CN109539998A - A kind of nanometer gap measuring device and method based on light-intensity test - Google Patents
A kind of nanometer gap measuring device and method based on light-intensity test Download PDFInfo
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- CN109539998A CN109539998A CN201811477642.5A CN201811477642A CN109539998A CN 109539998 A CN109539998 A CN 109539998A CN 201811477642 A CN201811477642 A CN 201811477642A CN 109539998 A CN109539998 A CN 109539998A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The application discloses a kind of nanometer gap measuring device based on light-intensity test, including resonant cavity type light intensity test device, the resonant cavity type light intensity test device includes spr sensor, the spr sensor is made of five-layer structure, successively distribution is fixed in order by respectively BK7 glassy layer A, layer of titanium metal, metal layer gold, nanometer spacing layer to be measured and BK7 glassy layer B, the BK7 glassy layer A, layer of titanium metal, metal layer gold, nanometer spacing layer to be measured and BK7 glassy layer B；By the two sides of the BK7 glassy layer A be divided into AB while and when AC, the BK7 glassy layer A AB while and when AC on be coated with optical reflectance coating, and wherein the optical reflectance coating on the side AB is high reflection film, and the optical reflectance coating on the side AC is part reflective semitransparent film.The application can be realized the high-precision detection of the small absolute spacing within 200nm based on the resonant cavity type light intensity test device of 5 layers of SPR structure, can be used in surface plasma photoetching technology, be alternatively arranged as the supplement of near field high-precision optical detection technique.
Description
Technical field
The present disclosure relates generally to nanometer detection fields, and in particular to a kind of nanometer gap measuring device based on light-intensity test
And method.
Background technique
There are strict requirements to the alignment precision between plane in modern lithographic technologies, alignment precision is directly related to photoetching
The precision of technology.A series of planar alignment technologies to grow up thus, if technique of alignment is imaged in geometry, zone plate is directed at skill
Art, interference strength technique of alignment, difference interference technique of alignment and Moire fringe technique of alignment etc..Its alignment precision can achieve
Dozens to a few hundred nanometers, can satisfy substantially in present various photoetching techniques to alignment request.In order to obtain smaller photoetching ruler
It is very little, higher adaptation is proposed to planar alignment system based on the Next Generation Lithography that surface plasmon technology grows up
It is required that.Since surface plasma wave exists only in body surface, to realize photoetching function with it, then interplanar spacing is required
It is less than 200nm, this requires us can be realized the alignment detection of the absolute spacing of the plane within 200nm.So small
In absolute spacing, traditional lithography alignment system encounters unsurmountable difficulty, and first, absolute spacing is less than the half of incident beam
A wavelength causes interference field internal interference striped to become invisible；Second, in so small range light intensity and phase change compared with
It is small, since external environmental interference is not easy to detect.Therefore, it is proposed that a kind of nanometer spacing high-precision based on SPR effect is examined
Survey method, can be realized the detection of the absolute spacing within 200nm, and detection accuracy is better than 1nm.
Summary of the invention
In view of drawbacks described above in the prior art or deficiency, it is intended to provide a kind of nanometer distance measurement based on light-intensity test
Device and method.
According to technical solution provided by the embodiments of the present application, a kind of nanometer gap measuring device based on light-intensity test, packet
Include resonant cavity type light intensity test device, the resonant cavity type light intensity test device includes spr sensor, the spr sensor by
Five-layer structure composition, first layer to layer 5 is respectively BK7 glassy layer A, layer of titanium metal, metal layer gold, nanometer spacing layer to be measured
With BK7 glassy layer B, the BK7 glassy layer A, layer of titanium metal, metal layer gold, nanometer spacing layer to be measured and BK7 glassy layer B are successively
Distribution is fixed in order；By the two sides of the BK7 glassy layer A be divided into AB while and when AC, on the side AB of the BK7 glassy layer A
With optical reflectance coating is coated on the side AC, and wherein the optical reflectance coating on the side AB is high reflection film, the optical reflection on the side AC
Film is part reflective semitransparent film.
In the present invention, the BK7 glassy layer A is prism structures, and its base angle angle is 43.85 °；The BK7 glass
Layer B is plate glass.
In the present invention, the layer of titanium metal with a thickness of 2.5nm；The metal layer gold with a thickness of 44.3-44.7nm；Institute
The height for surveying nanometer spacing layer is stated less than 200nm.
A kind of nanometer measurement method for distance based on light-intensity test,
1), the base angle of BK7 glassy layer A (1) is set as the resonance angle of the present apparatus, and incident beam meets resonance condition, meeting
Surface plasma wave is inspired in layer gold；TM Mode for Laser beam impinges perpendicularly on the side AB of the BK7 glassy layer A (1)；
2), outgoing beam is incident on the side AC with vertical angle, and optics reflecting film, part light intensity are coated on the face AC
Outgoing, backtracking after part light intensity is reflected；
3) after, the light intensity of backtracking again passes by 5 layers of structure, still generate surface plasmon resonance effect, the side AB and
The side AC forms an optical resonator, and outgoing beam intensity is multi-light beam coherent superimposed result.
4), output intensity is the monotropic function of nanometer spacing d, measures light intensity value in an experiment, then passes through inverting meter
Calculate the value that can be obtained by nanometer spacing.
In conclusion the application can be realized within 200nm based on the resonant cavity type light intensity test device of 5 layers of SPR structure
Small absolute spacing high-precision detection, can be used in surface plasma photoetching technology in, be alternatively arranged as near field high-precision
The supplement of optical detective technology.
Detailed description of the invention
By reading a detailed description of non-restrictive embodiments in the light of the attached drawings below, the application's is other
Feature, objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of resonant cavity type light intensity test device in the present invention；
Fig. 2 is instrumentation plan of the invention；
Fig. 3 is reflectivity with nanometer function of pitch relationship.
Figure label: 1.BK7 glassy layer A, 2. layer of titanium metal, 3. metal layer gold, 4. to be measured nanometers of spacing layers, 5.BK7 glass
Glass layer.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that in order to
Convenient for description, part relevant to invention is illustrated only in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
Referring to FIG. 1, nanometer gap measuring device of the kind based on light-intensity test, including resonant cavity type light intensity test device,
The resonant cavity type light intensity test device includes spr sensor, and the spr sensor is made of five-layer structure, first layer to
Five layers are respectively BK7 glassy layer A1, layer of titanium metal 2, metal layer gold 3, nanometer spacing layer 4 to be measured and BK7 glassy layer B5, described
Successively distribution is solid in order by BK7 glassy layer A1, layer of titanium metal 2, metal layer gold 2, nanometer spacing layer 4 to be measured and BK7 glassy layer B5
It is fixed；By the two sides of the BK7 glassy layer A1 be divided into AB while and when AC, the BK7 glassy layer A1 AB while and when AC on plate
There is optical reflectance coating, and wherein the optical reflectance coating on the side AB is high reflection film, the optical reflectance coating on the side AC is half anti-half
Permeable membrane.The BK7 glassy layer A1 is prism structures, and its base angle angle is 43.85 °；The BK7 glassy layer B5 is plate glass
Glass.The layer of titanium metal 2 with a thickness of 2.5nm；The metal layer gold 3 with a thickness of 44.3-44.7nm；The survey nanometer spacing
The height of layer 4 is less than 200nm.
As shown in Fig. 2, a kind of nanometer measurement method for distance based on light-intensity test,
1), the base angle of BK7 glassy layer A1 is set as the resonance angle of the present apparatus, and incident beam meets resonance condition, and meeting exists
Surface plasma wave is inspired in layer gold；TM Mode for Laser beam impinges perpendicularly on the side AB of the BK7 glassy layer A1；
2), outgoing beam is incident on the side AC with vertical angle, and optics reflecting film, part light intensity are coated on the face AC
Outgoing, backtracking after part light intensity is reflected；
3) after, the light intensity of backtracking again passes by 5 layers of structure, still generate surface plasmon resonance effect, the side AB and
The side AC forms an optical resonator, and outgoing beam intensity is multi-light beam coherent superimposed result.
4), output intensity is the monotropic function of nanometer spacing d, measures light intensity value in an experiment, then passes through inverting meter
Calculation obtains the value of nanometer spacing.
Such as Fig. 2, TM Mode for Laser beam is impinged perpendicularly on the side AB of BK7 glassy layer A1, and the base angle of prism is set as this
The resonance angle of device, incident beam meet resonance condition, can inspire surface plasma wave in layer gold, outgoing beam with
Vertical angle is incident on the face AC, and plating is by optics reflecting film on the face AC, and the outgoing of part light intensity, part light intensity is by the reflection road Hou Yuan
Return, after again passing by 5 layers of structure, still generate surface plasmon resonance effect, AB while and when AC form an optical resonance
Chamber, outgoing beam intensity are multi-light beam coherent superimposed as a result, it is possible to effectively improve output intensity to air film thickness change
Sensitivity.The variation of its light intensity is described by following equations:
R is the reflection coefficient of 5 layers of structure SPR, is the function of air layer thickness d3 after 5 layers of structure formation；rspr
It is its mould,It is its phase, is both a nanometer function of spacing d3, and near resonance angle, reflection R pair
The change in elevation of d3 is sensitive, and as a result simulation is as shown in Figure 3:
When incident beam reflects repeatedly in resonant cavity, outgoing beam can be stated are as follows:
U0=A0tRt'eiφ
U1=U0R2r2ei2φ
...
Un=Un-1R2r2ei2φ
Wherein A is the wave function of incident beam, and t and t ' are respectively light from air incidence to glass, and incident from glass
Transmission coefficient into air；R be light by glass to air when reflection coefficient；UnFor the wave function of n-th outgoing beam, φ
It is the phase change amount as caused by light path.
Then total outgoing beam is
Total output intensity
Output intensity is the monotropic function of nanometer spacing d, we only need to measure light intensity value in an experiment, then pass through
Inversion Calculation can be obtained by the value of nanometer spacing, since spr sensor is quick to the change in elevation of d parameter near resonance angle
Sense, then its sensitivity is improved by optical resonator, the high-precision detection of nanometer spacing may be implemented.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic
Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature
Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein
Can technical characteristic replaced mutually and the technical solution that is formed.
Claims (4)
1. a kind of nanometer gap measuring device based on light-intensity test, it is characterized in that: including resonant cavity type light intensity test device, institute
Stating resonant cavity type light intensity test device includes spr sensor, and the spr sensor is made of five-layer structure, first layer to the 5th
Layer is respectively BK7 glassy layer A (1), layer of titanium metal (2), metal layer gold (3), nanometer spacing layer (4) to be measured and BK7 glassy layer B
(5), the BK7 glassy layer A (1), layer of titanium metal (2), metal layer gold (3), nanometer spacing layer (4) to be measured and BK7 glassy layer B
(5) successively distribution is fixed in order；By the two sides of the BK7 glassy layer A (1) be divided into AB while and when AC, in the BK7 glass
The AB of layer A (1) while and when AC on be coated with optical reflectance coating, and wherein the optical reflectance coating on the side AB is high reflection film, the side AC
On optical reflectance coating be part reflective semitransparent film.
2. a kind of nanometer gap measuring device based on light-intensity test according to claim 1, it is characterized in that: the BK7
Glassy layer A (1) is prism structures, and its base angle angle is 43.85 °；The BK7 glassy layer B (5) is plate glass.
3. a kind of nanometer gap measuring device based on light-intensity test according to claim 1, it is characterized in that: the metal
Titanium layer (2) with a thickness of 2.5nm；The metal layer gold (3) with a thickness of 44.3-44.7nm；Survey nanometer spacing layer (4)
Height is less than 200nm.
4. a kind of nanometer measurement method for distance based on light-intensity test, it is characterized in that:
1), the base angle of BK7 glassy layer A (1) is set as the resonance angle of the present apparatus, and incident beam meets resonance condition, can be in gold
Surface plasma wave is inspired in layer；TM Mode for Laser beam impinges perpendicularly on the side AB of the BK7 glassy layer A (1)；
2), outgoing beam is incident on the side AC with vertical angle, and optics reflecting film is coated on the face AC, and part light intensity goes out
It penetrates, backtracking after part light intensity is reflected；
3) after, the light intensity of backtracking again passes by 5 layers of structure, still generate surface plasmon resonance effect, AB while and when AC
An optical resonator is formed, outgoing beam intensity is multi-light beam coherent superimposed result.
4), output intensity is the monotropic function of nanometer spacing d, measures light intensity value in an experiment, is then obtained by Inversion Calculation
To the value of nanometer spacing.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113532281A (en) * | 2021-06-16 | 2021-10-22 | 南京信息职业技术学院 | Micro displacement detection sensor, device and method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286632A (en) * | 2001-03-23 | 2002-10-03 | Japan Science & Technology Corp | Method for optically evaluating sample to be measured and device therefor |
| CN2847217Y (en) * | 2005-12-07 | 2006-12-13 | 上海师范大学 | Multiple beam surface plasma resonant spectrum instrument |
| CN101294900A (en) * | 2008-05-27 | 2008-10-29 | 杭州电子科技大学 | High-fineness cavity surface plasma resonance sensing equipment |
| CN106091953A (en) * | 2016-07-19 | 2016-11-09 | 天津大学 | A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness |
| CN107917672A (en) * | 2018-01-05 | 2018-04-17 | 中国计量大学 | A kind of test method for being used to improve super thin metal films test sensitivity |
| CN108692664A (en) * | 2017-04-10 | 2018-10-23 | 青岛谱尼测试有限公司 | A kind of test method of thickness of coating |
-
2018
- 2018-12-05 CN CN201811477642.5A patent/CN109539998A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286632A (en) * | 2001-03-23 | 2002-10-03 | Japan Science & Technology Corp | Method for optically evaluating sample to be measured and device therefor |
| CN2847217Y (en) * | 2005-12-07 | 2006-12-13 | 上海师范大学 | Multiple beam surface plasma resonant spectrum instrument |
| CN101294900A (en) * | 2008-05-27 | 2008-10-29 | 杭州电子科技大学 | High-fineness cavity surface plasma resonance sensing equipment |
| CN106091953A (en) * | 2016-07-19 | 2016-11-09 | 天津大学 | A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness |
| CN108692664A (en) * | 2017-04-10 | 2018-10-23 | 青岛谱尼测试有限公司 | A kind of test method of thickness of coating |
| CN107917672A (en) * | 2018-01-05 | 2018-04-17 | 中国计量大学 | A kind of test method for being used to improve super thin metal films test sensitivity |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113532281A (en) * | 2021-06-16 | 2021-10-22 | 南京信息职业技术学院 | Micro displacement detection sensor, device and method |
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Application publication date: 20190329 |