CN113561055A - Chemical mechanical grinding head - Google Patents
Chemical mechanical grinding head Download PDFInfo
- Publication number
- CN113561055A CN113561055A CN202110895810.8A CN202110895810A CN113561055A CN 113561055 A CN113561055 A CN 113561055A CN 202110895810 A CN202110895810 A CN 202110895810A CN 113561055 A CN113561055 A CN 113561055A
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- CN
- China
- Prior art keywords
- water inlet
- pipe
- water
- wall
- inlet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a chemical mechanical grinding head which comprises a grinding part, a connecting part, a water inlet and outlet part and an isolating pipe, wherein a vortex channel is arranged in the grinding part, the vortex channel is connected with a water inlet pipe and a water outlet pipe, the water inlet pipe and the water outlet pipe are connected with the water inlet and outlet part, and the isolating pipe separates the water inlet pipe from the water outlet pipe. The grinding head can be quickly and effectively cooled by arranging the cooling water path in the grinding head, so that the defects of chemical mechanical grinding are overcome.
Description
Technical Field
The invention relates to the technical field of semiconductor production, in particular to a chemical mechanical polishing head.
Background
Chemical Mechanical Polishing (CMP) is a very important process in semiconductor manufacturing equipment. In a chemical mechanical polishing process, the temperature of the polishing region is very important to the process, and overheating may pose a potential defect risk. In order to overcome the heat generated by mechanical polishing in the chemical mechanical polishing process and achieve the purpose of controlling the surface temperature of the wafer, the prior art has a cooling water loop installed below the wafer polishing platform to control the temperature of the polishing platform. However, in this heavy proposal, the whole grinding platform is cooled, and the actual heat generation is mainly concentrated between the grinding head and the contacted silicon wafer, so the cooling effect is general. The problem that the existing chemical mechanical polishing equipment is poor in cooling effect when being cooled on a grinding platform and cannot realize quick and effective cooling of a grinding head with heat gathered is solved.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a chemical mechanical grinding head, which can quickly and effectively cool the grinding head and improve the defect of chemical mechanical grinding by arranging a cooling water path in the grinding head.
The scheme for solving the technical problems is as follows:
a chemical mechanical grinding head comprises a grinding part, a connecting part, a water inlet and outlet part and an isolating pipe, wherein the grinding part is in a round table shape, a concave spigot with an opening at the upper side is formed on the grinding part, a vortex channel is formed on the bottom surface of the concave spigot, a water inlet pipe is fixed in the middle of the bottom surface of the vortex channel, a water inlet channel which is communicated with the water inlet pipe and formed in the grinding part is formed on the lower side of the water inlet pipe, and a plurality of water inlet holes communicated with the water inlet channel are formed on the outer side of the bottom surface of the vortex channel;
the connecting part is provided with a convex spigot matched with the concave spigot, the convex spigot is inserted and fixed in the concave spigot, and the lower bottom surface of the concave spigot is pressed on the upper end surface of the vortex channel; a water outlet pipe communicated with the vortex channel is formed in the middle of the convex spigot, and the water outlet pipe and the water inlet pipe are coaxially arranged and are positioned on the outer side of the water inlet pipe;
the isolating pipe is inserted between the water outlet pipe and the water inlet pipe, and the lower end of the isolating pipe is fixed on the bottom surface of the vortex channel;
the water inlet and outlet part is formed with four-stage step holes with diameters decreasing from bottom to top, the side wall of the water inlet and outlet part is formed with a water outlet interface communicated with the second-stage holes of the four-stage step holes, and the upper bottom surface of the water inlet and outlet part is formed with a water inlet interface communicated with the fourth-stage holes of the four-stage step holes; the upper end of the water outlet pipe is hinged to a first-stage hole of the four-stage step hole through a first sealing bearing, and the upper end of the isolation pipe is hinged to a third-stage hole of the four-stage step hole through a second sealing bearing.
And a pair of symmetrically arranged connecting blocks is formed on the connecting part.
And the outer wall of the upper end of the water inlet pipe is sleeved with a sealing ring, and the sealing ring is pressed against the inner wall of the upper end of the isolation pipe.
The water inlet channel comprises a plurality of water through holes penetrating through the grinding part and a water through port communicated with the middle parts of the plurality of water through holes, and the water through holes are communicated with the water inlet pipe; the water inlet is communicated with the outer end of the limber hole; and plugs are fixed at openings at two ends of the limber hole.
Gaps are reserved between the outer wall of the isolation pipe and the inner wall of the water outlet pipe and between the inner wall of the isolation pipe and the outer wall of the water inlet pipe.
The invention has the following outstanding effects: compared with the prior art, the grinding head can be quickly and effectively cooled by arranging the cooling water path in the grinding head, and the defects of chemical mechanical grinding are overcome.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a cross-sectional view of FIG. 1 taken about A-A;
the arrows in the figure indicate the flow direction of the cooling water.
Detailed Description
In an embodiment, as shown in fig. 1 to 2, a chemical mechanical polishing head includes a polishing portion 1, a connecting portion 2, a water inlet and outlet portion 3 and an isolation tube 4, where the polishing portion 1 is in a circular truncated cone shape, a concave spigot 11 with an open upper side is formed on the polishing portion 1, a vortex channel 12 is formed on a bottom surface of the concave spigot 11, a water inlet pipe 13 is fixed in a middle of a bottom surface of the vortex channel 12, a water inlet channel 14 formed inside the polishing portion 1 and communicated with the water inlet pipe 13 is formed on a lower side of the water inlet pipe 13, and a plurality of water inlet holes 15 communicated with the water inlet channel 14 are formed on an outer side of the bottom surface of the vortex channel 12;
the connecting part 2 is formed with a male spigot 21 matched with the female spigot 11, the male spigot 21 is inserted and fixed in the female spigot 11, and the lower bottom surface of the female spigot 21 is pressed on the upper end surface of the vortex channel 12; a water outlet pipe 22 communicated with the vortex channel 12 is formed in the middle of the male end 21, and the water outlet pipe 22 and the water inlet pipe 13 are coaxially arranged and are positioned on the outer side of the water inlet pipe 13;
the isolating pipe 4 is inserted between the water outlet pipe 22 and the water inlet pipe 13, and the lower end of the isolating pipe 4 is fixed on the bottom surface of the vortex channel 12;
the water inlet and outlet part 3 is formed with four-stage step holes 31 with diameters decreasing from bottom to top, the side wall of the water inlet and outlet part 3 is formed with a water outlet interface 32 communicated with the second-stage holes of the four-stage step holes 31, and the upper bottom surface of the water inlet and outlet part 3 is formed with a water inlet interface 33 communicated with the fourth-stage holes of the four-stage step holes 31; the upper end of the water outlet pipe 22 is hinged on the first-stage hole of the fourth-stage step hole 31 through a first sealing bearing 51, and the upper end of the isolation pipe 4 is hinged on the third-stage hole of the fourth-stage step hole 31 through a second sealing bearing 52.
Furthermore, a pair of symmetrically arranged connecting blocks 23 is formed on the connecting portion 2.
Furthermore, a sealing ring 53 is sleeved on the outer wall of the upper end of the water inlet pipe 13, and the sealing ring 53 is pressed against the inner wall of the upper end of the isolation pipe 4.
More specifically, the water inlet passage 14 includes a plurality of water through holes 141 penetrating the polishing part 1 and a water through hole 142 communicating with the middle of the plurality of water through holes 141, and the water through hole 142 communicates with the water inlet pipe 13; the water inlet hole 15 is communicated with the outer end of the limber hole 141; plugs 54 are fixed at openings at two ends of the water through hole 141.
Furthermore, gaps are reserved between the outer wall of the isolation pipe 4 and the inner wall of the water outlet pipe 22 and between the inner wall of the isolation pipe 4 and the outer wall of the water inlet pipe 13.
The working principle is as follows: the water inlet connector 33 is connected with an external cooling water inlet pipe, the water outlet connector 32 is connected with an external cooling water return tank, external cooling water enters a fourth-stage hole of the fourth-stage step hole through the water inlet connector 33, then enters the water inlet channel 14 through the water inlet pipe 13, water in the water inlet channel 14 enters the vortex channel 12 through the water inlet holes 15, then the water moves inwards along the vortex direction of the vortex channel 12 to cool the grinding part 1, when the cooling water flows to the middle part of the vortex channel 12, the water flows upwards from the gap between the isolation pipe 4 and the water outlet pipe 13 to the second-stage hole of the fourth-stage step hole, and finally flows out from the water outlet connector 32. (ii) a
The isolating pipe 4 can isolate the water inlet pipe and the water outlet pipe for heat transfer, and can effectively improve the cooling effect of cooling water.
Finally, the above embodiments are only for illustrating the present invention and not for limiting the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, so that all equivalent technical solutions also belong to the scope of the present invention, and the scope of the present invention should be defined by the claims.
Claims (2)
1. The utility model provides a chemical machinery grinding head, includes grinding portion (1), connecting portion (2), business turn over water portion (3) and spacer tube (4), its characterized in that: the grinding part (1) is in a circular truncated cone shape, a concave spigot (11) with an opening at the upper side is formed on the grinding part (1), a vortex channel (12) is formed on the bottom surface of the concave spigot (11), a water inlet pipe (13) is fixed in the middle of the bottom surface of the vortex channel (12), a water inlet channel (14) which is communicated with the water inlet pipe (13) and formed inside the grinding part (1) is formed on the lower side of the water inlet pipe (13), and a plurality of water inlet holes (15) which are communicated with the water inlet channel (14) are formed on the outer side of the bottom surface of the vortex channel (12);
the connecting part (2) is formed with a male spigot (21) matched with the female spigot (11), the male spigot (21) is inserted and fixed in the female spigot (11), and the lower bottom surface of the female spigot (21) is pressed against the upper end surface of the vortex channel (12); a water outlet pipe (22) communicated with the vortex channel (12) is formed in the middle of the male end (21), and the water outlet pipe (22) and the water inlet pipe (13) are coaxially arranged and are positioned on the outer side of the water inlet pipe (13);
the isolating pipe (4) is inserted between the water outlet pipe (22) and the water inlet pipe (13), and the lower end of the isolating pipe (4) is fixed on the bottom surface of the vortex channel (12);
the water inlet and outlet part (3) is formed with four-level step holes (31) with diameters decreasing from bottom to top, the side wall of the water inlet and outlet part (3) is formed with a water outlet interface (32) communicated with the second-level holes of the four-level step holes (31), and the upper bottom surface of the water inlet and outlet part (3) is formed with a water inlet interface (33) communicated with the fourth-level holes of the four-level step holes (31); the upper end of the water outlet pipe (22) is hinged to a first-stage hole of the four-stage step hole (31) through a first sealing bearing (51), and the upper end of the isolating pipe (4) is hinged to a third-stage hole of the four-stage step hole (31) through a second sealing bearing (52);
a pair of symmetrically arranged connecting blocks (23) is formed on the connecting part (2);
and a sealing ring (53) is sleeved on the outer wall of the upper end of the water inlet pipe (13), and the sealing ring (53) is pressed against the inner wall of the upper end of the isolation pipe (4).
2. The chemical mechanical polishing head of claim 1, wherein: gaps are reserved between the outer wall of the isolation pipe (4) and the inner wall of the water outlet pipe (22) and between the inner wall of the isolation pipe (4) and the outer wall of the water inlet pipe (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110895810.8A CN113561055A (en) | 2020-07-30 | 2020-07-30 | Chemical mechanical grinding head |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110895810.8A CN113561055A (en) | 2020-07-30 | 2020-07-30 | Chemical mechanical grinding head |
| CN202010752452.0A CN111843832B (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical mechanical grinding |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010752452.0A Division CN111843832B (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical mechanical grinding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113561055A true CN113561055A (en) | 2021-10-29 |
Family
ID=72946562
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110895810.8A Withdrawn CN113561055A (en) | 2020-07-30 | 2020-07-30 | Chemical mechanical grinding head |
| CN202110896608.7A Withdrawn CN113500524A (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical machinery |
| CN202010752452.0A Active CN111843832B (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical mechanical grinding |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110896608.7A Withdrawn CN113500524A (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical machinery |
| CN202010752452.0A Active CN111843832B (en) | 2020-07-30 | 2020-07-30 | Water-cooled grinding head for chemical mechanical grinding |
Country Status (1)
| Country | Link |
|---|---|
| CN (3) | CN113561055A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114559365A (en) * | 2022-02-09 | 2022-05-31 | 洛阳师范学院 | Robot PCB board grinder based on artificial intelligence thing networking |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113211218B (en) * | 2021-07-09 | 2021-09-03 | 南通恒祥木业有限公司 | Surface flattening equipment for wood product processing |
| CN113732940A (en) * | 2021-09-29 | 2021-12-03 | 上海华力集成电路制造有限公司 | Wafer constant temperature grinding system, wafer constant temperature control method and readable storage medium |
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| CN101549484A (en) * | 2009-05-07 | 2009-10-07 | 清华大学 | A polishing disk with internal circulated cooling |
| EP2228173A2 (en) * | 2009-03-14 | 2010-09-15 | Boris Dipl.-Ing. Kochanski | Polishing or grinding device with a pneumatic drive |
| CN102091994A (en) * | 2010-12-11 | 2011-06-15 | 昆明台兴精密机械有限责任公司 | Cooling device for spindle grinding disc of wafer single-side polishing machine |
| CN102626902A (en) * | 2012-04-28 | 2012-08-08 | 浙江昀丰新能源科技有限公司 | Cooling device for one-side grinding and polishing machine |
| JP2014039969A (en) * | 2012-08-21 | 2014-03-06 | Koyo Mach Ind Co Ltd | Plane grinding method and coolant supply device of plane grinder |
| CN203887677U (en) * | 2014-03-26 | 2014-10-22 | 广东工业大学 | Lower plate driving structure of plane grinding machine |
| CN108356708A (en) * | 2018-02-22 | 2018-08-03 | 清华大学 | Concatenate cooling polishing turntable and polishing turntable cooling system |
| CN109015343A (en) * | 2017-06-08 | 2018-12-18 | 创技股份有限公司 | Grinding device |
| CN110883696A (en) * | 2019-12-10 | 2020-03-17 | 西安奕斯伟硅片技术有限公司 | Water cooling system for upper polishing disc |
| CN111070079A (en) * | 2019-12-31 | 2020-04-28 | 浙江芯晖装备技术有限公司 | Driving device of polishing disc |
| CN111230741A (en) * | 2020-03-17 | 2020-06-05 | 西安奕斯伟硅片技术有限公司 | Polishing disk cooling structure, polishing disk and polishing machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3201833B2 (en) * | 1992-07-27 | 2001-08-27 | 東芝機械株式会社 | Processing surface plate for polishing |
| JP3693483B2 (en) * | 1998-01-30 | 2005-09-07 | 株式会社荏原製作所 | Polishing equipment |
| JP4059567B2 (en) * | 1998-06-30 | 2008-03-12 | 東京エレクトロン株式会社 | Sample polishing apparatus and chemical mechanical polishing method |
| CN202726714U (en) * | 2012-07-06 | 2013-02-13 | 元亮科技有限公司 | Grinding polishing disk with circulation water cooling device |
| CN208595317U (en) * | 2018-05-07 | 2019-03-12 | 龙沐荣 | A kind of multi-layer vacuum cavity instlated tubular |
| CN210210008U (en) * | 2019-06-28 | 2020-03-31 | 德淮半导体有限公司 | Chemical mechanical polishing cooling device |
-
2020
- 2020-07-30 CN CN202110895810.8A patent/CN113561055A/en not_active Withdrawn
- 2020-07-30 CN CN202110896608.7A patent/CN113500524A/en not_active Withdrawn
- 2020-07-30 CN CN202010752452.0A patent/CN111843832B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2228173A2 (en) * | 2009-03-14 | 2010-09-15 | Boris Dipl.-Ing. Kochanski | Polishing or grinding device with a pneumatic drive |
| CN101549484A (en) * | 2009-05-07 | 2009-10-07 | 清华大学 | A polishing disk with internal circulated cooling |
| CN102091994A (en) * | 2010-12-11 | 2011-06-15 | 昆明台兴精密机械有限责任公司 | Cooling device for spindle grinding disc of wafer single-side polishing machine |
| CN102626902A (en) * | 2012-04-28 | 2012-08-08 | 浙江昀丰新能源科技有限公司 | Cooling device for one-side grinding and polishing machine |
| JP2014039969A (en) * | 2012-08-21 | 2014-03-06 | Koyo Mach Ind Co Ltd | Plane grinding method and coolant supply device of plane grinder |
| CN203887677U (en) * | 2014-03-26 | 2014-10-22 | 广东工业大学 | Lower plate driving structure of plane grinding machine |
| CN109015343A (en) * | 2017-06-08 | 2018-12-18 | 创技股份有限公司 | Grinding device |
| CN108356708A (en) * | 2018-02-22 | 2018-08-03 | 清华大学 | Concatenate cooling polishing turntable and polishing turntable cooling system |
| CN110883696A (en) * | 2019-12-10 | 2020-03-17 | 西安奕斯伟硅片技术有限公司 | Water cooling system for upper polishing disc |
| CN111070079A (en) * | 2019-12-31 | 2020-04-28 | 浙江芯晖装备技术有限公司 | Driving device of polishing disc |
| CN111230741A (en) * | 2020-03-17 | 2020-06-05 | 西安奕斯伟硅片技术有限公司 | Polishing disk cooling structure, polishing disk and polishing machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114559365A (en) * | 2022-02-09 | 2022-05-31 | 洛阳师范学院 | Robot PCB board grinder based on artificial intelligence thing networking |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113500524A (en) | 2021-10-15 |
| CN111843832A (en) | 2020-10-30 |
| CN111843832B (en) | 2021-09-07 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20211029 |