CN113512707A - 一种电磁感应加热线圈氧化铝薄膜的制备方法 - Google Patents
一种电磁感应加热线圈氧化铝薄膜的制备方法 Download PDFInfo
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Abstract
本发明涉及表面工程技术领域,且公开了一种电磁感应加热线圈氧化铝薄膜的制备方法,所述制备方法包括以下步骤:将电磁感应加热线圈先进行粗磨和细磨,采用新的清洗方式洁净表面,将线圈放置在真空室中并抽真空至压强≤1×10‑3Pa,溅射工作气体为纯度99.99%氩气,工作气压稳定在1Pa,溅射功率150~200W,溅射时间60~120min,溅射温度为80~120℃。该电磁感应加热线圈氧化铝薄膜的制备方法,通过磁控溅射技术利用纯度99.99%的氧化铝靶材在紫铜电磁加热感应线圈表面快速形成氧化铝镀膜,此氧化铝薄膜厚度均匀、致密性好且与基体结合效果好,不易脱落,硬度高耐磨性好,解决了紫铜线圈因强度不足易变形或表面划伤而引起的工件表面加热不均匀问题,提高了工件热处理质量。
Description
技术领域
本发明涉及表面工程技术领域,具体为一种电磁感应加热线圈氧化铝薄膜的制备方法。
背景技术
感应热处理由于具有加热速度快、能源消耗低、生产效率高、无污染以及易于实现自动化而广泛应用于热处理行业,其中电磁感应加热线圈是感应热处理生产线上重要组成部分,直接影响到工件热处理质量,影响成品合格率。电磁感应加热线圈多由紫铜管制成,紫铜导电性、塑性都较为优异,但强度、硬度较差,易变形,影响工件加热均匀程度,同时,线圈的加热效率与线圈和工件之间的距离成反比关系,考虑到电磁感应加热最大效率,感应圈与工件之间的距离一般为1~4mm,如此小的距离,必须考虑电磁感应加热线圈与工件之间的绝缘问题,以避免线圈与工件之间接触导致短路损坏设备进而引起安全事故。Al2O3陶瓷薄膜具有较高的介电常数,是一种良好的电绝缘材料,还具有硬度高、优异的耐高温性、耐磨性和电化学性能,可以显著提高基体的强度与电绝缘性,适合电磁加热感应线圈的表面薄膜。磁控溅射镀膜技术拥有沉积速度快、基材温升低、膜层损伤小,薄膜致密性好,成膜厚度均匀,薄膜与基体结合性好,能够精确控制镀层厚度等优点,故选择磁控溅射镀膜技术对电磁感应加热线圈进行镀膜,为此我们提出了一种电磁感应加热线圈氧化铝薄膜的制备方法。
发明内容
针对现有技术的不足,本发明提供了一种电磁感应加热线圈氧化铝薄膜的制备方法,通过磁控溅射技术利用纯度99.99%的氧化铝靶材在紫铜电磁加热感应线圈表面快速形成氧化铝镀膜。此氧化铝薄膜厚度均匀、致密性好且与基体结合效果好,不易脱落,硬度高耐磨性好,解决了上述背景技术中所提出的问题。
为实现上述目的,本发明提供如下技术方案:一种电磁感应加热线圈氧化铝薄膜的制备方法,所述制备方法包括以下步骤:
S1、将电磁加热感应线圈进行打磨,依次使用清洗液在超声波清洗机中对线圈进行清洗。
S2、将电磁感应加热线圈放置在真空室内,将真空室抽真空至其压强在≤1×10-3Pa,每次沉积前需在Ar(99.99%)气氛中预溅射5min。
S3、电磁感应加热线圈表面进行喷丸处理去除表面杂质、杂色及氧化层,同时使介质表面粗化,增加与涂层之间的附着力,延长了涂膜的耐久性,将喷丸处理后电磁感应加热线圈放置在真空室内,将真空室抽真空至其压强在≤1×10-3Pa,每次沉积前需在Ar(99.99%)气氛中预溅射5min。
S4、采用磁控溅射技术沉积氧化铝薄膜,靶源为纯度99.99%圆形氧化铝靶,工艺参数如下:
溅射气体 高纯Ar(99.99%)气;
工作气压 维持在1Pa;
溅射时间 60~120min;
溅射功率 150~200W;
溅射温度 80~120℃。
优选的,所述步骤S1中的打磨方式为,先进行600#粗磨,然后采用2000目SiC砂纸细磨,保证线圈表面光滑平整,无明显凹凸。
优选的,对电磁感应加热线圈表面进行喷丸处理,喷丸处理参数压力为6MPa,总功率为0.6Kw,喷丸时间为30min。
优选的,所述清洗液依次为丙酮、无水乙醇,保证线圈表面洁净。
优选的,所述清洗方式为在清洗溶液中清洗2min,取出线圈令清洗液冷却2min,反复5次,防止连续长时间超声波清洗,使清洗液温度上升,清洗效果下降。
优选的,所述电磁加热感应线圈制作材料为紫铜,Al2O3薄膜厚度根据实际情况需要调整工艺参数获得。
有益效果如下:
该电磁感应加热线圈氧化铝薄膜的制备方法,通过磁控溅射技术利用纯度99.99%的氧化铝靶材在紫铜电磁加热感应线圈表面快速形成氧化铝镀膜。此氧化铝薄膜厚度均匀、致密性好且与基体结合效果好,不易脱落,硬度高耐磨性好,解决了紫铜线圈因强度不足易变形或表面划伤而引起的工件表面加热不均匀问题,提高了工件热处理质量,同时其良好的电绝缘性解决了线圈与工件相接触导致短路而引起的安全问题,也可使工件与线圈间隙进一步缩小,提高加热效率,节约成本。
具体实施方式
基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
本发明提供一种技术方案:一种电磁感应加热线圈氧化铝薄膜的制备方法,方法包括以下步骤:
(1)将电磁加热感应线圈先进行600#粗磨,然后采用2000#SiC砂纸细磨,依次使用丙酮、无水乙醇在超声波清洗机中对线圈进行清洗;
(2)清洗方式为在溶液中清洗2min,取出线圈令清洗液冷却2min,反复5次,防止连续长时间超声波清洗,使清洗液温度上升,清洗效果下降;
(3)电磁感应加热线圈表面进行喷丸处理去除表面杂质、杂色及氧化层,同时使介质表面粗化,增加与涂层之间的附着力,延长了涂膜的耐久性,喷丸处理参数压力为6MPa,总功率为0.6Kw,喷丸时间为30min;
(4)将喷丸处理后电磁感应加热线圈放置在真空室内,将真空室抽真空至其压强在≤1×10-3Pa,每次沉积前需在Ar(99.99%)气氛中预溅射5min,
(5)采用磁控溅射技术沉积氧化铝薄膜,靶源为纯度99.99%圆形氧化铝靶,工艺参数如下:
溅射气体 高纯Ar(99.99%)气;
工作气压 维持在1Pa;
溅射时间 60~120min;
溅射功率 150~200W;
溅射温度 80~120℃;
其中优选电磁加热感应线圈制作材料为紫铜,Al2O3薄膜厚度根据实际情况需要调整工艺参数获得。
实施例1
一种电磁感应加热线圈氧化铝薄膜的制备方法,制备方法包括以下步骤:
(1)将电磁加热感应线圈先进行600#粗磨,然后采用2000#SiC砂纸细磨,依次使用丙酮、无水乙醇在超声波清洗机中对线圈进行清洗。
(2)清洗方式为在溶液中清洗2min,取出线圈令清洗液冷却2min,反复5次,防止连续长时间超声波清洗,使清洗液温度上升,清洗效果下降。
(3)电磁感应加热线圈表面进行喷丸处理去除表面杂质、杂色及氧化层,同时使介质表面粗化,增加与涂层之间的附着力,延长了涂膜的耐久性,喷丸处理参数压力为6MPa,总功率为0.6Kw,喷丸时间为30min。
(4)将喷丸处理后电磁感应加热线圈放置在真空室内,将真空室抽真空至其压强在≤1×10-3Pa,每次沉积前需在Ar(99.99%)气氛中预溅射5min,
(5)采用磁控溅射技术沉积氧化铝薄膜,工艺参数如下。
设备采用中科院沈阳科学仪器研制中心的JGP450磁控溅射设备,溅射用的靶源为纯度99.99%的氧化铝靶,靶为圆盘形,其大小与电磁感应加热线圈大小相匹配,靶和基底之间距离为100mm,溅射工作气体为纯度99.99%氩气,镀膜时磁控溅射工作气压稳定在1Pa,其溅射功率在150~200W之间,溅射时间60~120min,溅射温度为80~120℃。
需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。
Claims (6)
1.一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:所述制备方法包括以下步骤:
S1、将电磁加热感应线圈进行打磨,依次使用清洗液在超声波清洗机中对线圈进行清洗;
S2、将电磁感应加热线圈放置在真空室内,将真空室抽真空至其压强在≤1×10-3Pa,每次沉积前需在Ar(99.99%)气氛中预溅射5min;
S3、电磁感应加热线圈表面进行喷丸处理去除表面杂质、杂色及氧化层,同时使介质表面粗化,增加与涂层之间的附着力,延长了涂膜的耐久性;
S4、采用磁控溅射技术沉积氧化铝薄膜,靶源为纯度99.99%圆形氧化铝靶。
2.根据权利要求1所述的一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:所述步骤S1中的打磨方式为,先进行600#粗磨,然后采用2000目SiC砂纸细磨,保证线圈表面光滑平整,无明显凹凸。
3.根据权利要求1所述的一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:对电磁感应加热线圈表面进行喷丸处理,喷丸处理参数压力为6MPa,总功率为0.6Kw,喷丸时间为30min。
4.根据权利要求1所述的一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:所述清洗液依次为丙酮、无水乙醇,保证线圈表面洁净。
5.根据权利要求1所述的一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:所述清洗方式为在清洗溶液中清洗2min,取出线圈令清洗液冷却2min,反复5次,防止连续长时间超声波清洗,使清洗液温度上升,清洗效果下降。
6.根据权利要求1所述的一种电磁感应加热线圈氧化铝薄膜的制备方法,其特征在于:所述电磁加热感应线圈制作材料为紫铜,Al2O3薄膜厚度根据实际情况需要调整工艺参数获得。
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