CN113520223B

CN113520223B - Crystal face machine, adjusting tool and gap adjusting method

Info

Publication number: CN113520223B
Application number: CN202110727346.1A
Authority: CN
Inventors: 李振; 王涛; 王学斌; 姜廷锋; 王生贵; 程昊天
Original assignee: Shanghai Gaussian Automation Technology Development Co Ltd
Current assignee: Shanghai Gaussian Automation Technology Development Co Ltd
Priority date: 2021-06-29
Filing date: 2021-06-29
Publication date: 2022-10-25
Anticipated expiration: 2041-06-29
Also published as: CN113520223A; WO2023273644A1

Abstract

The invention provides a crystal plane machine, an adjusting tool and a gap adjusting method, and relates to the technical field of crystal plane machines. The crystal plane machine can comprise a body, at least one working assembly and a pad withdrawing auxiliary device which is arranged corresponding to each working assembly. Each pad withdrawing auxiliary device can comprise a connecting component and a moving component, wherein the connecting component is connected with the body; the moving assembly is connected with the connecting assembly and can reciprocate relative to the connecting assembly, the moving assembly comprises a recovery state and a push-out state, and when the moving assembly is in the push-out state, the moving assembly is in contact with the working assembly to assist pad withdrawing; wherein, the relative position between the connecting assembly and the body is adjustable, so that when the moving assembly is in the reset state, the gap between the moving assembly and the corresponding working assembly is adjustable. The relative position between the connecting component and the body is adjustable, so that the clearance between the cushion withdrawing auxiliary device and the working component is adjusted, and the smooth cushion withdrawing is ensured.

Description

Crystal face machine, adjusting tool and gap adjusting method

Technical Field

The disclosure relates to the technical field of crystal plane machines, in particular to a crystal plane machine, an adjusting tool and a gap adjusting method.

Background

With the development of automation technology and artificial intelligence, the demand of intelligent robots is more and more extensive. The crystal face machine, namely the stone nursing robot can clean, maintain and renovate the stone ground, and is widely applicable to places such as commercial halls, hotels, property businesses, factories, schools, office buildings, halls and the like. The traditional crystal face machine adopts working components to care stones, in order to improve the working efficiency of the crystal face machine, a plurality of working components are arranged at the crystal face machine, and after the working components at the outermost side are used for a period of time, new working components positioned inside the crystal face machine need to be replaced, so that the working components at the outermost side need to be removed, and the process of removing the working components at the outer side is the pad removal. In the pad withdrawing process, the pad withdrawing auxiliary device of the wafer surface machine is in mutual contact friction with the working assembly, so that the working assembly can be smoothly separated from the wafer surface machine.

The cushion withdrawing auxiliary device of the crystal face machine utilizes the push-pull type electromagnet to drive the pushing assembly to contact and rub with the working assembly to withdraw the cushion. Generally, the push-pull electromagnet has a certain stroke, and the acceleration of the characteristic curve of the force and the stroke of the electromagnet is gradually increased, so that the effective stroke of the electromagnet required for achieving the expected required force can be very short. Therefore, the clearance between the pad withdrawing assembly and the working assembly needs to be adjusted to ensure the smooth pad withdrawing. The gaps between the existing cushion withdrawing auxiliary device and the working assembly are adjusted and fixed during assembly, but a lot of assembly errors are often generated during the assembly process, and the situation that the adjustment is difficult or inaccurate exists during the actual assembly process. The contact positions between the pushing assembly and the working assembly in different wafer machines are difficult to be determined uniformly, so the effect of the pad withdrawing process is greatly different, and inconvenience is brought to use. In addition, the pad withdrawing auxiliary device may be worn during use, and the pad withdrawing effect in the early stage may also be poor in contact between the pushing assembly and the working assembly due to wear in the later stage, thereby causing failure in the pad withdrawing process.

Disclosure of Invention

In view of this, the disclosed embodiment provides an adjusting tool for a crystal face machine, which at least partially solves the problems in the prior art.

In a first aspect, an embodiment of the present disclosure provides a crystal plane machine, which solves a problem in the prior art that a gap between a pad removal assisting device and a working assembly of the crystal plane machine cannot be adjusted.

According to a concrete implementation of this disclosed embodiment, this application provides a crystal face machine, includes:

a body;

at least one working assembly disposed at the body;

with each the work module corresponds the supplementary device of pad that moves back that sets up, each move back and fill up the supplementary device and include:

the connecting component is connected with the body;

the moving assembly is connected with the connecting assembly and can reciprocate relative to the connecting assembly, the moving assembly comprises a recovering state and a pushing-out state, and when the moving assembly is in the pushing-out state, the moving assembly is in contact with the working assembly to assist pad withdrawing;

wherein, the relative position between the connecting component and the body is adjustable, so that when the motion component is in the recovery state, the clearance between the motion component and the corresponding working component is adjustable.

According to a particular implementation of the disclosed embodiment, the motion assembly includes a drive assembly;

the connection assembly includes a first mounting plate;

the driving assembly is connected with the first mounting plate through a first fastener, relative positions of the connecting assembly and the driving assembly in a preset direction are adjustable through loosening the first fastener, and then a gap between the moving assembly and the working assembly in the preset direction is adjustable.

According to a specific implementation manner of the embodiment of the disclosure, the plane where the upper surface of the driving assembly is located is parallel to the plane where the first mounting plate is located, and the upper surface of the driving assembly is provided with a first threaded hole;

the first mounting plate is provided with a first strip-shaped hole, and the first fastener penetrates through the first strip-shaped hole and the first threaded hole to connect the first mounting plate with the driving assembly;

the length of the first strip-shaped hole extends along the direction parallel to the preset direction, so that when the first fastening piece is loosened, the relative position of the connecting component relative to the body in the preset direction can be adjusted.

According to a specific implementation manner of the embodiment of the present disclosure, the preset direction is a direction along a straight line formed by a connecting line between the center of the driving assembly and the center of the working assembly.

According to a specific implementation of the embodiment of the present disclosure, the body includes a second mounting plate;

the connection assembly includes a third mounting plate;

the second mounting plate and the third mounting plate are connected through a fastener, the relative position of the moving assembly and the body in the direction perpendicular to the preset direction can be adjusted by loosening the fastener, and then the gap between the moving assembly and the working assembly in the direction perpendicular to the preset direction can be adjusted.

According to a specific implementation manner of the embodiment of the disclosure, a second strip-shaped hole and a second threaded hole are formed in the second mounting plate; the fasteners include a second fastener and a third fastener;

a third strip-shaped hole and a third threaded hole are formed in the third mounting plate; wherein, second bar hole corresponds with the third screw hole and supplies the second fastener passes, the second screw hole with the third bar hole corresponds with the confession the third fastener passes, the third installation with the second mounting panel is parallel, just the second bar hole with the length in third bar hole all along with predetermine the direction vertically direction extension, so that not hard up the second fastener with during the third fastener, the motion subassembly with the body with predetermine the relative position in the direction vertically.

According to a specific implementation manner of the embodiment of the present disclosure, the moving assembly further includes a pushing assembly, and the pushing assembly can move along with the driving assembly; the pushing assembly comprises a push plate and a friction piece connected to the push plate, the push plate and the friction piece are pushed to move when the driving assembly moves in a controlled mode, the friction piece is separated from the working assembly when the moving assembly is in the reset state, and the friction piece is in contact with the working assembly when the moving assembly is in the push-out state.

According to a specific implementation manner of the embodiment of the present disclosure, the connecting assembly further includes a fourth mounting plate, which is located between the first mounting plate and the third mounting plate, and is used for connecting the driving assembly and the pushing assembly; the motion assembly further comprises a guide assembly, the guide assembly is installed on the fourth installation plate, and the pushing assembly moves under the guide effect of the guide assembly.

According to a specific implementation of the embodiments of the present disclosure, the guide assembly includes:

at least one linear bearing mounted on the fourth mounting plate;

one end of the guide rod penetrates through the linear bearing to be connected with the push plate, and the other end of the guide rod is provided with a bump; and

and the spring is sleeved on the guide rod, one end of the spring is abutted to the lug, and the other end of the spring is abutted to the end face of the linear bearing.

According to a specific implementation manner of the embodiment of the disclosure, a through hole is formed in the fourth mounting plate;

the driving assembly is a push-pull electromagnet which comprises a movable iron core capable of reciprocating;

the push-pull type electromagnet is located on one side, far away from the working assembly, of the fourth mounting plate, the push plate and the friction piece are located on one side, close to the working assembly, of the fourth mounting plate, and the movable iron core penetrates through the through hole to push the push plate and the friction piece to move.

In a second aspect, an embodiment of the present disclosure further provides an adjusting tool to assist a crystal plane machine in adjusting a gap between a pad withdrawing assisting device and a working assembly.

In a second aspect, an embodiment of the present disclosure further provides an adjusting tool, so as to solve the problem that in the prior art, the gap adjusting precision between the pad withdrawing auxiliary device and the working assembly of the crystal plane machine is not high.

In a second aspect, an embodiment of the present disclosure provides a regulating tool for a crystal face machine, which solves a problem that a pushing assembly in a pad removing auxiliary device in the prior art fails to remove a pad due to abrasion.

The embodiment of the disclosure provides an adjusting tool, which is used for assisting in adjusting the gap between a moving assembly and a corresponding working assembly in the wafer machine,

before fixing coupling assembling with the body, will adjust the frock device in move back to fill up auxiliary device with between the work module, according to adjust frock control and adjust move back to fill up auxiliary device with clearance between the work module, fix again after adjusting the completion coupling assembling with the body.

According to a specific implementation manner of the embodiment of the disclosure, the adjusting tool comprises:

the clamping structure comprises a first clamping structure and a second clamping structure fixedly connected with the first clamping structure;

wherein, it is fixed coupling assembling with before the body, through with the push pedal and/or the friction part joint is in first joint structure department, will simultaneously the work subassembly joint is in second joint structure department, in order to adjust the work subassembly with horizontal distance and vertical distance between the friction part.

According to a specific implementation manner of the embodiment of the present disclosure, the first clamping structure includes a first step surface and a first protrusion extending downward;

the second clamping structure comprises a second step surface and a second bulge part extending downwards;

the first step face, the first boss, the second boss and the second step face are sequentially arranged, the first boss is close to the side face of the first step face and the second boss is close to the side face of the second step face, the horizontal distance between the side face of the second step face is a first preset distance, and the vertical distance between the first step face and the second step face is a second preset distance.

According to a specific implementation manner of the embodiment of the present disclosure, the first clamping structure further includes a third protruding portion extending downward, and the third protruding portion and the first protruding portion are respectively located at two ends of the first step surface; when the adjusting tool is connected with the pushing assembly in a clamping mode, the push plate and/or the friction piece are located between the first protruding portion and the third protruding portion.

According to a specific implementation manner of the embodiment of the disclosure, the horizontal distance between the first protruding portion and the third protruding portion is adapted to the thickness of the push plate, and the bottom of the first protruding portion is higher than the top of the friction member, so that before the push assembly moves, the push plate is clamped between the first protruding portion and the third protruding portion, the top of the push plate abuts against the first step surface, the side surface of the working assembly abuts against the side surface of the second protruding portion, and the upper portion of the working assembly abuts against the second step surface to fix the horizontal distance and the vertical distance between the working assembly and the friction member.

According to a specific implementation manner of the embodiment of the disclosure, the horizontal distance between the first protruding part and the third protruding part is greater than or equal to the sum of the thicknesses of the push plate and the friction piece, so that before the pushing assembly moves, the horizontal distance and the vertical distance between the working assembly and the friction piece are fixed by clamping the push plate and the friction piece between the first protruding part and the third protruding part, and abutting the side surface of the friction piece against the side surface of the first protruding part, abutting the top part of the push plate against the first step surface, abutting the side surface of the working assembly against the side surface of the second protruding part, and simultaneously abutting the upper part of the working assembly against the second step surface.

In a third aspect, an embodiment of the present disclosure further provides a method for adjusting a gap between a pad removing auxiliary device and a working assembly of a crystal face machine, so as to solve a problem that the gap between the pad removing auxiliary device and the working assembly in the prior art cannot be adjusted.

In a third aspect, an embodiment of the present disclosure provides a method for adjusting a gap between a pad removing auxiliary device and a working assembly of a wafer machine, where the method for adjusting a gap includes:

controlling a second fastener to penetrate through the second strip-shaped hole and the second threaded hole to pre-fix the cushion withdrawing auxiliary system and the body;

adjusting the clearance between the motion assembly and the working assembly in the preset direction and the direction perpendicular to the preset direction;

controlling a third fastener to penetrate through the third strip-shaped hole and the third threaded hole to pre-fix the cushion withdrawing auxiliary system and the body;

a first fastener is controlled to penetrate through the first strip-shaped hole and the first threaded hole, and the first mounting plate and the driving assembly are pre-fixed;

controlling fastening the first fastener, the second fastener, and the third fastener.

In a fourth aspect, an embodiment of the present disclosure further provides a method for adjusting a gap between a cushion removal assisting device and a working assembly of a crystal face machine, so as to solve a problem that the gap between the cushion removal assisting device and the working assembly in the prior art cannot be adjusted.

In a fourth aspect, an embodiment of the present disclosure further provides a method for adjusting a gap between a pad removing auxiliary device and a working assembly of a crystal face machine, so as to solve a problem that a gap adjustment progress between the pad removing auxiliary device and the working assembly in the prior art is not high.

In a fourth aspect, an embodiment of the present disclosure provides a method for adjusting a gap between a pad removing auxiliary device and a working assembly of the above-described wafer surface machine, where the adjustment tool is used to assist in adjustment; the adjusting method comprises the following steps:

a second fastener is controlled to penetrate through the second strip-shaped hole and the third threaded hole to pre-fix the cushion withdrawing auxiliary system and the body;

controlling the adjusting tool to be arranged between the pushing assembly and the working assembly;

adjusting the clearance between the moving assembly and the working assembly in the preset direction and the direction perpendicular to the preset direction according to the adjusting tool;

controlling a third fastener to penetrate through the third strip-shaped hole and the second threaded hole to pre-fix the cushion withdrawing auxiliary system and the body;

According to a specific implementation manner of the embodiment of the disclosure, the step of adjusting the gap between the moving assembly and the working assembly in the preset direction and the direction perpendicular to the preset direction according to the adjusting tool includes:

and controlling and adjusting the position of the pushing assembly to enable the push plate and/or the friction piece to be abutted with the left side surface of the first boss and the first step surface, and simultaneously controlling the working assembly to be abutted with the right side surface of the second boss and the second step surface.

The connecting component in the auxiliary device for withdrawing the cushion in the crystal face machine is connected with the body, the relative position between the connecting component and the body is adjustable, the relative position between the working component and the body is not adjustable, the gap between the auxiliary device for withdrawing the cushion and the working component can be adjusted by adjusting the relative position between the connecting component and the body, the moving component is contacted with the working component when moving to a pushing-out state, the force is proper, and the smooth process of withdrawing the cushion is ensured.

The first mounting plate is arranged at the connecting assembly of the crystal face machine, the first strip-shaped hole is also arranged at the first mounting plate, the first threaded hole is arranged at the driving assembly, and the first strip-shaped hole extends along the preset direction, so that the relative position of the connecting assembly relative to the body in the preset direction can be adjusted, and further, the gap between the moving assembly and the working assembly in the preset direction can be adjusted.

In addition, the body of crystal plane machine department sets up the second mounting panel, is provided with second bar hole and second screw hole on the second mounting panel, and coupling assembling can include the third mounting panel, is provided with third bar hole and third screw hole on the third mounting panel. And the second bar-shaped hole and the third bar-shaped hole extend along the direction vertical to the preset direction, so that the relative positions of the motion assembly and the body in the direction vertical to the preset direction can be adjusted, and further, the gap between the motion assembly and the working assembly in the direction vertical to the preset direction can be adjusted.

Furthermore, in order to ensure that the gap between the friction piece of the pad withdrawing auxiliary device of the wafer surface machine and the working assembly is proper and fixed, an adjusting tool is designed. The adjusting tool can ensure that the horizontal distance and the vertical distance between the friction piece and the working assembly are fixed before the pushing assembly moves, so that the impact force between the friction piece and the working assembly cannot be overlarge during contact, and the pad withdrawing auxiliary device can be ensured to withdraw the pad smoothly.

Furthermore, in the adjusting tool, the first clamping structure and the second clamping structure are fixedly connected, and the distance between the first clamping structure and the second clamping structure is adaptive to the stroke of the driving assembly. Before drive assembly drove the promotion subassembly motion, through with push pedal and/or friction part joint in first joint structure department, when simultaneously with the work subassembly joint in second joint structure department, can guarantee promoting the subassembly and promote push pedal and friction part after, the friction part can contact smoothly with the work subassembly to guarantee to move back going on smoothly of pad.

Furthermore, the distance between the first protruding part and the third protruding part of the adjusting tool is larger than or equal to the sum of the thicknesses of the push plate and the friction piece, and the friction piece is abutted against the side edge of the first protruding part, so that the distance between the friction piece and the working assembly is constant all the time in the use process, the problem of poor contact between the friction piece and the working assembly due to abrasion is avoided, and the smooth pad withdrawing is ensured.

Furthermore, the adjusting method has simple process, and the gap between the cushion withdrawing auxiliary device and the working assembly is fixed while the cushion withdrawing auxiliary device is installed and connected only by controlling the fastening sequence of the fastening piece, so that the subsequent cushion withdrawing is ensured to be carried out smoothly.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required to be used in the embodiments will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present disclosure, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a noodle maker according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of a pad backing assisting device and an adjusting tool provided in the embodiment of the disclosure;

fig. 3 is a schematic structural diagram of a pad removal assisting device according to an embodiment of the disclosure;

FIG. 4 is a schematic block diagram of an angle at which a pad removal aid and a first mounting plate are coupled according to an embodiment of the disclosure;

FIG. 5 is a schematic block diagram of another angle at which a pad removal aid is coupled to a first mounting plate according to an embodiment of the disclosure;

FIG. 6 is a schematic block diagram of a motion assembly provided by embodiments of the present disclosure;

fig. 7 is a schematic structural diagram of connection of the pad removal assisting device, the adjusting tool and the working assembly provided by the embodiment of the disclosure;

fig. 8 is a schematic structural diagram of an adjusting tool provided in an embodiment of the present disclosure;

fig. 9 is a schematic structural diagram of another adjustment tool provided in an embodiment of the present disclosure;

fig. 10 is a schematic structural diagram of another adjusting tool provided in the embodiment of the present disclosure;

fig. 11 is a schematic structural diagram of another adjusting tool provided in an embodiment of the present disclosure;

fig. 12 is a schematic flowchart of a method for adjusting a gap between a cushion removing auxiliary device and a working assembly of a crystal face machine according to an embodiment of the disclosure;

fig. 13 is a schematic flow chart of another method for adjusting a gap between a cushion removing auxiliary device and a working assembly of a wafer machine according to an embodiment of the disclosure.

Detailed Description

The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

The embodiments of the present disclosure are described below with specific examples, and other advantages and effects of the present disclosure will be readily apparent to those skilled in the art from the disclosure in the specification. It is to be understood that the embodiments described are only a few embodiments of the present disclosure, and not all embodiments. The disclosure may be embodied or carried out in various other specific embodiments, and various modifications and changes may be made in the details within the description without departing from the spirit of the disclosure. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, solar cell structures and/or methods may be implemented using any number of the aspects set forth herein. Additionally, such a solar cell structure may be implemented and/or such a method may be practiced using other structures and/or functionalities in addition to one or more of the aspects set forth herein.

It should be further noted that the drawings provided in the following embodiments are only schematic illustrations of the basic concepts of the present disclosure, and the drawings only show the structures related to the present disclosure rather than the numbers, shapes and dimensions of the structures in practical implementation, and the types, the quantities and the proportions of the structures in practical implementation can be changed freely, and the structural layout may be more complex.

In addition, in the following description, specific details are provided to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.

The present embodiment provides a crystal plane machine, and referring to fig. 1, a crystal plane machine 100 may include a body 110, at least one working assembly 300, and a pad-removing auxiliary device 400 corresponding to each working assembly 300. The pad removing auxiliary devices 400 are the same in number and correspond to the working assemblies 300 one by one.

Each working assembly 300 can include at least one cleaning or polishing pad, preferably a plurality of layers. In actual use, the working assembly 300 is always in a rotating state during use, and if the working assembly 300 needs to be replaced after being used for a period of time and the outermost polishing pad or cleaning pad is located, the pad withdrawing auxiliary device 400 is in contact with the working assembly 300 to rub and stop the rotation of the working assembly 300, so as to withdraw the pad. In order to ensure the smooth pad removal, the force of the pad removal assisting device 400 when moving to contact with the working assembly 300 is within a certain range, and the force is too large to damage the machine, and the force is too small to stop the rotation of the working assembly 300. Therefore, the clearance between the pad removal assisting device 400 and the working assembly 300 is important for smooth pad removal.

Specifically, referring to fig. 2, each pad backing assistance device 400 may include a connecting assembly 101 and a moving assembly 102. Wherein, the connecting component 101 is connected with the body 110. The moving assembly 102 is connected with the connecting assembly 101 and can reciprocate relative to the connecting assembly 101, the moving assembly 102 comprises a recovery state and a push-out state, and when the moving assembly 102 is in the push-out state, the moving assembly 102 is in contact with the working assembly 300 to assist pad backing. Specifically, the push-out state in the present embodiment is a state when the moving member 102 moves into contact with the working member 300. Wherein, the relative position between the connecting assembly 101 and the body 110 is adjustable, so that when the moving assembly 102 is in a reset state, the gap between the moving assembly 102 and the corresponding working assembly 300 is adjustable.

The connecting component 101 of the auxiliary device 400 for removing the pad in the crystal plane machine 100 of this embodiment is connected to the main body 110, and the relative position between the connecting component 101 and the main body 110 is adjustable, but the relative position between the working component 300 and the main body 110 is not adjustable, so that the gap between the auxiliary device 400 for removing the pad and the working component 300 can be adjusted by adjusting the relative position between the connecting component 101 and the main body 110, and the moving component 102 contacts with the working component 300 when moving to the pushing-out state, and the force is appropriate, thereby ensuring the smooth process of removing the pad.

In one embodiment, referring to fig. 2 and 3, the moving assembly 102 includes a driving assembly 410, the driving assembly 410 is connected to the connecting assembly 101, and the driving assembly 410 is capable of being controlled to reciprocate relative to the connecting assembly 101 in a predetermined direction, which is a direction along a straight line formed by a connecting line between a center of the driving assembly 410 and a center of the working assembly 300.

Specifically, the connection assembly 101 includes a first mounting plate 440. The driving assembly 410 is connected with the first mounting plate 440 through a first fastener, and the relative position of the connecting assembly 101 and the driving assembly 410 in a preset direction is adjustable by loosening the first fastener, so that the gap between the moving assembly 102 and the working assembly 300 in the preset direction is adjustable.

Specifically, the preset direction is a direction indicated by an arrow a in fig. 2 and 3. The driving element 410 has a plane parallel to the plane of the straight line and is provided with a first threaded hole (not shown). The connecting assembly 101 includes a first mounting plate 440, the first mounting plate 440 is parallel to the upper surface of the driving assembly 410, and a first bar hole 441 is disposed on the first mounting plate 440 for connecting the first mounting plate 440 and the driving assembly 410 by a fastener passing through the first bar hole 441 and the first threaded hole. The length direction of the first bar-shaped hole 441 extends along a direction parallel to the preset direction, so that the relative position of the connecting assembly 101 with respect to the body 110 in the preset direction can be adjusted, and further, the gap between the moving assembly 102 and the working assembly 300 in the preset direction can be adjusted.

In this embodiment, the predetermined direction is preferably in a horizontal plane, the upper surface of the driving assembly 410 and the first mounting plate 440 are in a horizontal plane, and the driving assembly 410 reciprocates in a direction in the horizontal plane and toward the center of the working assembly 300. The extending direction of the length of the first bar-shaped hole 441 is parallel to the preset direction, so that in the actual use process, when the first fastening member is loosened, the first fastening member and the first bar-shaped hole 441 can move relatively, and therefore the relative position of the cushion withdrawing auxiliary device 400 and the body 110 in the preset direction can be adjusted, and further the gap between the moving assembly 102 and the working assembly 300 in the horizontal direction can be adjusted.

In one particular embodiment, referring to fig. 1 and 4, in one particular embodiment, the body 110 may include a second mounting plate 120. The connection assembly 101 may include a third mounting plate 430. The second mounting plate 120 and the third mounting plate 430 are connected by fasteners, and the relative positions of the moving assembly 102 and the body 110 in the direction perpendicular to the preset direction can be adjusted by loosening the second fasteners, so that the gap between the moving assembly 102 and the working assembly 300 in the direction perpendicular to the preset direction can be adjusted.

Specifically, the body 110 of the present embodiment may include a second mounting plate 120, and the second mounting plate 120 is provided with a second strip-shaped hole 121 and a second threaded hole 122. The connection assembly 101 may include a third mounting plate 430 (see fig. 5), wherein a third bar-shaped hole 431 and a third threaded hole 432 are provided on the third mounting plate 430; the second bar-shaped hole 121 and the third threaded hole 432 correspond to each other so that a second fastener can pass through and be fixed, the second threaded hole 122 and the third bar-shaped hole 431 correspond to each other so that a third fastener can pass through and be fixed, the third mounting plate 430 is parallel to the second mounting plate 120, and the second bar-shaped hole 121 and the third bar-shaped hole 431 both extend in a direction perpendicular to the preset direction, so that the relative position of the moving assembly 102 and the body 110 in the direction perpendicular to the preset direction can be adjusted, and further, the gap between the moving assembly 102 and the working assembly 300 in the direction perpendicular to the preset direction can be adjusted.

The second mounting plate 120 of this embodiment is in an upright position. Likewise, the third mounting plate 430 is also in an upright position. The extending direction of the second and third bar holes 121 and 431 is perpendicular to the preset direction, and preferably, the extending direction of the lengths of the second and third bar holes 121 and 431 is in the vertical direction. Therefore, the relative position between the moving assembly 102 and the body 110 of the pad backing assisting device 400 in the vertical direction is adjustable, so that the gap between the moving assembly 102 and the working assembly 300 in the vertical direction is adjustable.

From the above, the direction and position of the first mounting plate 440, the second mounting plate 120 and the third mounting plate 430 and the design of the extending direction of the strip-shaped holes on the mounting plates are arranged in this embodiment, so that the relative positions between the moving assembly 102 and the body 110 in the horizontal direction and the vertical direction are all adjustable, and further the relative positions between the moving assembly 102 and the working assembly 300 in the horizontal direction and the vertical direction are all adjustable, and further the smooth proceeding of the subsequent cushion withdrawing can be ensured.

The motion assembly 102 also includes a pushing assembly 420, the pushing assembly 420 being capable of following the motion of the drive assembly 410. Wherein, referring to fig. 6, the push assembly 420 includes a push plate 421 and a friction member 422 coupled at the push plate 421, the push plate 421 and the friction member 422 are moved when the driving assembly 410 is controllably moved.

The friction member 422 is separated from the working assembly 300 when the moving assembly 102 is in the restoring state, and the friction member 422 is in contact with the working assembly 300 when the moving assembly 102 is in the pushing-out state.

The clearance between the friction member 422 of the pushing assembly 420 and the working assembly 300 is important before the pushing assembly 420 moves because smooth contact friction between the friction member 422 and the working assembly 300, i.e., smooth pad retraction of the working assembly 300, is ensured.

The gap between the adjusting movement assembly 102 and the working assembly 300 is the gap between the adjusting friction member 422 and the working assembly 300, so that the gap between the friction member 422 and the working assembly 300 can be adjusted by the structural design, and the smooth pad withdrawing is ensured.

In one embodiment, and more specifically, referring to fig. 6, the friction member 422 may be a rubber pad, which is soft and has a large friction force to absorb shock and cushion. Moreover, the surface of the rubber pad contacting with the working assembly 300 can be designed with rough lines to increase the friction force. In other embodiments, the friction member 422 may be made of other materials, which is not limited herein.

In one embodiment, referring to fig. 3 and 4, the linkage assembly 101 further includes a fourth mounting plate 450, the fourth mounting plate 450 being positioned between the first mounting plate 440 and the third mounting plate 430 for coupling the drive assembly 410 and the push assembly 420. The moving assembly 102 further includes a guide assembly 460 (see fig. 4 and 6), the guide assembly 460 is mounted on the fourth mounting plate 450, and the pushing assembly 420 moves under the guide of the guide assembly 460. The guide assembly 460 is provided to improve the stability of the push plate 421 as it is extended or retracted, improving the accuracy of the mating of the push plate 421 with the working assembly 300. The fourth mounting plate 450 is coupled to the first mounting plate 440 and the third mounting plate 430. When the positions of the first mounting plate 440 and the third mounting plate 430 are adjusted, the positions of the fourth mounting plate 450 and the movable guide assembly 460 are also changed accordingly.

Further, referring to fig. 4 and 6, the guide assembly 460 includes at least one linear bearing 461 and at least one guide rod 462, the linear bearing 461 is connected to the connection plate 450, one end of the guide rod 462 penetrates through the linear bearing 461 to be connected with the push plate 421, the structure is simple, the guiding performance is good, and the guide rod 462 extends or retracts along with the push plate 421. A projection 463 is circumferentially provided at the other end of the guide rod 462, a spring 464 is fitted over the guide rod 462, and one end of the spring 464 abuts against the projection 463 and the other end abuts against an end surface of the linear bearing 461. When the guiding rod 462 is extended, the spring 464 is compressed, and when the guiding rod 462 is retracted, the elastic force released by the compressed spring 464 assists the guiding rod 462 to be rapidly retracted to the initial position, so that the efficiency of retracting the guiding rod 462 is improved, and the pad changing efficiency of the crystal plane machine 100 is improved.

In one embodiment, referring to fig. 5, a through hole 451 is provided at the fourth mounting plate 450. The drive assembly 410 is a push-pull electromagnet that includes a movable iron core that is capable of reciprocating. The push-pull electromagnet is positioned at one side of the fourth mounting plate 450 far away from the working assembly 300, the push plate 421 and the friction piece 422 are positioned at one side of the fourth mounting plate 450 near the working assembly 300, and the movable iron core passes through the through hole 451 to push the push plate 421 and the friction piece 422 to move. The push-pull electromagnet is small in size, convenient to install in a place with a small space, capable of being started frequently to work, reliable in performance, sensitive in action and long in service life. In other embodiments, the driving assembly 410 may also be a cylinder or a motor, which is not limited herein and is set according to actual use requirements.

In a specific embodiment, referring to fig. 1 and 7, the present embodiment provides an adjusting tool 200, wherein the adjusting tool 200 is mainly used for adjusting a gap between a pad removing auxiliary device 400 and a working assembly 300 of a wafer machine 100.

Specifically, the number of each pad withdrawing auxiliary device 400 and the number of the adjusting tools 200 may also correspond to one another. As another example, the number of tools is smaller than the number of pad removal aids 400.

In this embodiment, in order to ensure that the gap between the friction member 422 and the working assembly 300 is proper and fixed, an adjusting tool 200 is designed. The adjusting tool 200 is used to be disposed between the friction member 422 and the working assembly 300 before the pushing assembly 420 moves to adjust the horizontal distance and the vertical distance between the friction member 422 and the working assembly 300. The adjusting tool 200 in this embodiment can ensure that the horizontal distance and the vertical distance between the friction member 422 and the working assembly 300 are fixed before the pushing assembly 420 moves, which not only can ensure that the impact force between the friction member 422 and the working assembly 300 is not too large when contacting, but also can ensure that the pad withdrawing auxiliary device 400 can withdraw the pad smoothly.

In one embodiment, referring to fig. 8-11, the adjusting tool 200 of this embodiment may include a first clamping structure 210 and a second clamping structure 220 fixedly connected to the first clamping structure 210. Specifically, referring to fig. 2, before the pushing assembly 420 moves, the horizontal distance and the vertical distance between the working assembly 300 and the friction member 422 are fixed by clamping the pushing plate 421 at the first clamping structure 210 and simultaneously clamping the working assembly 300 at the second clamping structure.

In this embodiment, the first clamping structure 210 and the second clamping structure 220 in the adjusting tool 200 are fixedly connected, and the distance between the first clamping structure 210 and the second clamping structure 220 is adapted to the stroke of the driving assembly 410. Before pushing away subassembly 420 and moving, through with push pedal 421 and/or friction piece 422 joint in first joint structure 210 department, when simultaneously with work subassembly 300 joint in second joint structure 220 department, can guarantee to push away subassembly 420 and promote push pedal 421 and friction piece 422 back, friction piece 422 can contact smoothly with work subassembly 300 to guarantee moving back going on smoothly of pad.

In one embodiment, and more particularly, referring to fig. 5-8, the first snap structure 210 of the present embodiment may include a first step surface 211 and a first protrusion 212 extending downward. The second clamping structure 220 includes a second step surface 221 and a second protrusion 222 extending downward. The first step surface 211, the first protruding portion 212, the second protruding portion 222, and the second step surface 221 are sequentially disposed, a horizontal distance between a side surface of the first protruding portion 212 close to the first step surface 211 and a side surface of the second protruding portion 222 close to the second step surface 221 is a first preset distance, and a vertical distance between the first step surface 211 and the second step surface 221 is a second preset distance. The term "downward" refers to the position of the adjusting tool 200 when it is placed between the friction member 422 and/or the push plate 421 and the working assembly 300 for adjustment, and the term is used for convenience of structural description and is not intended to limit the structure of the present application.

Specifically, in the present embodiment, the first step surface 211 and the second step surface 221 are respectively used for limiting the upper and lower positions of the push plate 421 and the working assembly 300, and the first protrusion 212 and the second protrusion 222 are used for limiting the horizontal gap between the push plate 421 and/or the friction member 422 and the working assembly 300. The first predetermined distance is set in relation to the stroke of the driving assembly 410, and is designed according to the stroke of the driving assembly 410. The second predetermined distance is set in relation to the positions of the friction member 422 and the working assembly 300, and may be designed as desired.

In one embodiment, the side structure of second protruding portion 222 adjacent to second step surface 221 is adapted to the side structure of working assembly 300. For example, referring to fig. 8, since the side surface of the working member 300 of the present embodiment is in the shape of a circular arc, the structure of the second protrusion 222 on the side surface 224 near the second step surface 221 is also designed in the shape of a circular arc. The side surface of the working element 300 is designed to be an inward concave circular arc shape because the side surface of the convex circular arc second bulge 222 is designed to be an outward convex circular arc shape. Of course, in other embodiments, if the side surface of the working assembly 300 has other shapes, the structure of the second protrusion 222 on the side surface 224 near the second step surface 221 is also designed according to the side surface structure of the working assembly 300.

In an embodiment, the first clamping structure 210 further includes a third protrusion 223 extending downward, and the third protrusion 223 and the first protrusion 212 are respectively located at two ends of the first step surface 211. When the adjustment tool 200 is snapped into engagement with the push assembly 420, the push plate 421 and/or the friction member 422 are positioned between the first boss 212 and the third boss 223. The third projection 223 is designed to facilitate the positioning and engagement of the pushing mechanism with the first engaging structure 210.

In one embodiment, referring to fig. 5 and 6, the horizontal distance between the first and

third bosses

212 and 223 is adapted to the thickness of the push plate 421, and the bottom of the first boss 212 is higher than the top of the friction member 422, so that the horizontal and vertical distances between the working assembly 300 and the friction member 422 are fixed by clamping the push plate 421 between the first and

third bosses

212 and 223, abutting the top of the push plate 421 against the first step surface 211, abutting the side of the working assembly 300 against the side of the second boss 222, and abutting the upper portion of the polishing pad against the second step surface 221 before the pushing assembly 420 moves.

Specifically, in the present embodiment, the downward extension of the third convex portion 223 may be designed according to practical situations. Since the driving assembly 410 needs to push the push plate 421 to move in this application, the design of the third protrusion 223 needs to give the driving assembly 410 a certain position to contact with the push plate 421. One example is to design the third protrusion 223 to have a shorter size, see fig. 6 and 7, so that the third protrusion 223 does not block the driving assembly 410 from pushing the push plate 421. Yet another embodiment is to design the third projection 223 as two parts with a space in the middle, which is passed by the driving assembly 410, see fig. 5 and 8. The specific design can be freely designed according to actual needs.

In this embodiment, the distance between the first protruding portion 212 and the third protruding portion 223 is the same as the thickness of the push plate 421, and the design can directly clamp the adjusting tool 200 into the position of the push plate 421, so that only the working assembly 300 needs to be adjusted when the distance between the working assembly 300 and the friction member 422 is adjusted, and the gap between the push plate 421 and the working assembly 300 can be conveniently adjusted.

In another embodiment, referring to fig. 7 and 8, the horizontal distance between the first and

third bosses

212 and 223 is greater than or equal to the sum of the thicknesses of the push plate 421 and the friction member 422, so that the horizontal and vertical distances between the working assembly 300 and the friction member 422 are fixed by clamping the push plate 421 and the friction member 422 between the first and

third bosses

212 and 223, abutting the side of the friction member 422 against the side of the first boss 212, the top of the push plate 421 against the first step surface 211, the side of the working assembly 300 against the side of the second boss 222, and simultaneously the upper portion of the polished surface against the second step surface 221, before the push assembly 420 moves.

In this embodiment, the distance between the first convex portion 212 and the third convex portion 223 is greater than or equal to the sum of the thicknesses of the push plate 421 and the friction member 422. Before the pad removing auxiliary device 400 of the crystal plane 100 is acted, the distance between the first convex part 212 and the third convex part 223 can be designed to be equal to the sum of the thicknesses of the push plate 421 and the friction member 422. At this time, as in the above embodiment, it is convenient to directly clamp the adjusting tool 200 into the push plate 421 and the friction member 422, so that only the working assembly 300 needs to be adjusted when the distance between the working assembly 300 and the friction member 422 is adjusted, and the gap between the push plate 421 and the working assembly 300 is conveniently adjusted. And as the friction member 422 is worn away by contact with the working assembly 300, the thickness of the friction member 422 is gradually reduced, and the distance between the first projection 212 and the third projection 223 is greater than or equal to the sum of the thicknesses of the push plate 421 and the friction member 422. In order to ensure that the distance between the friction member 422 and the working assembly 300 is constant, i.e. the friction member 422 can smoothly contact and rub the working assembly 300, the friction member 422 needs to abut against the side edge of the first protrusion 212 to adjust the distance between the pushing assembly 420 and the working assembly 300.

In one embodiment, referring to fig. 8, the side of the friction member 422 facing the working assembly 300 is configured to conform to the side of the working assembly 300. The first boss 212 is adapted to the structure of the two abutting sides of the friction member 422. Specifically, since the friction member 422 will contact and rub against the side surface of the working assembly 300 after moving, in order to increase the friction force, the side surface of the friction member 422 and the side surface of the working assembly 300 may be designed to match each other, and since the side surface of the working assembly 300 in this embodiment is an arc shape protruding outward, the friction member 422 in this embodiment is also designed to be an arc shape recessed inward.

In a specific embodiment, referring to fig. 12, this embodiment further discloses a method for adjusting a gap between a pad removal assisting device 400 and a working assembly 300 of a crystal plane machine 100, where the method for adjusting the gap may include:

step S100, controlling a second fastening member to pass through the second strip-shaped hole 121 and the third threaded hole 432 to pre-fix the pad backing assisting system and the body 110.

In step S100, in the actual design, the second mounting plate 120 and the third mounting plate 430 are parallel to and close to each other, and the positions of the second bar-shaped hole 121 and the third threaded hole 432 correspond, and the position of the third bar-shaped hole 431 corresponds to the position of the second threaded hole 122. The position of the cushion withdrawing auxiliary device 400 can be roughly fixed by fixing the cushion withdrawing auxiliary system and the body 110 through the first fastening member passing through the second strip-shaped hole 121 and the third threaded hole 432.

In step S200, a gap between the moving assembly 102 and the working assembly 300 in a preset direction and a direction perpendicular to the preset direction is adjusted.

Here, adjusting the gap between the moving assembly 102 and the working assembly 300 may be mechanically automatically adjusted, or may be considered as actively adjusting. The gap size of the adjusting gap is designed according to the requirement.

Step S300, controlling a third fastener to pass through the third strip-shaped hole 431 and the second threaded hole 122 to pre-fix the cushion withdrawing auxiliary system and the body 110;

step S400, controlling a first fastener to penetrate through the first strip-shaped hole 441 and the first threaded hole, and pre-fixing the first mounting plate 440 and the driving assembly 410;

step S500, controlling to fasten the first fastener, the second fastener and the third fastener.

The adjusting method has a simple process, and the gap between the pad withdrawing auxiliary device 400 and the working assembly 300 is adjusted while the pad withdrawing auxiliary device 400 is mounted and connected only by controlling the fastening sequence of the fastening pieces, so that the subsequent pad withdrawing is ensured to be smoothly carried out.

In a specific embodiment, referring to fig. 13, this embodiment further discloses a method for adjusting a gap between the pad-removing auxiliary device 400 and the working assembly 300 of the wafer machine 100, wherein the method for adjusting is assisted by the adjusting tool 200 of the above wafer machine 100. Specifically, the adjusting method may include:

step SS100, controlling a second fastener to pass through the second strip-shaped hole 121 and the third threaded hole 432 to pre-fix the cushion withdrawing auxiliary system and the body 110;

step SS200, controlling the adjustment tool device between the pushing assembly 420 and the working assembly 300;

step SS300, adjusting the clearance between the motion assembly 102 and the working assembly 300 in the preset direction and the direction perpendicular to the preset direction according to the adjusting tool;

step SS400, controlling a third fastener to pass through the third strip-shaped hole 431 and the second threaded hole 122 to pre-fix the cushion withdrawing auxiliary system and the body 110;

step SS500, controlling a first fastener to penetrate through the first strip-shaped hole 441 and the first threaded hole, and pre-fixing the first mounting plate 440 and the driving assembly 410;

and step SS600, controlling to fasten the first fastener, the second fastener and the third fastener.

The step SS300 may specifically include:

the position of the adjustment pushing assembly 420 is controlled such that the push plate 421 and/or the friction member 422 abut the left side surface of the first boss and the first step surface, while the working assembly 300 is controlled to abut the right side surface of the second boss and the second step surface.

In step SS300, after the adjusting tool is disposed between the pushing assembly 420 and the working assembly 300, the adjusting tool 200 may be used as a template to adjust the positions of the pushing assembly 420 and the working assembly 300. After the desired position is reached, it is shown that the clearance between the friction member 422 and the working assembly 300 is now sufficient.

In this step, the adjusting tool 200 may be used to adjust the gap between the friction member 422 and the working element 300 when the crystal plane machine 100 is assembled just after production, so that the working element 300 may be smoothly removed during the pad removing process of the pad removing auxiliary device 400.

As the pad removal aid 400 is used, the friction member 422 may be damaged during rubbing over time, and thus it may occur that the friction member 422 gradually moves away from the working assembly 300. In one embodiment, the gap between the friction member 422 of the pad removing auxiliary device 400 and the working assembly 300 is adjusted by the adjusting method only when the crystal plane machine 100 is shipped. However, in this embodiment, the drive stroke of the drive assembly 410 is greater than the clearance distance between the working assembly 300 and the friction member 422 in the unworn condition. As the friction member 422 is continuously worn, the actual stroke of the drive of the driving assembly 410 is gradually increased to ensure the mutual contact between the friction member 422 and the working assembly 300. In another embodiment, during the later use, the friction member 422 can not move to contact with the working assembly 300 due to the gap between the friction member 422 and the working assembly 300 being gradually increased, and the pad backing failure can be avoided. At this time, it is not only necessary to adjust the gap between the friction member 422 and the working assembly 300 by the above-mentioned adjustment method at the time of shipment of the crystal plane machine 100. After the crystal plane machine 100 is used for a period of time, the gap between the friction piece 422 and the working assembly 300 can be adjusted by loosening the fastening piece and adopting the adjusting method again, so that the cushion can be smoothly removed after the crystal plane machine 100 assembly is used for a period of time.

The adjusting method has a simple process, only controls the fastening sequence of the fastening pieces, and combines the adjusting tool 200 to adjust the gap between the pad returning auxiliary device 400 and the working assembly 300 while installing and connecting the pad returning auxiliary device 400, so that the accuracy of gap adjustment is ensured, and further the subsequent pad returning is ensured to be smoothly carried out.

The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present disclosure should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims

1. A crystal face machine, comprising:

a body;

at least one working assembly disposed at the body;

the connecting component is connected with the body;

the moving assembly is connected with the connecting assembly and can reciprocate relative to the connecting assembly, the moving assembly comprises a recovery state and a push-out state, and when the moving assembly is in the push-out state, the moving assembly is in contact with the working assembly to assist pad withdrawing;

wherein, the relative position between the connecting assembly and the body is adjustable, so that when the moving assembly is in the recovery state, the gap between the moving assembly and the corresponding working assembly is adjustable.

2. The crystal plane machine of claim 1,

the motion assembly comprises a drive assembly;

the connection assembly includes a first mounting plate;

the driving assembly is connected with the first mounting plate through a first fastener, relative positions of the connecting assembly and the driving assembly in a preset direction can be adjusted through loosening the first fastener, and then a gap between the moving assembly and the working assembly in the preset direction can be adjusted.

3. The crystal plane machine of claim 2,

the plane of the upper surface of the driving assembly is parallel to the plane of the first mounting plate, and a first threaded hole is formed in the upper surface of the driving assembly;

the length of the first strip-shaped hole extends along the direction parallel to the preset direction, so that when the first fastener is loosened, the relative position of the connecting assembly relative to the body in the preset direction can be adjusted; the preset direction is a direction along a straight line formed by a connecting line of the center of the driving assembly and the center of the working assembly.

4. The wafer machine of claim 3,

the body comprises a second mounting plate;

the connection assembly includes a third mounting plate;

5. The wafer machine of claim 4,

a second strip-shaped hole and a second threaded hole are formed in the second mounting plate; the fasteners include a second fastener and a third fastener;

a third strip-shaped hole and a third threaded hole are formed in the third mounting plate; wherein, second bar hole corresponds with the third screw hole and supplies the second fastener passes, the second screw hole with the third bar hole corresponds with the confession the third fastener passes, the third mounting panel with the second mounting panel is parallel, just the second bar hole with the length in third bar hole all along with predetermine the direction vertically direction extension, so that not hard up the second fastener with during the third fastener, the motion subassembly with the body with predetermine the relative position in the direction vertically direction and adjustable.

6. The wafer machine of claim 5,

the motion assembly further comprises a pushing assembly, the driving assembly can be controlled to reciprocate relative to the connecting assembly along a preset direction, and the pushing assembly moves along with the driving assembly;

the pushing assembly comprises a push plate and a friction piece connected to the push plate, the push plate and the friction piece are pushed to move when the driving assembly moves in a controlled mode, the friction piece is separated from the working assembly when the moving assembly is in the reset state, and the friction piece is in contact with the working assembly when the moving assembly is in the push-out state.

7. The crystal plane machine of claim 6,

the connecting assembly further comprises a fourth mounting plate positioned between the first mounting plate and the third mounting plate for connecting the driving assembly and the pushing assembly; the motion assembly further comprises a guide assembly, the guide assembly is installed on the fourth installation plate, and the pushing assembly moves under the guide effect of the guide assembly.

8. The wafer machine of claim 7,

the guide assembly includes:

at least one linear bearing mounted on the fourth mounting plate;

9. The wafer machine of claim 7,

a through hole is formed in the fourth mounting plate;

10. An adjusting tool for assisting in adjusting a gap between a moving assembly and a corresponding working assembly in a crystal face machine as claimed in any one of claims 6 to 9,

the regulation frock includes:

the clamping device comprises a first clamping structure and a second clamping structure fixedly connected with the first clamping structure;

before the connecting assembly and the body are fixed, the push plate and/or the friction piece are/is clamped at the first clamping structure, the working assembly is clamped at the second clamping structure, so that the horizontal distance and the vertical distance between the working assembly and the friction piece are adjusted, and the first clamping structure comprises a first step surface and a first protruding part extending downwards;

the first clamping structure further comprises a third protruding part extending downwards, and the third protruding part and the first protruding part are respectively located at two ends of the first step surface;

the horizontal distance between the first protruding part and the third protruding part is adaptive to the thickness of the push plate, and the bottom of the first protruding part is higher than the top of the friction piece.

11. The adjusting tool according to claim 10,

first step face first bellying the second bellying with the second step face sets gradually, just being close to of first bellying the side of first step face with being close to of second bellying the horizontal distance of the side of second step face is first preset distance, first step face with the perpendicular distance of second step face is the second preset distance.

12. The adjustment tool of claim 11,

when the adjusting tool is clamped with the pushing assembly, the push plate and/or the friction piece are/is located between the first protruding portion and the third protruding portion.

13. The adjustment tool of claim 12,

the horizontal distance between the first protruding portion and the third protruding portion is larger than or equal to the sum of the thicknesses of the push plate and the friction piece, so that before the pushing assembly moves, the push plate and the friction piece are clamped between the first protruding portion and the third protruding portion, the side face of the friction piece is abutted against the side face of the first protruding portion, the top of the push plate is abutted against the first step face, the side face of the working assembly is abutted against the side face of the second protruding portion, and meanwhile, the upper portion of the working assembly is abutted against the second step face to fix the horizontal distance and the vertical distance between the working assembly and the friction piece.

14. A method for adjusting a gap between a pad withdrawing auxiliary device of a crystal plane machine and a working assembly, as claimed in any one of claims 5 to 9, wherein: the adjusting method comprises the following steps:

controlling a second fastener to penetrate through the second strip-shaped hole and the third threaded hole to pre-fix the cushion withdrawing auxiliary device and the body;

controlling a third fastener to penetrate through the third strip-shaped hole and the second threaded hole to pre-fix the cushion withdrawing auxiliary device and the body;

controlling a first fastener to penetrate through the first strip-shaped hole and the first threaded hole, and pre-fixing the first mounting plate and the driving assembly;

controlling fastening of the first fastener, the second fastener, and the third fastener.

15. A method for adjusting a gap between a pad removing auxiliary device of a crystal plane machine and a working assembly, which is described in any one of claims 6 to 9, wherein: using the adjustment tool of any one of claims 10-13-to assist in adjustment; the adjusting method comprises the following steps:

a second fastener is controlled to penetrate through the second strip-shaped hole and the third threaded hole to pre-fix the cushion withdrawing auxiliary device and the body;

a third fastener is controlled to penetrate through the third strip-shaped hole and the second threaded hole to pre-fix the cushion withdrawing auxiliary device and the body;

16. The method of adjusting a gap between a cushion withdrawing auxiliary device and a working assembly of a wafer machine as claimed in claim 15,

the step of adjusting the clearance between the moving assembly and the working assembly in the preset direction and the direction perpendicular to the preset direction according to the adjusting tool comprises the following steps: and controlling and adjusting the position of the pushing assembly to enable the push plate and/or the friction piece to be abutted with the left side surface of the first boss and the first step surface, and simultaneously controlling the working assembly to be abutted with the right side surface of the second boss and the second step surface.