to Fig. 9 to Figure 12.
As it is shown in figure 9, the manufacture method of the long Magnetic Sensor of one of embodiment of the present invention, comprise the steps:
Step S101: the short GMR magnetic sensitive film that at least two sections parallel to each other and separated from each other is deposited on matrix.
Step S102: lay electrode pair at the two ends of short GMR magnetic sensitive film, and electrode pair is electrically connected to form multiple short GMR magnetic susceptibility unit with short GMR magnetic sensitive film.
Step S103: adopt end to end form to carry out seamless and/or seamed connection to form long Magnetic Sensor multiple short GMR magnetic susceptibility unit.
Multiple short GMR magnetic susceptibility unit arranged parallel, adjacent short GMR magnetic susceptibility unit includes a GMR magnetic susceptibility unit and the 2nd GMR magnetic susceptibility unit is adjacent. In the seamless of adjacent short GMR magnetic susceptibility unit and/or seamed junction, the head end in the vertical direction of the tail end of the magnetic susceptibility film of the oneth GMR magnetic susceptibility unit and the magnetic susceptibility film of the 2nd GMR magnetic susceptibility unit is located along the same line or keeps certain interval, wherein, a GMR magnetic susceptibility unit and the 2nd GMR magnetic susceptibility unit are adjacent. .
Below with reference to the seamless of Figure 10 to Figure 12 multiple long Magnetic Sensor being shown respectively in the embodiment of the present invention and/or seamed connected mode.
Multistage short GMR magnetic susceptibility unit in the embodiment of the present invention that Figure 10 illustrates adopts the seamless of the head and the tail cascade form of homonymy and/or seamed connection. every section short GMR magnetic susceptibility unit all includes GMR magnetic sensitive film 402a and 402b. by at least two sections or above short GMR magnetic susceptibility unit 910, 920, 930 join end to end is welded in parallel on printed substrate, the second side-to-side anastomosis making the first side of second segment short GMR magnetic susceptibility unit 920 head end and the tail end of first paragraph short GMR magnetic susceptibility unit 910 carries out seamed or seamless link, the second side-to-side anastomosis making the first side of the 3rd section short GMR magnetic susceptibility unit 930 head end and the tail end of second segment short GMR magnetic susceptibility unit 920 carries out seamed or seamless link, and make the tail end of magnetic susceptibility film of first paragraph short GMR magnetic susceptibility unit 910 be located along the same line with the head end in the vertical direction of the magnetic susceptibility film of the short GMR magnetic susceptibility unit 920 of second segment or keep certain interval, the head end in the vertical direction making the tail end of the magnetic susceptibility film of second segment short GMR magnetic susceptibility unit 910 and the magnetic susceptibility film of the 3rd section short GMR magnetic susceptibility unit 920 is located along the same line or keeps certain interval. the like, it is to be understood that the connected mode of other short GMR magnetic susceptibility unit is similar above-mentioned, does not repeat them here.
Multiple short GMR magnetic susceptibility unit in the embodiment of the present invention that Figure 11 illustrates adopts the seamless of the jump form composition of staggered head and the tail cascade or seamed connection. Every section short GMR magnetic susceptibility unit all includes GMR magnetic sensitive film 402a and 402b.
Multiple short GMR magnetic susceptibility unit are divided into multiple short GMR magnetic susceptibility unit group. Each short GMR magnetic susceptibility unit group includes: the first short GMR magnetic susceptibility unit 1102 and the second short GMR magnetic susceptibility unit 1103. Wherein, first side of the head end of the first short GMR magnetic susceptibility unit 1102 is seamless with the second side of the tail end of the short GMR magnetic susceptibility unit 1101 of previous group or seamed is connected, and the first side of the tail end of the first short GMR magnetic susceptibility unit 1102 is seamless with the second side of the head end of the second short GMR magnetic susceptibility unit 1103 with group or seamed is connected. Further, the head end of the magnetic susceptibility film of the first short GMR magnetic susceptibility unit 1102 is located along the same line with the tail end in the vertical direction of the magnetic susceptibility film of the short GMR magnetic susceptibility unit 1101 of previous group or keeps certain interval. The head end in the vertical direction of the tail end of the first short GMR magnetic susceptibility unit 1102 magnetic susceptibility film and the second short GMR magnetic susceptibility unit 1103 magnetic susceptibility film of same group is located along the same line or keeps certain interval. It is understood that the connected mode of other short GMR magnetic susceptibility unit is similar above-mentioned, do not repeat them here.
The another embodiment of the present invention that Figure 12 illustrates, multiple short GMR magnetic susceptibility unit can also adopt Figure 10 and Figure 11 mode combined to carry out seamless or seamed connection to form long Magnetic Sensor, and every section short GMR magnetic susceptibility unit all includes GMR magnetic sensitive film 402a and 402b. Long Magnetic Sensor includes many group leaders magnetic sensor unit. For two groups, long Magnetic Sensor includes the first group leader's magnetic sensor unit 1201 and second group leader's magnetic sensor unit 1202. Every group leader's magnetic sensor unit includes multiple short GMR magnetic susceptibility unit, for instance 3 short GMR magnetic susceptibility unit A, B and C in Figure 12. Wherein, the multiple short GMR magnetic susceptibility unit often organized adopts the mode in Figure 10 to carry out seamless or seamed connection, adopts the mode of Figure 11 to carry out seamless or seamed connection between adjacent every group leader's magnetic sensor unit.
It is understood that the seamless or seamed connected mode of the short magnetic sensor unit of above-mentioned multistage is only in the purpose of example, rather than in order to limit the present invention. The short magnetic sensor unit of multistage can also adopt other connected modes to form long Magnetic Sensor, does not repeat them here.
The manufacture method of long Magnetic Sensor according to embodiments of the present invention, by adopting some electrodes pair of GMR magnetic sensitive film and be laid in GMR magnetic sensitive film both sides and two ends, use by selectivity being electrically connected by some electrodes of GMR magnetic sensitive film both sides and two ends and doing separate unit segmentation, manufacture long Magnetic Sensor, manufacture method is simple and meets modern society's microminiaturization to Magnetic Sensor, integrated, many demands for development such as low-power consumption and high-performance.
In the description of this specification, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example describe are contained at least one embodiment or the example of the present invention. In this manual, the schematic representation of above-mentioned term is not necessarily referring to identical embodiment or example. And, the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.
Although above it has been shown and described that embodiments of the invention, it is understandable that, above-described embodiment is illustrative of, being not considered as limiting the invention, above-described embodiment can be changed when without departing from principles of the invention and objective, revises, replace and modification by those of ordinary skill in the art within the scope of the invention.
Claims (19)
1. there is a long Magnetic Sensor for power of test on a large scale, including:
Shell;
Long magnetic sensor chip, described long magnetic sensor chip is positioned at described shell, and wherein, described long magnetic sensor chip is GMR effect magnet-sensitive element, and wherein, described GMR effect magnet-sensitive element includes:
Matrix;
GMR magnetic sensitive film at least two sections parallel to each other and separated from each other, described GMR magnetic sensitive film deposits on the matrix;
First group of electrode pair, described first group of electrode is to the overall outside of at least two sections of GMR magnetic sensitive films described in being laid in;
Second group of electrode pair, the described second group of electrode two ends to the described GMR magnetic sensitive film that is laid in, wherein said first group of electrode pair and described second group of electrode are to being independently electrically connected with described GMR magnetic sensitive film;
Electrical connection component, described electrical connection component is positioned at described enclosure, and is connected with described long magnetic sensing chip; And
Line support body, described line support body is positioned at described enclosure and sheathed with described electrical connection component is connected, and is used for supporting described long magnetic sensing chip and described electrical connection component.
2. long Magnetic Sensor according to claim 1, it is characterized in that, described long magnetic sensor chip also includes anisotropic magneto-resistive effect AMR magnet-sensitive element, tunnel magneto effect TMR magnet-sensitive element, Hall effect HALL magnet-sensitive element, giant magnetoresistance effect GMI magnet-sensitive element and giant Hall effect GHE magnet-sensitive element.
3. long Magnetic Sensor according to claim 1, it is characterized in that, described GMR magnetic sensitive film include at least two have the long magnetic susceptibility unit of GMR in contrary pinning direction, described GMR long magnetic susceptibility unit and described first group of electrode to and/or second group of electrode to forming Wheatstone bridge.
4. long Magnetic Sensor according to claim 1 and 2, it is characterised in that described GMR magnetic sensitive film is long magnetic sensitive film, or be the short magnetic sensitive film of multistage seamless link or seamed connection.
5. long Magnetic Sensor as claimed in claim 4, it is characterised in that the length of every segment length's magnetic sensitive film is at least respectively greater than 3mm, or the total length of short magnetic sensitive film seamless link or seamed connection described in multistage is at least above 3mm.
6. long Magnetic Sensor according to claim 1, it is characterised in that described long magnetic sensor chip includes multistage magnetic sensor unit serial or parallel connection and forms, and every section of magnetic sensor unit includes:
At least two sections of GMR magnetic sensitive films, wherein said GMR magnetic sensitive film is parallel to each other and independence separated from each other;
First electrode pair, described first electrode is to the inner side of the every section of independent GMR magnetic sensitive film that is laid in and/or outside and is connected with every section of GMR magnetic sensitive film;
Second electrode pair, described second electrode pair joins end to end with each independent GMR magnetic sensitive film; Wherein, described first electrode be pointed to described second electrode between.
7. long Magnetic Sensor according to claim 1, it is characterized in that, described GMR magnetic sensitive film is continuously continuous magnetic sensitive film or discontinuous discontinuity magnetic sensitive film, wherein, described continuous continuous magnetic sensitive film or discontinuous discontinuity magnetic sensitive film are electrically connected by the conductive layer that deposition, plated film, sputtering mode are formed and are formed.
8. long Magnetic Sensor according to claim 1, it is characterized in that, also include noise shielding device, described noise shielding device includes at least one can form the depression in magnetic vacuum region that integrated magnetic field is zero or weak integrated magnetic field, and wherein said long magnetic sensor chip is assembled in the depression in described magnetic vacuum region.
9. long Magnetic Sensor according to claim 8, it is characterised in that described electrical connection component includes:
Printed circuit board (PCB), is used for supporting described noise shielding device and described long magnetic sensor chip, and is electrically connected with described long magnetic sensor chip by jumper;
Many root beads pin, for electrically conducting by described printed circuit board (PCB) and described long magnetic sensor chip.
10. long Magnetic Sensor according to claim 9, it is characterized in that, described many root beads pin includes four root bead pins, described four root bead pins are connected with described printed circuit board (PCB) and described shell, wherein, three root bead pins are by printed circuit board (PCB) and described long magnetic sensor chip electric connection, and a root bead pin is by printed circuit board (PCB) and described shell electric connection.
11. long Magnetic Sensor according to claim 1, it is characterized in that, the top of described shell include at least one introducing face, at least one contact induction face and at least one trail face, wherein, described contact induction face includes at least one sensing window, and the length direction of described sensing window is consistent with the length direction of described long magnetic sensor chip.
12. long Magnetic Sensor according to claim 11, it is characterised in that the introducing face length degree of described housing top end is more than or equal to the described length trailing face.
13. the long Magnetic Sensor according to claim 1 or 10, it is characterized in that, described shell is permalloy material, Ferrite Material, silicon steel sheet material, the coating of the additional ferronickel of metal material or permalloy or the coating of the additional ferronickel of nonmetallic materials or permalloy.
14. long Magnetic Sensor according to claim 11, it is characterised in that described introducing face, trail face and contact induction face is planar structure or arcuate structure.
15. long Magnetic Sensor according to claim 9, it is characterized in that, described line support body has a bar shape structure, it is engaged and is arranged in described shell, described line support body includes top and tail end, and wherein, the centre position on described top is provided with depression to hold described printed circuit board (PCB), outside includes the side of the shape identical with described shell introducing face on one side, and the side including trailing with shell the identical shape in face outside another side coordinates with the top with shell.
16. long Magnetic Sensor according to claim 15, it is characterised in that described line support body has a bar shape structure, its internal vertical direction also includes four through holes, described through hole and described printed circuit board (PCB) and capillary Matching installation between top and tail end.
17. the manufacture method of a long Magnetic Sensor, it is characterised in that comprise the steps:
The short GMR magnetic sensitive film that at least two sections parallel to each other and separated from each other is deposited on matrix;
Lay electrode pair at the two ends of described short GMR magnetic sensitive film, and described electrode pair is electrically connected to form multiple short GMR magnetic susceptibility unit with described short GMR magnetic sensitive film;
End to end form is adopted to carry out seamless link or seamed connection to form long Magnetic Sensor multiple described short GMR magnetic susceptibility unit, wherein, the plurality of short GMR magnetic susceptibility unit arranged parallel, and in the seamless link of adjacent described short GMR magnetic susceptibility unit or seamed junction, the tail end of magnetic susceptibility film at front short GMR magnetic susceptibility unit is located along the same line with the head end in the vertical direction of the magnetic susceptibility film at rear short GMR magnetic susceptibility unit or keeps certain interval, wherein, described at front short GMR magnetic susceptibility unit with described adjacent at rear short GMR magnetic susceptibility unit.
18. the manufacture method of long Magnetic Sensor as claimed in claim 17, it is characterised in that the plurality of short GMR magnetic susceptibility unit one of in the following ways carries out seamless link or seamed connection:
First kind of way: the second side of the tail end of short GMR magnetic susceptibility unit described in the first side of the head end of presently described short GMR magnetic susceptibility unit and front, and the first side of the head end of the second side GMR short in described in rear magnetic susceptibility unit of the tail end of described current short GMR magnetic susceptibility unit carries out seamless link or seamed is connected;
The second way: the plurality of short GMR magnetic susceptibility unit is divided into multiple short GMR magnetic susceptibility unit group, wherein, each described short GMR magnetic susceptibility unit group includes: the first short GMR magnetic susceptibility unit and the second short GMR magnetic susceptibility unit, wherein, first side of the head end of described first short GMR magnetic susceptibility unit and the second side seamless link of the tail end of the described short GMR magnetic susceptibility unit of previous group or seamed be connected, second side seamless link of the first side of the tail end of described first short GMR magnetic susceptibility unit and the head end of the described second short GMR magnetic susceptibility unit with group or seamed be connected.
19. the manufacture method of described long Magnetic Sensor as claimed in claim 18, it is characterized in that, the plurality of short GMR magnetic susceptibility unit can also adopt the mode that described first kind of way and the described second way combine to carry out seamless link or seamed connection to form described long Magnetic Sensor, wherein, described long Magnetic Sensor includes many group leaders magnetic sensor unit, often organize described long magnetic sensor unit and include multiple short GMR magnetic susceptibility unit, the plurality of short GMR magnetic susceptibility unit adopts described first kind of way to carry out seamless link or seamed connection, the described second way is adopted to carry out seamless link or seamed connection between adjacent described many group leaders magnetic sensor unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210219386.6A CN103512588B (en) | 2012-06-29 | 2012-06-29 | Long Magnetic Sensor and manufacture method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210219386.6A CN103512588B (en) | 2012-06-29 | 2012-06-29 | Long Magnetic Sensor and manufacture method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103512588A CN103512588A (en) | 2014-01-15 |
| CN103512588B true CN103512588B (en) | 2016-06-08 |
Family
ID=49895690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210219386.6A Expired - Fee Related CN103512588B (en) | 2012-06-29 | 2012-06-29 | Long Magnetic Sensor and manufacture method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103512588B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104793152B (en) * | 2014-01-16 | 2019-02-15 | 北京嘉岳同乐极电子有限公司 | A kind of highly sensitive chip sensor |
| WO2015113184A1 (en) * | 2014-01-29 | 2015-08-06 | 北京嘉岳同乐极电子有限公司 | High sensitivity magnetic sensor and manufacturing method thereof |
| CN104915614B (en) * | 2014-03-10 | 2019-03-19 | 北京嘉岳同乐极电子有限公司 | Magnetic head and card reader |
| CN107993333A (en) * | 2017-12-12 | 2018-05-04 | 威海华菱光电股份有限公司 | Magnetic image sensor |
| CN209978932U (en) * | 2019-10-18 | 2020-01-21 | 昆山航磁微电子科技有限公司 | Micro-nano satellite GMI sensor |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0390405A1 (en) * | 1989-03-24 | 1990-10-03 | Murata Manufacturing Co., Ltd. | Magnetic sensor unit |
| CN2572490Y (en) * | 2002-10-17 | 2003-09-10 | 深圳粤宝电子工业总公司 | All compatible detection magnet head with very long seam |
| CN2748986Y (en) * | 2004-10-24 | 2005-12-28 | 赵嘉枢 | Magnetic head of cash inspecting machine |
| CN2788259Y (en) * | 2005-04-15 | 2006-06-14 | 福建省电影机械厂 | Huge magnetic resistance sensor of paper money counter |
| CN1922504A (en) * | 2004-02-27 | 2007-02-28 | 株式会社村田制作所 | Prolonged magnetic sensor |
| CN201359736Y (en) * | 2009-02-25 | 2009-12-09 | 深圳粤宝电子工业总公司 | Full compatible multi-path magnetic circuit magnetic detection head |
| CN201804366U (en) * | 2010-10-11 | 2011-04-20 | 深圳粤宝电子工业总公司 | Magnetic sensor |
| CN202205263U (en) * | 2011-09-23 | 2012-04-25 | 深圳粤宝电子工业总公司 | Micro magnetic head |
| CN102435961A (en) * | 2010-09-28 | 2012-05-02 | 株式会社村田制作所 | Long-type magnetic sensor |
-
2012
- 2012-06-29 CN CN201210219386.6A patent/CN103512588B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0390405A1 (en) * | 1989-03-24 | 1990-10-03 | Murata Manufacturing Co., Ltd. | Magnetic sensor unit |
| CN2572490Y (en) * | 2002-10-17 | 2003-09-10 | 深圳粤宝电子工业总公司 | All compatible detection magnet head with very long seam |
| CN1922504A (en) * | 2004-02-27 | 2007-02-28 | 株式会社村田制作所 | Prolonged magnetic sensor |
| CN2748986Y (en) * | 2004-10-24 | 2005-12-28 | 赵嘉枢 | Magnetic head of cash inspecting machine |
| CN2788259Y (en) * | 2005-04-15 | 2006-06-14 | 福建省电影机械厂 | Huge magnetic resistance sensor of paper money counter |
| CN201359736Y (en) * | 2009-02-25 | 2009-12-09 | 深圳粤宝电子工业总公司 | Full compatible multi-path magnetic circuit magnetic detection head |
| CN102435961A (en) * | 2010-09-28 | 2012-05-02 | 株式会社村田制作所 | Long-type magnetic sensor |
| CN201804366U (en) * | 2010-10-11 | 2011-04-20 | 深圳粤宝电子工业总公司 | Magnetic sensor |
| CN202205263U (en) * | 2011-09-23 | 2012-04-25 | 深圳粤宝电子工业总公司 | Micro magnetic head |
Non-Patent Citations (1)
| Title |
|---|
| 巨磁阻生物传感器对磁性聚苯乙烯微球检测;侯涛等;《北京科技大学学报》;20120331;第34卷(第3期);第329-332页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103512588A (en) | 2014-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103512588B (en) | Long Magnetic Sensor and manufacture method | |
| JP4105147B2 (en) | Current sensor | |
| JP5297539B2 (en) | Magnetic sensor | |
| US9400315B2 (en) | Current sensor | |
| CN103323795B (en) | Integrated three-axis magnetic sensor | |
| EP2664940B1 (en) | Magnetic sensor | |
| JP2006125962A (en) | Current sensor | |
| CN108780131B (en) | Balanced magnetic field detection device | |
| US20160238670A1 (en) | Magnetic sensor | |
| CN103645369A (en) | Current sensing apparatus | |
| EP3441779A1 (en) | Anisotropic magnetoresistance (amr) sensor not requiring set/reset device | |
| CN103116144A (en) | Z-direction magnetic field sensor with magnetic orbit structure | |
| CN103576101A (en) | Multi-channel integrated type magnetic sensor | |
| JP2016517952A (en) | Magnetic sensing device, magnetic induction method and manufacturing process thereof | |
| CN107290584A (en) | A kind of current sensor | |
| CN105136349A (en) | Magnetic pressure sensor | |
| WO2020258350A1 (en) | Sensor and electronic device | |
| CN103530930A (en) | Financial authenticity-identification magnetic sensor and manufacturing method thereof and financial authenticity-identification machine | |
| CN103544764B (en) | A kind of sensor for identifying magnetic medium | |
| CN103839320A (en) | Magnetic sensor used for financial counterfeit detection machine and manufacturing method thereof | |
| CN103632431B (en) | magnetic image sensor and false distinguishing method | |
| JP6566965B2 (en) | Low flying height in-plane magnetic image sensor chip | |
| CN103617669B (en) | A kind of Coin detection device | |
| CN104167043A (en) | Chip-type weak magnetic detection sensor | |
| JP6185298B2 (en) | Magnetic sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 Termination date: 20200629 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |