CN113352236B - Pressure control device and pressure control method - Google Patents
Pressure control device and pressure control method Download PDFInfo
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- CN113352236B CN113352236B CN202110719959.0A CN202110719959A CN113352236B CN 113352236 B CN113352236 B CN 113352236B CN 202110719959 A CN202110719959 A CN 202110719959A CN 113352236 B CN113352236 B CN 113352236B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
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Abstract
The application discloses a pressure control device and a pressure control method, wherein the device comprises: the controller sends a drive signal to the drive mechanism; the driving mechanism provides a driving force in a vertical direction to the transmission mechanism based on the driving signal, so that the transmission mechanism moves in the vertical direction; the transmission mechanism is connected to the floating mechanism, and transmits the driving force provided by the driving mechanism to the floating mechanism, so that the floating mechanism applies pressure to a workpiece to be processed in the vertical direction; the pressure sensor measures an actual pressure value applied to the workpiece to be processed and sends the measured actual pressure value to the controller; the controller determines a movement displacement of the transmission mechanism and controls the driving mechanism to act based on the movement displacement and the actual pressure value. By the pressure control device and the pressure control method, the accuracy of the pressure applied to the wafer in the processing process can be effectively ensured.
Description
Technical Field
The present application relates to the field of pressure control technologies, and in particular, to a pressure control device and a pressure control method.
Background
In the control system of the wafer double-sided polishing machine, a pressure sensor is a key for ensuring the processing quality of the wafer. During polishing, because of the high effect on wafer processing, pressure sensors are required to ensure the accuracy of the pressure applied to the wafer during processing. It can be seen that the pressure sensor directly affects the surface quality and yield of the finished wafer.
Disclosure of Invention
An object of the embodiment of the application is to provide a pressure control device and a pressure control method, which solve the problem that the pressure applied to a polishing object by a traditional pressure sensor instrument is not accurate enough by performing pressure measurement in real time and adjusting the pressure applied to the polishing object in real time according to an obtained pressure measurement result.
In order to achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:
in a first aspect, an embodiment of the present application proposes a pressure control device, including: the device comprises a driving mechanism, a transmission mechanism, a floating mechanism, a pressure sensor and a controller;
the controller sends a driving signal to the driving mechanism;
the driving mechanism provides a driving force in the vertical direction for the transmission mechanism based on the driving signal, so that the transmission mechanism moves in the vertical direction;
the transmission mechanism is connected to the floating mechanism, and transmits the driving force provided by the driving mechanism to the floating mechanism, so that the floating mechanism applies pressure to the workpiece to be processed in the vertical direction;
the pressure sensor measures an actual pressure value applied to the workpiece to be processed and sends the measured actual pressure value to the controller;
the controller determines the movement displacement of the transmission mechanism and controls the action of the driving mechanism based on the movement displacement and the actual pressure value.
Optionally, the drive mechanism comprises: the servo motor, the lead screw and the lead screw nut;
the servo motor is connected to the screw rod to provide driving force for the screw rod based on the driving signal;
the screw nut is arranged on the screw, and is also connected to the transmission mechanism, and the driving force provided by the servo motor is transmitted to the transmission mechanism so as to drive the transmission mechanism to move in the vertical direction.
Optionally, the transmission mechanism comprises: a slide block and a transmission rod;
one end of the transmission rod is connected to the screw nut, the other end of the transmission rod is connected to the floating mechanism, and the sliding block is arranged at one end of the transmission rod;
the transmission rod moves based on the driving force transmitted by the screw nut so as to drive the sliding block to move in the vertical direction.
Optionally, an encoder of the servo motor measures a movement displacement of the transmission mechanism and sends the measured movement displacement to the controller;
optionally, the pressure control device further comprises: the first limit sensor, the second limit sensor and the limit shading sheet;
the first limit sensor is arranged at the upper limit position of the travel of the sliding block and used for limiting the upper limit of the displacement of the sliding block along the vertical direction under the action of the driving force;
the second limit sensor is arranged at the lower limit position of the travel of the sliding block and used for limiting the lower limit of the displacement of the sliding block along the vertical direction under the action of the driving force;
the limiting shading sheet is arranged on the outer surface of the sliding block and faces the first limiting sensor and the second limiting sensor;
when the sliding block moves to the upper displacement limit in the vertical direction under the action of the driving force, the first limit sensor sends a detected first displacement signal to the controller, and when the sliding block moves to the lower displacement limit in the vertical direction under the action of the driving force, the second limit sensor sends a detected second displacement signal to the controller, and the controller responds to the first displacement signal or the second displacement signal to control the servo motor to stop running.
In a second aspect, an embodiment of the present application further provides a pressure control method, which is applied to the pressure control device, where the pressure control method includes:
determining a pressure set point for a workpiece to be processed;
determining a given movement displacement corresponding to the given pressure value based on a correspondence between the pressure value and the movement displacement of the transmission mechanism, and generating a driving signal based on the given movement position;
transmitting a driving signal to the driving mechanism to control the driving mechanism to provide a driving force in a vertical direction for the transmission mechanism;
determining the movement displacement of the transmission mechanism under the action of the driving force;
acquiring an actual pressure value applied to a workpiece to be processed by a floating mechanism in a vertical direction, wherein the actual pressure value is obtained by measurement from a pressure sensor;
the driving mechanism is controlled to act based on the displacement and the actual pressure value.
Optionally, the drive mechanism comprises: a servo motor, wherein the step of determining the displacement of the transmission under the action of the driving force comprises: the measured displacement is obtained from the encoder of the servo motor.
Optionally, the step of controlling the actuation of the drive mechanism based on the displacement of the movement and the actual pressure value comprises:
when the actual pressure value reaches the pressure given value, generating a stop control signal;
a stop control signal is sent to the drive mechanism to control the drive mechanism to stop operating.
Optionally, the pressure control method compares the actual pressure value with the pressure setpoint by:
determining an absolute value of a difference between the actual pressure value and the pressure set point;
if the absolute value is not greater than the set threshold value, determining that the actual pressure value reaches the pressure given value;
if the absolute value is greater than the set threshold, it is determined that the actual pressure value does not reach the pressure set point, so as to continue to control the driving mechanism to provide driving force for the transmission mechanism, so that the actual pressure value reaches the pressure set point.
Optionally, the pressure control method further comprises:
and changing the moving speed of the transmission mechanism according to the approaching degree of the actual pressure value and the pressure set value.
The application discloses a pressure control device and pressure control method, the pressure control device includes: the device comprises a driving mechanism, a transmission mechanism, a floating mechanism, a pressure sensor and a controller; the controller sends a drive signal to the drive mechanism; the driving mechanism provides a driving force in a vertical direction to the transmission mechanism based on the driving signal, so that the transmission mechanism moves in the vertical direction; the transmission mechanism is connected to the floating mechanism, and transmits the driving force provided by the driving mechanism to the floating mechanism, so that the floating mechanism applies pressure to a workpiece to be processed in the vertical direction; the pressure sensor measures an actual pressure value applied to the workpiece to be processed and sends the measured actual pressure value to the controller; the controller determines a movement displacement of the transmission mechanism and controls the driving mechanism to act based on the movement displacement and the actual pressure value. According to the pressure control device and the pressure control method, the accuracy of the pressure applied to the wafer in the processing process is guaranteed, and the surface quality and the yield of the finished wafer are improved.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the embodiments of the application. The objectives and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic structural diagram of a pressure control device according to an embodiment of the present application.
Fig. 2 shows a second schematic structural diagram of the pressure control device according to the embodiment of the present application.
Fig. 3 shows a schematic flow chart of a pressure control method according to an embodiment of the present application.
Fig. 4 shows a second flowchart of the pressure control method according to the embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present disclosure, the terms "first," "second," and the like are used merely to distinguish the descriptions and are not to be construed as indicating or implying relative importance.
In order to improve accuracy of pressure applied to a polishing object, the present application proposes a pressure control device, referring to fig. 1, fig. 1 shows a schematic structural diagram of a pressure control device provided in an embodiment of the present application; fig. 2 shows a second schematic structural diagram of the pressure control device according to the embodiment of the present application, as shown in fig. 1 and fig. 2, where the pressure control device includes: a driving mechanism 1, a transmission mechanism 2, a floating mechanism 3, a pressure sensor 4 and a controller 9.
The controller 9 sends a drive signal to the drive mechanism 1; the driving mechanism 1 supplies a driving force in the vertical direction to the transmission mechanism 2 based on the driving signal so that the transmission mechanism 2 moves in the vertical direction; the transmission mechanism 2 is connected to the floating mechanism 3, and transmits the driving force provided by the transmission mechanism 2 to the floating mechanism 3 so that the floating mechanism 3 applies pressure to the workpiece to be machined in the vertical direction; the pressure sensor 4 measures an actual pressure value applied to the workpiece to be processed and sends the measured actual pressure value to the controller 9; the controller 9 determines the displacement of the movement of the transmission mechanism 2 and controls the actuation of the driving mechanism 1 based on the displacement of the movement and the actual pressure value.
Referring to fig. 1, in an embodiment, a driving mechanism 1 may include: a servo motor 10, a screw 11 and a screw nut 12; the servo motor 10 is connected to the lead screw 11 to provide a driving force to the lead screw 11 based on a driving signal; a lead screw nut 12 is provided on the lead screw 11, the lead screw nut 12 being connected to the transmission mechanism 2, and transmitting a driving force provided by the servo motor 10 to the transmission mechanism 2 to drive the transmission mechanism 2 to move in the vertical direction.
The transmission mechanism 2 may comprise a slider 7 and a transmission rod 8; one end of the transmission rod 8 is connected to the screw nut 12, the other end of the transmission rod 8 is connected to the floating mechanism 3, and the sliding block 7 is arranged at one end of the transmission rod 8; the transmission rod 8 moves based on the driving force transmitted from the lead screw nut 12 to drive the transmission rod 8 to move in the vertical direction.
Referring to fig. 1, the pressure control apparatus of the present application may further include: the first limit sensor 5, the second limit sensor 6 and the limit shading sheet; the first limit sensor 5 is fixed at the upper limit position of the travel of the sliding block and is used for limiting the upper limit of the distance of the sliding block moving along the vertical direction under the action of the driving force; the second limit sensor 6 is fixed at the lower limit position of the travel of the sliding block and is used for limiting the lower limit of the distance of the sliding block moving along the vertical direction under the action of the driving force; the limiting shading sheet is arranged on the sliding block and faces the first limiting sensor 5 and the second limiting sensor 6 and is used for cooperating with the first limiting sensor 5 and the second limiting sensor 6 to act, so that the effect of limiting the moving distance of the sliding block in the vertical direction is achieved.
For example, when the slider moves to the upper displacement limit in the vertical direction by the driving force, the first limit sensor transmits the detected first displacement signal to the controller, and when the slider moves to the lower displacement limit in the vertical direction by the driving force, the second limit sensor transmits the detected second displacement signal to the controller, and the controller controls the servo motor to stop operating in response to the first displacement signal or the second displacement signal.
Referring to fig. 2, the encoder of the servo motor 10 in the pressure control device of the present application is also used to measure the movement displacement of the transmission mechanism 2 and send the measured movement position to the controller 9.
Referring to fig. 3, fig. 3 shows a schematic flow chart of a pressure control method provided in an embodiment of the present application, where the method steps are applied to a pressure control device of the present application, and specifically, the pressure control method may be performed in the pressure control device, where the pressure control method includes:
step 101, determining a pressure given value aiming at a workpiece to be processed.
In the step, before determining a pressure given value for a workpiece to be processed, the controller needs to detect the position of the transmission mechanism, send a driving signal to the driving mechanism based on the position of the transmission mechanism so as to control the transmission mechanism to return to a reference position, and then control the transmission mechanism to drive the floating mechanism to be positioned to a waiting position. Here, the reference position may refer to an upper limit position of a stroke of the slider, the waiting position may be a position where a lower surface of the floating mechanism is just in contact with a surface of a workpiece to be machined, and the driving mechanism may be driven to move based on a vertical distance from the slider to the lower surface of the floating mechanism.
The workpiece to be machined comprises a plurality of machining stages, the plurality of machining stages of the workpiece to be machined and the pressure given values corresponding to the machining stages are prestored in the controller, and the current machining stage and the pressure given value corresponding to the current machining stage can be determined before step 101.
Step 102, based on the corresponding relation between the pressure value and the movement displacement of the transmission mechanism, determining a given movement displacement corresponding to the pressure given value, and generating a driving signal based on the given movement position.
In this step, the transmission mechanism includes a slider and a transmission rod, in this embodiment, when the obtained pressure set value required by the workpiece to be processed in the current processing stage is obtained, the controller determines a given movement displacement of the slider based on the correspondence relation, and generates a driving signal (such as a rotation speed of the servo motor) for the driving mechanism based on the given movement displacement, so as to control the slider to move by the given movement displacement.
Step 103, a driving signal is sent to the driving mechanism to control the driving mechanism to provide the driving force in the vertical direction for the transmission mechanism.
In this step, the driving mechanism includes: the servo motor provides driving force for the screw rod based on the driving signal to control the screw rod to rotate, so that the screw rod nut is driven to move.
Step 104, determining the movement displacement of the transmission mechanism under the action of the driving force.
In the step, a screw rod is connected to a transmission mechanism, the transmission mechanism comprises a sliding block and a transmission rod, the screw rod rotates to drive a screw rod nut, the screw rod nut drives the sliding block and the transmission rod to move in the vertical direction to generate movement displacement, and the transmission rod is connected with a floating mechanism, so that the floating mechanism is driven to apply pressure to a workpiece to be processed; in the displacement process of the sliding block, an encoder in the servo motor acquires the movement displacement of the transmission mechanism in real time.
In the embodiment of the application, the actual measurement value of the encoder in the servo motor can be utilized to calculate the movement displacement of the transmission mechanism based on the reduction ratio and the wire distance.
And 105, acquiring the measured actual pressure value applied to the workpiece to be processed by the floating mechanism in the vertical direction from the pressure sensor.
In this step, the pressure sensor may be disposed between the transmission mechanism and the floating mechanism, or may be disposed below the floating mechanism, and the method for calculating the pressure corresponding to the difference in the positions where the pressure sensor is disposed is also different.
And 106, controlling the action of the driving mechanism based on the movement displacement and the actual pressure value.
In this step, the servo motor-based encoder transmits the acquired movement displacement of the slider to the controller, and the controller controls the operation of the driving mechanism based on the actual pressure value fed back by the pressure sensor and the acquired movement displacement of the slider.
Referring to fig. 4, fig. 4 shows a second flowchart of the pressure control method according to the embodiment of the present application. In an alternative embodiment, the step S106 controls the driving mechanism to operate based on the movement displacement and the actual pressure value, including:
s1061, when the actual pressure value reaches the pressure given value, generating a stop control signal. Here, if the actual pressure value does not reach the pressure set point, the drive mechanism is controlled to continue to operate.
And S1062, sending a stop control signal to the driving mechanism to control the driving mechanism to stop running.
The pressure control method of the present application also compares the actual pressure value with the pressure set point by:
determining an absolute value of a difference between the actual pressure value and the pressure setpoint;
if the absolute value is not greater than a set threshold, determining that the actual pressure value reaches the pressure given value;
if the absolute value is greater than the set threshold, determining that the actual pressure value does not reach the pressure given value, and continuously controlling the driving mechanism to provide driving force for the transmission mechanism so that the actual pressure value reaches the pressure given value.
In a preferred embodiment of the present application, the stop control signal is generated when the actual pressure value reaches the pressure set point in step S1061 described above.
Further, when the absolute value of the difference between the pressure control value and the actual pressure value is greater than the set threshold value, step S1061 is continued to be performed.
The pressure control method further includes: and changing the moving speed of the transmission mechanism according to the approaching degree of the actual pressure value and the pressure set value.
In one embodiment of the present application, if the actual pressure value is very close to the given value (e.g., the difference between the actual pressure value and the given value is smaller than the set value), the moving speed of the transmission mechanism is controlled to be reduced; if the actual pressure value and the given value are greatly different (for example, the difference value between the actual pressure value and the given value is larger than or equal to the set value), the moving speed of the transmission mechanism is controlled to be increased.
In summary, the pressure control device and the pressure control method provided in the present embodiment measure the pressure in real time by the pressure sensor and adjust the pressure applied to the workpiece in real time. Therefore, the problem that the pressure can not be accurately controlled in real time by the traditional device is solved, and the accuracy of the pressure applied to the workpiece to be processed in the processing process is ensured.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Finally, it should be noted that: the foregoing examples are merely illustrative of specific embodiments of the present application, and are not intended to limit the scope of the present application, although the present application is described in detail with reference to the foregoing examples, it will be understood by those skilled in the art that: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or make equivalent substitutions for some of the technical features within the technical scope of the disclosure of the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (9)
1. A pressure control device, characterized in that the pressure control device comprises: the device comprises a driving mechanism, a transmission mechanism, a floating mechanism, a pressure sensor and a controller;
the controller sends a drive signal to the drive mechanism;
the driving mechanism provides a driving force in a vertical direction to the transmission mechanism based on the driving signal, so that the transmission mechanism moves in the vertical direction;
the transmission mechanism is connected to the floating mechanism, and transmits the driving force provided by the driving mechanism to the floating mechanism, so that the floating mechanism applies pressure to a workpiece to be processed in the vertical direction;
the pressure sensor measures an actual pressure value applied to the workpiece to be processed and sends the measured actual pressure value to the controller;
the controller determines the current processing stage of the workpiece to be processed, and a pressure given value and a given movement displacement corresponding to the current processing stage;
the controller determines the movement displacement of the transmission mechanism and controls the action of the driving mechanism based on the movement displacement and the actual pressure value;
wherein the controller is further configured to:
controlling the driving mechanism to control the transmission mechanism to move according to a driving signal corresponding to a given movement displacement;
and when the actual pressure value reaches the pressure given value, generating a stop control signal, and sending the stop control signal to the driving mechanism to control the driving mechanism to stop running.
2. The pressure control device of claim 1, wherein the drive mechanism comprises: the servo motor, the lead screw and the lead screw nut;
the servo motor is connected to the lead screw to provide the driving force to the lead screw based on the driving signal;
the screw nut is arranged on the screw, and is also connected to the transmission mechanism, so that the driving force provided by the servo motor is transmitted to the transmission mechanism to drive the transmission mechanism to move in the vertical direction.
3. The pressure control device of claim 2, wherein the transmission mechanism comprises: a slide block and a transmission rod;
one end of the transmission rod is connected to the lead screw nut, the other end of the transmission rod is connected to the floating mechanism, and the sliding block is arranged at one end of the transmission rod;
the transmission rod moves based on the driving force transmitted by the screw nut so as to drive the sliding block to move in the vertical direction.
4. The pressure control device of claim 2, wherein an encoder of the servo motor measures a movement displacement of the transmission mechanism and transmits the measured movement displacement to the controller.
5. A pressure control device according to claim 3, characterized in that the pressure control device further comprises: the first limit sensor, the second limit sensor and the limit shading sheet;
the first limit sensor is arranged at the upper limit position of the travel of the sliding block and used for limiting the upper limit of the displacement of the sliding block along the vertical direction under the action of the driving force;
the second limit sensor is arranged at the lower limit position of the travel of the sliding block and used for limiting the lower limit of the displacement of the sliding block moving along the vertical direction under the action of the driving force;
the limiting shading sheet is arranged on the outer surface of the sliding block and faces the first limiting sensor and the second limiting sensor;
when the sliding block moves to the displacement upper limit in the vertical direction under the action of the driving force, the first limit sensor sends a detected first displacement signal to the controller, and when the sliding block moves to the displacement lower limit in the vertical direction under the action of the driving force, the second limit sensor sends a detected second displacement signal to the controller, and the controller responds to the first displacement signal or the second displacement signal to control the servo motor to stop running.
6. A pressure control method, applied to the pressure control apparatus according to claim 1, comprising:
determining a pressure set point and a given displacement for the workpiece to be machined;
determining a given movement displacement corresponding to the pressure given value based on a correspondence between a pressure value and a movement displacement of the transmission mechanism, and generating the driving signal based on the given movement displacement;
transmitting the driving signal to the driving mechanism to control the driving mechanism to provide the driving force in the vertical direction for the transmission mechanism;
determining the movement displacement of the transmission mechanism under the action of the driving force;
acquiring an actual pressure value applied to the workpiece to be processed by the floating mechanism in the vertical direction, wherein the actual pressure value is obtained by measurement from the pressure sensor;
controlling the driving mechanism to act based on the movement displacement and the actual pressure value;
wherein the step of controlling the action of the driving mechanism by the movement displacement and the actual pressure value comprises the following steps:
generating a stop control signal when the actual pressure value reaches the pressure given value;
and sending the stop control signal to the driving mechanism to control the driving mechanism to stop running.
7. The pressure control method according to claim 6, wherein the driving mechanism includes: a servo motor is arranged on the upper surface of the shell,
wherein the step of determining the movement displacement of the transmission under the action of the driving force comprises: and acquiring the measured movement displacement from an encoder of the servo motor.
8. The pressure control method according to claim 6, characterized in that the actual pressure value is compared with the pressure given value by:
determining an absolute value of a difference between the actual pressure value and the pressure setpoint;
if the absolute value is not greater than a set threshold, determining that the actual pressure value reaches the pressure given value;
if the absolute value is greater than the set threshold, determining that the actual pressure value does not reach the pressure given value, and continuously controlling the driving mechanism to provide driving force for the transmission mechanism so that the actual pressure value reaches the pressure given value.
9. The pressure control method according to claim 6, characterized in that the pressure control method further comprises:
and controlling the moving speed of the transmission mechanism according to the approaching degree of the actual pressure value and the pressure given value.
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| WO2021022866A1 (en) * | 2019-08-07 | 2021-02-11 | 山东大学 | Long-stroke high-precision micro-nano motion servo feed system and control method |
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| JP2002313765A (en) * | 2001-04-17 | 2002-10-25 | Sony Corp | Brush cleaning device and control method therefor |
| US7125313B2 (en) * | 2003-02-25 | 2006-10-24 | Novellus Systems, Inc. | Apparatus and method for abrading a workpiece |
| TWI224825B (en) * | 2003-06-23 | 2004-12-01 | Horng Terng Automation Co Ltd | Driving and controlling method of pressure detection for picking/placing the working piece in semiconductor packaging and inspecting equipment |
| CN102229093B (en) * | 2011-07-01 | 2013-09-18 | 中国电子科技集团公司第四十五研究所 | Lifting and pressing mechanism applied to wafer polishing equipment |
| CN105945716B (en) * | 2016-05-04 | 2017-09-19 | 中国电子科技集团公司第四十五研究所 | Polishing head feed pressurizing polishing method, controller and feed pressurizing mechanism |
| CN108565228A (en) * | 2018-01-02 | 2018-09-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | A kind of wafer pressure control device, method and system |
| CN112677019B (en) * | 2020-12-23 | 2022-08-23 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Pressure detection device and polishing equipment |
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| WO2021022866A1 (en) * | 2019-08-07 | 2021-02-11 | 山东大学 | Long-stroke high-precision micro-nano motion servo feed system and control method |
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