CN108788040A - A kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss - Google Patents
A kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss Download PDFInfo
- Publication number
- CN108788040A CN108788040A CN201810725889.8A CN201810725889A CN108788040A CN 108788040 A CN108788040 A CN 108788040A CN 201810725889 A CN201810725889 A CN 201810725889A CN 108788040 A CN108788040 A CN 108788040A
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- CN
- China
- Prior art keywords
- crystallizer
- continuously casting
- target blankss
- metal target
- hydrogen plasma
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/10—Supplying or treating molten metal
- B22D11/11—Treating the molten metal
- B22D11/116—Refining the metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/10—Supplying or treating molten metal
- B22D11/11—Treating the molten metal
- B22D11/114—Treating the molten metal by using agitating or vibrating means
- B22D11/115—Treating the molten metal by using agitating or vibrating means by using magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss, including two symmetrically arranged fixed frames, multiple water cooled rolls and driven roller are connected between two fixed frames, water cooled rolls is located at driven roller oblique upper, and is engaged with driven roller；Crystallizer is connected with below fixed frame, crystallizer outer wall is wound with induction coil, dummy bar is connected with below crystallizer；Multiple water cooled rolls are set at " V " font above crystallizer；Feed device, source gas conveying device and electrode assembly are installed above fixed frame.The device of hydrogen plasma melting continuously casting production high pure metal target blankss provided by the invention, the fusing of the unfused metal of reaction tank bottom is realized using the one-directional rotation of multiple roll, metal target blank melt after refining flows into and carries out electromagnetic soft-contact continuously casting in crystallizer, and then obtains high-purity, high-compactness and with the rodlike sputtering target blankss being centainly orientated.
Description
Technical field
The present invention relates to high pure metal target blankss production technical fields, more particularly to a kind of hydrogen plasma melting continuously casting
Produce the device of high pure metal target blankss.
Background technology
High-purity sputtering target blankss are widely used in semiconductor integrated circuit, recording medium, plane and show and workpiece surface
The fields such as coating.Purity height is not required nothing more than, and requires dense structure, the tiny and suitable crystal orientation of crystal grain.Sputtering at present
The preparation process of target blankss predominantly melts casting and powder metallurgy.Its smelting of melt casting and cast are usually in vacuum or protection
It is carried out under property atmosphere.Conventional molding is easy to form loose, shrinkage cavity in ingot casting since its process of setting is without special control
With crystal grain position to confusion, also crucible reduces the purity of target blankss with mold pollution, and then influences the quality of sputtered film.By rear
Continuous hot-working and heat treatment process repeatedly can improve loose, reduction porosity, but equally can also introduce new pollution.And
Fusion casting produces target blankss, and in crystallite dimension and tropism control, there is also no small difficulty；When powder metallurgic method prepares target blankss, close
Key is：(1) select high-purity, superfines as raw material；(2) selection can realize the forming sintering technology of quick densifying, with
Ensure the low porosity of target blankss, and controls grain size；(3) preparation process strictly controls the introducing of impurity element.At present for height
Pure metal powder, gas content generally all can 1~2 order of magnitude higher than simple metal, powder is thinner, and Control of gas content is more tired
Difficulty, content is also higher, and manufacturing cost is high.Therefore from the perspective of target blankss purity and manufacturing cost, fusion casting affirmative
It is preferred technique prepared by high-purity target blankss.
However, prior art has shortcomings：(1) induction melting：Temperature is not high, does not have strong reducing property atmosphere, promotees
Into the removing of oxygen in melt；(2) ceramic crucible is used：Crucible pollute, if with cold-crucible, bottom cannot stir, cause alloy at
It is point uneven, it needs to overturn melting repeatedly several times thus, uniform alloy melt could be obtained, and be single stove melting, Bu Nenglian
Continuous charging, it is difficult to prepare the target blankss more than 20kg or more；(3) metal or ceramics/graphite casting mould casting solidification, tissue can not
Control, intermediate shrinkage cavity/loose serious.
Invention content
The object of the present invention is to provide the devices that a kind of hydrogen plasma melting continuously casting produces high pure metal target blankss, with solution
Certainly the above-mentioned problems of the prior art realizes the fusing of the unfused metal of reaction tank bottom, essence using the one-directional rotation of multiple roll
Metal target blank melt after refining flows into and carries out electromagnetic soft-contact continuously casting in crystallizer, and then obtains high-purity, high-compactness
With with the rodlike sputtering target blankss being centainly orientated.
To achieve the above object, the present invention provides following schemes：
The present invention provides a kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss, including two symmetrical
The fixed frame of setting is connected with multiple water cooled rolls and driven roller between two fixed frames, and the water cooled rolls is located at institute
Driven roller oblique upper is stated, and is engaged with the driven roller；It is connected with crystallizer below the fixed frame, the crystallizer outer wall twines
It is wound with induction coil, dummy bar is connected with below the crystallizer；Multiple water cooled rolls are set to the crystallization at " V " font
Above device；Feed device, source gas conveying device and electrode assembly are installed above the fixed frame.
Optionally, it is arranged with water-cooled jacket, the water-cooled jacket inner hollow outside the dummy bar, and the top of side is connected with
The lower part of water inlet, the other side is connected with water outlet.
Optionally, the crystallizer side wall is made of 24 valve hollow-core constructions of even partition, is all provided in every valve hollow-core construction
Water service pipe there are one setting, and insulating materials is filled between adjacent two valves hollow-core construction.
Optionally, the fixed frame is rectangular configuration, and centre offers recessed inverted trapezoidal reactive tank, and the water cooled rolls is equal
It is even to be set to the reactive tank both ends.
Optionally, the water cooled rolls inner hollow, one end are connected with water inlet pipe, and the other end is connected with outlet pipe.
Optionally, the interior conveying of the source gas conveying device has hydrogen-argon-mixed.
The present invention achieves following technique effect compared with the existing technology：
The apparatus structure of hydrogen plasma melting continuously casting production high pure metal target blankss provided by the invention is simple, installation side
Just；Electric arc focus concentrates on the raw metal above water cooled rolls in carrying out refining process, the swing by electric arc and water cooling
It is uniform with ingredient that the rotation of roller realizes that metal molten is refined, and plasma source gas is hydrogen-argon-mixed using different proportion
Body.It is powered by induction coil outside cold crucible, that is, crystallizer, forms the electromagnetic force of ecto-entad, make melt and cold crucible wall shape
At soft contact, the heat dissipation of cold crucible is reduced, while electromagnetic force can reinforce the stirring of metal bath in crystallizer, further uniformly
Ingredient solidifies under the effect of water cooling dummy bar along temperature gradient direction, by controlling traction element rotating speed, adjusts traction speed
Degree realizes that continuous directional solidification obtains high-purity, high-compactness and the rodlike metal sputtering target blankss with certain orientation texture.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is overall structure of the present invention；
Fig. 2 is structure of the invention front view；
Wherein, 1 it is feed device, 2 be fixed frame, 3 be electrode assembly, 4 be melt, 5 be crystallizer, 6 is water cooled rolls, 7
It is induction coil for driven roller, 8,9 be water-cooled jacket, 10 is dummy bar.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide the devices that a kind of hydrogen plasma melting continuously casting produces high pure metal target blankss, with solution
Certainly the above-mentioned problems of the prior art realizes the fusing of the unfused metal of reaction tank bottom, essence using the one-directional rotation of multiple roll
Metal target blank melt after refining flows into and carries out electromagnetic soft-contact continuously casting in crystallizer, and then obtains high-purity, high-compactness
With with the rodlike sputtering target blankss being centainly orientated.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
The present invention provides a kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss, by plasma electricity
The soft contact melting part of arc refining section, cold crucible electromagnetic induction, vertical continuous directional solidification part, vacuum system, protection gas
Body supply section, control system part, power unit and trailer system composition, as depicted in figs. 1 and 2, main includes two
Symmetrically arranged fixed frame 2 is connected with multiple water cooled rolls 6 and driven roller 7 between two fixed frames 2, and water cooled rolls 6, which is located at, to be driven
Dynamic 7 oblique upper of roller, and engaged with driven roller 7, to which the rotation of driven roller 7 can drive water cooled rolls 6 to rotate synchronously；Under fixed frame 2
Side is connected with cold crucible, i.e. crystallizer 5, and 5 outer wall of crystallizer is wound with induction coil 8, and 5 lower section of crystallizer is connected with dummy bar
10；Multiple water cooled rolls 6 are set to 5 top of crystallizer at " V " font；It is defeated that 2 top of fixed frame is equipped with feed device 1, source gas
Device and electrode assembly 3, electrode assembly 3 of the invention is sent to use tungsten electrode.
It is arranged with water-cooled jacket 9,9 inner hollow of water-cooled jacket outside dummy bar 10, and the top of side is connected with water inlet, it is another
The lower part of side is connected with water outlet.5 side wall of crystallizer is made of 24 valve hollow-core constructions of even partition, in every valve hollow-core construction
There are one water service pipes for setting, and insulating materials is filled between adjacent two valves hollow-core construction.Fixed frame 2 is rectangular configuration, intermediate
Recessed inverted trapezoidal reactive tank is offered, water cooled rolls 6 is uniformly arranged on reactive tank both ends.6 inner hollow of water cooled rolls, one end connection
There are water inlet pipe, the other end to be connected with outlet pipe.Conveying has argon gas or a certain proportion of hydrogen-argon-mixed in source gas conveying device.
It is further preferred that the present invention is additionally provided with power-supply system provides electric energy, plasma arc refining for each system
Part mainly by electrode provide vertical direction can be with the plasma arc of regulation power.The electric arc in carrying out refining process
Focus is generally in the top of raw material metal and cold crucible.(unlisted in figure) feed section is mainly to refine rodlike metal to splash
Base of shooting at the target provides raw material.Since plasma arc refining is to utilize energetic plasma caused by gas ionization to material
It is heated, therefore plasma source gas is using the hydrogen argon gas mixed gas of pure argon and different proportion, it is of the invention
Electrode assembly can move as required, by the swing of electrode arc and the rotation of water cooled rolls 6 realize metal molten refining and
Ingredient it is uniform.It refines the melt 4 finished and cold crucible levitation melting part is flowed by the chute of cold crucible, cold crucible crystallizes
Device includes furnace body and water cooling shell (unlisted in figure).Furnace body is processed into using whole non-oxygen copper bar, and sidewall of the furnace body is by wire cutting
24 valves are divided into, interior per valve to be hollow and contain a water service pipe (unlisted in figure), the crucible of cold crucible melts room and (do not arranged in figure
Going out) top is cylindrical interior volume, bottom is semi-spherical shape and to have plug hole (unlisted in figure) to be connected to lower part cylindrical interior volume.Cold earthenware
The plug hole of crucible bottom can reduce suspending power by reducing induced current, melt 4 is made to flow into directional solidification dress by plug hole
In setting.The convertible method of traditional crucible is avoided, vacuum chamber space is reduced, reduces equipment investment.Between molten metal and crucible
Heat transfer minimizes, melt 4 have relatively uniform temperature, can the melting under the smaller degree of superheat, to reduce group
The volatilization divided is made the accurate alloy of comparison of ingredients and fills joint-cutting with high temperature insulating material, ensures to insulate between the seam each valve in side.It is cooling
Water enters inner tube lower end through the return of copper pipe inner wall from into water ring case, is flowed out from water outlet through going out water ring case.In cold crucible to be flowed into
Entire body it is melted after, so that material is flowed into water conservancy diversion funnel in turn from crucible bottom pour mold orifice using the reduction for reducing suspending power after electric current
Flow into vertical continuous directional solidification part.It is solidified along temperature gradient direction under dummy bar effect, by controlling traction element
Rotational speed regulation hauling speed realizes that continuous directional solidification obtains high-purity, high-compactness and the stick with certain orientation texture
Shape metal sputtering target blankss.
High pure metal melt after the refining of hydrogen plasma electric arc, which flows into cold crucible, carries out smelting in suspension, i.e., will cut
There is cold crucible made of the red copper of slit, be placed in high-frequency alternating magnetic field, so that molten metal is kept with sidewall of crucible using electromagnetic force
Contactless state carries out melting.There are one plug holes at the crucible center, after waiting for metal target blank melting, after reducing electric current
Suspending power reduction makes material be flowed into continuous directional solidification device from crucible bottom hole.Continuous directional solidification device dummy bar water flowing
It is cooling, ensure stable temperature gradient, delivery rate is drawn to match, and realizes the rodlike target blankss directional solidification of high pure metal
Continuous production.
The present invention is mainly the refining of hydrogen plasma electric arc, cold crucible levitation melting and vertical continuous directional solidification technique knot
It closes, temperature gradient, crystalline orientation control in ingredient, melt superheat degree and process of setting of the realization to sputtering target blankss raw material, system
Obtain high-purity, high-compactness and the rodlike metal sputtering target blankss with certain crystalline orientation.Plasma arc refining techniques
It is melted as heat source and refined metals using generating collection between electrode and raw material and neutralizing controllable stabilized plasma arc.Deng from
Subarc is a kind of arc of folding, and energy is concentrated, and arc column is elongated, and temperature is usually 5000~30000K.Stove is needed replacing according to difference
Interior atmosphere realizes the refining of particulate metal or alloy.Cold crucible levitation melting is to prepare Gao Rong, high-purity, active or radioactive material
Effective ways, melting material is placed in high frequency magnetic field by it, carries out induction melting and electromagnetic suspension, and melt is made to obtain high temperature simultaneously
It prevents from polluting.Continuous directional solidification is that melt is given birth under the conditions of single constant temperature gradient along temperature gradient direction continuously-directional
Long, obtaining institutional framework has the solidification mode being centainly orientated.The in vitro electric arc refining atmosphere such as adjustment, electric current, power and essence
The refining time can effectively control the rodlike target blankss material purity of metal, and the impurity effectively removed in metal sputtering target blankss raw material is gentle
Body.The current control magnetic induction intensity of cold crucible levitation melting is adjusted, melt superheat degree and big to the suspending power of melt is controlled
Minor adjustment, control vertical continuous directional solidification cooling water, pulling rate effectively adjust temperature gradient, and then control solidification structure.
Specific case is applied in the present invention, and principle and implementation of the present invention are described, above example
Illustrate the method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, according to
According to the thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (6)
1. a kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss, it is characterised in that：It is symmetrical including two
The fixed frame of setting is connected with multiple water cooled rolls and driven roller between two fixed frames, and the water cooled rolls is located at institute
Driven roller oblique upper is stated, and is engaged with the driven roller；It is connected with crystallizer below the fixed frame, the crystallizer outer wall twines
It is wound with induction coil, dummy bar is connected with below the crystallizer；Multiple water cooled rolls are set to the crystallization at " V " font
Above device；Feed device, source gas conveying device and electrode assembly are installed above the fixed frame.
2. the device of hydrogen plasma melting continuously casting production high pure metal target blankss according to claim 1, feature exist
In：It is arranged with water-cooled jacket, the water-cooled jacket inner hollow outside the dummy bar, and the top of side is connected with water inlet, it is another
The lower part of side is connected with water outlet.
3. the device of hydrogen plasma melting continuously casting production high pure metal target blankss according to claim 1, feature exist
In：The crystallizer side wall is made of 24 valve hollow-core constructions of even partition, per valve hollow-core construction in be respectively provided with that there are one water flowings
Pipe, and insulating materials is filled between adjacent two valves hollow-core construction.
4. the device of hydrogen plasma melting continuously casting production high pure metal target blankss according to claim 1, feature exist
In：The fixed frame is rectangular configuration, and centre offers recessed inverted trapezoidal reactive tank, and the water cooled rolls is uniformly arranged on described
Reactive tank both ends.
5. the device of hydrogen plasma melting continuously casting production high pure metal target blankss according to claim 1, feature exist
In：The water cooled rolls inner hollow, one end are connected with water inlet pipe, and the other end is connected with outlet pipe.
6. the device of hydrogen plasma melting continuously casting production high pure metal target blankss according to claim 1, feature exist
In：There is hydrogen-argon-mixed conveying in the source gas conveying device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810725889.8A CN108788040B (en) | 2018-07-04 | 2018-07-04 | A kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810725889.8A CN108788040B (en) | 2018-07-04 | 2018-07-04 | A kind of device of hydrogen plasma melting continuously casting production high pure metal target blankss |
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| Publication Number | Publication Date |
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| CN108788040A true CN108788040A (en) | 2018-11-13 |
| CN108788040B CN108788040B (en) | 2019-07-19 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109518140A (en) * | 2018-11-28 | 2019-03-26 | 河北冠靶科技有限公司 | A kind of preparation method of ultra-pure, isometric fine grain aluminium target |
| CN113210576A (en) * | 2021-05-17 | 2021-08-06 | 上海大学 | Method and device for producing metal thin strip |
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| CN113210576A (en) * | 2021-05-17 | 2021-08-06 | 上海大学 | Method and device for producing metal thin strip |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108788040B (en) | 2019-07-19 |
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