CN113366148B - 用于对涂覆和未涂覆的超高强度钢制钣金进行压制硬化的高性能工具涂层 - Google Patents
用于对涂覆和未涂覆的超高强度钢制钣金进行压制硬化的高性能工具涂层 Download PDFInfo
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- CN113366148B CN113366148B CN202080012026.1A CN202080012026A CN113366148B CN 113366148 B CN113366148 B CN 113366148B CN 202080012026 A CN202080012026 A CN 202080012026A CN 113366148 B CN113366148 B CN 113366148B
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Abstract
一种用于对涂覆钣金或未涂覆钣金,尤其是对AlSi涂覆或Zn涂覆钣金[KM2]进行热冲压的涂覆工具,包括要与涂覆钣金或未涂覆钣金接触的涂覆基材面,其中,涂覆基材面的涂层是复层涂层,该复层涂层包括一个或多个下层和一个或多个上层,其中,该下层是以比上层更靠近基材面的方式来沉积的,其中,该下层被设计用于提供承载能力,该上层被设计用于提供耐粘连磨损性,所沉积的至少一个上层(层5)具有由类型A、B和C的子层形成的纳米复层结构,这三种子层是相互交替堆叠沉积的纳米层,形成类型为…A/B/C/A/B/C/A…的序列,其中,至少两个包含各一个A纳米层、B纳米层和C纳米层的序列被沉积,形成纳米复层结构,其中,类型A的纳米层按照至少90原子%由铬和氮组成,类型B的纳米层按照至少90原子%由钛、铝和氮组成,类型C的纳米层按照至少90原子%由钒、碳和氮组成,并且所述至少一个上层(层5)的层厚不小于0.5微米且不大于15微米。
Description
技术领域
本发明涉及一种待施加在工具尤其是成形工具(在本文中也称为模具)的表面上的涂层,该工具被用于对AlSi涂覆或Zn涂覆和未涂覆的钣金进行压制硬化(也称为热冲压),钣金例如是超高强度钢(UHSS),其最常见类型是22MnB5 USIBOR。在此文献内,世界汽车钢联盟规格被用于限定不同的钢种例如UHSS、AHSS或者LSS。所述文献采用冶金类型、最低屈服强度(MPa)和最低抗拉强度(MPa)来鉴别不同的钢种。通常,屈服强度水平超过550MPa且抗拉强度超过780MPa的钢被称为UHSS。成形工具是使工件具有预先规定的外形或轮廓的刀具或机器配件,由此,工件被改变形状而未添加或去除材料,其重量保持不变。此外,本发明涉及一种将本发明的涂层施加至基材的方法。
背景技术
先进高强度钢(AHSS)和UHSS在汽车业中的应用在过去几十年里稳步增长。AHSS是包含除铁素体、珠光体或渗碳体外如马氏体、贝氏体、奥氏体和/或残余奥氏体(其量足以产生独特的机械性能)等微结构相的高强度钢种。大多数AHSS具有复相微观结构,并且其屈服强度水平一般超过550MPa。在轿车构件制造中(例如在所谓的白车身(BIW)或底盘中)使用这种类型的钢导致了轿车总重明显减轻,因为在此情况下上述构件可以在保持高强度水平的同时使用更薄的钣金来制造。一个显著优点是制造出的轿车更省油且同时在发生事故的情况下更安全,因为UHSS相比于低强度钢(LSS)具有高许多的冲击能吸收性能。LSS是显示出低于270MPa的抗拉强度的钢种,例如无间隙原子钢和低碳钢。
但是,所述UHSS和AHSS钣金的成形是挑战性的,导致成形模具的严重磨损,特别是模具的连续磨蚀磨损和/或粘着磨损,例如导致材料从钣金大量转移至模具表面。在这两种情况下,制造构件的质量受到显著影响。为了保持制造构件的质量,成形模具需要频繁的维护间隔期。在模具内的疲劳裂纹的生成和生长可能显著缩短昂贵模具的使用寿命。这导致更低的生产率和昂贵的生产成本。
在使用冷成形过程的情况下,一种将模具损伤减至最低程度的方式是采用不同的表面处理,这能改善成形模具的性能。其中一种最常见且工业实用的技术是采用不同的氮化方法例如等离子体或低压氮化来硬化该工具表面。这是通过使氮扩散到钢的次表面区来完成的,获得改善的耐磨蚀磨损性,并且在许多情况下也产生改善的耐粘着磨损性。此外,通过对表面施以压缩应力,耐疲劳开裂性能被增强。压缩应力的出现是因为热作用以及由氮和/或碳输入而造成的体积变化。作为替代解决方案,已经研发出且在工业中采用了基于氮化物、碳化物、氧化物或其组合的若干坚硬耐磨涂层。通过单独使用这些涂层或与氮化解决方案结合使用这些涂层,可以显著增强在冷成形中所用的成形模具的性能,例如针对未涂覆的HSS钣金和UHSS钣金或要获得的总强度不太高(如低于1000MPa)的钣金。
瑞典公司Plannja提出一种被称为压制硬化或热冲压的成形过程,其能够被用于例如涂覆板材的成形或一般板材成形,此时要获得的总强度高于1000MPa(如在1000MPa和2000MPa之间,或在1250MPa和2000MPa之间)。在这种成形过程中,灼热钢板在同一模具中被同时成形和淬火。包含淬火步骤在内的整个成形过程在几秒如8~12秒内完成。热成形产品零件的这种快速淬火导致形成马氏体结构,显示出高达2000MPa的总强度。过去几年中,这种压制硬化钢(PHS)零件用在汽车行业中的应用,例如像A柱和B柱、保险杠、车顶和门槛条、门洞等,从1987年的3百万显著增加到2015年的250百万。
使用热冲压过程相比于冷成形过程的优点包括:
-消除在冷冲压AHSS板中常见的反弹,
-一步成形过程,
-PHS零件因为使用低碳合金而具有出色的可焊性。
为了避免PHS零件腐蚀,板材通常在执行热冲压过程前被施以AlSi涂层或Zn涂层。
但当采用此过程时出现某些困难。在热冲压过程中的模具粘着和磨蚀磨损水平显著高于在冷成形过程中出现的水平。原因是约800℃高成形温度以及很高的大于27度/秒的淬火速率。它意味着,板材经历了很快速的温度变化(例如在约20秒或更短时间内从约800℃或更高的温度改变至约150℃温度),同时在此温度变化过程中板材与用于成形的模具(成形工具)保持接触。高成形温度被认为导致模具与涂覆板材(如USIBOR板)的半熔AlSi涂层或Zn涂层之间的接触,导致了从板至模具表面的大量材料转移。还有,高淬火速率导致在制成零件表面上形成很硬的AlSiFeO层,这造成模具的磨蚀磨损。在热冲压过程中的涂覆模具的另一常见失效模式是被称为粘连的过程。粘连是一种由滑动面之间粘着造成的磨损。当材料粘连时,其中一些材料随着接触面被拉拽,尤其当有大的力共同压缩所述表面时。粘连的起因是表面之间的摩擦连带附着,随后是晶体结构的滑移和撕裂。粘连首先导致材料积聚在成形工具上,最终导致积聚材料的脱离,包括成形工具的部分、例如涂层部分在内。
待解决问题
人们需要找到一种用于执行热冲压过程且避免成形工具失效的解决方案,这充分增强了成形工具在高达800℃或更高的温度,尤其是超过700℃的温度时的耐磨蚀和粘着磨损性能。增强在某个温度范围耐磨蚀磨损性的涂层确实存在,因此增强在特定温度范围内耐粘着磨损性的涂层也是如此。但是,很难找到一种涂层来针对高达800℃甚至更高的温度,尤其是超过700℃的温度具有高的耐磨蚀和粘着磨损性能。
发明目的
本发明的目的是提供用于增强热冲压用成形工具的性能并由此延长工具使用寿命的解决方案,尤其是针对被用在AlSi涂覆和Zn涂覆或未涂覆板材(例如USIBOR板)的热冲压中的成形工具。
根据本发明的问题解决方案——发明内容
本发明提出一种用于涂覆如权利要求1所述的旨在用在热成形过程中的成形工具的涂层。
本发明披露一种待施加至用作成形工具的基材例如像钢基材(但不限于此)的涂层体系,其提供增强的耐粘着和磨蚀磨损性,其尤其适用于压制硬化过程。本发明的涂层体系是复层体系。它包括至少一个含CrN、TiAlN和VCN(但不限于此)的上层(以下也称为顶纳米复层或顶层或如图1和图5所示的层5)。所述顶层的特点是相比于氮含量的最低碳含量,此时将整个层范围内的碳和氮含量分布纳入考量。此顶层主要旨在提供耐粘连磨损性。本发明的涂层体系可包含多个附加层,尤其是至少一个用于提供所需承载能力的层,所述承载能力是在热冲压过程中的成形和淬火步骤中抵抗机械载荷连带热冲击所需要的。
通常可以在涂层中提供其它层来进一步改善不同涂层性能,例如与基材的粘着、在涂层结构内的内聚性、硬度(HIT)和弹性模量(EIT)。另外,该涂层应当耐受一般将在如上所述的热成形过程中所遇到的温度。因此,按照一般出现于热冲压过程中的如在各不同测试中示出的温度(在800℃和950℃之间的温度)执行某些测试。
本发明的涂层体系优选可以利用PVD方法例如像阴极电弧溅射或磁控溅射来沉积。
附图说明
图1:本发明的涂层体系的一个实施例的示意图
图2:用于沉积本发明的涂层体系的一个实施例的可能方法的示意图
图3:左:通过BSE所拍摄的本发明涂层的电子扫描显微镜(SEM)的显微照片
右:本发明涂层的镜头内(InLens)探测器SEM显微照片
图4:PVD涂覆球在整个高温SRV测试中如何在USIBOR板顶部的AlSi层内振动的示意图
本发明的实现方式
提出一种要施加至在压制硬化中所用的成型工具的本发明的涂层体系。所述涂层可以是单层或复层涂层,其随后被沉积在与成形工具和成形件相关的基材表面、如钢基材的表面上。本发明的涂层体系包括至少一个层(本文中称之为顶层或层5)。
顶层本身(图1中的层5)是复层(也称为顶复层),优选是纳米复层体系(在本发明的说明书范围内也称为顶层叠)。顶层叠由至少三个不同类型的层制成,例如沉积形成序列…A/B/C/A/B/C/A…的A类型层、B类型层和C类型层。
根据本发明的一个优选实施例,顶层叠是由主要包含氮化铬或由氮化铬CrN组成的A类型层、主要包含钛铝氮化物或由钛铝氮化物TiAlN组成的B类型层和主要包含碳氮化钒或由碳氮化钒组成的C类型层沉积形成的。
通过使用本发明的具有包含CrN层、TiAlN层和VCN层的顶层叠的涂层而获得尤其好的结果。
于是,顶层叠优选设计成具有分别由CrN、TiAlN和VCN构成的层A、B和C。
在这样的情况下,顶层叠的最靠近基材的层优选是包含CrN的层,随后是包含TiAlN的层,再随后是包含VCN的层。
但本发明不应理解为受限于在此所述的优选实施例。
本发明的涂层体系的顶层叠应当包括至少一个层组。在本发明的上下文中的层组应该被理解为由三个单层形成的序列:依次沉积的各一个A层、B层和C层。
重要的是注意到,通过如上所述地依次沉积单层A、B和C,可以在两个相互接触地沉积的单层之间形成界面。这种在两个单层之间的界面可以包含两个单层二者的元素。例如可以通过在A层上沉积B层而形成一种在相应A层和B层之间的界面层,其包含来自A层以及来自B层的元素。它将取决于用于顶层叠沉积的涂覆过程类型。
优选地且尤其优选地,在单层A、B和C的厚度处于纳米范围内的情况下,顶层叠应该含有更多的层组,一般是25至600个层。顶层叠的总涂层厚度应该在0.5微米至12微米的范围内,优选在2微米至7微米之间。
发明人发现了,本发明的包含该顶层的涂层在耐磨蚀和粘着磨损性方面显示出很好的特性。另外,发明人观察到了,该顶层的成分对于就抵抗从USIBOR板顶部的AlSi层或Zn层至工具表面的材料转移而言达成最佳性能是极其重要的。在此意义上,在防结瘤性和最大耐磨蚀磨损性两者共存情况下确定碳含量。
为了改善顶层与成形工具基材之间的粘着,粘着层(在本文中被称为层1)可以被沉积到基材上。所述粘着层包含CrN,优选由CrN组成。它优选是单层,其被直接沉积到基材上。含CrN的层的厚度在100纳米至3微米之间,优选被选为在300纳米至1.5微米之间。
通过沉积含CrN和TiAlN的附加层,本发明的涂层体系的性能甚至可被进一步改善。所述层(在本文内被称为层2,或第二复层,见图1)是复层,其也可以是纳米复层体系(在本文中被称为CrN/TiAlN叠)。CrN/TiAlN叠优选被沉积在层1上,或者它也可以被直接沉积在基材表面。优选如此沉积层2,即,以含CrN且优选由CrN组成的层开始沉积。在所述含CrN的层上方,另一个含TiAlN的层被沉积。所述含TiAlN的层优选由TiAlN组成。CrN/TiAlN叠可以包括一个或多个由两层(一层由CrN组成,一层由TiAlN组成)组成的层组。
换言之,CrN/TiAlN叠包括至少一个CrN/TiAlN层组,但不限于一个CrN/TiAlN层组。优选地,5到130个层组被沉积以形成含CrN和TiAlN的层(层2)。层2的厚度范围可以为150纳米至4微米,优选被选为600纳米至3微米。已知该层显示出良好的承载能力(它意味着承受施加于基材的载荷的能力)。
发明人发现了,本发明的不仅包含层5,也包含如上所述的层1和2的涂层非常适用于冲压过程。如此涂覆的成形工具能够在冲压过程中相比于现有技术的涂层总体上显示出良好的耐磨性。
涂层的耐磨蚀和粘着磨损性可以通过增加另外两个层(在本文中被称为层3或第三复层以及层4或第四复层)至该体系而甚至被进一步改善。出乎意料地,发明人发现了,在本体系中优选增加含V的层(层3)并将其沉积到层2上。
层3是纳米层体系(在本文中被称为CrN/TiAlN/VN叠),至少包含CrN、TiAlN和VN。CrN/TiAlN/VN叠包括若干由三个层组成的层组,它们相互层叠沉积(见图1)。所述至少三层中,含CrN的层最靠近基材。该层优选由CrN组成。在此层上方,含TiAlN的层被沉积,其优选由TiAlN组成。在此层上方,含VN的层被沉积,其优选由VN组成。为了形成本发明的涂层体系,至少一个组被用来形成层3。但这不是限制性的。一般,4到80个组被沉积以形成含CrN、TiAlN和VN的层。所述层的厚度的范围可以是20纳米至4微米,优选被选为800纳米至3微米。
层4也是多层体系,其像层3那样来形成,但碳被逐渐增加以将VN层改变为VCN层,意味着在层4的下侧部分,该层显示出低碳含量;而在层4的上侧部分,该层显示出高碳含量。发明人发现了,耐磨性的进一步改善可以通过在层3与层5之间添加这种层来获得。
层4是纳米层体系(在本文中称为CrN/TiAlN/VN叠),至少包含CrN、TiAlN和VN,其中,碳被逐渐增加以将VN层改变为VCN层。CrN/TiAlN/VCN叠包括若干由三个层组成的层组,它们被相互层叠沉积(见图1)。所述至少三层中,含CrN的层最靠近基材。该层优选由CrN组成。在此层上方沉积有包含TiAlN的层,该层优选由TiAlN组成。在此层上方沉积有包含VCN的层,该层优选由VCN组成。为了形成本发明的涂层体系,至少一个组被用来形成层3。但这不是限制性的。一般,4到80个组被沉积以形成含CrN、TiAlN和VCN的层。所述层的厚度的范围可以为20纳米至4微米,优选被选为800纳米至3微米。
发明人也观察到了,当成形工具的基材被预先氮化时,本发明的涂层最佳起效。氮化过程可以在共同的沉积室内进行或在单独的沉积室内进行。
为了说明本发明的涂层体系的形成,现在将通过实施例来说明。将举例说明本发明的实施例,这意味着仅是示例性的且因此是非限制性的。
根据如图1所示的本发明的一个优选实施例,多层体系由五个不同的层组成,它们被沉积在成形工具的基材上。CrN层(在此实施例中被称为层1)被直接沉积在基材上。在层1上方,由CrN和TiAlN组成的层(在此实施例中被称为层2)被沉积。在层2上方,由CrN、TiAlN和VN组成的层(在此实施例中被称为层3)被沉积。在层3上方,由CrN、TiAlN和VCN组成且具有梯度碳含量分布的层(在此实施例中被称为层4)被沉积在层3上。顶层(在此实施例中被称为层5)由CrN、TiAlN和VCN组成,碳含量在整个层范围内是恒定的。在此实施例中所描述的涂层的总厚度的范围可以为4微米至20微米。
层4和5的涂层厚度之和优选占到总涂层厚度的40%至50%,但不限于此数量。如可以看到地,层4和5是氮化碳层。
层4是从纯氮化物层(第三层)至氮化碳层(第五层)的过渡层。因此随着层4至基材的距离增大,在层4厚度的范围内,碳水平提高且氮水平降低。与此相关,层4是化合物(CraTibAlcVd)λ(CxNy)δ,其中,x和y优选被如下调节:0≤x≤0.33并且0.67≤y≤1。金属(即Cr、Ti、Al和V的含量总和)与非金属(即C和N的含量总和)之比优选被选为0.72≤λ/δ≤1.27。各个金属元素Cr、Ti、Al和V的含量也优选被如下调节:0.20≤a≤0.30,0.05≤b≤0.15,0.15≤c≤0.25和0.40≤d≤0.50,在此,a+b+c+d=1,优选的是0.20≤a≤0.30,b=0.10,c=0.20并且0.40≤d≤0.50,此时,a+b+c+d=1。
层5是氮化碳化合物,其具有恒定成分(CraTibAlcVd)λ(CxNy)δ,此时,0.4≤x/y≤0.6并且0.65≤λ/δ≤1.1,优选的是x/y=0.5,并且λ/δ=0.72。各个金属元素Cr、Ti、Al和V的含量被选择如下:0.20≤a≤0.30,0.05≤b≤0.15,0.15≤c≤0.25和0.40≤d≤0.50,优选的是a=0.20,b=0.10,c=0.20并且d=0.50。
层1、2和3是氮化物化合物层。这些层是按化学当量的氮化物,其金属与非金属之比为1。
为了沉积在此实施例中所述的涂层体系,三种不同的靶材Cr、TiAl、V被用在Oerlikon Balzers INNOVA沉积室内,如图2所示。除了Cr和V元素靶材外,TiAl靶是粉末冶金制备的,以显示出约为2的Al与Ti重量比。为了制造层1~3,在该室内有纯氮气。在过渡至层4时,乙炔气被附加吹入室内。乙炔流被逐渐增加,同时氮气水平保持恒定。因为乙炔气表现出很高的反应性,故该气体应当以尽可能靠近待涂覆基材的方式被输入所述室。因为目的是要在涂层中产生高碳含量,故紧邻基材地释放乙炔气。同样的情况将适用于氧,其也表现出高反应性。但所述情况对于氮是不同的,氮可被输入该室内而没有这样的专门布置,因为其反应性不如乙炔气。所述方法产生了作为纯氮化物开始且作为碳氮化物结束的梯度层4。乙炔气流在整个层5范围内都保持恒定,因此形成具有恒定成分的氮化碳层作为顶层。为了形成具有期望结构和性能的涂层,在前三层中都采用60伏基材负偏电压。基材负偏电压在梯度层4中被提高到100伏。它在层5范围内恒定保持在-100伏。
在本发明的范围内,在此实施例中所描述的涂层解决方案的性能和结构被测试。利用传统方法以及镜头内(InLens)方法所拍摄的电子扫描显微镜(SEM)显微照片在图3中被示出。在底层1,即致密的无特征CrN层的上方,沉积有CrN/TiAlN纳米层。所述层的硬度(HIT)和弹性模量(EIT)被分别测定为约27GPa和300GPa。此纳米层的双层周期被测定为35纳米。在层3中,CrN/TiAlN/VN纳米层被沉积。该层的机械性能被测定为29GPa的HIT和340GPa的EIT。所有三个纳米层的总厚度被估计为55纳米。最后,含碳顶层4和5分别具有24GPa和250GPa的HIT和EIT。由于在这两个层中存在碳,形成纳米层结构的细化,以致三个CrN/TiAlN/VCN的厚度减小至一半约22nm。
涂层的粘着磨损(被定义为AlSi或Zn从涂覆USIBOR板至PVD涂层表面的转移和累积)耐抗性利用创新测试法在SRV测试仪中在约730℃高温来测量。在这个创新方法中,具有10毫米直径的100Cr6金属球涂覆有本发明的PVD涂层。作为对应件,按照21毫米直径被切割的圆形AlSi涂覆USIBOR板被固定在高温适用的支架中。USIBOR板随后通过与板架接触的电阻加热台被加热。相比于SRV测试仪的900℃设定点温度,在灼热的USIBOR板上的温度通过副热电偶被测定为730℃。在USIBOR板上所达到的730℃温度足够高,使得AlSi层达到与在工业应用中的真实做法相符且适于耐结瘤性研究的半液体水平。为了呈现AlSi-USIBOR热冲压应用场合的真实状况,例如在球与USIBOR板之间的接触时间、对球所施加的竖向力及其振动频率等测试参数被如此调节,即,其保证了涂覆球总是在AlSi层厚度范围内而未触及下层的22MnB5钢。为了满足所述要求,使用10牛顿的竖向力。在涂覆球与AlSi涂覆USIBOR板之间的接触时间被设定至在下一轮开始前1分钟。所做测试的示意图在图4中被示出。这样做是为了模拟涂覆工具与一件新钣金在真实的热冲压应用场合中的接触。通过利用3D共焦纳米聚焦显微镜来测量在任何期望的PVD涂层上的AlSi结瘤的体积和重量,达成对该涂层的耐结瘤性的定量和定型评估。根据被测涂层的性能,此过程可以在涂覆球上的同一位点处被重复达到20次,随后是纳米聚焦显微镜测量。利用此独特测量方法,相比于通过相同的PVD方法所沉积的传统现有技术的AlCrN和TiAlN涂层,本发明的涂层表现出小了一个数量级的结瘤体积。
涂层的耐磨蚀磨损性通过使用销盘式高温测试仪来测量。在此测试中所达到的最高温度为800℃。就此而言,本发明的PVD涂层被施加到圆形的因科镍合金件上,其适用于高温测量。在达到该温度时,由氧化铝制成的具有6毫米直径的磨料球将会接触到PVD涂覆因科镍合金样本。球的线性速度及其接触涂覆样本的总接触时间分别为2.64厘米/秒和10分钟。最后,通过使用3D共焦纳米聚焦显微镜来测量跑道剖面,达成对期望的PVD涂层上所出现的磨损的测量。
一种具有用于提供增强的耐磨蚀和粘着磨损性的涂层的涂覆基材,其中,该涂层所具有的复层结构包含作为顶复层来沉积的复层,其特点是,该顶复层是由若干类型为A、B和C的子层形成的,所述三种子层被交替堆叠沉积,形成类型为…A/B/C/A/B/C/A…的序列,其特征是,
-A类型的子层是氮化铬层,
-B类型的子层是钛铝氮化物层,
-C类型的子层是碳氮化钒层。
根据以上语句的涂覆基材的特点是该基材是成形工具。
Claims (17)
1.一种用于对涂覆钣金或未涂覆钣金进行热冲压的涂覆工具,包括要与所述涂覆钣金或所述未涂覆钣金接触的涂覆基材面,其中,该涂覆基材面的涂层是复层涂层,该复层涂层包括一个或多个下层,该复层涂层包括一个或多个上层,其中,所述下层是以比所述上层更靠近基材面的方式来沉积的,并且所述一个或多个上层包括顶层,
其特征是,
-所述下层被设计用于提供承载能力,
-所述上层被设计用于提供耐粘连磨损性,
-所沉积的顶层具有由类型A、B和C的三种子层形成的纳米复层结构,所述三种子层是相互交替堆叠沉积的纳米层,形成类型为…A/B/C/A/B/C/A…的序列,其中,至少两个由各一个A纳米层、B纳米层和C纳米层组成的序列被沉积,形成所述纳米复层结构,
-其中,所述类型A的纳米层按照至少90原子%由铬和氮组成,
-所述类型B的纳米层按照至少90原子%由钛、铝和氮组成,
-所述类型C的纳米层按照至少90原子%由钒、碳和氮组成,
并且
-所述顶层的层厚不小于0.5微米且不大于15微米。
2.根据权利要求1所述的涂覆工具,其特征是,形成单个序列的三个纳米层A、B和C的层厚之和在15纳米至300纳米之间。
3.根据权利要求1所述的涂覆工具,其特征是,在所述顶层中,当考虑按原子百分比由(CraTibAlcVd)λ(CxNy)δ表述的平均化学元素成分时,碳含量分数x与氮含量分数y的平均比在0.4≤x/y≤0.6范围内,其中,该平均化学元素成分是通过考虑至少100纳米的层厚范围而测得的,此时系数a、b、c和d分别按照0.20≤a≤0.30、0.05≤b≤0.15、0.15≤c≤0.25和0.40≤d≤0.50的范围对应于Cr、Ti、Al、V、C和N的成分分数,在此,a+b+c+d=1并且x+y=1,并且系数λ和δ是用于指示化学当量的系数,其中,0.72≤λ/δ≤1.27。
4.根据权利要求3所述的涂覆工具,其特征是,在所述顶层中,碳含量分数与氮含量分数的平均比x/y能够被认为是恒定的,因为在所述顶层的整个厚度范围内,偏差小于最大值的10%。
5.根据权利要求1所述的涂覆工具,其特征是,在两个彼此接触沉积的子层之间形成界面,其中,该界面包含所述两个子层二者的元素。
6.根据权利要求1所述的涂覆工具,其特征是,所述顶层是顶复层,该顶复层包含25层至600层,并且其中,该顶层的总涂层厚度在0.5微米至12微米的范围内。
7.根据权利要求6所述的涂覆工具,其特征是,所述一个或多个下层包括沉积到该基材上介于该顶层与该基材之间的粘着层,并且其中,该粘着层包含CrN。
8.根据权利要求7所述的涂覆工具,其特征是,第二复层被沉积到该基材上,介于该顶层与所述粘着层之间,其中,该第二复层包含CrN和TiAlN。
9.根据权利要求8所述的涂覆工具,其特征是,该第二复层包含5至130个层组,该层组分别由一个由CrN组成的层与一个由TiAlN组成的层形成,并且其中,该第二复层的厚度的范围为150纳米至4微米。
10.根据权利要求8所述的涂覆工具,其特征是,第三复层被沉积在该第二复层上方,并且其中,该第三复层是至少包括CrN、TiAlN和VN的纳米层体系。
11.根据权利要求10所述的涂覆工具,其特征是,该第三复层包含4至80个层组,以形成所述包含CrN、TiAlN和VN的第三复层,其中,该第三复层厚度的范围为20纳米至4微米。
12.根据权利要求10所述的涂覆工具,其特征是,第四层被沉积在该第三复层上方,并且其中,该第四层是在氮化物层至碳氮化物层之间的过渡层,其中,随着该第四层距该基材的距离增大,在该第四层的厚度范围内,碳水平提高和氮水平降低。
13.根据权利要求12所述的涂覆工具,其特征是,该第四层是化合物(CraTibAlcVd)λ(CxNy)δ,其中,x和y被如下调节:0≤x≤0.33并且0.67≤y≤1,其中,Cr、Ti、Al和V的含量总和与C和N的含量总和之比被选择为0.72≤λ/δ≤1.27,其中,各个金属元素Cr、Ti、Al和V的含量被如下调节:0.20≤a≤0.30,0.05≤b≤0.15,0.15≤c≤0.25和0.40≤d≤0.50,在此,a+b+c+d=1。
14.根据权利要求13所述的涂覆工具,其特征是,该顶层是具有恒定成分(CraTibAlcVd)λ(CxNy)δ的碳氮化物化合物,在此,0.4≤x/y≤0.6并且0.65≤λ/δ≤1.1,其中,各个金属元素Cr、Ti、Al和V的含量被选择如下:0.20≤a≤0.30,0.05≤b≤0.15,0.15≤c≤0.25并且0.40≤d≤0.50。
15.一种用于涂覆根据权利要求1所述的涂覆工具的方法,其特征是,包括利用PVD方法涂覆该涂覆工具。
16.根据权利要求15所述的方法,其特征是,利用阴极电弧溅射或磁控溅射涂覆该涂覆工具。
17.根据权利要求15所述的方法,其特征是,包括在涂覆过程中执行以下步骤:
-在沉积室内预先氮化该基材,
-在制造所述一个或多个下层时,纯氮气存在于该沉积室内,其中,采用60伏的基材负偏电压,
-在所述一个或多个下层与所述顶层之间制造上层时,乙炔气被附加吹入该沉积室,其中,在氮气水平保持恒定的同时乙炔流被逐渐增强,其中,基材负偏电压从60伏增大至100伏,和
-在该顶层的整个范围内都保持恒定的乙炔气流,从而形成具有恒定成分的碳氮化物层作为该顶层,其中,100伏的基材负偏电压保持恒定。
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JP2022518955A (ja) | 2022-03-17 |
MX2021009078A (es) | 2021-09-08 |
EP3918109A1 (en) | 2021-12-08 |
US11643717B2 (en) | 2023-05-09 |
CN113366148A (zh) | 2021-09-07 |
KR20210123317A (ko) | 2021-10-13 |
BR112021014871A2 (pt) | 2021-10-05 |
WO2020157332A1 (en) | 2020-08-06 |
CA3127269A1 (en) | 2020-08-06 |
US20220106677A1 (en) | 2022-04-07 |
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