CN113437120B - Display panel and manufacturing method thereof - Google Patents

Display panel and manufacturing method thereof Download PDF

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Publication number
CN113437120B
CN113437120B CN202110652293.1A CN202110652293A CN113437120B CN 113437120 B CN113437120 B CN 113437120B CN 202110652293 A CN202110652293 A CN 202110652293A CN 113437120 B CN113437120 B CN 113437120B
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layer
display panel
electrode layer
light
opening
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CN113437120A (en
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李林霜
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/126—Shielding, e.g. light-blocking means over the TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H10K59/1315—Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The embodiment of the invention discloses a display panel and a manufacturing method thereof; the display panel comprises a driving circuit layer, a passivation layer positioned on the driving circuit layer and a first electrode layer positioned on the passivation layer; the driving circuit layer is electrically connected with the first electrode layer, and the first electrode layer comprises an organic conductive material. According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.

Description

Display panel and manufacturing method thereof
Technical Field
The invention relates to the field of display, in particular to a display panel and a manufacturing method thereof.
Background
In recent years, flexible OLED (Organic Light-Emitting Diode) display panels have advantages of self-luminescence, high brightness, bright color, lightness and thinness, and are the hot point of research and the development direction of the future.
Therefore, a display panel and a method for fabricating the same are needed to solve the above-mentioned problems.
Disclosure of Invention
The embodiment of the invention provides a display panel and a manufacturing method thereof, which can solve the technical problem that the bending performance of the conventional display panel is poor.
The embodiment of the invention provides a display panel, which comprises a driving line layer, a passivation layer and a first electrode layer, wherein the passivation layer is positioned on the driving line layer;
the driving circuit layer is electrically connected with the first electrode layer, and the first electrode layer comprises an organic conductive material.
In an embodiment, the display panel further includes a plurality of first openings, the first openings penetrate through the passivation layer and a portion of the driving circuit layer, and the emergent light of the display panel is led out to the light-emitting side of the display panel through the first openings; the first opening is filled with a transparent material, and the first electrode layer comprises an organic transparent conductive material.
In an embodiment, the transparent material is the same as the material of the first electrode layer.
In an embodiment, the display panel further includes a substrate, the driving line layer is located between the passivation layer and the substrate, and the first opening penetrates through the driving line layer and extends at least to a contact surface of the substrate and the driving line layer.
In one embodiment, the aperture of the first opening gradually increases in a direction from the first electrode layer to the substrate.
In an embodiment, the display panel further includes a reflective layer on a sidewall of the first opening, and the reflective layer reflects light emitted from the first opening to the driving circuit layer into the first opening.
In an embodiment, the first opening and the transparent material form a light receiving structure, the light receiving structure includes a light incident surface close to the first electrode layer, a light emitting surface far away from the first electrode layer, and a light receiving curved surface located between the light incident surface and the light emitting surface, and the light incident surface and the light emitting surface are arranged in parallel.
In one embodiment, the display panel further includes a pixel defining layer on the first electrode layer, the pixel defining layer including a plurality of first openings, the light emitting device layer of the display panel being located in the first openings; the first electrode layer further comprises a first hydrophobic layer located on a side close to the pixel defining layer, and the pixel defining layer comprises a hydrophobic material.
The embodiment of the invention also provides a manufacturing method of the display panel, which comprises the following steps:
forming a driving circuit layer on a substrate;
forming a passivation layer on the driving line layer;
forming a first electrode layer on the passivation layer;
the driving circuit layer is electrically connected with the first electrode layer, and the first electrode layer comprises an organic conductive material.
In one embodiment, the step of forming a first electrode layer on the passivation layer includes: patterning the passivation layer to form a plurality of first openings on the display panel, wherein the first openings penetrate through the passivation layer and a part of the driving line layer; filling a transparent material in the first open hole; forming an organic transparent conductive material layer on the passivation layer; and patterning the organic transparent conductive material layer to form the first electrode layer.
According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a first structure of a display panel according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a second structure of a display panel according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a third structure of a display panel according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a fourth structure of a display panel according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a fifth structure of a display panel according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a sixth structure of a display panel according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a seventh structure of a display panel according to an embodiment of the present invention;
fig. 8 is a partial perspective view of a seventh structure of a display panel according to an embodiment of the invention;
fig. 9 is a schematic structural diagram of an eighth structure of a display panel according to an embodiment of the present invention;
FIG. 10 is a flowchart illustrating a method for fabricating a display panel according to an embodiment of the present invention;
fig. 11 is a first flowchart illustrating a method for manufacturing a display panel according to an embodiment of the invention;
FIG. 12 is a second flowchart illustrating a method for fabricating a display panel according to an embodiment of the present invention;
FIG. 13 is a third flowchart illustrating a method for fabricating a display panel according to an embodiment of the present invention;
fig. 14 is a fourth flowchart illustrating a manufacturing method of a display panel according to an embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Furthermore, it should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, and are not intended to limit the present invention. In the present invention, unless otherwise specified, the use of directional terms such as "upper" and "lower" generally means upper and lower in the actual use or operation of the device, particularly in the orientation of the figures of the drawings; while "inner" and "outer" are with respect to the outline of the device.
In recent years, flexible OLED (Organic Light-Emitting Diode) display panels have advantages of self-luminescence, high brightness, bright color, lightness and thinness, and are the hot point of research and the development direction of the future.
Referring to fig. 1 to 9, an embodiment of the invention provides a display panel 100, including a driving circuit layer 300, a passivation layer 400 on the driving circuit layer 300, and a first electrode layer 510 on the passivation layer 400;
the driving circuit layer 300 is electrically connected to the first electrode layer 510, and the first electrode layer 510 includes an organic conductive material.
According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
The technical solution of the present invention will now be described with reference to specific embodiments.
The display panel 100 includes a driving line layer 300, a passivation layer 400 on the driving line layer 300, and a first electrode layer 510 on the passivation layer 400; the driving circuit layer 300 is electrically connected to the first electrode layer 510, and the first electrode layer 510 includes an organic conductive material, as shown in fig. 1.
In this embodiment, the material of the first electrode layer 510 may be an organic conductive polymer material, such as polyaniline (PAn). The material of the first electrode layer 510 may also include an organic material and conductive particles, the organic material may be polyimide, the polyimide has good flexibility and may improve the bending capability of the whole display panel 100, and the conductive particles may be carbon nanotubes, nano silver, nano nickel, and the like, which is not limited herein.
In this embodiment, the display panel 100 further includes a light emitting device layer 530 on the first electrode layer 510, and a second electrode layer 520 on the light emitting device layer 530; the material of the second electrode layer 520 includes a reflective material, and reflects light emitted from the light emitting device layer 530 toward the first electrode layer 510, and the material of the first electrode layer 510 includes an organic transparent conductive material, as shown in fig. 2. The display panel 100 is a bottom emission display panel 100, the first electrode layer 510 is an anode layer, the second electrode layer 520 is a cathode layer, the second electrode layer 520 needs to play a role in reflecting light, and light emitted from the light emitting device layer 530 is emitted to the driving circuit layer 300, and at this time, the first electrode layer 510 may be made of an organic conductive polymer material, such as polyaniline (PAn). The material of the first electrode layer 510 may also include an organic transparent material and transparent conductive particles, the organic transparent material may be transparent polyimide, the flexibility of the transparent polyimide is better, and the light transmittance is good, so that the bending capability of the display panel 100 as a whole can be improved, the light-emitting rate of the bottom-emission display panel 100 can be enhanced, and the display quality of the display panel 100 can be improved, and the transparent conductive particles may be transparent conductive particles such as nano silver and nano nickel, which is not limited herein.
In this embodiment, the display panel 100 further includes a plurality of first openings 410, the first openings 410 penetrate through the passivation layer 400 and a portion of the driving circuit layer 300, and the emergent light of the display panel 100 is led out to the light-emitting side of the display panel 100 through the first openings 410; the first opening 410 is filled with a transparent material, and the first electrode layer 510 includes an organic transparent conductive material, as shown in fig. 3. The first opening 410 is filled with a transparent material, which may be a high-transmittance material, but not limited thereto, and may be an organic high-transmittance material or an inorganic high-transmittance material, so as to improve the light-emitting efficiency of the bottom emission display panel 100, where the transmittance of the transparent material is greater than or equal to that of the organic transparent conductive material, or the cost of the transparent material is lower than that of the organic transparent conductive material. The transparent material may be filled in the first opening 410, and then the first electrode layer 510 is formed.
In this embodiment, the transparent material is the same as the material of the first electrode layer 510, please refer to fig. 4 specifically. That is, the organic transparent conductive material is filled in the first opening 410, and the first electrode layer 510 is formed at the same time. The material in the first opening 410 is the same as the material of the first electrode layer 510, so that the light penetration continuity is good and the film integrity is better.
In this embodiment, the display panel 100 further includes a substrate 200, the driving circuit layer 300 is located between the passivation layer 400 and the substrate 200, and the first opening 410 penetrates through the driving circuit layer 300 and extends at least to a contact surface between the substrate 200 and the driving circuit layer 300, as shown in fig. 3 and fig. 4. The first opening 410 is formed at most through the substrate 200, so that the transmittance of the bottom emission display panel 100 can be maximized, and the display quality of the display panel 100 can be improved.
In this embodiment, in a direction from the first electrode layer 510 to the substrate 200, the aperture of the first opening 410 is gradually increased, specifically referring to fig. 5. In the bottom emission display panel 100, the aperture of the first opening 410 is gradually increased in the light emitting direction, so that the light emitting rate of the light can be further increased, and the display quality of the display panel 100 can be improved.
In this embodiment, the display panel 100 further includes a reflective layer 411 disposed on a sidewall of the first opening 410, and the reflective layer 411 reflects light emitted from the first opening 410 to the driving circuit layer 300 into the first opening 410, as shown in fig. 6. When light propagates through the first opening 410 and encounters the reflective layer 411 on the sidewall of the first opening 410, the light continues to propagate through the first opening 410 until the light is emitted to the substrate 200 and exits the display panel 100, so as to avoid the light from being emitted to other layers of the driving circuit layer 300, such as the active layer 330, the gate layer 350, and the like, thereby avoiding light loss, maximizing the transmittance of the bottom emission display panel 100, and improving the display quality of the display panel 100.
In this embodiment, the first opening 410 and the light receiving structure 430 formed by the transparent material, the light receiving structure 430 includes a light incident surface 431 close to the first electrode layer 510, a light emitting surface 432 far away from the first electrode layer 510 (i.e., close to the substrate 200), and a light receiving curved surface 433 located between the light incident surface 431 and the light emitting surface 432, and the light incident surface 431 and the light emitting surface 432 are arranged in parallel, please refer to fig. 7 and 8. The area of the light incident surface 431 is larger than that of the light emitting surface 432. The light receiving curved surface 433 converges light incident on the light receiving curved surface 433 within the preset angle range and emits the light out of the light emitting surface 432. The light receiving curved surface 433 corresponds to a side wall of the first opening 410, the light incident surface 431 may be parallel to the light emitting surface 432, light emitted by the light emitting device layer 530 enters the light receiving structure 430 from the light incident surface 431, when an included angle between the light entering the light receiving structure 430 and the light emitting surface 432 is within the preset angle range, the light entering the light receiving structure 430 may directly exit from the light emitting surface 432, and at this time, the reflective layer 411 plays a role in reflection, and enhances the amount of light reflected in the first opening 410; when the included angle between the light entering the light receiving structure 430 and the light emitting surface 432 is not within the preset angle range, the light entering the light receiving structure 430 can be reflected at least once by the light receiving curved surface 433 and then emitted in the direction of the included angle between the light emitting surface 432 and the preset angle range. The reflective layer 411 may not be totally reflective, so as to reduce the process difficulty of the reflective layer 411, and the light receiving structure 430 is matched with the reflective layer 411, so as to enhance the light quantity of the reflected light and improve the light extraction efficiency.
In this embodiment, a cross-sectional profile of the light-collecting curved surface 433 perpendicular to the light incident surface 431 or the light emitting surface 432 may be one of a parabola, a polynomial curve, a bezier curve, a B-spline curve, or a non-uniform B-spline curve.
In this embodiment, the cross-sectional profile of the light-collecting curved surface 433 can be adjusted according to the preset angle range, for example, the preset angle range may be 60 degrees to 90 degrees from the included angle between the light-emitting surface 432 and the preset angle range; in addition, the cross section of the light receiving structure 430 may be a rectangular, circular or other polygonal structure in a direction parallel to the light incident surface 431 or the light emitting surface 432, which is not limited herein.
In this embodiment, when the light incident surface 431 and the light receiving surface are circular, the connection surface between the light incident surface 431 and the light emitting surface 432 and connected to the light receiving curved surface 433 may be a light receiving curved surface 433 having the same cross-sectional profile as the light receiving curved surface 433, and is not limited herein.
In this embodiment, the display panel 100 further includes a pixel defining layer 600 on the first electrode layer 510, the pixel defining layer 600 includes a plurality of first openings 610, and the light emitting device layer 530 is located in the first openings 610; the first electrode layer 510 further includes a first hydrophobic layer 511, the first hydrophobic layer 511 is located at a side close to the pixel defining layer 600, and the pixel defining layer 600 includes a hydrophobic material, as shown in fig. 9. The pixel definition layer 600 including a hydrophobic material is used for forming the light emitting device layer 530, wherein the material is hydrophilic, the pixel definition layer 600 can prevent the light emitting device layer 530 from overflowing the first opening 610, the pixel definition layer 600 can better define pixel points, and the first electrode layer 510 needs to be in better contact with the pixel definition layer 600, and by using the principle of similar compatibility, two hydrophobic materials can be in better contact, so as to avoid delamination, which is beneficial to the planarization of the pixel definition layer 600, and improves the display quality of the display panel 100.
In this embodiment, an orthographic projection of the first hydrophobic layer 511 on the pixel defining layer 600 is located in the pixel defining layer 600, please refer to fig. 9 specifically. That is, the first hydrophobic layer 511 is not located in the first opening 610, so that the light emitting device layer 530 is prevented from repelling the first hydrophobic layer 511, the contact angle is reduced, the flatness of the light emitting device layer 530 is improved, and the display quality of the display panel 100 is improved.
In this embodiment, the refractive index of the transparent material gradually increases in a direction from the inner wall of the first opening 410 to the center of the first opening 410. When light propagates in the first opening 410, the light is emitted from the center of the first opening 410 to the inner wall of the first opening 410, which is equivalent to the light from the film with a large refractive index to the film with a small refractive index, and is dense to sparse, when the incident angle is larger than the critical angle, total reflection occurs, and the light continues to propagate in the first opening 410 until being emitted to the substrate 200 and emitted out of the display panel 100, so that the light is prevented from being emitted to other films of the driving circuit layer 300, such as the active layer 330, the gate layer 350, and the like, light loss is avoided, the light transmittance of the bottom-emission display panel 100 can be maximally improved, and the display quality of the display panel 100 is improved.
In this embodiment, the driving circuit layer 300 includes an active layer 330 on the substrate 200, a first insulating layer 340 on the active layer 330, a gate layer 350 on the first insulating layer 340, a second insulating layer 360 on the gate layer 350, and a source drain layer 370 on the second insulating layer 360. The source drain layer 370 is electrically connected to the active layer 330, as shown in fig. 1 to 9.
In this embodiment, the driving circuit layer 300 includes a plurality of thin film transistor units 301, and an orthogonal projection of the thin film transistor units 301 on the pixel defining layer 600 is located outside the first opening 610, so as to ensure the transmittance of light, as shown in fig. 9.
In this embodiment, the substrate 200 includes a glass substrate, a transparent polyimide layer on the glass substrate, and a first buffer layer on the transparent polyimide layer. The first buffer layer is located at a side close to the driving line layer 300.
In this embodiment, the driving circuit layer 300 further includes a light shielding layer 310 located between the substrate 200 and the active layer 330, and a second buffer layer 320 located on the light shielding layer 310, and the active layer 330 is located on the second buffer layer 320, as shown in fig. 1 to 9.
In the present embodiment, in the drawings, it is easy to understand that the thin film transistor unit 301 is only formed by a film layer corresponding portion in the driving line layer 300, for example, the active layer 330 may include a plurality of active units, the gate layer 350 may include a plurality of gate units, the source drain layer 370 may include a plurality of source drain units, one of the active units, one of the gate units, and one of the source drain units correspond to each other, in the thin film transistor unit 301 in the drawings, only the active layer 330 represents one of the active units, the gate layer 350 represents one of the gate units, the source drain layer 370 represents one of the source drain units, and the thin film transistor unit 301 may include the light shielding layer 310 or may not include the light shielding layer 310, specifically refer to fig. 1 to 9, which is not specifically limited.
In this embodiment, the material of the active layer 330 includes any one of the following: IGZO, IGTO, IGO, IZO.
In this embodiment, the material of the gate layer 350 includes any one of the following: mo or Mo/Al or Mo/Cu, Mo/Cu/IZO or IZO/Cu/IZO or Mo/Cu/ITO or Ni/Cu/Ni or MoTiNi/Cu/MoTiNi or NiCr/Cu/NiCr or CuNb. Wherein "/" denotes a composite laminated film layer, for example, "Mo/Al" denotes a composite laminated film layer of Mo and Al, and the "/" in the material is the same hereinafter, and will not be described again.
In this embodiment, the material of the light-shielding layer 310 may be any one of the following materials: mo or Mo/Al or Mo/Cu or MoTi/Cu/MoT or TiAlTi or Ti/Cu/Ti or Mo/Cu/IZO or IZO/Cu/IZO or Mo/Cu/ITO or Ni/Cu/Ni or MoTiNi/Cu/MoTiNi or MoNi/Cu/MoNi or NiCr/Cu/NiCr or TiNi/Cu/TiNi or TiCr/Cu/TiCr or CuNb.
In this embodiment, the material of any one or more of the first insulating layer 340, the second insulating layer 360, and the passivation layer 400 may be any one or more of the following: SiOx or SiNx/SiOx or SiNOx, wherein "x" in the chemical formula represents a compound thereof, for example, "SiOx" represents a silicon oxide compound, and "x" in the following definition of the material represents the same, and thus, the description thereof is omitted.
In this embodiment, the source drain layer 370 may be made of any one of the following materials: mo or Mo/Al or Mo/Cu/IZO or IZO/Cu/IZO or Mo/Cu/ITO or Ni/Cu/Ni or MoTiNi/Cu/MoTiNi or NiCr/Cu/NiCr or CuNb.
According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
Referring to fig. 10, an embodiment of the invention provides a method for manufacturing a display panel 100, including:
s100, forming a driving circuit layer 300 on a substrate 200;
s200, forming a passivation layer 400 on the driving line layer 300;
s300, forming a first electrode layer 510 on the passivation layer 400;
the driving circuit layer 300 is electrically connected to the first electrode layer 510, and the first electrode layer 510 includes an organic conductive material.
According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
The technical solution of the present invention will now be described with reference to specific embodiments.
The manufacturing method of the display panel 100 includes:
s100, forming a driving circuit layer 300 on the substrate 200, please refer to fig. 11.
In this embodiment, before step S100, the method further includes:
s100a, providing a glass substrate.
And S100b, forming a transparent polyimide layer on the glass substrate.
S100c, forming a first buffer layer on the transparent polyimide layer.
In this embodiment, step S100 includes:
s110, forming a light-shielding layer 310 on the first buffer layer.
And S120, forming a second buffer layer 320 on the light-shielding layer 310.
S130, an active layer 330 is formed on the second buffer layer 320.
S140, forming a first insulating layer 340 on the active layer 330.
S150, forming a gate layer 350 on the first insulating layer 340.
And S160, forming a second insulating layer 360 on the gate layer 350.
And S170, forming a source drain layer 370 on the second insulating layer 360.
In this embodiment, please refer to any one of the related embodiments and drawings of the display panel 100 for the specific structure and limitation of the specific film layer in step S100, which is not described herein again.
S200, forming a passivation layer 400 on the driving line layer 300, with reference to fig. 12.
In this embodiment, step S200 includes:
s210a, forming a passivation material layer on the driving circuit layer 300.
S220a, patterning the passivation material layer to form a plurality of second openings 420, where the second openings 420 expose the source/drain layer 370 to form the passivation layer 400.
In this embodiment, only the steps S210a and S220a may be required, that is, the display panel 100 is in a top-emission type, and the passivation layer 400 does not need to have an opening for enhancing light transmission.
In this embodiment, step S200 includes:
s210b, forming a passivation material layer on the driving circuit layer 300.
S220b, patterning the passivation material layer to form a plurality of first openings 410 and a plurality of second openings 420, where the second openings 420 expose the source/drain layer 370, and the first openings 410 penetrate through the passivation layer 400 and a portion of the driving circuit layer 300 to form the passivation layer 400, as shown in fig. 14. Alternatively, the passivation layer 400 may be formed first and then patterned to form a plurality of first openings 410 and a plurality of second openings 420.
In this embodiment, after steps S210b and S220b, that is, the display panel 100 is a bottom emission type, the passivation layer 400 needs to have the first opening 410 for enhancing light transmission.
In this embodiment, after step S220b, step S200 further includes:
s230b, filling a transparent material in the first opening 410.
In this embodiment, the first opening 410 is filled with a transparent material, which may be a high-transmittance material, but is not limited thereto, and may be an organic high-transmittance material or an inorganic high-transmittance material, so as to improve the light-emitting rate of the bottom emission display panel 100, where the transmittance of the transparent material is greater than or equal to that of the organic transparent conductive material, or the cost of the transparent material is lower than that of the organic transparent conductive material. The transparent material may be filled in the first opening 410, and then the first electrode layer 510 is formed.
S300, forming a first electrode layer 510 on the passivation layer 400, specifically referring to fig. 13.
In this embodiment, when step S230b is not executed, step S300 includes:
s310, filling a first electrode material layer in the first opening 410.
In this embodiment, the transparent material is the same as the material of the first electrode layer 510, please refer to fig. 4 specifically. That is, the organic transparent conductive material is filled in the first opening 410, and the first electrode layer 510 is formed at the same time. The material in the first opening 410 is the same as the material of the first electrode layer 510, so that the light penetration continuity is good and the film integrity is better.
In this embodiment, step S310 includes:
s311, filling the first opening 410 with first electrode material layers having different refractive indexes in a layered manner.
In this embodiment, the refractive index of the transparent material gradually increases in a direction from the inner wall of the first opening 410 to the center of the first opening 410. When light propagates in the first opening 410, the light is emitted from the center of the first opening 410 to the inner wall of the first opening 410, which is equivalent to the light from the film with a large refractive index to the film with a small refractive index, and is dense to sparse, when the incident angle is larger than the critical angle, total reflection occurs, and the light continues to propagate in the first opening 410 until being emitted to the substrate 200 and emitted out of the display panel 100, so that the light is prevented from being emitted to other films of the driving circuit layer 300, such as the active layer 330, the gate layer 350, and the like, light loss is avoided, the light transmittance of the bottom-emission display panel 100 can be maximally improved, and the display quality of the display panel 100 is improved.
In this embodiment, before step S310, step S300 further includes:
s301, forming a reflective layer 411 on the sidewall of the first opening 410.
In this embodiment, the display panel 100 further includes a reflective layer 411 disposed on a sidewall of the first opening 410, and the reflective layer 411 reflects light emitted from the first opening 410 to the driving circuit layer 300 into the first opening 410, as shown in fig. 6. When light propagates through the first opening 410 and encounters the reflective layer 411 on the sidewall of the first opening 410, the light continues to propagate through the first opening 410 until the light is emitted to the substrate 200 and exits the display panel 100, so as to avoid the light from being emitted to other layers of the driving circuit layer 300, such as the active layer 330, the gate layer 350, and the like, thereby avoiding light loss, maximizing the transmittance of the bottom emission display panel 100, and improving the display quality of the display panel 100.
S320, forming a first electrode layer 510 on the passivation layer 400.
In this embodiment, step S320 includes:
s321, performing a patterning process on the passivation layer 400 to form a plurality of first openings 410 on the display panel 100, wherein the first openings 410 penetrate through the passivation layer 400 and a portion of the driving circuit layer 300;
s322, filling a transparent material in the first opening 410;
s323, forming an organic transparent conductive material layer on the passivation layer 400;
s324, patterning the organic transparent conductive material layer to form the first electrode layer 510.
In this embodiment, after step S320, step S300 further includes:
s330, performing hydrophobic treatment on the side, away from the driving line layer 300, of the first electrode layer 510 to form a first hydrophobic layer 511.
In this embodiment, the manufacturing method of the display panel 100 further includes:
s400, forming a pixel defining layer 600 on the first electrode layer 510.
In this embodiment, step S400 includes:
s410, forming a pixel defining material layer on the first electrode layer 510.
S420, patterning the pixel defining material layer to form a plurality of first openings 610.
In this embodiment, the display panel 100 further includes a pixel defining layer 600 on the first electrode layer 510, the pixel defining layer 600 includes a plurality of first openings 610, and the light emitting device layer 530 is located in the first openings 610; the first electrode layer 510 further includes a first hydrophobic layer 511, the first hydrophobic layer 511 is located at a side close to the pixel defining layer 600, and the pixel defining layer 600 includes a hydrophobic material, as shown in fig. 9. The pixel definition layer 600 including a hydrophobic material is used for forming the light emitting device layer 530, wherein the material is hydrophilic, the pixel definition layer 600 can prevent the light emitting device layer 530 from overflowing the first opening 610, the pixel definition layer 600 can better define pixel points, and the first electrode layer 510 needs to be in better contact with the pixel definition layer 600, and by using the principle of similar compatibility, two hydrophobic materials can be in better contact, so as to avoid delamination, which is beneficial to the planarization of the pixel definition layer 600, and improves the display quality of the display panel 100.
In this embodiment, an orthographic projection of the first hydrophobic layer 511 on the pixel defining layer 600 is located in the pixel defining layer 600, please refer to fig. 9 specifically. That is, the first hydrophobic layer 511 is not located in the first opening 610, so that the light-emitting device layer 530 is prevented from repelling the first hydrophobic layer 511, the flatness of the light-emitting device layer 530 is improved, and the display quality of the display panel 100 is improved.
In this embodiment, the manufacturing method of the display panel 100 further includes:
s500, forming a light emitting device layer 530 in the first opening 610, please refer to fig. 1.
S600, forming a second electrode layer 520 on the light emitting device layer 530, specifically referring to fig. 1.
In this embodiment, the material of the second electrode layer 520 includes a reflective material, and reflects the light emitted from the light emitting device layer 530 to the first electrode layer 510, and the material of the first electrode layer 510 includes an organic transparent conductive material, which is specifically referred to fig. 2 and fig. 3. The display panel 100 is a bottom-emission display panel 100, the first electrode layer 510 is an anode layer, the second electrode layer 520 is a cathode layer, and the second electrode layer 520 needs to reflect light to emit light from the light emitting device layer 530 to the driving circuit layer 300, where the first electrode layer 510 may be made of an organic conductive polymer material, such as polyaniline (PAn). The material of the first electrode layer 510 may also include an organic transparent material and transparent conductive particles, the organic transparent material may be transparent polyimide, the flexibility of the transparent polyimide is better, and the light transmittance is good, so that the bending capability of the display panel 100 as a whole can be improved, the light-emitting rate of the bottom-emission display panel 100 can be enhanced, and the display quality of the display panel 100 can be improved, and the transparent conductive particles may be transparent conductive particles such as nano silver and nano nickel, which is not limited herein.
In this embodiment, please refer to any one of the related embodiments and drawings of the display panel 100 for the specific structure and limitation of the specific film layers of the display panel 100, which is not described herein again.
According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
The embodiment of the invention discloses a display panel and a manufacturing method thereof; the display panel comprises a driving circuit layer, a passivation layer positioned on the driving circuit layer and a first electrode layer positioned on the passivation layer; the driving circuit layer is electrically connected with the first electrode layer, and the first electrode layer comprises an organic conductive material. According to the embodiment of the invention, the organic conductive material is used as the first electrode layer, so that the flexibility of the organic material is good, the integral bending capability of the display panel can be improved, and the service life of the display panel is prolonged.
The display panel and the manufacturing method thereof provided by the embodiment of the invention are described in detail above, and the principle and the embodiment of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for those skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (7)

1. A display panel is characterized by comprising a driving line layer, a passivation layer positioned on the driving line layer and a first electrode layer positioned on the passivation layer;
the driving circuit layer is electrically connected with the first electrode layer, and the first electrode layer comprises an organic transparent conductive material;
the display panel further comprises a plurality of first openings, the first openings penetrate through the passivation layer and part of the driving circuit layer, and emergent light of the display panel is led out to the light emergent side of the display panel through the first openings;
and transparent materials are filled in the first openings, the transparent materials are the same as the materials of the first electrode layer, and the transparent materials are continuous with the organic transparent conductive materials.
2. The display panel according to claim 1, wherein the display panel further comprises a substrate, the driving circuit layer is located between the passivation layer and the substrate, and the first opening penetrates through the driving circuit layer and extends at least to a contact surface of the substrate and the driving circuit layer.
3. The display panel according to claim 2, wherein an aperture of the first opening is gradually increased in a direction from the first electrode layer to the substrate.
4. The display panel of claim 1, further comprising a reflective layer on a sidewall of the first opening, wherein the reflective layer reflects light emitted from the first opening toward the driving circuit layer into the first opening.
5. The display panel of claim 4, wherein the first opening and the corresponding transparent material form a light receiving structure, the light receiving structure includes a light incident surface close to the first electrode layer, a light emitting surface far away from the first electrode layer, and a light receiving curved surface located between the light incident surface and the light emitting surface, and the light incident surface and the light emitting surface are arranged in parallel.
6. The display panel according to claim 1, further comprising a pixel defining layer on the first electrode layer, the pixel defining layer including a plurality of first openings, the light emitting device layer of the display panel being located in the first openings;
the first electrode layer further comprises a first hydrophobic layer located on a side close to the pixel defining layer, and the pixel defining layer comprises a hydrophobic material.
7. A method for manufacturing a display panel is characterized by comprising the following steps:
forming a driving circuit layer on a substrate;
forming a passivation layer on the driving line layer;
forming a first electrode layer on the passivation layer, wherein the driving circuit layer is electrically connected with the first electrode layer;
wherein the forming of the first electrode layer on the passivation layer comprises:
patterning the passivation layer to form a plurality of first openings on the display panel, wherein the first openings penetrate through the passivation layer and a part of the driving line layer;
filling a first electrode material layer in the first opening, wherein the first electrode layer is made of an organic transparent conductive material;
patterning the organic transparent conductive material to form the first electrode layer.
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