CN216228978U - Elastic piece, positioning device and processing equipment - Google Patents

Abstract

The utility model provides an elastic piece, a positioning device and processing equipment, wherein the elastic piece comprises: the elastic connecting part is arc-shaped; and the elastic abutting parts are arranged at two ends of the elastic connecting parts. The elastic piece provided by the utility model has the elastic connecting part and the at least two elastic abutting parts, so that when the elastic piece is used for abutting and fixing, the elastic piece can generate elastic deformation to be better attached to a fixed workpiece, a better fixing effect is generated, the phenomenon that the workpiece is damaged due to hard contact with the workpiece is avoided, and the elastic piece has certain toughness, so that the installation difficulty is reduced, and the convenience for fixing by using the elastic piece is improved.

Description

Elastic piece, positioning device and processing equipment

Technical Field

The utility model relates to the field of processing equipment, in particular to an elastic piece, a positioning device and processing equipment.

Background

In the related technology, the wafer clamping and positioning device mainly clamps and positions the wafer by two or more clamping pieces with springs driven by a cylinder or a motor, and the spring clamping pieces are used for positioning, so that the device is complex and is easy to damage the wafer.

SUMMERY OF THE UTILITY MODEL

In order to solve at least one of the above technical problems, a first object of the present invention is to provide an elastic member.

The second purpose of the utility model also provides a positioning device.

Still another object of the present invention is to provide a processing apparatus.

In view of the above, according to a first object of the present invention, there is provided an elastic member, comprising: the elastic connecting part is arc-shaped; and the elastic abutting parts are arranged at two ends of the elastic connecting parts.

The elastic piece provided by the utility model comprises an elastic connecting part and at least two elastic abutting parts. Wherein, elastic connection portion is the arc, and elastic connection portion itself has elasticity. The elasticity means that the object deforms under the action of external force, the original size and shape of the object can be recovered after the external force is removed, and the arc-shaped elastic connecting part can deform during clamping and further becomes bent. Specifically, the elastic abutting portion is in contact with the workpiece, and is deformed in the vicinity of the contact area, so that the elastic connecting portion is deformed,

if two elastic component centre gripping work pieces that set up relatively simultaneously, can realize the position adjustment of work piece on the one hand, the foretell elastic component simple structure of on the other hand, the installation degree of difficulty is low, avoids producing the damage to the work piece, has avoided in the correlation technique promptly, adopts the spring as the installation that the elastic component leads to badly to the tight not in place of clamp or excessive clamp that arouses causes the problem of damage to the work piece.

And the elastic abutting parts are arranged at two ends of the elastic connecting parts. The elastic connecting part plays a role in supporting and connecting at least two elastic abutting parts when clamping a workpiece, so that the elastic abutting parts deform due to the reverse contact force provided by the workpiece and the support of the connecting part when abutting against the workpiece, and more contact points exist between the deformed elastic abutting parts and the workpiece. Therefore, the workpiece fixing device can be in close contact with the workpiece better, a better fixing effect is achieved on the workpiece, and the phenomenon that the workpiece is damaged due to hard contact with the workpiece can be avoided.

Furthermore, at least two elastic abutting parts are arranged on one side of the elastic connecting part close to the circle center of the arc, and the elastic abutting parts are arranged at two ends of the elastic connecting part. Therefore, when the elastic piece is contacted with the workpiece to clamp and position, the elastic abutting part is firstly contacted with the workpiece, the elastic connecting part is not contacted with the workpiece, and the phenomenon that the workpiece is damaged due to hard contact with the workpiece is avoided.

In addition, the elastic member in the above technical solution provided by the present invention may further have the following additional technical features:

in the above technical scheme, one side of the elastic abutting part away from the elastic connecting part is an inwards concave arc surface, and the length of the elastic abutting part extends along the circumferential direction where the arc surface is located.

In the technical scheme, the elastic abutting connection piece is made of a non-metal material, or the elastic piece is made of a non-metal material, so that the metal isolation impurities are prevented from polluting the workpiece; the workpiece can be a wafer, and in the related art, when the spring clamping piece is used for positioning, the spring is generally made of metal, so that more particles exist, and the risk of metal pollution to the wafer exists.

In this technical scheme, the one side that elastic butting portion kept away from elastic connecting portion is the cambered surface of indent. Make the contact surface of elasticity butt portion and work piece have certain inclination, when the work piece was circular work piece, the radius that the cambered surface corresponds should be unanimous with the radius of circular work piece, and then becomes more with the contact point of work piece for the edge contact of elasticity butt portion can be with the gesture of more laminating and work piece. Resulting in better adjustment and positioning effects.

The workpiece is a wafer, and the size of the radius corresponding to the arc surface is changed according to the size of the wafer. The elasticity of the elastic element is affected by the material, the thickness of the elastic element connecting part and the length of the elastic element connecting part. Since different materials have different elastic moduli, the size of the elastic member (the thickness of the elastic member connecting portion, the length of the elastic member connecting portion) also needs to be adjusted when different materials are used.

Further, the length of the elastic abutting part extends along the circumferential direction of the cambered surface. For irregular workpieces, unfilled corners or cut edges may exist on the periphery of the irregular workpieces, and the irregular workpieces can be subjected to length extension along the circumferential direction of the cambered surface through the elastic abutting part. The elastic abutting part with a certain length has more contact points with the workpiece, so that the contact points of the elastic abutting part and the workpiece are more when the workpiece is clamped. And then make the elastic abutting portion contact with regular part of the work piece when clamping, have avoided the part that the work piece has unfilled corner and side cut, make the work piece of non-regularity also can be fixed firmly by the elastic abutting portion.

According to a second object of the present invention, there is provided a positioning device for adjusting a position of a workpiece, comprising: a first clamping assembly; the second clamping component comprises a second clamping part, the second clamping part is an elastic part in any one of the technical schemes, the second clamping component is arranged opposite to the first clamping component, a space is defined by the first clamping component and the second clamping component, the workpiece is located in the space, and the driving part is connected with the first clamping component and the second clamping component and is used for driving the second clamping component and the first clamping component to move relative to the workpiece so as to enable the second clamping component and the first clamping component to be abutted against the workpiece.

The positioning device provided by the utility model comprises a first clamping assembly, a second clamping assembly and a driving piece. The second clamping component comprises a second clamping part, the second clamping part is an elastic piece in any one of the technical schemes, and the elastic piece has elasticity and can be abutted against a workpiece needing to be adjusted or fixed so as to control the movement or the static state of the workpiece.

The second clamping component is arranged opposite to the first clamping component. In the positioning process, a space is defined by the first clamping assembly and the second clamping assembly, and the workpiece is located in the space. The wafer is positioned through the mutual matching of the second clamping assembly and the first clamping assembly. The workpiece is clamped by the first clamping assembly and the second clamping assembly from different directions, so that the positioning structure is more stable, and the accuracy of the position of the workpiece is ensured.

Furthermore, the positioning assembly also comprises a driving piece, and the driving piece is connected with the first clamping assembly and the second clamping assembly. The driving piece is used for driving the second clamping assembly and the first clamping assembly to move relative to the workpiece so that the elastic abutting portion abuts against the workpiece.

Specifically, when the workpiece is positioned and fixed, the driving part drives the first clamping assembly and the second clamping assembly to move close to each other relative to the workpiece, and then the first clamping assembly and the second clamping assembly are close to the workpiece and are in contact with the circumferential contact surface of the workpiece. During the contact process, the elastic piece with elasticity in the second clamping assembly is in close contact with the workpiece under the action of the driving piece. When the elastic piece contacts with the contact surface of the workpiece, the second elastic clamping part is deformed to generate elastic restoring force due to the acting force generated by the workpiece resisting clamping, and further the second clamping component is pressed on the contact surface of the workpiece, and the contact form is soft contact, so that the wafer workpiece can be firmly clamped, friction between the wafer workpiece and the clamping piece is avoided, part of clamping force can be counteracted by means of the generated deformation, the phenomenon that the surface of the wafer is damaged in the fixing process due to overlarge clamping force is avoided, the first clamping component is abutted against the other side of the workpiece, and further the workpiece is fixed in multiple directions by being matched with the second clamping component, and the workpiece is firmly clamped. The accuracy of the position of the workpiece is ensured.

Further, after the first clamping component and the second clamping component in the positioning component are close to the workpiece and abut against the workpiece, namely the positioning is completed, the first condition is that: the first clamping assembly and the second clamping assembly are separated from the workpiece, namely the driving piece drives the first clamping assembly and the second clamping assembly to move in opposite directions; the second case is: the first clamping assembly and the second clamping assembly maintain the abutting state and are fixed, so that the workpiece is clamped more firmly and stably.

Wherein the first case is the adjustment of the positioning assembly to the workpiece for normalizing the position of the workpiece; the second case is the adjustment and positioning of the positioning assembly, i.e. the position of the workpiece is regulated and then kept still after regulation.

In both cases, one state that exists is: when the work piece is subjected to a further process, such as cleaning or machining, an external operating member, such as a robot, transfers the work piece. The driving piece drives the first clamping assembly and the second clamping assembly to move in opposite directions, the first clamping assembly and the second clamping assembly are loosened and are far away from a clamped workpiece, and an operation space is provided for the workpiece to be cleaned or transferred during machining, so that the workpiece is prevented from being damaged due to part interference in the working process.

Therefore, the positioning device provided by the utility model is provided with the first clamping assembly and the second clamping assembly, and further clamps the workpiece from multiple directions under the driving of the driving part, so that the position of the workpiece is adjusted, and the workpiece is positioned on the preset position. The second clamping assembly comprises a second clamping part which is an elastic piece, so that collision friction between the second clamping part and a workpiece is avoided, the probability of workpiece damage is reduced, and the difficulty of operation is also reduced. Meanwhile, the elastic piece has elasticity, so that the second clamping component for fixing is simple and convenient to mount, and the using number of the spring clamping pieces in workpiece positioning is reduced; the elastic piece is non-metallic material or the elastic abutting part is non-metallic material, thereby avoiding the appearance of metal particle impurities and reducing the phenomenon of pollution to the workpiece.

In addition, the positioning device in the above technical solution provided by the present invention may further have the following additional technical features:

in the above technical solution, the first clamping assembly includes: the first clamping part is connected to the driving part through the first supporting part; the second clamping assembly further comprises: the second supporting part, the second clamping part is connected to the driving part through the second supporting part.

The first clamping part and the second clamping part are driven by the driving part to move so as to be abutted against the workpiece.

In this technical scheme, first centre gripping subassembly includes first supporting part and first clamping part, and first clamping part sets up on first supporting part, and first clamping part takes place the contact with the work piece when carrying out the centre gripping fixed, and first supporting part plays the effect of supporting to first clamping part when centre gripping work piece. The first clamping part can be in close contact with the workpiece better, and a better fixing effect is generated on the workpiece. The first clamping part is connected with the driving part through the first supporting part, the first supporting part is arranged on the driving part and moves under the driving of the driving part, and the first supporting part moves so as to drive the first clamping part to move, abut against the workpiece and be separated from the workpiece.

In this technical scheme, the second centre gripping subassembly still includes the second supporting part, and the second centre gripping portion passes through the second supporting part and connects in the driving piece. The second clamping part is contacted with the workpiece when clamping and fixing are carried out, and the second supporting part plays a supporting role in clamping the workpiece by the second clamping part. The second clamping part can be in close contact with the workpiece better, and the workpiece is subjected to better position adjustment and positioning. The second clamping part is connected with the driving part through the second supporting part, the second supporting part is arranged on the driving part and moves under the driving of the driving part, and the second supporting part moves so as to drive the second clamping part to move and abut against the workpiece and be separated from the workpiece.

The first clamping part and the second clamping part are driven by the driving part to move so as to be abutted against the workpiece.

In any of the above embodiments, the first clamping portion is an elastic member as in any of the above embodiments.

In this technical scheme, first clamping part is the elastic component, all is the elastic component through first clamping part and second clamping part, and first clamping part cooperates with the second clamping part in order to realize fixing a position the work piece, and then makes the work piece that is in by the centre gripping be in the effect center that first clamping part and second clamping part enclosed into the space, and the relative clamping part that sets up makes the work piece by the more firm of centre gripping, has promoted the stability of centre gripping.

Further, first clamping part and second clamping part all are the elastic component, make first clamping part all have elasticity with itself of second clamping part, and then the in-process of carrying out the centre gripping to the work piece receiving drive power, when the butt is to by the centre gripping work piece, because under the effect of two strands of opposite forces, second clamping part and first clamping part have all produced elastic deformation, and then make first clamping part and second clamping part and by the contact point of centre gripping product more, the stability of clamping structure has been strengthened on the one hand, on the one hand make the work piece be elastic contact with the contact form of whole clamping parts, avoid the product to take place to damage because of the dynamics is too big at the in-process of centre gripping.

The elastic piece is used for clamping the workpiece and is made of a non-metal material, and the spring clamping piece in the traditional technology is completely removed. Thereby avoided the granule that exists in the spring metal material to produce the emergence of metal pollution condition to the product, guaranteed the cleanliness factor among the work piece processing procedure, simultaneously, the degree of difficulty of installation can be reduced to the toughness of elastic component.

In any of the above technical solutions, the first clamping portion is a fixing member, and the fixing member is directly connected to the first supporting portion or is connected to the first supporting portion through a spring.

In this technical scheme, on the one hand, first clamping part is the mounting, and mounting and first supporting part lug connection, the distance between mounting and the first supporting part is fixed to thereby make first clamping part can be when adjusting or fixing a position the work piece, thereby contact the work piece and fix the work piece.

In one aspect, the first clamping assembly further comprises a spring connected to the first fixing member and the first supporting portion, such that an elastic connection is formed between the first supporting portion and the fixing member. When the fixing piece is contacted with the workpiece, the fixing piece conducts force to the spring due to the extrusion of the workpiece, so that the spring generates elastic deformation due to the action of the extrusion force and further generates elastic restoring force, and the fixing piece is pressed against the peripheral side of the workpiece based on the elastic restoring force generated by the spring so as to enable the fixing piece to abut against the workpiece.

In any of the above technical solutions, the first supporting portion may be connected to at least two first clamping portions, the at least two first clamping portions being spaced apart from each other, along a direction perpendicular to the movement direction of the driving member; the second supporting portion can be connected with at least two second clamping portions which are distributed at intervals.

In this technical solution, along the direction of motion perpendicular to driving piece, at least two first clamping parts can be connected to first supporting part, and at least two second clamping parts can be connected to the second supporting part. When the quantity of the work piece that needs the centre gripping is a plurality of, a plurality of first clamping parts and a plurality of second clamping parts cooperate, carry out the butt with the work piece in relative direction to the realization is to a plurality of work pieces adjusting position and location simultaneously, has promoted the efficiency of adjusting and fixing a position the work piece.

Further, at least two first clamping parts are distributed at intervals, and at least two second clamping parts are distributed at intervals, and the meaning of the interval distribution is as follows: on satisfying the basis of fixing a position a plurality of work pieces, can also make and have certain interval between a plurality of work pieces, and then avoid adjacent work piece that sets up to lead to rubbing between the work piece surface because of the distance is too tight to damage the emergence of work piece surface condition. Meanwhile, the next step of cleaning or processing the workpiece can be carried out, so that the workpiece can be conveniently clamped and moved by an external transfer part such as a manipulator and the like, and the application range of the positioning device is further enlarged.

The elastic part also comprises a bulge part, the bulge part is arranged on one side of the elastic connecting part away from the arc-shaped circle center, the elastic part is connected to the driving part through the bulge part, and the bulge part is adapted and replaced according to the size of the workpiece, so that the workpieces with different sizes can be accommodated in the space; or the positioning device also comprises a transition piece, the elastic piece is connected with the driving piece through the transition piece, and the transition piece is adapted and replaced according to the size of the workpiece, so that the workpieces with different sizes can be accommodated in the space.

When first clamping part and second clamping part are the elastic component, the elastic component passes through the bellying and connects in the drive division, specifically, first centre gripping subassembly: the elastic part is connected to the first supporting part through the bulge part, and the first supporting part is connected with the driving part; a second clamping assembly: the elastic part is connected to the second supporting part through the bulge part, and the second supporting part is connected with the driving part;

when first clamping part and second clamping part are the elastic component, the elastic component passes through the transition piece and is connected with the drive division, specifically, first centre gripping subassembly: the elastic part is connected to the first supporting part through the transition part, and the first supporting part is connected with the driving part; a second clamping assembly: the elastic part is connected to the second supporting part through the transition part, and the second supporting part is connected with the driving part.

When first clamping part is the mounting, second clamping part is the elastic component, and the elastic component passes through the bellying to be connected in the drive division, specifically, second centre gripping subassembly: the elastic part is connected to the second supporting part through the bulge part, and the second supporting part is connected with the driving part;

when first clamping part is the mounting, second clamping part is the elastic component, and the elastic component passes through the transition piece and is connected with the driving piece, specifically, first centre gripping subassembly: the fixed part is connected to the first supporting part through the transition piece, and the first supporting part is connected with the driving piece; a second clamping assembly: the elastic part is connected to the second supporting part through the transition part, and the second supporting part is connected with the driving part.

The elastic part also comprises a bulge part, the bulge part is arranged on one side of the elastic connecting part, which is far away from the arc-shaped circle center, the elastic part is connected to the driving part through the bulge part, the length of the bulge part can horizontally extend along the movement direction of the driving part, or the bulge part can be adapted and replaced according to workpieces with different sizes, so that the workpieces with different sizes can be accommodated in the space; or the positioning device further comprises a transition piece, the elastic piece is connected with the driving piece through the transition piece, the length of the transition piece can horizontally extend along the movement direction of the driving piece, or the protruding portion can be adapted and replaced according to workpieces with different sizes, so that the workpieces with different sizes can be accommodated in the space.

In this technical scheme, on the one hand, the elastic component includes the bellying, and the bellying sets up in the one side that the curved centre of a circle was kept away from to elastic connection portion, and bellying and elasticity butt portion are located the both sides of elastic component respectively promptly. The elastic part is connected to the first supporting part and/or the second supporting part through the bulge part, so that the first supporting part and/or the second supporting part can stably support the elastic part for clamping. The length of the protruding part can horizontally extend along the moving direction of the driving part or the protruding part can be adapted and replaced according to workpieces with different sizes, so that the enclosed space can accommodate the workpieces with different sizes, and the use range of the positioning assembly is enlarged.

In one aspect, the positioning device further comprises a transition piece, and the elastic piece is connected with the first support part and/or the second support part through the transition piece. The first supporting part and/or the second supporting part can stably support the elastic part for clamping, the length of the transition part can horizontally extend along the movement direction of the driving part, or the transition part can be adapted and replaced according to workpieces with different sizes, so that the enclosed space can accommodate the workpieces with different sizes, the use range of products is enlarged, and the transition part plays a role in connection.

For example, when the size of the workpiece is small, the convex part can horizontally extend towards the workpiece along the moving direction of the driving part, and the elastic part and the first supporting part and/or the second supporting part are connected together by the long convex part; or, depending on the size of the workpiece, replacing another boss; so that the elastic member can contact with the workpiece with smaller size to clamp the workpiece when the position of the first support member and/or the second support member and the workpiece is unchanged.

In any of the above technical solutions, the positioning device further includes: a base; the pair of sliding parts is arranged on the base and is respectively connected with the first clamping assembly and the second clamping assembly; the driving piece is connected with the base and used for driving the sliding piece to move so as to enable the second clamping assembly and the first clamping assembly to simultaneously approach or separate from the workpiece.

In the technical scheme, the positioning device further comprises a base and sliding pieces, the base bears the whole positioning device, at least one pair of sliding pieces are arranged on the base and are respectively connected with the first clamping assembly and the second clamping assembly, the driving piece is connected with the base and drives the sliding pieces to slide so as to drive the second clamping assembly and the first clamping assembly on the sliding pieces to be close to or far away from the workpiece simultaneously. Thereby adjusting the position of the workpiece.

Specifically, the inside installation cavity that is equipped with of base is provided with the passageway on the casing of base, and the driving piece setting is in the installation cavity of base to be connected with the slider that sets up on the base through the passageway, the driving piece can drive the slider and drive first centre gripping subassembly and second centre gripping subassembly and slide.

Specifically, the driving part simultaneously drives the first clamping assembly and the second clamping assembly to slide oppositely so as to clamp the workpiece, and the driving part simultaneously drives the first clamping assembly and the second clamping assembly to slide oppositely so as to loosen the clamped workpiece.

According to a further object of the present invention, the present invention also provides a processing apparatus, comprising the positioning device in any of the above technical solutions.

According to another object of the present invention, a processing apparatus is further provided, which includes the positioning device in any of the above technical solutions, so that the processing apparatus has all the beneficial effects of the positioning device, and will not be described herein again.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 shows a schematic view of the construction of an elastic member according to an embodiment of the present invention;

FIG. 2 is a schematic view of the structure of the workpiece against which the resilient member of the embodiment of FIG. 1 abuts;

FIG. 3 shows a schematic view of the structure of the elastic member in a further embodiment of the present invention;

FIG. 4 shows a schematic view of the structure of the work pieces abutted in the embodiment of FIG. 3;

FIG. 5 is a schematic view showing a structure of the embodiment of FIG. 3 in a state where the elastic member abuts against the workpiece;

FIG. 6 shows an enlarged view at C in the embodiment of FIG. 5;

FIG. 7 shows a schematic structural diagram of a positioning device in an embodiment of the utility model;

FIG. 8 is a schematic view showing a state where the positioning apparatus of the embodiment of FIG. 7 clamps a workpiece;

FIG. 9 is a second schematic view of the positioning device of FIG. 7 in a state of clamping a workpiece;

FIG. 10 shows a schematic view of a positioning device according to yet another embodiment of the present invention;

FIG. 11 shows one of the schematic structural views of the positioning device shown in FIG. 10;

FIG. 12 is a schematic view showing the structure of a positioning device according to still another embodiment of the present invention;

FIG. 13 shows a left side view of the positioning device of the embodiment of FIG. 12;

FIG. 14 is a schematic structural view of a positioning assembly in accordance with yet another embodiment of the present invention;

figure 15 shows a top view of the positioning assembly of the embodiment of figure 14.

Wherein, the correspondence between the reference numbers and the part names in fig. 1 to 15 is:

the clamping device comprises a positioning device 1, a first clamping component 12, a first clamping part 122, a first supporting part 124, a spring 126, a second clamping component 14, an elastic part 142, an elastic abutting part 1422, an elastic connecting part 1424, a convex part 1426, a second supporting part 144, a base 16, a sliding part 18, a driving part 17, a third supporting part 19, a workpiece 20 and a transition part 146.

Detailed Description

In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the utility model will be rendered by reference to the appended drawings. It should be noted that the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.

The elastic member 142, the positioning apparatus 1 and the processing device according to some embodiments of the present invention are described below with reference to the positioning apparatus 1 to 15.

Example one

As shown in fig. 1 and 2, one embodiment of the present invention proposes an elastic member 142 including: the elastic connecting part 1424, the elastic connecting part 1424 is arc-shaped; the two elastic contact portions 1422 are located on one side of the elastic connection portion 1424 close to the center of the arc, and the elastic contact portions 1422 are disposed at two ends of the elastic connection portion 1424.

In this embodiment, the elastic member 142 provided by the present invention includes an elastic connection portion 1424 and at least two elastic abutment portions 1422. The elastic connecting portion 1424 is arc-shaped, and the elastic connecting portion 1424 itself has elasticity. The two elastic pieces 142 which are oppositely arranged clamp the workpiece 20 at the same time, the installation difficulty is low, and the workpiece is prevented from being damaged, namely, the problem that the workpiece is damaged due to the fact that the spring is adopted as the elastic piece in the related art and is badly installed, and accordingly clamping is not in place or is excessively clamped is solved.

The two elastic contact portions 1422 are located on one side of the elastic connection portion 1424 close to the center of the arc, and the elastic contact portions 1422 are disposed at two ends of the elastic connection portion 1424. The elastic connecting portion 1424 has a supporting and connecting function for the two elastic abutting portions 1422 when clamping the workpiece 20, so that when the elastic abutting portions 1422 abut against the workpiece 20, the elastic abutting portions 1422 are deformed due to the reverse contact force provided by the workpiece 20 and the support of the connecting portion, and there are more contact points between the deformed elastic abutting portions 1422 and the workpiece 20. Therefore, the workpiece 20 can be better in close contact with the workpiece 20, better adjusting and fixing effects are generated on the workpiece 20, and the phenomenon that the workpiece 20 is damaged due to hard contact with the workpiece 20 can be avoided.

Specifically, the two elastic abutting portions 1422 and the elastic connecting portion 1424 are of an integral structure. The elastic member 142 is made of a non-metal material, and may be: the rubber elastic part, or the silica gel elastic part, or the polypropylene elastic part, or the polyvinylidene fluoride elastic part, or the polyether-ether-ketone elastic part, and the like, adopt the elastic part made of nonmetal materials, and then avoid metal ion pollution completely and effectively reduce impurity pollution.

In a possible case, the elastic member 142 may also be made of a metal material such as stainless steel, and the impurity contamination may also be effectively reduced.

Further, the two elastic contact portions 1422 are located on one side of the elastic connection portion 1424 close to the center of the arc, and the elastic contact portions 1422 are disposed at two ends of the elastic connection portion 1424. Thus, when the elastic member 142 is in contact with the workpiece 20 for clamping, the elastic contact part 1422 is first in contact with the workpiece 20, and the elastic connection part 1424 is not in contact with the workpiece 20, thereby avoiding the occurrence of damage to the workpiece 20 due to hard contact with the workpiece 20.

The elastic piece 142 provided by the utility model has the elastic connecting part 1424 and the at least two elastic abutting parts 1422, so that when the elastic piece 142 is abutted, elastic deformation can be generated to better attach the elastic piece to the workpiece 20, a better adjusting or fixing effect is generated, the phenomenon that the workpiece 20 is damaged due to hard contact with the workpiece 20 is avoided, and the elastic piece 142 has certain toughness, so that the installation difficulty is reduced, and the convenience in fixing by using the elastic piece 142 is improved.

Wherein, the workpiece is a wafer, as shown in fig. 1, the radius R corresponding to the arc surface changes its size according to the size of the wafer. The elasticity of the elastic element is affected by the material, the thickness D of the elastic element connecting part and the length L of the elastic element connecting part. Since different materials have different elastic moduli, the size of the elastic member (the thickness of the elastic member connecting portion, the length of the elastic member connecting portion) also needs to be adjusted when different materials are used.

Example two

In an embodiment of the utility model, as shown in fig. 3, a side of the elastic abutting portion 1422 away from the elastic connecting portion 1424 is a concave arc surface, and the elastic abutting portion 1422 may extend along a circumferential direction of the arc surface.

In this embodiment, a side of the elastic contact portion 1422 away from the elastic connection portion 1424 is a concave arc surface. So that the resilient abutment 1422 has a slope when in contact with the workpiece 20 that more closely conforms to the shape of the workpiece 20. And further the contact point with the workpiece 20 becomes more, so that the elastic abutment portion 1422 can contact the edge of the workpiece 20 in a more fitting posture. Resulting in a better positioning effect. Specifically, the workpiece 20 may be a wafer.

Further, the elastic abutment 1422 may extend in length in the circumferential direction in which the arc surface is located. For irregular workpieces 20, as shown in fig. 4, there may be unfilled corners a or cut edges B around the circumference, and the elastic abutment 1422 may extend in length along the circumferential direction where the arc is located. The elastic abutment portion 1422 having a certain length has more contact points with the workpiece 20, as shown in fig. 5 and 6, so that the elastic abutment portion 1422 has more contact points with the workpiece 20 when clamped. Further, the elastic contact part 1422 can be brought into contact with the regular portion of the workpiece 20 during clamping, and the portion of the workpiece 20 having the unfilled corner and cut edge is avoided, so that the irregular workpiece 20 can be firmly fixed by the elastic contact part 1422.

EXAMPLE III

As shown in fig. 7, 8 and 9, an embodiment of the present invention provides a positioning apparatus 1 for adjusting a position of a workpiece 20, including: a first clamping assembly 12; the second clamping assembly 14, the second clamping assembly 14 includes a second clamping portion, the second clamping portion is the elastic member 142 as in any of the above embodiments, the second clamping assembly 14 is disposed opposite to the first clamping assembly 12, a space is defined by the first clamping assembly 12 and the second clamping assembly 14, and the workpiece 20 is located in the space; and the driving part 17 is connected with the first clamping component 12 and the second clamping component 14, and the driving part 17 is used for driving the second clamping component 14 and the first clamping component 12 to move relative to the workpiece 20 so as to enable the first clamping component 12 and the second clamping component 14 to be abutted against the workpiece 20.

In this embodiment, the present invention provides a positioning device 1 comprising a first clamp assembly 12, a second clamp assembly 14, and a drive member 17. The second clamping assembly 14 includes a second clamping portion, which is an elastic member 142 as in any of the above embodiments, and the elastic member 142 itself has elasticity, and can abut against the workpiece 20 to be adjusted or fixed, so as to control the movement or static state of the workpiece 20.

As shown in fig. 7, 8 and 9, the second clamping assembly 14 is disposed opposite the first clamping assembly 12. During positioning, the first clamping assembly 12 and the second clamping assembly 14 enclose a space in which the workpiece 20 is located. The second clamping assembly 14 and the first clamping assembly 12 cooperate to position the workpiece 20. The workpiece 20 is clamped by the first clamping assembly 12 and the second clamping assembly 14 from different directions, so that the positioning structure is more stable, and the position accuracy of the workpiece 20 is ensured.

Further, the positioning assembly further comprises a driving member 17, and the driving member 17 is connected with the first clamping assembly 12 and the second clamping assembly 14. The driving member 17 is used for driving the second clamping assembly 14 and the first clamping assembly 12 to move relative to the workpiece 20, so that the elastic abutting part 1422 abuts against the workpiece 20.

Specifically, when the workpiece 20 is positioned, fixed or adjusted, the driving member 17 drives the first clamping assembly 12 and the second clamping assembly 14 to move towards each other relative to the workpiece 20, so that the first clamping assembly 12 and the second clamping assembly 14 approach the workpiece 20 and contact with the circumferential contact surface of the workpiece 20. During the contact, the elastic member 142 having elasticity in itself in the second clamping assembly 14 is in close contact with the workpiece 20 under the action of the driving member 17. When the elastic member 142 contacts the contact surface of the workpiece 20, the first elastic clamping portion is deformed to generate an elastic restoring force due to the acting force generated by the workpiece 20 resisting clamping, so that the second clamping component 14 is pressed against the contact surface of the workpiece 20, and the contact form is soft contact, so that the workpiece 20 can be clamped firmly, friction between the workpiece 20 and the clamping component is avoided, a part of clamping force can be counteracted by the generated deformation, the phenomenon that the surface of the workpiece 20 is damaged in the fixing process due to the overlarge clamping force is avoided, the first clamping component 12 abuts against the other side of the workpiece 20, and the workpiece 20 is fixed in multiple directions by matching with the second clamping component 14, and the workpiece 20 is clamped firmly. The accuracy of the position of the workpiece 20 is ensured.

In particular, the driving member 17 may be a cylinder or a motor.

Further, when the workpiece 20 is subjected to a next process such as cleaning or processing, an external operation member such as a robot or the like transfers the workpiece 20. The driving component 17 drives the first clamping component 12 and the second clamping component 14 to move in opposite directions, and the first clamping component 12 and the second clamping component 14 are loosened and away from the clamped workpiece 20, so that an operation space is provided for the transfer of the workpiece 20 during cleaning or processing, and the workpiece 20 is prevented from being damaged due to component interference generated in the working process of the workpiece.

Therefore, the positioning device 1 provided by the present invention, by providing the first clamping assembly 12 and the second clamping assembly 14, further clamps and fixes the workpiece 20 from multiple directions under the driving of the driving member 17, so that the workpiece 20 is firmly fixed. The second clamping assembly 14 comprises a second clamping portion which is an elastic piece 142, so that collision and friction between the second clamping portion and the workpiece 20 in the contact process are avoided, the probability of damage of the workpiece 20 is reduced, and the difficulty of operation is also reduced. Meanwhile, the elastic piece 142 has elasticity, so that the second clamping assembly 14 for fixing is simple and convenient to mount, the number of the clamping pieces of the spring 126 used in positioning the workpiece 20 is reduced, metal particle impurities are avoided, and the phenomenon of pollution to the workpiece 20 is reduced.

In one embodiment of the present invention, as shown in fig. 7, 8 and 9, the first clamping assembly 12 includes: a first support part 124 and a first clamping part 122, wherein the first clamping part 122 is connected with the driving part 17 through the first support part 124, and moves under the driving of the driving part 17 so as to enable the first clamping part 122 to be abutted against the workpiece 20; the second clamp assembly 14 further includes: and a second supporting portion 144, the second clamping portion being connected to the driving member 17 through the second supporting portion 144.

In this embodiment, the first clamping assembly 12 includes a first supporting portion 124 and a first clamping portion 122, the first clamping portion 122 is disposed on the first supporting portion 124, the first clamping portion 122 contacts with the workpiece 20 when clamping and fixing are performed, and the first supporting portion 124 supports the first clamping portion 122 when clamping the workpiece 20. So that the first clamping portion 122 can be better contacted with the workpiece 20 closely, and a better fixing or adjusting effect is generated on the workpiece 20. The first clamping portion 122 is connected to the driving member 17 through a first supporting portion 124, the first supporting portion 124 is disposed on the driving member 17, and the first supporting portion 124 moves under the driving of the driving member 17, so as to drive the first clamping portion 122 to move, and the first clamping portion 122 abuts against the workpiece 20 and can be separated from the workpiece 20.

In this embodiment, the second clamping assembly 14 further comprises a second support portion 144, and the second clamping portion is connected to the driving member 17 through the second support portion 144. The second clamping portion comes into contact with the workpiece 20 when clamped and fixed, and the second support portion 144 supports the second clamping portion when clamping the workpiece 20. So that the second clamping part can be better in close contact with the workpiece 20, and better fixing and adjusting effects are generated on the workpiece 20. The second clamping portion is connected with the driving member 17 through a second supporting portion 144, the second supporting portion 144 is disposed on the driving member 17, and the second supporting portion 144 moves under the driving of the driving member 17, so as to drive the second clamping portion to move to abut against the workpiece 20, and further separate from the workpiece 20.

Example four

In one embodiment of the present invention, as shown in fig. 10, the extending direction of the elastic abutting portion 1422 in the elastic member 142 is the same as the extending direction of the elastic connecting portion 1424.

In this embodiment, the extending direction of the elastic abutting portion 1422 is the same as the extending direction of the elastic connecting portion 1424, and specifically, the extending directions of the elastic abutting portion 1422 and the elastic connecting portion 1424 are both the height direction of the second supporting portion 144, so that the thicknesses of the first elastic abutting portion 1422 and the elastic connecting portion 1424 are increased, and there are more portions in contact with the workpiece 20, an effect of clamping a plurality of workpieces 20 on one side at the same time by using only a single second clamping portion is achieved, and the efficiency of adjusting and fixing the workpieces 20 is improved.

Therefore, in order to place a plurality of workpieces 20 in the space enclosed by the first clamping assembly 12 and the second clamping assembly 14, the structure of the elastic member 142 itself may be adopted for adjustment, and the elastic member 142 as in embodiment 1 or embodiment 2 is extended in the thickness direction of the elastic member 142, that is, the arrangement direction of the plurality of workpieces 20, so that when the first clamping assembly 12 and the second clamping assembly 14 move close to the workpieces 20, the plurality of workpieces 20 can be adjusted or fixed at the same time, and thus, the application range of the positioning device can be increased, and the positioning device can be adjusted or fixed at the same time compatible with the plurality of workpieces 20.

EXAMPLE five

As shown in fig. 7, in an embodiment of the present invention, the first clamping portion 122 is an elastic member 142 as in any of the above embodiments.

In this embodiment, the first clamping portion 122 is an elastic member 142, and the first clamping portion 122 and the second clamping portion are both elastic members 142, and the first clamping portion 122 and the second clamping portion are matched to position the workpiece 20, so that the clamped product is located at an action center of a space surrounded by the first clamping portion 122 and the second clamping portion, and the workpiece 20 is clamped more firmly by the first clamping portion 122 and the second clamping portion which are oppositely arranged, thereby improving the clamping stability.

Further, first clamping part 122 and second clamping part all are elastic component 142 for first clamping part 122 and second clamping part itself all have elasticity, and then in the in-process of carrying out the centre gripping to work piece 20 receiving drive power, when butt is to by centre gripping work piece 20, because under the effect of two strands of opposite forces, second clamping part and first clamping part 122 have all produced elastic deformation, and then make the contact point of first clamping part 122 and second clamping part and by centre gripping product more, strengthened clamping structure's stability on the one hand, make the contact form of work piece 20 and first clamping part 122 and second clamping part be elastic contact on the one hand, avoid the product to take place to damage because of the dynamics is too big in the in-process of centre gripping.

The clamping of the workpiece 20 is performed entirely using the resilient member 142, completely eliminating the need for the spring 126 clamp as is conventional. Therefore, the occurrence of metal pollution of the product caused by particles in the metal material of the spring 126 is avoided, the cleanliness of the workpiece 20 in the treatment process is ensured, and meanwhile, the toughness of the elastic part 142 can reduce the difficulty of installation.

In one embodiment of the present invention, as shown in fig. 14 and 15, the first clamping portion 122 is a fixing member, and the fixing member is directly connected to the first supporting portion 124 or is connected to the first supporting portion 124 through a spring 126.

In this embodiment, as shown in fig. 14, on one hand, the first clamping portion 122 is a fixing member, the fixing member is directly connected to the first supporting portion 124, and the distance between the fixing member and the first supporting portion 124 is fixed, so that the first clamping portion 122 can contact with the workpiece 20 to fix the workpiece 20 when the workpiece 20 is adjusted or positioned.

As shown in fig. 15, in one aspect, the first clamping assembly 12 further includes a spring 126, and the spring 126 is connected to the fixing member and the first supporting portion 124, such that a resilient connection is formed between the first supporting portion 124 and the fixing member. When the fixing member comes into contact with the workpiece 20, the fixing member transmits a force to the spring 126 due to the pressing of the workpiece 20, so that the spring 126 is elastically deformed due to the pressing force, and further generates an elastic restoring force, and the fixing member is pressed against the peripheral side of the workpiece 20 based on the elastic restoring force generated by the spring 126, so that the fixing member abuts against the workpiece 20.

Specifically, the surface of the fixing member contacting the workpiece 20 is an elastic plane, which can be elastically deformed when contacting the workpiece 20, thereby preventing the peripheral surface of the workpiece 20 from being damaged.

EXAMPLE six

In an embodiment of the present invention, as shown in fig. 11, when the positioning device is placed in a horizontal direction, the moving direction of the driving member 17 is a horizontal direction, and the first supporting portion 124 can connect at least two first clamping portions 122 along a direction perpendicular to the moving direction of the driving member 17, that is, along a vertical direction, the at least two first clamping portions 122 are spaced apart from each other; the second supporting portion 144 may connect at least two second clamping portions, and the at least two second clamping portions are spaced apart from each other. Any first clamping portion 122 should have a corresponding second clamping portion, "corresponding" means located in the same plane and oppositely disposed to clamp a workpiece 20.

In this embodiment, the first supporting portion 124 may connect at least two first clamping portions 122 and the second supporting portion 144 may connect at least two second clamping portions in a direction perpendicular to the moving direction of the driving member 17. When the number of the workpieces 20 to be clamped is multiple, the multiple first clamping portions 122 are matched with the multiple second clamping portions and abutted against the workpieces 20 in opposite directions, so that the multiple workpieces 20 can be simultaneously adjusted in position and positioned, and the efficiency of adjusting and positioning the workpieces 20 is improved.

Further, at least two first clamping parts 122 are distributed at intervals, and at least two second clamping parts are distributed at intervals, so that on the basis that the plurality of workpieces 20 are positioned, a certain interval can exist between the plurality of workpieces 20, and friction between the surfaces of the workpieces 20 caused by too tight distance between the adjacent workpieces 20 is avoided, so that the surface condition of the workpieces 20 is damaged. Meanwhile, the workpiece 20 can be conveniently clamped and moved by an external transfer part such as a manipulator and the like in the next step of cleaning or processing the workpiece 20, so that the application range of the positioning device 1 is further enlarged.

EXAMPLE seven

In an embodiment of the present invention, as shown in fig. 1, 3, 5, 7, 12 and 13, the elastic member 142 further includes a protruding portion 1426, the protruding portion 1426 is disposed on one side of the elastic connecting portion 1424 away from the center of the arc, the elastic member 142 is connected to the second supporting portion 144 through the protruding portion 1426, and the length of the protruding portion 1426 can horizontally extend along the moving direction of the driving member 17, so that the space can accommodate workpieces 20 with different sizes; or the second clamping assembly 14 further comprises a transition piece 146, the elastic piece 142 is connected with the second supporting part 144 through the transition piece 146, and the length of the transition piece 146 can horizontally extend along the moving direction of the driving piece 17, so that the space can accommodate workpieces 20 with different sizes.

Alternatively, the boss 1426 may be adapted to be changed from a differently sized workpiece, or the transition piece 146 may be adapted to be changed from a differently sized workpiece.

In this embodiment, on the one hand, the elastic element 142 includes a protrusion 1426, the protrusion 1426 is disposed on one side of the elastic connecting portion 1424 away from the center of the arc, that is, the protrusion 1426 and the elastic abutting portion 1422 are respectively located on two sides of the elastic element 142. The elastic member 142 is connected to the second supporting portion 144 through the protrusion 1426, so that the second supporting portion 144 can stably support the elastic member 142 for clamping. The length of the protrusion 1426 may extend horizontally along the moving direction of the driving member 17, so that the enclosed space can accommodate workpieces 20 with different sizes, and the application range of the positioning device is increased.

Alternatively, the boss 1426 may be adapted to be changed from a differently sized workpiece, or the transition piece 146 may be adapted to be changed from a differently sized workpiece.

Specifically, a through hole is formed in the protruding portion 1426, a through hole having the same specification as that of the second supporting portion 144 is formed in the second supporting portion 144, and the elastic member 142 is detachably disposed on the second supporting portion 144 through the through hole formed in the protruding portion 1426 and the through hole formed in the second supporting portion 144 by a screw.

Specifically, when the size of the workpiece 20 is small, the protrusion 1426 may be horizontally extended toward the workpiece 20 along the moving direction of the driving member 17. The longer protrusion 1426 connects the elastic member 142 and the second support 144 together, so that the elastic member 142 can also contact the workpiece 20 with a smaller size to clamp the workpiece 20 when the position of the second support 144 and the workpiece 20 is unchanged. In this way, when the number of the clamped workpieces 20 is multiple and the sizes of the multiple workpieces 20 are not consistent, the position of the second supporting portion 144 is kept unchanged, and the lengths of the multiple protruding portions 1426 can be changed, so that different elastic members 142 can be adapted to the workpieces 20 of different sizes, and clamping of the multiple workpieces 20 of different sizes can be realized.

In one aspect, the positioning device 1 further comprises a transition piece 146, and the elastic piece 142 is connected with the second support portion 144 through the transition piece 146. The second supporting part 144 can stably support the elastic part 142 for clamping, and the length of the transition part 146 can horizontally extend along the moving direction of the driving part 17, so that the enclosed space can accommodate workpieces 20 with different sizes, and the application range of products is enlarged. In this way, the positioning device 1 can clamp and fix workpieces 20 with different sizes only by adjusting the length dimension of the transition piece 146, and the size of the convex part 1426 of the elastic piece 142 is not required to be adjusted.

Alternatively, the boss 1426 may be adapted to be changed from a differently sized workpiece, or the transition piece 146 may be adapted to be changed from a differently sized workpiece.

As shown in fig. 12, when the first clamping portion 122 and the second clamping portion are both elastic members 142, the elastic members 142 are connected with the driving member 17 through the transition member 146, and specifically, the first clamping assembly 12: the elastic member 142 is connected to the first supporting portion 124 through a transition member 146, and the first supporting portion 124 is connected to the driving member 17; second clamp assembly 14: the resilient member 142 is connected to a second support portion 144 by a transition member 146, the second support portion 144 being connected to the drive member 17.

In one embodiment of the present invention, as shown in fig. 7, the positioning apparatus 1 further includes: a base 16; at least one pair of sliding members 18, disposed on the base 16 and connected to the first clamping assembly 12 and the second clamping assembly 14, respectively; a drive 17 is connected to the base 16, the drive 17 being adapted to drive the slide 18 to move the second clamp assembly 14 and the first clamp assembly 12 towards and away from the workpiece 20 simultaneously.

In this embodiment, the positioning device 1 further includes a base 16 and a sliding member 18, the base 16 carries the whole positioning device 1, at least one pair of sliding members 18 is disposed on the base 16 and respectively connected to the first clamping assembly 12 and the second clamping assembly 14, and a driving member 17 is connected to the base 16 and drives the sliding members 18 to slide so as to drive the second clamping assembly 14 and the first clamping assembly 12 on the sliding members 18 to simultaneously approach or move away from the workpiece 20. Thereby adjusting the position of the workpiece 20.

Specifically, a mounting cavity is formed inside the base 16, a channel is formed in a housing of the base 16, the driving member 17 is disposed in the mounting cavity of the base 16 and connected with the sliding member 18 disposed on the base 16 through the channel, and the driving member 17 can drive the sliding member 18 to drive the first clamping assembly 12 and the second clamping assembly 14 to slide.

Preferably, the driving member 17 simultaneously drives the first clamping assembly 12 and the second clamping assembly 14 to slide toward each other to clamp the workpiece 20, and the driving member 17 simultaneously drives the first clamping assembly 12 and the second clamping assembly 14 to slide toward each other to release the clamped workpiece 20.

Specifically, the bottom plate of the positioning device 1 is disposed on the base 16, so that the plurality of third supporting portions 19 and the bottom plate form a supporting frame for spacing and supporting the workpiece 20 clamped by the positioning device 1.

According to an embodiment of the present invention, the present invention further provides a processing apparatus, including the positioning device 1 in any of the above embodiments.

The processing apparatus provided in this embodiment includes the positioning device 1 in any of the above embodiments, so that all the beneficial effects of the positioning device 1 are achieved, and details are not described herein.

The workpiece 20 in the above embodiment is a wafer.

In addition, as shown in fig. 11, the wafer adjusting and positioning device further includes a third supporting portion 19, a bottom plate is disposed on the positioning device 1, the third supporting portion 19 is fixed on the bottom plate, and the third supporting portion 19 only plays a role of supporting and has no limiting function. In the previous process, the wafer is placed on the third support 19 by a carrying device such as a robot, and since there may be a problem of positional deviation of the wafer in the previous process, in order to avoid the positional accuracy of the wafer in the next process, the position of the wafer is adjusted and positioned by the positioning device, specifically, the wafer placed on the third support 19 is located in the space of the positioning device, and the position of the wafer can be adjusted by the action of the driving member 17.

The processing equipment provided by the embodiment comprises the wafer processing equipment such as the wafer cleaning tank, the wafer thinning machine, the wafer smoothing machine and the like, the problem of position inaccuracy in the wafer cleaning process is solved, meanwhile, the wafer is prevented from being damaged or polluted, the high-efficiency cleaning of the semiconductor wafer can be ensured, and metal ions, atoms, organic matters and particles attached to the surface of the wafer are removed. And the method can be operated in batch, is simple and reliable, is safe and convenient, and greatly enhances the practicability.

In the description herein, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly stated or limited otherwise; the terms "connected," "mounted," "secured," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. An elastomeric article, comprising:

the elastic connecting part is arc-shaped;

and the elastic abutting parts are arranged at two ends of the elastic connecting parts.

2. Spring according to claim 1,

one side of the elastic abutting part, which is far away from the elastic connecting part, is an inwards concave arc surface, and the length of the elastic abutting part extends along the circumferential direction where the arc surface is located.

3. A positioning device for adjusting the position of a workpiece, comprising:

a first clamping assembly;

the second clamping assembly comprises a second clamping part, the second clamping part is an elastic part according to claim 1 or 2, the second clamping assembly is arranged opposite to the first clamping assembly, a space is defined by the first clamping assembly and the second clamping assembly, and the workpiece is positioned in the space;

the driving piece is connected with the first clamping assembly and the second clamping assembly and used for driving the second clamping assembly and the first clamping assembly to move relative to the workpiece so that the first clamping assembly and the second clamping assembly are abutted to the workpiece.

4. The positioning device of claim 3,

the first clamping assembly comprises: the first clamping part is connected to the driving part through the first supporting part;

the second clamping assembly further comprises: the second supporting part is connected with the driving part through the second clamping part;

the first clamping part and the second clamping part are driven by the driving piece to move so as to be abutted against the workpiece.

5. The positioning device according to claim 4, wherein the first clamping portion is an elastic member according to claim 1 or 2.

6. The positioning device of claim 4,

the first clamping part is a fixing part, and the fixing part is directly connected with the first supporting part or is connected with the first supporting part through a spring.

7. The positioning device according to any one of claims 4 to 6,

in a direction perpendicular to the direction of movement of the driving member,

the first supporting part can be connected with at least two first clamping parts which are distributed at intervals;

the second supporting portion can be connected with at least two second clamping portions which are distributed at intervals.

8. The positioning device of claim 3,

the elastic part further comprises a protruding part, the protruding part is arranged on one side, away from the center of the arc, of the elastic connecting part, the elastic part is connected to the driving part through the protruding part, and the protruding part is adapted and replaced according to the size of the workpiece, so that workpieces with different sizes can be accommodated in the space; or

The positioning device further comprises a transition piece, the elastic piece is connected with the driving piece through the transition piece, and the transition piece is adapted and replaced according to the size of the workpiece, so that workpieces with different sizes can be accommodated in the space.

9. The positioning device of any of claims 3 to 6, further comprising:

a base;

the pair of sliding parts is arranged on the base and is respectively connected with the first clamping assembly and the second clamping assembly;

the driving piece is connected with the base and used for driving the sliding piece to move so as to enable the second clamping assembly and the first clamping assembly to be close to or far away from the workpiece.

10. A processing device, comprising:

the positioning device of any one of claims 3 to 9.

Images