CN113533924B - Double-sided electrode high-power device testing device - Google Patents

Double-sided electrode high-power device testing device Download PDF

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Publication number
CN113533924B
CN113533924B CN202110929063.5A CN202110929063A CN113533924B CN 113533924 B CN113533924 B CN 113533924B CN 202110929063 A CN202110929063 A CN 202110929063A CN 113533924 B CN113533924 B CN 113533924B
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piece
double
tested
electrode
out terminal
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CN113533924A (en
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杨英坤
董成龙
代方
李俊焘
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Institute of Electronic Engineering of CAEP
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Institute of Electronic Engineering of CAEP
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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Abstract

The invention provides a double-sided electrode high-power device testing device which comprises a positioning base, a high-current leading-out terminal, a switching column, a spring piece and a crimping fixed cover, wherein a positioning groove is formed in the middle of the positioning base; a high-current leading-out terminal and a switching column are arranged in the positioning groove, and a piece to be tested is placed on the high-current leading-out terminal; two ends of the spring piece are respectively connected to the switching column and the top electrode of the piece to be tested; the fastening bolt on the fixing cover is screwed, and the spring piece and the piece to be tested are tightly pressed to form compression joint, so that electrode switching is realized; the insulating liquid filled in the cavity in the positioning groove can form a liquid insulation test environment. The invention is suitable for testing and installing high-power devices with different thicknesses and different structural shapes and double-sided electrode structures, realizes the installation and test of devices with different power grades and double-sided electrode special-shaped structures, can be used for the primary detection of the electrical performance in the middle process, has strong operability and wide application, and improves the testing efficiency of the devices.

Description

Double-sided electrode high-power device testing device
Technical Field
The invention relates to the field of power device packaging test, in particular to a double-sided electrode high-power device testing device.
Background
At present, the development of a power semiconductor device is rapid, the packaging form of the power device mainly comprises the packaging of the traditional direct-insertion type and the packaging of a power module structure, along with the continuous development of the power device, the requirements on high temperature resistance, high pressure resistance, miniaturization, high density packaging structures are gradually increased, the packaging technology is also continuously developed, the packaging of the structural forms such as double-sided radiating module, small-size packaging integration and the like is realized, most of integrated structures belong to self-design structures, electrodes are distributed on the front side, the back side and even the side edges, the corresponding packaging structures are required to be subjected to electrical performance test in the processing and production process and after products are generated, the traditional plug-in type pin power module is subjected to the test through connection modes such as a jointing clamp and a welding lead, the packaging structure of the double-sided electrode surface-mounted pin cannot realize electrode lead-out through the jointing clamp, the problem that the device is damaged in the welding process exists due to the lead-out mode itself, the multi-step welding technology is increased, and the working efficiency is greatly reduced.
For common structures, such as TO series power modules, there are clamps that are suitable for holding the device and extracting the electrodes. However, for the double-sided electrode high-power module, a testing device capable of realizing device fixing and electrode extraction is not found at present, meanwhile, the manufacturing process of the double-sided electrode structural device is relatively complex, the middle process electrical performance detection is required to be carried out so as to eliminate early failure, the product yield is improved, the middle process electrical performance test is required to have a specific protection environment, and a suitable testing device is not found at present.
Therefore, for this testing bottleneck, a testing device for a double-sided electrode high-power device needs to be designed.
Disclosure of Invention
The invention aims to provide a double-sided electrode high-power device testing device, which can not only realize the fixation of a double-sided electrode structural member so as to effectively and reliably connect electrodes, but also provide different testing environments so as to increase the insulation performance of an external environment, improve the testing efficiency, realize the electrical performance test in the middle process, meet the high withstand voltage and high current testing requirement of a high-power device with a double-sided electrode packaging structure and improve the yield of the device.
The technical scheme of the invention is as follows:
a double-sided electrode high-power device testing device is characterized in that: the high-voltage power supply comprises a positioning base, a high-current leading-out terminal, a switching column, a spring piece and a pressure welding fixed cover, wherein a positioning groove is formed in the middle of the positioning base;
the bottom of the positioning groove is provided with a high-current leading-out terminal and a switching column in a penetrating way, a piece to be tested is placed on the high-current leading-out terminal, one end of a spring piece is connected to the upper end of the switching column, and the other end of the spring piece is pressed on an electrode at the top of the piece to be tested through an elastic lower pressure; wherein the bearable current of the high-current leading-out terminal is more than 100A;
the middle of the compression joint fixing cover is provided with a fastening bolt in a penetrating way, the bottom of the fastening bolt is downwards pressed on the spring piece by screwing the fastening bolt, and the spring piece is gradually compressed with the piece to be tested to form a compression joint relation along with the downwards screwing of the fastening bolt;
and the cavity in the positioning groove is filled with insulating liquid to form a liquid insulation test environment.
For the structure inside the positioning groove, the following can be further designed:
the shape of the positioning groove can realize the transverse positioning of the to-be-tested piece, can provide a liquid insulation test environment for the to-be-tested piece, realizes high voltage resistance test, is suitable for intermediate process test, provides environmental protection, and avoids damaging samples.
Two or more heavy current leading-out terminals are arranged at the bottom of the positioning groove in a penetrating way, and the to-be-tested piece is placed on all the heavy current leading-out terminals.
Preferably, sealing gaskets are arranged between the positioning grooves and the penetrating installation positions of the high-current leading-out terminals and the switching columns so as to prevent the insulating liquid from overflowing.
Preferably, the high-current leading-out terminal is installed with the positioning base in a threaded connection mode, and meanwhile, the matched sealing ring is matched, so that the overflow of insulating liquid can be effectively prevented.
Preferably, the crimp surface of the top end of the heavy current leading-out terminal is coated with a soft conductive coating, and the heavy current leading-out terminal is in large-area contact with the electrode of the to-be-tested piece through the soft conductive coating; furthermore, the high-current leading-out terminal is made of copper material, so that the current carrying capacity of high current can be realized.
Preferably, the soft conductive coating can be nano silver soldering paste or silver conductive adhesive, and the like, and has strong conductive capability and strong stability.
Preferably, the insulating liquid adopts an electronic fluoridation liquid, so that a high-pressure-resistant testing environment can be provided, and the fluorine oil can be volatilized automatically and cannot influence the next process of a test piece.
For the structure of the transfer post, the following can be further designed:
the switching post is including detecting switching post and electrode switching post, all is provided with the spring leaf on detecting switching post and the electrode switching post. Therefore, the two contact ends of the spring piece are respectively a spring piece probe compression joint end and a spring piece fixing end gasket, wherein the spring piece fixing end gasket is used for being fixedly connected with a high-current leading-out terminal, and the spring piece probe compression joint end is in compression joint with an electrode at the top of a piece to be tested through elasticity, so that device electrode leading-out is realized.
Moreover, the fastening bolt is connected with the spring piece and the electrode of the switching column, so that the height difference caused by electrode protrusion can be counteracted, the crimping quality detection can be realized, and the crimping reliability is ensured.
Preferably, a matched nut and a matched gasket can be arranged between the spring piece and the switching column, and the thicknesses of the nut and the gasket are selected, so that not only can the contact leading-out of the double-sided electrode of the device be realized, but also the device can be suitable for to-be-tested pieces with different thicknesses.
For the structure of the positioning base and the crimping fixing cover, the following can be further designed:
the permanent magnets are respectively embedded and arranged at the positions corresponding to the positioning base and the crimping fixing cover, so that the alignment and the fixation of the testing device can be realized, and the replacement of the piece to be tested can be realized easily.
And the bottom of the positioning base is provided with a PCB test board through a positioning fixing bolt.
Preferably, the positioning base and the crimping fixing cover are made of polyether-ether-ketone resin (PEEK) or ceramic, and have the characteristics of high temperature resistance, easiness in processing and strong insulativity.
In the whole, preferably, the heavy current leading-out terminal, the switching post and the spring piece are all copper structural members, and can be designed and customized according to the electrode size of the piece to be tested and the test requirement.
The invention has the beneficial effects that:
(1) The high-current leading-out terminal used in the invention can realize the leading-out of high current, and can realize the test requirements of different current values by adjusting the size of the high-current leading-out terminal;
(2) According to the invention, through crimping of the switching column, the spring piece and the fastening bolt, the switching and leading-out of the electrodes with different surfaces are realized, so that the test connection is convenient;
(3) According to the invention, a liquid insulation test environment can be provided through the positioning groove, so that the manufacturing process of the to-be-tested piece and the high-voltage test requirement after the manufacturing is completed are realized;
(4) The invention has simple structure, strong operability and general applicability, and can adapt to various sizes of to-be-detected pieces by adjusting the size of the positioning groove;
(5) For the two-electrode or multi-electrode and double-sided electrode structure with different power levels, the invention can realize the installation test by only adjusting the positions, the size thickness and the sectional area of the components such as the high-current leading-out terminal, the switching post, the fastening bolt and the like, thereby not only avoiding the damage of the welding wire leading-out test to the tested piece, but also being applied to the primary detection of the electrical property of the intermediate link, realizing the process detection, eliminating the initial failure, greatly improving the testing efficiency of the device and increasing the manufacturing yield of the product.
Drawings
Fig. 1 is a schematic view of a longitudinal sectional structure of the present invention.
Fig. 2 is a top view of the positioning base of the present invention.
Fig. 3 is a top view of the crimp fixing cover of the present invention.
Fig. 4 is a schematic view of a spring plate according to the present invention.
Fig. 5 is a schematic diagram of electrode distribution of a part to be tested according to an embodiment of the present invention.
Wherein: 1. 16-fastening bolts, 2-crimping fixing covers, 3-permanent magnets, 4-positioning bases, 5-positioning grooves, 6-positioning fixing bolts, 7-detection switching columns, 8-soft conductive coatings, 9-high-current lead-out terminals, 10-sealing gaskets, 11-electrode switching columns, 12-gaskets, 13-nuts, 14-spring pieces, 14.1-spring piece probe crimping ends, 14.2-spring piece fixing end gaskets, 15-insulating liquid, 17-to-be-tested pieces, 17.1-electrodes I, 17.2-electrodes II, 17.3-electrodes III and 18-PCB test boards.
Detailed Description
The following description of the embodiments of the present invention will be made in detail with reference to the accompanying drawings, wherein it is apparent that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
The embodiment of the invention provides a double-sided electrode high-power device testing device, which comprises a positioning base 4, a high-current leading-out terminal 9, a switching column, a spring piece 14 and a crimping fixing cover 2, as shown in figure 1.
The bottom of the positioning groove 5 is provided with a high-current leading-out terminal 9 and a switching column in a penetrating mode, a piece 17 to be tested is placed on the high-current leading-out terminal 9, and the current which can be born by the high-current leading-out terminal 9 is larger than 100A.
One end of the spring piece 14 is connected to the upper end of the transfer column, and the other end of the spring piece 14 is in contact with an electrode at the top of the piece 17 to be tested through elastic downward pressing.
The middle of the compression joint fixing cover 2 is provided with fastening bolts 1 and 16 in a penetrating manner, the bottoms of the fastening bolts 1 and 16 are pressed downwards on the spring piece 14 by screwing the fastening bolts 1 and 16, and the spring piece 14 is gradually pressed with the piece 17 to be tested to form a compression joint relationship along with the downward screwing of the fastening bolts 1 and 16.
The cavity in the positioning groove 5 is filled with insulating liquid 15 to form a liquid insulation test environment. Preferably, the insulating liquid 15 may be an electronic fluorinated liquid, which not only provides a high pressure-resistant testing environment, but also allows the fluorine oil to volatilize itself, so as not to affect the next process of the test piece.
Example 2
Based on the structure of embodiment 1, it is possible to further design as follows:
the positioning groove 5 can be used for realizing the transverse positioning of the to-be-tested piece 17, providing a liquid insulation test environment for the to-be-tested piece 17, realizing high voltage withstand test, being suitable for intermediate process test, providing environmental protection and avoiding damaging samples.
Two or more heavy current leading-out terminals 9 are arranged at the bottom of the positioning groove 5 in a penetrating way, and the to-be-tested piece is placed on all the heavy current leading-out terminals. As shown in fig. 2 to 3, in the present embodiment, four large current lead-out terminals 9 are designed.
Sealing gaskets 10 are arranged between the positioning grooves 5 and all the penetrating installation positions of the high-current leading-out terminals 9 and the switching columns.
The high-current leading-out terminal 9 and the positioning base 4 are installed in a threaded connection mode, and meanwhile, an appropriate sealing ring is matched, so that the insulating liquid 15 can be effectively prevented from overflowing.
Example 3
Based on the structure of embodiment 2, it is possible to further design as follows:
the crimping surface of the top end of the heavy current leading-out terminal 9 is coated with a soft conductive coating 8, and the heavy current leading-out terminal can realize large-area contact with the electrode of the to-be-tested piece through the soft conductive coating 8.
Preferably, the soft conductive coating 8 may be nano silver solder paste or silver conductive adhesive, and has strong conductivity and stability.
Example 4
Based on any of the structures of embodiments 1-3, it is further contemplated that:
the switching post comprises a detection switching post 7 and an electrode switching post 11, and spring pieces 14 are arranged on the detection switching post 7 and the electrode switching post 11.
As shown in fig. 4, the two contact ends of the spring piece 14 are a spring piece probe press-connection end 14.1 and a spring piece fixing end gasket 14.2, wherein the spring piece fixing end gasket 14.2 is fixedly connected to the high-current lead-out terminal 9, and the spring piece probe press-connection end 14.1 is pressed against an electrode at the top of the piece to be tested 17 through elasticity.
Moreover, the fastening bolts 1 and 16 are connected with the spring piece 14 and the electrode of the transfer column, so that not only can the height difference caused by electrode protrusion be counteracted, but also the crimping quality detection can be realized, and the crimping reliability is ensured.
Preferably, a proper nut 13 and a proper gasket 12 can be arranged between the spring piece 14 and the transfer column, and the thicknesses of the nut 13 and the gasket 12 are selected, so that not only can the contact leading-out of the double-sided electrode of the device be realized, but also the device can be suitable for the to-be-tested pieces with different thicknesses.
Example 5
Based on any of the structures of embodiments 1-4, it is further contemplated that:
the permanent magnets are respectively embedded and arranged at the positions corresponding to the positioning base 4 and the crimping fixing cover 2, so that the alignment and the fixation of the testing device can be realized, and the replacement of the to-be-tested piece can be realized easily.
And the bottom of the positioning base is provided with a PCB test board through a positioning fixing bolt.
Preferably, the positioning base 4 and the crimping fixing cover 2 are made of polyether-ether-ketone resin (PEEK) or ceramic, and have the characteristics of high temperature resistance, easiness in processing and strong insulativity.
Example 6
For the above embodiments 1-5, in general, the high current lead-out terminal, the switching post and the spring piece are all structural members made of copper materials, and can be designed and customized according to the electrode size and the test requirement of the to-be-tested piece.
For the double-sided electrode structure of two or more electrodes, the installation test can be realized in the same way only by correspondingly adjusting the size of the positioning groove 5, the positions of the high-current lead-out terminal 9, the switching posts 7 and 11 and the fastening bolts 1 and 16. As shown in fig. 5, in this embodiment, the to-be-tested piece 17 is exemplified by a power device with a three-electrode double-sided electrode structure, and the to-be-tested piece 17 includes an electrode one 17.1, an electrode two 17.2 and an electrode three 17.3, and the working process for testing the to-be-tested piece 17 by adopting the testing device is as follows:
1) Fixing the testing device in the PCB testing board 18 through the positioning fixing bolt 6, wherein through holes are formed in the PCB testing board 18 corresponding to the positioning fixing bolt 6 and the positions of the extraction electrodes, and the extraction electrode through holes are subjected to wall-hanging copper plating electroplating to realize electrode extraction;
2) Placing the piece 17 to be measured in the positioning groove 5 for fixation;
3) Adjusting the electrode switching column 11, the corresponding nut 13 and the gasket 12, adapting to the thickness of the device, adjusting the spring piece 14 to be aligned to the position right above the upper surface electrode, and fixing the spring piece 14;
4) Adding an insulating liquid 15 to submerge the device, wherein the height of the device can exceed 1-2 mm;
5) Placing a compression joint fixing cover 2, and aligning and fixing the compression joint fixing cover and a positioning base 4 through a permanent magnet 3;
6) The basis for the judgment of the rotary tightening bolts 1, 16 is: the fastening bolt 1 and the detection switching post 7 realize electrode conduction, and the fastening bolt 16 and the detection switching post 11 realize electrode conduction;
7) And performing an electrical performance test.

Claims (10)

1. A double-sided electrode high-power device testing device is characterized in that: the high-voltage power supply device comprises a positioning base (4), a high-current lead-out terminal (9), a switching column, a spring piece (14) and a crimping fixed cover (2), wherein a positioning groove (5) is formed in the middle of the positioning base (4), the positioning groove (5) is customized according to the structural shape of a piece to be tested, the crimping fixed cover (2) covers the top of the positioning base (4), and the contact surface of the crimping fixed cover (2) and the top of the positioning base (4) is connected through a permanent magnet (3); the current born by the high-current leading-out terminal (9) is more than 100A;
the bottom of the positioning groove (5) is provided with a high-current leading-out terminal (9) and a switching column in a penetrating way, a piece (17) to be tested is placed on the high-current leading-out terminal (9), one end of a spring piece (14) is connected to the upper end of the switching column, and the other end of the spring piece (14) is pressed on an electrode at the top of the piece (17) to be tested through elasticity, so that electrode switching is realized;
the middle of the compression joint fixing cover (2) is provided with a fastening bolt in a penetrating way, the bottom of the fastening bolt is downwards pressed on the spring piece (14) by screwing the fastening bolt, and the spring piece (14) and the piece (17) to be tested are gradually compressed to form a compression joint relation along with the downwards screwing of the fastening bolt;
the cavity in the positioning groove (5) is filled with insulating liquid (15) to form a liquid insulation test environment.
2. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: two or more large-current leading-out terminals (9) are arranged at the bottom of the positioning groove (5) in a penetrating way, and a piece (17) to be tested is placed on all the large-current leading-out terminals (9); sealing gaskets (12) are arranged between the positioning grooves (5) and the penetrating installation positions of the high-current leading-out terminals (9) and the switching columns.
3. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the high-current leading-out terminal (9) is installed with the positioning base (4) in a threaded connection mode, and matched sealing rings are matched.
4. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the crimping surface of the top end of the high-current leading-out terminal (9) is coated with a soft conductive coating (8); the soft conductive coating (8) is nano silver soldering paste or silver conductive adhesive.
5. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the insulating liquid (15) adopts electronic fluoridation liquid.
6. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the switching column comprises a detection switching column (7) and an electrode switching column (11), and spring pieces (14) are arranged on the detection switching column (7) and the electrode switching column (11); a matched nut (13) and a gasket (12) are arranged between the spring piece (14) and the transfer column, and the thicknesses of the nut (13) and the gasket (12) are selected to be suitable for pieces (17) to be tested with different thicknesses.
7. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the permanent magnets (3) are respectively embedded and arranged at the corresponding positions of the positioning base (4) and the crimping fixed cover (2) in an aligned and fixed mode.
8. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the bottom of the positioning base (4) is provided with a PCB test board (18) through a positioning fixing bolt (6).
9. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the positioning base (4) and the crimping fixing cover (2) are made of polyether-ether-ketone resin or ceramic.
10. The double-sided electrode high-power device testing apparatus according to claim 1, wherein: the high-current leading-out terminal (9), the switching column and the spring piece (14) are structural members made of copper materials, and design customization is carried out according to the electrode size and the testing requirement of the piece (17) to be tested.
CN202110929063.5A 2021-08-13 2021-08-13 Double-sided electrode high-power device testing device Active CN113533924B (en)

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JP2005345271A (en) * 2004-06-03 2005-12-15 Akita Denshi Systems:Kk Test socket and manufacturing method of semiconductor device
TWM306388U (en) * 2006-06-30 2007-02-11 Chroma Ate Inc Semiconductor member test machine with an airway for heat sink
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CN105759086A (en) * 2016-05-11 2016-07-13 深圳市顺天祥电子有限公司 Mini-connector test probe module for circuit board
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CN109828125A (en) * 2019-03-15 2019-05-31 珠海市运泰利自动化设备有限公司 Simple clamp is used in a kind of manual PCB debugging
CN110456246A (en) * 2019-06-18 2019-11-15 天津工业大学 A kind of the test circuit and compression bonding apparatus of high frequency power semiconductor devices
CN111983439A (en) * 2019-05-23 2020-11-24 河南许继仪表有限公司 Relay positioning testing device and relay testing equipment using same
CN112216670A (en) * 2020-11-05 2021-01-12 全球能源互联网研究院有限公司 Packaging structure and packaging method of high-voltage power semiconductor chip
CN113125813A (en) * 2021-04-20 2021-07-16 深圳市成蝶科技有限公司 PCB function test fixture and test method

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005345271A (en) * 2004-06-03 2005-12-15 Akita Denshi Systems:Kk Test socket and manufacturing method of semiconductor device
TWM306388U (en) * 2006-06-30 2007-02-11 Chroma Ate Inc Semiconductor member test machine with an airway for heat sink
CN204789953U (en) * 2015-07-20 2015-11-18 航天科工防御技术研究试验中心 High -power power module smelts frock always
CN105759086A (en) * 2016-05-11 2016-07-13 深圳市顺天祥电子有限公司 Mini-connector test probe module for circuit board
CN108519547A (en) * 2018-03-28 2018-09-11 中国工程物理研究院电子工程研究所 SiC-GTO device state monitoring methods based on DTW and SVM
CN109828125A (en) * 2019-03-15 2019-05-31 珠海市运泰利自动化设备有限公司 Simple clamp is used in a kind of manual PCB debugging
CN111983439A (en) * 2019-05-23 2020-11-24 河南许继仪表有限公司 Relay positioning testing device and relay testing equipment using same
CN110456246A (en) * 2019-06-18 2019-11-15 天津工业大学 A kind of the test circuit and compression bonding apparatus of high frequency power semiconductor devices
CN112216670A (en) * 2020-11-05 2021-01-12 全球能源互联网研究院有限公司 Packaging structure and packaging method of high-voltage power semiconductor chip
CN113125813A (en) * 2021-04-20 2021-07-16 深圳市成蝶科技有限公司 PCB function test fixture and test method

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