CN113567484A - Four-dimensional high-time-space-resolution ultrafast photon electronic multi-mode detection device - Google Patents
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Abstract
The invention relates to a four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device, belonging to the field of laser micro-nano processing and material science application. According to the invention, by a pumping detection technology, focused photons from femtosecond to picosecond scale are accurately focused on a micro-nano scale sample, and the micro-nano scale sample is organically combined and detected by an ultrafast scanning electron microscope and a CCD (charge coupled device); exciting a cooling filament by ultrafast laser to form an ultrafast electron beam for observation; the observation is carried out by irradiating the CCD with ultrafast laser, so that the multimode detection of ultrafast electrons and ultrafast photons can be realized simultaneously; and the detection electrons can be regulated and controlled to act on the sample together with the photons, so that the multimode ultrafast observation of the electron and photon synergistic action process is realized. The invention can process or modify the micro-nano structure of the sample, and carry out in-situ measurement processing or modified ultrafast carrier dynamics research.
Description
Technical Field
The invention relates to a four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device, belonging to the field of laser micro-nano processing and material science application.
Background
The research on the microstructure of the substance and the ultrafast dynamics of the physical and chemical transient change process opens up a new development direction for different subjects, especially in the field of ultrafast laser manufacturing. The ultrafast laser has the characteristics of superstrong, ultrafast and ultraprecise, and is one of the leading edges and important growth points of the manufacturing technology. The interaction between the laser and the material changes the state and the property of the material, realizes the shape control and the controllability of micron to nanometer scale or trans-scale, and has been paid attention to for many years. The interaction between the femtosecond laser and the material is a nonlinear, unbalanced and complex physicochemical process, and relates to a plurality of brand new mechanisms of the interaction between the laser and the material. The existing traditional optical pumping detection technology can not obtain high-precision ultrafast dynamic information, and the existing common scanning electron microscope can only carry out steady-state imaging, so that ultrafast laser (pulse width less than 1ps) is organically combined with an improved scanning electron microscope and a CCD (charge coupled device) for detection, ultrafast photon electron multimode high-space-time resolution detection is realized, the ultrafast process of interaction of photons and electrons is observed first, the development of related subjects can be greatly promoted, and the method is applied to the fields of laser micro-nano processing and detection, micro-nano photoelectric devices, novel photoelectric materials, solar cells and the like [ ACS appl.Mater.Interfaces,13,7688-7697,2021, Light Sci.appl, 9,80,2020 ].
Disclosure of Invention
The invention aims to solve the problems that the prior art can not observe the ultrafast laser dynamic process and further can not detect the processing result, and provides a four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device; the device can measure the ultrafast laser micro-nano processing and modification process and the dynamic process of the micro-nano photoelectric device current carrier in real time in situ.
The purpose of the invention is realized by the following technical scheme.
A four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device accurately focuses focused photons from femtosecond to picosecond scale to a micro-nano scale sample through a pumping detection technology, and organically combines and detects through an ultrafast scanning electron microscope and a CCD (charge coupled device); exciting a cooling filament by ultrafast laser to form an ultrafast electron beam for observation; the observation is carried out by irradiating the CCD with ultrafast laser, so that the multimode detection of ultrafast electrons and ultrafast photons can be realized simultaneously; and the detection electrons can be regulated and controlled to act on the sample together with the photons, so that the multimode ultrafast observation of the electron and photon synergistic action process is realized.
The micro-nano structure processing or modification can be carried out on the sample, and the in-situ measurement processing or modified ultrafast carrier dynamics research is carried out; the femtosecond laser provides pumping laser for the device, the detection can adopt a photon/electron multimode detection mode, the femtosecond laser and the improved scanning electron microscope are organically combined to provide electron mode detection for the device, and the femtosecond laser and the CCD are organically combined to provide the photon mode detection for the device;
the femtosecond laser and CCD organically combined photon detection mode is suitable for measuring an ultrafast image by a single CCD one frame at a time and is also suitable for measuring ultrafast continuous images by a plurality of CCDs in a multi-frame manner at a time;
a four-dimensional high space-time resolution ultrafast photon electronic multimode detection device comprises: the device comprises a femtosecond laser generator, a frequency doubling generator, a beam splitter, a time delay platform, a beam splitter, an improved scanning electron microscope, a frequency doubling module, a beam combiner, a sample, an electronic detector, a beam splitter and a CCD.
The basic output of the high-power femtosecond laser enters a first spectroscope through a frequency doubling generator and then outputs two beams of pulse laser. After passing through the time delay platform, the first beam of pulse laser passes through a second beam splitter, the first beam of laser is separated, passes through a high-temperature window and is accurately focused on a Schottky field emission filament which is cooled by an improved scanning electron microscope, photoelectron pulses are generated, the photoelectron pulses are accelerated by 1-30kV voltage, and the photoelectron pulses are used for electron mode detection through a photon detector; and the second beam of pulse laser is divided and directly focused on a sample through a beam combiner, and reflected light is collected and imaged through a spectroscope and a CCD (charge coupled device) and is used for optical mode detection. The second beam of pulse laser generated by the frequency doubling module is incident on the sample 9 at an angle of 50 degrees and is used as pump light to excite the sample to an excited state. The time delay platform controlled by a computer controls the time difference between the pumping light and the detecting light so as to realize time resolution, and the device can simultaneously realize photon/electron multimode detection and is suitable for in-situ measurement of micro-nano photoelectric devices.
The working principle is that after the ultrafast laser irradiates a sample, the ultrafast laser excites the cooling filament to form an ultrafast electron beam for observation, and the ultrafast laser irradiates the CCD for observation, so that multimode detection of ultrafast electrons and ultrafast photons can be realized simultaneously, and further, the detection electrons can be regulated and controlled to act on the sample together with the photons, thereby innovatively realizing multimode ultrafast observation of the electron and photon synergistic action process.
The improved scanning electron microscope respectively develops and designs a light-transmitting window for transmitting laser at the positions of exciting a pulse electron beam, pumping light and detecting photon pulses; and simultaneously, the voltage and the bias voltage value of the electron beam are cooperatively regulated and controlled to tune the pulse of the electron beam.
The working process is as follows:
the specific use steps comprise:
and 3, the detection electrons can be regulated and controlled to act on the sample together with the photons, so that the multimode ultrafast observation of the electron and photon synergistic action process is realized.
Step 4, a computer controlled time delay platform (covering-0.6 to 6.0ns) is used to realize time resolution.
And 5, continuously adjusting the magnitude of the applied light field energy, and being suitable for micro-nano processing and in-situ measurement of photoelectric devices.
Advantageous effects
1. According to the four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device, focused photons from femtosecond to picosecond scale are accurately focused on a micro-nano scale sample through the pumping detection device, and are organically combined for detection through the ultrafast scanning electron microscope and the CCD.
2. The four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device can process or modify a micro-nano structure of a sample through the pumping detection device, and can carry out in-situ measurement processing or modified ultrafast carrier dynamics research. The femtosecond laser provides pumping laser for the device, the detection can adopt a photon/electron multimode detection mode, the femtosecond laser and the improved scanning electron microscope are organically combined to provide electron mode detection for the device, and the femtosecond laser and the CCD are organically combined to provide the photon mode detection for the device.
3. The four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device provided by the invention can be suitable for measuring ultrafast images one frame at a time by a single CCD (charge coupled device) and also suitable for measuring ultrafast continuous images in multiple frames at a time by a plurality of CCDs (charge coupled devices). After laser polarization light splitting of one CCD is carried out, a plurality of CCDs are connected, so that an ultrafast continuous imaging function of multi-frame imaging at each time is realized, the observation capability of the system is greatly expanded, a high-precision high-continuity detection function is realized, and the reliability and the stability are improved.
4. The invention relates to a four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device. The movement process of the current carrier in the micro-nano structure can be visually observed in real time, the technical problems of the generation of the current carrier, the recombination of excitons and the like are solved, and an effective basis is provided for improving the efficiency of the photoelectric device.
5. The invention has stable property, environment protection and high precision.
Drawings
FIG. 1 is a schematic diagram of an electronic multimode detection device for four-dimensional high space-time resolution ultrafast photons;
FIG. 2 is a schematic diagram of a four-dimensional high space-time resolution ultrafast photon electronic multimode detection device.
The system comprises a femtosecond laser generator 1, a frequency doubling generator 2, a first beam splitter 3, a time delay platform 4, a second beam splitter 5, an improved scanning electron microscope 6, a frequency doubling module 7, a beam combiner 8, a sample 9, an electronic detector 10, a first beam splitter 11, a second beam splitter 12, a third beam splitter 13, a first CCD15, a second CCD16, a third CCD 17, a pumping light pulse 18, an electronic pulse 19 and a detection light pulse 11.
Detailed Description
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings. The experimental procedures used in the following examples are all conventional procedures unless otherwise specified.
Materials, reagents and the like used in the following examples are commercially available unless otherwise specified.
Example 1
A four-dimensional high-space-time resolution ultrafast photon electronic multimode detection device is utilized to research the carrier dynamics and the dynamic change process of the electron density in the processing process on a CdSe film sample with the thickness of 500 mu m.
The working process is as follows,
step one, placing the selected Si sample on a sample table.
Step two, as shown in fig. 1, the optical path of the femtosecond laser system 1 is adjusted, the basic output of the ultrafast femtosecond laser passes through the frequency doubling crystal 2 to generate 515nm laser, and then the first beam splitter 31: 1 is divided into two paths, one path is used as pumping light, and the other path is used as detection light.
And step three, the pump light is focused on a sample 9 through a frequency tripling crystal 7 and a beam combiner 8, and the pump light beam is adjusted to be accurately incident to the center of the sample 9 at an angle of 50 degrees so as to ensure that the signal is positioned in the center of the field of view of the scanning electron microscope.
And step four, the detection light adjusts the time delay of a detection light path through a delay platform 4, and the detection light is divided into two paths through a beam splitter 5. One path of light passes through the beam combiner 8 and the pump light to be focused to the center of a sample 9 for generating photon mode signal detection.
And fifthly, accurately adjusting a detection light path to ensure that the detection light can be accurately focused to a Schottky field emission filament cooled by the scanning electron microscope 6 through a high-temperature window and generate photoelectron pulses for detecting an electron mode signal.
Step six, as shown in fig. 1, a secondary electron signal is introduced into the detector 10, and the dynamic change of the high-resolution electrons of the sample under the laser irradiation can be observed.
Step seven, as shown in fig. 1, the detection light can be divided into 3 beams by the first spectroscope 11, the second spectroscope 12 and the third spectroscope 13, and the 3 beams are incident on the first CCD14, the second CCD15 and the third CCD16, so that ultrafast continuous imaging of 3 frames at a time is realized.
Step eight, as shown in fig. 2, a pump light pulse 17 can be implemented to excite the sample, and an electron/photon detection carrier ultrafast dynamic process is realized through an electron pulse 18 and a detection light pulse 19.
Step nine, using a computer to control the time delay platform 4 (covering-0.6 to 6.0ns) to realize time resolution.
The ultra-fast dynamic process observation of electron/photon detection carriers and in-situ detection of processing results can be realized.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A four-dimensional high space-time resolution ultrafast photon electronic multimode detection device is characterized in that: precisely focusing focused photons from femtosecond to picosecond to a micro-nano-scale sample by a pumping detection technology, and organically combining and detecting by an ultrafast scanning electron microscope and a CCD (charge coupled device); exciting a cooling filament by ultrafast laser to form an ultrafast electron beam for observation; the observation is carried out by irradiating the CCD with ultrafast laser, so that the multimode detection of ultrafast electrons and ultrafast photons can be realized simultaneously; and the detection electrons can be regulated and controlled to act on the sample together with the photons, so that the multimode ultrafast observation of the electron and photon synergistic action process is realized.
2. The four-dimensional high space-time resolution ultrafast photon electronic multimode detection device of claim 1, wherein: the photon electronic multimode detection device is suitable for in-situ research of an ultrafast micro-nano processing process and a micro-nano photoelectric device carrier dynamic process.
3. The four-dimensional high space-time resolution ultrafast photon electronic multimode detection device of claim 1, wherein: the method comprises the following steps: the device comprises a femtosecond laser generator, a frequency doubling generator, a beam splitter, a time delay platform, a beam splitter, an improved scanning electron microscope, a frequency doubling module, a beam combiner, a sample, an electronic detector, a beam splitter and a CCD (charge coupled device);
after the basic output of the high-power femtosecond laser enters a first spectroscope through a frequency doubling generator, two beams of pulse laser are output; after passing through the time delay platform, the first beam of pulse laser passes through a second beam splitter, the first beam of laser is separated, passes through a high-temperature window and is accurately focused on a Schottky field emission filament cooled by an improved scanning electron microscope, photoelectron pulses are generated, and the photoelectron pulses are accelerated by 1-30kV voltage and are used for electron mode detection; the second beam of pulse laser is divided out and is directly focused on a sample through a beam combiner, and reflected light is collected and imaged through a spectroscope and a CCD (charge coupled device) and is used for optical mode detection; a second beam of pulse laser generated by the frequency doubling module is incident on the sample at a certain angle and is used as pump light to excite the sample to an excited state; the time difference between the pump light and the probe light is controlled by a time delay platform controlled by a computer so as to realize time resolution; exciting a cooling filament by ultrafast laser to form an ultrafast electron beam for observation; the observation is carried out by irradiating the CCD with ultrafast laser, so that photon/electron multimode detection can be realized simultaneously; and the detection electrons can be regulated and controlled to act on the sample together with the photons, so that the multimode ultrafast observation of the electron and photon synergistic action process is realized.
4. The four-dimensional high space-time resolution ultrafast photon electronic multimode detection device of claim 3, wherein: the certain angle is typically a 50 ° inclination.
5. The four-dimensional high space-time resolution ultrafast photon electronic multimode detection device of claim 3, wherein: the improved scanning electron microscope is respectively provided with light-transmitting windows at the positions of the excitation pulse electron beam, the pump light and the detection photon pulse for transmitting laser; and simultaneously, the voltage and the bias voltage value of the electron beam are cooperatively regulated and controlled to tune the pulse of the electron beam.
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Application publication date: 20211029 |