CN113522070A - Carbon dioxide dissolving module and substrate processing apparatus including the same - Google Patents
Carbon dioxide dissolving module and substrate processing apparatus including the same Download PDFInfo
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- CN113522070A CN113522070A CN202110113836.2A CN202110113836A CN113522070A CN 113522070 A CN113522070 A CN 113522070A CN 202110113836 A CN202110113836 A CN 202110113836A CN 113522070 A CN113522070 A CN 113522070A
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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Abstract
The present invention provides a carbon dioxide dissolving module and a substrate processing apparatus including the same, which can further increase the solubility of carbon dioxide gas with respect to cleaning water and maintain uniform solubility all the time, thereby minimizing or suppressing the generation of static electricity between the cleaning water and the substrate. To this end, the present invention discloses a carbon dioxide dissolving module and a substrate processing apparatus including the same, the carbon dioxide dissolving module including: a main body having a main pipe portion provided with a first pipeline that transmits cleaning water and a branch pipe portion coupled to the main pipe portion for supplying carbon dioxide gas to the first pipeline side; and a needle-type gas injection unit coupled to the main body for supplying carbon dioxide gas to the first pipe, the carbon dioxide dissolving module generating treated water having an adjusted resistivity.
Description
Technical Field
The present invention relates to a carbon dioxide dissolving module and a substrate processing apparatus including the same, and more particularly, to a carbon dioxide dissolving module for reducing the resistivity of processing water supplied to a substrate processing module to prevent generation of static electricity and a substrate processing apparatus including the same.
Background
In general, substrates used for displays, semiconductor wafers, LCDs, photomask glasses, and the like are subjected to various processing steps. For example, a surface treatment step of cleaning (cleaning), etching (etching), developing (collapsing), or peeling (peeling) the surface of the substrate with cleaning water, an etching solution, a developing solution, or the like is performed.
In addition, since the surface of the substrate is contaminated with particles and contaminants during the course of various substrate manufacturing processes including such a surface treatment process, a cleaning process is repeatedly performed to remove the particles and contaminants at stages before and after each manufacturing process.
In the cleaning process, cleaning water such as deionized water (deionized water) or ultra pure water (ultra pure water) is often used to remove particles and contaminants from the surface of the substrate. Deionized water or ultrapure water used as the cleaning water is a highly resistive substance having a very high value of resistivity (resistance) of about 18M Ω · cm. In the case of cleaning the surface of the substrate using such cleaning water, friction is generated between the cleaning water and the substrate due to the spray pressure and the spray velocity, thereby generating static electricity between the cleaning water and the substrate.
When static electricity is generated on the substrate surface by the cleaning water having a high resistivity value, a thin film or a pattern formed on the substrate surface is damaged by the static electricity, and an unexpected contaminant is attached to the substrate surface.
On the other hand, in order to prevent such static electricity generation, a method of making carbon dioxide gas (CO) has been proposed2) A method of reducing resistivity by dissolving in cleaning water sprayed onto a substrate. That is, carbon dioxide is easily ionized when dissolved in the cleaning water, so that the resistivity of the mixture is lowered, and also static electricity generation can be minimized or suppressed when sprayed to the substrate.
As an example, there is a method of dissolving carbon dioxide gas in stored wash water by directly flowing the carbon dioxide gas into a storage tank storing the wash water in a conventional carbon dioxide dissolving method, and in this case, there is a problem in that the carbon dioxide gas cannot be uniformly dissolved in a large volume of wash water stored in the storage tank.
As another example, there is a method of dissolving carbon dioxide gas in a conventional method of dissolving carbon dioxide gas by disposing a cyclone-type dissolving device on a cleaning water conveying line conveyed to a cleaning module and using the cyclone-type dissolving device. In this case, the solubility of the carbon dioxide gas can be improved to a certain level as compared with the above-described method, but there is a problem in that the consumption amount of the carbon dioxide gas which is not dissolved and discarded becomes larger than the input amount of the carbon dioxide gas in terms of the cyclone-type structural characteristics.
As a prior art document, there is korean registered patent publication No. 1450965 (published 10/15/2014).
Disclosure of Invention
Problems to be solved by the invention
The object of the present invention is to solve the existing problems. The present invention provides a carbon dioxide dissolving module which can increase solubility of carbon dioxide gas with respect to cleaning water to generate treated water having a desired resistivity value and can suppress generation of static electricity between such treated water and a substrate, and a substrate processing apparatus including the same.
Means for solving the problems
In order to achieve the above object of the present invention, a carbon dioxide dissolving module according to an embodiment of the present invention includes: a main body having a main pipe portion provided with a first pipeline that transmits cleaning water and a branch pipe portion coupled to the main pipe portion for supplying carbon dioxide gas to the first pipeline side; and a gas injection unit coupled to the body for supplying carbon dioxide gas to the first pipe.
The gas injection unit may include: a housing coupled to the branch pipe part and provided with a second pipeline transmitting carbon dioxide gas; a needle fixing block coupled to one end of the housing; and a needle portion that penetrates the needle fixing block, has a gas flow passage with an inner diameter smaller than the inner diameter of the second conduit, and has a gas ejection port that ejects carbon dioxide gas arranged to extend toward the first conduit.
Here, the washing water passing through the first pipeline is mixed with the carbon dioxide gas flowing in through the needle portion to become the treatment water having the resistivity adjusted.
In the carbon dioxide dissolving module according to an embodiment of the present invention, the needle part may include: a needle holder coupled to the needle fixing block; and a needle coupled to the needle holder, and a gas ejection port arranged to extend toward the first conduit side is arranged at a central portion of the first conduit.
In the carbon dioxide dissolving module according to the embodiment of the present invention, the gas ejection port of the needle portion may be disposed parallel to a conveying direction of the washing water.
In the carbon dioxide dissolving module according to an embodiment of the present invention, the needle fixing block may include: a fixed block main body at least a portion of which is insert-coupled to the housing; and a needle coupling hole penetratingly formed at the fixing block main body and used for coupling of the needle holder, the needle coupling hole may include: a first needle coupling hole formed at a front end portion of the fixed block main body to support an end portion of the needle holder; and a second needle coupling hole formed at a rear end portion of the fixing block main body, supporting the other end portion of the needle holder.
In the carbon dioxide dissolving module according to an embodiment of the present invention, the gas injection unit may further include a connection port coupled to the housing for connecting a gas supply line to the second pipe.
In the carbon dioxide dissolving module according to the embodiment of the present invention, the needle part may be provided in plurality at intervals that are maintained constant in the transfer direction of the washing water.
In the carbon dioxide dissolving module according to an embodiment of the present invention, the first pipe line may be formed such that the inner diameter is reduced as it is closer to the central region, so that the flow rate of the washing water is increased.
In the carbon dioxide dissolving module according to the embodiment of the present invention, the gas ejection port may be disposed at a region between a central portion and a rear end portion of the first pipeline with respect to a conveying direction of the washing water.
The carbon dioxide dissolving module according to an embodiment of the present invention may further include a buffer portion disposed downstream of the main pipe portion, including an expansion pipe having an inner diameter larger than an inner diameter of the first pipe, and configured to temporarily stop the treated water passing through the first pipe to secure an additional dissolving time of the carbon dioxide gas.
A substrate processing apparatus according to an embodiment of the present invention includes: the carbon dioxide dissolving module; a cleaning water supply unit for supplying cleaning water to the carbon dioxide dissolving module; a gas supply unit for supplying carbon dioxide gas to the carbon dioxide dissolution module; and a treated water supply module supplying the treated water generated from the carbon dioxide dissolving module to a substrate to treat the substrate, wherein carbon dioxide gas is dissolved in the rinsing water to generate treated water with an adjusted resistivity, thereby suppressing generation of static electricity during substrate treatment.
In the substrate processing apparatus according to an embodiment of the present invention, a supply pressure of the carbon dioxide gas supplied through the gas supply part may be greater than a supply pressure of the cleaning water supplied through the cleaning water supply part by 1000 pa.
In the substrate processing apparatus according to an embodiment of the present invention, a washing water pressure adjusting unit may be further included, the washing water pressure adjusting unit being disposed between the washing water supply unit and the carbon dioxide dissolving module, and adjusting a pressure of the washing water supplied to the carbon dioxide dissolving module side.
In the substrate processing apparatus according to an embodiment of the present invention, it may further include a resistivity meter disposed between the carbon dioxide dissolution module and the treated water supply module, measuring a resistivity of the treated water supplied to the treated water supply module side, wherein when a deviation occurs between the resistivity measured by the resistivity meter and a reference resistivity set in advance, it is possible to adjust a supply pressure of the cleaning water or a supply pressure of the carbon dioxide gas and compensate for the deviation of the resistivity of the treated water.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, the solubility of carbon dioxide gas with respect to the washing water can be significantly improved in a short time by injecting carbon dioxide gas of a fine size directly onto the transfer line of the washing water by the needle-shaped gas injection unit having a fine flow path.
According to the present invention, the buffer temporarily stops or delays the flow of the treated water in which the carbon dioxide gas is dissolved, thereby further improving the solubility of the carbon dioxide gas.
According to the present invention, the solubility of carbon dioxide gas in cleaning water is increased, and the solubility of carbon dioxide gas is uniformly maintained, so that the decreased resistivity value of the treatment water supplied to the surface of the substrate can be uniformly maintained at all times, thereby minimizing or suppressing the generation of static electricity between the treatment water and the substrate, and improving the quality of the substrate.
Drawings
Fig. 1 is a conceptual diagram of a substrate processing apparatus according to an embodiment of the present invention.
Fig. 2 is a diagram for explaining a carbon dioxide dissolving module according to an embodiment of the present invention.
Fig. 3 is a sectional view illustrating the carbon dioxide dissolving module of fig. 2 separated.
Fig. 4 is a sectional view illustrating a coupling state of the carbon dioxide dissolving module of fig. 2.
Fig. 5 is a sectional view illustrating the needle fixing block and the needle part of fig. 3.
Fig. 6 is an illustration diagram showing various shapes of gas ejection orifices of a needle according to an embodiment of the present invention.
Fig. 7 is a sectional illustration view showing a coupling state of a carbon dioxide dissolving module according to another embodiment of the present invention.
Fig. 8 is a sectional illustration view showing a coupling state of a carbon dioxide dissolving module according to still another embodiment of the present invention.
Fig. 9 is a diagram showing an experimental example comparing solubility of a conventional cyclone-type carbon dioxide dissolving device (a) and a carbon dioxide dissolving module (b) according to the present invention.
Fig. 10 is a graph comparing consumption amounts of carbon dioxide gas of a conventional cyclone-type carbon dioxide dissolving device and a carbon dioxide dissolving module according to the present invention.
Detailed Description
Hereinafter, preferred embodiments of the present invention that can embody the above-described problems to be solved are described with reference to the accompanying drawings. In describing the present embodiment, the same names and the same reference numerals may be used for the same structures, and additional description thereof may be omitted.
Fig. 1 is a conceptual diagram of a substrate processing apparatus according to an embodiment of the present invention.
Referring to fig. 1, the substrate processing apparatus of the present invention may include: a carbon dioxide dissolving module 100, a cleaning water supply unit 200, a gas supply unit 300, and a treated water supply module 400.
Such a substrate processing apparatus according to the present invention may be a substrate cleaning apparatus for removing particles and contaminants present at a surface of a substrate.
The carbon dioxide dissolving module 100 may dissolve carbon dioxide gas in the wash water to generate the treated water having the resistivity adjusted. The treated water thus produced can be delivered to the treated water supply module 400 side.
Such a carbon dioxide dissolving module 100 can generate a mixture with a resistivity adjusted (reduced), i.e., process water, during the flow of the washing water by directly injecting a carbon dioxide gas of a fine size into a flow region of the washing water conveyed along the washing water conveying line 201.
The carbon dioxide dissolving module 100 according to the embodiment may be disposed on the washing water transfer line 201, and may include: a body 110, a gas injection unit 130, and a buffer 150. The specific description will be described later.
The washing water supply part 200 may supply washing water to the carbon dioxide dissolution module 100 side, and may supply washing water to the carbon dioxide dissolution module 100 side at a constant pressure. For this, the washing water supply part 200 may include a pump.
In addition, the substrate processing apparatus according to the present invention may further include a cleaning water flow rate adjusting part 210 and a cleaning water pressure adjusting part 230.
The washing water flow rate adjusting part 210 may be disposed between the washing water supply part 200 and the carbon dioxide dissolving module 100, and may adjust a flow rate of the washing water transferred to the carbon dioxide dissolving module 100 side. Such a cleaning water flow rate adjusting part 210 may use a conventional flow meter.
The washing water pressure adjusting part 230 may be disposed between the washing water flow rate adjusting part 210 and the carbon dioxide dissolving module 100, and may adjust the pressure of the washing water transferred to the carbon dioxide dissolving module 100 side. A conventional regulator may be used for such a washing water pressure regulating part 230.
The washing water pressure regulator 230 can suppress the fluctuation pressure of the supply pressure of the washing water to be transferred, and always transfer the washing water to the carbon dioxide dissolving module 100 side at a uniform set pressure.
The gas supply part 300 may supply the carbon dioxide gas to the carbon dioxide dissolution module 100 side, and may supply the carbon dioxide gas to the carbon dioxide dissolution module 100 side at a constant pressure. For this, the gas supply part 300 may be a storage tank having a constant internal pressure, and may include a compressor.
In addition, the substrate processing apparatus according to the present invention may further include a gas flow rate adjusting part 310 and a gas pressure adjusting part 330.
The gas flow rate adjusting part 310 may be disposed between the gas supply part 300 and the carbon dioxide dissolving module 100, and may adjust a flow rate of the carbon dioxide gas delivered to the carbon dioxide dissolving module 100 side. Such a gas flow rate adjusting section 310 may use a conventional flow meter.
The gas pressure adjusting part 330 may be disposed between the gas flow rate adjusting part 310 and the carbon dioxide dissolving module 100, and may adjust the pressure of the carbon dioxide gas delivered to the carbon dioxide dissolving module 100 side. Such a gas pressure adjusting section 330 may also use a conventional regulator.
The supply pressure of the carbon dioxide gas supplied through the gas supply unit 300 may be set to exceed 1000Pa compared to the supply pressure of the washing water. If the carbon dioxide gas supply pressure is less than 1000Pa relative to the cleaning water supply pressure, the cleaning water flows back to the carbon dioxide dissolving module 100 and the gas supply unit 300. Therefore, it is desirable that the carbon dioxide gas supply pressure is set to exceed 1000Pa compared to the supply pressure of the washing water.
The treated water supply module 400 supplies treated water to the substrate G to be treated, and can supply the treated water generated from the carbon dioxide dissolution module 100 to the surface of the substrate G.
The processing water supply module 400 according to the embodiment may be a cleaning module, and such a processing water supply module 400 for substrate cleaning may include a pump, a filter, and a nozzle.
That is, the treatment water may be sprayed to the surface of the substrate G, thereby removing particles and contaminants present at the surface of the substrate G. At this time, the treatment water having the resistivity adjusted is supplied to the surface of the substrate G through the carbon dioxide dissolution module 100, so that the generation phenomenon of static electricity between the treatment water and the substrate G can be minimized or suppressed.
In addition, referring to fig. 2, the substrate processing apparatus according to the present invention may further include a resistivity meter 103 and a pressure meter 105.
The resistivity meter 103 may be disposed at the treated water transfer line 101 connecting the carbon dioxide dissolving module 100 and the treated water supply module 400, and may measure the resistivity of the treated water supplied to the treated water supply module 400 side.
That is, the substrate processing apparatus according to the present invention can compensate for the deviation of the resistivity value of the processing water while adjusting the supply pressure of the cleaning water or controlling the supply pressure of the gas by comparing whether the resistivity value of the processing water measured by the resistivity meter 103 deviates from the reference resistivity set in advance, and can always uniformly maintain the resistivity value of the processing water finally supplied to the substrate G.
The reference resistivity value may be set within 0.05 to 0.2M Ω · cm, and may be 0.1M Ω · cm. The supply pressure of the washing water may be adjusted using any one of the washing water supply unit 200, the washing water flow rate adjustment unit 210, and the washing water pressure adjustment unit 230, or a combination thereof. The supply pressure of the gas may be adjusted by any one of the gas supply unit 300, the gas flow rate adjustment unit 310, and the gas pressure adjustment unit 330, or by a combination thereof.
For example, when the substrate cleaning process is performed, the processing water supplied from the processing water supply module 400 to the substrate G is at a rate of 3kgf/cm2When sprayed at an internal pressure, if the resistivity value of the treated water falls within the range of 0.05 to 0.2 M.OMEGA.cm, the generation of static electricity is suppressed and stable cleaning can be achieved.
The pressure gauge 105 may be disposed at the treated water transfer line 101 connecting the carbon dioxide dissolving module 100 and the treated water supply module 400, and may measure the pressure of the treated water supplied to the treated water supply module 400 side.
Hereinafter, a carbon dioxide dissolving module according to an embodiment of the present invention will be described in detail.
Fig. 2 is a view for explaining a carbon dioxide dissolving module according to an embodiment of the present invention, fig. 3 is a sectional view illustrating the carbon dioxide dissolving module of fig. 2 in a separated state, fig. 4 is a sectional view illustrating a coupled state of the carbon dioxide dissolving module of fig. 2, and fig. 5 is a sectional view illustrating a needle fixing block and a needle part of fig. 3.
Referring additionally to fig. 2 to 5, the carbon dioxide dissolving module 100 according to an embodiment of the present invention may include: a body 110, a gas injection unit 130, and a buffer 150.
The main body 110 may be disposed on the washing water transfer line 201, and may include a main pipe part 111 and a branch pipe part 113.
The main pipe 111 may form a part of the washing water transfer line 201, and may include a first pipe line 112 that transfers washing water.
The branch pipe portion 113 may be coupled to the outer surface of the main pipe portion 111, and may include a branch pipe for supplying carbon dioxide gas to the first pipe 112.
The gas injection unit 130 may be coupled to the main body 110, and may directly supply carbon dioxide gas of a fine size to the first pipe line 112 conveying the washing water.
Here, the washing water passing through the first pipe line 112 may be mixed with the carbon dioxide gas flowing in through the needle portion 135 of the gas injection unit to become the treatment water having the resistivity adjusted.
The gas injection unit 130 may include: a housing 131, a needle fixing block 133, a needle part 135 and a connecting port 139.
The housing 131 may be coupled to the branch pipe portion 113, and may be provided with a second pipe 131a that transmits carbon dioxide gas. The case 131 according to the embodiment may be provided in a sleeve form of a hollow structure inserted into the branch pipe portion 113.
The needle fixing block 133 serves to fix the needle portion 135, is coupled to the housing 131, and at least a portion of the needle fixing block 133 is disposed on the second pipe 131 a.
Such a needle fixing block 133 may include: a fixing block main body 1331 at least a portion of which is insert-coupled to the case 131; and a needle coupling hole 1333 formed through the fixing block main body 1331 and to which the needle part 135 is coupled.
The fixing block main body 1331 may be further provided at one end portion with a flange portion 1332, and when the fixing block main body 1331 is inserted into the housing 131, the flange portion 1332 is locked and supported at the distal end portion of the housing 131 so that the insertion position of the needle fixing block 133 can be restricted.
The needle coupling hole 1333 may include: a first needle coupling hole 1333a formed at a front end portion of the fixing block main body 1331, supporting one end portion of a needle holder 136 described later; and a second needle coupling hole 1333b formed at a rear end portion of the fixing block main body 1331 to support the other end portion of the needle holder 136, which will be described later. Such first and second needle coupling holes 1333a and 1333b may have shapes corresponding to the shapes of one end (front end) and the other end (rear end) of the needle holder 136.
The needle coupling hole 1333 including the first needle coupling hole 1333a and the second needle coupling hole 1333b may support a front end portion and a rear end portion of the needle holder 136, which will be described later, in a horizontal state, and thus, a horizontal position of the needle 137 coupled to the needle holder 136 may be accurately and firmly maintained.
The needle 135 may be coupled to the needle coupling hole 1333 to penetrate the needle fixing block 133, and may have a fine gas flow path having an inner diameter smaller than that of the second pipe 131 a. At this time, the gas injection ports 1371 arranged at the end of the gas flow path may be arranged to extend toward the first conduit 112 side.
The needle portion 135 according to the embodiment may have a form like an injection needle of a disposable syringe, and may include: a needle hub 136 coupled to the needle fixing block 133; and a needle 137 coupled to needle holder 136 and arranged to extend toward first tube 112 side.
The needle 137 may be provided in a direction perpendicular to the flow direction of the washing water, and may have a fine gas flow path. The gas outlet 1371 for discharging carbon dioxide gas may be disposed on the center line CL of the first conduit 112.
As a result, the carbon dioxide gas flowing into the second pipe 131a of the housing 131 may flow into the interior of the needle holder 136, pass through the fine gas flow path of the needle 137, and be injected into the central region of the first pipe 112, where the washing water is transmitted.
The carbon dioxide gas passing through the needle 137 is discharged from the gas outlet 1371 while maximizing a contact area with the washing water, thereby being completely dissolved in a short time.
Fig. 6 is an illustration diagram showing various shapes of gas ejection orifices of a needle according to an embodiment of the present invention.
As shown in fig. 6 (a), the gas outlet port 1371a of the needle 137 may have an outlet port perpendicular to the transfer direction of the washing water, as shown in fig. 6 (b), the gas outlet port 1371b of the needle 137 may be cut such that the tip end portion is inclined to have an outlet port inclined to the transfer direction of the washing water, and as shown in fig. 6 (c), the gas outlet port 1371b of the needle 137 may be bent such that the tip end portion is parallel to the transfer direction of the washing water.
In particular, as shown in fig. 6 (b) and 6 (c), in the case where the gas ejection holes of the needle 137 are formed obliquely or arranged in parallel with respect to the transfer direction of the washing water, it is possible to prevent the washing water from flowing backward to the inside of the needle 137, and it is preferable that, as shown in fig. 6 (c), in the case where the gas ejection holes 1371c of the needle 137 are arranged in parallel with the transfer direction of the washing water, it is possible to minimize the backward flow of the washing water.
A connection port 139 may be coupled to the housing 131 to connect the gas delivery line 301 to the second conduit 131 a.
In addition, the needle part 135 may be provided in plurality at a constant interval in the washing water transfer direction. As shown, three needle portions 135 are provided, but two or more than four may be provided. As a result, the needle portions 135 may be provided in various numbers according to the size of the first pipe 112.
Although not shown, a plurality of needle units 135 may be provided at a constant interval in a direction perpendicular to the washing water conveying direction.
Although not shown, a plurality of needle portions 135 may be provided at regular intervals with respect to the cross section of the second pipe 131 a.
In addition, fig. 7 is a sectional illustration showing a coupling state of a carbon dioxide dissolving module according to another embodiment of the present invention.
Referring to fig. 7, according to another embodiment, the first pipe line 112 of the main pipe part 111 of the main body 110 may be formed to have an inner diameter that is reduced as it is closer to the central region where the needle part 135 is disposed, so that the flow rate of the transferred washing water is increased. As a result, the flow rate of the washing water passing through the first pipe 112 provided with the needle 137 can be made fast due to the venturi effect.
When the flow rate of the cleaning water is increased in this manner, the bubble size of the carbon dioxide gas discharged from the gas outlet 1371 of the needle 137 can be made smaller, the contact area with the cleaning water can be further increased, and the carbon dioxide gas can be completely dissolved in a shorter time.
In addition, fig. 8 is a sectional view illustrating a coupling state of the carbon dioxide dissolving module according to still another embodiment of the present invention, and as described above, in the case where the first pipe line 112 is formed in the venturi structure in which the inner diameter is gradually reduced as it gets closer to the central region so as to increase the flow rate of the washing water, the needle 137 of the gas injection module 130 may be disposed at the rear region of the first pipe line 112 of the venturi structure. In other words, the needle 137 of the gas injection module 130 may also be arranged at a central region of the first conduit 112 of the venturi structure, i.e. at a rear region of the central intersection plane C.
As a result, the gas ejection port 1371 of the needle 137 may be disposed at a region between the central portion and the rear end portion of the first pipe line 112 with respect to the transfer direction of the washing water.
The buffer portion 150 may be coupled to the outlet of the main pipe portion 111, and may be disposed on the treated water delivery line 101 at a distance from the main pipe portion 111.
The buffer 150 may have a length in the flow direction of the treated water, and may further include an extension line 151, and the extension line 151 may have an inner diameter larger than the inner diameter of the first line 112 or the treated water transfer line 101. In addition, the buffer part 150 may be disposed in a vertical direction.
As a result, the treated water passing through the first pipe line 112 of the main pipe part 111 is gradually filled into the extension pipe line 151 of the buffer part 150, and after the extension pipe line 151 is completely filled, it can be continuously transferred to the treated water supply line 101 through the upper outlet of the extension pipe line 151.
Thus, in the process of filling the extension line 151 of the buffer part 150 with the treatment water, the treatment water may be temporarily stagnated or delayed in delivery, and the carbon dioxide gas remaining in the treatment water may be completely dissolved while passing through the extension line 151.
Fig. 9 is a diagram showing an experimental example for comparing the solubility of the existing cyclone-type carbon dioxide dissolving device (a) and the carbon dioxide dissolving module (b) according to the present invention.
Referring to fig. 9, in the case where the treated water passes through the existing cyclone-type carbon dioxide dissolving device, as shown in (a) of fig. 9, the recognition of the bubbles is clearly illustrated, and in the case where the treated water passes through the carbon dioxide dissolving module according to the present invention, as shown in (b) of fig. 9, it is possible to confirm that the high solubility of the bubbles is not seen at all. In the experiment, the supply flow rate and the supply pressure of the cleaning water, and the supply flow rate and the supply pressure of the carbon dioxide gas were kept the same.
Fig. 10 is a graph comparing the consumption amounts of carbon dioxide gas of the conventional carbon dioxide dissolving module and the carbon dioxide dissolving module according to the present invention.
Referring to fig. 10, in order to generate treated water having the same resistivity value (0.1M Ω · cm), the consumption amount of consumed carbon dioxide gas can be reduced by nearly half in the case of the carbon dioxide dissolving module according to the present invention, compared to the existing cyclone-type carbon dioxide dissolving device.
As described above, the preferred embodiments of the present invention have been described with reference to the accompanying drawings, but those skilled in the art can make various modifications or changes to the present invention without departing from the spirit and scope of the invention as set forth in the claims.
Description of the reference numerals
100: the carbon dioxide dissolving module 110: main body
130: gas injection unit 131: shell body
133: needle fixing block 135: needle part
136: needle seat 137: needle
150: the buffer 200: cleaning water supply unit
300: gas supply unit 400: treated water supply module
Claims (13)
1. A carbon dioxide dissolving module, comprising:
a main body having a main pipe portion provided with a first pipeline that transmits cleaning water and a branch pipe portion coupled to the main pipe portion for supplying carbon dioxide gas to the first pipeline side; and
a gas injection unit coupled to the main body for supplying carbon dioxide gas to the first pipe,
the gas injection unit includes:
a housing coupled to the branch pipe part and provided with a second pipeline transmitting carbon dioxide gas;
a needle fixing block coupled to one end of the housing; and
a needle portion which is penetrated and connected to the needle fixing block, has a gas flow path having an inner diameter smaller than the inner diameter of the second conduit, and has a gas ejection port for ejecting carbon dioxide gas arranged to extend toward the first conduit,
the washing water passing through the first pipeline is mixed with the carbon dioxide gas flowing in through the needle part to become the treatment water with the regulated resistivity.
2. The carbon dioxide dissolving module according to claim 1, wherein the needle portion comprises:
a needle holder coupled to the needle fixing block; and
a needle coupled to the needle holder, and a gas ejection port arranged to extend toward the first conduit side is arranged at a central portion of the first conduit.
3. The carbon dioxide dissolving module according to claim 2, wherein the gas ejection port is provided in parallel with a conveying direction of the washing water.
4. The carbon dioxide dissolving module according to claim 2, wherein the needle fixing block comprises:
a fixed block main body at least a portion of which is insert-coupled to the housing; and
a needle combination hole which is formed at the main body of the fixed block in a penetrating way and is used for combining the needle seat,
the needle coupling hole includes:
a first needle coupling hole formed at a front end portion of the fixed block main body to support an end portion of the needle holder; and
and a second needle coupling hole formed at a rear end portion of the fixing block main body to support the other end portion of the needle holder.
5. The carbon dioxide dissolution module according to claim 1, wherein the gas injection unit further comprises a connection port coupled to the housing for connecting a gas supply line to the second pipeline.
6. The carbon dioxide dissolving module according to claim 1, wherein the needle portion is provided in plurality at a constant interval in a conveying direction of the washing water.
7. The carbon dioxide dissolving module according to claim 1, wherein the first pipe is formed such that the inner diameter is reduced as being closer to the central region, so that the flow rate of the washing water is increased.
8. The carbon dioxide dissolving module according to claim 7, wherein the gas ejection port is arranged at a region between a central portion and a rear end portion of the first pipeline with respect to a conveying direction of the washing water.
9. The carbon dioxide dissolving module according to claim 1, further comprising a buffer portion disposed downstream of the main pipe portion, having an expanded pipe having an inner diameter larger than an inner diameter of the first pipe, and configured to temporarily stop the treated water passing through the first pipe to secure an additional dissolving time of the carbon dioxide gas.
10. A substrate processing apparatus, comprising:
the carbon dioxide dissolving module according to any one of claims 1 to 9;
a cleaning water supply unit for supplying cleaning water to the carbon dioxide dissolving module;
a gas supply unit for supplying carbon dioxide gas to the carbon dioxide dissolution module; and
a treated water supply module for supplying the treated water generated from the carbon dioxide dissolving module to a substrate to treat the substrate,
carbon dioxide gas is dissolved in the cleaning water to generate treated water with adjusted resistivity, thereby suppressing the generation of static electricity during substrate treatment.
11. The substrate processing apparatus according to claim 10, wherein a supply pressure of the carbon dioxide gas supplied through the gas supply unit is greater than a supply pressure of the cleaning water supplied through the cleaning water supply unit by 1000 pa.
12. The substrate processing apparatus according to claim 10, further comprising a cleaning water pressure adjusting unit disposed between the cleaning water supply unit and the carbon dioxide dissolving module, for adjusting a pressure of the cleaning water supplied to the carbon dioxide dissolving module.
13. The substrate processing apparatus according to claim 10, further comprising a resistivity meter disposed between the carbon dioxide dissolving module and the processing water supply module, for measuring a resistivity of the processing water supplied to the processing water supply module side,
wherein, when the resistivity measured by the resistivity meter deviates from the preset reference resistivity, the supply pressure of the cleaning water or the carbon dioxide gas is adjusted to compensate the resistivity deviation of the treated water.
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|---|---|---|---|
| KR10-2020-0039297 | 2020-03-31 | ||
| KR1020200039297A KR102303107B1 (en) | 2020-03-31 | 2020-03-31 | Apparatus for melting of carbon dioxide gas and apparatus for treating substrate comprising the same |
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| CN113522070A true CN113522070A (en) | 2021-10-22 |
| CN113522070B CN113522070B (en) | 2023-08-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115055435A (en) * | 2022-07-08 | 2022-09-16 | 南京华易泰电子科技有限公司 | Water jet cleaning system utilizing ultrahigh water pressure and carbon dioxide |
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| TW200839472A (en) * | 2007-03-21 | 2008-10-01 | Liao Lih Shen | Resistivity-controlling system |
| CN101578688A (en) * | 2007-01-15 | 2009-11-11 | 芝浦机械电子株式会社 | Apparatus and method for processing substrate |
| KR20160090572A (en) * | 2015-01-22 | 2016-08-01 | 에프엔에스테크 주식회사 | Apparatus for adjusting specific resistance of ultra pure water |
| CN107207287A (en) * | 2014-12-24 | 2017-09-26 | 威立雅水务解决方案与技术支持公司 | Optimization nozzle for injecting the pressure (hydraulic) water containing dissolved gas |
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| KR20080034277A (en) * | 2006-10-16 | 2008-04-21 | 주식회사 케이씨텍 | Device for supplying cleaning solution in wet station and method to prevente static thereof |
| KR101450965B1 (en) | 2011-09-29 | 2014-10-15 | 다이닛뽕스크린 세이조오 가부시키가이샤 | Substrate Processing Apparatus and Substrate Processing Method |
| KR101342147B1 (en) * | 2012-09-06 | 2013-12-13 | 주식회사 디엠에스 | Apparatus for supplying cleaning solution |
| KR101779488B1 (en) * | 2015-06-30 | 2017-09-19 | 주식회사 아이엠티 | Micro carbon dioxide snow cleaning apparatus |
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| CN101578688A (en) * | 2007-01-15 | 2009-11-11 | 芝浦机械电子株式会社 | Apparatus and method for processing substrate |
| TW200839472A (en) * | 2007-03-21 | 2008-10-01 | Liao Lih Shen | Resistivity-controlling system |
| CN107207287A (en) * | 2014-12-24 | 2017-09-26 | 威立雅水务解决方案与技术支持公司 | Optimization nozzle for injecting the pressure (hydraulic) water containing dissolved gas |
| KR20160090572A (en) * | 2015-01-22 | 2016-08-01 | 에프엔에스테크 주식회사 | Apparatus for adjusting specific resistance of ultra pure water |
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| CN115055435A (en) * | 2022-07-08 | 2022-09-16 | 南京华易泰电子科技有限公司 | Water jet cleaning system utilizing ultrahigh water pressure and carbon dioxide |
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| KR102303107B1 (en) | 2021-09-16 |
| CN113522070B (en) | 2023-08-08 |
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