CN113571469A - 一种激光划片分割SiC薄片的方法 - Google Patents
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Abstract
本发明公开了一种激光划片分割SiC薄片的方法,包括步骤:(1)将SiC薄片贴到划片膜上,薄片背面与划片膜紧密接触,划片膜绷紧并位于划片框上;(2)在SiC薄片正面,沿着每条划片道进行激光隐形切割;在SiC薄片内部产生激光爆点,激光爆点在应力作用下连接,在SiC内部产生贯通的微裂纹,微裂纹延伸到SiC薄片正面形成裂纹;(3)对SiC薄片进行裂片,使得SiC薄片顺着裂纹方向分开,分成单独的管芯。本发明利用激光划片能实现SiC薄片的快速划片,并且划片效果良好,崩边率低,损伤管芯少。
Description
技术领域
本发明涉及分割SiC薄片的方法,尤其涉及一种激光划片分割SiC薄片的方法。
背景技术
SiC是一种具有出色的物理、化学和电性能特性的第三代新型宽禁带半导体材料,在功率半导体器件领域,特别是大功率、高电压条件下,具有很好的应用前景。SiC肖特基势垒二极管(SBD)和SiC MOSFET都已经成功商业化。
传统SiC产品的衬底厚度为350um左右,对于最终的产品而言,衬底产生的电阻占了产品总电阻的很大一部分,因此将SiC衬底减薄以获取更高的性能是当前的研究趋势。但当SiC衬底减薄到100um左右时,应用于厚片的划片方法很难再适用,需要寻找一种新的划片方法使得SiC薄片能够快速的分割成单个管芯并且划片过程芯片损失要小。
发明内容
发明目的:本发明的目的是提供一种实现无划片损耗、无崩边和管芯损失少的激光划片分割SiC薄片的方法。
技术方案:本发明分割SiC薄片的方法,包括步骤:
(1)将SiC薄片贴到划片膜上,SiC薄片背面与划片膜紧密接触,划片膜绷紧并位于划片框上;
(2)在SiC薄片正面,沿着每条划片道进行激光隐形切割;在SiC薄片内部产生激光爆点;激光爆点在应力作用下连接,在SiC薄片内部产生贯通的微裂纹,微裂纹延伸到SiC薄片正面形成裂纹;
(3)对SiC薄片进行裂片,使SiC薄片顺着裂纹方向分开,分成单独的管芯。
进一步,SiC薄片的厚度为80μm~120μm。
进一步,所述步骤(2)中,激光的波长为800nm~1200nm,脉冲频率为10kHz~30kHz,激光扫描速度为200mm/s~800mm/s;对每条划片道分成三次切割:
第一次切割深度为SiC薄片厚度的3/5~4/5,激光功率为0.3w~0.5w;
第二次切割深度为SiC薄片厚度的3/10~1/2,激光功率为0.3w~0.5w;
第三次切割深度为SiC薄片厚度的1/5~3/10,激光功率为0.1w~0.2w。
进一步,所述步骤(3)中,对SiC薄片进行裂片时,裂片刀的下降深度值为距离SiC薄片正面向下20μm~40μm。
本发明与现有技术相比,其显著效果如下:1、采用激光隐形切割,对每条划片道分成三次切割,实现SiC薄片无划片损耗、无崩边,损失管芯少;2、采用激光扫描切割,速度快、切割次数少,使得划片效率高。
附图说明
图1为本发明中的总流程图;
图2为本发明中SiC薄片内部形成爆点的示意图;
图3为本发明中SiC薄片正面形成裂纹的图片;
图4为本发明中对SiC薄片进行裂片的示意图。
具体实施方式
下面结合说明书附图和具体实施方式对本发明做进一步详细描述。
图1为本发明分割SiC薄片的方法总流程图,包括以下步骤:
步骤1,将厚度为80μm~120μm的SiC薄片贴到划片膜上,薄片背面与划片膜紧密接触,划片膜绷紧位于划片框上。
步骤2,对SiC薄片正面沿着每条划片道进行激光隐形切割,在SiC薄片内部产生激光爆点,激光爆点在应力作用下连接,在SiC内部产生贯通的微裂纹,微裂纹延伸到SiC薄片正面形成裂纹。
激光的波长为800nm~1200nm,脉冲频率为10kHz~30kHz,激光扫描速度为200mm/s~800mm/s。激光对每条划片道分成三次切割,第一次切割深度为薄片厚度的3/5~4/5,激光功率为0.3w~0.5w。第二次切割深度为薄片厚度的3/10~1/2,激光功率为0.3w~0.5w。第三次切割深度为薄片厚度的1/5~3/10,激光功率为0.1w~0.2w。
步骤3,对SiC薄片进行裂片,使得SiC薄片顺着裂纹方向分开,分成单独的管芯;裂片时裂片刀的下降深度值为距离SiC薄片正面向下20μm~40μm。
以分割厚度为100μm的SiC薄片为例,实现步骤如下:
步骤1,将SiC薄片贴到划片膜上,薄片背面与划片膜紧密接触,划片膜绷紧位于划片框上。
步骤2,对SiC薄片正面沿着每条划片道进行激光隐形切割,在SiC薄片内部产生激光爆点,如图2所示。激光爆点在应力作用下连接,在SiC内部产生贯通的微裂纹,微裂纹延伸到SiC薄片正面形成裂纹,如图3所示。使用激光的波长为1064nm,脉冲频率为20kHz,激光扫描速度为600mm/s。
激光分成三次切割:第一次切割深度为薄片厚度的3/5,激光功率为0.45w;第二次切割深度为薄片厚度的3/10,激光功率为0.45w;第三次切割深度为薄片厚度的1/5,激光功率为0.15w。
步骤3,对SiC薄片进行裂片,使得SiC薄片顺着裂纹方向分开,如图4所示。裂片刀的下降深度值为距离SiC薄片正面向下25μm。
Claims (4)
1.一种激光划片分割SiC薄片的方法,其特征在于,包括步骤:
(1)将SiC薄片贴到划片膜上,SiC薄片背面与划片膜紧密接触,划片膜绷紧并位于划片框上;
(2)在SiC薄片正面,沿着每条划片道进行激光隐形切割;在SiC薄片内部产生激光爆点;激光爆点在应力作用下连接,在SiC薄片内部产生贯通的微裂纹,微裂纹延伸到SiC薄片正面形成裂纹;
(3)对SiC薄片进行裂片,使SiC薄片顺着裂纹方向分开,分成单独的管芯。
2.根据权利要求1所述的激光划片分割SiC薄片的方法,其特征在于:所述步骤(1)中,SiC薄片的厚度为80μm~120μm。
3.根据权利要求1所述的激光划片分割SiC薄片的方法,其特征在于:所述步骤(2)中,激光的波长为800nm~1200nm,脉冲频率为10kHz~30kHz,激光扫描速度为200mm/s~800mm/s;对每条划片道分成三次切割:
第一次切割深度为SiC薄片厚度的3/5~4/5,激光功率为0.3w~0.5w;
第二次切割深度为SiC薄片厚度的3/10~1/2,激光功率为0.3w~0.5w;
第三次切割深度为SiC薄片厚度的1/5~3/10,激光功率为0.1w~0.2w。
4.根据权利要求1所述的激光划片分割SiC薄片的方法,其特征在于:所述步骤(3)中,对SiC薄片进行裂片时,裂片刀的下降深度值为距离SiC薄片正面向下20μm~40μm。
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CN115521056A (zh) * | 2022-10-25 | 2022-12-27 | 深圳市益铂晶科技有限公司 | 一种玻璃激光切割的劈裂方法 |
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CN115521056A (zh) * | 2022-10-25 | 2022-12-27 | 深圳市益铂晶科技有限公司 | 一种玻璃激光切割的劈裂方法 |
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