CN113375844B - FP pressure sensor based on photonic crystal fiber low-temperature coupling effect - Google Patents
FP pressure sensor based on photonic crystal fiber low-temperature coupling effect Download PDFInfo
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- CN113375844B CN113375844B CN202110590223.8A CN202110590223A CN113375844B CN 113375844 B CN113375844 B CN 113375844B CN 202110590223 A CN202110590223 A CN 202110590223A CN 113375844 B CN113375844 B CN 113375844B
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- 239000004038 photonic crystal Substances 0.000 title claims abstract description 64
- 239000000835 fiber Substances 0.000 title claims abstract description 50
- 230000001808 coupling effect Effects 0.000 title claims abstract description 17
- 239000010453 quartz Substances 0.000 claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229920006254 polymer film Polymers 0.000 claims abstract description 27
- 230000008859 change Effects 0.000 claims abstract description 12
- 238000003466 welding Methods 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 238000001228 spectrum Methods 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 5
- 238000005520 cutting process Methods 0.000 claims description 18
- 230000035945 sensitivity Effects 0.000 claims description 13
- 239000013307 optical fiber Substances 0.000 claims description 10
- 229920000642 polymer Polymers 0.000 claims description 10
- 230000004927 fusion Effects 0.000 claims description 8
- 238000007598 dipping method Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000000007 visual effect Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000006880 cross-coupling reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
Abstract
The invention discloses a photonic crystal fiber-based FP pressure sensor with a low-temperature coupling effect, which comprises a photonic crystal fiber, a quartz capillary tube and a polymer film, wherein a welding surface of the photonic crystal fiber and the quartz capillary tube and an inner surface of the polymer film form two mutually parallel reflecting surfaces of an FP interferometer, when light in the photonic crystal fiber encounters the two reflecting surfaces to respectively generate reflected light, two beams of reflected light interfere in the photonic crystal fiber to generate an interference spectrum, when the cavity length of the FP interferometer changes along with the measured pressure, the changing optical path difference between the two beams of reflected light causes the movement of the interference spectrum, and the measured pressure change is obtained by detecting the movement amount of the interference spectrum. The invention is suitable for the conditions of larger measuring environment temperature change, temperature change compensation and smaller measuring water pressure, and simultaneously meets the requirement of higher precision, and has simple manufacturing process and small volume.
Description
Technical Field
The invention belongs to the technical field of optical FP interferometers, and particularly relates to an FP (Fabry-Perot) pressure sensor based on a low-temperature coupling effect of a photonic crystal fiber.
Background
FP interferometers are widely used in many fields such as petroleum exploration, medical treatment, aviation, and the like, and are mainly classified into an intrinsic type and an extrinsic type according to their structures. For the intrinsic optical fiber sensor, the medium in the cavity is the optical fiber, so that the intrinsic optical fiber sensor has the advantage of small loss, but the refractive index of the medium is greatly affected by external factors, so that the influence of temperature is not easily separated when the pressure is measured, and the temperature cross-coupling effect is obvious. The extrinsic optical fiber sensor uses the extrinsic FP sensor head as a sensor detecting element, the medium in the cavity is air, and the influence of large-range temperature variation can be automatically compensated by selecting proper parameters such as optical fiber, capillary quartz tube material, FP cavity structure and the like.
However, the existing pressure sensor based on the FP interferometer has the defects of complex structure, large volume, high manufacturing cost and the like, wherein the temperature and pressure coupling problem is that the pressure sensor based on the FP interferometer is inaccurate in measuring pressure in an environment with large temperature difference, and the pressure measuring precision is low.
Disclosure of Invention
In order to solve the defects in the prior art, the invention reduces the temperature cross coupling effect by the FP structure based on the photonic crystal fiber, and provides the FP pressure sensor with simple structure, convenient manufacture, high sensitivity and low temperature sensitivity. The specific technical scheme of the invention is as follows:
a FP pressure sensor based on low temperature coupling effect of photonic crystal fiber comprises photonic crystal fiber, quartz capillary tube and polymer film, wherein,
the centers of the quartz capillary and the polymer film are on the same axis, and the diameter of the photonic crystal fiber is the same as the outer diameter of the quartz capillary;
one end face of the quartz capillary tube serving as a cavity of the FP interferometer is welded with the cross section of the photonic crystal fiber, and the polymer film is attached to the inside of the other end face;
the fusion joint surface of the photonic crystal fiber and the quartz capillary tube and the inner surface of the polymer film form two mutually parallel reflecting surfaces of the FP interferometer, and are perpendicular to the central axis of the quartz capillary tube;
when the cavity length of the FP interferometer changes along with the measured pressure, the changing optical path difference between the two reflected light beams causes the movement of the interference spectrum, and the cavity length change of the FP interferometer is obtained by detecting the movement amount of the interference spectrum, so as to obtain the measured pressure change.
Further, the polymer film is obtained by a dipping method.
Further, the thickness of the polymer film is in the order of micrometers.
Further, the pressure sensitivity of the sensor is 2.3-2.6nm/kPa, the temperature sensitivity is 0.4-0.5 nm/DEG C, and Wen Yabi is 0.15-0.22.
A manufacturing method of an FP pressure sensor based on a low-temperature coupling effect of a photonic crystal fiber comprises the following steps:
s1: cutting out a flat end face of the photonic crystal fiber and a quartz capillary tube, and welding the photonic crystal fiber and the quartz capillary tube by using an optical fiber welding machine to obtain a photonic crystal fiber-capillary tube structure to form a cavity part of the FP interferometer;
s2: cutting the capillary part of the welded photonic crystal fiber-capillary structure;
s3: the open port of the quartz capillary tube is dipped with the polymer solution to form a polymer film.
The invention has the beneficial effects that:
1. the invention is suitable for the conditions of larger measured environmental temperature change, need to compensate temperature change and smaller measured water pressure, and meets the requirement of higher precision.
2. The cavity body manufacturing process of the FP interferometer provided by the invention does not need any complicated equipment, can be realized by only an optical fiber fusion splicer, a microscope and a cutting knife, and can meet the requirement of mass production
3. The pressure sensor provided by the invention has small volume and can be used for occasions and situations with small requirements on the volume of the sensor, such as medical treatment.
Drawings
For a clearer description of an embodiment of the invention or of the solutions of the prior art, reference will be made to the accompanying drawings, which are used in the embodiments and which are intended to illustrate, but not to limit the invention in any way, the features and advantages of which can be obtained according to these drawings without inventive labour for a person skilled in the art. Wherein:
FIG. 1 is a diagram of a FP pressure sensor structure based on the low temperature coupling effect of a photonic crystal fiber;
FIG. 2 is a schematic diagram of a step 1 of manufacturing a sensor according to the invention;
FIG. 3 is a schematic diagram of a step 2 of manufacturing a sensor according to the invention;
FIG. 4 is a schematic diagram of a step 3 of manufacturing the sensor of the present invention;
FIG. 5 is an end view of a photonic crystal fiber of the sensor of the present invention;
FIG. 6 is a diagram of a low temperature coupling effect FP pressure sensor based on photonic crystal fiber according to the present invention;
FIG. 7 shows the pressure measurement sensitivity of the FP pressure sensor based on the low-temperature coupling effect of the photonic crystal fiber;
FIG. 8 shows the temperature measurement sensitivity of the FP pressure sensor based on the low-temperature coupling effect of the photonic crystal fiber.
Reference numerals illustrate:
1-photonic crystal fiber; 2-quartz capillary; 3-polymer film; 4-photonic crystal fiber-capillary structure; 5-clamping; 6, cutting knife; 7-single mode optical fiber; 8-polymer liquid; 9-motor.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
Fig. 1 is a schematic structural diagram of an FP pressure sensor based on a low temperature coupling effect of a photonic crystal fiber, which includes a photonic crystal fiber 1, a quartz capillary 2, and a polymer film 3, wherein the photonic crystal fiber has a diameter of 125um, and a reflectivity of a flat end surface thereof is about 4%.
The sensitivity of FP pressure sensors based on the low temperature coupling effect of photonic crystal fibers is directly proportional to the sensitive diaphragm to the power 4, inversely proportional to the diaphragm thickness to the power 3 and inversely proportional to the elastic modulus value of the diaphragm material. After the test is carried out by selecting a polymer material with lower Young modulus, the deformation of the polymer membrane has good linear responsivity to pressure and temperature.
The centers of the photonic crystal fiber 1, the quartz capillary 2 and the polymer film 3 are all on the same axis, and the diameter of the photonic crystal fiber 1 is the same as the outer diameter of the quartz capillary 2;
one end face of a quartz capillary tube 2 serving as a sensor cavity is welded with the cross section of the photonic crystal fiber 1, and a polymer film 3 is attached to the inside of the other end face;
the fusion joint surface of the photonic crystal fiber 1 and the quartz capillary 2 and the inner surface of the polymer film 3 form two mutually parallel reflecting surfaces of the FP interferometer, and are perpendicular to the central axis of the quartz capillary 2;
when the light in the photonic crystal fiber 1 encounters two reflecting surfaces to respectively generate reflected light, the two reflected light beams interfere in the photonic crystal fiber 1 to generate an interference spectrum, when the cavity length of the FP interferometer changes along with the measured pressure, the changing optical path difference between the two reflected light beams causes the movement of the interference spectrum, and the cavity length change of the FP interferometer is obtained by detecting the movement amount of the interference spectrum, so that the measured pressure change is obtained.
In some embodiments, the polymer film 3 is obtained by a dipping method.
Preferably, the thickness of the polymer film 3 is in the order of micrometers, and the polymer film 3 is made of a polymer material with low elastic modulus and good thermal performance.
In some embodiments, the sensor has a pressure sensitivity of 2.3-2.6nm/kPa, a temperature sensitivity of 0.4-0.5 nm/DEG C, and a Wen Yabi of 0.15-0.22.
As shown in fig. 2-3, a manufacturing method of an FP pressure sensor based on a low temperature coupling effect of a photonic crystal fiber includes the following steps:
s1: cutting out flat end surfaces of the photonic crystal fiber 1 and the quartz capillary tube 2, welding the photonic crystal fiber 1 and the quartz capillary tube 2 by using an optical fiber welding machine to obtain a photonic crystal fiber-capillary tube structure 4, forming a cavity part of the FP interferometer, and properly controlling welding parameters to prevent the quartz capillary tube 2 from deforming;
s2: cutting the capillary part of the welded photonic crystal fiber-capillary structure 4;
fixing the photonic crystal fiber-capillary structure 4 on a microscope stage through a clamp 5 of a cutting knife 6, enabling the welding end face to be completely overlapped with the central axis of the microscope visual field, adjusting the scale of a displacement controller of the cutting knife 6, moving the photonic crystal fiber-capillary structure 4 to enable the knife edge position of the cutting knife 6 to be in a length away from the initial cavity length of the welding face, clamping the photonic crystal fiber-capillary structure 4 by the clamp 5 to fix the current position, and cutting out a flat end face by the cutting knife 6;
s3: the open port of the quartz capillary 2 was dipped in the polymer solution to form a polymer film 3.
The single-mode fiber 7 is used for dipping the polymer liquid 8 and is respectively placed at two motors 9 of the fusion splicer with the photonic crystal fiber-capillary structure 4, and the capillary end face of the photonic crystal fiber-capillary structure 4 contacts with the polymer at the end face of the single-mode fiber 7 by manually adjusting the positions of the motors 9 of the fusion splicer, so that the polymer enters the cavity through capillary effect and forms the polymer film 3. The thickness of the sensor membrane manufactured by the method can be controlled to be in the micrometer scale.
The end face structure diagram of the photonic crystal fiber 1 is shown in fig. 4, the high-sensitivity FP pressure sensor based on the photonic crystal fiber is shown in fig. 5, the pressure sensitivity of the high-sensitivity FP pressure sensor based on the photonic crystal fiber is 2.47nm/kPa, the temperature sensitivity is 0.46 nm/DEG C, and Wen Yabi is 0.186. Compared with the temperature-pressure ratio of the single-mode crystal fiber FP cavity of 1.18, the temperature-pressure ratio of the photonic crystal fiber FP cavity is 6.35 times smaller, so that the temperature coupling effect of the FP pressure sensor during pressure sensing is effectively reduced, and the high-sensitivity pressure sensing problem under the temperature change environment is solved.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (1)
1. The FP pressure sensor based on the low-temperature coupling effect of the photonic crystal fiber is characterized by comprising the photonic crystal fiber (1), a quartz capillary tube (2) and a polymer film (3), wherein,
the centers of the quartz capillary tube (2) and the polymer film (3) are on the same axis, and the diameter of the photonic crystal fiber (1) is the same as the outer diameter of the quartz capillary tube (2);
one end face of the quartz capillary tube (2) serving as a cavity of the FP interferometer is welded with the cross section of the photonic crystal fiber (1), and the polymer film (3) is attached to the inside of the other end face;
the fusion joint surface of the photonic crystal fiber (1) and the quartz capillary (2) and the inner surface of the polymer film (3) form two mutually parallel reflecting surfaces of the FP interferometer, and are perpendicular to the central axis of the quartz capillary (2);
when the cavity length of the FP interferometer changes along with the measured pressure, the changing optical path difference between the two reflected light beams causes the movement of the interference spectrum, and the cavity length change of the FP interferometer is obtained by detecting the movement amount of the interference spectrum, so as to obtain the measured pressure change;
the pressure sensitivity of the sensor is 2.3-2.6nm/kPa, the temperature sensitivity is 0.4-0.5 nm/DEG C, and Wen Yabi is 0.15-0.22;
-obtaining said polymer film (3) by a dipping method;
the thickness of the polymer film (3) is in the order of micrometers;
the manufacturing method of the FP pressure sensor based on the low-temperature coupling effect of the photonic crystal fiber comprises the following steps:
s1: cutting out flat end surfaces of the photonic crystal fiber (1) and the quartz capillary tube (2), and welding the two end surfaces by using an optical fiber welding machine to obtain a photonic crystal fiber-capillary tube structure (4) to form a cavity part of the FP interferometer;
s2: cutting the capillary part of the welded photonic crystal fiber-capillary structure (4); the method specifically comprises the following steps:
fixing the photonic crystal fiber-capillary structure (4) on a microscope stage through a clamp (5) of a cutting knife (6) to enable the welding end face to be completely overlapped with the central axis of a microscope visual field, adjusting the scale of a displacement controller of the cutting knife (6), moving the photonic crystal fiber-capillary structure (4) to enable the knife edge position of the cutting knife (6) to be in a length away from the initial cavity length of the welding face, clamping the photonic crystal fiber-capillary structure (4) by the clamp (5) to fix the current position, and cutting out a flat end face by the cutting knife (6);
s3: dipping an open port of a quartz capillary (2) in a polymer solution to form a polymer film (3), specifically comprising:
the single-mode fiber (7) is used for dipping polymer liquid (8) and is respectively placed at two motors (9) of the fusion splicer with the photonic crystal fiber-capillary structure (4), and the position of the motor (9) of the fusion splicer is manually adjusted, so that the capillary end face of the photonic crystal fiber-capillary structure (4) contacts with the polymer on the end face of the single-mode fiber (7), and the polymer enters the cavity through capillary effect and forms a polymer film (3).
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| CN113884841A (en) * | 2021-11-05 | 2022-01-04 | 全球能源互联网研究院有限公司 | Diaphragm type partial discharge sensor and manufacturing method thereof |
| CN113916438B (en) * | 2021-12-08 | 2022-02-25 | 广东海洋大学 | Fabry-Perot interference optical fiber pressure sensor for eliminating temperature interference and manufacturing method thereof |
| CN114544070B (en) * | 2022-01-11 | 2023-03-10 | 北京航空航天大学 | Photonic crystal fiber pressure sensor based on double-layer capillary and manufacturing method thereof |
| CN114659684B (en) * | 2022-02-28 | 2023-06-20 | 北京航空航天大学 | Low-temperature sensitive FP pressure sensor based on double-layer capillary tube |
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