CN102430718A - Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof - Google Patents
Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof Download PDFInfo
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- CN102430718A CN102430718A CN2011104419788A CN201110441978A CN102430718A CN 102430718 A CN102430718 A CN 102430718A CN 2011104419788 A CN2011104419788 A CN 2011104419788A CN 201110441978 A CN201110441978 A CN 201110441978A CN 102430718 A CN102430718 A CN 102430718A
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Abstract
The invention discloses a mould for preparing an aluminum and aluminum alloy rotary target and a manufacturing method thereof. The mould for preparing the aluminum and aluminum alloy rotary target comprises a base, a metal lining pipe fixed on the base and an outer mould, wherein the metal lining pipe is arranged in the outer mould; an inner heater is arranged in the base; an outer heater is arranged outside the outer mould; and a graphite cuvette is arranged between the metal lining pipe and the top of the outer mould. The mould for preparing the aluminum and aluminum alloy rotary target has low rotary sputtering target cost, is easy to manufacture, can be used for realizing high bonding strength between the target and the lining pipe, and simultaneously has the advantages of stable discharge, high using efficiency, high film coating efficiency and the like. By utilizing the method for preparing the aluminum and aluminum alloy rotary target disclosed by the invention, the manufactured rotary target has the advantages of high speed, low cost, long service life and practical values.
Description
Technical field
The present invention relates to a kind of technology for preparing target, particularly relate to a kind of mould and method thereof that is used to prepare aluminium and acieral rotary target material.
Background technology
Rotary target material has that utilization rate height, service time are long, produce less advantages such as electric arc in the sputter procedure, thereby receives people's attention day by day, and the increasing vacuum coating field that applies to.Some ceramic rotary targets or low intensive metal rotary target need be bundled on the metal backing pipe usually, with the intensity of raising target or the heat conductivility in the sputter procedure.
The preparation method of aluminum current and acieral rotary target has spraying process and merogenesis to bind method.
Spraying process is powder or the wire rod through gas plasma material that heat intensive is paid close attention to, and under controlled atmosphere with high-velocity spray to bushing pipe.Though spraying process is commonly used in the preparation of rotary target material, sprays target and has shortcomings such as density of material is low, gassiness height.
Merogenesis binding method is to be in the same place scolder seam such as effective low-melting indium of single-unit tubulose target and metal backing or tin.This method is owing to need fill a large amount of scolders such as indium metal in the slit between target and the back of the body pipe, cost of manufacture is higher, and in sputter procedure; Because the target heating temperature raises; Low-melting scolder melts easily, causes target loosening, influences the use of target.
This shows that the preparation method of above-mentioned existing rotary target material obviously still has inconvenience and defective, and demands urgently further improving.The problem that exists for the preparation method that solves existing rotary target material; Relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly; But do not see always that for a long time suitable design is developed completion; And the general technology method does not have appropriate structure to address the above problem, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that the preparation method of above-mentioned existing rotary target material exists; The inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge; And cooperate the utilization of scientific principle, and actively study innovation, prepare the mould and the method thereof of aluminium and acieral rotary target material in the hope of founding a kind of novel being used to; Can improve the preparation method of general existing rotary target material, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, found out the present invention of true tool practical value finally.
Summary of the invention
Main purpose of the present invention is; Overcome the defective of the preparation method existence of existing rotary target material, and provide a kind of novel being used to prepare the mould of aluminium and acieral rotary target material, technical problem to be solved is to make its high life; Cost is low; Simple for production, thus be suitable for practicality more, and have the value on the industry.
Another object of the present invention is to, a kind of method for preparing aluminium and acieral rotary target material is provided, technical problem to be solved is to make its cost of manufacture low, and speed is fast, thereby is suitable for practicality more.
The object of the invention and solve its technical problem and adopt following technical scheme to realize.A kind of mould that is used to prepare aluminium and acieral rotary target material according to the present invention's proposition; Comprise: base; Be fixed on metal liner and outer mold on the said base, said metal liner is arranged in the outer mold, is provided with interior heater in the said base; The outer setting of said outer mold has external heater, is provided with graphite cuvette between the top of said metal liner and said outer mold.
The aforesaid mould that is used to prepare aluminium and acieral rotary target material, wherein, said external heater is the more piece external heater.
The aforesaid mould that is used to prepare aluminium and acieral rotary target material, wherein, said outer mold is a cylinder type.
The aforesaid mould that is used to prepare aluminium and acieral rotary target material, wherein, said outer mold is two semicircular cylinder type die of assembly unit.
The aforesaid mould that is used to prepare aluminium and acieral rotary target material, wherein, said base is provided with the groove of fixing said metal liner and outer mold, in said groove, is provided with Graphite pad.
A kind of method for preparing aluminium and acieral rotary target material according to the present invention proposes comprises the steps:
A, open outer heater of the more piece that is arranged in the mould and internal heater, carry out preheating, and make and be full of inert protective gas in the preparation mould;
B, with the base material of rotary target in advance with the smelting furnace fusing, the temperature of solution is higher than temperature 50-100 ℃ of base material fusing point before the casting, is poured into substrate solution in the preparation cavity body of mould through the graphite cuvette that is arranged on the preparation mold top slowly then;
Behind C, the casting complete, close the power supply of the outer heater of that joint of outside lowermost end, wait for and close the external heater of closing a joint after 2-10 minute again, by that analogy, after all closing all outer heaters at last, close interior heater again;
D, wait mold cools down just can be opened mould to room temperature, take out target.
The aforesaid method for preparing aluminium and acieral rotary target material, wherein, said base material is aluminium or acieral.
The aforesaid method for preparing aluminium and acieral rotary target material, wherein, in steps A, charging into inert protective gas is argon gas.
By technique scheme, mould and method thereof that the present invention is used to prepare aluminium and acieral rotary target material have advantage at least:
The rotary sputtering target cost of mould that the present invention is used to prepare aluminium and acieral rotary target material is low, it is simple to make, and target is high with the bond strength of bushing pipe simultaneously, has that discharge is steady, service efficiency is high, plated film efficient advantages of higher.
The method for preparing aluminium and acieral rotary target material of the present invention, the speed of the rotary target material of making is fast, and cost is low, and the life-span is high, has practical value.
In sum, the mould and the preparation method that are used to prepare aluminium and acieral rotary target material of special construction of the present invention, high life, cost is low, and is simple for production.It has above-mentioned many advantages and practical value, and in like product, does not see have similar structural design to publish or use and really belong to innovation, no matter it structurally or bigger improvement all arranged on the function; Have large improvement technically; And produced handy and practical effect, and the preparation method of more existing rotary target material has the multinomial effect of enhancement, thus be suitable for practicality more; And have the extensive value of industry, really be a novelty, progress, practical new design.
Above-mentioned explanation only is the general introduction of technical scheme of the present invention, understands technological means of the present invention in order can more to know, and can implement according to the content of specification, below with preferred embodiment of the present invention and conjunction with figs. specify as after.
The specific embodiment of the present invention is provided by following examples and accompanying drawing thereof in detail.
Description of drawings
Fig. 1 is the front view that is used to prepare the mould of aluminium and acieral rotary target material according to the invention;
Fig. 2 is the vertical view that is used to prepare the mould of aluminium and acieral rotary target material according to the invention.
The specific embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention; Below in conjunction with accompanying drawing and preferred embodiment; To the mould and its specific embodiment of preparation method, structure, characteristic and the effect thereof that are used to prepare aluminium and acieral rotary target material that proposes according to the present invention, specify as after.
See also Fig. 1, shown in Figure 2; The mould that being used to of preferred embodiment of the present invention prepares aluminium and acieral rotary target material comprises: base 5, metal liner 3, outer mold 2 and graphite casting chute 1, internal heater 4 and outer heater 6; Base 5 is provided with the groove of fixing metal bushing pipe 3 and outer mold 2; In groove, be provided with Graphite pad, outer mold 2 is two semicircular cylinder type die of assembly unit, before the assembly unit; Releasing agent on outer mold 2 inner side brush makes two semicircular cylinder type die be fixed together through bolt.Metal liner 3 is arranged in the outer mold 2, is provided with interior heater 4 in the base 5, and the outer setting of outer mold 2 has external heater 6, and external heater 6 is the more piece external heater.
A kind of method for preparing aluminium and acieral rotary target material of the present invention, the raw material of making rotary target material is aluminium or acieral, comprises the steps:
A, open outer heater 6 of the more piece that is arranged in the mould and internal heater 4, carry out preheating, and make and be full of argon gas in the preparation mould; During preheating; The temperature of internal heater 4 and outer heater 6 is arranged on 300-600 ℃, and the asbestos covering and heat insulating is used at the top of mould, preheating 0.5 ~ 2 hour.；
B, with the base material of rotary target in advance with the smelting furnace fusing, the temperature of solution is higher than 100 ℃ of the temperature of base material fusing point before the casting, is poured into substrate solution in the preparation cavity body of mould through the graphite cuvette that is arranged on the preparation mold top slowly then;
Behind C, the casting complete, close the power supply of the outer heater of that joint of outside lowermost end, wait for and close the outer heater 6 of closing a joint after 10 minutes again, by that analogy, after all closing all outer heaters 6 at last, close interior heater 4 again;
D, wait mold cools down just can be opened mould to room temperature, take out target, and target is done follow-up processing.
The present invention that above-mentioned structure like this constitutes is used to prepare the mould of aluminium and acieral rotary target material and the technological innovation of preparation method, for technical staff of the same trade now, all has many saving graces, and the progressive that possesses skills really.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction; Though the present invention discloses as above with preferred embodiment; Yet be not in order to limiting the present invention, anyly be familiar with the professional and technical personnel, in not breaking away from technical scheme scope of the present invention; When the technology contents of above-mentioned announcement capable of using is made a little change or is modified to the equivalent embodiment of equivalent variations; In every case be the content that does not break away from technical scheme of the present invention, to any simple modification, equivalent variations and modification that above embodiment did, all still belong in the scope of technical scheme of the present invention according to technical spirit of the present invention.
Claims (8)
1. a mould that is used to prepare aluminium and acieral rotary target material is characterized in that, comprising:
Base; Be fixed on metal liner and outer mold on the said base, said metal liner is arranged in the outer mold, is provided with interior heater in the said base; The outer setting of said outer mold has external heater, is provided with graphite cuvette between the top of said metal liner and said outer mold.
2. the mould that is used to prepare aluminium and acieral rotary target material according to claim 1 is characterized in that said external heater is the more piece external heater.
3. the mould that is used to prepare aluminium and acieral rotary target material according to claim 1 is characterized in that said outer mold is a cylinder type.
4. the mould that is used to prepare aluminium and acieral rotary target material according to claim 1 is characterized in that, said outer mold is two semicircular cylinder type die of assembly unit.
5. the mould that is used to prepare aluminium and acieral rotary target material according to claim 1 is characterized in that, said base is provided with the groove of fixing said metal liner and outer mold, in said groove, is provided with Graphite pad.
6. a method for preparing aluminium and acieral rotary target material is characterized in that, comprises the steps:
A, open outer heater of the more piece that is arranged in the mould and internal heater, carry out preheating, and make and be full of inert protective gas in the preparation mould;
B, with the base material of rotary target in advance with the smelting furnace fusing, the temperature of solution is higher than temperature 50-100 ℃ of base material fusing point before the casting, is poured into substrate solution in the preparation cavity body of mould through the graphite cuvette that is arranged on the preparation mold top slowly then;
Behind C, the casting complete, close the power supply of the outer heater of that joint of outside lowermost end, wait for and close the external heater of closing a joint after 2-10 minute again, by that analogy, after all closing all outer heaters at last, close interior heater again;
D, wait mold cools down just can be opened mould to room temperature, take out target.
7. the method for preparing aluminium and acieral rotary target material according to claim 6 is characterized in that said base material is aluminium or acieral.
8. the method for preparing aluminium and acieral rotary target material according to claim 6 is characterized in that, in steps A, charging into inert protective gas is argon gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104419788A CN102430718A (en) | 2011-12-26 | 2011-12-26 | Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104419788A CN102430718A (en) | 2011-12-26 | 2011-12-26 | Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof |
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| CN102430718A true CN102430718A (en) | 2012-05-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011104419788A Pending CN102430718A (en) | 2011-12-26 | 2011-12-26 | Mould for preparing aluminum and aluminum alloy rotary target and manufacturing method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103397301A (en) * | 2013-07-17 | 2013-11-20 | 中国南玻集团股份有限公司 | Cylinder rotating silver target and preparation method thereof |
| CN104032271A (en) * | 2014-06-20 | 2014-09-10 | 江阴恩特莱特镀膜科技有限公司 | Mold and method for producing copper-zinc-tin rotary target |
| CN104907539A (en) * | 2015-05-13 | 2015-09-16 | 基迈克材料科技（苏州）有限公司 | Continuous casting technology of belt material aluminum pipe and aluminum alloy rotating target materials |
| CN106694801A (en) * | 2016-12-28 | 2017-05-24 | 江阴恩特莱特镀膜科技有限公司 | Die for producing rotary tin target and production method thereof |
| CN113463043A (en) * | 2021-06-09 | 2021-10-01 | 先导薄膜材料（广东）有限公司 | Preparation method of rotary target material |
| CN113500182A (en) * | 2021-06-24 | 2021-10-15 | 先导薄膜材料有限公司 | Production method and device of rotary target |
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| CN1363716A (en) * | 2000-12-19 | 2002-08-14 | W.C.贺利氏股份有限两合公司 | Manufacture of tubular targets |
| CN1500907A (en) * | 2002-11-14 | 2004-06-02 | W.C.�����Ϲɷ��������Ϲ�˾ | Processes for producing a sputtering target from a silicon-based alloy, a sputtering target |
| CN1719626A (en) * | 2005-06-03 | 2006-01-11 | 清华大学 | Cu-Ga alloy target for Cu-In-Ga-Se film solar battery and preparing process thereof |
| CN1900348A (en) * | 2005-07-21 | 2007-01-24 | 沈阳黎明航空发动机(集团)有限责任公司 | Target pole for coating and its casting process for external sleeve |
| CN101921988A (en) * | 2010-05-05 | 2010-12-22 | 广州市尤特新材料有限公司 | Silicon-base alloy rotary target material and preparation method thereof |
| CN102286724A (en) * | 2011-09-01 | 2011-12-21 | 基迈克材料科技（苏州）有限公司 | Copper and gallium alloy rotating target for photovoltaic absorption layer sputtering film coating and preparation method |
| CN202377496U (en) * | 2011-12-26 | 2012-08-15 | 昆山全亚冠环保科技有限公司 | Mold for manufacturing aluminum and aluminum-base alloy rotary targets |
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2011
- 2011-12-26 CN CN2011104419788A patent/CN102430718A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1363716A (en) * | 2000-12-19 | 2002-08-14 | W.C.贺利氏股份有限两合公司 | Manufacture of tubular targets |
| CN1500907A (en) * | 2002-11-14 | 2004-06-02 | W.C.�����Ϲɷ��������Ϲ�˾ | Processes for producing a sputtering target from a silicon-based alloy, a sputtering target |
| CN1719626A (en) * | 2005-06-03 | 2006-01-11 | 清华大学 | Cu-Ga alloy target for Cu-In-Ga-Se film solar battery and preparing process thereof |
| CN1900348A (en) * | 2005-07-21 | 2007-01-24 | 沈阳黎明航空发动机(集团)有限责任公司 | Target pole for coating and its casting process for external sleeve |
| CN101921988A (en) * | 2010-05-05 | 2010-12-22 | 广州市尤特新材料有限公司 | Silicon-base alloy rotary target material and preparation method thereof |
| CN102286724A (en) * | 2011-09-01 | 2011-12-21 | 基迈克材料科技（苏州）有限公司 | Copper and gallium alloy rotating target for photovoltaic absorption layer sputtering film coating and preparation method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103397301A (en) * | 2013-07-17 | 2013-11-20 | 中国南玻集团股份有限公司 | Cylinder rotating silver target and preparation method thereof |
| CN104032271A (en) * | 2014-06-20 | 2014-09-10 | 江阴恩特莱特镀膜科技有限公司 | Mold and method for producing copper-zinc-tin rotary target |
| CN104907539A (en) * | 2015-05-13 | 2015-09-16 | 基迈克材料科技（苏州）有限公司 | Continuous casting technology of belt material aluminum pipe and aluminum alloy rotating target materials |
| CN106694801A (en) * | 2016-12-28 | 2017-05-24 | 江阴恩特莱特镀膜科技有限公司 | Die for producing rotary tin target and production method thereof |
| CN113463043A (en) * | 2021-06-09 | 2021-10-01 | 先导薄膜材料（广东）有限公司 | Preparation method of rotary target material |
| CN113463043B (en) * | 2021-06-09 | 2023-05-26 | 先导薄膜材料（广东）有限公司 | Preparation method of rotary target |
| CN113500182A (en) * | 2021-06-24 | 2021-10-15 | 先导薄膜材料有限公司 | Production method and device of rotary target |
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Application publication date: 20120502 |