CN113473736B - Nitrogen sealed baking machine table and method for enabling substrate to enter and exit baking device - Google Patents
Nitrogen sealed baking machine table and method for enabling substrate to enter and exit baking device Download PDFInfo
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- CN113473736B CN113473736B CN202010417046.9A CN202010417046A CN113473736B CN 113473736 B CN113473736 B CN 113473736B CN 202010417046 A CN202010417046 A CN 202010417046A CN 113473736 B CN113473736 B CN 113473736B
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- 239000000758 substrate Substances 0.000 title claims abstract description 77
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 22
- 229910052757 nitrogen Inorganic materials 0.000 title claims description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 78
- 230000007246 mechanism Effects 0.000 claims abstract description 53
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 13
- 238000004891 communication Methods 0.000 claims description 14
- 238000007599 discharging Methods 0.000 claims description 11
- 230000001174 ascending effect Effects 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 abstract description 9
- 230000007423 decrease Effects 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 19
- 239000001301 oxygen Substances 0.000 description 19
- 229910052760 oxygen Inorganic materials 0.000 description 19
- 230000008569 process Effects 0.000 description 11
- 230000007306 turnover Effects 0.000 description 8
- 238000007664 blowing Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/227—Drying of printed circuits
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Furnace Charging Or Discharging (AREA)
- Furnace Details (AREA)
Abstract
A nitrogen gas sealed baking machine comprises a frame, a baking device and a feeding device. The frame includes a first end and a second end. The baking device is arranged on the frame and comprises two conversion boxes, an oven connected with the conversion boxes and two lifting mechanisms respectively arranged on the conversion boxes, wherein each conversion box is provided with a connecting shell, an inflating shell and an inner flange arranged between the connecting shell and the inflating shell. Connect casing and inner flange and define out the intercommunication room, aerify casing and inner flange and define out the conversion room, elevating system includes the elevating platform, and the elevating platform has roof, diapire and connects the support column of roof and diapire respectively, and the elevating platform is when the decline position, and the roof supports and leans on inner flange upper surface, and conversion room and intercommunication room are spaced apart by the roof, and when the rising position, the diapire supports and leans on inner flange lower surface, and conversion room and intercommunication room are spaced apart by the roof. The feeding device is arranged at the first end of the frame and is used for conveying the carrier and the substrate to one of the conversion boxes of the baking device. The invention also includes methods of moving substrates in and out of the baking apparatus.
Description
Technical Field
The present invention relates to a baking machine, and more particularly to a nitrogen-sealed baking machine capable of improving work efficiency and a method for loading and unloading a substrate into and out of a baking apparatus.
Background
The existing baking machine for drying the circuit board is characterized in that the circuit board is heated to the baking temperature from the normal temperature after being fed into an oven of the baking machine, and the circuit board can be taken out from the oven only after the interior of the oven and the circuit board are cooled to the normal temperature after the baking is finished so as to finish the baking process. However, some circuit boards require high temperature during baking, which requires heating the interior of the oven to about 300 ℃, and under such high temperature conditions, if the oxygen content in the oven is too high, the circuit boards are easily oxidized during baking, which may cause damage. The existing solution is to fill nitrogen into the oven to reduce the oxygen content to below a standard value, so as to prevent the above situation. However, the circuit board is inevitably ventilated with the outside air during the process of entering the oven and finishing the baking process and leaving the oven, so that the oxygen content in the oven is gradually increased, and the nitrogen gas needs to be refilled when the oxygen content exceeds the standard value, and the oven has a larger internal space and takes more time to fill, so that the overall working efficiency is reduced, and therefore, the improvement space is provided.
Disclosure of Invention
One of the objectives of the present invention is to provide a nitrogen-sealed baking machine capable of improving the working efficiency.
Another object of the present invention is to provide a method for loading and unloading a substrate into and out of a baking apparatus.
The nitrogen closed baking machine table is suitable for baking substrates; a frame including a first end and a second end opposite the first end; a baking device arranged on the frame and comprising two conversion boxes, an oven with two ends respectively connected with the conversion boxes and two lifting mechanisms respectively arranged on the conversion boxes, wherein each conversion box is provided with a connecting shell connected with the oven, an inflating shell arranged above the connecting shell and communicated with the connecting shell and an annular inner flange arranged between the connecting shell and the inflating shell, the connecting shell and the inner flange define a communicating chamber communicated with the oven, the inflating shell and the inner flange define a conversion chamber, each lifting mechanism comprises a lifting platform capable of moving up and down, the lifting platform is provided with a top wall, a bottom wall spaced from the top wall and a plurality of supporting columns respectively connected with the top wall and the bottom wall, the lifting platform can move between a descending position and an ascending position, when in the descending position, the top wall is abutted against the upper surface of the inner flange, and the conversion chamber and the communicating chamber are spaced by the top wall, in the raised position, the bottom wall abuts against a lower surface of the inner flange, and the switching chamber and the communication chamber are separated by the top wall; and the feeding device is arranged at the first end of the frame and used for combining the substrate with the carrier and conveying the carrier and the substrate into one conversion box of the baking device.
Each conversion box is also provided with an inlet and outlet valve which is movably arranged on the connecting shell and the inflating shell, the inflating shell is provided with an inlet and outlet facing the feeding device, and the inlet and outlet valve can movably seal the inlet and outlet.
In the nitrogen gas closed baking machine table, the lifting table of the lifting mechanism is also provided with a pair of abutting frames arranged on the supporting columns so as to support the carrier and the substrate entering the conversion box.
The lifting mechanism of the nitrogen closed baking machine table is also provided with a plurality of guide rods which penetrate through the bottom wall and extend up and down, and at least one driving piece which is connected with the lifting table and used for driving the lifting table to move up and down along the guide rods.
The invention relates to a nitrogen closed baking machine table, wherein an inflatable shell is provided with a pair of side walls which are spaced from each other, each side wall is provided with a plurality of through holes, the baking device also comprises two inflatable mechanisms which are respectively arranged on a conversion box, each inflatable mechanism is arranged on the inflatable shell of the corresponding conversion box and is provided with a fan, a motor for driving the fan and an air supply shell communicated with the side wall of the inflatable shell, the fan is positioned in the air supply shell, and air flow can be blown into the inflatable shell through the through holes of the side walls by the air supply shell.
The nitrogen closed baking machine table also comprises a discharging device arranged at the second end of the frame, wherein the discharging device is used for receiving the carrier and the substrate from another conversion box and separating the carrier and the substrate.
The method for the substrate to enter and exit the baking device comprises the following steps: the substrate enters a conversion chamber of a first conversion box of the baking device; after the conversion chamber is filled with nitrogen, the substrate enters the communicating chamber of the first conversion box from the conversion chamber through the first lifting platform, and the conversion chamber and the communicating chamber can be separated by the first lifting platform; the substrate enters the oven of the baking device from the communicating chamber; the substrate enters a communicating chamber of a second conversion box of the baking device from the oven; the substrate enters the conversion chamber of the second conversion box from the communication chamber of the second conversion box through a second lifting platform, and the conversion chamber and the communication chamber can be separated by the second lifting platform; and the substrate exits the transfer chamber.
The invention has the beneficial effects that: the conversion chamber and the communicating chamber are separated by the top wall or the bottom wall of the lifting platform no matter the lifting platform of the lifting mechanism is at the descending position or the ascending position, in the flow of injecting nitrogen into the baking device, only the first batch of substrate baking flow needs to fill nitrogen into the whole baking device to enable the oxygen content to be lower than a standard value, in the following baking flow, because the conversion chamber and the communicating chamber are separated by the top wall or the bottom wall of the lifting platform, the oxygen content in all the communicating chambers and the baking furnace is not influenced by the increase of the oxygen content when the conversion chamber is opened to the outside atmosphere, before/after the substrate enters the conversion chamber, only the nitrogen is needed to be injected into the conversion chamber of the air-filled shell of the conversion box again, and the oxygen content in all the communicating chambers and the baking furnace is not influenced in the process of moving the lifting platform, therefore, the nitrogen does not need to be refilled into the communicating chamber and the oven, the time for filling the nitrogen can be saved, and the overall efficiency can be effectively improved.
Drawings
FIG. 1 is a perspective view of a nitrogen-sealed baking apparatus according to an embodiment of the present invention;
FIG. 2 is a fragmentary perspective view of the embodiment;
FIG. 3 is a perspective view of a portion of the embodiment illustrating a feeding device;
FIG. 4 is a perspective view illustrating a carrier holding a substrate;
FIG. 5 is a perspective view of a toasting device according to this embodiment;
FIG. 6 is a perspective view of a switch box of the toasting device according to this embodiment;
FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6 illustrating a lift table of a lift mechanism of the toasting device in a raised position;
FIG. 8 is a cross-sectional view taken along section line VIII-VIII of FIG. 6;
FIG. 9 is a cross-sectional view similar to FIG. 7, illustrating the lift table of the lift mechanism in a lowered position; and
FIG. 10 is a flowchart illustrating a method for loading and unloading a substrate into and out of a baking apparatus according to an embodiment of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 to 3, an embodiment of the nitrogen-sealed baking machine of the present invention is suitable for baking a substrate 1, where the substrate 1 may be, for example, a thin circuit board, the nitrogen-sealed baking machine is an automated oven, and the substrate 1 is continuously transported to the nitrogen-sealed baking machine in batches for baking, and only two substrates 1 are shown in the figures as an illustration. The nitrogen gas sealing baking machine comprises a frame 3, a feeding device 4, a baking device 5 and a discharging device 6.
Referring to fig. 4, the frame 3 includes a first end 31 and a second end 32 opposite to the first end 31, and the first end 31 and the second end 32 define a front-rear direction D1. The feeding device 4 is disposed at the first end 31 of the frame 3 for combining the substrate 1 with a carrier 2 and transporting the carrier 2 and the substrate 1 into the baking device 5. The feeding device 4 includes a turning mechanism 41, a picking mechanism 42 and a conveying mechanism 43. The turnover mechanism 41 is disposed on the frame 3 and includes a turnover plate 411, a rotating rod 412 penetrating the turnover plate 411 and extending along a left-right direction D2, and four clamps 413 disposed at one end of the turnover plate 411 for clamping the substrate 1. The rotating rod 412 can drive the flipping plate 411 to pivot so as to switch the substrate 1 from the state extending along the front-back direction D1 to the state extending along the up-down direction D3, as shown in fig. 3. The capturing mechanism 42 is disposed on the frame 3 and includes a capturing arm 421 capable of moving in the front-back direction D1 and the up-down direction D3, and four capturing clips 422 disposed at intervals on the capturing arm 421. The pick-up clips 422 and the clamps 413 are respectively staggered from each other in the left-right direction D2, so that the pick-up mechanism 42 can take the substrate 1 from the turnover mechanism 41 and move the substrate 1 to a carrier 2 on the conveying mechanism 43 along with the movement of the pick-up arms 421. The carrier 2 comprises a plurality of cross bars 21, each cross bar 21 is provided with a plurality of clamping members 22 for clamping the substrate 1, the conveying mechanism 43 can support two side ends of the carrier 2, and after the picking mechanism 42 transfers the substrate 1 to the carrier 2, the conveying mechanism 43 conveys the carrier 2 to the baking device 5. The conveying mechanism 43 may be, for example, a pair of belt structures with a plurality of rollers, but is not limited thereto, as long as it can move the carrier 2 into the baking device 5.
Referring to fig. 5 to 7, the baking device 5 is disposed on the frame 3 and includes two switching boxes 51, an oven 52 having two ends respectively connected to the two switching boxes 51, two lifting mechanisms 53 respectively disposed on each switching box 51, and two inflation mechanisms 54 respectively disposed on each switching box 51. Since the two switching boxes 51, the two elevating mechanisms 53, and the two inflating mechanisms 54 are provided in mirror images with respect to the oven 52, the two switching boxes 51 have the same configuration, the two elevating mechanisms 53 have the same configuration, and the two inflating mechanisms 54 have the same configuration, except for the different directions. Therefore, in the following description, referring to fig. 5 and 6, only the switching box 51, the lifting mechanism 53 and the inflating mechanism 54 on one side of the baking device 5 will be described as an example.
Each of the switch boxes 51 has a connection housing 511 connected to the oven 52, an inflatable housing 512 disposed above the connection housing 511 and connected to the connection housing 511, an annular inner flange 513 disposed between the connection housing 511 and the inflatable housing 512, and an inlet/outlet valve 514 movably disposed between the connection housing 511 and the inflatable housing 512. The air-filled housing 512 is substantially square and has an inlet/outlet 512a facing the feeding device 4 for loading/unloading the carrier 2 into/from the baking device 5 and a pair of side walls 512b connected to the air-filled mechanism 54 and spaced from each other, and defines a conversion chamber C1 with the inner flange 513, each side wall 512b has a plurality of through holes 512C. The connecting housing 511 is substantially square and has a length in the left-right direction D2 greater than that of the inflating housing 512 in the left-right direction D2, and defines a communicating chamber C2 communicating with the oven 52 with the inner flange 513. The inner flange 513 defines an opening 513a that communicates the converting chamber C1 with the communicating chamber C2. The inlet/outlet valve 514 is movable up and down to close the inlet/outlet 512 a.
Referring to fig. 7 to 9, each of the lifting mechanisms 53 includes a lifting platform 531 movable in an up-down direction D3, four guide rods 532, and a pair of driving members 533. The lifting platform 531 has a top wall 531a, a bottom wall 531b spaced from the top wall 531a, a plurality of supporting pillars 531c respectively connecting the top wall 531a and the bottom wall 531b, and a pair of supporting frames 531d disposed on the supporting pillars 531 c. The lift stage 531 supports the carrier 2 and the substrate 1 entering the transfer box 51. The lift stage 531 is movable between a lowered position in which the top wall 531a abuts against the upper surface of the inner flange 513 and the switching chamber C1 and the communication chamber C2 are spaced apart by the top wall 531a, and a raised position in which the bottom wall 531b abuts against the lower surface of the inner flange 513 and the switching chamber C1 and the communication chamber C2 are spaced apart by the bottom wall 531 b. The guide bar 532 is inserted through the bottom wall 531b and extends in the up-down direction D3. The driving members 533 can drive the lifting platform 531 to move along the guide bar 532 in the up-down direction D3, each driving member 533 has a hydraulic cylinder 533a disposed in the corresponding connecting housing 511 and adjacent to the side wall 512b of the inflatable housing 512, a piston rod 533b driven by the hydraulic cylinder 533a, and a connecting arm 533c connecting the end of the piston rod 533b and the bottom wall 531b of the lifting platform 531. The number of the guide rods 532 is not limited to four, and in other embodiments, other numbers may be used as long as there are multiple guide rods. The hydraulic cylinder 533a of the driving member 533 may be replaced by a pneumatic cylinder in other embodiments, and is not limited to the embodiment.
Each inflation mechanism 54 is disposed on the corresponding inflation housing 512 of the conversion box 51, and has a fan 541, a motor 542 for driving the fan 541, and a substantially U-shaped blowing housing 543 connected to the corresponding sidewall 512b of the inflation housing 512. The fans 541 are located in the corresponding air blowing shells 543, and air flow can be blown into the corresponding air inflation shells 512 through the corresponding through holes 512c of the side walls 512b by the air blowing shells 543.
Referring to fig. 1 to 3, the discharging device 6 is disposed at the second end 32 of the frame 3 for receiving the carrier 2 and the substrate 1 from another converting box 51 and separating the carrier 2 and the substrate 1. The discharging device 6 includes a turning mechanism, a capturing mechanism and a conveying mechanism identical to the feeding device 4, and the discharging device 6 and the feeding device 4 are arranged in a mirror image manner with respect to the baking device 5, which is not described herein again.
The operation flow of the nitrogen airtight baking machine of the invention is introduced as follows:
referring first to fig. 2 to 4, the substrate 1 is conveyed to the turnover mechanism 41 of the feeding device 4 in a state of horizontally extending along the front-back direction D1 until the substrate 1 is clamped and fixed by the clamp 413, as shown in fig. 2. Then, the rotating lever 412 of the reversing mechanism 41 pivots the reversing plate 411, so that the base plate 1 is reversed to a state extending along the vertical direction D3, as shown in fig. 3. Then, the pick arm 421 of the pick mechanism 42 moves to the upper end of the turnover mechanism 41, the substrate 1 is taken off from the turnover mechanism 41 by the pick-up clamp 422, and the substrate 1 is transferred to the carrier 2 on the conveying mechanism 43, so that the substrate 1 is clamped by the clamping member 22 of the carrier 2, as shown in fig. 4.
Referring to fig. 5, 7, 9 and 10, the method for loading and unloading the substrate into and out of the baking apparatus of the present invention is performed, and the method includes steps S1-S6. For convenience of description and understanding, in the following description, the transfer box for the carrier 2 to be transported is defined as a first transfer box, the transfer box for the carrier 2 to be transported is defined as a second transfer box, and the first and second conversion boxes are distinguished by the names of the corresponding components below the first and second conversion boxes respectively. Referring to fig. 1, the right switch box 51 of fig. 5 is a first switch box, and the left switch box 51 of fig. 5 is a second switch box. Since the first conversion box at the feeding end and the second conversion box at the discharging end are arranged in a mirror image mode, the components of the first conversion box and the second conversion box are always provided with the same reference numbers under the condition that clear description is not affected.
In step S1, the in-out valve 514 of the first transfer box 51 moves downward to open the access 512a of the pneumatic housing 512, so that the transportation mechanism 43 transports the carrier 2 together with the substrate 1 into the transfer chamber C1 of the first pneumatic housing 512 and abuts against the abutment rack 531d of the lift 531, and the in-out valve 514 then moves upward to close the access 512 a.
In step S2, the inflating mechanism 54 of the first switch box 51 injects nitrogen gas into the switch chamber C1 of the inflating casing 512. It should be noted that the fan 541 of the air charging mechanism 54 can be connected to an external nitrogen pipeline (not shown) to inject nitrogen into the air charging housing 512, so that the oxygen content in the conversion chamber C1 is lower than a standard value. Since the baking temperature of the nitrogen-sealed baking oven station of the present invention for the substrate 1 is high, if the oxygen concentration in the baking device 5 (especially in the baking oven 52) is too high, the substrate 1 is easily oxidized during the baking process, and the substrate 1 is damaged, therefore, before baking, the first transfer box 51 must be injected with nitrogen after the first inlet/outlet of the first transfer box 51 is closed, and it should be noted that the baking oven 52 and the two communicating chambers C2 respectively communicating with the two ends of the baking oven 52 are also injected with nitrogen before the step S2, so that the oxygen content is lower than the standard value. After the nitrogen gas filling is completed, the lift 531 of the first transfer box 51 moves from the raised position to the lowered position to transfer the carrier 2 and the substrate 1 to the communicating chamber C2, and the oxygen content is lower than the standard value because the transfer chamber C1 of the first transfer box 51 is not in communication with the outside air and the nitrogen gas is filled during the movement, so that the oxygen concentration in the communicating chamber C2 and the oven 52 is not affected. At this time, the switching chamber C1 and the communication chamber C2 of the first switching box 51 are partitioned by the first ceiling wall 531a of the first elevating platform.
In step S3, the carrier 2 and the substrate 1 enter the oven 52 from the first communicating chamber C2 of the first transfer box 51, and then the carrier 2 and the substrate 1 are driven by a conveyor (not shown) in the oven 52 to move in the oven 52 for baking process, and after baking, they are cooled before entering the connecting housing 511 of the second transfer box 51.
In step S4, the substrate 1 enters the second communicating chamber C2 of the second transfer box 51 from the oven 52 after being cooled, and similarly, before the second elevating platform 531 moves to the ascending position, the second inlet/outlet valve 514 closes the second inlet/outlet 512a, and the gas charging mechanism 54 corresponding to the second transfer box 51 charges the transfer chamber C1 with nitrogen gas, thereby avoiding the influence on the oxygen concentration in the second communicating chamber C2 and the oven 52.
In step S5, the second lift 531 moves to the raised position, and the carrier 2 and the substrate 1 enter the transfer chamber C1 of the second transfer box 51 from the second communicating chamber C2 of the second transfer box 51. At this time, the second switching chamber C1 and the second communication chamber C2 are partitioned by the second bottom wall 531b of the second lift.
In step S6, the in-out valve 514 of the second conversion box 51 is opened, so that the carrier 2 and the substrate 1 leave the conversion chamber C1 of the second conversion box 51 and enter the discharging device 6. Thus, the method for loading and unloading the substrate into and out of the baking device is completed.
Then the discharging device 6 performs a reverse operation flow opposite to the operation flow of the feeding device 4 for conveying the substrate 1 into the baking device 5, conveys the substrate 1 out of the baking device 5, separates the carrier 2 from the substrate 1, and then the baked substrate 1 leaves the nitrogen sealed baking machine table of the present invention, thereby completing the operation flow of the nitrogen sealed baking machine table of the present invention.
When the baking process of the substrate 1 of the next batch is performed, after the substrate 1 enters the first transfer box 51, only the nitrogen gas needs to be injected into the transfer chamber C1 of the air-filled housing 512 of the first transfer box 51 again, and the nitrogen gas does not need to be injected into the whole baking device 5 to maintain the internal oxygen content lower than the standard value, so that a considerable time can be saved in the baking process of a large number of batches of substrates 1, and the efficiency of the whole baking process can be effectively improved.
In summary, in the nitrogen-sealed baking machine of the present invention, the conversion chamber C1 and the communicating chamber C2 are separated by the top wall 531a or the bottom wall 531b of the lifting table 531 no matter the lifting table 531 of the lifting mechanism 53 is at the descending position or the ascending position, in the flow of injecting nitrogen into the baking apparatus 5, only the first baking process of the substrate 1 needs to fill nitrogen into the entire baking apparatus 5 to make the oxygen content lower than the standard value, and in the subsequent baking process, because the conversion chamber C1 and the communicating chamber C2 are always separated by the top wall 531a or the bottom wall 531b of the lifting table 531, the oxygen concentration in the two communicating chambers C2 and the baking oven 52 is not affected by the increase of the oxygen concentration when the conversion chamber C1 is opened to the outside atmosphere, before/after the substrate 1 enters the conversion chamber C1, only the conversion chamber C1 of the gas-filled housing 512 of the conversion box 51 needs to be injected again, the oxygen concentration in the two communicating chambers C2 and the oven 52 will not be affected during the movement of the elevating platform 531, so that the two communicating chambers C2 and the oven 52 need not be refilled with nitrogen, the time for filling nitrogen can be saved, the overall efficiency can be effectively improved, and the purpose of the present invention can be achieved.
The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the claims and the contents of the specification should be included in the scope of the present invention.
Claims (7)
1. A nitrogen gas closed baking machine table is suitable for baking a substrate; the nitrogen gas airtight baking machine is characterized by comprising:
a frame including a first end and a second end opposite the first end;
the baking device is arranged on the frame and comprises two conversion boxes, an oven and two lifting mechanisms respectively arranged on each conversion box, two ends of the oven are respectively connected with the conversion boxes, each conversion box is provided with a connecting shell connected with the oven, an inflatable shell arranged above the connecting shell and communicated with the connecting shell, and an annular inner flange arranged between the connecting shell and the inflatable shell, the connecting shell and the inner flange define a communicating chamber communicated with the oven, the inflatable shell and the inner flange define a conversion chamber, each lifting mechanism comprises a lifting platform capable of moving up and down, each lifting platform is provided with a top wall, a bottom wall spaced from the top wall and a plurality of supporting columns respectively connected with the top wall and the bottom wall, each lifting platform can move between a descending position and an ascending position, and when in the descending position, the top wall is abutted against the upper surface of the corresponding inner flange, the transfer chamber and the corresponding communication chamber are separated by the corresponding top wall, the bottom wall abuts against the lower surface of the corresponding inner flange in the raised position, and the transfer chamber and the corresponding communication chamber are separated by the corresponding bottom wall; and
the feeding device is arranged at the first end of the frame and used for combining the substrate with the carrier and conveying the carrier and the substrate into one conversion box of the baking device.
2. The nitrogen-sealed baking machine as claimed in claim 1, wherein: each conversion box is also provided with an inlet and outlet valve which is movably arranged on the connecting shell and the inflating shell thereof, the inflating shell is provided with an inlet and outlet facing the feeding device, and the inlet and outlet valve can movably seal the inlet and outlet.
3. The nitrogen-sealed baking machine as claimed in claim 1, wherein: the lifting platform of the lifting mechanism is also provided with a pair of abutting frames arranged on the supporting columns so as to support the carrier and the substrate entering the conversion box.
4. The nitrogen-sealed baking machine as claimed in claim 1, wherein: the lifting mechanism is also provided with a plurality of guide rods penetrating through the bottom wall and extending up and down and at least one driving piece connected with the lifting platform and used for driving the lifting platform to move up and down along the guide rods.
5. The nitrogen-sealed baking machine as claimed in claim 2, wherein: the baking device also comprises two inflation mechanisms which are respectively arranged on the conversion boxes, each inflation mechanism is arranged on the corresponding inflation shell of the conversion box and is provided with a fan, a motor for driving the fan and an air supply shell communicated with the corresponding side wall of the inflation shell, the fan is positioned in the corresponding air supply shell, and air flow can be blown into the corresponding inflation shell through the corresponding through hole of the side wall by the air supply shell.
6. The nitrogen-sealed baking machine as claimed in claim 1, wherein: the nitrogen gas closed baking machine table also comprises a discharging device arranged at the second end of the frame, and the discharging device is used for receiving the carrier and the substrate from another conversion box and separating the carrier and the substrate.
7. A method for moving a substrate into and out of a baking apparatus, comprising:
the substrate enters a first conversion chamber of a first conversion box of the baking device;
after the first conversion chamber is filled with nitrogen, the substrate enters a first communicating chamber of the first conversion box from the first conversion chamber through a first lifting platform, and the first conversion chamber and the first communicating chamber can be separated by the first lifting platform;
the substrate enters the oven of the baking device from the first communication chamber;
the substrate enters a second communication chamber of a second conversion box of the baking device from the oven;
the substrate enters a second conversion chamber of the second conversion box from the second communication chamber of the second conversion box through a second lifting platform, and the second conversion chamber and the second communication chamber can be separated by the second lifting platform; and
the substrate exits the second conversion chamber.
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| Application Number | Priority Date | Filing Date | Title |
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| TW109110817A TWI724845B (en) | 2020-03-30 | 2020-03-30 | Nitrogen airtight baking machine and method for substrate entering and exiting baking device |
| TW109110817 | 2020-03-30 |
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| CN113473736A CN113473736A (en) | 2021-10-01 |
| CN113473736B true CN113473736B (en) | 2022-05-03 |
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| US5526978A (en) * | 1992-11-24 | 1996-06-18 | Tdk Corporation | Method for soldering electronic components |
| US6307184B1 (en) * | 1999-07-12 | 2001-10-23 | Fsi International, Inc. | Thermal processing chamber for heating and cooling wafer-like objects |
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| TW202137837A (en) | 2021-10-01 |
| TWI724845B (en) | 2021-04-11 |
| CN113473736A (en) | 2021-10-01 |
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