CN113500182A - Production method and device of rotary target - Google Patents
Production method and device of rotary target Download PDFInfo
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- CN113500182A CN113500182A CN202110707673.0A CN202110707673A CN113500182A CN 113500182 A CN113500182 A CN 113500182A CN 202110707673 A CN202110707673 A CN 202110707673A CN 113500182 A CN113500182 A CN 113500182A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 105
- 229910052751 metal Inorganic materials 0.000 claims abstract description 105
- 239000007788 liquid Substances 0.000 claims abstract description 101
- 239000000498 cooling water Substances 0.000 claims abstract description 46
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 239000007787 solid Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000002893 slag Substances 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000013077 target material Substances 0.000 abstract description 37
- 238000002360 preparation method Methods 0.000 abstract description 5
- 239000013078 crystal Substances 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 description 12
- 229910052738 indium Inorganic materials 0.000 description 11
- 229910052718 tin Inorganic materials 0.000 description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 10
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 10
- 238000005266 casting Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000009750 centrifugal casting Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D19/00—Casting in, on, or around objects which form part of the product
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D19/00—Casting in, on, or around objects which form part of the product
- B22D19/0081—Casting in, on, or around objects which form part of the product pretreatment of the insert, e.g. for enhancing the bonding between insert and surrounding cast metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/003—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting by using inert gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/04—Influencing the temperature of the metal, e.g. by heating or cooling the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/08—Shaking, vibrating, or turning of moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D43/00—Mechanical cleaning, e.g. skimming of molten metals
- B22D43/005—Removing slag from a molten metal surface
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Continuous Casting (AREA)
Abstract
The invention relates to the technical field of preparation of rotary targets, and discloses a production method and a device of a rotary target, which comprises the following steps: vertically installing a back pipe in a cavity of the outer mold; the bottom end of the back pipe is connected with the bottom wall of the cavity through a lower extension piece; the top of the back pipe is connected with an upper extension piece; the back tube, the upper extension, and the lower extension all form an annular chamber with the cavity; pouring molten metal liquid into the annular chamber; rotating the outer die, the back tube, the upper extension, and the lower extension; injecting cooling water into the back pipe, and adjusting the cooling rate of the metal liquid by controlling the flow and the drainage time of the cooling water; after the metal liquid is cooled into solid metal, removing the outer die; both ends of the solid metal are cut off. The production method and the device of the rotary target material provided by the invention can produce the rotary target material with longer length and smaller crystal grains.
Description
Technical Field
The invention relates to the technical field of preparation of rotary targets, in particular to a production method and a production device of a rotary target.
Background
In recent years, the preparation of targets has been increasingly developed. The target materials are mainly divided into plane targets, rotary targets, multi-arc targets and the like. The planar target material occupies a dominant position in both international and domestic markets, but the market share of the rotary target material is continuously promoted. Compared with the rotary target, the utilization rate of the planar target is lower, about 20-30%, and the utilization rate of the rotary target can reach 80%. The main restriction on the development of the rotary target is the great research and development difficulty, which is mainly indicated by the lack of production equipment and production technology.
Aiming at low-melting-point rotating targets comprising low-melting-point metals and alloy targets thereof, such as In, Sn, InSn alloy targets and the like, the current production methods mainly comprise a spraying method, a centrifugal casting method, a smelting method and the like. The target material prepared by the spraying method is easy to generate holes and is seriously oxidized. The production equipment required by the centrifugal casting method is expensive, the danger in the preparation process is high, and the quality of the finished product is poor. The melting method can prepare purer target materials, but the target materials are limited by equipment, longer target materials are difficult to prepare, and the target material has larger grains.
Disclosure of Invention
The purpose of the invention is: a method and apparatus for producing a rotary target material are provided, which can produce a rotary target material having a long length and a small crystal grain.
In order to achieve the above object, the present invention provides a method for producing a rotary target, comprising the steps of:
vertically installing a back pipe in a cavity of the outer mold; the bottom end of the back pipe is connected with the bottom wall of the cavity through a lower extension piece; the top of the back pipe is connected with an upper extension piece; the back tube, the upper extension, and the lower extension all form an annular chamber with the cavity;
pouring molten metal liquid into the annular chamber;
rotating the outer die, the back tube, the upper extension, and the lower extension; injecting cooling water into the back pipe, and adjusting the cooling rate of the metal liquid by controlling the flow and the drainage time of the cooling water;
after the metal liquid is cooled into solid metal, removing the outer die; both ends of the solid metal are cut off.
Optionally, in the step of pouring the molten metal liquid into the annular chamber, specifically, pouring the metal liquid from the top of the annular chamber from bottom to top;
in the step of injecting cooling water into the back tube, the method specifically comprises the following steps: and injecting the cooling water into the back pipe from bottom to top.
Optionally, in the step of adjusting the cooling rate of the metal liquid by controlling the flow rate and the drainage time of the cooling water, the step includes: controlling the flow rate of the cooling water to be 1000-2000L/h, and the drainage time of the cooling water to be 10-60 s.
Alternatively, in the step of injecting cooling water into the back pipe, the liquid level of the metal liquid should be always kept higher than the liquid level of the cooling water by 100 mm.
Optionally, in the step of rotating the outer mold, the back tube, the upper extension piece and the lower extension piece, specifically: rotating the outer die, the back tube, the upper extension member and the lower extension member at a speed of 6-15 RPM.
Optionally, before the step of pouring the molten metal liquid into the annular chamber, the method further comprises: and filling the metal liquid into a pouring device, and heating the metal liquid to 180-300 ℃.
Optionally, after the steps of charging the metal liquid into the casting device and heating the metal liquid to 180 to 300 ℃, the method further comprises: and carrying out slag salvaging on the metal liquid until the liquid level of the metal liquid is mirror-surface bright.
Optionally, before the step of pouring the molten metal liquid into the annular chamber, the method further comprises: preheating the outer die to 200 ℃, and replacing air in the annular cavity chamber with inert gas.
In order to solve the same technical problem, the present invention further provides a production apparatus for a rotary target, comprising:
a rotating device;
an outer mold; the outer die is vertically arranged on the rotating device; the outer mold is provided with a cavity with an upward opening;
a back tube; the back pipe is vertically arranged on the rotating device and is positioned in the cavity; an annular chamber is formed between the back pipe and the inner wall of the cavity;
an upper extension member; the upper extension piece is detachably connected to the top end of the back tube;
a lower extension member; the lower extension piece is detachably connected between the upper surface of the rotating device and the bottom end of the back pipe; and
a pouring device; the pouring gate of the pouring device is positioned above the annular cavity.
Optionally, the axis of the back tube coincides with the axis of the lower extension piece, the axis of the upper extension piece and the axis of the outer die, respectively;
the outer surface of the upper extension piece extends along the radial direction to form at least two upper centering rods which are uniformly arranged on the outer surface of the upper extension piece; the outer surface of the lower extension piece extends with at least two lower centering rods uniformly arranged on the outer surface of the lower extension piece along the radial direction;
the distance between the outer peripheral surface of the back pipe and the inner wall of the cavity is respectively the same as the length of the upper centering rod and the lower centering rod.
Compared with the prior art, the production method and the device of the rotary target material provided by the invention have the beneficial effects that: the invention adds an upper extension piece and a lower extension piece on the back tube to control the length of the target material. And after the outer die is removed, two ends of the solid metal are required to be cut off, and the process is controlled, so that the defects of the target material are concentrated on the metal part corresponding to the lower extension piece, and the production quality of the rotary target material is improved. The invention controls the cooling rate of the metal liquid, controls the grain size of the target material and further improves the quality of the target material.
Drawings
Fig. 1 is a schematic step diagram of a method for producing a rotary target according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a production apparatus for a rotary target according to a first embodiment of the present invention.
In the figure, 1, an outer die; 2. an annular chamber; 3. a back tube; 4. a rotating device; 5. a pouring device; 6. an upper centering rod; 7. a lower centering rod; 8. an upper extension member; 9. a lower extension member.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In the description of the present invention, it should be understood that the terms used in the present invention are used in the description of the present invention, and it should be understood that the orientations and positional relationships indicated by the terms "center", "upper", "lower", "vertical", "top", "bottom", "inner", "outer", etc. in the present invention are based on the orientations and positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
As shown in fig. 1, a method for producing a rotary target according to a preferred embodiment of the present invention includes the following steps:
vertically installing a back pipe 3 in a cavity of the outer mold 1; wherein, the bottom end of the back tube 3 is connected with the bottom wall of the cavity through a lower extension piece 9; the top of the back pipe 2 is connected with an upper extension piece 8; the back tube 3, the upper extension piece 8 and the lower extension piece 9 form an annular cavity 2 together with the cavity;
pouring molten metal liquid into the annular chamber 2;
rotating the outer die 1, the back tube 3, the upper extension piece 8 and the lower extension piece 9; cooling the metal liquid and controlling the cooling rate of the metal liquid, and specifically operating as follows: cooling water is injected into the back pipe 3, and the cooling rate of the metal liquid is adjusted by controlling the flow rate and the drainage time of the cooling water;
after the metal liquid is cooled into solid metal, removing the outer mold 1; both ends of the solid metal are cut off.
Based on the technical scheme, the production method provided by the invention has the advantages that the upper extension piece 8 and the lower extension piece 9 are arranged at the two ends of the back tube 3, and the length of the prepared target material is controlled by the upper extension piece 8 and the lower extension piece 9, so that the target material with the length of 3.8m can be prepared. The back tube 3 is vertically placed at the center of the cavity of the outer die 1, so that the outer circumferential surface of the back tube 3, the outer circumferential surface of the upper extension piece 8 and the outer surface of the lower extension piece 9 and the annular inner wall of the cavity form an annular chamber 2 for forming the target. The metal liquid poured into the annular chamber 2 can be liquid formed by low-melting-point metal and alloy thereof according to a certain proportion, and can also be certain pure metal liquid. And then the metal liquid in the annular chamber 2 is cooled to solid metal through the rotating and cooling operation. The grain size of the target material can be controlled by controlling the cooling rate, and the defect distribution can be controlled by controlling the cooling mode and the rotating speed. The cooling water is adopted, the metal liquid arranged outside the back pipe 3 is cooled by utilizing the heat conduction principle, and the operation is simple. But also the metal liquid can be solidified from the inside to the outside in sequence. The cooling rate is adjusted by controlling the flow rate and the drainage time of the cooling water, so that the grain size of the produced target material is ensured to meet the standard. The production method can manufacture longer target materials, control the grain size of the target materials, and realize the effects of prolonging the length of the target materials and controlling the quality of the target materials.
In the step of pouring the molten metal liquid into the annular chamber 2, the metal liquid is poured from the top of the annular chamber 2 from bottom to top. And a top pouring mode is adopted, so that the blockage of a pouring channel caused by bottom pouring is prevented. In the step of injecting cooling water into the back pipe 3, the specific steps are as follows: and cooling water is injected into the back pipe 3 from bottom to top to ensure that the metal liquid is solidified in sequence from bottom to top. The step of adjusting the cooling rate of the metal liquid by controlling the flow rate and the drainage time of the cooling water specifically comprises the following steps: the flow rate of the cooling water is controlled to be 1000L/h-2000L/h, the drainage time of the cooling water is controlled to be 10 s-60 s, and the metal liquid can be cooled into the solid metal at the lowest cost. If the flow rate of the cooling water is too small or the drainage time is too short, the cooling effect cannot be achieved. If the flow rate of the cooling water is too large or the drainage time is too long, the cooling water is wasted, and the production cost of the rotary target material is increased.
More specifically, in the step of injecting the cooling water into the back pipe 3, a liquid level difference of 100mm should be always maintained between the liquid level of the metal liquid and the liquid level of the cooling water. The liquid level of the metal liquid is higher than that of the cooling water so as to ensure the cooling effect.
In addition, in the step of rotating the outer die 1, the back tube 3, the upper extension 8 and the lower extension 9, specifically: the outer die 1, the back tube 3, the upper extension 8 and the lower extension 9 are rotated at a speed of 6-15 RPM. The centrifugal effect ensures that the cooling water located in the back tube 3 is able to cool the metal liquid in the whole annular chamber 2. When rotating, the metal liquid in the annular chamber 2 is in a flowing state, so that the heat of the metal liquid can be transmitted to the cooling water in the back pipe 3, and the cooling effect is ensured.
In addition, before the step of pouring the molten metal liquid into the annular chamber 2, the method further comprises the following steps: and (3) filling metal liquid into the pouring device 5, and heating the metal liquid to 180-300 ℃. The metal liquid is heated to a specified stability, ensuring that all the metal is in the molten state, for injection into the annular chamber 2. After the step of charging the metal liquid into the casting device 5 and heating the metal liquid to 180-300 ℃, the method further comprises the following steps: and (4) dragging slag for the metal liquid until the liquid level of the metal liquid is mirror-surface bright. In the embodiment, three slag salvaging operations are performed before pouring, so that impurities in the target material are reduced.
Optionally, before the step of pouring the molten metal liquid into the annular chamber 2, the method further comprises: the outer mould 1 is preheated to 200 c and the air inside the annular chamber 2 is displaced with an inert gas. Before casting, the external mold 1 is preheated to remove the water in the annular cavity. By introducing inert gas into the annular chamber 2, oxidizing gas inside the annular chamber 2 is removed, and the oxidation of metal in the casting process is reduced. In the step of replacing the air in the annular chamber 2 with inert gas, the following steps are specifically performed: and (3) filling argon into the annular chamber 2, wherein the flow rate of the argon is 10L/min, and the replacement time is 0.5h, so that the air in the annular chamber 2 is completely replaced.
In order to solve the same technical problem, as shown in fig. 2, the present invention further provides a production apparatus for a rotary target, which comprises a rotating device 4, an outer mold 1, a back tube 3, an upper extension 8, a lower extension 9 and a casting device 5. The rotating device 4 in the present application may be a curved surface coating device disclosed in patent publication No. CN 110607509A. The outer mold 1 is a circular cylinder structure. The outer die 1 is vertically arranged on the rotating device 4; the outer die 1 is provided with a cavity with an upward opening. The back tube 3 is vertically arranged on the rotating device 4 and is positioned in the cavity; an annular chamber 2 is formed between the backing tube 3 and the inner wall of the chamber. The upper extension piece 8 is detachably connected to the top end of the back tube 3; the lower extension 9 may be of cylindrical configuration. A lower extension member 9 is detachably connected between the upper surface of the rotating means 4 and the bottom end of the back pipe 3. The casting device 5 is a heating furnace or a melting furnace. The pouring opening of the pouring device 5 is located above the annular chamber 2.
Based on the technical scheme, the outer die 1 and the back tube 3 are both arranged on the rotating device 4 and can rotate along with the rotation of the rotating device 4. The upper extension piece 8 and the lower extension piece 9 are both adhered and fixed with the back tube 3 through high-temperature adhesive tapes. The gaps between the two ends of the back tube 3 and the upper extension piece 8 and the lower extension piece 9 and the installation gap between the lower extension piece 9 and the rotating device 4 are sealed by high-temperature-resistant glue. The annular chamber 2 provides space for the pouring and cooling of the metal liquid. The pouring device 5 is filled with molten metal liquid for heating the metal liquid to a certain pouring temperature. The forming space of the target is determined by the outer die 1 and the back tube 3, the length of the target is controlled by the lower extension piece 9, and raw materials for manufacturing the target are provided by the pouring device 5, so that workers can conveniently manufacture the rotary target with small granularity and long length.
It is worth mentioning that the axis of the back tube 3 is respectively coincident with the axis of the lower extension piece 9, the axis of the upper extension piece 8 and the axis of the outer die 1, so that the thickness of the annular chamber 2 is ensured to be uniform, and the target material with uniform thickness can be manufactured. The outer surface of the upper extension piece 8 extends radially with at least two upper centering rods 6 uniformly arranged on the outer surface of the upper extension piece 8; the outer surface of the lower extension piece 9 is extended radially with at least two lower centering bars 7 uniformly arranged on the outer surface of the lower extension piece 9. The distance between the outer peripheral surface of the back pipe 3 and the inner wall of the cavity is the same as the length of the upper centering rod 6 and the length of the lower centering rod 7 respectively. When the production device of the rotary target is assembled, the lower extension piece 9 is placed in the cavity, and the distance between the outer peripheral surface of the back tube 3 and the inner wall of the cavity is the same as the length of the lower centering rod 7, so that the coincidence of the axis of the lower extension piece 9 and the central axis of the cavity can be ensured. And then the back tube 3 is arranged on the upper surface of the lower extension piece 9, and the upper extension piece 8 is arranged on the upper surface of the back tube 3, so that the axis of the back tube 3 is further ensured to be positioned at the center of the cavity, and the centering effect is realized.
The working process of the invention is as follows:
1. the back tube 3 is processed by spraying and coating, so that the bonding rate of the target material and the back tube 3 is improved;
2. preheating the outer mold 1 in advance, wherein the preheating temperature is about 300 ℃;
3. an upper extension piece 8 and a lower extension piece 9 are arranged at two ends of the back tube 3; the back tube 3 is then vertically mounted within the outer mold 1. Wherein the back tube 3 and the two extending pieces are pasted by high-temperature adhesive tapes;
4. the low-melting-point metal and the alloy thereof form metal liquid according to a certain proportion, the metal liquid is heated and melted to a certain pouring temperature through a pouring device 5, and slag is fished for three times;
5. replacing air in the annular cavity by Ar gas;
6. pouring metal liquid into an annular cavity chamber formed by the outer die 1 and the back pipe 3 from a high position, and adjusting the target material cooling time and cooling rate by controlling the flow rate and drainage time of cooling water in the back pipe 3;
7. the discharge of the air holes of the target material is promoted by controlling the rotating speed of the rotating device 4 and the centrifugal force, and the metal liquid is sequentially solidified from the bottom to the top and from the inside to the outside;
8. and cooling the solid metal, removing the outer die 1, machining and cutting the head and the tail ends (corresponding to the parts of the upper extension piece 8 and the lower extension piece 9) of the solid metal, and machining the middle part of the solid metal according to the standard to obtain the required rotary target material.
Specifically, in this example, a tin rotary target was prepared. The back pipe 3 is first sprayed and coated. The upper extension piece 8 and the lower extension piece 9 are clamped and fixed at two ends of the back tube 3. The back tube 3 is vertically installed in the cavity of the outer mold 1, wherein the outer mold 1 and the lower extension 9 are both located on the upper surface of the rotating means 4. A certain amount of pure tin is filled in the pouring device 5, and the pure tin is heated to 270-300 ℃ by the pouring device 5. And after the pure tin is melted, carrying out three-time slag salvaging operations on the tin liquid by using a stainless steel colander until the surface of the tin liquid is bright. Preheating the outer die 1, and integrally preheating the outer die 1 to 200 ℃ through a heating device. After the external mold 1 is preheated, air in the annular cavity is replaced by Ar gas, the flow rate of the Ar gas is 10L/min, and the replacement time is 0.5 h. And (3) heating the top of the outer die 1 by using a heater, and keeping the tin in a liquid state when the tin liquid is poured. Molten metal liquid is injected into the annular chamber from the top. The rotating device 4 is started, and the rotating speed is 6RPM to 15 RPM. And (3) injecting cooling water into the back pipe 3, wherein the flow rate of the cooling water is 1000-2000L/h, the cooling water is cooled from the bottom of the back pipe 3 upwards, and the liquid level difference between the liquid level of the tin and the liquid level of the cooling water is kept at 100mm, so that the metal liquid is sequentially solidified from the bottom upwards and from the inside outwards. And after the metal liquid is cooled into solid metal, removing the outer die 1, cutting off the head and tail ends of the solid metal, and performing surface machining on the middle part of the solid metal to obtain the tin rotary target.
Example two
The difference between this embodiment and the first embodiment is: this example requires the preparation of an indium rotary target. The back pipe 3 is first sprayed and coated. The upper extension piece 8 and the lower extension piece 9 are clamped and fixed at two ends of the back tube 3. The back tube 3 is vertically installed in the cavity of the outer mold 1, wherein the outer mold 1 and the lower extension 9 are both located on the upper surface of the rotating means 4. A certain amount of pure indium is filled in the pouring device 5, and the pouring device 5 is utilized to heat the pure indium to 180-220 ℃. After the pure indium is melted, the stainless steel colander is used for carrying out slag salvaging operation on the indium liquid for three times until the indium liquid level is bright. Preheating the outer die 1, and integrally preheating the outer die 1 to 180-220 ℃ by a heating device. After the external mold 1 is preheated, air in the annular cavity is replaced by Ar gas, the flow rate of the Ar gas is 10L/min, and the replacement time is 0.5 h. And (3) heating the top of the outer die 1 by using a heater, and keeping the indium in a liquid state when the indium liquid is poured. Molten metal liquid is injected into the annular chamber from the top. The rotating device 4 is started, and the rotating speed is 6RPM to 15 RPM. And (3) injecting cooling water into the back tube 3, wherein the flow rate of the cooling water is 1000-2000L/h, the cooling water is cooled from the bottom of the back tube 3 upwards, and the liquid level difference between the liquid level of the indium and the liquid level of the cooling water is kept at 100mm, so that the metal liquid is sequentially solidified from the bottom upwards and from the inside outwards. And after the metal liquid is cooled into solid metal, removing the outer die 1, cutting off the head and tail ends of the solid metal, and performing surface machining on the middle part of the solid metal to obtain the indium rotary target.
Except for the above differences, other structures of the present embodiment are the same as those of the first embodiment, and corresponding effects and principles are also the same, which are not described herein again.
In summary, embodiments of the present invention provide a method and an apparatus for manufacturing a rotary target, which add an upper extension piece and a lower extension piece on a backing tube to control the length of the target. And after the outer die is removed, two ends of the solid metal are required to be cut off, and the process is controlled, so that the defects of the target material are concentrated on the metal part corresponding to the lower extension piece, and the production quality of the rotary target material is improved. The invention controls the cooling rate of the metal liquid, controls the grain size of the target material and further improves the quality of the target material.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (10)
1. The production method of the rotary target is characterized by comprising the following steps:
vertically installing a back pipe in a cavity of the outer mold; wherein the bottom end of the back pipe is connected with the bottom wall of the cavity through a lower extension piece; the top of the back pipe is connected with an upper extension piece; the back tube, the upper extension, and the lower extension all form an annular chamber with the cavity;
pouring molten metal liquid into the annular chamber;
rotating the outer die, the back tube, the upper extension, and the lower extension; injecting cooling water into the back pipe, and adjusting the cooling rate of the metal liquid by controlling the flow and the drainage time of the cooling water;
after the metal liquid is cooled into solid metal, removing the outer die; both ends of the solid metal are cut off.
2. The method for producing a rotary target according to claim 1, wherein in the step of pouring the molten metal liquid into the annular chamber, specifically, the metal liquid is poured from the top of the annular chamber from the bottom to the top;
in the step of injecting cooling water into the back tube, the method specifically comprises the following steps: and injecting the cooling water into the back pipe from bottom to top.
3. The method for producing a rotary target according to claim 2, wherein the step of adjusting the cooling rate of the metal liquid by controlling the flow rate and the drainage time of the cooling water comprises: controlling the flow rate of the cooling water to be 1000-2000L/h, and the drainage time of the cooling water to be 10-60 s.
4. The method for producing a rotary target according to claim 1, wherein the liquid level of the molten metal is always higher than the liquid level of the cooling water by 100mm in the step of injecting the cooling water into the backing tube.
5. The method for producing a rotary target according to claim 1, wherein in the step of rotating the outer mold, the back tube, the upper extension piece and the lower extension piece, specifically: rotating the outer die, the back tube, the upper extension member and the lower extension member at a speed of 6-15 RPM.
6. The method for producing a rotary target according to claim 1, further comprising, before the step of pouring the molten metal liquid into the annular chamber: and filling the metal liquid into a pouring device, and heating the metal liquid to 180-300 ℃.
7. The method for producing a rotary target according to claim 6, further comprising, after the steps of charging the metal liquid into a pouring device and heating the metal liquid to 180 ℃ to 300 ℃: and carrying out slag salvaging on the metal liquid until the liquid level of the metal liquid is mirror-surface bright.
8. The method for producing a rotary target according to any of claims 1 to 7, further comprising, before the step of pouring molten metal into the annular chamber: preheating the outer die to 200 ℃, and replacing air in the annular cavity chamber with inert gas.
9. A production apparatus for a rotary target, comprising:
a rotating device;
an outer mold; the outer die is vertically arranged on the rotating device; the outer mold is provided with a cavity with an upward opening;
a back tube; the back pipe is vertically arranged on the rotating device and is positioned in the cavity; an annular chamber is formed between the back pipe and the inner wall of the cavity;
an upper extension member; the upper extension piece is detachably connected to the top end of the back tube;
a lower extension member; the lower extension piece is detachably connected between the upper surface of the rotating device and the bottom end of the back pipe; and
a pouring device; the pouring gate of the pouring device is positioned above the annular cavity.
10. The apparatus for producing a rotary target according to claim 9, wherein the axis of the backing tube coincides with the axis of the lower extension, the axis of the upper extension, and the axis of the outer mold, respectively;
the outer surface of the upper extension piece extends along the radial direction to form at least two upper centering rods which are uniformly arranged on the outer surface of the upper extension piece; the outer surface of the lower extension piece extends with at least two lower centering rods uniformly arranged on the outer surface of the lower extension piece along the radial direction;
the distance between the outer peripheral surface of the back pipe and the inner wall of the cavity is respectively the same as the length of the upper centering rod and the lower centering rod.
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