CN204535729U - A kind of sensor based on laser instrument - Google Patents
A kind of sensor based on laser instrument Download PDFInfo
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- CN204535729U CN204535729U CN201520098974.8U CN201520098974U CN204535729U CN 204535729 U CN204535729 U CN 204535729U CN 201520098974 U CN201520098974 U CN 201520098974U CN 204535729 U CN204535729 U CN 204535729U
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Abstract
The utility model is applicable to field of sensing technologies, provides a kind of sensor based on laser instrument, comprises pumping source, the first common segment, the second common segment and reference field containing gain media and detection segment; First, second common segment and reference field form the first laserresonator, and first, second common segment and detection segment form the second laserresonator; Detection segment is provided with sensing element, and the second common segment is provided with output unit or reference field and detection segment and is respectively provided with an output unit, and the emitting light path of output unit is provided with polarization state rotary unit and photodetector.The utility model is by the laser generation difference interference of two-way different frequency, by detecting the size of difference on the frequency determination measurand, because laser frequency is very responsive to the change in optical path length of resonator cavity, therefore detection sensitivity and precision higher, and there is the light path of journey altogether in two of this sensor resonator cavitys, antijamming capability is strong, is suitable for the subtle change measuring multiple physical quantity.
Description
Technical field
The utility model belongs to optical sensing technical field, particularly a kind of sensor based on laser instrument.
Background technology
When measuring the subtle change of the physical quantitys such as length, temperature, refractive index, pressure in prior art, usual employing laser phase type interferometric method is measured, optical sensor based on Mach-Zender interferometer is that a kind of common laser phase type interferometric method that utilizes carries out the sensor measured, its principle is that the laser that laser instrument exports is divided into two bundles, enter respectively in the two-arm of interferometer, two-way light converges after different transmission paths again, formed and interfere, detected the phase differential of two-beam by detector, and then determine tested physical quantity.Light path amount due to two arms can be subject to the impact of the external condition such as temperature, pressure, so Mach-Zender interferometer can realize the measurement of the physical quantitys such as strain, temperature, is the important physical basis of many sensors.But the phase differential of what this sensor detected is two bundle laser, its accuracy of detection and sensitivity are still limited, and needing provides a kind of novel high precision, highly sensitive optical sensor.
Utility model content
The purpose of this utility model is to provide a kind of sensor based on laser instrument, is intended to improve measuring accuracy and sensitivity.
The utility model realizes like this, a kind of sensor based on laser instrument, comprise pumping source, the first common segment containing gain media, the second common segment, and be connected to reference field between the first common segment and the second common segment and detection segment side by side by the first polarization spectro unit of the First Line polarized light that can polarization direction is divided into different incident light and the second linearly polarized light and the second polarization spectro unit;
Described first common segment, the second common segment and reference field form the first laserresonator of transmission First Line polarized light, and described first common segment, the second common segment and detection segment form the second laserresonator of transmission second linearly polarized light;
Described detection segment is provided with the sensing element that can cause change in optical path length, described second common segment is provided with an output unit or described reference field and detection segment and is respectively provided with an output unit, described output unit connects conjunction light unit, described conjunction light unit connects photodetector, is also provided with for First Line polarized light and the polarization state of the second linearly polarized light are become consistent polarization state rotary unit between described conjunction light unit and output unit.
As optimal technical scheme of the present utility model:
Described reference field comprises reference optical fiber, and described detection segment comprises detection fiber, and the described sensing element of change in optical path length that can cause is arranged at described detection fiber section, and described reference optical fiber and detection fiber adopt polarization maintaining optical fibre.
Described reference optical fiber and detection fiber are respectively provided with output unit described in, are provided with described polarization state rotary unit in the wherein output light path of output unit described in.
Described first common segment comprises the first common fiber, described first common fiber adopts polarization maintaining optical fibre, described first common fiber is provided with the wavelength division multiplexer be connected with described pumping source, and described gain media is arranged between described wavelength division multiplexer and the first polarization spectro unit.
Described first common segment, the second common segment, reference field and detection segment all adopt free space transmission.
Described output unit is arranged at the end of described second common segment, the 3rd polarization spectro unit of the linearly polarized light that the light that described output unit exports can be divided into polarization direction different is provided with in the emitting light path of described output unit, the transmission path of linearly polarized light is provided with a described polarization state rotary unit wherein, and the First Line polarized light of polarization state respectively with described of the linearly polarized light that this polarization direction is different is identical with the polarization state of the second linearly polarized light.
Described first common segment adopts free space transmission, described first common segment also comprises the dichroic mirror of the outbound course being arranged at described pumping source, described gain media is arranged between described dichroic mirror and the first polarization spectro unit, and the pump light that described pumping source sends enters described first common segment through described dichroic mirror.
Described reference field is provided with delay unit.
Adjustable damping unit is provided with at described reference field and/or detection segment.
Described first common segment or the second common segment are provided with single-frequency acquiring unit, or described reference field and detection segment are respectively provided with a single-frequency acquiring unit.
The sensor that the utility model provides comprises two different laserresonators of polarization state, these two laserresonators share the common segment comprising same gain media, and the sensing element that can cause change in optical path length is set in detection segment, measurand is responded to by sensing element, cause detection segment to transmit laser frequency to change, make two-way lasing frequency poor, by the laser generation difference interference of this two-way different frequency, by detecting the size of difference on the frequency determination measurand, and due to the frequency of laser generation very responsive to the change in optical path length of resonator cavity, therefore the detection sensitivity of this sensor and precision are far above traditional sensor based on phase differential, and there is the light path of journey altogether in two of this sensor resonator cavitys, external environment causes the frequency change of the change of common segment these two laser instruments caused basically identical, therefore detect frequency-splitting and can offset this change, therefore this sensor antijamming capability is strong, be suitable for the subtle change measuring multiple physical quantity.
Accompanying drawing explanation
Fig. 1 is the structural representation () of the sensor based on laser instrument that the utility model first embodiment provides;
Fig. 2 is the structural representation (two) of the sensor based on laser instrument that the utility model first embodiment provides;
Fig. 3 is the structural representation (three) of the sensor based on laser instrument that the utility model first embodiment provides;
Fig. 4 is the structural representation (four) of the sensor based on laser instrument that the utility model first embodiment provides;
Fig. 5 is the structural representation of the sensor based on laser instrument that the utility model second embodiment provides;
Fig. 6 is the structural representation of the sensor based on laser instrument that the utility model the 3rd embodiment provides.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
Below in conjunction with specific embodiment, specific implementation of the present utility model is described in detail:
Please refer to Fig. 1 to Fig. 4, the utility model embodiment provides a kind of sensor based on laser instrument, comprise pumping source 01, be provided with the first common segment 02, second common segment 03 of gain media 021 and the reference field 04 be connected to side by side between the first common segment and the second common segment and detection segment 05, the two ends of reference field 04 and detection segment 05 are connected between the first common segment 02 and the second common segment 03 respectively by the first polarization spectro unit 06 and the second polarization spectro unit 07.The First Line polarized light that incident light can be divided into polarization direction different by the first polarization spectro unit 06 and the second polarization spectro unit 07 and the second linearly polarized light, First Line polarized lights different for polarization direction and the second linearly polarized light can certainly be combined into light beam to export, usually, First Line polarized light is vertical with the polarization direction of the second linearly polarized light.For convenience of description, this First Line polarized light and the second linearly polarized light are designated as S light and P light respectively, certainly do opposite sign and be also fine.The end of this first common segment 02 and the second common segment 03 can arrange the parts such as catoptron or dichroic mirror, as the end mirror of laserresonator, this the first common segment 02, second common segment 03 and reference field 04 form the first laserresonator of transmission First Line polarized light, and the first common segment 02, second common segment 03 and detection segment 05 form the second laserresonator of transmission second linearly polarized light.In detection segment, be provided with the sensing element 051 that can cause change in optical path length, this sensing element 051 is for converting measurand to light path amount, an output unit 08 is provided with in the second common segment 03, or be respectively provided with an output unit 08 at reference field 04 and detection segment 05, the laser of the output of this output unit 08 produces after closing light unit 11 interferes, optical detection device 09 is utilized to detect, in order to realize the interference of two-beam, also polarization state rotary unit 10 is set between optical detection device 09 and output unit 08, for First Line polarized light is become consistent with the polarization state of the second linearly polarized light.
Composition graphs 1, the principle of work of the sensor is: pumping source 021 sends pump light and enters the first common segment 02, and excite gain media 021 to produce exciting light, exciting light is divided into S light and P light through the first polarization spectro unit 06, and make P light enter detection segment 05, S light enters reference field 04, is appreciated that in the utility model that it is all feasible for adopting S light or P light to carry out detecting.Measurand acts on the sensing element 051 of detection segment 05, P light frequency is changed, and S light frequency does not change, like this, first laserresonator produces the difference on the frequency relevant to measurand with the laser in the second laserresonator, in two resonator cavitys, the laser of different frequency produces difference interference after output unit exports and carries out conjunction light, then interference pattern is detected by optical detection device, and then obtain the difference on the frequency of two-way laser, the size of measurand can be determined according to this difference on the frequency.Concrete, in the first laserresonator, laser frequency is
in the second laserresonator, laser frequency is
wherein C is the light velocity, and longitudinal mode number q is integer, L
1and L
2be respectively the light path of first, second laserresonator.The change in optical path length produced due to sensing element causes the optical path difference in two resonator cavitys to be Δ L=L
1-L
2.Then difference on the frequency
in formula, L is the mean value of first, second laserresonator light path, and ν is the mean value of laser frequency in the first resonator cavity, the second resonator cavity.λ is the wavelength of laser instrument.Due in this formula, the light velocity C in molecule is a very large value, and the λ in denominator is a very little amount.Therefore when subtle change occurs light path L, also larger change can be there is in difference on the frequency Δ ν, therefore, this sensor has sensitivity apparently higher than traditional sensors (Mach-Zender interferometer etc.) and accuracy of detection, and there is the light path of journey altogether in two of this sensor resonator cavitys, external environment causes the frequency change of the change of common segment these two laser instruments caused basically identical, therefore detect frequency-splitting and can offset this change, therefore this sensor antijamming capability is strong, is suitable for the subtle change measuring multiple physical quantity.
Based on above-mentioned principle, provide several specific embodiment further below.
embodiment one:
As Fig. 1 ~ 4, first common segment 02 of this sensor, second common segment 03, reference field 04 and detection segment 05 all adopt optical fiber as transmission medium, first common segment 02 comprises the first common fiber 022, first common fiber 022 adopts polarization maintaining optical fibre, its end is provided with the first reflector element 023, specifically can be coated with high-reflecting film (Fig. 3) or catoptron (Fig. 1) is set, as the end mirror of the first laserresonator and the second laserresonator, or collimating mirror 024 can also be set in the inner side of high reflective mirror, also FBG device can be adopted as reflector element (Fig. 4), the present embodiment is not limited to one.Gain media 021 is arranged in the first common fiber 022, the first common fiber 022 can also be provided with a wavelength division multiplexer 025, and the pump light that pumping source 01 sends enters the first common fiber 022, for pumping gain media 021 through wavelength division multiplexer 025.
In the utility model embodiment, gain media 021 can be connected in the first common fiber 022 with the form of gain-doped fibers, also can be connected in the first common fiber 022 with the form of independent gain device.
Second common segment 03 comprises the second common fiber 031, second common fiber 031 also adopts polarization maintaining optical fibre different according to the mode of Laser output, the end of the second common fiber 031 can arrange the second reflector element 032, such as plate high-reflecting film (Fig. 3) or high reflective mirror (Fig. 1) is set, also FBG device (Fig. 4) can be adopted, or arrange outgoing mirror 082 (Fig. 2) etc., concrete setting principle is as described in follow-up.
Reference field 04 comprises reference optical fiber 041, and detection segment 05 comprises detection fiber 052, and reference optical fiber 041 and detection segment 05 all adopt polarization maintaining optical fibre, and the sensing element 051 of change in optical path length can be caused to be arranged in detection fiber 052.Reference optical fiber 041 and detection fiber 052 are connected between the first common fiber 022 and the second common fiber 031 by the first polarizing coupler 061 and the second polarizing coupler 071.Exciting light in first common fiber 022 is divided into S light and P light through the first polarizing coupler 061, and S light enters detection fiber 052, P light and enters reference optical fiber 041, is combined into light beam and enters the second common fiber 031 in the second polarizing coupler 071.
As a kind of way of output, as Fig. 1,3,4, reference optical fiber 041 and detection fiber 052 arrange an output unit 08 respectively, concrete, detection fiber 052 and reference optical fiber 041 respectively arrange a coupling mechanism 081, the emitting light path of a coupling mechanism 081 wherein arranges polarization and revolves state rotary unit 10, revolve through polarization the light that state rotary unit 10 exports identical with the polarisation of light state exported through another coupling mechanism 081, two-beam process is closed optical element 11 and is entered optical detection device 09.For the above-mentioned way of output, the end of this second common fiber 031 does not need to arrange output unit again, therefore the end of the second common fiber 031 can arrange the second reflector element 032, and such as high reflective mirror or plating high-reflecting film or employing FBG device etc., as the end mirror of laserresonator.
As the another kind of way of output, as Fig. 2, this output unit 08 can be arranged at the end of the second common fiber 031.Concrete, at the end of the second common fiber 031, an outgoing mirror 082 is set, the emitting light path of outgoing mirror 082 is provided with the 3rd polarization spectro unit 12, 3rd polarization spectro unit 12 can adopt polarizing beam splitter, the reflected light path of this polarizing beam splitter is provided with several catoptrons 13, the transmitted light path of polarizing beam splitter is provided with a half-reflecting half mirror 14, the laser that outgoing mirror 082 exports is divided into S light and P light after polarizing beam splitter, through series of mirrors 13 after S light is reflected, be polarized state rotary unit 10 change polarization state after identical with P polarization state, and arrive half-reflecting half mirror 14, P light is directly transmitted through half-reflecting half mirror 14 through polarizing beam splitter, interfere after two bundle polarization actinic lights, optical detection device 09 detects.
Further, there is initial optical path difference in the first laserresonator and the second laserresonator, in order to compensate initial optical path difference, can delay unit 15 be set on reference optical fiber, can be specifically fiber delay time device, make this optical path difference as far as possible little, so that optical detection device 09 detects.
Further, laser transmits inevitable lossy in resonator cavity, in order to avoid the luminous energy of the first laserresonator and the second laserresonator has big difference, can an adjustable attenuator 16 be all set on reference optical fiber and detection fiber, also only an adjustable attenuator 16 can be set on reference optical fiber or detection fiber when wherein an arm light intensity is lower, by adjustment adjustable damping unit, reduce the light intensity difference of two-arm laser.
Further, a single-frequency acquiring unit 17 can also be set in the first common fiber 022 or the second common fiber 031, or at reference optical fiber 041 and detection fiber 052, a single-frequency acquiring unit 17 is respectively set, the first laserresonator and the second laserresonator is made all only to transmit a kind of laser of frequency, and then improve the contrast of interference signal, improve measurement sensistivity.Further, this single-frequency acquiring unit can be narrow band filter, also can be the unit be made up of two collimation lenses and F-P interferometer therebetween, is free space between two collimation lenses.
embodiment two:
As Fig. 5, with the key distinction of above-described embodiment one, the utility model embodiment is that the first common segment 02 and the second common segment 03 adopt free space form, and detection segment 05 and reference field 04 still adopt Optical Fiber Transmission, wherein, first common segment 02 at least comprises dichroic mirror 026, collimation focusing mirror group 027 and the first polarizing coupler 061, gain media 021 is arranged in the light path between dichroic mirror 026 and collimation focusing mirror group 027, the pump light that pumping source 01 sends sends exciting light through dichroic mirror 026 pump excitation gain media 021, exciting light enters a fiber segment after collimation focusing mirror group 027, this fiber segment connects the first polarizing coupler 061, by this first polarizing coupler 061, exciting light is divided into S light and P light, enter detection segment 05 and reference field 04 respectively.
In the present embodiment, second common segment 03 also adopts the form of free space, concrete, second common segment 03 at least comprises a collimating mirror 033 and high reflective mirror 034 or outgoing mirror (not shown), adopt high reflective mirror 034 when output unit 08 is arranged at reference field 04 and detection segment 05, adopt outgoing mirror when output unit 08 is located at the second common segment 03.Second polarizing coupler 071 connects a fiber segment, and the other one end of this fiber segment connects collimating mirror 033, has certain distance between collimating mirror 033 and high reflective mirror or outgoing mirror 034.
In the present embodiment, can adopt the set-up mode of the output unit in above-described embodiment one, can also arrange above-mentioned adjustable damping unit in relevant position, delay unit, single-frequency acquiring unit etc., the present embodiment repeats no more.
embodiment three:
As Fig. 6, in the utility model embodiment, the first common segment 02, second common segment 03, detection segment 05 and reference field 04 all adopt free space transmission.Concrete, first common segment 02 is at least formed by dichroic mirror 026 and the first polarization spectro unit 06, gain media 021 is arranged between dichroic mirror 026 and the first polarization spectro unit 06, and the second common segment 03 is at least formed by outgoing mirror 035 and the second polarization spectro unit 07.First polarization spectro unit 06 and the second polarization spectro unit 07 can adopt polarizing beam splitter.Reference field 04 and detection segment 05 is formed between the first polarization spectro unit 06 and the second polarization spectro unit 07, reference field 04 corresponds to the transmitted light path between the first polarization spectro unit 06 and the second polarization spectro unit 07, reflected light path between the corresponding first polarization spectro unit 06 of detection segment 05 and the second polarization spectro unit 07, formed the transmission path of detection segment 05 between first polarization spectro unit 06 and the second polarization spectro unit 07 by several catoptrons 18, the sensing element 051 that can produce optical path difference is arranged on this detection segment transmission path.
Figure 6 shows that example, the principle of work of the present embodiment is: the exciting light that gain media 021 sends, S light and P light is divided into through the first polarization spectro unit 06, S light is entered detection segment 05 by the first polarization spectro unit 07 reflection, the second polarization spectro unit 07 is reflexed to through at least two catoptrons 18, P light enters reference field 04 by the first polarization spectro unit 06 transmission, and transfer to the second polarization spectro unit 07, S light and P light and be combined into light beam at the second polarization spectro unit 07 place and transfer to outgoing mirror 035.The design of output light path is as described in embodiment one, the emitting light path of this outgoing mirror 035 is provided with the 3rd polarization spectro unit 12, 3rd polarization spectro unit 12 can adopt polarizing beam splitter, the reflected light path of this polarizing beam splitter is provided with several catoptrons 13, this reflected light path is also provided with polarization state rotary unit 10, its transmitted light path is provided with a half-reflecting half mirror 14, the laser that outgoing mirror 035 exports is divided into S light and P light after polarizing beam splitter element, through series of mirrors 13 after S light is reflected, be polarized state rotary unit 10 change polarization state after identical with P polarization state, and arrive half-reflecting half mirror 14, P light is directly transmitted through half-reflecting half mirror 14 through polarizing beam splitter, two bundle polarized lights be combined into a branch of laggard enter optical detection device 09.Certainly, this polarization state rotary unit 10 also can be arranged on the transmitted light path of polarizing beam splitter, and P light is converted to S light, restraints S light carry out conjunction light with another.
Different from other embodiments above-mentioned, the present embodiment is using S light as detection light, and using P light as reference light, this is only a kind of embodiment, is not used in and limits protection domain of the present utility model.
Be appreciated that, sensing element 051 also can be arranged in the transmitted light path between the first polarization spectro unit 06 and the second polarization spectro unit 07 by the present embodiment, using the reflected light path between the first polarization spectro unit 06 and the second polarization spectro unit 07 as reference section, the present embodiment need not be limited to one.
In the utility model embodiment, adjustable damping unit 16 can also be set simultaneously in detection segment 05 and reference field 04, or detection segment 05 or reference field 04 arrange adjustable damping unit 16, at reference field, delay unit 15 is set, in the first common segment 02 or the second common segment 03, single-frequency acquiring unit 17 is set, or respectively establish a single-frequency acquiring unit 17 in detection segment 05 and reference field 04, the effect of each device is identical with its effect in embodiment one, repeats no more herein.
In sum, the utility model forms two straight cavity lasers by pumping source, the first common segment, the second common segment, detection segment and reference field, these two laserresonators can adopt all-fiber form, also can be the form of free space, or be the array configuration of free space and optical fiber, after the sensing element of detection segment is subject to the effect of measurand, the light path amount of resonator cavity is changed, and then change laser frequency, the size of measurand is obtained by the difference on the frequency detecting two-way laser.Because difference on the frequency is comparatively responsive to the change of light path, therefore its detection sensitivity and accuracy of detection higher, be traditional detection method can not and, and owing to there is Cheng Guanglu altogether in two straight chambeies, therefore detect good stability, interference resistance is strong, is suitable for the detection of multiple physical quantity subtle change.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (10)
1. the sensor based on laser instrument, it is characterized in that, comprise pumping source, the first common segment containing gain media, the second common segment, and be connected to reference field between the first common segment and the second common segment and detection segment side by side by the first polarization spectro unit of the First Line polarized light that can polarization direction is divided into different incident light and the second linearly polarized light and the second polarization spectro unit;
Described first common segment, the second common segment and reference field form the first laserresonator of transmission First Line polarized light, and described first common segment, the second common segment and detection segment form the second laserresonator of transmission second linearly polarized light;
Described detection segment is provided with the sensing element that can cause change in optical path length, described second common segment is provided with an output unit or described reference field and detection segment and is respectively provided with an output unit, described output unit connects conjunction light unit, described conjunction light unit connects photodetector, is also provided with for First Line polarized light and the polarization state of the second linearly polarized light are become consistent polarization state rotary unit between described conjunction light unit and output unit.
2. sensor as claimed in claim 1, it is characterized in that, described reference field comprises reference optical fiber, and described detection segment comprises detection fiber, the described sensing element of change in optical path length that can cause is arranged at described detection fiber section, and described reference optical fiber and detection fiber adopt polarization maintaining optical fibre.
3. sensor as claimed in claim 2, it is characterized in that, described reference optical fiber and detection fiber are respectively provided with output unit described in, are provided with described polarization state rotary unit in the wherein output light path of output unit described in.
4. sensor as claimed in claim 2, it is characterized in that, described first common segment comprises the first common fiber, described first common fiber adopts polarization maintaining optical fibre, described first common fiber is provided with the wavelength division multiplexer be connected with described pumping source, and described gain media is arranged between described wavelength division multiplexer and the first polarization spectro unit.
5. sensor as claimed in claim 1, it is characterized in that, described first common segment, the second common segment, reference field and detection segment all adopt free space transmission.
6. the sensor as described in claim 2,4 or 5, it is characterized in that, described output unit is arranged at the end of described second common segment, the 3rd polarization spectro unit of the linearly polarized light that the light that described output unit exports can be divided into polarization direction different is provided with in the emitting light path of described output unit, the transmission path of linearly polarized light is provided with a described polarization state rotary unit wherein, and the First Line polarized light of polarization state respectively with described of the linearly polarized light that this polarization direction is different is identical with the polarization state of the second linearly polarized light.
7. the sensor as described in claim 2,3 or 5, it is characterized in that, described first common segment adopts free space transmission, described first common segment also comprises the dichroic mirror of the outbound course being arranged at described pumping source, described gain media is arranged between described dichroic mirror and the first polarization spectro unit, and the pump light that described pumping source sends enters described first common segment through described dichroic mirror.
8. sensor as claimed in claim 1, is characterized in that, described reference field is provided with delay unit.
9. sensor as claimed in claim 1, is characterized in that, be provided with adjustable damping unit at described reference field and/or detection segment.
10. sensor as claimed in claim 1, it is characterized in that, described first common segment or the second common segment are provided with single-frequency acquiring unit, or described reference field and detection segment are respectively provided with a single-frequency acquiring unit.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634370A (en) * | 2015-02-10 | 2015-05-20 | 深圳大学 | Laser-based sensor |
| WO2016127323A1 (en) * | 2015-02-10 | 2016-08-18 | 深圳大学 | Laser-based sensor |
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2015
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634370A (en) * | 2015-02-10 | 2015-05-20 | 深圳大学 | Laser-based sensor |
| WO2016127323A1 (en) * | 2015-02-10 | 2016-08-18 | 深圳大学 | Laser-based sensor |
| US9837785B2 (en) | 2015-02-10 | 2017-12-05 | Shenzhen University | Polarization laser sensor |
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