CN113494933B - 用于位置测量的组件 - Google Patents

用于位置测量的组件

Info

Publication number
CN113494933B
CN113494933B CN202110376554.1A CN202110376554A CN113494933B CN 113494933 B CN113494933 B CN 113494933B CN 202110376554 A CN202110376554 A CN 202110376554A CN 113494933 B CN113494933 B CN 113494933B
Authority
CN
China
Prior art keywords
scale
support
fixing element
longitudinal direction
assembly according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110376554.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN113494933A (zh
Inventor
K·鲍尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of CN113494933A publication Critical patent/CN113494933A/zh
Application granted granted Critical
Publication of CN113494933B publication Critical patent/CN113494933B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G01D5/34753—Carriages; Driving or coupling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/02—Rulers with scales or marks for direct reading
    • G01B3/04—Rulers with scales or marks for direct reading rigid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/004—Scales; Graduations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Slide Fasteners, Snap Fasteners, And Hook Fasteners (AREA)
  • Body Structure For Vehicles (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Paper (AREA)
CN202110376554.1A 2020-04-08 2021-04-08 用于位置测量的组件 Active CN113494933B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20168807.4 2020-04-08
EP20168807.4A EP3892962B1 (de) 2020-04-08 2020-04-08 Anordnung für eine positionsmessung

Publications (2)

Publication Number Publication Date
CN113494933A CN113494933A (zh) 2021-10-12
CN113494933B true CN113494933B (zh) 2026-02-24

Family

ID=70277241

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110376554.1A Active CN113494933B (zh) 2020-04-08 2021-04-08 用于位置测量的组件

Country Status (7)

Country Link
US (1) US11733019B2 (enExample)
EP (1) EP3892962B1 (enExample)
JP (1) JP7662345B2 (enExample)
KR (1) KR20210125900A (enExample)
CN (1) CN113494933B (enExample)
DE (1) DE102021200545A1 (enExample)
ES (1) ES2943517T3 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4286798B1 (de) 2022-06-01 2025-04-09 Dr. Johannes Heidenhain GmbH Anordnung für eine positionsmessung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528928U (enExample) * 1978-08-15 1980-02-25
DE19802036A1 (de) * 1998-01-21 1999-07-22 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur mechanischen Justage von Teilungsträgern
DE102007002772A1 (de) * 2006-03-29 2007-10-04 Dr. Johannes Heidenhain Gmbh Verfahren zum Halten eines Maßstabs an einem Träger sowie Anordnung mit einem Träger und einem Maßstab
EP2431705A1 (en) * 2009-04-24 2012-03-21 Guangzhou Lokshun Cnc Equipment Ltd. Supporting plate structure for magnetoscale

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT396631B (de) * 1984-07-06 1993-10-25 Rsf Elektronik Gmbh Inkrementales messsystem
DE3427411C2 (de) * 1984-07-25 1987-01-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
AT394446B (de) * 1990-10-11 1992-03-25 Rsf Elektronik Gmbh Inkrementales laengenmesssystem
FI91325C (fi) * 1992-04-07 1994-06-10 Partek Cargotec Oy Paikka-asteikko ja optinen lukuanturi tämän paikka-asteikon lukemiseksi
JP3134590B2 (ja) * 1993-05-13 2001-02-13 ソニー・プレシジョン・テクノロジー株式会社 スケール装置
EP0668486A3 (de) * 1994-02-22 1997-07-30 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmesseinrichtung.
DE19628765B4 (de) * 1996-07-17 2007-04-05 Braun, Paul-Wilhelm, Dipl.-Ing. Verfahren und Vorrichtung zur Positionsbestimmung von nicht-geradlinig bewegten, insbesondere rotierenden Maschinenteilen
JP4869505B2 (ja) * 2001-06-27 2012-02-08 株式会社ミツトヨ エンコーダの摺動機構
GB0413711D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale and readhead apparatus
GB0415141D0 (en) * 2004-07-06 2004-08-11 Renishaw Plc Scale reading apparatus
DE102005027025B4 (de) 2005-06-11 2015-04-30 Dr. Johannes Heidenhain Gmbh Halterung für einen Maßstab
JP4982554B2 (ja) 2006-03-29 2012-07-25 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体
US8011112B2 (en) * 2006-12-07 2011-09-06 Leica Geosystems Ag Method and apparatus for determining positions
DE102008015820B4 (de) * 2008-03-27 2013-02-28 Fette Compacting Gmbh Vorrichtung und Verfahren zur Messung der vertikalen Position von Ober- und Unterstempeln einer Rundläufer-Tablettenpresse
US7994775B2 (en) * 2009-01-08 2011-08-09 Hiwin Mikrosystem Corp. Magnetic sensor
DE102014209004A1 (de) * 2014-05-13 2015-11-19 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP3026389B1 (de) * 2014-11-26 2017-01-11 Dr. Johannes Heidenhain GmbH Längenmesseinrichtung
US9791254B2 (en) * 2014-12-27 2017-10-17 Mitutoyo Corporation Scale fixating device
JP6990024B2 (ja) * 2016-12-22 2022-01-12 株式会社ミツトヨ 線膨張係数測定方法および測定装置
US11490576B2 (en) * 2020-12-22 2022-11-08 Heartland Ag Tech, Inc. Modular kinematic and telemetry system for an irrigation system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528928U (enExample) * 1978-08-15 1980-02-25
DE19802036A1 (de) * 1998-01-21 1999-07-22 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur mechanischen Justage von Teilungsträgern
DE102007002772A1 (de) * 2006-03-29 2007-10-04 Dr. Johannes Heidenhain Gmbh Verfahren zum Halten eines Maßstabs an einem Träger sowie Anordnung mit einem Träger und einem Maßstab
EP2431705A1 (en) * 2009-04-24 2012-03-21 Guangzhou Lokshun Cnc Equipment Ltd. Supporting plate structure for magnetoscale

Also Published As

Publication number Publication date
EP3892962A1 (de) 2021-10-13
CN113494933A (zh) 2021-10-12
JP7662345B2 (ja) 2025-04-15
DE102021200545A1 (de) 2021-10-14
EP3892962B1 (de) 2023-03-08
US11733019B2 (en) 2023-08-22
ES2943517T3 (es) 2023-06-13
KR20210125900A (ko) 2021-10-19
JP2021167804A (ja) 2021-10-21
US20210318109A1 (en) 2021-10-14

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