CN113376762A - Method for manufacturing free space type optical path adjusting device - Google Patents

Method for manufacturing free space type optical path adjusting device Download PDF

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Publication number
CN113376762A
CN113376762A CN202110481062.9A CN202110481062A CN113376762A CN 113376762 A CN113376762 A CN 113376762A CN 202110481062 A CN202110481062 A CN 202110481062A CN 113376762 A CN113376762 A CN 113376762A
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CN
China
Prior art keywords
prism
housing
optical path
curing
chip
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Granted
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CN202110481062.9A
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Chinese (zh)
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CN113376762B (en
Inventor
宋晓
李林科
吴天书
杨现文
张健
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Wuhan Linktel Technologies Co Ltd
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Wuhan Linktel Technologies Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4222Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera by observing back-reflected light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4224Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods

Abstract

The invention discloses a manufacturing method of a free space type light path adjusting device, which comprises the following steps: A. the micro-reflector chip is mounted on the inner surface of the bottom of the shell; B. connecting the micromirror chip to the pins of the housing; C. bonding the bracket to an inner face of the bottom of the housing; D. bonding the prism to the glass pad; E. calibrating the coupling platform; F. actively coupling the prism pad block with the prism mounted thereon to the square housing; and G, welding the cover plate to the square shell.

Description

Method for manufacturing free space type optical path adjusting device
Technical Field
The present invention relates to an optical path adjusting device, and more particularly, to a method for manufacturing a free-space optical path adjusting device.
Background
In the long-distance transmission of a high-speed optical module, the optical power and the optical signal are inevitably lost, in order to ensure the integrity of the transmission signal, a semiconductor optical amplifier is generally integrated into a receiver of the optical module in the industry, and the optical power and the optical signal transmitted into the receiver are amplified through the semiconductor optical amplifier, so that the long-distance transmission requirement is met.
However, in practical use of the optical module, random application to different transmission distances is likely to occur, for example, a long-distance optical module is applied to a short distance; when this occurs, the optical power transmitted from the opposite direction is too large, so that the optical power amplified by the semiconductor optical amplifier is too large, and the overload of the receiver cannot be used because the overload does not meet the protocol requirement.
In order to solve the above problems, a common practice in the industry at present is to purchase the corresponding optical module strictly according to an application point, and only the corresponding optical module can be used in different transmission distances; another method is to use an online optical path adjuster, which is adapted and controlled by the system device, to dynamically adjust the size of the incoming light, so that the optical power on the link meets the requirements of the receiver.
The above method, while able to solve the current problems, requires a high cost: by means of perfecting stock models, actual requirements and application points of customers need to be accurately pre-judged, otherwise, a large amount of stagnant stock of optical modules of certain models possibly occurs; in addition, the upgrading system equipment can intelligently judge the size of the oncoming light and dynamically adjust the size of the oncoming light, however, the upgrading system involves software, hardware, system engineering and the like, the workload is large, and the cost is too high.
Disclosure of Invention
One advantage of the present invention is that it provides a free-space optical path adjusting apparatus that can be adjusted for different transmission distances.
Another advantage of the present invention is to provide a free-space optical path adjusting device, wherein the optical path adjusting device can maintain the integrity of an optical signal and reduce the loss of the optical signal during transmission.
Another advantage of the present invention is to provide a free-space optical path adjusting device, wherein the optical path adjusting device is low in cost and easy to operate.
In order to achieve the above object, the present invention provides a method for manufacturing a free-space optical path adjusting device, comprising the steps of:
A. the micro-reflector chip is mounted on the inner surface of the bottom of the shell;
B. connecting the micromirror chip to the pins of the housing;
C. bonding the bracket to an inner face of the bottom of the housing;
D. bonding the prism to the glass pad;
E. calibrating the coupling platform;
F. actively coupling the prism pad block with the prism mounted thereon to the square housing; and
G. and welding the cover plate to the square shell.
According to an embodiment of the present invention, the method further comprises a sub-step a1 of attaching the micromirror chip to the bottom surface inside the housing by an optical glue.
According to an embodiment of the present invention, the method further comprises a sub-step a2 of curing the optical glue between the micromirror chip and the housing.
According to an embodiment of the present invention, the method further comprises a sub-step B1 of electrically connecting the micromirror chip and the leads of the housing through a gold wire.
According to an embodiment of the present invention, the method further comprises a substep C1 of adhering the bracket to the housing by an optical glue and then curing.
According to an embodiment of the present invention, the method further comprises a sub-step D1 of bonding the prism and the glass block together by an optical glue and then curing.
According to an embodiment of the present invention, the method further comprises a substep F1 of curing the prism spacer by an optical glue.
According to an embodiment of the present invention, the sub-step G1 is further comprised of sealing the square housing such that the square housing forms a sealed state.
To achieve another object of the present invention, the present invention provides a calibration method for a free space type optical path adjusting apparatus, comprising the steps of:
a. flatly pasting a reflecting surface of a total reflector and a surface of a right-angle positioner;
b. adjusting a four-dimensional adjusting platform to enable parallel light emitted by a collimator to be projected to the reflecting surface and then reflected back to the collimator completely;
c. projecting said collimated light to a beam analyzer at a first location;
d. moving said beam analyzer to a second position, comparing the coordinates of said beam analyzer at said first position and said second position, respectively; and
e. and adjusting the four-dimensional adjusting platform to enable the coordinates to be consistent, and realizing calibration.
According to an embodiment of the present invention, it further comprises the sub-step a1 of abutting against a corner of said total reflecting mirror, perpendicular to said right angle locator.
Additional advantages and features of the invention will be set forth in the detailed description which follows and in part will be apparent from the description, or may be learned by practice of the invention as set forth hereinafter.
Further objects and advantages of the invention will be fully apparent from the ensuing description and drawings.
These and other objects, features and advantages of the present invention will become more fully apparent from the following detailed description, the accompanying drawings and the claims.
Drawings
Fig. 1 is an optical path diagram of an optical receiver of a free-space optical path adjustment apparatus according to an embodiment of the present invention.
Fig. 2-1 shows a free-space type optical path adjusting apparatus for adjusting an unbiased angle state of an optical micro-mirror according to the above-mentioned embodiment of the present invention.
Fig. 2-2 shows a free space type optical path adjusting apparatus for adjusting an off-angle state of an optical micromirror according to the above-described embodiment of the present invention.
Fig. 3-1 is a structural view of a free space type optical path adjusting apparatus according to the above-described embodiment of the present invention.
Fig. 3-2 is a structural view of a free space type optical path adjusting apparatus according to the above-described embodiment of the present invention.
Fig. 4 is a structural view of a prism spacer block to which a prism is mounted according to the above-described embodiment of the present invention.
Fig. 5 is a schematic diagram comparing the structures of an optical receiver integrated with the free-space optical path adjustment device and an optical receiver not integrated with the free-space optical path adjustment device according to the above-described embodiment of the present invention.
Fig. 6 is a schematic diagram of a calibration process of the operation table during the assembly process of the free-space optical path adjustment apparatus according to the above embodiment of the present invention.
Fig. 7 shows an active coupling prism of the free-space optical path adjusting apparatus according to the above embodiment of the present invention.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be in a particular orientation, constructed and operated in a particular orientation, and thus the above terms are not to be construed as limiting the present invention.
It is understood that the terms "a" and "an" should be interpreted as meaning that a number of one element or element is one in one embodiment, while a number of other elements is one in another embodiment, and the terms "a" and "an" should not be interpreted as limiting the number.
Referring to fig. 1, an optical path diagram of an optical receiver of a free space type optical path adjusting apparatus according to an embodiment of the present invention includes a pin 101, a first collimator 102, a prism 103, a micro-mirror chip 104, a first lens 105, a semiconductor optical amplifier 106, a second collimator 107, a wavelength division demultiplexer 108, and a second lens 109, wherein the prism 103 has a first reflective surface 103a and a second reflective surface 103b, referring to fig. 1, a divergent light emitted from the pin 101 is collimated by the first collimator 102 into a parallel light, the parallel light is reflected by the first reflective surface 103a of the prism 103 onto the micro-mirror chip 104, and the reflective surface of the micro-mirror chip 104 is in a horizontal state in a case where power is not supplied, the parallel light projected to the micromirror chip 104 may be totally reflected onto the second reflecting surface 103b of the prism 103, and the second reflecting surface 103b reflects the parallel light again; at this time, the parallel light projected and reflected by the first reflecting surface 103a and the parallel light reflected by the second reflecting surface 103b have one main optical axis in parallel and overlapped.
Further, the parallel light reflected by the second reflecting surface 103b is vertically transmitted through the lens 105 and then converged into a focus, and is coupled into the semiconductor optical amplifier 106, and the semiconductor optical amplifier 106 amplifies the incoming light.
Further, the collimator 107 collimates the diverging light amplified from the semiconductor optical amplifier 106, the collimated parallel light passes through the wavelength division demultiplexer 108, and the parallel light passing through the wavelength division demultiplexer 108 is transmitted through the lens 109 to form a converging light again.
Referring to fig. 2-1 and 2-2, for the free space type optical path adjusting apparatus according to the embodiment of the present invention, for adjusting the micromirror non-deflection angle state and the micromirror deflection angle state of the optical path, as shown in fig. 2-1, when the micromirror 104 has no deflection angle, the parallel light is transmitted through the lens 105 and then converged and coupled into the semiconductor optical amplifier 106, the semiconductor optical amplifier 106 amplifies the incoming optical energy, and the state before and after the optical energy is amplified and the difference before and after the optical energy is amplified is schematically shown by the size of an arrow in fig. 2-1 and 2-2.
As shown in fig. 2-2, after the micro mirror 104 is energized to adjust the deflection angle, the parallel light originally projected to the first reflecting surface 103a and reflected is parallel to and coincident with the principal optical axis of the parallel light reflected by the second reflecting surface 103b, a certain angle is formed between the two parallel lights, the parallel light reflected by the second reflecting surface 103b enters the lens 105 at a non-perpendicular angle, the focal point after being converged by the lens 105 is significantly larger than that when the micro mirror is at an unbiased angle, and therefore cannot be coupled into the semiconductor optical amplifier 106 in a state of high power, when the light energy entering the semiconductor optical amplifier 106 becomes small, the light energy after being amplified by the semiconductor optical amplifier 106 becomes small, and in fig. 2-1 and fig. 2-2, the differences before and after enlargement are shown schematically by the arrow size.
As shown in fig. 3-1 and fig. 3-2, which are block diagrams of the free space type optical path adjusting apparatus according to the above embodiment of the present invention, the optical path adjusting apparatus includes a cover plate 3101, a prism spacer 3102, a prism 3103, a housing 3202, a support 3203, two leads 3204a, 3204b, a glass insulator 3205 and a micromirror chip 3206, first, the micromirror chip 3206 and the housing 3202 are bonded together by a non-conductive thermosetting adhesive by using a chip mounter, and after being fixed by baking, an electrode on the micromirror chip 3206 and the two leads 3204a, 3204b fixed on the housing 3202 by the glass insulator 3205 are gold-bonded by using a gold-wire bonding machine.
Further, the holder 3203 is adhered and fixed to the inner surface of the bottom of the case 3202 by using epoxy-based ultraviolet pre-fixing and high-temperature baking deep-curing glue.
Further, the prism pad 3102 with the prism mounted thereon and the housing 3202 with the micro mirror 3206 mounted thereon are coupled together by active coupling, and then the prism pad 3102 is fixed between the brackets 3203 by using the epoxy-based uv pre-fixing and high-temperature baking deep-cured glue.
Further, the cover plate 3101 and the housing 3202 having completed the above process are sealed and welded in an airtight state by a parallel sealing and welding machine.
Fig. 4 shows a prism-mounted prism spacer block structure component of the free-space optical path adjusting device according to the above embodiment of the present invention, where the prism spacer block is used to implement twice reflection optical paths in the optical path of the free-space optical path adjusting device. One prism 402 is fixed on one prism cushion block 401, one first reflecting surface 402a of the prism 402 reflects one parallel light downwards to the micro-mirror chip, the reflecting surface of the micro-mirror chip is in a horizontal state under the condition that the micro-mirror chip is not electrified, the parallel light projected to the micro-mirror chip can be totally reflected to the second reflecting surface 402b of the prism 402, and the second reflecting surface 402b reflects the parallel light again; at this time, the parallel light projected and reflected by the first reflecting surface 402a and the parallel light reflected by the second reflecting surface 402b have one main optical axis in parallel and overlapped with each other.
Referring to fig. 5, which is a schematic diagram illustrating a comparison between the structures of an optical receiver integrated with a free-space type optical path adjusting device and an optical receiver without the integrated free-space type optical path adjusting device according to the above-mentioned embodiment of the present invention, it can be seen that the free-space type optical path adjusting device can be used as a functional option to determine whether to add or not to add the free-space type optical path adjusting device according to whether the optical path adjusting function is required.
Referring to fig. 6 and 7, there are respectively a schematic diagram of a calibration process of a station during assembling of a free-space optical path adjusting apparatus according to the above embodiment of the present invention and a manner of an active coupling prism of a free-space optical path adjusting apparatus according to the above embodiment of the present invention, wherein a station for assembling a free-space optical path adjusting apparatus includes: an X/Y/Z/theta four-dimensional adjusting stage 601, a collimator 602 fixed on the four-dimensional adjusting stage 601, wherein the collimator emits a parallel light having a spot diameter smaller than 300um, a right angle positioner 603, two faces 603a and 603b of the right angle positioner 603, the two faces 603a and 603b are perpendicular to each other, an X/Y/Z/theta 1/theta 2/theta 3 six-dimensional adjusting bracket 709, the six-dimensional adjusting bracket 709 is arranged right above the right angle positioner 603, a clamp 710, the clamp 710 is fixed by the adjusting bracket 709, the clamp 710 fixes the prism 3102 to which the prism 3103 is bonded, an X/Y/Z/theta four-dimensional adjusting stage 705, the four-dimensional adjusting stage 705 is arranged right in front of the right angle positioner 603, a linear guide 706, said linear guide 706 being fixed above said four-dimensional adjustment stage 705, a beam analyzer being fixed on said linear guide 706, said beam analyzer being laterally movable on said linear guide 706 in a first position 707 and a second position 708, respectively.
In detail, the free space type optical path adjusting device comprises a square shell and an optical path adjusting component, wherein the square shell comprises a shell, two glass windows and two glass window sleeves, and the optical path adjusting component comprises a prism and a micro-mirror chip. And a collimated light enters from any one glass window arranged on the square shell and is projected to the first surface of the prism, the first surface of the prism is plated with a total reflection film, the collimated light is reflected to the micro-mirror chip below the prism and then is reflected to the second surface of the prism from the micro-mirror chip, the second surface of the prism is also plated with a total reflection film, and the collimated light is transmitted out from the glass window at the other end of the square shell after being reflected.
Furthermore, the two glass windows are divided into a first glass window and a second glass window, the collimated light has a main optical axis, and the collimated light entering the first glass window and the main optical axis of the collimated light exiting the second glass window coincide with each other.
The angle between the first and second reflective surfaces of the prism is greater than 90 °, preferably greater than 100 °.
The first reflecting surface and the second reflecting surface of the prism are both plated with the total reflection film.
The light path adjusting device further comprises a cover plate, a glass insulator, two pins, a prism cushion block, a support and a shell, wherein the cover plate, the two glass windows, the two glass window sleeves, the glass insulator and the two pins are formed in the shell, the shell can be sealed, and the shell is provided with a bottom. Two the glass window, two the glass window sleeve pipe, glass insulator and two the pin is formed at the casing, the casing can seal, the casing has the bottom, the casing with seal welding between the apron forms sealedly square casing.
The micro-reflector chip is attached to the inner surface of the bottom of the shell; wherein the prism is bonded to the prism spacer, the bracket is bonded to the inner surface of the bottom of the housing, the prism spacer is bonded to the prism, and the prism spacer is bonded to the bracket.
The shell is made of a metal material, and further made of a kovar alloy metal material, such as kovar alloy with the mark of 4J29, and the nominal thermal expansion coefficient of the kovar alloy metal material is 4.6-5.2 x 10 < -6 >/DEG C.
The cover plate is made of a metal material, and further, the cover plate is made of the same metal material as the shell.
Further, the material used for the bracket is a material with a thermal expansion coefficient not exceeding 10 x 10 < -6 >/DEG C.
Further, the prism spacer uses a material having a thermal expansion coefficient not exceeding 10 × 10-6/deg.C.
Further, an adhesive material (e.g., optical glue) is used between the prism spacer and the bracket for curing.
Further, glue which is subjected to ultraviolet pre-fixing and high-temperature baking deep curing is used for curing.
Furthermore, the thermal expansion coefficient of the optical glue does not exceed 25 x 10 < -6 >/DEG C.
Further, the viscous material is optical glue.
Further, the diameter of the reflector of the micro reflector chip is larger than 0.4mm, and further, the diameter of the reflector of the micro reflector chip is larger than 0.6 mm.
The calibration method of the free space type optical path adjusting device according to the above embodiment of the present invention is: firstly, a right angle of a total reflector 604 is abutted against the corner of a right angle positioner 603, and a reflecting surface 604a of the total reflector 604 is flatly attached to a surface 603b of the right angle positioner 603; adjusting an X/Y/Z/theta four-dimensional adjusting platform 601, so that a parallel light emitted by a collimator 602 fixed above the platform is projected onto the reflecting surface 604a of the total reflector 604 and then is completely reflected back to the collimator 602; removing the total reflection mirror 604, wherein the parallel light emitted by the collimator 602 is projected onto a light beam analyzer 607 at a first position, recording a peak coordinate (X; Y) on the light beam analyzer 607, then moving the light beam analyzer on a linear guide 606 to a second position 608, recording a peak coordinate (X1; Y1) on the light beam analyzer 608 again, adjusting an X/Y/Z/θ four-dimensional adjusting platform 605 below the linear guide 606, then observing two sets of peak coordinates of the light beam analyzers 607, 608 at the first position and the second position, and finally making X ═ X1 by continuously adjusting the X/Y/Z/θ four-dimensional adjusting platform 605 below the linear guide 606; and Y is Y1, and the operation table position is calibrated.
The manufacturing method/assembling method of the free space type optical path adjusting device according to the above embodiment of the present invention is: after the product to be coupled 704 is calibrated against the corner of the right-angle positioner 603, the collimator 602, the product to be coupled 704, the first position, the second position, in one axis (Z axis), have the window 704b of the product to be coupled 704 facing the collimator 602, and the window 704a facing the beam analyzer 607 in the first position; the housing 3202 is adhered inside the product 704 to be coupled, the prism pad 3102 is adhered to the prism 3103, and the prism pad 3102 is adhered to the housing 3202 by coupling positioning.
Abutting the product to be coupled 704 against a corner of the right angle positioner 603 with the window 704b of the product to be coupled 704 facing the collimator 602 and the window 704a facing the beam analyzer 607 in the first position; recording a parallel light peak coordinate (X2; Y2) on the beam analyzer 607 at the first position, adjusting the X/Y/Z/theta 1/theta 2/theta 3 six-dimensional adjustment stage 709 above the rectangular positioner 603, moving the prism block 3102 bonded with the prism 3103 under the X/Y/Z/theta 1/theta 2/theta 3 six-dimensional adjustment stage 709, which is fixed by the jig 710, into the product to be coupled 704, moving the prism 3103 bonded with the block 3102 into the product to be coupled 704, observing the parallel light peak coordinate (X3; 3) on the beam analyzer 607 at the first position, and then adjusting the glass 3102 bonded with the prism 3103, which is fixed by the jig 710 under the X/Y/Z/theta 1/theta 2/theta 3 six-dimensional adjustment stage 709, and continuously observing the collimated light peak coordinate (X3; Y3) on the beam analyzer 607 at the first location. Adjusting the parallel light peak coordinate (X3; Y3) on the beam analyzer 607 of the first position to exactly coincide with the parallel light peak coordinate (X2; Y2) on the beam analyzer 607 of the first recorded first position; moving the beam analyzer from the first position 707 to the second position 708, recording coordinates parallel to the peak of the light (X4; Y4), adjusting the six-dimensional X/Y/Z/θ 1/θ 2/θ 3 adjustment stage 709 above the rectangular positioner 703, and then observing the two sets of coordinates of the six-dimensional X/Y/Z/θ 1/θ 2/θ 3 adjustment stages 709 above the rectangular positioner 703 while observing the two sets of coordinates of the peak of the beam analyzer 707 and 708 at the first and second positions, and finally adjusting the six-dimensional X/Y/Z/θ 1/θ 2/θ 3 adjustment stage 709 above the rectangular positioner 703 continuously to make X3 equal to X4; y3 ═ Y4, and then dispensed and cured between the prism pad 3102 and the support 3203.
Further, the micro-reflector chip is attached to the bottom surface inside the shell by glue, and then curing is carried out; electrically connecting the micro-reflector chip with the pins of the shell by gold wires; bonding the bracket on the bottom surface of the inner part of the shell by using glue, and then curing; bonding the prism and the glass cushion block together by using glue, and then curing; calibrating the coupling platform; coupling the prism cushion block provided with the prism by using an active coupling mode and curing by using glue; and welding the cover plate and the square shell which is coupled to form a sealing state.
Further, the micro-reflector chip is attached to the bottom surface inside the shell of the shell by using non-conductive thermosetting glue and then cured; electrically connecting the micro-reflector chip with the pins of the shell by gold wires; bonding the bracket on the bottom surface of the inner part of the shell by using glue, and then curing, preferably, curing by using glue of epoxy group ultraviolet pre-fixing and high-temperature baking deep curing; bonding the prism and the prism cushion block together by using glue, and then curing, preferably, curing by using glue of epoxy group ultraviolet pre-fixing and high-temperature baking deep curing; calibrating the coupling platform; coupling the prism cushion block provided with the prism and the shell provided with the micro-reflector to a preset position in an active coupling mode, and curing by using glue, preferably, curing by using glue of epoxy ultraviolet pre-fixing and high-temperature baking deep curing; and welding the cover plate and the square shell which couples the prism cushion block provided with the prism and the shell provided with the micro-reflector to the preset position to form a sealing state.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.

Claims (10)

1. A method for manufacturing a free space type optical path adjusting device is characterized by comprising the following steps:
A. the micro-reflector chip is mounted on the inner surface of the bottom of the shell;
B. connecting the micromirror chip to the pins of the housing;
C. bonding the bracket to an inner face of the bottom of the housing;
D. bonding the prism to the glass pad;
E. calibrating the coupling platform;
F. actively coupling the prism pad block with the prism mounted thereon to the square housing; and
G. and welding the cover plate to the square shell.
2. The method of claim 1 further comprising sub-step a1 of attaching the micromirror chip to the bottom surface of the housing interior by an optical glue.
3. The method of manufacturing according to claim 1, further comprising sub-step a2 curing the optical glue between the micromirror chip and the housing.
4. The method of claim 1 further comprising a substep B1 of electrically connecting the micromirror chip to the leads of the housing by a gold wire.
5. The manufacturing method according to claim 1, further comprising a substep C1 of adhering the bracket to the housing by an optical glue and then curing.
6. The method of claim 1, further comprising a substep D1 of bonding the prism to the glass mat by an optical glue and then curing.
7. The method of claim 1 further including the substep of F1 curing the prism spacer by an optical glue.
8. The manufacturing method according to claim 1, further comprising a substep G1 of sealing the square housing such that the square housing forms a sealed state.
9. A calibration method of a free space type optical path adjusting device is characterized by comprising the following steps:
a. flatly pasting a reflecting surface of a total reflector and a surface of a right-angle positioner;
b. adjusting a four-dimensional adjusting platform to enable parallel light emitted by a collimator to be projected to the reflecting surface and then reflected back to the collimator completely;
c. projecting said collimated light to a beam analyzer at a first location;
d. moving said beam analyzer to a second position, comparing the coordinates of said beam analyzer at said first position and said second position, respectively; and
e. and adjusting the four-dimensional adjusting platform to enable the coordinates to be consistent, and realizing calibration.
10. The calibration method according to claim 9, further comprising the sub-step a1 of abutting against a corner of said total reflection mirror, perpendicular to said right angle positioner.
CN202110481062.9A 2021-04-30 2021-04-30 Method for manufacturing free space type optical path adjusting device Active CN113376762B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114002784A (en) * 2021-09-22 2022-02-01 武汉联特科技股份有限公司 Optical assembly and manufacturing method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040141239A1 (en) * 2002-11-01 2004-07-22 Finisar Corporation Asymmetric optical focusing system
CN102798937A (en) * 2012-09-04 2012-11-28 成都锦江电子系统工程有限公司 Multichannel multispectral optical fiber rotary connector
CN209433063U (en) * 2019-01-29 2019-09-24 武汉联特科技有限公司 Multichannel wavelength division multiplexed light receiving unit and optical module
CN110794529A (en) * 2020-01-06 2020-02-14 成都新易盛通信技术股份有限公司 Optical assembly and system thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040141239A1 (en) * 2002-11-01 2004-07-22 Finisar Corporation Asymmetric optical focusing system
CN102798937A (en) * 2012-09-04 2012-11-28 成都锦江电子系统工程有限公司 Multichannel multispectral optical fiber rotary connector
CN209433063U (en) * 2019-01-29 2019-09-24 武汉联特科技有限公司 Multichannel wavelength division multiplexed light receiving unit and optical module
CN110794529A (en) * 2020-01-06 2020-02-14 成都新易盛通信技术股份有限公司 Optical assembly and system thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114002784A (en) * 2021-09-22 2022-02-01 武汉联特科技股份有限公司 Optical assembly and manufacturing method thereof

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