CN113374500B - Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling - Google Patents

Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling Download PDF

Info

Publication number
CN113374500B
CN113374500B CN202110811331.3A CN202110811331A CN113374500B CN 113374500 B CN113374500 B CN 113374500B CN 202110811331 A CN202110811331 A CN 202110811331A CN 113374500 B CN113374500 B CN 113374500B
Authority
CN
China
Prior art keywords
vacuum chuck
vacuum
vacuum degree
controller
early warning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110811331.3A
Other languages
Chinese (zh)
Other versions
CN113374500A (en
Inventor
王海峰
朱峭嵘
刘增辉
王占吉
秦杰
武文龙
徐笑云
侯涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nantong Tianjian Construction Components Co ltd
Original Assignee
Nantong Tianjian Construction Components Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nantong Tianjian Construction Components Co ltd filed Critical Nantong Tianjian Construction Components Co ltd
Priority to CN202110811331.3A priority Critical patent/CN113374500B/en
Publication of CN113374500A publication Critical patent/CN113374500A/en
Application granted granted Critical
Publication of CN113374500B publication Critical patent/CN113374500B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • EFIXED CONSTRUCTIONS
    • E21EARTH OR ROCK DRILLING; MINING
    • E21DSHAFTS; TUNNELS; GALLERIES; LARGE UNDERGROUND CHAMBERS
    • E21D11/00Lining tunnels, galleries or other underground cavities, e.g. large underground chambers; Linings therefor; Making such linings in situ, e.g. by assembling
    • E21D11/04Lining with building materials
    • E21D11/08Lining with building materials with preformed concrete slabs
    • EFIXED CONSTRUCTIONS
    • E21EARTH OR ROCK DRILLING; MINING
    • E21FSAFETY DEVICES, TRANSPORT, FILLING-UP, RESCUE, VENTILATION, OR DRAINING IN OR OF MINES OR TUNNELS
    • E21F17/00Methods or devices for use in mines or tunnels, not covered elsewhere
    • E21F17/18Special adaptations of signalling or alarm devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mining & Mineral Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Geology (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to a shield segment vacuum chuck decompression early warning and falling prevention system, which comprises: the sucking disc is used for carrying out object adsorption, and a quality detection sheet is arranged on the sucking disc and used for detecting the quality of the object adsorbed by the sucking disc so as to obtain the actual quality M; the image scanner is used for scanning the contact surface of the vacuum chuck and the adsorption object; a transmission unit for transmitting a detection result of the quality detection sheet and a scanning result of the image scanner; the analysis unit is used for analyzing the scanning result of the image scanner to obtain the actual air hole size A; the controller is used for controlling the operation process of the vacuum chuck; the early warning unit is used for giving an alarm according to the indication of the controller when the vacuum chuck loses pressure; therefore, whether the vacuum chuck of the shield segment is subjected to decompression or not can be confirmed and processed in time through the vacuum degree and the vacuum degree difference value, and the falling rate of adsorbates caused by decompression of the vacuum chuck is effectively reduced.

Description

Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling
Technical Field
The invention relates to the technical field of vacuum chucks, in particular to a shield segment vacuum chuck pressure loss early warning and anti-falling system.
Background
Vacuum chuck, also known as vacuum sling, is one of the vacuum equipment actuators. Generally, gripping an article with a vacuum chuck is one of the least expensive methods. The vacuum sucker has various varieties, the sucker made of rubber can be operated at high temperature, and the sucker made of silicon rubber is very suitable for grabbing products with rough surfaces; suction cups made of polyurethane are very durable. In actual production, if oil resistance is required for the suction cup, it is conceivable to manufacture the suction cup using a material such as polyurethane, nitrile rubber, or a vinyl-containing polymer. Generally, in order to prevent the surface of the product from being scratched, it is preferable to select a sucker chuck material with bellows made of nitrile rubber or silicone rubber, which is made of nitrile rubber and has a large breaking force, and thus is widely used in various vacuum holding apparatuses.
The shield segment is a main assembly component for shield construction, is the innermost barrier of the tunnel and plays a role in resisting soil layer pressure, underground water pressure and some special loads. The shield segment is a permanent lining structure of a shield tunnel, and the quality of the shield segment is directly related to the overall quality and safety of the tunnel, so that the waterproof performance and the durability of the tunnel are influenced.
At present, some shield segment vacuum chuck pressure loss early warning and anti-falling systems exist, but generally, whether the vacuum chuck is pressure loss or not can not be determined through the vacuum degree and the vacuum degree difference value, the early warning time can not be determined through the size of an air hole, and the falling rate of adsorbates is high.
Disclosure of Invention
Therefore, the invention provides a shield segment vacuum chuck pressure loss early warning and anti-falling system which can effectively solve the technical problem that whether a vacuum chuck is in pressure loss or not can not be determined through a vacuum degree and a vacuum degree difference value in the prior art so that the falling rate of adsorbates is high.
In order to achieve the purpose, the invention provides a shield segment vacuum chuck decompression early warning and anti-falling system, which comprises:
the sucking disc is used for carrying out object adsorption, and a quality detection sheet is arranged on the sucking disc and used for detecting the quality of the object adsorbed by the sucking disc so as to obtain the actual quality M;
the image scanner is connected with the quality detection sheet and is used for scanning the contact surface of the vacuum chuck and the adsorbed object;
the transmission unit is respectively connected with the quality detection sheet and the image scanner and is used for transmitting the detection result of the quality detection sheet and the scanning result of the image scanner;
the analysis unit is connected with the image scanner and is used for analyzing the scanning result of the image scanner to obtain the actual air hole size A;
the controller is respectively connected with the quality detection sheet, the image scanner, the transmission unit and the analysis unit and is used for controlling the operation process of the vacuum chuck;
the early warning unit is connected with the controller and used for giving an alarm according to the indication of the controller when the vacuum chuck loses pressure;
when the vacuum chuck works, the controller compares the actual vacuum degree P when the vacuum chuck adsorbs an object with a preset vacuum degree to determine whether the vacuum chuck is in decompression, if the actual vacuum degree P cannot be directly determined, compares the vacuum degree difference value delta P with a vacuum degree standard difference value to finally determine whether the vacuum chuck is in decompression, compares the actual air hole size A with the preset air hole size to determine the early warning time when the vacuum chuck is in decompression and sends an alarm through an early warning unit;
and the actual vacuum degree P is determined by the actual mass M of the object adsorbed by the vacuum chuck, the vacuum degree calculation parameter and a vacuum degree formula.
Further, when the vacuum chuck works, the controller acquires the actual vacuum degree P when the vacuum chuck adsorbs an object, the controller compares the actual vacuum degree P with the preset vacuum degree to determine whether the vacuum chuck is under decompression, and when the controller determines that the vacuum chuck is not under decompression, the vacuum chuck continues normal work;
the controller is provided with a preset vacuum degree, wherein the preset vacuum degree comprises a first preset vacuum degree P1 and a second preset vacuum degree P2, and P1 is less than P2;
if P < P1, the controller determines that the vacuum chuck has lost pressure;
if P1 is not less than P < P2, the controller judges whether the vacuum chuck is under pressure or not by combining the vacuum degree difference value;
if P is larger than or equal to P2, the controller judges that the vacuum chuck is not decompressed.
Further, when the controller judges that whether the vacuum chuck is under the decompression condition or not by combining the vacuum degree difference value, the controller calculates the vacuum degree difference value delta P, when the calculation is completed, the controller compares the vacuum degree difference value delta P with the vacuum degree standard difference value to determine whether the vacuum chuck is under the decompression condition or not, and when the controller determines that the vacuum chuck is not under the decompression condition, the vacuum chuck continues to normally operate;
if the delta P is less than or equal to the delta P0, the controller judges that the vacuum chuck is decompressed;
if delta P > -delta P0, the controller determines that the vacuum chuck is not under-pressurized;
wherein the controller is further provided with a vacuum standard deviation value delta P0.
Further, when the controller judges whether the vacuum chuck is under the decompression condition or not by combining the vacuum degree difference value, the controller calculates the vacuum degree difference value delta P, and the calculation formula is as follows:
△P=(P2-P1)×[(P2-P)/(P-P1)];
where P denotes an actual vacuum degree, P1 denotes a first preset vacuum degree, and P2 denotes a second preset vacuum degree.
Further, when the controller judges that the vacuum chuck is under decompression, the controller acquires an actual air hole size A between the vacuum chuck and an adsorbed object contact surface, which is obtained by scanning of the image scanner, and compares the actual air hole size A with a preset air hole size to determine early warning time, when the controller determines that the early warning time is Ti, the early warning unit sends out an alarm after the Ti time to prompt early warning for decompression, and i is set to be 1, 2,3 or 4;
the controller is further provided with preset air hole sizes and early warning time, wherein the preset air hole sizes comprise a first preset air hole size A1, a second preset air hole size A2 and a third preset air hole size A3, and A1 is larger than A2 and A3; the early warning time comprises a first early warning time T1, a second early warning time T2, a third early warning time T3 and a fourth early warning time T4, wherein T1 is more than T2 and more than T3 and more than T4;
if A is less than A1, the controller judges that the early warning time is T1;
if A is not less than A1 and is less than A2, the controller judges that the early warning time is T2;
if A is not less than A2 and is less than A3, the controller judges that the early warning time is T3;
and if A is larger than or equal to A3, the controller judges that the early warning time is T4.
Further, when the controller judges that the vacuum chuck is decompressed, the image scanner scans the contact surface between the vacuum chuck and the adsorption object, and the analysis unit analyzes the scanning result to obtain the actual air hole size A.
Further, when the vacuum chuck works, the controller obtains the actual mass M of the vacuum chuck adsorbed object, which is measured by the quality detection sheet in real time, and the controller compares the actual mass M with the standard mass to determine a vacuum degree calculation parameter;
the controller is further provided with standard mass and vacuum degree calculation parameters, the standard masses comprise a first standard mass M1, a second standard mass M2 and a third standard mass M3, wherein M1 is more than M2 and more than M3; the vacuum degree calculation parameters comprise a first calculation parameter sigma 1 of the vacuum degree, a second calculation parameter sigma 2 of the vacuum degree, a third calculation parameter sigma 3 of the vacuum degree and a fourth calculation parameter sigma 4 of the vacuum degree, wherein sigma 1 is larger than sigma 2 and larger than sigma 3 and larger than sigma 4;
if M is less than M1, the controller judges that the vacuum degree calculation parameter is sigma 1;
if M1 is not more than M and is less than M2, the controller judges that the vacuum degree calculation parameter is sigma 2;
if M2 is not more than M and is less than M3, the controller judges that the vacuum degree calculation parameter is sigma 3;
and if M is larger than or equal to M3, the controller judges that the vacuum degree calculation parameter is sigma 4.
Further, when the controller determines that the vacuum degree calculation parameter is σ i, setting i to 1, 2,3,4, the controller determines the actual vacuum degree P,
when i is 1, setting P to M × σ 1 × (M/M1);
when i is 2, set P as M × σ 2 × [ (M2-M)/(M-M1) ];
when i is 3, set P as M × σ 3 × [ (M3-M)/(M-M2) ];
when i is 4, P is M × σ 4 × (M3/M).
Compared with the prior art, the vacuum sucker pressure-loss warning device has the beneficial effects that through the arrangement of the quality detection sheet, the image scanner and the controller, when the vacuum sucker works, the actual vacuum degree of the vacuum sucker adsorbing an object is compared with the preset vacuum degree to determine whether the vacuum sucker is in pressure loss, if the vacuum sucker is not in pressure loss, the vacuum degree difference value is compared with the vacuum degree standard difference value to finally determine whether the vacuum sucker is in pressure loss, the actual air hole size is compared with the preset air hole size to determine the warning time when the vacuum sucker is in pressure loss, and an alarm is sent out through the warning unit, wherein the actual vacuum degree is determined through the actual quality of the vacuum sucker adsorbing the object, the vacuum degree calculation parameter and the vacuum degree formula. Thereby can confirm whether vacuum chuck loses pressure and confirm the early warning time according to the gas pocket size when vacuum chuck has lost pressure through vacuum and vacuum difference, and then can in time confirm and handle whether shield constructs section of jurisdiction vacuum chuck loses pressure, effectively reduced the adsorbate falling rate that vacuum chuck loses pressure and leads to.
Particularly, the vacuum suction cup early warning device is provided with the early warning unit for giving an alarm at the early warning time determined by the controller, and compared with the early warning processing of immediately warning when the pressure loss is found, the vacuum suction cup early warning device can bring the working efficiency of the vacuum suction cup to the utmost.
Further, the method comprises the steps of comparing the actual vacuum degree P when the vacuum chuck adsorbs the object with the preset vacuum degree to determine whether the vacuum chuck is in decompression, if the vacuum degree difference value delta P cannot be directly determined, comparing the vacuum degree standard difference value to finally determine whether the vacuum chuck is in decompression, comparing the actual air hole size A with the preset air hole size to determine the early warning time when the vacuum chuck is in decompression, and sending an alarm through an early warning unit, wherein the actual vacuum degree P is determined through the actual quality M of the object adsorbed by the vacuum chuck, the vacuum degree calculation parameter and a vacuum degree formula. Thereby can confirm whether vacuum chuck loses pressure and confirm the early warning time according to the gas pocket size when vacuum chuck has lost pressure through vacuum and vacuum difference, and then can in time confirm and handle whether shield constructs section of jurisdiction vacuum chuck loses pressure, effectively reduced the adsorbate falling rate that vacuum chuck loses pressure and leads to.
Furthermore, the method and the device determine whether the vacuum chuck is under decompression or not by comparing the actual vacuum degree P with the preset vacuum degree, so that whether the vacuum chuck is under decompression or not can be determined through the difference value of the vacuum degree and the vacuum degree, and early warning time can be determined according to the size of the air hole when the vacuum chuck is under decompression, so that whether the vacuum chuck of the shield segment is under decompression or not can be timely determined and processed, and the falling rate of adsorbates caused by the decompression of the vacuum chuck is effectively reduced.
Furthermore, the vacuum degree difference value delta P is compared with the vacuum degree standard difference value to determine whether the vacuum chuck is in decompression, so that whether the vacuum chuck is in decompression or not can be determined through the vacuum degree and the vacuum degree difference value, early warning time can be determined according to the size of the air hole when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely confirmed and processed, and the adsorbate falling rate caused by decompression of the vacuum chuck is effectively reduced.
Furthermore, the real air hole size A is compared with the preset air hole size to determine the early warning time, and the early warning unit gives an alarm when the early warning time is determined, so that whether the vacuum chuck is in decompression or not can be determined through the vacuum degree and the vacuum degree difference, the early warning time can be determined according to the air hole size when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely determined and processed, and the falling rate of the adsorbate caused by the decompression of the vacuum chuck is effectively reduced.
Furthermore, the actual quality M is compared with the standard quality to determine the vacuum degree calculation parameter, and the actual vacuum degree P is determined through the vacuum degree formula, so that whether the vacuum chuck is in decompression or not can be determined through the vacuum degree and the vacuum degree difference value, the early warning time can be determined according to the size of the air hole when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely confirmed and processed, and the falling rate of adsorbates caused by decompression of the vacuum chuck is effectively reduced.
Drawings
FIG. 1 is a schematic structural diagram of a shield segment vacuum chuck decompression early warning and anti-falling system in an embodiment of the invention;
the notation in the figure is: 1. quality detection tablets; 2. an image scanner; 3. a transmission unit; 4. an analysis unit; 5. a controller; 6. and an early warning unit.
Detailed Description
In order that the objects and advantages of the invention will be more clearly understood, the invention is further described below with reference to examples; it should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention, and do not limit the scope of the present invention.
It should be noted that in the description of the present invention, the terms of direction or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, which are only for convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, it should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 1, it is a schematic structural diagram of a shield segment vacuum chuck pressure loss early warning and anti-falling system according to an embodiment of the present invention, and the present invention provides a shield segment vacuum chuck pressure loss early warning and anti-falling system, including:
a sucking disc (not shown in the figure) for sucking the object, wherein a quality detection sheet is arranged on the sucking disc for detecting the quality of the object sucked by the sucking disc to obtain an actual quality M;
the image scanner is connected with the quality detection sheet and is used for scanning the contact surface of the vacuum chuck and the adsorbed object;
the transmission unit is respectively connected with the quality detection sheet and the image scanner and is used for transmitting the detection result of the quality detection sheet and the scanning result of the image scanner;
the analysis unit is connected with the image scanner and is used for analyzing the scanning result of the image scanner to obtain the actual air hole size A;
the controller is respectively connected with the quality detection sheet, the image scanner, the transmission unit and the analysis unit and is used for controlling the operation process of the vacuum chuck;
the early warning unit is connected with the controller and used for giving an alarm according to the indication of the controller when the vacuum chuck loses pressure;
when the vacuum chuck works, the controller compares the actual vacuum degree P when the vacuum chuck adsorbs an object with a preset vacuum degree to determine whether the vacuum chuck is in decompression, if the actual vacuum degree P cannot be directly determined, compares the vacuum degree difference value delta P with a vacuum degree standard difference value to finally determine whether the vacuum chuck is in decompression, compares the actual air hole size A with the preset air hole size to determine the early warning time when the vacuum chuck is in decompression and sends an alarm through an early warning unit;
and the actual vacuum degree P is determined by the actual mass M of the object adsorbed by the vacuum chuck, the vacuum degree calculation parameter and a vacuum degree formula.
In this embodiment, the quality detection piece utilizes the interact of power when detecting, also can obtain a reaction force when vacuum chuck adsorbs the object, so can be through detecting the quality that vacuum chuck adsorbs the object with the quality detection piece setting on the sucking disc. A PLC control panel is arranged in the controller.
Specifically, the method comprises the steps of comparing the actual vacuum degree P when the vacuum chuck adsorbs the object with the preset vacuum degree to determine whether the vacuum chuck is in decompression, if the vacuum degree difference value delta P cannot be directly determined, comparing the vacuum degree standard difference value to finally determine whether the vacuum chuck is in decompression, comparing the actual air hole size A with the preset air hole size to determine the early warning time when the vacuum chuck is in decompression, and sending an alarm through an early warning unit, wherein the actual vacuum degree P is determined through the actual quality M of the vacuum chuck adsorbing the object, the vacuum degree calculation parameter and a vacuum degree formula. Thereby can confirm whether vacuum chuck loses pressure and confirm the early warning time according to the gas pocket size when vacuum chuck has lost pressure through vacuum and vacuum difference, and then can in time confirm and handle whether shield constructs section of jurisdiction vacuum chuck loses pressure, effectively reduced the adsorbate falling rate that vacuum chuck loses pressure and leads to.
Specifically, when the vacuum chuck works, the controller acquires the actual vacuum degree P when the vacuum chuck adsorbs an object, the controller compares the actual vacuum degree P with the preset vacuum degree to determine whether the vacuum chuck is under decompression, and when the controller determines that the vacuum chuck is not under decompression, the vacuum chuck continues normal work;
the controller is provided with a preset vacuum degree, wherein the preset vacuum degree comprises a first preset vacuum degree P1 and a second preset vacuum degree P2, and P1 is less than P2;
if P < P1, the controller determines that the vacuum chuck has lost pressure;
if P1 is not less than P < P2, the controller judges whether the vacuum chuck is under pressure or not by combining the vacuum degree difference value;
if P is larger than or equal to P2, the controller judges that the vacuum chuck is not decompressed.
Specifically, the method and the device determine whether the vacuum chuck is under the decompression condition by comparing the actual vacuum degree P with the preset vacuum degree, so that whether the vacuum chuck is under the decompression condition can be determined according to the difference value of the vacuum degree and the vacuum degree, the early warning time can be determined according to the size of the air hole when the vacuum chuck is under the decompression condition, whether the vacuum chuck of the shield segment is under the decompression condition can be timely determined and processed, and the falling rate of adsorbates caused by the decompression of the vacuum chuck is effectively reduced.
Specifically, when the controller judges that whether the vacuum chuck is under the decompression condition or not by combining the vacuum degree difference value, the controller calculates the vacuum degree difference value delta P, when the calculation is completed, the controller compares the vacuum degree difference value delta P with the vacuum degree standard difference value to determine whether the vacuum chuck is under the decompression condition or not, and when the controller determines that the vacuum chuck is not under the decompression condition, the vacuum chuck continues to normally operate;
if the delta P is less than or equal to the delta P0, the controller judges that the vacuum chuck is decompressed;
if delta P > -delta P0, the controller determines that the vacuum chuck is not under-pressurized;
wherein the controller is further provided with a vacuum standard deviation value delta P0.
Specifically, the vacuum degree difference value delta P is compared with the vacuum degree standard difference value to determine whether the vacuum chuck is in decompression, so that whether the vacuum chuck is in decompression or not can be determined through the vacuum degree and the vacuum degree difference value, early warning time can be determined according to the size of the air hole when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely determined and processed, and the falling rate of adsorbates caused by decompression of the vacuum chuck is effectively reduced.
Specifically, when the controller determines that whether the vacuum chuck is under a decompression state or not by combining the vacuum degree difference value, the controller calculates the vacuum degree difference value delta P, and the calculation formula is as follows:
△P=(P2-P1)×[(P2-P)/(P-P1)];
where P denotes an actual vacuum degree, P1 denotes a first preset vacuum degree, and P2 denotes a second preset vacuum degree.
Specifically, when the controller judges that the vacuum chuck is under decompression, the controller acquires an actual air hole size A between the vacuum chuck and an adsorbed object contact surface, which is obtained by scanning of an image scanner, the controller compares the actual air hole size A with a preset air hole size to determine early warning time, when the controller determines that the early warning time is Ti, the early warning unit sends out an alarm after the Ti time to prompt early warning for decompression, and i is set to be 1, 2,3 and 4;
the controller is further provided with preset air hole sizes and early warning time, wherein the preset air hole sizes comprise a first preset air hole size A1, a second preset air hole size A2 and a third preset air hole size A3, and A1 is larger than A2 and A3; the early warning time comprises a first early warning time T1, a second early warning time T2, a third early warning time T3 and a fourth early warning time T4, wherein T1 is more than T2 and more than T3 and more than T4;
if A is less than A1, the controller judges that the early warning time is T1;
if A is not less than A1 and is less than A2, the controller judges that the early warning time is T2;
if A is not less than A2 and is less than A3, the controller judges that the early warning time is T3;
and if A is larger than or equal to A3, the controller judges that the early warning time is T4.
In this embodiment, the early warning time is set, and compared with the early warning processing of the standing horse when the pressure loss is found, the working efficiency of the vacuum chuck can be brought into full play. The early warning unit sends out the alarm to sound, and the embodiment does not limit the specific content of the sound as long as the prompt function can be satisfied.
Specifically, the actual air hole size A is compared with the preset air hole size to determine the early warning time, and the early warning unit gives an alarm when the early warning time is determined, so that whether the vacuum chuck is in decompression or not can be determined through the vacuum degree and the vacuum degree difference, the early warning time can be determined according to the air hole size when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely confirmed and processed, and the falling rate of adsorbates caused by the decompression of the vacuum chuck is effectively reduced.
Specifically, when the controller determines that the vacuum chuck has lost pressure, the image scanner scans the contact surface between the vacuum chuck and the suction object, and the analysis unit analyzes the scanning result to obtain the actual air hole size a.
In this embodiment, the analyzing of the scanning result by the analyzing unit refers to analyzing an image obtained by scanning by the image scanner, and obtaining the size of the air hole between the vacuum chuck and the contact surface of the adsorbed object according to the comparison between the shadow and the bright portion of the image.
Specifically, when the vacuum chuck works, the controller acquires the actual mass M of the vacuum chuck adsorbed object, which is measured by the quality detection sheet in real time, and the controller compares the actual mass M with the standard mass to determine a vacuum degree calculation parameter;
the controller is further provided with standard mass and vacuum degree calculation parameters, the standard masses comprise a first standard mass M1, a second standard mass M2 and a third standard mass M3, wherein M1 is more than M2 and more than M3; the vacuum degree calculation parameters comprise a first calculation parameter sigma 1 of the vacuum degree, a second calculation parameter sigma 2 of the vacuum degree, a third calculation parameter sigma 3 of the vacuum degree and a fourth calculation parameter sigma 4 of the vacuum degree, wherein sigma 1 is larger than sigma 2 and larger than sigma 3 and larger than sigma 4;
if M is less than M1, the controller judges that the vacuum degree calculation parameter is sigma 1;
if M1 is not more than M and is less than M2, the controller judges that the vacuum degree calculation parameter is sigma 2;
if M2 is not more than M and is less than M3, the controller judges that the vacuum degree calculation parameter is sigma 3;
and if M is larger than or equal to M3, the controller judges that the vacuum degree calculation parameter is sigma 4.
Specifically, the actual quality M is compared with the standard quality to determine a vacuum degree calculation parameter, and the actual vacuum degree P is determined through a vacuum degree formula, so that whether the vacuum chuck is in decompression or not can be determined through a vacuum degree and vacuum degree difference value, early warning time is determined according to the size of an air hole when the vacuum chuck is in decompression, whether the vacuum chuck of the shield segment is in decompression or not can be timely confirmed and subjected to falling treatment, and the adsorbate rate caused by the decompression of the vacuum chuck is effectively reduced.
Specifically, when the controller determines that the vacuum degree calculation parameter is σ i, i is set to 1, 2,3,4, the controller determines the actual vacuum degree P,
when i is 1, setting P to M × σ 1 × (M/M1);
when i is 2, set P as M × σ 2 × [ (M2-M)/(M-M1) ];
when i is 3, set P as M × σ 3 × [ (M3-M)/(M-M2) ];
when i is 4, P is M × σ 4 × (M3/M).
So far, the technical solutions of the present invention have been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of the present invention is obviously not limited to these specific embodiments. Equivalent changes or substitutions of related technical features can be made by those skilled in the art without departing from the principle of the invention, and the technical scheme after the changes or substitutions can fall into the protection scope of the invention.

Claims (6)

1. The utility model provides a shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling which characterized in that includes:
the sucking disc is used for carrying out object adsorption, and a quality detection sheet is arranged on the sucking disc and used for detecting the quality of the object adsorbed by the sucking disc so as to obtain the actual quality M;
the image scanner is connected with the quality detection sheet and is used for scanning the contact surface of the vacuum chuck and the adsorbed object;
the transmission unit is respectively connected with the quality detection sheet and the image scanner and is used for transmitting the detection result of the quality detection sheet and the scanning result of the image scanner;
the analysis unit is connected with the image scanner and used for analyzing the scanning result of the image scanner to obtain the actual air hole size A, wherein the analysis of the scanning result by the analysis unit refers to the analysis of the image scanned by the image scanner, and the air hole size between the contact surface of the vacuum chuck and the adsorption object is obtained according to the contrast condition of the shadow and the bright part of the image;
the controller is respectively connected with the quality detection sheet, the image scanner, the transmission unit and the analysis unit and is used for controlling the operation process of the vacuum chuck;
the early warning unit is connected with the controller and used for giving an alarm according to the indication of the controller when the vacuum chuck loses pressure;
when the vacuum chuck works, the controller compares the actual vacuum degree P when the vacuum chuck adsorbs an object with a preset vacuum degree to determine whether the vacuum chuck is in decompression, if the actual vacuum degree P cannot be directly determined, compares the vacuum degree difference value delta P with a vacuum degree standard difference value to finally determine whether the vacuum chuck is in decompression, compares the actual air hole size A with the preset air hole size to determine the early warning time when the vacuum chuck is in decompression and sends an alarm through an early warning unit;
the actual vacuum degree P is determined through the actual mass M of the object adsorbed by the vacuum chuck, a vacuum degree calculation parameter and a vacuum degree formula;
when the vacuum chuck works, the controller acquires the actual vacuum degree P when the vacuum chuck adsorbs an object, the controller compares the actual vacuum degree P with the preset vacuum degree to determine whether the vacuum chuck loses pressure, and when the controller determines that the vacuum chuck does not lose pressure, the vacuum chuck continues normal work;
the controller is provided with a preset vacuum degree, wherein the preset vacuum degree comprises a first preset vacuum degree P1 and a second preset vacuum degree P2, and P1 is less than P2;
if P < P1, the controller determines that the vacuum chuck has lost pressure;
if P1 is not less than P < P2, the controller judges whether the vacuum chuck is under pressure or not by combining the vacuum degree difference value;
if P is larger than or equal to P2, the controller judges that the vacuum chuck is not decompressed;
when the vacuum chuck works, the controller obtains the actual mass M of the object adsorbed by the vacuum chuck, which is measured by the quality detection sheet in real time, and the controller compares the actual mass M with the standard mass to determine a vacuum degree calculation parameter;
the controller is further provided with standard mass and vacuum degree calculation parameters, the standard masses comprise a first standard mass M1, a second standard mass M2 and a third standard mass M3, wherein M1 is more than M2 and more than M3; the vacuum degree calculation parameters comprise a first calculation parameter sigma 1 of the vacuum degree, a second calculation parameter sigma 2 of the vacuum degree, a third calculation parameter sigma 3 of the vacuum degree and a fourth calculation parameter sigma 4 of the vacuum degree, wherein sigma 1 is larger than sigma 2 and larger than sigma 3 and larger than sigma 4;
if M is less than M1, the controller judges that the vacuum degree calculation parameter is sigma 1;
if M1 is not more than M and is less than M2, the controller judges that the vacuum degree calculation parameter is sigma 2;
if M2 is not more than M and is less than M3, the controller judges that the vacuum degree calculation parameter is sigma 3;
and if M is larger than or equal to M3, the controller judges that the vacuum degree calculation parameter is sigma 4.
2. The shield segment vacuum chuck pressure loss early warning and anti-falling system as claimed in claim 1, wherein the controller calculates a vacuum degree difference Δ P when determining whether the vacuum chuck is pressure loss or not in combination with the vacuum degree difference, and when the calculation is completed, the controller compares the vacuum degree difference Δ P with a vacuum degree standard difference to determine whether the vacuum chuck is pressure loss or not, and when the controller determines that the vacuum chuck is not pressure loss, the vacuum chuck continues to operate normally;
if the delta P is less than or equal to the delta P0, the controller judges that the vacuum chuck is decompressed;
if delta P > -delta P0, the controller determines that the vacuum chuck is not under-pressurized;
wherein the controller is further provided with a vacuum standard deviation value delta P0.
3. The shield segment vacuum chuck pressure loss early warning and anti-falling system as claimed in claim 2, wherein the controller calculates a vacuum degree difference Δ P when determining whether the vacuum chuck is pressure loss by combining the vacuum degree difference, and the calculation formula is as follows:
△P=(P2-P1)×[(P2-P)/(P-P1)];
where P denotes an actual vacuum degree, P1 denotes a first preset vacuum degree, and P2 denotes a second preset vacuum degree.
4. The shield segment vacuum chuck pressure loss early warning and fall prevention system according to claim 3, wherein when the controller determines that the vacuum chuck is pressure loss, the controller obtains an actual air hole size A between the vacuum chuck and the contact surface of the adsorbed object, which is obtained by scanning of the image scanner, the controller compares the actual air hole size A with a preset air hole size to determine early warning time, when the controller determines that the early warning time is Ti, the early warning unit sends out an alarm after the Ti time to prompt early warning for pressure loss, and i is set to 1, 2,3, 4;
the controller is further provided with preset air hole sizes and early warning time, wherein the preset air hole sizes comprise a first preset air hole size A1, a second preset air hole size A2 and a third preset air hole size A3, and A1 is larger than A2 and A3; the early warning time comprises a first early warning time T1, a second early warning time T2, a third early warning time T3 and a fourth early warning time T4, wherein T1 is more than T2 and more than T3 and more than T4;
if A is less than A1, the controller judges that the early warning time is T1;
if A is not less than A1 and is less than A2, the controller judges that the early warning time is T2;
if A is not less than A2 and is less than A3, the controller judges that the early warning time is T3;
and if A is larger than or equal to A3, the controller judges that the early warning time is T4.
5. The shield segment vacuum chuck pressure loss early warning and fall prevention system as claimed in claim 4, wherein the controller determines that the vacuum chuck is pressure loss, the image scanner scans the contact surface between the vacuum chuck and the absorption object, and the analysis unit analyzes the scanning result to obtain the actual air hole size A.
6. The shield segment vacuum chuck decompression early warning and anti-falling system according to claim 1, wherein when the controller determines that the vacuum degree calculation parameter is σ i, i is set to 1, 2,3,4, the controller determines the actual vacuum degree P,
when i is 1, setting P to M × σ 1 × (M/M1);
when i is 2, set P as M × σ 2 × [ (M2-M)/(M-M1) ];
when i is 3, set P as M × σ 3 × [ (M3-M)/(M-M2) ];
when i is 4, P is M × σ 4 × (M3/M).
CN202110811331.3A 2021-07-19 2021-07-19 Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling Active CN113374500B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110811331.3A CN113374500B (en) 2021-07-19 2021-07-19 Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110811331.3A CN113374500B (en) 2021-07-19 2021-07-19 Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling

Publications (2)

Publication Number Publication Date
CN113374500A CN113374500A (en) 2021-09-10
CN113374500B true CN113374500B (en) 2022-02-15

Family

ID=77582308

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110811331.3A Active CN113374500B (en) 2021-07-19 2021-07-19 Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling

Country Status (1)

Country Link
CN (1) CN113374500B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114543714A (en) * 2022-02-17 2022-05-27 源卓微电子装备(常德)有限公司 Detection device and detection method for adsorption abnormity of vacuum chuck

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086423A (en) * 2000-09-12 2002-03-26 Nippon Koatsu Concrete Kk Method and apparatus for vacuum forming of concrete liner
JP2010222837A (en) * 2009-03-24 2010-10-07 Toda Constr Co Ltd Manufacturing method for inner surface covering segment for tunnel lining and form device for the same
CN103640955A (en) * 2013-12-20 2014-03-19 西南铝业(集团)有限责任公司 Suction cup device and crane
CN104932491A (en) * 2014-03-17 2015-09-23 科沃斯机器人科技(苏州)有限公司 Absorption state judgment and walking control method for adsorption robot
CN205309871U (en) * 2016-01-11 2016-06-15 上海浦东汉威阀门有限公司 Take nonmetal flexible sheet's of vacuum warning fixing device
CN207963115U (en) * 2017-11-30 2018-10-12 珠海格力电器股份有限公司 A kind of installation control device and air conditioner
CN208200110U (en) * 2018-05-08 2018-12-07 广州市柯西机械设备有限公司 A kind of vacuum system of heavy hydraulic overturning rotating suction disc suspender
CN211254938U (en) * 2019-12-19 2020-08-14 重庆朗正科技有限公司 Vacuum suction tool for falling part detection

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002086423A (en) * 2000-09-12 2002-03-26 Nippon Koatsu Concrete Kk Method and apparatus for vacuum forming of concrete liner
JP2010222837A (en) * 2009-03-24 2010-10-07 Toda Constr Co Ltd Manufacturing method for inner surface covering segment for tunnel lining and form device for the same
CN103640955A (en) * 2013-12-20 2014-03-19 西南铝业(集团)有限责任公司 Suction cup device and crane
CN104932491A (en) * 2014-03-17 2015-09-23 科沃斯机器人科技(苏州)有限公司 Absorption state judgment and walking control method for adsorption robot
CN205309871U (en) * 2016-01-11 2016-06-15 上海浦东汉威阀门有限公司 Take nonmetal flexible sheet's of vacuum warning fixing device
CN207963115U (en) * 2017-11-30 2018-10-12 珠海格力电器股份有限公司 A kind of installation control device and air conditioner
CN208200110U (en) * 2018-05-08 2018-12-07 广州市柯西机械设备有限公司 A kind of vacuum system of heavy hydraulic overturning rotating suction disc suspender
CN211254938U (en) * 2019-12-19 2020-08-14 重庆朗正科技有限公司 Vacuum suction tool for falling part detection

Also Published As

Publication number Publication date
CN113374500A (en) 2021-09-10

Similar Documents

Publication Publication Date Title
CN113374500B (en) Shield constructs section of jurisdiction vacuum chuck decompression early warning and system of preventing falling
CN104425331B (en) Turntable positioning device, loading Transmission system and plasma processing device
WO2003009345A3 (en) Integration of fault detection with run-to-run control
JP2002521830A (en) Wafer detector
WO2002078062A3 (en) Acoustic detection of dechucking and apparatus therefor
CN109178927A (en) Plate conveyance and plate conveyer method
TW200731042A (en) Method and apparatus for controlling lift of a structural object
WO2006058169A3 (en) Power sag detection and control in ion implanting systems
CN206301762U (en) A kind of detection means for preventing solar battery sheet to mix shelves
KR100925958B1 (en) Automatic loading apparatus for fuel cell separator
US7712370B2 (en) Method of detecting occurrence of sticking of substrate
CN207067352U (en) A kind of optoelectronic switch detection device
CN106705341B (en) Air conditioner installation emptying detection method
CN106425828A (en) CMP equipment polishing head chip falling detection method and system
CN112061948A (en) Vacuum system
CN104483888B (en) Mistake-proofing system
CN108857362B (en) Screw locking device and screw locking method thereof
CN106898566A (en) A kind of semiconductor processing equipment
CN110764143B (en) Household earthquake detector
CN203398091U (en) Manipulator for taking slices in production of silicon slices
CN108693089A (en) Tank body detects alarm system and the climbing robot suitable for the system
CN107591344A (en) Process chamber atmosphere detection method and wafer fab
CN108098794B (en) Mechanical arm, wafer conveying device thereof and wafer detection machine
JP2013086183A (en) Pressure regulating device for glove box
CN108022862A (en) Mechanical arm working status testing agency

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant