CN113484624A - Optical electric field sensor packaging device and packaging method for high-humidity environment - Google Patents

Optical electric field sensor packaging device and packaging method for high-humidity environment Download PDF

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CN113484624A
CN113484624A CN202110735479.3A CN202110735479A CN113484624A CN 113484624 A CN113484624 A CN 113484624A CN 202110735479 A CN202110735479 A CN 202110735479A CN 113484624 A CN113484624 A CN 113484624A
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optical fiber
electric field
tube shell
sensor
optical
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CN113484624B (en
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庄池杰
曾嵘
王涉
耿屹楠
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Tsinghua University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12Measuring electrostatic fields or voltage-potential
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3616Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G02B6/3624Fibre head, e.g. fibre probe termination

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Packaging Frangible Articles (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

The invention provides an optical electric field sensor packaging device and a packaging method for a high-humidity environment, wherein the packaging device comprises: two optical fiber flanges, a tube shell body and a tube shell cover; the shell body is provided with a containing cavity for containing the sensor wafer; the tube shell cover is used for covering the tube shell body; through holes matched with the two optical fiber flanges are respectively formed in two opposite side walls of the tube shell body; the optical fiber flange, the tube shell body and the tube shell cover are all made of materials with weak water absorption and weak water permeability. The invention improves the packaging structure of the optical electric field sensor, uses the materials with weak water absorption and weak water permeability to manufacture the tube shell sealing sensor and carries out hydrophobic treatment on the outer layer, so that the measurement precision of the sensor is basically not influenced by the environmental humidity, and the application scene of the optical electric field sensor is widened.

Description

Optical electric field sensor packaging device and packaging method for high-humidity environment
Technical Field
The invention belongs to the technical field of electric field measurement, and particularly relates to an optical electric field sensor packaging device and a packaging method for a high-humidity environment.
Background
The optical electric field sensor attracts many researchers due to the advantages of wide frequency band, small volume, convenient installation and the like. The development of technology has higher and higher requirements on the accuracy of electric field measurement. However, when the sensor is used for outdoor measurement, the measurement accuracy of the sensor is affected by the ambient humidity.
The general idea for improving the applicability of the optical electric field sensor in a high humidity environment is to improve the packaging structure of the sensor and improve the sealing degree of the sensor package. Considering that the thermal expansion of the tail fiber of the optical electric field sensor can generate stress on the coupling point of the optical fiber and the waveguide, the influence of the packaging structure on the original field and the mechanical strength of the sensor, a learner selects glass fiber reinforced plastic and ceramic materials with small thermal expansion coefficient, high mechanical strength, small thermal conductivity coefficient and small relative dielectric constant to manufacture the tube shell. The sealing structure of the sensor does play a role in isolating the internal chip from air moisture, but experimental results show that under the scheme, the response of the sensor is greatly influenced by humidity.
Another approach is to build a hydrophobic layer on the outer surface of the sensor. The humidity stability of the sensor is considered by the scholars to be related to the contact angle of the surface, and the normal temperature vulcanized silicone Rubber (RTV) applied to the surface of the insulator is coated on the sensor shell made of ceramic. Experiments show that the scheme can improve the measurement accuracy of the sensor under low RH (Relative Humidity), but when the temperature is higher than 30 ℃ and the Relative Humidity is higher than 75%, the environment Humidity still has a large influence on the power frequency response of the sensor. It can be seen that RTV coatings do not solve the problem.
In order to widen the application scenarios of the optical electric field sensor and ensure the reliability of the measurement result, an optical electric field sensor packaging scheme suitable for a high humidity environment needs to be found.
Disclosure of Invention
In view of the above problems, the present invention provides an optical electric field sensor package device for high humidity environment, comprising:
two optical fiber flanges, a tube shell body and a tube shell cover;
the shell body is provided with a containing cavity for containing the sensor wafer;
the tube shell cover is used for covering the tube shell body;
through holes matched with the two optical fiber flanges are respectively formed in two opposite side walls of the tube shell body;
the optical fiber flange, the tube shell body and the tube shell cover are all made of materials with weak water absorption and weak water permeability.
Further, the material having weak water absorption and weak water permeability is PEEK or PTFE.
Further, the air conditioner is provided with a fan,
each fiber flange has a first end cylinder and a second end cylinder;
a connecting part is arranged between the first end column body and the second end column body;
the first end column is embedded into the through hole of the tube shell body;
the second end post is for extending within an optical fiber jacket.
Further, the packaging apparatus further includes: the sheath of the optical fiber is provided with a protective sleeve,
the optical fiber sheath is funnel-shaped;
the large end opening of the optical fiber sheath is used for buckling the periphery of the optical fiber flange,
the small end of the optical fiber sheath is opened for the optical fiber to pass through;
an opening of the large end of the optical fiber sheath forms an extension column shape matched with the shape of the connecting part of the optical fiber flange.
Further, the optical electric field sensor packaging device is covered with a hydrophobic coating, and the hydrophobic coating is made of a hydrophobic material HRTV.
The invention also provides an optical electric field sensor packaging method for a high-humidity environment, which comprises the following steps: the sensor including the optical electric field sensor package is formed by an assembly operation.
Further, the assembling operation includes:
placing a sensor wafer in the package body;
respectively connecting one ends of tail fibers of the two optical fibers with the end parts of the two sides of the sensor wafer;
extending the other ends of the tail fibers of the two optical fibers out of the through hole in the side wall of the tube shell body and connecting the other ends of the tail fibers to the optical fiber flange;
two optical fiber flanges are inserted into the through holes on the two side walls of the tube shell body, and the optical fiber protective sleeve is buckled on the optical fiber flanges;
the upper part of the shell body is sealed by a shell cover.
Further, before the assembly operation,
and (3) putting the tube shell body, the tube shell cover and the optical fiber flange into a drying box, drying for 9-10h at the set temperature of 75-85 ℃, cooling to room temperature, and taking out from the drying box.
Further, after the assembly operation, the assembled sensor is cleaned and coated with a hydrophobic coating.
Further, the coated hydrophobic coating comprises:
soaking the assembled sensor in a hydrophobic coating solution, then pulling out the sensor from the hydrophobic coating solution, then soaking the sensor in the hydrophobic coating solution again, pulling out again, repeatedly pulling for many times until the surface of the sensor is uniformly covered with the hydrophobic coating, and placing the sensor in a dry environment to enable the hydrophobic coating to be primarily solidified;
the hydrophobic coating is made of a hydrophobic material HRTV.
The optical electric field sensor packaging device and the packaging method for the high-humidity environment improve the packaging structure of the optical electric field sensor, and the tube-shell sealing sensor is made of materials with weak water absorption and weak water permeability, and the outer layer of the tube-shell sealing sensor is subjected to hydrophobic treatment, so that the measurement accuracy of the sensor is basically not influenced by the environment humidity, and the application scene of the optical electric field sensor is widened.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of an optical E-field sensor package for high humidity environments according to an embodiment of the present invention;
FIG. 2 is a graph showing the variation of phase shift of four types of electric field sensors under the same electric field with humidity variation;
fig. 3 shows the variation graph of the amplitude deviation of four electric field sensors under the same electric field with humidity variation.
Description of reference numerals:
1 optical fiber sheath, 2 optical fiber flanges, 3 tube shell bodies, 4 sensor wafers, 5 tube shell covers and 6 optical fibers.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The optical electric field sensor packaging device for the high-humidity environment provided by the invention is suitable for the high-humidity environment, namely, the optical electric field sensor packaging device can keep a certain measurement precision in the high-humidity environment. As shown in fig. 1, the optical electric field sensor package device includes: two optical fiber sheaths 1, two optical fiber flanges 2, a tube shell body 3 and a tube shell cover 5. The cartridge body 3 and the cartridge cover 5 together form a cartridge.
The housing body 3 has a receiving space for receiving the sensor wafer 4. The case cover 5 is adapted to cover the case body 3. The shell cover 5 is provided with a bulge matched with the inner diameter of the opening of the shell body 3. Through holes matched with the optical fiber flanges 2 are respectively arranged on two opposite side walls of the tube shell body 3. The optical fiber jacket 1 is funnel-shaped. Without loss of generality, the tube body 3 is rectangular, the size parameters are 3cm × 2cm × 1cm, and the tube wall thickness is 2 mm.
Each fiber flange 2 has a first end cylinder and a second end cylinder, respectively, which are both cylindrical without loss of generality. A connecting part is arranged between the first end column body and the second end column body. The first end cylinder of the optical fiber flange 2 is used for being embedded into the through hole on the shell body 3, and the second end cylinder of the optical fiber flange 2 is used for extending in the optical fiber sheath 1. The large end opening of the funnel-shaped optical fiber sheath 1 is used for buckling at the periphery of the optical fiber flange 2, and the small end opening of the optical fiber sheath 1 is used for the optical fiber 6 to pass through. Further, an extended column shape matched with the shape of the connecting part of the optical fiber flange 2 is formed at the opening of the large end of the optical fiber sheath 1, and in the embodiment of the invention, the extended column shape is a cylinder shape. When the large end opening of the funnel-shaped optical fiber sheath 1 is buckled at the periphery of the optical fiber flange 2, the extension column shape is jointed with the connecting part. The optical fiber flange 2 is mainly used for leading the tail fiber out of the tube shell, mechanically supporting the tail fiber and sealing the tube shell.
The package body 3, the package cover 5, and the fiber flange 2 are preferably made of a material with weak water absorption and weak water permeability, for example, a polyether ether ketone (PEEK) material. The optical electric field sensor packaging device (comprising the tube shell body 3, the tube shell cover 5, the optical fiber flange 2 and the like) is also covered with a hydrophobic coating. Furthermore, HRTV (constant-lasting-Room-Tem characteristic-Vulcanized Anti-ti-cont-amino flash Composite coating) is selected as a hydrophobic material for the hydrophobic coating.
The embodiment of the invention also provides an optical electric field sensor packaging method for a high-humidity environment, which is used for forming the optical electric field sensor packaging device and sealing the optical device. The optical device comprises a sensor wafer 4 and an optical fiber 6.
The implementation steps of the packaging scheme comprise:
step one, drying the assembly: and (3) putting the tube shell body 3, the tube shell cover 5 and the optical fiber flange 2 into a drying box, drying at the set temperature of 75-85 ℃ for 9-10h, naturally cooling to room temperature, and taking out from the drying box. Illustratively, the temperature is 75 ℃ or 85 ℃ or 80 ℃ or the like, and the drying time is 9h, 10h or 9.5h or the like.
Step two, assembling operation: the sensor wafer 4 is placed in the tube shell body, one end of the tail fiber of the two optical fibers 6 is respectively connected with the end parts of the two sides of the sensor wafer, and the other end of the tail fiber extends out of the through hole in the side wall of the tube shell body 3 and is connected to the optical fiber flange 2. The two optical fiber flanges 2 are inserted into through holes on two side walls of the tube shell body 3, and the optical fiber sheath 1 is buckled on the optical fiber flanges 2. The upper part of the shell body 3 is sealed by a shell cover 5. The components (the optical fiber sheath 1, the optical fiber flange 2, the tube shell body 3 and the tube shell cover 5) are sealed and bonded by epoxy resin glue, so that the assembled sensor is formed.
Step three, cleaning the sensor: and cleaning the surface of the sensor by using alcohol, and placing the sensor in a dry environment until the alcohol is completely evaporated.
Step four, coating a hydrophobic coating: the sensor is immersed in the hydrophobic coating solution and then pulled out of the hydrophobic coating solution. The sensor is then dipped again in the hydrophobic coating solution and pulled out again. And repeatedly lifting for many times until the surface of the sensor is uniformly covered with the hydrophobic coating, and placing the sensor in a dry environment to enable the hydrophobic coating to be primarily solidified. The hydrophobic coating is a hydrophobic material such as PRTV (permanent in-place mold anti-fouling flashover composite coating) or HRTV. Preferably, the hydrophobic material is HRTV, i.e. the hydrophobic coating solution is an HRTV solution.
And fifthly, putting the sensor coated with the hydrophobic coating (specifically the HRTV coating) into a drying box, drying at the set temperature of 55-65 ℃ for 35-40h, stopping drying, cooling to room temperature, and taking out the sensor from the drying box. Illustratively, the temperature is 55 ℃ or 65 ℃ or 60 ℃ or the like, and the drying time is 35h, 40h or 38h or the like.
In the embodiment of the present invention, the tube housing body 3, the tube housing cover 5, and the optical fiber flange 2 are made of materials with weak water absorption and water permeability, such as Polyetheretherketone (PEEK) or Polytetrafluoroethylene (PTFE).
The sensor with the packaging device formed by the optical electric field sensor packaging method is tested, and the influence of humidity on the sensor is obviously reduced. The test principle and procedure are as follows:
when the output of the optical electric field sensor is affected by the ambient humidity, the amplitude and the phase angle of the output are changed. Defining the amplitude deviation Δ k of the optical electric field sensor as:
Figure BDA0003141453230000061
phase shift of optical electric field sensor
Figure BDA0003141453230000062
Comprises the following steps:
Figure BDA0003141453230000063
wherein E0Is to measure the magnitude of the applied electric field in the environment,
Figure BDA0003141453230000064
is a measure of the phase angle of the applied electric field in the environment, E1Is the magnitude of the electric field measured by the electric field sensor,
Figure BDA0003141453230000065
is the electric field phase angle measured by the electric field sensor.
The flat plate electrode is placed in a humidity control box, power frequency voltage is applied to the flat plate electrode to generate a power frequency electric field, the environmental temperature is set to be 30 ℃, the relative humidity is changed from 25% to 90%, and the change rate is 5%/h. The experimental samples are totally 4, and are respectively: sensors encapsulated with a ceramic cartridge and overcoated with PRTV hydrophobic material, sensors encapsulated with a ceramic cartridge and overcoated with HRTV hydrophobic material, sensors encapsulated with a PEEK cartridge without a hydrophobic coating, and sensors encapsulated with a PEEK cartridge and overcoated with HRTV hydrophobic material. FIG. 2 is a graph showing the variation of phase shift of four types of electric field sensors under the same electric field with humidity variation; fig. 3 shows the variation graph of the amplitude deviation of four electric field sensors under the same electric field with humidity variation. The experimental results show that the measurement results of the optical electric field sensor, in which the tube case is made of PEEK material and treated with the HRTV hydrophobic coating, are not substantially affected by the change in humidity. In addition, the influence of humidity change on the electric field sensor packaged by the PEEK tube shell and not provided with the hydrophobic coating is smaller than that of the electric field sensor packaged by the ceramic tube shell and externally coated with the PRTV, and the PEEK tube shell has an obvious effect on improving the working performance of the electric field sensor in a high-humidity environment. The influence of humidity change on the electric field sensor packaged by the ceramic tube shell and externally coated with the HRTV is smaller than that of the electric field sensor packaged by the ceramic tube shell and externally coated with the PRTV, so that the working performance of the electric field sensor in a high-humidity environment can be improved by adopting the HRTV material for the coating.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. An optical electric field sensor packaging apparatus for use in high humidity environments, comprising:
two optical fiber flanges, a tube shell body and a tube shell cover;
the shell body is provided with a containing cavity for containing the sensor wafer;
the tube shell cover is used for covering the tube shell body;
through holes matched with the two optical fiber flanges are respectively formed in two opposite side walls of the tube shell body;
the optical fiber flange, the tube shell body and the tube shell cover are all made of materials with weak water absorption and weak water permeability.
2. The optical electric field sensor package for high humidity environment of claim 1,
the material with weak water absorption and weak water permeability is PEEK or PTFE.
3. The optical electric field sensor package for high humidity environment of claim 1,
each fiber flange has a first end cylinder and a second end cylinder;
a connecting part is arranged between the first end column body and the second end column body;
the first end column is embedded into the through hole of the tube shell body;
the second end post is for extending within an optical fiber jacket.
4. The optical electric field sensor package for high humidity environments of claim 3, further comprising: the sheath of the optical fiber is provided with a protective sleeve,
the optical fiber sheath is funnel-shaped;
the large end opening of the optical fiber sheath is used for buckling the periphery of the optical fiber flange,
the small end of the optical fiber sheath is opened for the optical fiber to pass through;
an opening of the large end of the optical fiber sheath forms an extension column shape matched with the shape of the connecting part of the optical fiber flange.
5. The optical electric field sensor package device for high humidity environment according to any one of claims 1 to 4, wherein the optical electric field sensor package device is covered with a hydrophobic coating, and the hydrophobic coating adopts hydrophobic material HRTV.
6. An optical electric field sensor packaging method for high humidity environments, comprising: a sensor comprising the optical electric field sensor package of claims 1-5 formed by an assembly operation.
7. The method of claim 6, wherein the assembling operation comprises:
placing a sensor wafer in the package body;
respectively connecting one ends of tail fibers of the two optical fibers with the end parts of the two sides of the sensor wafer;
extending the other ends of the tail fibers of the two optical fibers out of the through hole in the side wall of the tube shell body and connecting the other ends of the tail fibers to the optical fiber flange;
two optical fiber flanges are inserted into the through holes on the two side walls of the tube shell body, and the optical fiber protective sleeve is buckled on the optical fiber flanges;
the upper part of the shell body is sealed by a shell cover.
8. The optical electric field sensor packaging method for high humidity environment according to claim 7, wherein, before the assembling operation,
and (3) putting the tube shell body, the tube shell cover and the optical fiber flange into a drying box, drying for 9-10h at the set temperature of 75-85 ℃, cooling to room temperature, and taking out from the drying box.
9. The method of claim 7, wherein after the assembling operation, the assembled sensor is washed and coated with a hydrophobic coating.
10. The method of claim 9, wherein the coating the hydrophobic coating comprises:
soaking the assembled sensor in a hydrophobic coating solution, then pulling out the sensor from the hydrophobic coating solution, then soaking the sensor in the hydrophobic coating solution again, pulling out again, repeatedly pulling for many times until the surface of the sensor is uniformly covered with the hydrophobic coating, and placing the sensor in a dry environment to enable the hydrophobic coating to be primarily solidified;
the hydrophobic coating is made of a hydrophobic material HRTV.
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CN115077588A (en) * 2022-07-23 2022-09-20 北京浦丹光电股份有限公司 Sealing plug for optical fiber sensing, tube shell, integrated photoelectric device and assembling method

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