CN113529080A - 一种用于pcb微型铣刀的涂层 - Google Patents
一种用于pcb微型铣刀的涂层 Download PDFInfo
- Publication number
- CN113529080A CN113529080A CN202110811838.9A CN202110811838A CN113529080A CN 113529080 A CN113529080 A CN 113529080A CN 202110811838 A CN202110811838 A CN 202110811838A CN 113529080 A CN113529080 A CN 113529080A
- Authority
- CN
- China
- Prior art keywords
- layer
- coating
- tin
- thickness
- milling cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110811838.9A CN113529080B (zh) | 2021-07-19 | 2021-07-19 | 一种用于pcb微型铣刀的涂层 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110811838.9A CN113529080B (zh) | 2021-07-19 | 2021-07-19 | 一种用于pcb微型铣刀的涂层 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113529080A true CN113529080A (zh) | 2021-10-22 |
CN113529080B CN113529080B (zh) | 2023-03-31 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202110811838.9A Active CN113529080B (zh) | 2021-07-19 | 2021-07-19 | 一种用于pcb微型铣刀的涂层 |
Country Status (1)
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CN (1) | CN113529080B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114381689A (zh) * | 2022-01-10 | 2022-04-22 | 欧伊翔 | 一种刀具用梯度纳米涂层、制备设备及方法 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20080055737A (ko) * | 2006-12-15 | 2008-06-19 | 산드빅 인터렉츄얼 프로퍼티 에이비 | 코팅된 절삭 공구 |
EP2336383A1 (en) * | 2009-12-04 | 2011-06-22 | Sandvik Intellectual Property AB | Multilayered coated cutting tool |
CN104131250A (zh) * | 2014-07-25 | 2014-11-05 | 广东工业大学 | 一种梯度成分设计的纳米复合刀具涂层及其制备方法 |
CN104260440A (zh) * | 2014-09-25 | 2015-01-07 | 温岭市温峤友德工具厂 | 一种含有铝钛硅钇氮的纳米复合涂层刀具及其制作方法 |
CN104928638A (zh) * | 2015-05-21 | 2015-09-23 | 广东工业大学 | 一种AlCrSiN基多层纳米复合刀具涂层及其制备方法 |
CN105624618A (zh) * | 2016-02-11 | 2016-06-01 | 广东工业大学 | TiAlSiZrN基复合涂层、具有该复合涂层的梯度超细硬质合金刀具及其制备方法 |
CN109576643A (zh) * | 2018-12-27 | 2019-04-05 | 科汇纳米技术(深圳)有限公司 | 一种TiSiVN多组元复合梯度刀具涂层及其制备方法 |
CN111676449A (zh) * | 2020-06-21 | 2020-09-18 | 威士精密工具(上海)有限公司 | 具有多梯度涂层的刀具及制备方法 |
WO2021069492A1 (en) * | 2019-10-11 | 2021-04-15 | Seco Tools Ab | A coated cutting tool |
EP3839097A1 (en) * | 2019-12-19 | 2021-06-23 | Walter Ag | A coated cutting tool |
-
2021
- 2021-07-19 CN CN202110811838.9A patent/CN113529080B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20080055737A (ko) * | 2006-12-15 | 2008-06-19 | 산드빅 인터렉츄얼 프로퍼티 에이비 | 코팅된 절삭 공구 |
EP2336383A1 (en) * | 2009-12-04 | 2011-06-22 | Sandvik Intellectual Property AB | Multilayered coated cutting tool |
CN104131250A (zh) * | 2014-07-25 | 2014-11-05 | 广东工业大学 | 一种梯度成分设计的纳米复合刀具涂层及其制备方法 |
CN104260440A (zh) * | 2014-09-25 | 2015-01-07 | 温岭市温峤友德工具厂 | 一种含有铝钛硅钇氮的纳米复合涂层刀具及其制作方法 |
CN104928638A (zh) * | 2015-05-21 | 2015-09-23 | 广东工业大学 | 一种AlCrSiN基多层纳米复合刀具涂层及其制备方法 |
CN105624618A (zh) * | 2016-02-11 | 2016-06-01 | 广东工业大学 | TiAlSiZrN基复合涂层、具有该复合涂层的梯度超细硬质合金刀具及其制备方法 |
CN109576643A (zh) * | 2018-12-27 | 2019-04-05 | 科汇纳米技术(深圳)有限公司 | 一种TiSiVN多组元复合梯度刀具涂层及其制备方法 |
WO2021069492A1 (en) * | 2019-10-11 | 2021-04-15 | Seco Tools Ab | A coated cutting tool |
EP3839097A1 (en) * | 2019-12-19 | 2021-06-23 | Walter Ag | A coated cutting tool |
CN111676449A (zh) * | 2020-06-21 | 2020-09-18 | 威士精密工具(上海)有限公司 | 具有多梯度涂层的刀具及制备方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114381689A (zh) * | 2022-01-10 | 2022-04-22 | 欧伊翔 | 一种刀具用梯度纳米涂层、制备设备及方法 |
CN114381689B (zh) * | 2022-01-10 | 2023-12-12 | 欧伊翔 | 一种刀具用梯度纳米涂层、制备设备及方法 |
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Publication number | Publication date |
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CN113529080B (zh) | 2023-03-31 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20221102 Address after: 361000 Unit 01, 1st Floor, No. 8003, Xiang'an West Road, Torch High tech Zone (Xiang'an) Industrial Zone, Xiamen, Fujian Applicant after: XIAMEN HONGLU LIANCHUANG TOOLS Co.,Ltd. Applicant after: Xiamen huizhituo Digital Manufacturing Technology Research Institute Co.,Ltd. Address before: 361000 610, No. 581, tonglong 2nd Road, Xiamen Torch hi tech Zone (Xiang'an) Industrial Zone, Xiamen City, Fujian Province Applicant before: XIAMEN HONGLU LIANCHUANG TOOLS Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Yicong Inventor after: Lin Haiyang Inventor after: Wang Changtai Inventor after: Li Shengle Inventor before: Lin Haiyang Inventor before: Chen Yicong Inventor before: Wang Changtai Inventor before: Li Shengle |
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CB03 | Change of inventor or designer information |