CN113355642B

CN113355642B - Optical coating pressing-in device

Info

Publication number: CN113355642B
Application number: CN202110448830.0A
Authority: CN
Inventors: 谢微; 李晨
Original assignee: Jiangsu Micro Nano Film Technology Co ltd
Current assignee: Jiangsu Micro Nano Film Technology Co ltd
Priority date: 2021-04-25
Filing date: 2021-04-25
Publication date: 2023-05-05
Anticipated expiration: 2041-04-25
Also published as: CN113355642A

Abstract

The invention provides an optical coating pressing-in device, which comprises a chamber component, a pressing-in device and a pressing-in device, wherein the chamber component comprises a vacuum chamber formed by a vacuum cover and a base; the sputtering component is arranged in the vacuum chamber and comprises a plurality of magnetron guns, a target material and a bias magnetic field; the positioning assembly comprises a clamping component arranged in the vacuum chamber and a direction adjusting component for driving the clamping component to adjust the direction, wherein the clamping component comprises at least two clamping pieces, the clamping pieces form a clamping area, and the clamping component is connected with the direction adjusting component. According to the optical coating pressing-in device, the positioning component with the clamping and direction adjusting functions is arranged in the vacuum chamber, so that multidirectional adjustment of the material with the coating is realized, and the coating requirement of a complex shape is met.

Description

Optical coating pressing-in device

Technical Field

The invention relates to the technical field of coating, in particular to an optical coating pressing-in device.

Background

The magnetron sputtering coating technology is continuously perfected and developed, and is already used as a coating technology widely applied in industry. The magnetron sputtering coating process is roughly divided into ionization, bombardment, sputtering and film forming. Namely, ar+ ions are ionized under high pressure of working gas (Ar gas molecules), the cathode target is bombarded under the action of an electromagnetic field, and the target is bombarded by glow discharge to generate plasma, so that the plasma reaches a substrate to form a film.

The existing coating equipment generally fixes the substrate to be coated in a bias magnetic field, and the position and the direction of the substrate to be coated are fixed. However, the existing coating substrates cannot be all planar, and certain degree of adjustability of the direction and position of the substrate is required for coating substrates with specific shapes.

Disclosure of Invention

This section is intended to outline some aspects of embodiments of the invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section as well as in the description summary and in the title of the application, to avoid obscuring the purpose of this section, the description summary and the title of the invention, which should not be used to limit the scope of the invention.

Therefore, the technical problem to be solved by the invention is to overcome the defect of fixed direction of optical coating in the prior art, thereby providing a plurality of kinds of optical coating.

In order to solve the technical problems, the invention provides the following technical scheme: an optical coating pressing-in device comprises,

a chamber assembly including a vacuum chamber formed by a vacuum enclosure and a base;

the sputtering component is arranged in the vacuum chamber and comprises a plurality of magnetron guns, a target material and a bias magnetic field;

the positioning assembly comprises a clamping component arranged in the vacuum chamber and a direction adjusting component for driving the clamping component to adjust the direction, wherein the clamping component comprises at least two clamping pieces which form a clamping area, and the clamping component is connected with the direction adjusting component.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the clamping component is arranged in the center of the bias magnetic field, a baffle is arranged between the positioning component and the bias magnetic field, and a through hole aiming at the clamping area is reserved in the middle of the baffle.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the clamping part comprises a synchronous driving piece, the clamping piece is movably arranged on the synchronous driving piece, and the synchronous driving piece drives the clamping piece to approach or depart from the center of the clamping area.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the synchronous driving piece comprises an annular driving disc, driving threads are arranged on the annular driving disc, the clamping piece is arranged on the annular driving disc through a sliding block, and a plurality of sliding grooves matched with the driving threads are formed in the sliding block; and after the annular driving disc rotates, the sliding block is driven to linearly move along the radial direction.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the clamping pieces are distributed with at least three parts along the annular driving disc, at least one of the clamping pieces is provided with a fixed clamping device, at least one of the clamping pieces is provided with a movable clamping device, the movable clamping device is rotationally connected to the clamping pieces through bolts, and clamping ports are formed in the fixed clamping device and the movable clamping device.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the clamping part further comprises a guide sleeve, the synchronous driving part and the clamping part are arranged in the guide sleeve, the guide sleeve is provided with a guide channel along the radial direction, and the side wall of the sliding block is provided with a guide body matched with the guide channel.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the direction-regulating component comprises a first component and a second component,

the direction adjusting frame is fixedly arranged in the vacuum chamber;

the direction adjusting arm is rotationally arranged on the direction adjusting frame, and one end of the direction adjusting arm is connected with the clamping component;

and the swinging driving piece is fixedly connected to the direction adjusting frame and is connected with one end of the direction adjusting arm to drive the direction adjusting arm to swing.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the direction adjusting frame is provided with a swinging seat, the direction adjusting arm is provided with a spherical joint, and the spherical joint is rotationally arranged in the swinging seat; one end of the direction-adjusting arm is provided with an installation claw, and the clamping part is detachably connected to the claw.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the swinging driving piece comprises a swinging arm and a rotating shaft, the swinging arm comprises a driving end connected with the rotating shaft and a rotating end sleeved on the steering arm, and a telescopic structure is arranged between the driving end and the rotating end.

As a preferable scheme of the optical coating pressing device of the invention, the optical coating pressing device comprises: the steering arm drive end with be equipped with the shaft coupling structure between the axis of rotation, the shaft coupling structure includes: the linkage groove is formed in one end, close to the rotating shaft, of the rotating shaft, the linkage head is formed in one end, close to the rotating shaft, of the steering arm, and when the telescopic structure is used for enabling the rotating end to coincide with the driving end, the linkage head enters the linkage groove.

The invention has the beneficial effects that: according to the optical coating pressing-in device, the positioning component with the clamping and direction adjusting functions is arranged in the vacuum chamber, so that multidirectional adjustment of the material with the coating is realized, and the coating requirement of a complex shape is met.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:

FIG. 1 is a schematic diagram of the whole structure of an optical coating pressing device;

FIG. 2 is a schematic view of the structure of the clamping member;

FIG. 3 is a schematic structural view of a steering component;

FIG. 4 is a schematic structural view of a coupling structure;

Detailed Description

In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present invention is not limited to the specific embodiments disclosed below.

Example 1

The embodiment provides an optical coating pressing device, the structure of which is shown in fig. 1 to 4, and the optical coating pressing device comprises a strengthening component, a sputtering component and a positioning component.

Wherein the chamber assembly 100 includes a vacuum chamber 110 formed by a vacuum enclosure 120 and a base for forming a vacuum environment for facilitating the injection of argon and oxygen to a desired ratio and vacuum. Providing an implementation environment for sputtering and deposition. The sputtering assembly is disposed within the vacuum chamber 110 and includes a plurality of magnetron guns 210, a target and a bias magnetic field 220. The positioning assembly is used for clamping and fixing a plating film workpiece and adjusting the direction, and comprises a clamping component 300 arranged in the vacuum chamber 110 and a direction adjusting component 400 for driving the clamping component 300 to adjust the direction, wherein the clamping component 300 comprises at least two clamping pieces 320, the clamping pieces 320 form a clamping area, and the clamping component 300 is connected with the direction adjusting component 400.

When the shape of the workpiece to be coated is irregular, the plurality of clamping members 320 in the clamping member 300 can adaptively adjust positions to stably clamp the workpiece to be coated.

According to the optical coating pressing-in device provided by the embodiment of the invention, the positioning assembly with the clamping and direction adjusting functions is arranged in the vacuum chamber 110, so that multidirectional adjustment of the material with the coating is realized, and the coating requirement of a complex shape is met.

Example 2

The embodiment provides an optical coating pressing device, which comprises a chamber assembly 100, a pressing device and a pressing device, wherein the chamber assembly comprises a vacuum chamber 110 formed by a vacuum cover 120 and a base; the sputtering component is arranged in the vacuum chamber 110 and comprises a plurality of magnetron guns 210, a target material and a bias magnetic field 220; the positioning assembly comprises a clamping component 300 arranged in the vacuum chamber 110 and a direction adjusting component 400 for driving the clamping component 300 to adjust the direction, wherein the clamping component 300 comprises at least two clamping pieces 320, the clamping pieces 320 form a clamping area, and the clamping component 300 is connected with the direction adjusting component 400.

As shown in fig. 1, the clamping member 300 in this embodiment is disposed in the center of the bias magnetic field 220, a baffle 130 is disposed between the positioning assembly and the bias magnetic field 220, and a through hole 131 for the clamping area is disposed in the middle of the baffle 130.

The sputtering apparatus introduces a gas such as Ar into the vacuum vessel and applies a high voltage to the target, thereby generating plasma. The phenomenon of charged particles in a discharge plasma sputtering the target is exploited to allow the target material to adhere to a substrate supported by a substrate holder. When cations in the plasma strike a target material having a negative potential, atoms and molecules in the target material are ejected from the target material. These atoms and molecules are commonly referred to as sputtered particles. The sputtered particles adhere to the substrate to form a film thereon containing the target material.

As shown in fig. 2, the clamping member 300 in this embodiment includes a synchronous driving member 310, and the clamping member 320 is movably disposed on the synchronous driving member 310, where the synchronous driving member 310 drives the clamping member 320 to approach or separate from the center of the clamping area.

By providing the synchronous driving member 310, the plurality of clamping members 320 can be simultaneously driven to simultaneously shrink inwards or expand outwards, thereby realizing automatic clamping.

Specifically, as shown in fig. 2, the synchronous driving member 310 in this embodiment includes an annular driving disc 311, and driving threads 311a are provided on the annular driving disc 311, and the clamping member 320 is provided on the annular driving disc 311 by a sliding block, and a plurality of sliding grooves 312a adapted to the driving threads 311a are formed on the sliding block. When the annular driving disk 311 rotates, the clamping member 320 is driven to linearly move in the radial direction under the restriction of the driving screw 311a. The inner diameter of the driving screw 311a is smaller than the outer diameter, so that the contraction or expansion of the clamping member 320 can be achieved when the annular driving disk 311 is rotated bi-directionally.

As shown in fig. 2, the driving screw 311a in the present embodiment is located on the upper surface of the annular driving disc 311, so that the bottom of the clamping member 320 contacts the upper surface of the annular driving disc 311, the sliding groove 312a is formed at the bottom of the clamping member 320, and in order to maintain stability, the bottom sliding groove 312a of the clamping member 320 is provided with a plurality of driving screw threads 311a, which can span across a plurality of driving screw threads.

Three clamping pieces 320 in this embodiment are distributed along the annular driving disc, wherein one clamping piece 320 is provided with a fixed clamping device 322, the other two clamping pieces 320 are provided with movable clamping devices 321, the movable clamping devices 321 are rotationally connected to the clamping pieces 320 through bolts, and the fixed clamping devices 322 and the movable clamping devices 321 are respectively provided with a clamping interface. The clamping interface is a notch which forms an inward angle. The movable clamp 321 can automatically adjust the angle according to the shape of the clamped workpiece, so as to ensure the clamping stability.

In order to further maintain the stability of the movement of the clamping member 320, as shown in fig. 2, the clamping member 300 in this embodiment further includes a guide sleeve 330, the synchronous driving member 310 and the clamping member 320 are both disposed in the guide sleeve 330, the guide sleeve 330 is radially provided with a guide channel 331, and the side wall of the sliding block is provided with a guide body 312b adapted to the guide channel 331.

As shown in fig. 3, the steering member 400 in the present embodiment includes a steering frame 410, a steering arm 420, and a swing driving member 430. Wherein the steering frame 410 is fixedly disposed within the vacuum chamber 110. The steering arm 420 is rotatably provided to the steering frame 410, and one end thereof is connected to the clamping member 300. The swing driving member 430 is fixedly connected to the steering frame 410, and is connected to one end of the steering arm 420 to drive the steering arm 420 to swing.

The clamping member 300 is integrally connected to one end of the direction adjusting member 400, and is integrally moved by the direction adjusting member 400. When the swing driving member 430 rotates, one end of the direction adjusting arm 420 is driven to move circularly, and the whole clamping member 300 at the other end also moves circularly, at this time, a rotation point is arranged in the middle of the adjusting arm, so that the movement of the clamping member 300 can be changed into spherical movement, and a plurality of angles of adjustment can be formed.

Therefore, as shown in fig. 3, the steering frame 410 in the present embodiment is provided with a swinging seat, the steering arm 420 is provided with a ball joint, and the ball joint is rotatably arranged in the swinging seat; the spherical joints are used as rotation points, so that spherical movement of the two ends of the adjusting arm can be realized. One end of the steering arm 420 is provided with a mounting jaw 422 to which the clamping member 300 is detachably connected. Specifically, the clamping member 300 in this embodiment is bolted to the jaws.

As an alternative, the jaws may also be provided as pneumatic jaws, and the clamping member 300 may be replaced directly.

As shown in fig. 3, the swing driving member 430 in the present embodiment includes a swing arm 431 and a rotation shaft 432, the swing arm 431 includes a driving end 431a connected to the rotation shaft 432, and a rotation end 431b sleeved on the direction-adjusting arm 420, and a telescopic structure 431c is provided between the driving end 431a and the rotation end 431 b.

The telescopic structure 431c can swing the distance between the rotating end 431b and the driving end 431a of the arm 431, so that the rotating diameter of the swing arm 431 can be adjusted, the rotation of the steering arm 420 can be changed, and the angle and the direction of the clamping component 300 can be adjusted greatly.

As shown in fig. 3, the rotating end 431b in the present embodiment is a hollow ring, the end of the steering arm 420 is a cylinder, a linear pair of movement is formed between the cylinder and the rotating end 431b, and the cylindrical shape allows the steering arm 420 to rotate.

The telescopic structure 431c comprises two sleeved telescopic arms, and the rotating end 431b and the driving end 431a are respectively connected to one telescopic arm. The inner wall of the telescopic structure 431c can be driven by an air cylinder or hydraulic pressure.

In order to enable the clamping member 300 to integrally rotate, as shown in fig. 4, a coupling structure 433 is provided between the steering arm 420, the driving end 431a, and the rotation shaft 432 in the present embodiment, and the coupling structure 433 includes: the linkage groove 433a and the linkage head 433b, the linkage groove 433a is opened on the one end that the axis of rotation 432 is close to the steering arm 420, and the linkage head 433b is formed on the one end that the steering arm 420 is close to the axis of rotation 432, and when the telescopic structure 431c overlaps the rotation end 431b and the driving end 431a, the linkage head 433b gets into the linkage groove 433 a.

In order to mount the coupling structure 433, the telescopic structure 431c in the present embodiment has a hollow cross-sectional shape, allowing the coupling head 433b to be coupled with the coupling groove 433 a. The linkage head 433b is flat, and can be driven to rotate by the rotation shaft 432 after entering the linkage groove 433 a.

It is important to note that the construction and arrangement of the present application as shown in a variety of different exemplary embodiments is illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperature, pressure, etc.), mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter described in this application. For example, elements shown as integrally formed may be constructed of multiple parts or elements, the position of elements may be reversed or otherwise varied, and the nature or number of discrete elements or positions may be altered or varied. Accordingly, all such modifications are intended to be included within the scope of present invention. The order or sequence of any process or method steps may be varied or re-sequenced according to alternative embodiments. In the claims, any means-plus-function clause is intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present inventions. Therefore, the invention is not limited to the specific embodiments, but extends to various modifications that nevertheless fall within the scope of the appended claims.

Furthermore, in an effort to provide a concise description of the exemplary embodiments, all features of an actual implementation may not be described (i.e., those not associated with the best mode presently contemplated for carrying out the invention, or those not associated with practicing the invention).

It should be appreciated that in the development of any such actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking of design, fabrication, and manufacture for those of ordinary skill having the benefit of this disclosure.

It should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present invention may be modified or substituted without departing from the spirit and scope of the technical solution of the present invention, which is intended to be covered in the scope of the claims of the present invention.

Claims

1. An optical coating pressing-in device is characterized in that: comprising the steps of (a) a step of,

a chamber assembly (100) comprising a vacuum chamber (110) formed by a vacuum enclosure (120) and a base;

the sputtering assembly is arranged in the vacuum chamber (110) and comprises a plurality of magnetron guns (210), a target material and a bias magnetic field (220);

the positioning assembly comprises a clamping component (300) arranged in the vacuum chamber (110) and a direction adjusting component (400) for driving the clamping component (300) to adjust direction, the clamping component (300) comprises at least two clamping pieces (320), the clamping pieces (320) form a clamping area, and the clamping component (300) is connected with the direction adjusting component (400);

the clamping component (300) is arranged in the center of the bias magnetic field (220), a baffle plate (130) is arranged between the positioning component and the bias magnetic field (220), and a through hole (131) aiming at the clamping area is reserved in the middle of the baffle plate (130);

the clamping component (300) comprises a synchronous driving piece (310), the clamping piece (320) is movably arranged on the synchronous driving piece (310), and the synchronous driving piece (310) drives the clamping piece (320) to approach or depart from the center of the clamping area;

the synchronous driving piece (310) comprises an annular driving disc (311), driving threads (311 a) are arranged on the annular driving disc (311), the clamping piece (320) is arranged on the annular driving disc (311) through a sliding block (312), and a plurality of sliding grooves (312 a) matched with the driving threads (311 a) are formed in the sliding block (312); after the annular driving disc (311) rotates, the sliding block (312) is driven to linearly move along the radial direction;

at least three clamping pieces (320) are distributed along the annular driving disc, wherein at least one clamping piece (320) is provided with a fixed clamping device (322), at least one clamping piece (320) is provided with a movable clamping device (321), the movable clamping device (321) is rotationally connected to the clamping piece (320) through a bolt, and clamping interfaces are respectively arranged on the fixed clamping device (322) and the movable clamping device (321);

the clamping part (300) further comprises a guide sleeve (330), the synchronous driving piece (310) and the clamping piece (320) are both arranged in the guide sleeve (330), the guide sleeve (330) is provided with a guide channel (331) along the radial direction, and the side wall of the sliding block (312) is provided with a guide body (312 b) matched with the guide channel (331);

the direction-adjusting component (400) comprises,

a direction-adjusting frame (410) fixedly arranged in the vacuum chamber (110);

a direction adjusting arm (420) rotatably provided to the direction adjusting frame (410), one end of which is connected to the clamping member (300);

the swinging driving piece (430) is fixedly connected to the direction adjusting frame (410) and is connected with one end of the direction adjusting arm (420) to drive the direction adjusting arm (420) to swing;

the steering frame (410) is provided with a swinging seat, the steering arm (420) is provided with a spherical joint, and the spherical joint is rotationally arranged in the swinging seat; one end of the direction-adjusting arm (420) is provided with an installation claw (422), and the clamping component (300) is detachably connected to the claw;

the swing driving piece (430) comprises a swing arm (431) and a rotating shaft (432), the swing arm (431) comprises a driving end (431 a) connected to the rotating shaft (432), and a rotating end (431 b) sleeved on the direction-adjusting arm (420), and a telescopic structure (431 c) is arranged between the driving end (431 a) and the rotating end (431 b);

a coupling structure (433) is arranged between the steering arm (420) and the driving end (431 a) and the rotating shaft (432), and the coupling structure (433) comprises: linkage groove (433 a) and linkage head (433 b), linkage groove (433 a) set up in axis of rotation (432) are close to on the one end of adjusting to arm (420), linkage head (433 b) shaping in adjust to arm (420) be close to on the one end of axis of rotation (432), when extending structure (431 c) will rotate end (431 b) with drive end (431 a) coincide, linkage head (433 b) get into in linkage groove (433 a).