CN113373415A

CN113373415A - Optical coating cutting device

Info

Publication number: CN113373415A
Application number: CN202110450026.6A
Authority: CN
Inventors: 李晨; 谢微
Original assignee: Jiangsu Micro Nano Film Technology Co Ltd
Current assignee: Jiangsu Micro Nano Film Technology Co Ltd
Priority date: 2021-04-25
Filing date: 2021-04-25
Publication date: 2021-09-10
Anticipated expiration: 2041-04-25
Also published as: CN113373415B

Abstract

The invention provides an optical coating cutting device, which comprises a chamber component, a cutting component and a cutting component, wherein the chamber component comprises a vacuum chamber formed by a vacuum cover and a base; the sputtering component is arranged in the vacuum chamber and comprises a plurality of magnetic control shooting guns, a target material and a bias magnetic field; the cutting assembly comprises a clamping component arranged in the vacuum chamber, a deflection component connected with the clamping component and a shielding component covering one side of the clamping component, the shielding component comprises a baffle piece, and the deflection component drives the clamping component to deflect and move on one side of the baffle. According to the optical coating cutting device provided by the invention, the clamping component connected with the deflection component and the fixed shielding component are arranged in the vacuum cavity, so that the coating area of the workpiece to be coated can be adjusted, and meanwhile, the deflection component is positioned in the shielding range of the shielding component, so that the equipment work in the coating area cannot be influenced.

Description

Optical coating cutting device

Technical Field

The invention relates to the technical field of coating, in particular to an optical coating cutting device.

Background

The magnetron sputtering coating technology is continuously perfected and developed, and is already used as a coating technology which is widely applied in industry. The magnetron sputtering coating process is roughly divided into ionization, bombardment, sputtering and film forming. Namely, Ar + ions are ionized under the high pressure of working gas (Ar gas molecules), the target material of the cathode is bombarded under the action of an electromagnetic field, and the target material is bombarded by bombardment glow discharge to generate plasma which reaches a substrate to form a film.

The existing coating equipment usually fixes the substrate to be coated in a bias magnetic field, and the position and the direction of the substrate are fixed. However, the existing coated substrates cannot be all flat, and for a coated substrate with a special shape, the direction and position of the substrate need to be adjusted to a certain degree.

Disclosure of Invention

This section is for the purpose of summarizing some aspects of embodiments of the invention and to briefly introduce some preferred embodiments. In this section, as well as in the abstract and the title of the invention of this application, simplifications or omissions may be made to avoid obscuring the purpose of the section, the abstract and the title, and such simplifications or omissions are not intended to limit the scope of the invention.

Therefore, the technical problem to be solved by the present invention is to overcome the defect of the fixed optical coating direction in the prior art, thereby providing various applications.

In order to solve the technical problems, the invention provides the following technical scheme: an optical coating cutting device comprises a cutting device,

a chamber assembly comprising a vacuum chamber formed by a vacuum enclosure and a base;

the sputtering component is arranged in the vacuum chamber and comprises a plurality of magnetic control shooting guns, a target material and a bias magnetic field;

the cutting assembly comprises a clamping component arranged in the vacuum chamber, a deflection component connected with the clamping component and a shielding component covering one side of the clamping component, the shielding component comprises a baffle piece, and the deflection component drives the clamping component to deflect and move on one side of the baffle.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the clamping component comprises at least two clamping pieces, the clamping pieces form a clamping area, the clamping component is arranged in the center of the bias magnetic field, and a through hole aiming at the clamping area is reserved in the middle of the baffle piece.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the deflection member may comprise a plurality of deflection members,

the deflection disc is connected with the clamping component and drives the clamping component to deflect and move;

the rotating part is arranged in the vacuum chamber and comprises a rotating shaft for driving the deflection disc to rotate;

and the wheel base adjusting piece is connected with the rotating shaft and the deflection disc and used for adjusting the wheel base of the center of the rotating shaft and the deflection disc.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the wheel base adjusting part comprises a sliding part and a sliding seat, the deflection disc is fixedly connected with the sliding part, the sliding part is connected to the sliding seat in a sliding mode, and the sliding part moves linearly in the through groove of the sliding seat.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the wheel base adjusting part further comprises a linear driving rod, the linear driving rod penetrates through the sliding seat and is in threaded connection with the sliding part, the length direction of the linear driving rod is parallel to the moving direction of the sliding part, and when the linear driving rod rotates, the sliding part moves.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the rotating piece further comprises a rotating support, the rotating piece is arranged on the rotating support, and one end of the rotating piece is fixedly connected with the sliding seat.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the clamping part comprises a synchronous driving part, the clamping part is movably arranged on the synchronous driving part, and the synchronous driving part drives the clamping part to be close to or far away from the center of the clamping space.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the synchronous driving part comprises an annular driving disc, driving threads are arranged on the annular driving disc, the clamping part is arranged on the annular driving disc through a sliding block, and a plurality of sliding grooves matched with the driving threads are formed in the sliding block; and after the annular driving disc rotates, the sliding block is driven to linearly move along the radial direction.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the clamping part along the annular driving piece distributes and has at least three, wherein at least one be equipped with fixed joint ware on the clamping part, at least one be equipped with movable joint ware on the clamping part, movable joint ware passes through the bolt and rotates the connection on the clamping part, fixed joint ware with all be equipped with the joint mouth on the movable joint ware.

As a preferable aspect of the optical coating cutting device of the present invention, wherein: the clamping part further comprises a guide sleeve, the synchronous driving part and the clamping part are arranged in the guide sleeve, a guide channel is radially formed in the guide sleeve, and a guide body matched with the guide channel is arranged on the side wall of the sliding block.

The invention has the beneficial effects that: according to the optical coating cutting device provided by the invention, the clamping component connected with the deflection component and the fixed shielding component are arranged in the vacuum cavity, so that the coating area of the workpiece to be coated can be adjusted, and meanwhile, the deflection component is positioned in the shielding range of the shielding component, so that the equipment work in the coating area cannot be influenced.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise. Wherein:

FIG. 1 is a schematic view of the overall structure of an optical coating cutting apparatus;

FIG. 2 is a schematic view of a clamping member;

FIG. 3 is a schematic view of the structure of the deflection unit;

fig. 4 is a schematic structural view of the wheel base adjusting member.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.

Example 1

The embodiment provides an optical coating cutting device, the structure of which is shown in fig. 1 to 4, and the optical coating cutting device comprises a force component, a sputtering component 200 and a positioning component.

The chamber assembly 100 includes a vacuum chamber 110 formed by a vacuum hood 120 and a base for forming a vacuum environment for injecting argon and oxygen to a desired ratio and degree of vacuum. Provides an implementation environment for sputtering and deposition. The sputtering assembly 200 is disposed within the vacuum chamber 110 and includes a plurality of magnetron guns 210, a target, and a bias magnetic field 220. The cutting assembly is used for clamping and fixing a film replacing and coating workpiece and adjusting a coating area, and comprises a clamping part 300 arranged in the vacuum chamber 110, a deflection part 400 connected with the clamping part 300, and a shielding part 500 covering one side of the clamping part 300, wherein the shielding assembly comprises a baffle part 510, and the deflection part 400 drives the clamping part 320 to deflect and move on one side of the baffle. When the shape of the workpiece to be coated is irregular, the positions of the plurality of clamping members 320 in the clamping member 300 can be adjusted in a self-adaptive manner, so that the workpiece to be coated can be stably clamped.

According to the optical coating cutting device provided by the embodiment of the invention, the clamping component 300 connected with the deflection component 400 and the fixed shielding component 500 are arranged in the vacuum chamber 110, so that the coating area of the workpiece to be coated can be adjusted, and meanwhile, the deflection component 400 is positioned in the shielding range of the shielding component 500, so that the equipment work in the coating area cannot be influenced.

Example 2

The embodiment provides an optical coating cutting device, which comprises a chamber assembly 100, a cutting device and a cutting device, wherein the chamber assembly 100 comprises a vacuum chamber 110 formed by a vacuum cover 120 and a base; a sputtering assembly 200 disposed within the vacuum chamber 110 and comprising a plurality of magnetron guns 210, a target, and a bias magnetic field 220; the cutting assembly includes a clamping member 300 disposed in the vacuum chamber 110, a deflecting member 400 connected to the clamping member 300, and a shielding member 500 covering one side of the clamping member 300, the shielding member including a blocking member 510, the deflecting member 400 driving the clamping member 320 to deflect and move on one side of the blocking member.

As shown in fig. 1, the clamping member 300 in this embodiment includes at least two clamping members 320, the clamping members 320 form a clamping area, the clamping member 300 is disposed at the center of the bias magnetic field 220, and a through hole 511 for the clamping area is left in the middle of the barrier member 510.

The sputtering apparatus introduces a gas such as Ar into a vacuum vessel and applies a high voltage to a target, thereby generating plasma. The phenomenon of sputtering a target with charged particles in a discharge plasma is exploited to allow the target material to adhere to a substrate supported by a substrate holder. When cations in the plasma strike a target material having a negative potential, atoms and molecules in the target material are ejected from the target material. These atoms and molecules are commonly referred to as sputtered particles. The sputtered particles adhere to the substrate to form a film thereon containing the target material.

As shown in fig. 3, the deflecting unit 400 in the present embodiment includes a deflecting plate 410, a rotating member 420, and a wheel base adjusting member 430. The deflection plate 410 is used for mounting the clamping member 300, and is connected with the clamping member 300 to drive the clamping member 300 to deflect and move. The rotating member 420 is used for providing power for driving the clamping member 300 to rotate integrally. The rotating member 420 is disposed within the vacuum chamber 110 and includes a rotating shaft 421 that drives the deflection disk 410 to rotate. The wheel base adjusting member 430 connects the rotating shaft 421 and the deflecting plate 410, and adjusts the wheel base of the rotating shaft 421 and the center of the deflecting plate 410.

Since the wheel base adjusting member 430 connects the rotating member 420 and the deflection disk 410, the center of the deflection disk 410 does not necessarily coincide with the axial center of the rotating member 420. The deflection plate 410 is coupled to the clamping member 300 such that deflection of the clamping member 320 is achieved. Because the position of the through hole 511 in the baffle member 510 is fixed, when the clamping member 300 deflects, the position of the workpiece to be coated clamped on the clamping member 300 corresponding to the through hole 511 is also changed, thereby controlling the coating area and cutting the coating effect.

As shown in fig. 4, the wheel base adjusting member 430 in this embodiment includes a sliding member 431 and a sliding seat 432, the deflecting plate 410 is fixedly connected to the sliding member 431, the sliding member 431 is slidably connected to the sliding seat 432, and the sliding member 431 moves linearly in a through groove 432a of the sliding seat 432.

Specifically, the sliding seat 432 and the sliding member 431 are positioned on the disc surface of the deflection disc 410 on the side of the clamping component 300, the length direction of the sliding member 431 is parallel to the disc surface of the deflection disc 410, the cross section of the sliding member 431 is in an inverted trapezoid shape, the cross section of the through groove 432a in the corresponding sliding seat 432 is also in an inverted trapezoid shape, and the sliding member 431 can be prevented from directly separating from the through groove 432 a. End limiting plates are further arranged at two ends of the through groove 432 a.

In order to facilitate the control of the offset wheel base, as shown in fig. 4, the wheel base adjusting member 430 in this embodiment further includes a linear driving rod 433, the linear driving rod 433 penetrates through an end limiting plate on the sliding seat 432 and is in threaded connection with the sliding member 431, a threaded hole matched with the linear driving rod 433 is formed in the sliding member 431, the length direction of the threaded hole is parallel to the moving direction of the sliding member 431, and when the linear driving rod 433 rotates, the sliding member 431 can move linearly in the through groove 432a due to the threaded connection, so that the changed wheel base is further provided.

As shown in fig. 3, the rotating member 420 in this embodiment further includes a rotating bracket 422, and the rotating member 420 is disposed on the rotating bracket 422, and one end of the rotating member is fixedly connected to the sliding seat 432. The rotating support 422 is fixed in the vacuum chamber 110.

As shown in fig. 2, the clamping member 300 of the present embodiment includes a synchronous driving member 310, the clamping member 320 is movably disposed on the synchronous driving member 310, and the synchronous driving member 310 drives the clamping member 320 to move toward or away from the center of the clamping space.

By providing the synchronous driving member 310, the plurality of clamping members 320 can be simultaneously driven to simultaneously contract inward or expand outward, thereby realizing automatic clamping.

Specifically, as shown in fig. 2, the synchronous driving element 310 in this embodiment includes an annular driving disc 311, a driving screw 311a is disposed on the annular driving disc 311, the clamping element 320 is disposed on the annular driving disc 311 through a sliding block 312, and a plurality of sliding grooves 312a adapted to the driving screw 311a are formed on the sliding block 312. When the annular driving disk 311 rotates, the clamping member 320 is driven to move linearly in the radial direction under the restriction of the driving screw 311 a. The inner diameter of drive screw 311a is smaller than the outer diameter, so that contraction or expansion of clamp 320 can be achieved when annular drive disk 311 rotates in both directions.

As shown in fig. 2, the driving screw 311a in this embodiment is located on the upper disc surface of the annular driving disc 311, so that the bottom of the clamping member 320 contacts with the upper disc surface of the annular driving disc 311, the sliding groove 312a is opened at the bottom of the clamping member 320, and the bottom sliding groove 312a of the clamping member 320 is provided with a plurality of grooves which can cross over the plurality of driving screws 311a for stability.

The clamping pieces 320 in this embodiment are distributed three along the annular driving piece, one clamping piece 320 is provided with a fixed clamping device 322, the other two clamping pieces 320 are provided with movable clamping devices 321, the movable clamping devices 321 are rotatably connected to the clamping pieces 320 through bolts, and the fixed clamping devices 322 and the movable clamping devices 321 are provided with clamping ports. The clamping interface is a notch which forms an angle inwards. The movable clamping device 321 can automatically adjust the angle according to the shape of the clamped workpiece, so as to ensure the stability of clamping.

In order to further maintain the motion stability of the clamping member 320, as shown in fig. 2, the clamping member 300 in this embodiment further includes a guide sleeve 330, the synchronous driving member 310 and the clamping member 320 are both disposed in the guide sleeve 330, the guide sleeve 330 is radially opened with a guide channel 331, and the side wall of the sliding block 312 is provided with a guide body 312b adapted to the guide channel 331.

It is important to note that the construction and arrangement of the present application as shown in the various exemplary embodiments is illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperatures, pressures, etc.), mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter recited in this application. For example, elements shown as integrally formed may be constructed of multiple parts or elements, the position of elements may be reversed or otherwise varied, and the nature or number of discrete elements or positions may be altered or varied. Accordingly, all such modifications are intended to be included within the scope of this invention. The order or sequence of any process or method steps may be varied or re-sequenced according to alternative embodiments. In the claims, any means-plus-function clause is intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present inventions. Therefore, the present invention is not limited to a particular embodiment, but extends to various modifications that nevertheless fall within the scope of the appended claims.

Moreover, in an effort to provide a concise description of the exemplary embodiments, all features of an actual implementation may not be described (i.e., those unrelated to the presently contemplated best mode of carrying out the invention, or those unrelated to enabling the invention).

It should be appreciated that in the development of any such actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking of design, fabrication, and manufacture for those of ordinary skill having the benefit of this disclosure, without undue experimentation.

It should be noted that the above-mentioned embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.

Claims

1. An optical coating cutting device is characterized in that: comprises the steps of (a) preparing a mixture of a plurality of raw materials,

a chamber assembly (100) comprising a vacuum chamber (110) formed by a vacuum enclosure (120) and a base;

the sputtering assembly (200) is arranged in the vacuum chamber (110) and comprises a plurality of magnetron sputtering guns (210), a target and a bias magnetic field (220);

the cutting assembly comprises a clamping component (300) arranged in the vacuum chamber (110), a deflection component (400) connected with the clamping component (300), and a shielding component (500) covering one side of the clamping component (300), wherein the shielding component comprises a baffle piece (510), and the deflection component (400) drives the clamping component (320) to deflect and move on one side of the baffle.

2. The optical coating cutting device according to claim 1, wherein: the clamping component (300) comprises at least two clamping pieces (320), the clamping pieces (320) form a clamping area, the clamping component (300) is arranged in the center of the bias magnetic field (220), and a through hole (511) corresponding to the clamping area is reserved in the middle of the baffle piece (510).

3. The optical coating cutting device according to claim 2, wherein: the deflection member (400) comprises,

the deflection disc (410) is connected with the clamping component (300) and drives the clamping component (300) to deflect and move;

a rotating member (420) provided in the vacuum chamber (110) and including a rotating shaft (421) for rotating the deflection disk (410);

and the wheel base adjusting piece (430) is connected with the rotating shaft (421) and the deflection disc (410) and is used for adjusting the wheel base of the rotating shaft (421) and the center of the deflection disc (410).

4. The optical coating cutting device according to claim 3, wherein: the wheel base adjusting piece (430) comprises a sliding piece (431) and a sliding seat (432), the deflection disc (410) is fixedly connected with the sliding piece (431), the sliding piece (431) is connected onto the sliding seat (432) in a sliding mode, and the sliding piece (431) moves linearly in a through groove (432a) of the sliding seat (432).

5. The optical coating cutting device according to claim 4, wherein: wheel base adjusting part (430) still includes sharp actuating lever (433), sharp actuating lever (433) pass slide seat (432) and with slide (431) threaded connection, and its length direction with the moving direction of slide (431) is parallel, when sharp actuating lever (433) rotated, slide (431) removed.

6. The optical coating cutting device according to claim 5, wherein: the rotating part (420) further comprises a rotating support (422), the rotating part (420) is arranged on the rotating support (422), and one end of the rotating part is fixedly connected with the sliding seat (432).

7. The optical coating cutting device according to any one of claims 1 to 6, wherein: the clamping component (300) comprises a synchronous driving component (310), the clamping component (320) is movably arranged on the synchronous driving component (310), and the synchronous driving component (310) drives the clamping component (320) to be close to or far away from the center of the clamping space.

8. The optical coating cutting device according to claim 7, wherein: the synchronous driving part (310) comprises an annular driving disc (311), driving threads (311a) are arranged on the annular driving disc (311), the clamping part (320) is arranged on the annular driving disc (311) through a sliding block (312), and a plurality of sliding grooves (312a) matched with the driving threads (311a) are formed in the sliding block (312); after the annular driving disk (311) rotates, the sliding block (312) is driven to linearly move along the radial direction.

9. The optical coating cutting device according to claim 8, wherein: holder (320) along the annular driving piece distributes and has at least three, wherein at least one be equipped with fixed joint ware (322), at least one on holder (320) be equipped with movable joint ware (321) on holder (320), movable joint ware (321) rotate through the bolt and connect on holder (320), fixed joint ware (322) with all be equipped with the joint mouth on the movable joint ware (321).

10. The optical coating cutting device according to claim 9, wherein: the clamping part (300) further comprises a guide sleeve (330), the synchronous driving part (310) and the clamping part (320) are arranged in the guide sleeve (330), a guide channel (331) is formed in the guide sleeve (330) along the radial direction, and a guide body (312b) matched with the guide channel (331) is arranged on the side wall of the sliding block (312).